CN110219044A - A kind of single-crystal diamond laser marking growing method - Google Patents

A kind of single-crystal diamond laser marking growing method Download PDF

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Publication number
CN110219044A
CN110219044A CN201910434088.0A CN201910434088A CN110219044A CN 110219044 A CN110219044 A CN 110219044A CN 201910434088 A CN201910434088 A CN 201910434088A CN 110219044 A CN110219044 A CN 110219044A
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China
Prior art keywords
crystal diamond
label
laser marking
crystalline substance
growing method
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CN201910434088.0A
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Chinese (zh)
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CN110219044B (en
Inventor
胡付生
王�琦
张天翊
张军恒
张军安
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Ningbo Crystal Diamond Technology Co ltd
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Individual
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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/362Laser etching
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0227Pretreatment of the material to be coated by cleaning or etching
    • C23C16/0245Pretreatment of the material to be coated by cleaning or etching by etching with a plasma
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • C23C16/27Diamond only
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02Elements
    • C30B29/04Diamond

Abstract

The invention discloses a kind of single-crystal diamond laser marking growing methods comprising following steps: it is brilliant that (S1) provides single-crystal diamond kind;(S2) laser marking equipment is provided, is marked to form defect on single-crystal diamond kind crystalline substance surface using laser marking equipment;(S3) impurity generated during being marked is removed;(S4) the single-crystal diamond kind crystalline substance after label is put into chemical vapor deposition growth furnace, it is passed through hydrogen and methane, ratio is 100:2 to 100:5, by pressure control in furnace in 10KPa~15KPa, controlling single-crystal diamond kind crystalline substance temperature in furnace is 700 DEG C~800 DEG C, growth time is greater than 10 hours, so that the defect that label is formed is capped and is not filled, label is formed inside single-crystal diamond to realize.Operation of the present invention is simple, and process velocity is fast, and the label for being marked, and making inside diamond is realized with a kind of cost-effective scheme can be observed by the multiplying arrangements such as magnifying glass or naked eyes.

Description

A kind of single-crystal diamond laser marking growing method
Technical field
The present invention relates to the growths of single-crystal diamond and surface to process, and is in more detail related to a kind of single-crystal diamond laser Mark growing method.
Background technique
Diamond is obtained extensive use in craftwork manufacture field due to having extremely excellent physicochemical properties. In order to meet the customization demand of user, the label such as font, trade mark can be usually added inside diamond in process.
But rough diamond can not make marks in inside, can only make marks in diamond surface, it is possible to be worn. If the regrowth after diamond surface is carved characters, polycrystalline can be generated around label, label is caused to be filled directly or wrap up, It can not be observed.
In addition, also there is also some defects for the existing method for adding label inside diamond:
1, do etching source etching diamond surface with gas to form the operation that is marked of defect excessively complicated, and it is time-consuming compared with It is long;
2, the higher cost being marked with focused ion beam processing diamond, method is complicated, takes a long time, and mark Size is restricted, generally in nanoscale or micron order, can not visually observe directly.
Summary of the invention
The purpose of the present invention is to provide a kind of single-crystal diamond laser marking growing methods, solve to a certain extent The above problem, easy to operate, process velocity is fast, is realized with a kind of cost-effective scheme and is marked inside diamond, And the label made can be observed by magnifying glass or naked eyes.
To achieve the goals above, the present invention provides a kind of single-crystal diamond laser marking growing method comprising following Step:
(S1) it is brilliant to provide single-crystal diamond kind;
(S2) laser marking equipment is provided, is carried out using the laser marking equipment on the single-crystal diamond kind crystalline substance surface Label forms defect;
(S3) impurity generated during being marked is removed;
(S4) the single-crystal diamond kind crystalline substance after label is put into chemical vapor deposition growth furnace, is passed through hydrogen and first Alkane, ratio are 100:2 to 100:5, by pressure control in furnace in 10KPa~15KPa, control single-crystal diamond kind crystalline substance temperature in furnace It is 700 DEG C~800 DEG C, growth time is greater than 10 hours, so that the defect that label is formed is capped and is not filled, thus real Label is formed inside present single-crystal diamond.
The present invention shows that carrying out processing mark forms defect in diamond using laser marking equipment, then in the table of defect Face carries out secondary epitaxy growth, and covers but be not filled with defect during the growth process, to reach the shape inside single-crystal diamond At the effect of label.Laser marking equipment is easy to operate, and process velocity is fast, is convenient for batch rapid processing.
Preferred embodiment in accordance with the present invention, the single-crystal diamond laser marking growing method of the invention are further wrapped Include step (S5):
After the growth of the single-crystal diamond kind crystalline substance after completing label, the ratio of hydrogen and methane is 100 in regulating stove: 8 to 100:13, air pressure is to 25KPa~30KPa in regulating stove, and single-crystal diamond kind crystalline substance temperature is 1100 DEG C~1300 in regulating stove DEG C, to accelerate the growth of single-crystal diamond, increase economic efficiency.
Preferred embodiment in accordance with the present invention, the step (S3) specifically includes the following steps:
(S31) the single-crystal diamond kind crystalline substance after impregnating label is heated with chloroazotic acid, removing may remaining metallic element;
(S32) brilliant with the single-crystal diamond kind after acetone ultrasonic cleaning label, remove inorganic matter that may be present;
(S33) brilliant with the single-crystal diamond kind after deionized water ultrasonic cleaning label, removing may remaining acetone;
(S34) brilliant with the single-crystal diamond kind after alcohol ultrasonic cleaning label, remove inorganic matter that may be present;
(S35) plasma etching cleaning is carried out to the single-crystal diamond kind crystalline substance after label, is generated when removing label Graphite-phase product.
Preferably, the heating soaking time in the step (S31) is 2~4 hours, in the step (S32) to institute It states in step (S35), the scavenging period of each step is 60 minutes.
Preferred embodiment in accordance with the present invention, the defect formed in the step (S2) is after 0~50 times of amplification for meat Eye is visible.
Preferably, in the step (S1), the thickness of the single-crystal diamond kind crystalline substance is greater than 0.2mm.
The above and other purposes of the present invention, feature, advantage will be further bright with attached drawing in the following detailed description Really.
Detailed description of the invention
Fig. 1 is the flow diagram of single-crystal diamond laser marking growing method according to the preferred embodiment of the invention.
Specific embodiment
In the following, being described further in conjunction with attached drawing and specific embodiment to invention, it should be noted that in not phase Under the premise of conflict, new implementation can be formed between various embodiments described below or between each technical characteristic in any combination Example.
It is described below for disclosing the present invention so that those skilled in the art can be realized the present invention.It is excellent in being described below Embodiment is selected to be only used as illustrating, it may occur to persons skilled in the art that other obvious modifications.It defines in the following description Basic principle of the invention can be applied to other embodiments, deformation scheme, improvement project, equivalent program and do not carry on the back Other technologies scheme from the spirit and scope of the present invention.
It will be understood by those skilled in the art that in exposure of the invention, term " longitudinal direction ", " transverse direction ", "upper", The orientation or position of the instructions such as "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside" Relationship is to be based on the orientation or positional relationship shown in the drawings, and is merely for convenience of description of the present invention and simplification of the description, rather than The device or element of indication or suggestion meaning must have a particular orientation, be constructed and operated in a specific orientation, therefore above-mentioned Term is not considered as limiting the invention.
It is understood that term " one " is interpreted as " at least one " or " one or more ", i.e., in one embodiment, The quantity of one element can be one, and in a further embodiment, the quantity of the element can be it is multiple, term " one " is no It can be interpreted as the limitation to quantity.
Referring to Fig. 1 of attached drawing, single-crystal diamond laser marking growing method according to the preferred embodiment of the invention will connect It is elucidated in the description got off comprising following steps:
(S1) it is brilliant to provide single-crystal diamond kind;
(S2) laser marking equipment is provided, is carried out using the laser marking equipment on the single-crystal diamond kind crystalline substance surface Label forms defect;
(S3) impurity generated during being marked is removed;
(S4) the single-crystal diamond kind crystalline substance after label is put into chemical vapor deposition growth furnace, is passed through hydrogen and first Alkane, ratio are 100:2 to 100:5, by pressure control in furnace in 10KPa~15KPa, control single-crystal diamond kind crystalline substance temperature in furnace It is 700 DEG C~800 DEG C, growth time is greater than 10 hours.
Experiment shows that single-crystal diamond in temperature is 700 DEG C~800 DEG C, and air pressure is horizontal under conditions of being 10KPa~15KPa Preferable to epitaxial growth, single crystal grain is larger, and growth rate is slower, less than 10 μm/h, will not the defect that is formed of filling-tag, Polycrystalline diamond will not be generated, so that the defect that label is formed is capped and is not filled, to realize in single-crystal diamond Inside forms label.
It is easily understood that completing the single-crystal diamond after label can be, but not limited to for jewel, diamond cutter, gold The fields such as hard rock wire drawing die.
The present invention shows that carrying out processing mark forms defect in diamond using laser marking equipment, then in the table of defect Face carries out secondary epitaxy growth, and covers but be not filled with defect during the growth process, to reach the shape inside single-crystal diamond At the effect of label.
Preferably, in the step (S1), surface flawless, polycrystalline, crystal form zero defect are preferentially selected, and thickness is greater than The single-crystal diamond kind crystalline substance of 0.2mm is used for subsequent processing mark, to guarantee the quality of product.
In the step (S2), the laser marking equipment can be common apparatus in the prior art, specific structure It is not repeated herein with working principle.Laser marking equipment it is easy to operate, process velocity is fast, be convenient for batch rapid processing.It is preferred that The laser marking equipment of power adjustable is selected on ground, convenient for realizing the marking of defects of different demands by regulation power.It is easy reason Solution, the defect pattern that the label is formed can be, but not limited to be font, trade mark etc., unlimited shapes and sizes.
Preferably, the defect formed in the step (S2) the amplification 0 by the simple amplification tool such as magnifying glass~ It is i.e. visible for naked eyes after 50 times.
Specifically, the step (S3) specifically includes the following steps:
(S31) the single-crystal diamond kind crystalline substance after impregnating label is heated with chloroazotic acid, removing may remaining metallic element;
(S32) brilliant with the single-crystal diamond kind after acetone ultrasonic cleaning label, remove inorganic matter that may be present;
(S33) brilliant with the single-crystal diamond kind after deionized water ultrasonic cleaning label, removing may remaining acetone;
(S34) brilliant with the single-crystal diamond kind after alcohol ultrasonic cleaning label, remove inorganic matter that may be present;
(S35) plasma etching cleaning is carried out to the single-crystal diamond kind crystalline substance after label, is generated when removing label Graphite-phase product.
Preferably, the heating soaking time in the step (S31) is 2~4 hours, in the step (S32) to institute It states in step (S35), the scavenging period of each step is 60 minutes.
Further, on the basis of above-mentioned steps, the single-crystal diamond laser marking growing method of the invention is also Including step (S5), the step (S5) is arranged after the step (S4):
After the growth of the single-crystal diamond kind crystalline substance after completing label, the ratio of hydrogen and methane is 100 in regulating stove: 8 to 100:13, air pressure is to 25KPa~30KPa in regulating stove, and single-crystal diamond kind crystalline substance temperature is 1100 DEG C~1300 in regulating stove DEG C, to accelerate the growth of single-crystal diamond, growth rate is most fast up to 50 μm/h, increases economic efficiency.
It should be understood by those skilled in the art that foregoing description and the embodiment of the present invention shown in the drawings are only used as illustrating And it is not intended to limit the present invention.The purpose of the present invention has been fully and effectively achieved.Function and structural principle of the invention exists It shows and illustrates in embodiment, under without departing from the principle, embodiments of the present invention can have any deformation or modification.

Claims (6)

1. a kind of single-crystal diamond laser marking growing method, which comprises the following steps:
(S1) it is brilliant to provide single-crystal diamond kind;
(S2) laser marking equipment is provided, is marked using the laser marking equipment on the single-crystal diamond kind crystalline substance surface Form defect;
(S3) impurity generated during being marked is removed;
(S4) the single-crystal diamond kind crystalline substance after label is put into chemical vapor deposition growth furnace, is passed through hydrogen and methane, Ratio is 100:2 to 100:5, and by pressure control in furnace in 10KPa~15KPa, controlling single-crystal diamond kind crystalline substance temperature in furnace is 700 DEG C~800 DEG C, growth time is greater than 10 hours.
2. single-crystal diamond laser marking growing method according to claim 1, which is characterized in that further comprise step (S5):
Complete label after single-crystal diamond kind crystalline substance growth after, in regulating stove the ratio of hydrogen and methane for 100:8 extremely 100:13, air pressure is to 25KPa~30KPa in regulating stove, and single-crystal diamond kind crystalline substance temperature is 1100 DEG C~1300 DEG C in regulating stove.
3. single-crystal diamond laser marking growing method according to claim 1 or 2, which is characterized in that the step (S3) specifically includes the following steps:
(S31) the single-crystal diamond kind crystalline substance after impregnating label is heated with chloroazotic acid, removing may remaining metallic element;
(S32) brilliant with the single-crystal diamond kind after acetone ultrasonic cleaning label, remove inorganic matter that may be present;
(S33) brilliant with the single-crystal diamond kind after deionized water ultrasonic cleaning label, removing may remaining acetone;
(S34) brilliant with the single-crystal diamond kind after alcohol ultrasonic cleaning label, remove inorganic matter that may be present;
(S35) plasma etching cleaning is carried out to the single-crystal diamond kind crystalline substance after label, the stone generated when removing label Black phase product.
4. single-crystal diamond laser marking growing method according to claim 3, which is characterized in that in the step (S31) heating soaking time in is 2~4 hours, in the step (S32) to the step (S35), each step it is clear Washing the time is 60 minutes.
5. single-crystal diamond laser marking growing method according to claim 1 or 2, which is characterized in that in the step (S2) defect formed in is visible for naked eyes after 0~50 times of amplification.
6. single-crystal diamond laser marking growing method according to claim 1 or 2, which is characterized in that in the step (S1) in, the thickness of the single-crystal diamond kind crystalline substance is greater than 0.2mm.
CN201910434088.0A 2019-05-23 2019-05-23 Laser marking growth method of single crystal diamond Active CN110219044B (en)

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Application Number Priority Date Filing Date Title
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CN110219044A true CN110219044A (en) 2019-09-10
CN110219044B CN110219044B (en) 2021-07-06

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170261855A1 (en) * 2016-03-10 2017-09-14 Uab Research Foundation Methods for preparing encapsulated markings on diamonds
CN108103571A (en) * 2018-01-11 2018-06-01 宁波晶钻工业科技有限公司 A kind of single-crystal diamond preparation facilities and method
CN108373345A (en) * 2018-01-16 2018-08-07 华北水利水电大学 Preprocess method before a kind of coating of laser marking blade
CN108582502A (en) * 2018-05-07 2018-09-28 江苏锋泰工具有限公司 Diamond saw blade and preparation method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20170261855A1 (en) * 2016-03-10 2017-09-14 Uab Research Foundation Methods for preparing encapsulated markings on diamonds
CN108103571A (en) * 2018-01-11 2018-06-01 宁波晶钻工业科技有限公司 A kind of single-crystal diamond preparation facilities and method
CN108373345A (en) * 2018-01-16 2018-08-07 华北水利水电大学 Preprocess method before a kind of coating of laser marking blade
CN108582502A (en) * 2018-05-07 2018-09-28 江苏锋泰工具有限公司 Diamond saw blade and preparation method thereof

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Inventor after: Zhang Junan

Inventor after: Hu Fusheng

Inventor after: Wang Qi

Inventor after: Zhang Tianyi

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Address after: 315200 No. 777, Zhong Guan Xi Road, Zhuang City Street, Zhenhai District, Ningbo, Zhejiang.

Patentee after: Ningbo Crystal Diamond Technology Co.,Ltd.

Address before: 315200 No. 777, Zhong Guan Xi Road, Zhuang City Street, Zhenhai District, Ningbo, Zhejiang.

Patentee before: Ningbo Jingduan Industrial Technology Co.,Ltd.

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Country or region after: China

Address before: 315200 No. 777, Zhong Guan Xi Road, Zhuang City Street, Zhenhai District, Ningbo, Zhejiang.

Patentee before: Ningbo Crystal Diamond Technology Co.,Ltd.

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