CN110218854B - Temperature-supplementing and temperature-regulating annealing furnace system - Google Patents

Temperature-supplementing and temperature-regulating annealing furnace system Download PDF

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Publication number
CN110218854B
CN110218854B CN201910159558.7A CN201910159558A CN110218854B CN 110218854 B CN110218854 B CN 110218854B CN 201910159558 A CN201910159558 A CN 201910159558A CN 110218854 B CN110218854 B CN 110218854B
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temperature
vacuum
bin
cooling
pumping
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CN110218854A (en
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双著杰
刘智武
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Zhejiang Tianqi Cup Industry Co ltd
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Zhejiang Tianqi Cup Industry Co ltd
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    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D1/00General methods or devices for heat treatment, e.g. annealing, hardening, quenching or tempering
    • C21D1/74Methods of treatment in inert gas, controlled atmosphere, vacuum or pulverulent material
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D11/00Process control or regulation for heat treatments
    • CCHEMISTRY; METALLURGY
    • C21METALLURGY OF IRON
    • C21DMODIFYING THE PHYSICAL STRUCTURE OF FERROUS METALS; GENERAL DEVICES FOR HEAT TREATMENT OF FERROUS OR NON-FERROUS METALS OR ALLOYS; MAKING METAL MALLEABLE, e.g. BY DECARBURISATION OR TEMPERING
    • C21D9/00Heat treatment, e.g. annealing, hardening, quenching or tempering, adapted for particular articles; Furnaces therefor

Abstract

The invention relates to the field of electronic circuit crystal parts, in particular to a temperature-supplementing and temperature-regulating annealing furnace system. The utility model provides a benefit temperature tempering annealing furnace system, includes furnace main part and complementary thermoregulator, complementary thermoregulator is connected through compensation breather pipe and furnace main part, wherein: the complementary thermoregulator comprises a thermoregulation cabin, a condensation vacuum-pumping tube, a mechanical vacuum-pumping tube, a condensation vacuum-pumping pump and a mechanical vacuum-pumping pump; the temperature adjusting bin is connected with the furnace main body through a compensation vent pipe at the head end, an electric heating piece stack is arranged in the temperature adjusting bin, the tail end of the temperature adjusting bin is communicated with a condensation vacuum-pumping pipe, the tail end of the condensation vacuum-pumping pipe is downwards connected with a condensation vacuum-pumping pump, the mechanical vacuum-pumping pipe is connected with a mechanical vacuum-pumping pump, the inlet of the mechanical vacuum-pumping pipe is connected with the condensation vacuum-pumping pipe, and the compensation vent pipe is connected with the condensation vacuum-pumping pipe through the temperature adjusting bin and communicated with the condensation vacuum-pumping pipe to form a vacuum-pumping passage; the front wall of the temperature adjusting bin is welded or hinged with a temperature reducing bin.

Description

Temperature-supplementing and temperature-regulating annealing furnace system
Technical Field
The invention relates to the field of electronic circuit crystal parts, in particular to a temperature supplementing and adjusting annealing furnace system.
Background
The temperature compensation crystal oscillator is a quartz crystal oscillator, and compensates the crystal oscillation frequency change generated by the ambient temperature change through an additional temperature compensation circuit in an internal temperature compensation crystal oscillator chip, thereby realizing high-precision frequency temperature stability. The temperature compensation crystal oscillator is widely applied to various communication devices, such as smart phones, wireless interphones, wireless communication base stations and the like; the vacuum annealing furnace in the prior art has problems in tightness and low automation degree, but if braking is added, such as a German Unitemp vacuum rapid annealing furnace, a French Annealsys high-temperature vacuum annealing furnace and the like, the price is too high, so that an improved assembly capable of being added by self on the existing basis is needed, the automation is increased, and the enterprise cost is not increased.
Disclosure of Invention
The invention aims to provide a temperature supplementing and adjusting annealing furnace system, which realizes automation, maximizes the sealing degree, increases the safety degree, has low cost and can be conveniently transformed and added.
The invention is realized by the following technical scheme: the utility model provides a benefit temperature tempering annealing furnace system, includes stove main part and complementary thermoregulator, complementary thermoregulator is connected with the stove main part through compensating breather pipe, wherein: the complementary thermoregulator comprises a thermoregulation cabin, a condensation vacuum-pumping tube, a mechanical vacuum-pumping tube, a condensation vacuum-pumping pump and a mechanical vacuum-pumping pump;
the temperature adjusting bin is connected with the furnace main body through a compensation vent pipe at the head end, an electric heating piece stack is arranged in the temperature adjusting bin, the tail end of the temperature adjusting bin is communicated with a condensation vacuum-pumping pipe, the tail end of the condensation vacuum-pumping pipe is downwards connected with a condensation vacuum-pumping pump, the mechanical vacuum-pumping pipe is connected with a mechanical vacuum-pumping pump, the inlet of the mechanical vacuum-pumping pipe is connected with the condensation vacuum-pumping pipe, and the compensation vent pipe is connected with the condensation vacuum-pumping pipe through the temperature adjusting bin and is communicated with the condensation vacuum-pumping pump to form a vacuum-pumping passage; a cooling bin is welded or hinged on the front bin wall of the temperature adjusting bin, a water-cooling circulating stack is suspended in the cooling bin, and the water-cooling circulating stack is connected with a water-cooling circulating pump arranged outside the cooling bin through a water circulating pipe;
the condensation vacuum-pumping pipe is provided with a bidirectional air valve, and the bidirectional air valve is provided with a flow controller;
the front cabin door of the furnace main body is provided with an adjusting cabin cover, and the adjusting cabin cover comprises an additional cabin cover plate, a main moving rail, a sealing cover cross frame and a sealing cover;
the cabin cover plate is additionally provided with a cabin door, the cabin cover plate is additionally provided with two main moving rails which are arranged in parallel at the left side or the upper side and the lower side of the cabin door, a cover cross frame is transversely erected between the two main moving rails, a pressing piece arranging groove is arranged on the cover cross frame, at least 2 suckers and 1 lifting cylinder are suspended in the pressing piece arranging groove, 1 pressing cylinder is arranged, the bottom of each sucker adsorbs the cover, a shaft of the lifting cylinder is riveted with the cover and controls the cover to lift on the surface of the cabin door, and a rubber pressure head is arranged at the bottom of a cylinder shaft of the pressing cylinder and is attached to the surface of the cabin door; the micro-motor sliding frames are arranged at the positions, matched with the main moving rail, of the bottoms of the two sides of the sealing cover transverse frame, erected in the sliding rail grooves of the main moving rail and move in the main moving rail along with the sliding rail grooves to drive the sealing cover transverse frame to move up and down on the main moving rail;
the cooling bin comprises an outward-opened bin cover, an outer vertical wall and a bottom wall, a cooling port is formed in the center of the bottom wall and is communicated with the temperature adjusting bin, a water circulation interface of a water-cooling circulation stack is formed in one side of the outer vertical wall, a T-shaped frame is arranged on the bottom wall in the cooling port edge in a laminating mode, a suspension pull plate is arranged at the bottom of the water-cooling circulation stack in the cooling bin in a cushioning mode, and a vertical telescopic rack rod is vertically arranged on one side of the outward-opened bin cover at the front end of the suspension pull plate.
Preferably, the condensation vacuum-pumping tube is provided with a bidirectional air valve at the rear of the joint of the inlet of the mechanical vacuum-pumping tube and the condensation vacuum-pumping tube, and the bidirectional air valve is provided with a flow controller. When the normal temperature control is needed, the bidirectional gas valve can be controlled at the rear end to limit the cooling gas from the condensation vacuum tube, and only the normal temperature gas is actively input into the complementary temperature regulator through the mechanical vacuum tube, so that the energy is saved, or the condition of the normal temperature is needed to be regulated;
the front cabin door of the furnace main body is preferably provided with an adjusting cabin cover, the adjusting cabin cover comprises an additional cabin cover plate, main moving rails, a transverse sealing cover frame and a sealing cover, the additional cabin cover plate is provided with a cabin door, the additional cabin cover plate is provided with two main moving rails which are arranged in parallel at the left side or the upper side and the lower side of the cabin door, the transverse sealing cover frame is transversely arranged between the two main moving rails, the transverse sealing cover frame is provided with a pressing piece arranging groove, at least 2 suckers, 1 lifting cylinder and 1 pressing cylinder are suspended in the pressing piece arranging groove, the suckers adsorb the sealing cover, a crankshaft of the lifting cylinder is riveted with the sealing cover and controls the lifting of the sealing cover on the surface of the cabin door, the bottom of a cylinder shaft of the pressing cylinder is provided with a rubber pressure head, and the rubber pressure head is attached to the surface of the cabin door; the micro-motor sliding frames are arranged at the positions, matched with the main moving rail, of the bottoms of the two sides of the sealing cover transverse frame, erected in the sliding rail grooves of the main moving rail and move in the main moving rail along with the sliding rail grooves to drive the sealing cover transverse frame to move up and down on the main moving rail;
preferably, the cooling bin comprises an outward-opening bin cover, an outer vertical wall and a bottom wall, a cooling port is formed in the center of the bottom wall and communicated with the temperature adjusting bin, a water circulation port of the water-cooling circulation stack is formed in one side of the outer vertical wall, a T-shaped frame is arranged on the bottom wall in the cooling port in a fitting mode, a suspension pulling plate is arranged at the bottom of the water-cooling circulation stack in the cooling bin in a cushioning mode, and a vertical telescopic rack rod is vertically arranged at one side, facing the outward-opening bin cover, of the front end of the suspension pulling plate. The high-temperature nitrogen gas can be communicated with the temperature regulation bin through the temperature reduction port, the temperature reduction bin can be filled with the high-temperature nitrogen gas under the condition that the compensation vent pipe is completely opened, the high-temperature nitrogen gas can be cooled by water cooling through the water cooling temperature reduction circulating pile after the heating of the furnace main body is stopped, and the whole temperature reduction bin, the furnace main body and the complementary temperature regulator start to reduce the temperature under the cooling condition; t-shaped frame and suspension pull board can be so that the water-cooling circulation is piled the suspension on suspension pull board, can get in the bottom at suspension pull board and support, hang, and put the pull board and can pull out when keeping in repair or not need the circulation of cold cooling to pile to other functional group's article in the replacement, vertical flexible hack lever can provide the holding power of suspension pull board front end, after the pull action is accomplished, fix a position and the suspension is fixed.
Preferably, the outer edge of the bottom of the cabin door of the loading cabin cover plate is provided with a plurality of sensors, and the sensors at least comprise an airtight sensor and a temperature sensor.
Preferably, the head and the tail of the cover sealing cross frame are also provided with limiting lock cylinders. To prevent slight sliding and movement of the closure cross-piece, a "lock" is provided to lock the position.
Preferably, monitoring grating sensors are arranged at the top and the bottom of the main moving rail. In order to monitor the top movement range and the bottom movement range of the main moving rail, the grating sensor is used for sensing, and once the main moving rail is not moved to the position standard position or exceeds the standard position, the grating sensor can quickly respond to a control system to carry out effective monitoring and compensation.
Preferably, a micro-distance moving rail is further arranged on the inner side of the main moving rail, a micro-distance moving electric sliding plate is arranged in a sliding rail groove of the micro-distance moving rail, and the micro-distance moving electric sliding plate drives the cover transverse frame to perform micro-distance movement on the micro-distance moving rail. The micro-distance moving rail is mainly used for fine adjustment when the air tightness problem is generated, and the conditions of complete sealing, leakage hole generation when the micro-distance moving rail does not move any more and the like are achieved.
Preferably, the sealing cover is a stainless steel 304 plate or a high-temperature-resistant explosion-proof glass plate.
Preferably the cover area is larger than the pod door.
Preferably, an electric heating piece stack and a water-cooling circulation stack are arranged in the temperature adjusting bin.
Preferably, the water-cooling circulation stack is connected with a corrugated metal hose.
Preferably, a circle of sealing ring is attached to the edge of the cabin door. The air-tight ring can be a perfluorinated high-temperature resistant rubber ring to increase air tightness, and the air-tight ring just seals the surrounding position of the combination of the two main parts when the cover covers the cabin door.
Preferably, a temporary storage gas cabin is arranged at the bottom of the temperature adjusting cabin and is connected with the temperature adjusting cabin through a two-phase vent pipe. The temporary storage gas cabin can temporarily store some hot nitrogen so as to save and recycle the nitrogen better and save energy.
Preferably, the compensation vent pipe comprises 1 one-way pipe and 1 two-way pipe, the one-way pipe is provided with a one-way air valve, nitrogen gas is managed, and only nitrogen gas entering or only common air mixing entering into the furnace main body is controlled.
Preferably, a plurality of temperature sensors are arranged in the temperature adjusting bin. Temperature monitoring is performed.
The invention has the beneficial effects that: the temperature-supplementing and temperature-regulating annealing furnace system has the advantages that automation is realized, the sealing degree is maximized, the safety degree is increased, the cost is low, the manufacturing cost is low, modification and addition can be conveniently carried out, various sensors are used for carrying out accurate monitoring, the air tightness is prevented from being low, detail regulation can be carried out, the structural strength is high, the system is suitable for long-time operation, firmness and durability are realized, a door opening mode of up-and-down movement is utilized to replace a side door of a traditional small-sized vacuum annealing furnace, the door opening mode is more convenient than the traditional door opening mode, and the sealing performance is better; the complementary temperature regulator is additionally arranged to carry out supplementary temperature regulation, the temperature can be quickly stabilized, the temperature control is improved, the temperature regulation bin 4 of the complementary temperature regulator is additionally arranged to carry out quick cooling by water cooling, excessive electric energy cost is not consumed by cooling, nitrogen gas does not need to be pumped and then a cabin door is opened to carry out long-time natural cooling, thermal pollution and nitrogen gas leakage pollution are avoided, the production environment is purified, the comfort level of workers is improved, particularly, in the production environment of aseptic electronic parts, the temperature of the production environment cannot be influenced, a large-amplitude air conditioner is required to carry out temperature regulation, the production electric power is saved, the electric power for regulating the temperature of the production environment is saved, the production cost is greatly reduced, hot water for recovering heat can also be used for other production, prestored gas with temperature is prepared for temperature regulation, the automatic operation can be realized, the safety degree is high, the cost is low, the function can be conveniently improved and added in the old van type vacuum annealing furnace, and various sensors are used for carrying out accurate monitoring; the complementary thermoregulator that extra setting can be rapid carries out the temperature regulation of complementary formula, can rapid stable temperature, improve temperature control, complementary thermoregulator's the storehouse that adjusts the temperature and additionally set up and to utilize the water-cooling to carry out more quick cooling, and the cooling does not consume too much electric energy cost, need not take out nitrogen gas and open the hatch door again and carry out long-time natural cooling, can not cause thermal pollution and nitrogen gas to reveal the pollution, purify the production environment, improve workman's comfort level, especially under the production environment of aseptic electronic component, the production ambient temperature can not influence, need the air conditioner to adjust the temperature by a wide margin, not only save the production electric power, the electric power of production ambient temperature regulation has been saved again, very big reduction in production cost, the hot water of recovery heat also can be used as other productions and uses, and the prestore gas that has the temperature prepared carries out the replenishment of adjusting the temperature, can automize, the degree of safety is high, at the end of low cost, can be more convenient the old van vacuum annealing furnace that reforms and adds uses this function in old and old van, it carries out accurate control to have multiple inductor, direct real van vacuum annealing furnace.
Drawings
Fig. 1 is an overall view.
FIG. 2 is an assembly view of a complementary thermostat and a cooling chamber.
Fig. 3 is a perspective view of the cooling bin.
Fig. 4 is a sectional view of the cooling chamber.
FIG. 5 is a combination view of the structure of the adjustment cap and the furnace body.
Fig. 6 is a view showing the structure of the regulating cap.
In the figure: in the figure: the device comprises a furnace main body 1, a compensation vent pipe 2, a complementary temperature regulator 3, a temperature regulation bin 4, a condensation vacuum-pumping pipe 5, a mechanical vacuum-pumping pipe 6, a condensation vacuum-pumping pump 7, a mechanical vacuum-pumping pump 8, an electric heating sheet stack 9, a temporary storage gas bin 10, a one-way pipe 11, a two-way pipe 12, a temperature sensor 13, a front bin door 14, a cooling bin 15, a regulation bin cover 16, a bin door 17, a two-way air valve 18 and a water-cooling circulating pump 19, a front bin wall 101 water-cooling circulating stack 102, an outer open bin cover 103, an outer vertical wall 104 and a bottom wall 105, a cooling port 106, a water circulating interface 107, a T-shaped frame 108, a suspension pull plate 109 and a vertical telescopic frame rod 110, wherein a bin cover plate 201, a main moving rail 202, a cover transverse frame 203, a sealing cover 204, a pressing piece setting groove 206, a suction disc 207, a lifting cylinder 208, a pressing cylinder 209, a micromotor carriage 210, a sliding rail shaft 211, a sensor 212, a limiting lock cylinder 213, a monitoring grating sensor 214, a microspur moving rail 215 and an electric sliding plate 216.
Detailed Description
The technical scheme of the invention is described in detail as the optimization by the embodiment and the attached drawings:
the technical scheme of the invention is described in detail as the optimization by the embodiment and the attached drawings:
example 1: a kind of temperature compensation adjusts the temperature the annealing furnace system, including stove body 1 and complementary thermoregulator 3, the stove body 1 here mainly refers to the vacuum annealing furnace under the prior art, after the requirement is that he has already had basic or to the integrative device that the prior art requires, also need to set up the interface of a compensation breather pipe 2 in its internal storehouse body outwards, then set up 1 compensation breather pipe 2 through this interface, then the said complementary thermoregulator 3 is connected with stove body 1 through compensating the breather pipe 2;
wherein: the complementary temperature regulator 3 comprises temperature regulating cabin 4, condensation vacuum-pumping pipe 5, mechanical vacuum-pumping pipe 6, condensation vacuum-pumping pump 7, mechanical vacuum- pumping pump 8,6 main components, and is shown in figure 1;
continuing as shown in fig. 1, a temperature adjusting bin 4 is connected with a furnace main body 1 through a compensation vent pipe 2 at the head end, an electric heating piece stack 9 is arranged in the temperature adjusting bin 4, the tail end of the temperature adjusting bin 4 is connected with a condensation vacuum-pumping pipe 5, the tail end of the condensation vacuum-pumping pipe 5 is downwards connected with a condensation vacuum-pumping pump 7, a mechanical vacuum-pumping pipe 6 is connected with a mechanical vacuum-pumping pump 8, the inlet of the mechanical vacuum-pumping pipe 6 is connected with the condensation vacuum-pumping pipe 5, and the compensation vent pipe 2 is connected with the condensation vacuum-pumping pipe 5 through the temperature adjusting bin 4 to be connected with the condensation vacuum-pumping pipe 7 to form a vacuum-pumping passage; these structures are for realizing the recovery of nitrogen gas and the adjustment structure of capacity, concentration, if natural cooling after the storage, can also carry on the appropriate heating pressure regulation through the electric heating piece pile 9;
as shown in fig. 2, a temperature-reducing bin 15 is welded or hinged on the front wall of the temperature-regulating bin 4, the temperature-regulating bin 4 is communicated with the temperature-reducing bin 15, a water-cooling temperature-reducing circulating pile 102 is suspended in the temperature-reducing bin 15, and the water-cooling temperature-reducing circulating pile 102 is connected with a water-cooling circulating pump 19 arranged outside the temperature-reducing bin 15 through a water circulating pipe; thus, 1 structure for actively adjusting the temperature and reducing the temperature of the nitrogen discharged into the temperature adjusting bin 4 is additionally arranged;
the difference between the inlet of the mechanical vacuum pumping tube 6 and the rear of the joint of the condensation vacuum pumping tube 5 is that the condensation vacuum pumping tube 5 is provided with a two-way air valve 18, and the two-way air valve 18 is provided with a flow controller. When the normal temperature control is needed, the two-way air valve 18 can be controlled at the rear end to limit the cooling gas from the condensation vacuum-pumping tube 5, and only the normal temperature gas is actively input into the complementary temperature regulator 3 through the mechanical vacuum-pumping tube 6, so that the energy is saved, or the condition of the normal temperature is needed to be adjusted;
as shown in fig. 3 and 4, an adjusting cabin cover 16 is arranged on a front cabin door 14 of the furnace main body 1, the adjusting cabin cover 16 includes an additional cabin cover plate 201, main moving rails 202, a cover transverse frame 203 and a cover 204, the additional cabin cover plate 201 is provided with a cabin door 17, the additional cabin cover plate 201 is provided with two main moving rails 202 arranged in parallel on the left and right sides or the upper and lower sides of the cabin door 17, the cover transverse frame 203 is transversely erected between the two main moving rails 202, the cover transverse frame 203 is provided with a pressing piece groove 206, at least 2 suckers, 1 lifting cylinder, 1 pressing cylinder are suspended in the pressing piece groove 206, the suckers adsorb the cover 204, a crankshaft of the lifting cylinder is riveted with the cover 204 and controls the lifting of the cover 204 on the surface of the cabin door 17, the bottom of a cylinder shaft of the pressing cylinder is provided with a rubber pressure head, and the rubber pressure head is attached to the surface of the cabin door 17; the micro-motor sliding frame 210 is arranged at the position, matched with the main moving rail 202, of the bottoms of the two sides of the cover transverse frame 203, the micro-motor sliding frame 210 is erected in a sliding rail shaft of the main moving rail 202 and moves in the main moving rail 202 along with the sliding rail shaft to drive the cover transverse frame 203 to move up and down on the main moving rail 202;
the cooling bin 15 comprises an outward opening bin cover 103, an outer vertical wall 104 and a bottom wall 105, a cooling port 106 is formed in the center of the bottom wall and is communicated with the temperature adjusting bin 4, a water circulation interface 107 of a water-cooling circulation stack 102 is arranged on one side of the outer vertical wall, a T-shaped frame 108 is arranged on the bottom wall in the cooling port 106 in an attaching mode, a suspension drawing plate 109 is connected to the bottom of the water-cooling circulation stack 102 in the cooling bin 15 in a cushioning mode, and a vertical telescopic frame rod 110 is vertically arranged at the front end of the suspension drawing plate 109 towards one side of the outward opening bin cover. The temperature-regulating chamber 4 can be communicated with the temperature-regulating chamber through the temperature-regulating port 106, the temperature-regulating chamber 15 can be filled with high-temperature nitrogen under the condition that the compensation vent pipe 2 is completely opened, the high-temperature nitrogen can be subjected to water-cooling by the water-cooling temperature-reducing circulating reactor 102 after the heating of the furnace main body 1 is stopped, and the whole temperature-regulating chamber 15, the furnace main body 1 and the complementary temperature regulator 3 start to be cooled under the cooling condition;
t-shaped frame and suspension pull board 109 can make water-cooling circulation pile 102 suspension on suspension pull board 109, can be supported in the bottom at suspension pull board 109, suspend, and put the pull board and can pull out when keeping in repair or not need the cold cooling circulation pile to other functional group's article are gone up in the replacement, vertical expansion bracket pole 110 is the holding power that can provide suspension pull board 109 front end, after the pull action is accomplished, fix a position and suspension are fixed.
The cabin cover plate 201 is additionally provided with a cabin door 17, the cabin cover plate 201 is additionally provided with a main temperature-resistant metal plate or a temperature-resistant ceramic plate, an original side-opening cabin door is detached from the traditional cabin crystal oscillator vacuum annealing furnace, and then the cabin cover plate 201 is additionally arranged along a groove plate on the edge of the original vacuum annealing furnace in a riveting or welding mode, so that the original vacuum annealing furnace and the additionally arranged cabin cover plate 201 are integrated; the size of the cabin door 17 can be set to be smaller than that of the original front cabin door, then a new cabin door formed by additionally installing a cabin cover plate 201 is formed to replace the original front cabin door, then two groups of main moving rails 202 arranged in parallel are arranged on the left side and the right side or the upper side and the lower side of the cabin door 17 by additionally installing the cabin cover plate 201 on two sides of the newly formed cabin door, then a sealing cover transverse frame 203 is transversely erected between the two main moving rails 202, a pressing piece arranging groove 206 is arranged on the sealing cover transverse frame 203, the top and the bottom of the pressing piece arranging groove 206 are both hollow, then 3 suckers 207, 2 lifting cylinders 208 and 2 pressing cylinders 209 are suspended in the pressing piece arranging groove 206, suckers are arranged on the outermost side and the middle side, the lifting cylinders and the pressing cylinders can be randomly arranged between the suckers, but the setting is better according to rules, namely the pressing cylinders are arranged beside 1 lifting cylinder, and the situation shown in figure 1 is shown; a crankshaft of the lifting cylinder is riveted with the sealing cover 204 and controls the sealing cover 204 to lift on the surface of the cabin door 17, and a rubber pressure head is arranged at the bottom of a cylinder shaft of the pressing cylinder and is attached to the surface of the cabin door 17; the arrangement can be used for lifting at a certain height to enable the sealing cover 204 to descend to seal the cabin door 17, the sucking disc can be used for sucking the sealing cover 204 of the high-temperature-resistant explosion-proof glass plate, the sealing cover 204 can be replaced in the future, and a circle of sealing ring is attached to the edge of the cabin door 17. The air-tight ring can be made of perfluoro high-temperature-resistant rubber to increase air tightness, and the air-tight ring just seals the surrounding position of the combination of the two main parts when the sealing cover 204 covers the cabin door 17; the pressing cylinder can press the sealing cover 204 on a plane to increase the sealing performance; the bottom parts of the two sides of the cover transverse frame 203 are matched with the main moving rail 202 to be provided with a micromotor sliding frame 210, the micromotor sliding frame 210 is erected on a sliding rail shaft 211 of the main moving rail 202, the sliding rail shaft is generally a screw shaft, the micromotor sliding frame or a micro-distance moving electric sliding plate below the micromotor sliding frame is also of the same structure and is driven by a screw motor and a sliding plate, the screw shaft, the screw motor and a base structure are common in the prior art and are not described herein, the micromotor sliding frame moves along the main moving rail 202 along with the sliding rail shaft to drive the cover transverse frame 203 to move up and down on the main moving rail 202, the top and the bottom of the main moving rail 202 are provided with monitoring grating sensors 214, the additionally-installed cabin cover plate 201 is provided with a plurality of sensors 212 on the outer edge of the bottom part of the cabin door 17, the sensors are provided with 2 airtight sensors and 2 temperature sensors which are uniformly arranged along the outer edge of the cabin door 17, so that the whole coverage area of the cabin door 17 can be monitored. The top movement range and the bottom movement range of the main moving rail 202 are monitored, the grating sensor is used for sensing, and once the main moving rail is not moved to the position standard position or exceeds the position standard position, effective monitoring and compensation can be rapidly performed on a control system; the inner side of the main moving rail 202 is further provided with a macro moving rail 215, a macro moving electric sliding plate 216 is arranged in a sliding rail shaft b of the macro moving rail 215, and the macro moving electric sliding plate 216 drives the cover transverse frame 203 to perform macro movement on the macro moving rail 215. The micro-distance moving rail 215 mainly has the function of fine adjustment when the air tightness problem is generated, and the conditions of complete sealing, leakage hole generation when the micro-distance moving rail is not moved any more and the like are achieved; the two sides of the head and the tail of the cover transverse frame 203 are also provided with limiting lock cylinders 213, so that the cover transverse frame 203 can be prevented from slightly sliding and can be locked by moving, and the cylinder lock is a common cylinder lock with the technology and has the functions of pressing and slip prevention.
The implementation method comprises the following steps: after the cabin cover plate 201 is welded and installed, the main moving rail 202 and the macro moving rail 215 are arranged between the outer side of the cabin door 17 and the inner side of the main moving rail 202, then the upper cover transverse frame 203 is arranged between the two in a transversely suspended mode, the cover transverse frame 203 is combined with a groove and components for protecting the interior, the micromotor sliding frame 210 at the bottom corresponds to the main moving rail 202 and the macro moving rail 215 respectively, the two move downwards in a linkage mode to cover the cabin door 17 and conduct sealing, the correct moving distance of sealing is controlled by a grating sensor, then airtight detection after sealing is conducted, the airtight sensor and a temperature sensor monitor data to feed back, if fluctuation or exceeding exists, the sealing degree is indicated to be in a problem, the cover transverse frame 203 is moved to conduct fine movement adjustment, a pressing air cylinder is pressed down to increase air tightness, and after reaching the standard, a limit locking air cylinder 213 on the side face is used for preventing the cover transverse frame 203 from sliding and setting fine locking.
In conclusion, compared with the prior art, the full-automatic or semi-automatic lifting, airtight sealing and automatic compensation can be realized, the traditional box type crystal oscillator vacuum annealing furnace can be transformed, the transformation is simple, only the original cabin door needs to be detached, and the cabin cover plate 201 and the structure thereof are additionally arranged, welded or screwed or riveted with the product, and the temperature sensor and the airtight sensor are arranged, so that the change of temperature and the flow of gas are detected to sense the change of airtightness, and the airtightness control is enhanced.
The temperature sensor is used for sensing the heating condition so as to be discharged into the furnace body or discharged out of the temperature regulation bin 4 or regulated into the temporary storage bin, the electric heating piece stack 9 is mainly used for heating, the electric heating piece stack is generally suitable for the stress annealing heat treatment process of the vacuum annealing furnace, the replacement gas is generally nitrogen for heating, redundant nitrogen cannot be directly unpacked when vacuumizing is performed, the nitrogen also stores heat, and compensation temperature regulation can be performed when the temperature is controlled, so the replacement gas is discharged into the temporary storage gas bin 10 at the bottom of the temperature regulation bin 4 and is connected through a two-phase vent pipe so that the two parts are in ventilation connection, the condensation vacuum pipe 5 is connected with the condensation vacuum pump 7, the mechanical vacuum pipe 6 is connected with the mechanical air extraction vacuum pump 8, and the inlet of the mechanical air extraction vacuum pipe 6 is connected with the condensation vacuum pipe 5; the rear of the connection part of the inlet of the mechanical air extracting vacuum pipe 6 and the condensation vacuum pipe 5, the condensation vacuum pipe 5 is provided with a two-way air valve 18, the two-way air valve 18 is provided with a flow controller, the temperature adjusting bin 4 is connected with the furnace main body 1 through 1 one-way pipe 11 and 1 two-way pipe 12 of the compensation air pipe 2, the one-way pipe is led into the furnace main body 1 from the temperature adjusting bin 4, the one-way pipe operates only when nitrogen enters the complementary temperature adjuster 3, and the one-way pipe mainly supplements heating again, or discharges part of nitrogen when the furnace main body is heated too high by the one self for temporary storage, so as to place cooling and prepare to be put into the furnace main body again; the front wall 101 of the temperature adjusting chamber 4 of the complementary temperature adjuster 3 is welded or hinged with a temperature reducing chamber 15, a water-cooling temperature reducing circulating pile 102 is hung in the temperature reducing chamber 15, the water-cooling temperature reducing circulating pile 102 is connected with the temperature reducing chamber 15 through a water circulating pipe and a water-cooling circulating pump 19 arranged outside the temperature reducing chamber 15, the water-cooling circulating pump 19 is not shown in the figure, the water-cooling circulating pile 19 is used on various heaters, temperature adjusters or computers in the prior art, the technology is not repeatedly explained, the water-cooling temperature reducing circulating pile 102 is connected with the temperature reducing chamber 15 through the water circulating pipe, the water-cooling temperature reducing circulating pile 102 is also a combined structure or an integral structure with the water-cooling circulating pump 19 in the prior art, the water-cooling temperature reducing circulating pile 102 is only split, and generally consists of a plurality of bent and stacked copper pipes, inside is filled with water-cooling liquid, can set up behind 2 at least water pipe sockets at the outer wall in water circulating pipe cooling storehouse 15, insert 1 feed liquor of 2 corrugated metal hose, one goes out the liquid, the inlet and the liquid outlet of water-cooling circulation heap 102 all connect the core with the copper pipe and connect the cover well and meet the expert with water circulation interface 107, use corrugated metal pipe or copper union coupling to water-cooling circulating pump 19 on the water circulation interface 107, then all connect corrugated metal hose with the inlet and the inside this one side in cooling storehouse of liquid outlet of water-cooling circulation heap 102, make cold water or water-cooling liquid can flow into water-cooling circulation heap 102, corrugated metal hose is temperature-resistant high, the ductility is also very high, so it needs the structure that the pull removes to be very suitable for our this kind.
Cooling storehouse 15 is including opening storehouse lid 103 outward, outer founding wall 104, diapire 105, outer founding wall all sets up all for the whole body metal one-tenth square frame all around 4 directions, diapire using the bottom makes whole storehouse on articulated complementary thermoregulator 3's preceding bulkhead, the direct fretwork in diapire center sets up cooling port 106 and the storehouse 4 that adjusts the temperature communicates with each other, outer founding wall one side sets up the hydrologic cycle interface 107 that water-cooling circulation pile 102, the diapire sets up T-shaped frame 108 at cooling port 106 border laminating, water-cooling circulation pile 102 bottom pad joint in the cooling storehouse 15 has suspension pull board 109, the front end of suspension pull board 109 is towards the vertical expansion bracket pole 110 that sets up in storehouse lid one side of opening outward. The temperature-regulating chamber 4 can be communicated with the temperature-regulating chamber through the temperature-regulating port 106, the temperature-regulating chamber 15 is filled with high-temperature nitrogen under the condition that the compensation vent pipe 2 is completely opened, the high-temperature nitrogen is subjected to water-cooling by the water-cooling temperature-reducing circulating reactor 102 after the heating of the furnace body 1 is stopped, and the whole temperature-regulating chamber 15, the furnace body 1 and the complementary temperature regulator 3 start to be cooled under the cooling condition; the T-shaped frame and the suspension pulling plate 109 can suspend the water-cooling circulation stack 102 on the suspension pulling plate 109, the suspension structure can be a direct placing plate structure, or a sliding rail structure with an open head end can not be shown in the drawing, the very direct structure is directly obvious to the technicians in the prior art, even the connection structure between the suspension pulling plate 109 and the cooling chamber is a simple placing frame structure which can be supported at the bottom of the suspension pulling plate 109 for suspension, the suspension pulling plate can be pulled out when maintenance is carried out or the cold cooling circulation stack is not needed, and other functional group objects are replaced, the vertical expansion frame rod 110 can provide the supporting force at the front end of the suspension pulling plate 109, after the external opening chamber cover is opened, the whole water-cooling circulating pile 102 screwed on the suspension pull plate 109 is pushed into a cooling bin 15 or is pushed into other processes after the whole action is finished, because the temperature of the water-cooling circulating pile 102 is prevented from being definitely lower than that of an electric heating pile, under the condition of not cooling, in order to be not aged or damaged by high temperature of about 100-600 frequently, after the pulling action which needs to be pulled out under the condition of the process that the service life is not cooled is finished, the positioning and the suspension fixing are carried out, the specific operation is that the tightening screw in the middle of the vertical telescopic rack rod 110 is used for transferring, and then the tightening screw is extended to the width of the whole cooling bin 15 to finish the function of the supporting rod, the bottom of the vertical telescopic rack rod is provided with a T-shaped frame for suspension supporting, or a direct contact point, for example, the head end of the T-shaped frame can be provided with a clamping groove, the vertical telescopic rack rod 110 can be clamped into the middle of the clamping groove to realize the positioning after the suspension pull plate 109 is pushed out, the water can not go deep into deeper places of the cooling bin any more;
because of the management of nitrogen gas, only need control nitrogen gas entering or only mix ordinary air and get into furnace main part 1, and the application of two-way pipe can be used when not only will cooling, also can use when cooling.
The implementation method comprises the following steps: the furnace body is vacuumized, the temperature adjusting bin 4 communicated with the mechanical air-extracting vacuum tube 6 as compensation, the mechanical air-extracting vacuum tube 6 and the bidirectional tube are all opened, and the furnace body can work together with a mechanical vacuum-extracting pump of the furnace body to strengthen the action of vacuum-extracting;
temperature adjustment: when the temperature is too high, corresponding to the condition of a temperature sensor in the furnace body, the one-way valve on the one-way pipe of the compensation vent pipe 2 is controlled to be opened, nitrogen enters the complementary temperature regulator 3, and a gas flow controller and the one-way valve can be arranged for joint operation as reinforcement, so that the situation is not actually needed, and once the temperature in the furnace body reaches the standard and is stable, the passage of the one-way pipe is closed to achieve the temperature regulation control in a small range through the temperature sensing; once the temperature rises suddenly, the condensation vacuum-pumping pump 7 works rapidly to rapidly pump away the fully opened nitrogen in the furnace body with the one-way pipe and the two-way pipe and the gas in the complementary thermoregulator 3 for ultimate emergency cooling;
when the temperature is too low or not up to the standard, in order to save heating energy, hot nitrogen gas in the temporary storage bin which is pumped away and stored is discharged, a bidirectional pipe passage is opened, and the electric heating sheet stack 9 is opened for heating. During normal temperature control, the bidirectional gas valve 18 can be controlled at the rear end to limit cooling gas from the condensation vacuum tube 5, and only normal temperature gas is actively input into the complementary thermostat 3 through the mechanical vacuum tube 6, so that energy is saved, or the condition of normal temperature is required to be adjusted;
cooling: after the main furnace body finishes the vacuum annealing process, keeping original shapes of all original pipelines, and closing or closing the original pipelines, and opening or closing the original pipelines, opening an outward opening cover of a cooling bin 15, pushing the whole water-cooling circulating stack 102 loaded on a suspension drawing plate 109 into the cooling bin 15, and carrying out head-to-tail support by using a T-shaped frame and a telescopic frame rod, wherein a water inlet and a circulating water outlet communicated with the water-cooling circulating stack 102 are connected and sleeved by using copper pipe connecting cores and communicated with a water circulating interface 107 to prepare for completion; the two-way pipe that complementary thermoregulator 3 and furnace main part 1 are connected is opened, as supplementary can will condense evacuation pump 7 and take out a period of time earlier for high temperature nitrogen gas is full of whole complementary thermoregulator 3 to can get into cooling storehouse 15, stop the extraction cooling of condensation evacuation pump 7, begin the water-cooling, water-cooling circulating pump 19 begins work, and cold water moves in water-cooling circulation heap 102, takes away the heat of nitrogen gas, cools down, and hot water retrieves.
Example 2
As shown in fig. 1, a temperature-supplementing and temperature-regulating annealing furnace system comprises a furnace body 1, a compensation vent pipe 2, and a complementary temperature regulator 3, wherein the complementary temperature regulator 3 passes through the compensation vent pipe 2 and the furnace body 1, wherein: the complementary temperature regulator 3 comprises a temperature regulating bin 4, a condensation vacuum-pumping tube 5, a mechanical vacuum-pumping tube 6, a condensation vacuum-pumping pump 7 and a mechanical vacuum-pumping pump 8, the complementary temperature regulator 3 comprises an electric heating piece stack 9 arranged in the temperature regulating bin 4, a temperature sensor 13 arranged in the temperature regulating bin 4, a compensation vent pipe 2 connected with the condensation vacuum-pumping pump 7, the mechanical vacuum-pumping tube 6 connected with the mechanical vacuum-pumping pump 8, an inlet of the mechanical vacuum-pumping tube 6 connected with the condensation vacuum-pumping tube 5, and the temperature regulating bin 4 connected with the furnace main body 1 through the compensation vent pipe 2; a cooling bin 15 is welded or hinged on the front bin wall of the temperature adjusting bin 4, a water-cooling circulating stack 102 is hung in the cooling bin 15, and the water-cooling circulating stack 102 is connected with a water-cooling circulating pump 19 arranged outside the cooling bin 15 through a water circulating pipe; at this time, an electric heating sheet stack 9 is directly and fixedly arranged in the temperature regulation bin 4, and 1 water-cooling circulation stack 102 is arranged on the side of the temperature regulation bin, the water-cooling circulation stack 102 is not fixed in the temperature regulation bin 4 as the former electric heating sheet stack, but fixed on a suspension pull plate 109 which extends deeply into the temperature regulation bin 4, and then 1 water-cooling circulation stack 102 is arranged at the bottom of the suspension pull plate 109, so that the water-cooling circulation can be more deeply arranged into the temperature regulation bin 4, which is not shown in the figure, but the replacement effect is only to enlarge the original temperature regulation bin or leave 1 electric heating sheet stack out, and extend the track structure, and the technical effect of the emergency extraction in the embodiment 1 can be easily solved and can be achieved through the suspension pull plate 109 by technicians in the prior art;
embodiment 3, structurally in embodiment 2, still keep the lift structure setting of water-cooling circulation heap 102, further keep cooling storehouse 15 embodiment 2 structure, then set up water-cooling circulation heap to the biggest on whole suspension pull board 109, this kind of structure maximum amplitude has utilized the storehouse 4 spaces and the storehouse space of cooling that adjust the temperature that embodiment 2 appears, increases the cooling effect, can no longer appear the temperature that emergency need extract even.
The specific embodiments described herein are merely illustrative of the spirit of the invention. Various modifications or additions may be made to the described embodiments or alternatives may be employed by those skilled in the art without departing from the spirit or ambit of the invention as defined in the appended claims.

Claims (10)

1. The utility model provides a benefit temperature annealing furnace system that adjusts temperature, includes stove main part and complementary thermoregulator, complementary thermoregulator is connected characterized by through compensation breather pipe and stove main part: the complementary thermoregulator comprises a thermoregulation cabin, a condensation vacuum-pumping tube, a mechanical vacuum-pumping tube, a condensation vacuum-pumping pump and a mechanical vacuum-pumping pump;
the temperature adjusting bin is connected with the furnace main body through a compensation vent pipe at the head end, an electric heating piece stack is arranged in the temperature adjusting bin, the tail end of the temperature adjusting bin is communicated with a condensation vacuum-pumping pipe, the tail end of the condensation vacuum-pumping pipe is downwards connected with a condensation vacuum-pumping pump, the mechanical vacuum-pumping pipe is connected with a mechanical vacuum-pumping pump, the inlet of the mechanical vacuum-pumping pipe is connected with the condensation vacuum-pumping pipe, and the compensation vent pipe is connected with the condensation vacuum-pumping pipe through the temperature adjusting bin and communicated with the condensation vacuum-pumping pipe to form a vacuum-pumping passage; the front wall of the temperature adjusting bin is welded or hinged with a cooling bin, a water-cooling circulating pile is arranged in the cooling bin, and the water-cooling circulating pile is connected with a water-cooling circulating pump arranged outside the cooling bin through a water circulating pipe;
the condensation vacuum-pumping pipe is provided with a bidirectional air valve, and a flow controller is arranged on the bidirectional air valve;
an adjusting bin cover is arranged on a front bin door of the furnace main body and comprises an additional bin cover plate, a main moving rail, a seal cover cross frame and a seal cover;
the cabin cover plate is additionally provided with a cabin door, the cabin cover plate is additionally provided with two main moving rails which are arranged in parallel at the left side or the upper side and the lower side of the cabin door, a cover cross frame is transversely erected between the two main moving rails, a pressing piece arranging groove is arranged on the cover cross frame, at least 2 suckers and 1 lifting cylinder are suspended in the pressing piece arranging groove, 1 pressing cylinder is arranged, the bottom of each sucker adsorbs the cover, a shaft of the lifting cylinder is riveted with the cover and controls the cover to lift on the surface of the cabin door, and a rubber pressure head is arranged at the bottom of a cylinder shaft of the pressing cylinder and is attached to the surface of the cabin door; the micro-motor sliding frames are arranged at the positions, matched with the main moving rail, of the bottoms of the two sides of the cover sealing cross frame, erected in the sliding rail grooves of the main moving rail and move in the main moving rail along with the sliding rail grooves to drive the cover sealing cross frame to move up and down on the main moving rail;
the cooling bin comprises an outward-opened bin cover, an outer vertical wall and a bottom wall, a cooling port and a temperature-adjusting bin are arranged at the center of the bottom wall, a water circulation interface of a water-cooling circulation stack is arranged on one side of the outer vertical wall, a T-shaped frame is arranged on the bottom wall along the edge of the cooling port in a laminating manner, a suspension pull plate is arranged at the bottom of the water-cooling circulation stack in the cooling bin in a cushioning manner, and a vertical telescopic rack rod is vertically arranged on one side of the outward-opened bin cover at the front end of the suspension pull plate.
2. The annealing furnace system with temperature compensation and regulation as set forth in claim 1, wherein: an electric heating piece stack and a water-cooling circulation stack are arranged in the temperature adjusting bin.
3. The annealing furnace system according to claim 1, wherein: the water-cooling circulating pile is connected with a corrugated metal hose.
4. The annealing furnace system with temperature compensation and regulation as set forth in claim 1, wherein: the outer edge of the bottom of the cabin door of the loading cabin cover plate is provided with a plurality of sensors, and the sensors at least comprise an airtight sensor and a temperature sensor.
5. The annealing furnace system with temperature compensation and regulation as set forth in claim 1, wherein: and monitoring grating sensors are arranged at the top and the bottom of the main moving rail.
6. The annealing furnace system according to claim 1 or 5, wherein: the inner side of the main moving rail is also provided with a microspur moving rail, a microspur moving electric sliding plate is arranged in a sliding rail groove of the microspur moving rail, and the microspur moving electric sliding plate drives the cover transverse frame to move microspur on the microspur moving rail.
7. The annealing furnace system with temperature compensation and regulation as set forth in claim 1, wherein: and limiting lock cylinders are further arranged on the two sides of the head and the tail of the cover sealing cross frame.
8. The annealing furnace system according to claim 1 or 7, wherein: the sealing cover is a stainless steel 304 plate or a high-temperature-resistant explosion-proof glass plate, the area of the sealing cover is larger than that of the cabin door, and a circle of sealing ring is attached to the edge of the cabin door.
9. The annealing furnace system according to claim 1 or 2, wherein: the bottom of the temperature adjusting bin is provided with a temporary storage air bin which is connected with the temperature adjusting bin through a two-way vent pipe.
10. The annealing furnace system with temperature compensation and regulation as set forth in claim 1, wherein: the compensation breather pipe comprises 1 one-way pipe and 1 two-way pipe, and a one-way air valve is arranged on the one-way pipe.
CN201910159558.7A 2018-03-04 2019-03-04 Temperature-supplementing and temperature-regulating annealing furnace system Active CN110218854B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB332436A (en) * 1929-01-14 1930-07-24 Charles Franklin Kenworthy Improvements in or relating to annealing furnaces
GB520589A (en) * 1938-01-25 1940-04-29 Bernhard Berghaus An improved electrical vacuum annealing and fusion furnace heated by glow discharge
KR20030050714A (en) * 2001-12-19 2003-06-25 주식회사 포스코 An apparatus for cooling a reheating furnace
CN203247289U (en) * 2013-05-15 2013-10-23 湖南新新线缆有限公司 Numerically controlled micro-pressure gas thermal-cold circulation annealer
CN103557710A (en) * 2013-10-28 2014-02-05 北京泰科诺科技有限公司 Rapid circulation air cooling vacuum furnace
CN205188346U (en) * 2015-10-20 2016-04-27 江苏邦泰炉业有限公司 Well formula vacuum furnace
CN206570370U (en) * 2017-02-16 2017-10-20 北京科技大学 A kind of Metal Materials At High Temperature vacuum annealing furnace

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB332436A (en) * 1929-01-14 1930-07-24 Charles Franklin Kenworthy Improvements in or relating to annealing furnaces
GB520589A (en) * 1938-01-25 1940-04-29 Bernhard Berghaus An improved electrical vacuum annealing and fusion furnace heated by glow discharge
KR20030050714A (en) * 2001-12-19 2003-06-25 주식회사 포스코 An apparatus for cooling a reheating furnace
CN203247289U (en) * 2013-05-15 2013-10-23 湖南新新线缆有限公司 Numerically controlled micro-pressure gas thermal-cold circulation annealer
CN103557710A (en) * 2013-10-28 2014-02-05 北京泰科诺科技有限公司 Rapid circulation air cooling vacuum furnace
CN205188346U (en) * 2015-10-20 2016-04-27 江苏邦泰炉业有限公司 Well formula vacuum furnace
CN206570370U (en) * 2017-02-16 2017-10-20 北京科技大学 A kind of Metal Materials At High Temperature vacuum annealing furnace

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