CN110208284B - Method and system for multi-channel defect merging analysis - Google Patents
Method and system for multi-channel defect merging analysis Download PDFInfo
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- CN110208284B CN110208284B CN201910447257.4A CN201910447257A CN110208284B CN 110208284 B CN110208284 B CN 110208284B CN 201910447257 A CN201910447257 A CN 201910447257A CN 110208284 B CN110208284 B CN 110208284B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N2021/9513—Liquid crystal panels
Abstract
The invention discloses a method and a system for multi-channel defect merging analysis, which relate to the technical field of optical detection, and the method comprises the following steps: dividing an initial defect point list obtained by detecting a plurality of channels into initial defect point sub-lists corresponding to each channel and storing the initial defect point sub-lists; respectively combining the defect points in the initial defect point sub-table of each channel, wherein the spacing distance of the defect points is smaller than a preset first threshold value, obtaining and storing the final defect point sub-table of each channel; merging the defect points with the spacing distance smaller than a preset second threshold value among the final defect point sub-tables of each channel to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging to form the defect point; and displaying the defect points in the final defect point table according to a single channel or a combination of a plurality of channels. The invention can display the defect points formed by a single channel or a combination of a plurality of channels, and the user can visually distinguish the false detection defect points or the missed detection defect points.
Description
Technical Field
The invention relates to the technical field of optical detection, in particular to a method and a system for multi-channel defect merging analysis.
Background
Automatic Optical Inspection (AOI), which is a high-speed high-precision Optical image Inspection system. In the defect detection field of the liquid crystal glass substrate, after AOI equipment finishes scanning the liquid crystal glass substrate once, images (namely images obtained by illumination with different colors) obtained by different channels can respectively and correspondingly generate an initial defect point list, each initial defect point list comprises coordinate information of different defect points, the coordinates of the different defect points are analyzed by circularly traversing the initial defect point list, when the distance between any two defect points is less than a set threshold value, the two defect points are determined to be one defect point, the two defect points are combined to form a final defect point list and are stored in a database.
The reasons for the merging of defect points are: according to the image capturing characteristic of the detection camera, the finally formed image is actually formed by splicing a plurality of frame images, a certain size of overlapping area exists when two adjacent frame images are spliced, and because a position error is inevitably generated during splicing, the same defect point in the overlapping area can be dislocated and becomes two defects, so that the defect points in the initial defect point list need to be merged.
The image of each channel has bright or dark noise pixel points, the inevitable noise pixel points are caused by the imaging system, and in the micron-level defect detection, the noise pixel points and the real defects on the liquid crystal panel are equivalent in signal intensity of the image, so that the truth and the falseness are difficult to distinguish.
Based on the above, the prior art has the following problems:
1. because the detection capabilities of different channels are different, the obtained final defect point list is also different, that is, the number and the positions of defect points (including false detection defect points or missed detection defect points) detected by different channels are different, the prior art does not have the capability of distinguishing and utilizing the channel information of the defect points, cannot present the defect points comprehensively detected by a plurality of channels, and a user cannot visually distinguish which of the false detection defect points or the missed detection defect points, so that the user experience is poor.
2. When there are many defect points (for example, ten thousand defect points), merging the defect points in the initial defect point list by using the loop traversal method requires at least ten thousand traversal, which takes a very large time cost.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a method and a system for multi-channel defect merging analysis, which can quickly display the defect points formed by a single channel or a combination of a plurality of channels and help a user to intuitively distinguish the false detection defect points or the missed detection defect points.
In order to achieve the above purposes, the technical scheme adopted by the invention is as follows: a method of multi-channel defect merging analysis, comprising the steps of:
dividing an initial defect point list obtained by detecting a plurality of channels into initial defect point sub-lists corresponding to each channel and storing the initial defect point sub-lists;
respectively combining the defect points in the initial defect point sub-table of each channel, wherein the spacing distance of the defect points is smaller than a preset first threshold value, obtaining and storing the final defect point sub-table of each channel;
merging the defect points with the spacing distance smaller than a preset second threshold value among the final defect point sub-tables of each channel to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging to form the defect point;
and displaying the defect points in the final defect point table according to a single channel or a combination of a plurality of channels.
On the basis of the technical scheme, the method for merging the defect points in the initial defect point sub-table of each channel, wherein the interval distance of the defect points is less than a preset first threshold value, comprises the following steps:
determining a distribution area of the defect points according to the coordinates of all the defect points in the initial defect point sub-table of each channel, and dividing the area into first grids with the same size by using a preset first step pitch;
dividing all defect points in the initial defect point sub-table of each channel into a plurality of first type groups, enabling the spacing distance between the defect points in each first type group to be smaller than a preset first threshold, enabling all defect points in each first type group to be located in the same first grid or the first grid adjacent to the first grid, and merging all defect points in each first type group.
On the basis of the technical scheme, all defect points in each first class are combined, and the method comprises the following steps:
the combined coordinates of the defect points in each first type group are the centers of all the defect point coordinates in the first type group to form a rectangular area, and the combined area of the defect points is the sum of the areas of all the defect points in the first type group.
On the basis of the technical scheme, the defect points with the spacing distance smaller than a preset second threshold value among the final defect point sub-tables of each channel are combined, and the method comprises the following steps:
determining a distribution area of the defect points according to the coordinates of all the defect points in the final defect point sub-tables of each channel, and dividing the area into second grids with the same size by using a preset second step pitch;
dividing all the defective points in the final defective point sub-tables of all the channels into a plurality of second groups, enabling the spacing distance between the defective points in each second group to be smaller than a preset second threshold, enabling all the defective points in each second group to be located in the same second grid or a second grid adjacent to the second grid, and merging all the defective points in each second group.
On the basis of the technical scheme, all defect points in each second class group are combined, and the method comprises the following steps:
the coordinates of the defect points in each second type group after combination are the coordinates of the defect points with the largest inner area of the second type group, and the areas of the defect points after combination are the areas of the defect points with the largest inner area of the second type group.
On the basis of the technical scheme, the combination of the plurality of channels comprises AND, OR and NOT combination among the plurality of channels.
On the basis of the technical scheme, the number of the channels includes, but is not limited to, three.
On the basis of the technical scheme, each defect point in the final defect point list is recorded by using a character string, and the character string contains channel information of the defect point of the final defect point sub-list which is combined to form the defect point.
The invention also provides a system for multi-channel defect merging analysis, which comprises:
the table dividing module is used for dividing the initial defect point list obtained by detecting the plurality of channels into initial defect point sub-tables corresponding to each channel and storing the initial defect point sub-tables;
the first merging module is used for respectively merging the defect points which are in the initial defect point sub-table of each channel and have the spacing distance smaller than a preset first threshold value to obtain and store the final defect point sub-table of each channel;
the second merging module is used for merging the defect points which are among the final defect point sub-tables of different channels and have the spacing distance smaller than a preset second threshold value to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging to form the defect point;
and the display module is used for displaying the defect points in the final defect point list according to a single channel or a combination of a plurality of channels.
On the basis of the above technical solution, the second merging module is further configured to record each defective point in the final defective point list using one character string, so that the character string contains channel information of the defective point of the final defective point sub-list where the defective points are formed by merging.
Compared with the prior art, the invention has the advantages that: according to the method and the system for multi-channel defect merging analysis, the defect points obtained by detecting the multiple channels are merged twice to form the final defect point list, the channel information of the defect points of the final defect point sub-list of the defect points is formed by merging, the defect points of a single channel or a combination of multiple channels are displayed, a user can select the defect points needing to be displayed according to the requirement, the user can be helped to visually distinguish the false detection defect points or the false detection defect points, and the user experience and the accuracy of the detection result are improved.
Drawings
FIG. 1 is a flow chart of a method of multi-channel defect merge analysis in an embodiment of the invention;
FIG. 2 is a diagram illustrating the effect of defect point display of the first channel in an embodiment of the present invention;
FIG. 3 is a diagram illustrating the effect of defect point display of the second channel according to an embodiment of the present invention;
FIG. 4 is a diagram illustrating the effect of the defect point display of the third channel in the embodiment of the present invention;
FIG. 5 is a diagram illustrating the effect of defect point display of the channel combination (the first channel OR, the second channel OR, and the third channel) in the embodiment of the present invention;
FIG. 6 is a diagram illustrating the effect of defect point display of the channel combination (first channel AND second channel AND third channel) according to the embodiment of the present invention;
FIG. 7 is a flowchart illustrating defect point merging in a method for multi-channel defect merging analysis according to an embodiment of the present invention;
FIG. 8 is a diagram illustrating defect point merging according to an embodiment of the present invention;
FIG. 9 is an undirected graph during defect point merging according to an embodiment of the present invention;
FIG. 10 is a diagram of a system for multi-channel defect merge analysis according to an embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
Referring to fig. 1, an embodiment of the present invention provides a method for multi-channel defect merging analysis, including the following steps:
step S101, dividing the initial defect point list obtained by detecting a plurality of channels into initial defect point sub-lists corresponding to each channel and storing the initial defect point sub-lists. Specifically, the number of channels in the embodiment of the present invention is three, and the three channels include a first channel, a second channel, and a third channel, all defect point information detected by the three channels is recorded in the initial defect point list, the defect point information includes coordinates of a defect point and channel information of the defect point, and the channel information of the defect point refers to which channel the defect point is detected from. And dividing the initial defect point list obtained by the detection of the three channels into initial defect point sub-lists corresponding to the three channels, and storing the initial defect point sub-lists of the three channels in a database.
And step S102, merging the defect points in the initial defect point sub-table of each channel, wherein the interval distance of the defect points is smaller than a preset first threshold value, obtaining and storing the final defect point sub-table of each channel. Specifically, the coordinates are used for calculating the distance between the defect points in the initial defect point sub-tables of each channel, the defect points in the initial defect point sub-tables of the three channels, the spacing distance of which is smaller than a preset first threshold value, are combined to obtain final defect point sub-tables of the three channels, the final defect point sub-tables of the three channels are stored in a database, and the coordinates of each defect point and the channel information of the defect point are recorded in each final defect point sub-table.
Step S103, merging the defect points with spacing distances smaller than a preset second threshold between the final defect point sub-tables of each channel to obtain a final defect point table, and storing the final defect point table, where each defect point in the final defect point table includes channel information of the defect point of the final defect point sub-table merged to form the defect point. Specifically, the coordinates of the defective points in the final defective point sub-table of the three channels may be defined by the same coordinate system, the used coordinates calculate distances between all the defective points in the final defective point sub-table of the three channels, the defective points whose spacing distances between the final defective point sub-tables of the three channels are smaller than the preset second threshold are merged to obtain a final defective point table, the final defective point table is stored in the database, and each defective point in the final defective point table contains channel information of the defective point that merges the final defective point sub-table forming the defective point, that is, each defective point in the final defective point table records which channel or channels the defective point of the final defective point sub-table merging to form the defective point comes from. In the embodiment of the invention, the preset second threshold value is equal to the preset first threshold value. In the embodiment of the present invention, each defect point in the final defect point list is identified by using a character string record, where the character string contains channel information of the defect point in the final defect point sub-list which is combined to form the defect point, that is, each defect point in the final defect point list records which channel or channels the defect point in the final defect point sub-list which is combined to form the defect point comes from. And the method ensures that the extraction and the retrieval of the defect point information are convenient and efficient by a character string recording mode.
And step S104, displaying the defect points in the final defect point table according to a single channel or a combination of a plurality of channels.
Specifically, the defect points in the final defect point table are displayed according to a single channel as follows:
(1) selecting a first channel
Referring to fig. 2, the specific meanings are as follows: in each defect point displayed under the condition that the channel is selected, the defect point of the final defect point sub-table which is combined to form the defect point comes from the first channel.
(2) Selecting a second channel
Referring to fig. 3, the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-list of the defective dot comes from the second channel.
(3) Selecting a third channel
Referring to fig. 4, the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot list of the defective dot comes from the third channel.
Specifically, according to the combination of the plurality of channels, the defect points in the final defect point table are displayed as follows:
in the embodiment of the invention, the first channel, the second channel and the third channel are combined or not combined. Combinations include, but are NOT limited to, the following (the following AND stands for logical AND, OR for logical OR, AND for logical NOT):
(4) selecting a first OR second channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-list of the defective dot comes from the first channel or the second channel.
(5) Selecting a first OR third channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-list of the defective dot comes from the first channel or the third channel.
(6) Selecting a second OR third channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-table of the defective dot comes from the second channel or the third channel.
(7) Selecting a first channel AND a second channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-list of the defective dot comes from both the first channel and the second channel.
(8) Selecting a first channel AND a third channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot list of the defective dot comes from both the first channel and the third channel.
(9) Selecting a second channel AND a third channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot list of the defective dot comes from both the second channel and the third channel.
(10) Selecting a first OR a second OR a third channel
Referring to fig. 5, the A, B areas detected by the first channel, the second channel, and the third channel are used as references, which specifically mean: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot that is merged to form the final defective dot sub-list of the defective dot comes from the first channel, or the second channel, or the third channel. As can be seen from comparison of fig. 2, 3, 4, and 5, in the case where the combination of channels is selected, any defective point detected in the A, B area through the first channel, the second channel, and the third channel can be displayed in fig. 5.
(11) Selecting a first channel AND a second channel AND a third channel
Referring to fig. 6, the A, B areas detected by the first channel, the second channel, and the third channel are used as references, which specifically mean: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dots that are combined to form the final defective dot sub-list of the defective dots come from the first channel, the second channel and the third channel at the same time. As can be seen from comparing fig. 2, fig. 3, fig. 4 and fig. 6, under the condition of selecting the channel combination, only the defect points detected simultaneously in the A, B area through the first channel, the second channel and the third channel are displayed in fig. 6, so that the efficiency of visually identifying the false detection defect points or the false detection defect points by the user is greatly improved.
(12) Selecting a first channel AND a second channel NOT a third channel:
the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dots that are combined to form the final defective dot sub-list of the defective dots come from both the first channel and the second channel, and not from the third channel.
(13) Selecting a first channel AND a third channel NOT a second channel
The specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dots that are combined to form the final defective dot sub-list of the defective dots come from both the first channel and the third channel, and not from the second channel.
(14) Selecting a second channel AND a third channel NOT a first channel:
the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dots that are combined to form the final defective dot sub-list of the defective dots come from both the second channel and the third channel, and not from the first channel.
(15) Selecting a first channel NOT, a second channel NOT and a third channel;
the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot of the final defective dot sub-list which is combined to form the defective dot comes only from the first channel, and does not come from the second channel and the third channel.
(16) Selecting a second channel NOT, a first channel NOT and a third channel;
the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot of the final defective dot sub-table which is combined to form the defective dot comes only from the second channel and does not come from the first channel and the third channel.
(17) Selecting a third channel NOT, a first channel NOT and a second channel NOT;
the specific meanings are as follows: in each of the defective dots displayed under the condition that the combination of channels is selected, the defective dot of the final defective dot sub-table which is combined to form the defective dot comes only from the third channel and does not come from the first channel and the second channel.
(18) Select (first channel AND second channel) OR (first channel AND third channel) OR (second channel AND third channel)
The specific meanings are as follows: in each defect point displayed under the condition that the combination of channels is selected, the defect point of the final defect point sub-table which is combined to form the defect point comes from any two channels at the same time.
Compared with the prior art, the invention has the advantages that: according to the multichannel defect merging analysis method, the defect points obtained by detecting the multiple channels are merged twice to form the final defect point list, the channel information of the defect points of the final defect point sub-list of the defect points is formed by merging, the defect points of a single channel or the combination of the multiple channels are displayed, a user can select the defect points to be displayed according to the requirement, the user can be helped to visually distinguish the false detection defect points or the missed detection defect points, and the user experience and the accuracy of the detection result are improved.
As a preferred embodiment, referring to fig. 7, merging defect points in the initial defect point sub-table of each channel, where the interval distance is smaller than a preset first threshold, specifically includes the following steps:
step S201, determining a distribution area of defect points according to coordinates of all defect points in the initial defect point sub-table of each channel, and dividing the area into first grids of the same size by using a preset first step.
Specifically, all defect points in the initial defect point sub-table are traversed, coordinates X, Y of all defect points are counted, coordinate extreme points MaxX, MinX, MaxY and MinY are found, distribution area ranges (MinX, MinY), (MaxX, MinY), (MinX, MaxY), (MaxX, MaxY) are formed, the distribution area of the defect points is divided into two-dimensional grids with the same size according to a preset first step, and the preset first step is preferably 1 mm.
Step S202, dividing all defect points in the initial defect point sub-table of each channel into a plurality of first type groups, making the spacing distance between defect points in each first type group smaller than a preset first threshold, and all defect points in each first type group are located in the same first grid or adjacent first grids, and merging all defect points in each first type group.
Specifically, in the grid where each defect point is located and the adjacent grid, the defect point and the defect point whose distance from the defect point is smaller than a preset first threshold are connected to form an undirected graph, where the preset first threshold is far smaller than a preset first step distance.
All defect points are numbered from 0 to n, and an array { a ] for marking group numbers is set0，a1，…，ai…, an }, the value of element ai represents the group number value where defect point i is located;
initializing the values of elements in the array, traversing the group number values in the array, sequentially recursively setting the group number values corresponding to the defect points in the same undirected graph as N, wherein the N starts to take a value from 0, and finally merging the defect points corresponding to the same group number values.
Further, referring to FIGS. 8 and 9, assuming there are eight defect points to be merged, all group number values in the array are initialized to-1: { -1, -1, -1, -1, -1, -1, -1}, which means that the group numbers of eight defect points with the defect point numbers of 0 to 7 are all-1, and traversing the group number values in the array, and setting the group number values of all defect points (including the defect point number 0) connected with the defect point number 0 in the undirected graph with the defect point number 0 to 0 in the array to 0, to obtain {0, 0, 0, 0, -1, -1, -1, -1 }. And (3) continuously traversing the array to obtain a point with the next group number value of-1, namely point 4, setting the group number value of all points (including point 4) connected with point 4 in the undirected graph in the array to be 1, obtaining {0, 0, 0, 0, 1, 1, 1, 1}, completing grouping, wherein the points 0, 1, 2 and 3 belong to the group 0, and the points 4, 5, 6 and 7 belong to the group 1, and finally traversing the array to combine the defect points corresponding to the same group number value.
Compared with the existing circulating traversal merging method, each defect point only needs to search for the merged defect point in the grid where the defect point is located and the adjacent grid, so that the traversal times are greatly reduced, and the more the number of the points is, the more obvious the calculation advantages are in the embodiment of the invention.
As a preferred embodiment, merging all defect points within each first category group comprises the following steps:
the combined coordinates of the defect points in each first type group are the centers of all the defect point coordinates in the first type group to form a rectangular area, and the combined area of the defect points is the sum of the areas of all the defect points in the first type group. By the combination mode, the combined defect point coordinates and sizes are more accurate.
As a preferred embodiment, merging the defect points with spacing distance smaller than the preset second threshold value among the final defect point sub-tables of each channel, includes the following steps:
determining a distribution area of the defect points according to the coordinates of all the defect points in the final defect point sub-tables of each channel, and dividing the area into second grids with the same size by using a preset second step pitch;
dividing all the defective points in the final defective point sub-tables of all the channels into a plurality of second groups, enabling the spacing distance between the defective points in each second group to be smaller than a preset second threshold, enabling all the defective points in each second group to be located in the same second grid or adjacent second grids, and merging all the defective points in each second group.
Specifically, the defect points in the final defect point sub-tables of each channel are merged in a similar manner to the merging of the defect points in the initial defect point sub-tables of each channel, the preset second step distance is equal to the preset first step distance, and the preset second threshold value is equal to the preset first threshold value.
As a preferred embodiment, merging all defect points in each group of the second type, comprises the following steps:
the coordinates of the defect points in each second type group after combination are the coordinates of the defect points with the largest area in the second type group, and the areas of the defect points after combination are the areas of the defect points with the largest area in the second type group. Because the defect points in the final defect point sub-tables of different channels are combined, the combined defect point coordinate and size error is smaller through the combination mode.
Referring to fig. 10, an embodiment of the present invention further provides a system for multi-channel defect merging analysis, including:
and the table dividing module is used for dividing the initial defect point list obtained by detecting the plurality of channels into initial defect point sub-tables corresponding to different channels and storing the initial defect point sub-tables.
And the first merging module is used for merging the defect points separated by the preset distance in the initial defect point sub-table of each channel to obtain and store the final defect point sub-table of each channel.
And the second merging module is used for merging the defect points with preset distance intervals among the final defect point sub-tables of different channels to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging and forming the defect point. In this embodiment of the present invention, the second merging module is further configured to use a string record to identify each defective point in the final defective point list, so that the string contains channel information of the defective point of the final defective point sub-list where the defective point is formed by merging. And the method ensures that the extraction and the retrieval of the defect point information are convenient and efficient by a character string recording mode.
And the display module is used for displaying the defect points in the final defect point list according to the combination of different channels.
Compared with the prior art, the invention has the advantages that: according to the multichannel defect merging analysis system, the defect points obtained by detecting the multiple channels are merged twice to form the final defect point list, the channel information of the defect points of the final defect point sub-list of the defect points is formed by merging, the defect points of a single channel or the combination of the multiple channels are displayed, a user can select the defect points to be displayed according to the requirement, the user can be helped to visually distinguish the false detection defect points or the missed detection defect points, and the user experience and the accuracy of the detection result are improved.
The present invention is not limited to the above-described embodiments, and it will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and such modifications and improvements are also considered to be within the scope of the present invention. Those not described in detail in this specification are within the skill of the art.
Claims (9)
1. A method for multi-channel defect merging analysis is characterized by comprising the following steps:
dividing an initial defect point list obtained by detecting a plurality of channels into initial defect point sub-lists corresponding to each channel and storing the initial defect point sub-lists;
respectively combining the defect points in the initial defect point sub-table of each channel, wherein the spacing distance of the defect points is smaller than a preset first threshold value, obtaining and storing the final defect point sub-table of each channel; merging the defect points in the initial defect point sub-table of each channel, wherein the interval distance of the defect points is less than a preset first threshold value, comprises: determining a distribution area of the defect points according to the coordinates of all the defect points in the initial defect point sub-table of each channel, and dividing the area into first grids with the same size by using a preset first step pitch; dividing all defect points in the initial defect point sub-table of each channel into a plurality of first type groups, enabling the spacing distance between the defect points in each first type group to be smaller than a preset first threshold value, enabling all defect points in each first type group to be located in the same first grid or the first grid adjacent to the first grid, and merging all defect points in each first type group;
merging the defect points with the spacing distance smaller than a preset second threshold value among the final defect point sub-tables of each channel to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging to form the defect point;
and displaying the defect points in the final defect point table according to a single channel or a combination of a plurality of channels.
2. The method of claim 1, wherein merging all defect points in each first type group comprises:
the combined coordinates of the defect points in each first type group are the centers of all the defect point coordinates in the first type group to form a rectangular area, and the combined area of the defect points is the sum of the areas of all the defect points in the first type group.
3. The method of claim 1, wherein merging the defect points of which the spacing distance between the final defect point sub-tables of each channel is smaller than a preset second threshold value comprises the following steps:
determining a distribution area of the defect points according to the coordinates of all the defect points in the final defect point sub-tables of each channel, and dividing the area into second grids with the same size by using a preset second step pitch;
dividing all the defective points in the final defective point sub-tables of all the channels into a plurality of second groups, enabling the spacing distance between the defective points in each second group to be smaller than a preset second threshold, enabling all the defective points in each second group to be located in the same second grid or a second grid adjacent to the second grid, and merging all the defective points in each second group.
4. A method of multi-channel defect merging analysis as claimed in claim 3, wherein merging all defect points in each second category group comprises the steps of:
the coordinates of the defect points in each second type group after combination are the coordinates of the defect points with the largest inner area of the second type group, and the areas of the defect points after combination are the areas of the defect points with the largest inner area of the second type group.
5. The method of claim 1, wherein the defect merging analysis comprises: the combination of the plurality of channels includes and, or and non-combination between the plurality of channels.
6. The method of claim 1, wherein the defect merging analysis comprises: the number of channels includes, but is not limited to, three.
7. The method of claim 1, wherein the defect merging analysis comprises:
each defective dot in the final defective dot table is recorded using a character string containing channel information of the defective dot incorporated in the final defective dot sub-table forming the defective dot.
8. A system for multi-channel defect merge analysis according to the method of claim 1, comprising:
the table dividing module is used for dividing the initial defect point list obtained by detecting the plurality of channels into initial defect point sub-tables corresponding to each channel and storing the initial defect point sub-tables;
the first merging module is used for respectively merging the defect points which are in the initial defect point sub-table of each channel and have the spacing distance smaller than a preset first threshold value to obtain and store the final defect point sub-table of each channel; merging the defect points in the initial defect point sub-table of each channel, wherein the interval distance of the defect points is less than a preset first threshold value, comprises: determining a distribution area of the defect points according to the coordinates of all the defect points in the initial defect point sub-table of each channel, and dividing the area into first grids with the same size by using a preset first step pitch; dividing all defect points in the initial defect point sub-table of each channel into a plurality of first type groups, enabling the spacing distance between the defect points in each first type group to be smaller than a preset first threshold value, enabling all defect points in each first type group to be located in the same first grid or the first grid adjacent to the first grid, and merging all defect points in each first type group;
the second merging module is used for merging the defect points which are among the final defect point sub-tables of different channels and have the spacing distance smaller than a preset second threshold value to obtain and store a final defect point table, wherein each defect point in the final defect point table comprises channel information of the defect point of the final defect point sub-table merging to form the defect point;
and the display module is used for displaying the defect points in the final defect point list according to a single channel or a combination of a plurality of channels.
9. The system of claim 8, wherein:
the second merging module is further configured to record each defective point in the final defective point list using one character string, so that the character string contains channel information of the defective point of the final defective point sub-list where the defective point is formed by merging.
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