CN110207732A - 一种超高温蓝宝石光纤f-p温度应变复合传感器 - Google Patents
一种超高温蓝宝石光纤f-p温度应变复合传感器 Download PDFInfo
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Abstract
本发明涉及光纤传感技术领域，特指一种超高温蓝宝石光纤F‑P温度应变复合传感器，包括第一蓝宝石单晶光纤、第二蓝宝石单晶光纤、蓝宝石晶片与两端设有开口的蓝宝石毛细管，第一蓝宝石单晶光纤的倾斜端面与第二蓝宝石单晶光纤的平整端面分别通过蓝宝石毛细管的两端开口插入到蓝宝石毛细管腔体中，蓝宝石晶片设于第一蓝宝石单晶光纤的倾斜端面与第二蓝宝石单晶光纤的平整端面之间，蓝宝石晶片一侧的平整端面与第二蓝宝石单晶光纤的平整端面平行对准且不接触，蓝宝石晶片另一侧与第一蓝宝石单晶光纤的倾斜端面接触。采用这样的结构设置，可实现从室温到1400℃的大范围温度测量，能满足超高温恶劣环境下的应变、温度同时监测，测量灵敏度高、精度高。
Description
技术领域
本发明涉及光纤传感技术领域，特指一种超高温蓝宝石光纤F-P温度应变复合传感器。
背景技术
航空航天、石油化工等超高温环境下的应变测量一直都是传感探测领域的难点，恶劣的超高温环境会影响传统电类传感器和测量仪表的性能，光纤传感器具有结构简单、抗电磁干扰、测量精度高、测量动态范围大等特点，在超高温环境下的应变监测中具有广阔应用前景。目前常用于应变测量的光学法布里-珀罗(Fabry–Pérot,F-P)传感器和光纤布拉格光栅(Fiber Bragg Grating,FBG)传感器存在温度应变交叉敏感、测量量程有限和1400℃以上超高温环境下材料机械强度下降等问题，很大程度上制约了超高温领域光纤传感技术的发展。
由于蓝宝石单晶(Al2O3)熔化温度为2053℃，具有高强度、高硬度(为石英的7倍)、高抗磨损性、高耐热性、高抗腐蚀性、高化学惰性、高热传导性。单晶蓝宝石光纤天然的耐高温特性使其经过一定封装增加机械强度后可长期应用于1400℃以上的超高温环境中，是超高温应变测量的极佳选择。基于蓝宝石晶片的光纤温度传感器具有从紫外到远红外区域的宽透明度，被证明是监测超高温度的理想设备。
目前，已有基于石英光纤的EFPI/FBG复合传感器，其结构实质是EFPI应变传感器与耐高温FBG传感器的复用，仅能满足600℃以下的温度和应变的同时监测。能适用于1400℃超高温环境下应变、温度同时监测的光纤传感器尚属空白。
发明内容
针对现有技术的不足，本发明提供了一种超高温蓝宝石光纤F-P温度应变复合传感器，第一蓝宝石单晶光纤、第二蓝宝石单晶光纤、蓝宝石晶片和蓝宝石毛细管本身的材质选用Al2O3，本身具有耐高温性能，第二蓝宝石单晶光纤平整端面与蓝宝石晶片平整端面之间的空气腔形成非本征型光纤法布里-珀罗干涉仪结构，可对大量程范围应变进行实时监测，可实现从室温到1400℃的大范围温度测量，能满足超高温恶劣环境下的应变、温度同时监测，测量灵敏度高、精度高。
为了实现上述目的，本发明应用的技术方案如下：
一种超高温蓝宝石光纤F-P温度应变复合传感器，包括第一蓝宝石单晶光纤、第二蓝宝石单晶光纤、蓝宝石晶片与两端设有开口的蓝宝石毛细管，第一蓝宝石单晶光纤的倾斜端面与第二蓝宝石单晶光纤的平整端面分别通过蓝宝石毛细管的两端开口插入到蓝宝石毛细管腔体中，蓝宝石晶片设于第一蓝宝石单晶光纤的倾斜端面与第二蓝宝石单晶光纤的平整端面之间，蓝宝石晶片一侧的平整端面与第二蓝宝石单晶光纤的平整端面平行对准且不接触，蓝宝石晶片另一侧与第一蓝宝石单晶光纤的倾斜端面接触。
进一步而言，所述第一蓝宝石单晶光纤的倾斜端面采用在原平整端面上经研磨与光纤径向形成5°～10°的倾斜角。
进一步而言，所述第一蓝宝石单晶光纤、第二蓝宝石单晶光纤和蓝宝石晶片分别与蓝宝石毛细管的内腔以CO2激光焊接的方式连接或通过无机耐高温胶胶粘方式连接，第二蓝宝石单晶光纤的另一端面经过激光开有小孔，且小孔孔径小于4μm。
进一步而言，所述蓝宝石晶片的两个端面平整，厚度为0.5mm、外径为120μm，蓝宝石晶片的一侧经刻蚀形成直径为100μm、深度为200μm，且端面平整的凹腔，并依次经过RCA清洗和去离子水超声清洗。
进一步而言，所述蓝宝石毛细管的内径为130～135μm。
进一步而言，所述第一蓝宝石单晶光纤和第二蓝宝石单晶光纤的外径均为125μm，第二蓝宝石单晶光纤的长度为4～6mm。
本发明有益效果：
1)第二蓝宝石单晶光纤平整端面与蓝宝石晶片平整端面之间的空气腔形成非本征型光纤法布里-珀罗干涉仪结构，可对大量程范围应变进行实时监测；
2)蓝宝石晶片两个端面之间形成本征型光纤法布里-珀罗干涉仪结构，可实现从室温到1400℃的大范围温度测量；
3)能满足超高温恶劣环境下的应力、温度同时监测，测量灵敏度高、精度高，并具有温度自补偿的功能。
附图说明
图1是本发明整体结构示意图。
1.第一蓝宝石单晶光纤；2.第二蓝宝石单晶光纤；3.蓝宝石晶片；4.蓝宝石毛细管。
具体实施方式
下面结合附图与实施例对本发明的技术方案进行说明。
如图1所示，本发明所述一种超高温蓝宝石光纤F-P温度应变复合传感器，包括第一蓝宝石单晶光纤1、第二蓝宝石单晶光纤2、蓝宝石晶片3与两端设有开口的蓝宝石毛细管4，第一蓝宝石单晶光纤1的倾斜端面与第二蓝宝石单晶光纤2的平整端面分别通过蓝宝石毛细管4的两端开口插入到蓝宝石毛细管4腔体中，蓝宝石晶片3设于第一蓝宝石单晶光纤1的倾斜端面与第二蓝宝石单晶光纤2的平整端面之间，蓝宝石晶片3一侧的平整端面与第二蓝宝石单晶光纤2的平整端面平行对准且不接触，蓝宝石晶片3另一侧与第一蓝宝石单晶光纤1的倾斜端面接触。
本发明采用这样的结构设置，由于第一蓝宝石单晶光纤1、第二蓝宝石单晶光纤2、蓝宝石晶片3和蓝宝石毛细管4本身的材质选用Al2O3，本身就具有耐高温性能，蓝宝石晶片3一侧的平整端面与第二蓝宝石单晶光纤2的平整端面平行对准且不接触，也就是说第二蓝宝石单晶光纤2平整端面与蓝宝石晶片3平整端面之间的空气腔形成非本征型光纤法布里-珀罗干涉仪结构，可对大量程范围应变进行实时监测，可实现从室温到1400℃的大范围温度测量，能满足超高温恶劣环境下的应变、温度同时监测，测量灵敏度高、精度高。
实际应用中，在所述蓝宝石毛细玻璃管4腔体中第二蓝宝石单晶光纤2、蓝宝石晶片3与蓝宝石毛细管4的内径相匹配来实现第二蓝宝石单晶光纤2与蓝宝石晶片3之间的平行对准。
优选的，蓝宝石晶片3一侧的平整端面与第二蓝宝石单晶光纤2的平整端面的间距为300μm～400μm。
实际应用中，蓝宝石晶片3另一侧与第一蓝宝石单晶光纤1的倾斜端面接触，可避免第一蓝宝石单晶光纤1与蓝宝石晶片3之间形成新的F-P腔。
更具体而言，所述第一蓝宝石单晶光纤1的倾斜端面采用在原平整端面上经研磨与光纤径向形成5°～10°的倾斜角。
优选的，本发明第一蓝宝石单晶光纤1的倾斜端面采用在原平整端面上经研磨与光纤径向形成8°的倾斜角。
更具体而言，所述第一蓝宝石单晶光纤1、第二蓝宝石单晶光纤2和蓝宝石晶片3分别与蓝宝石毛细管4的内腔以CO2激光焊接的方式连接或通过无机耐高温胶胶粘方式连接，第二蓝宝石单晶光纤2的另一端面经过激光开有小孔，且小孔孔径小于4μm。采用这样的结构设置，可避免超高温环境下蓝宝石毛细管4腔内气压的改变对测量的影响。
更具体而言，所述蓝宝石晶片3的两个端面平整，厚度为0.5mm、外径为120μm，蓝宝石晶片3的一侧经刻蚀形成直径为100μm、深度为200μm，且端面平整的凹腔，并依次经过RCA清洗和去离子水超声清洗。
实际应用中，本发明所述的蓝宝石晶片3是所述超高温蓝宝石光纤F-P温度应变复合传感器的温度敏感元件，通过改变其有效区域的厚度来调整所述超高温蓝宝石光纤F-P温度应变复合传感器的温度灵敏度。
更具体而言，所述蓝宝石毛细管4的内径为130～135μm。
实际应用中，本发明所述蓝宝石毛细管4是所述超高温蓝宝石光纤F-P温度应变复合传感器的敏感部位，通过改变其长度来调整所述超高温蓝宝石光纤F-P温度应变复合传感器的应变灵敏度。
更具体而言，所述第一蓝宝石单晶光纤1和第二蓝宝石单晶光纤2的外径均为125μm，第二蓝宝石单晶光纤2的长度为4～6mm。
以上对本发明实施例中的技术方案进行了描述，但本发明并不局限于上述的具体实施方式，上述的具体实施方式仅仅是示意性的，而不是限制性的，本领域的普通技术人员在本发明的启示下，在不脱离本发明宗旨和权利要求所保护的范围情况下，还可做出很多形式，这些均属于本发明的保护范围之内。
Claims (6)
1.一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：包括第一蓝宝石单晶光纤(1)、第二蓝宝石单晶光纤(2)、蓝宝石晶片(3)与两端设有开口的蓝宝石毛细管(4)，所述第一蓝宝石单晶光纤(1)的倾斜端面与第二蓝宝石单晶光纤(2)的平整端面分别通过蓝宝石毛细管(4)的两端开口插入到蓝宝石毛细管(4)腔体中，所述蓝宝石晶片(3)设于第一蓝宝石单晶光纤(1)的倾斜端面与第二蓝宝石单晶光纤(2)的平整端面之间，所述蓝宝石晶片(3)一侧的平整端面与第二蓝宝石单晶光纤(2)的平整端面平行对准且不接触，所述蓝宝石晶片(3)另一侧与第一蓝宝石单晶光纤(1)的倾斜端面接触。
2.根据权利要求1所述的一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：所述第一蓝宝石单晶光纤(1)的倾斜端面采用在原平整端面上经研磨与光纤径向形成5°～10°的倾斜角。
3.根据权利要求1所述的一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：所述第一蓝宝石单晶光纤(1)、第二蓝宝石单晶光纤(2)和蓝宝石晶片(3)分别与蓝宝石毛细管(4)的内腔以CO2激光焊接的方式连接或通过无机耐高温胶胶粘方式连接，所述第二蓝宝石单晶光纤(2)的另一端面经过激光开有小孔，且小孔孔径小于4μm。
4.根据权利要求1所述的一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：所述蓝宝石晶片(3)的两个端面平整，厚度为0.5mm、外径为120μm，所述蓝宝石晶片(3)的一侧经刻蚀形成直径为100μm、深度为200μm，且端面平整的凹腔，并依次经过RCA清洗和去离子水超声清洗。
5.根据权利要求1所述的一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：所述蓝宝石毛细管(4)的内径为130～135μm。
6.根据权利要求1所述的一种超高温蓝宝石光纤F-P温度应变复合传感器，其特征在于：所述第一蓝宝石单晶光纤(1)和第二蓝宝石单晶光纤(2)的外径均为125μm，所述第二蓝宝石单晶光纤(2)的长度为4～6mm。
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