CN110207462A - A kind of recovery system and recovery method of integrated high pure nitrogen and argon gas - Google Patents
A kind of recovery system and recovery method of integrated high pure nitrogen and argon gas Download PDFInfo
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- CN110207462A CN110207462A CN201910621969.3A CN201910621969A CN110207462A CN 110207462 A CN110207462 A CN 110207462A CN 201910621969 A CN201910621969 A CN 201910621969A CN 110207462 A CN110207462 A CN 110207462A
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- argon
- gas
- nitrogen
- liquid
- evaporator
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- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 title claims abstract description 746
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 title claims abstract description 389
- 229910052786 argon Inorganic materials 0.000 title claims abstract description 375
- 239000007789 gas Substances 0.000 title claims abstract description 267
- 229910052757 nitrogen Inorganic materials 0.000 title claims abstract description 195
- 238000000034 method Methods 0.000 title claims abstract description 51
- 238000011084 recovery Methods 0.000 title claims abstract description 51
- 239000007788 liquid Substances 0.000 claims abstract description 166
- 238000001816 cooling Methods 0.000 claims abstract description 101
- 238000000746 purification Methods 0.000 claims abstract description 62
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 52
- 239000001301 oxygen Substances 0.000 claims abstract description 52
- 238000004064 recycling Methods 0.000 claims abstract description 30
- 229910002091 carbon monoxide Inorganic materials 0.000 claims abstract description 25
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims abstract description 24
- 239000001257 hydrogen Substances 0.000 claims abstract description 21
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 21
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims abstract description 20
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 37
- 238000001704 evaporation Methods 0.000 claims description 31
- 230000008020 evaporation Effects 0.000 claims description 31
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 20
- 229910001868 water Inorganic materials 0.000 claims description 20
- 230000008929 regeneration Effects 0.000 claims description 19
- 238000011069 regeneration method Methods 0.000 claims description 19
- 239000001569 carbon dioxide Substances 0.000 claims description 18
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 14
- 239000000203 mixture Substances 0.000 claims description 13
- 238000009833 condensation Methods 0.000 claims description 12
- 230000005494 condensation Effects 0.000 claims description 12
- 239000013589 supplement Substances 0.000 claims description 10
- 238000011282 treatment Methods 0.000 claims description 9
- 230000008901 benefit Effects 0.000 claims description 8
- 230000008859 change Effects 0.000 claims description 7
- 230000001105 regulatory effect Effects 0.000 claims description 7
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 239000000284 extract Substances 0.000 claims description 5
- 230000000630 rising effect Effects 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 4
- 239000000470 constituent Substances 0.000 claims description 4
- 230000007423 decrease Effects 0.000 claims description 4
- 238000006392 deoxygenation reaction Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 3
- 230000033228 biological regulation Effects 0.000 claims description 3
- 239000006227 byproduct Substances 0.000 claims description 3
- 238000002156 mixing Methods 0.000 claims description 3
- 238000012545 processing Methods 0.000 claims description 2
- 238000011049 filling Methods 0.000 claims 1
- 238000010025 steaming Methods 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 13
- 238000005265 energy consumption Methods 0.000 abstract description 9
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 238000013461 design Methods 0.000 abstract description 6
- 229960004424 carbon dioxide Drugs 0.000 description 15
- 239000013078 crystal Substances 0.000 description 9
- 238000009835 boiling Methods 0.000 description 7
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 5
- 238000005057 refrigeration Methods 0.000 description 5
- 239000006096 absorbing agent Substances 0.000 description 4
- 230000006837 decompression Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 4
- 239000003921 oil Substances 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000006555 catalytic reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241001076960 Argon Species 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 241000790917 Dioxys <bee> Species 0.000 description 1
- PWKWDCOTNGQLID-UHFFFAOYSA-N [N].[Ar] Chemical compound [N].[Ar] PWKWDCOTNGQLID-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 150000001335 aliphatic alkanes Chemical class 0.000 description 1
- XKMRRTOUMJRJIA-UHFFFAOYSA-N ammonia nh3 Chemical compound N.N XKMRRTOUMJRJIA-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 235000013876 argon Nutrition 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 229910002090 carbon oxide Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
- 230000008520 organization Effects 0.000 description 1
- 238000012946 outsourcing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 210000000582 semen Anatomy 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04248—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion
- F25J3/04254—Generation of cold for compensating heat leaks or liquid production, e.g. by Joule-Thompson expansion using the cold stored in external cryogenic fluids
- F25J3/0426—The cryogenic component does not participate in the fractionation
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/044—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air using a single pressure main column system only
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/02—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream
- F25J3/04—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification by rectification, i.e. by continuous interchange of heat and material between a vapour stream and a liquid stream for air
- F25J3/04521—Coupling of the air fractionation unit to an air gas-consuming unit, so-called integrated processes
- F25J3/04612—Heat exchange integration with process streams, e.g. from the air gas consuming unit
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J3/00—Processes or apparatus for separating the constituents of gaseous or liquefied gaseous mixtures involving the use of liquefaction or solidification
- F25J3/08—Separating gaseous impurities from gases or gaseous mixtures or from liquefied gases or liquefied gaseous mixtures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/02—Processes or apparatus using separation by rectification in a single pressure main column system
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/50—Processes or apparatus using separation by rectification using multiple (re-)boiler-condensers at different heights of the column
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2200/00—Processes or apparatus using separation by rectification
- F25J2200/72—Refluxing the column with at least a part of the totally condensed overhead gas
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/40—Processes or apparatus using other separation and/or other processing means using hybrid system, i.e. combining cryogenic and non-cryogenic separation techniques
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2205/00—Processes or apparatus using other separation and/or other processing means
- F25J2205/82—Processes or apparatus using other separation and/or other processing means using a reactor with combustion or catalytic reaction
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2210/00—Processes characterised by the type or other details of the feed stream
- F25J2210/58—Argon
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/42—Nitrogen or special cases, e.g. multiple or low purity N2
- F25J2215/44—Ultra high purity nitrogen, i.e. generally less than 1 ppb impurities
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2215/00—Processes characterised by the type or other details of the product stream
- F25J2215/58—Argon
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2220/00—Processes or apparatus involving steps for the removal of impurities
- F25J2220/02—Separating impurities in general from the feed stream
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2245/00—Processes or apparatus involving steps for recycling of process streams
- F25J2245/58—Processes or apparatus involving steps for recycling of process streams the recycled stream being argon or crude argon
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2260/00—Coupling of processes or apparatus to other units; Integrated schemes
- F25J2260/02—Integration in an installation for exchanging heat, e.g. for waste heat recovery
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
- F25J—LIQUEFACTION, SOLIDIFICATION OR SEPARATION OF GASES OR GASEOUS OR LIQUEFIED GASEOUS MIXTURES BY PRESSURE AND COLD TREATMENT OR BY BRINGING THEM INTO THE SUPERCRITICAL STATE
- F25J2270/00—Refrigeration techniques used
- F25J2270/90—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration
- F25J2270/904—External refrigeration, e.g. conventional closed-loop mechanical refrigeration unit using Freon or NH3, unspecified external refrigeration by liquid or gaseous cryogen in an open loop
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Mechanical Engineering (AREA)
- Thermal Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Separation By Low-Temperature Treatments (AREA)
Abstract
The invention discloses the recovery system and its recovery method of a kind of integrated High Purity Nitrogen and argon gas, which includes argon gas compressor, except carbon monoxide remover, oxygen-eliminating device, argon gas pre-cooling purification system, air compressor, air precooling purification system, heat exchanger, argon column reboiler, pure argon column, argon column condenser/evaporator, auxiliary condenser/evaporator, nitrogen tower and nitrogen tower condenser/evaporator.It not only can guarantee the temperature difference using oxygen rich gas as the cold source for assisting condenser/evaporator based on the recovery method of recovery system of the present invention, but also can make to assist the volume of condenser/evaporator will not be too small, be conducive to manufacture and design；And using the connection function of auxiliary condenser/evaporator, the liquid argon amount of extraneous addition can be reduced, the operation cost of equipment is reduced；And the convenience of liquid argon offer is provided using recycling scene, cooling capacity is provided with liquid argon, the rate of recovery of argon gas and the utilization rate of hydrogen can be improved, simplified the process and operation of cryogenic rectification, reduce operation energy consumption.
Description
Technical field
The present invention relates to a kind of argon gas recovery methods more particularly to a kind of use liquid argon refrigeration, argon gas band argon to go out tower union
At the recovery system and recovery method of High Purity Nitrogen and argon gas.
Background technique
Vertical pulling method (Czochralski method) is to produce the main method of monocrystalline silicon, the monocrystalline in the whole world 70%~80%
Silicon is produced by vertical pulling method.Most common vertical pulling method production monocrystalline silicon technique is using i.e. as vacuum technology is again as flowing atmosphere work
The decompression crystal pulling technique of skill；Decompression technique is to be passed through height into single crystal growing furnace burner hearth to continuous constant speed in silicon single crystal pulling process
Purity argon, while vacuum pump is constantly from the outside pump Argon of burner hearth keeps in burner hearth vacustat in 20 supports or so, this
The characteristics of kind of technique existing vacuum technology, and have the characteristics of flowing atmosphere technique.The vacuum pump of decompression crystal pulling technique generally uses
Slide valve pump, slide valve pump are the oil-sealed rotary pumps that sealing is kept with oil.Argon gas is produced during carrying crystal-pulling due to high temperature
Raw Si oxide and impurity volatile matter, and atmosphere is discharged by pumping for vacuum pump.
By the analysis to discharge argon gas, major impurity ingredient is oxygen, nitrogen, carbon monoxide, carbon dioxide, methane
Equal alkane, liquid lubricant mist；Recycling this part argon gas has very big realistic meaning.The well-known technique of argon gas recovery purifying:
Thick oil removing, then the high-precision oil removing dedusting after compression is cooling are carried out to the argon gas recycled from single crystal growing furnace；Then it is urged by high temperature
Change makes the hydro carbons such as methane and carbon monoxide react production water and carbon dioxide with oxygen, guarantees that oxygen is excessive (miscellaneous in catalysis reaction
Oxygen is not enough then added in matter oxygen)；By generating excessive oxygen with the hydrogen reaction being added
Water, and guarantee to react hydrogen excess, impurity component is water, carbon dioxide, hydrogen and nitrogen in argon gas after processing；Finally pass through argon
Gas room temperature absorbing unit adsorbs water and carbon dioxide, obtains containing only nitrogen and hydrogen is the crude argon of impurity.Argon gas room temperature is inhaled
Coupon member is made of two absorbers, and the adsorbent equipped with absorption water and carbon dioxide in absorber a, absorber is inhaled
Attached work, it includes pressure release that another absorber, which carries out, heats, blows cold reproduction operation.The gas of the reproduction operation uses nitrogen
Gas, the regeneration nitrogen are controlled from low-temperature fractionating tower production or outsourcing, argon gas room temperature absorbing unit in ice chest by time-program(me)
The switching of device auto-controll operation.
Publication CN102583281A discloses a kind of method and apparatus of argon gas recovery purifying in monocrystalline silicon production,
In technical solution disclosed by it, cryogenic rectification part uses air cycle refrigeration, and energy consumption is high, and process is complicated, the excess of addition
Hydrogen gas automatic blow down, utilization rate are low.
Publication CN104406364A discloses the argon gas recovery purifying equipment and argon gas recycling of a kind of double tower coupling
Purification process uses air compression, double-column process, and energy consumption is without advantage, and structure is complicated, increases equipment investment.
Publication CN206347802U discloses a kind of device of single column cryogenic rectification recycling argon gas, disclosed by
In technical solution, the extraneous liquid argon amount provided for holding ice chest is larger, and is limited by regeneration gas, and recovery rate is relatively low, this is specially
Only design carrys out deoxygenation to benefit, does not remove the removal of excess carbon monoxide in raw material.
Publication CN108645118A discloses a kind of device and method for improving the argon gas rate of recovery, disclosed by
In technical solution, stream backed expansion is used, is suitable for argon gas band and extrudes tower situation, be not suitable for argon gas normal pressure and go out tower.
Publication CN109631495A discloses the method and device of a kind of integrated High Purity Nitrogen and argon gas recycling, institute
In the technical solution of disclosure, using positive flowrate expansion process, band low temperature movement component, stability is poor.
Therefore, those skilled in the art's more succinct, no low temperature movement component that is dedicated to development process, more convenient operation,
The higher argon gas recovery method of recovery rate.
Summary of the invention
The purpose of the present invention is lack for moving component is more, energy consumption is high in the recycling of existing argon gas, investment is big, recovery rate is low etc.
Fall into, the condition of liquid argon supply had using monocrystalline silicon producer, provide it is a kind of using liquid argon refrigeration, argon gas band argon goes out tower and integrates
The recovery system and recovery method of High Purity Nitrogen and argon gas, have that process is simple, operation side using the cryogenic rectification of the recovery method
Just, the features such as energy consumption is lower, recovery rate is higher.
To achieve the above object, the invention adopts the following technical scheme:
The first aspect of the invention is to provide the recovery method of a kind of integrated High Purity Nitrogen and argon gas, including argon gas recycling stream
Road and air nitrogen flow path, in which:
The argon gas recycles flow path, includes the following steps:
S11 removes CO therein into except carbon monoxide remover by recycling argon gas after the pressurization of argon gas compressor；After CO
Argon gas and the hydrogen of addition be mixed into oxygen-eliminating device and remove oxygen therein, high temperature argon enters argon gas pre-cooling purification system
It is middle to remove water and carbon dioxide therein, obtain dry crude argon；
Dry crude argon is sent into rectifying ice chest, first enters after heat exchanger is cooled to condensing temperature and be built in essence by S12
The argon column reboiler of argon column bottom, in argon column reboiler, most of gas is liquefied, out the gas-liquid mixed stream of argon column reboiler
Body is sent into pure argon column middle and upper part after reducing pressure by regulating flow and participates in rectifying；
S13, into the gas-liquid mixture fluid of pure argon column, liquid portion therein is obtained with liquid decline in tower in tower bottom
To pure liquid argon；The evaporation side that pure liquid argon is sent into argon column condenser/evaporator after reducing pressure by regulating flow, pure liquid argon are extracted out from rectifier bottoms
It is evaporated to argon gas in the evaporation side of argon column condenser/evaporator, sends out rectifying ice chest after cooling capacity is recycled in heat exchanger re-heat；
S14, into the gas-liquid mixture fluid of pure argon column, gas part therein is with gas rising in tower, in tower top
Gas is mainly hydrogen and nitrogen, and a part for the gas extracted out from pure argon column top enters auxiliary condenser/evaporator, with part
Liquid air exchanges heat, and is sent into pure argon column after being condensed into liquid；
The air nitrogen flow path, includes the following steps:
S21, air remove water therein and titanium dioxide after air compressor compresses, into air precooling purification system
Carbon；Air after drying is cooled to condensing temperature through the heat exchanger in rectifying ice chest, enters nitrogen tower bottom later, provides for nitrogen tower
Rectifying gas；
S22, into the band liquid air gas of nitrogen tower bottom, heavy constituent therein is gathered in a liquid, obtains liquid in tower bottom
Oxygen rich air；Light component therein is gathered in gas, obtains high-purity nitrogen in tower top；
S23, the high-purity nitrogen extracted out from nitrogen column overhead are divided into two parts: first part's nitrogen is sent into nitrogen tower condensation evaporation
The high temperature side of device sends the rectifying that nitrogen tower participates in nitrogen tower back to by cooling down after liquid nitrogen；Second part nitrogen, it is multiple by heat exchanger
After recuperation of heat cooling capacity, rectifying ice chest is sent out, is then fed into argon gas pre-cooling purification system and is used as regeneration gas；
S24 is sent into nitrogen tower condenser/evaporator, mentions for it after the adjusted pressure of oxygen-enriched liquid air that the bottom of nitrogen tower is extracted out
It for cold source, itself is vaporizated into oxygen rich air and goes out nitrogen tower condenser/evaporator, provide cooling capacity into auxiliary condenser/evaporator for it, from
The oxygen rich air come out in auxiliary condenser/evaporator sends out rectifying ice chest after entering heat exchanger re-heat, and it is pure to be then sent to air precooling
Dry gas is used as in change system.
Further, mixed with the hydrogen of addition except the argon gas after CO is after the first cooler cools in step S11
It closes to enter in oxygen-eliminating device and be reacted, the high temperature argon after reaction enters argon gas pre-cooling purifying system after the cooling of the second cooler
System.
Further, in step S13, the supplement liquid argon from the rectifying ice chest external world enters the argon column by pipeline
The evaporation side of condenser/evaporator.
Further, in step S14, the gas extracted out at the top of the pure argon column is divided into three parts: first part's gas
Rectifying ice chest is sent out after cooling capacity is recycled in heat exchanger re-heat, the nitrogen as regeneration gas a part of purifier, with rectifying ice chest out
Gas is sent into argon gas pre-cooling purification system the regeneration for participating in purifier together；Second part gas enters the gas of condenser/evaporator
Side is condensed into liquid, flows into pure argon column, provides liquid for rectifying；Part III gas enters auxiliary condenser/evaporator, with part
Liquid air exchanges heat, and after being condensed into liquid, and is sent into pure argon column after second part liquid joint.
Further, in step S23, it is described by cooling down be liquid nitrogen after, a part send back to nitrogen tower participate in nitrogen tower essence
It evaporates, another part liquid nitrogen can be used as byproduct, extract rectifying ice chest out.
The second aspect of the invention is to provide a kind of based on the integrated High Purity Nitrogen of the recovery method and the recycling of argon gas
System, including argon gas compressor, except carbon monoxide remover, oxygen-eliminating device, argon gas be pre-chilled purification system, air compressor, air precooling
Purification system, heat exchanger, argon column reboiler, pure argon column, argon column condenser/evaporator, auxiliary condenser/evaporator, nitrogen tower and nitrogen tower are cold
Solidifying evaporator；Wherein:
The argon gas compressor is by pipeline successively through described except purification system is pre-chilled in carbon monoxide remover, oxygen-eliminating device and argon gas
Connection, the argon gas compressor are used to carry out pressurized treatments to recycling argon gas, and the recycling argon gas after pressurization successively removes one through described
Carbonoxide device and oxygen-eliminating device remove CO and oxygen therein, are then fed into the argon gas pre-cooling purification system and remove after cooling down
Water and carbon dioxide therein；
The argon gas pre-cooling purification system is by pipeline through the heat exchanger and the argon column for being set to the pure argon column bottom
Reboiler connection, is cooled to condensing temperature through the heat exchanger for the argon gas dried, and be sent into shape in the argon column reboiler
At gas-liquid mixture fluid, argon column reboiler bottom is connected to the pure argon column middle and upper part by pipeline, again by the argon column
Gas-liquid mixture fluid in boiling device is sent into the pure argon column middle and upper part after pressure regulation and participates in rectifying；
The bottom of the pure argon column is connected to the argon column condenser/evaporator by pipeline, by the pure of the pure argon column tower bottom
Liquid argon is pumped to the evaporation side of the argon column condenser/evaporator, and is evaporated to argon gas in evaporation side；The argon column condenser/evaporator
Evaporation side be connected to the rectifying ice chest external world through the heat exchanger by pipeline, by the argon gas of evaporation side through the heat exchange
The rectifying ice chest is sent out after device re-heat；
The top of the pure argon column passes through pipeline respectively and through the heat exchanger goes out rectifying ice chest to be connected to argon gas pre-cooling pure
Change system, the gas side that the argon column condenser/evaporator is connected to by pipeline and the auxiliary condensation evaporation is connected to by pipeline
Device；The gas extracted out at the top of the pure argon column is divided into three parts: first part's gas is sent after cooling capacity is recycled in heat exchanger re-heat
Rectifying ice chest out is sent into argon gas pre-cooling purification system together with the nitrogen of rectifying ice chest out；Second part gas enters condensation
The gas side of evaporator is condensed into liquid, flows into pure argon column, provides liquid for rectifying；Part III gas enters auxiliary condensation and steams
Device is sent out, after being exchanged heat with part liquid air, be condensed into liquid, and is sent into pure argon column after second part liquid joint；
The air compressor is connect by pipeline with the air precooling purification system, and air is through the air compressor
It is sent into after pressurized treatments in the air precooling purification system, to remove water and carbon dioxide therein after cooling down；
The air precooling purification system is connected to the bottom of the nitrogen tower by pipeline through the heat exchanger, will dry
Air is sent into the nitrogen tower bottom after the heat exchanger is cooled to condensing temperature, provides rectifying gas for the nitrogen tower；
The top of the nitrogen tower passes through pipeline respectively and goes out the rectifying ice chest connection argon gas pre-cooling purifying through the heat exchanger
System, the high temperature side that the nitrogen tower condenser/evaporator is connected to by pipeline；The gas extracted out from the nitrogen top of tower is divided into two
Point, first part is sent into the high temperature side of the nitrogen tower condenser/evaporator, by described in pipeline feeding after cooling down is liquid nitrogen
Nitrogen top of tower participates in rectifying；Second part goes out rectifying ice chest after the heat exchanger re-heat and is sent into the argon gas pre-cooling purification system
It is used as regeneration gas；And
The bottom of the nitrogen tower is connected to the top of the nitrogen tower condenser/evaporator by pipeline, takes out from the bottom of the nitrogen tower
Oxygen-enriched liquid air out is sent into nitrogen tower condenser/evaporator after throttle valve adjusts pressure, itself is vaporizated into oxygen rich air from described
Discharge at the top of nitrogen tower condenser/evaporator provides cooling capacity subsequently into auxiliary condenser/evaporator for it；The auxiliary condenser/evaporator
The air precooling purification system is connected through main heat exchanger by pipeline, by the richness after exchanging heat from the auxiliary condenser/evaporator
Oxygen sends out rectifying ice chest after entering heat exchanger re-heat, is then sent in air precooling purification system as dry gas.
Further, the recovery system of the integrated High Purity Nitrogen and argon gas, further includes the first cooler, is set to institute
It states on the pipeline removed between carbon monoxide remover and oxygen-eliminating device, for cold through the argon gas progress removed after carbon monoxide remover removes CO
But it handles.
Further, the recovery system of the integrated High Purity Nitrogen and argon gas, further includes the second cooler, is set to institute
It states between oxygen-eliminating device and argon gas pre-cooling purification system on pipeline；It is cold for being carried out to the high temperature argon after the oxygen-eliminating device deoxygenation
But it handles.
Further, the evaporation side of the argon column condenser/evaporator is connected to by pipeline with the rectifying ice chest external world, with
It is that the argon column condenser/evaporator supplements liquid argon by the pipeline.
Further, it is divided into two parts from the gas that the nitrogen top of tower is extracted out, second part is sent into the nitrogen tower condensation
The high temperature side of evaporator, after cooling down is liquid nitrogen, a part of liquid nitrogen therein is sent into the nitrogen top of tower by pipeline and is joined
With rectifying, another part liquid nitrogen sends out the rectifying ice chest by pipeline.
The present invention by adopting the above technical scheme, compared with prior art, has the following technical effect that
(1) because of pure argon column band argon, the boiling point of pure argon column top gas is higher, when directly cooling with oxygen-enriched liquid air, heat exchanger
The temperature difference is larger, will increase the design difficulty of auxiliary condenser/evaporator, the present invention is using oxygen rich gas as auxiliary condenser/evaporator
Cold source, not only can guarantee the temperature difference, but can make assist condenser/evaporator volume will not be too small, be conducive to manufacture and design；
(2) using the connection function of auxiliary condenser/evaporator, argon gas recycling flow path and oxygen rich air flow path have carried out cooling capacity friendship
It changes, liquid argon cooling capacity is made to be transmitted to air pipe line by main heat exchanger, the cooling capacity for entering back into nitrogen tower is partially recycled, can reduce the external world
The liquid argon amount of addition, reduces the operation cost of equipment；
(3) convenience that liquid argon offer is had using recycling scene, provides cooling capacity with liquid argon, recycles cryogenic rectification method removing
Nitrogen, hydrogen improve the rate of recovery of argon gas and the utilization rate of hydrogen, simplify the process and operation of cryogenic rectification, reduce
Operation energy consumption；
(4) using integrated air nitrogen flow path, by the plentiful cooling capacity using liquid argon, self-produced nitrogen can be reduced in ice chest
The limitation of regeneration gas improves the recovery rate of recycling argon gas；And part liquid nitrogen is produced using rich liquid argon cooling capacity, improve economic effect
Benefit.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the recovery system of a kind of integrated High Purity Nitrogen of the present invention and argon gas；
Wherein, each appended drawing reference are as follows:
1- argon gas compressor, 2- remove carbon monoxide remover, the first cooler of 3-, 4- oxygen-eliminating device, the second cooler of 5-, 6- argon gas
Purification system, 7- rectifying ice chest, 8- heat exchanger, 9- argon column reboiler, 10- pure argon column, 11- argon column condenser/evaporator, 12- is pre-chilled
Assist condenser/evaporator, 13- nitrogen tower, 14- nitrogen tower condenser/evaporator, 15- air compressor, 16- air precooling purification system；
The pure liquid argon throttle valve of V1-, V2- crude liquid argon throttle valve, V3- liquid argon pressure-regulating valve.
Specific embodiment
The present invention is described in more detail below by specific embodiment, for a better understanding of the present invention,
But following embodiments are not intended to limit the scope of the invention.
Embodiment 1
The features such as the present embodiment is more, energy consumption is high, investment is big, recovery rate is low for moving component in the recycling of present argon gas, benefit
With monocrystalline silicon producer have liquid argon supply condition, provide cryogenic rectification process is simple and convenient to operate, energy consumption is lower, extract
The recovery method of rate higher integrated High Purity Nitrogen and argon gas, refering to Figure 1, including argon gas recycling flow path and air nitrogen stream
Road, in which:
The argon gas recycles flow path, includes the following steps:
S11 removes CO therein into except carbon monoxide remover 2 by recycling argon gas after the pressurization of argon gas compressor 1；Except CO
The hydrogen of argon gas and addition afterwards, which is mixed into oxygen-eliminating device 4, removes oxygen therein, and high temperature argon enters argon gas pre-cooling purifying
Water and carbon dioxide therein are removed in system 6, obtain dry crude argon；
Dry crude argon is sent into rectifying ice chest 7, first enters after heat exchanger 8 is cooled to condensing temperature and be built in by S12
The argon column reboiler 9 of 10 bottom of pure argon column, in argon column reboiler 9, most of gas is liquefied, out the gas of argon column reboiler 9
Liquid fluid-mixing is sent into 10 middle and upper part of pure argon column after reducing pressure by regulating flow and participates in rectifying；
S13, into the gas-liquid mixture fluid of pure argon column 10, liquid portion therein is with liquid decline in tower, in tower bottom
Obtain pure liquid argon；The evaporation side that pure liquid argon is sent into argon column condenser/evaporator 11 after reducing pressure by regulating flow is extracted out from 10 bottom of rectifying column,
Pure liquid argon is evaporated to argon gas in the evaporation side of argon column condenser/evaporator 11, sends out rectifying after cooling capacity is recycled in 8 re-heat of heat exchanger
Ice chest 7；
S14, into the gas-liquid mixture fluid of pure argon column 10, gas part therein is with gas rising in tower, in tower top
Gas be mainly hydrogen and nitrogen, a part for the gas extracted out at the top of pure argon column 10 enters auxiliary condenser/evaporator 12,
It exchanges heat with part liquid air, is sent into pure argon column 9 after being condensed into liquid；
The air nitrogen flow path, includes the following steps:
S21, air remove water and dioxy therein into air precooling purification system 16 after the compression of air compressor 15
Change carbon；Air after drying is cooled to condensing temperature through the heat exchanger 8 in rectifying ice chest 7, enters 13 bottom of nitrogen tower later, is nitrogen
Tower 13 provides rectifying gas；
S22, into the band liquid air gas of 13 bottom of nitrogen tower, heavy constituent therein is gathered in a liquid, obtains liquid in tower bottom
Oxygen rich air；Light component therein is gathered in gas, obtains high-purity nitrogen in tower top；
S23, the high-purity nitrogen extracted out from 13 tower top of nitrogen tower are divided into two parts: first part's nitrogen is sent into the condensation of nitrogen tower and is steamed
The high temperature side for sending out device 14 sends the rectifying that nitrogen tower 13 participates in nitrogen tower back to by cooling down after liquid nitrogen；Second part nitrogen, by changing
After hot 8 re-heat of device recycling cooling capacity, rectifying ice chest 8 is sent out, is then fed into argon gas pre-cooling purification system 6 and is used as regeneration gas；
S24 is sent into nitrogen tower condenser/evaporator 14, is after the adjusted pressure of oxygen-enriched liquid air that the bottom of nitrogen tower 13 is extracted out
It provides cold source, itself is vaporizated into oxygen rich air and goes out nitrogen tower condenser/evaporator 14, mentions into auxiliary condenser/evaporator 12 for it
Semen donors enter after 8 re-heat of heat exchanger from the oxygen rich air come out in auxiliary condenser/evaporator 12 and send out rectifying ice chest 7, then defeated
Send in air precooling purification system 16 as dry gas.
Because existing pure argon column 10 is with argon, the boiling point of 10 top gas of pure argon column is higher, if it is cooling to directly adopt oxygen-enriched liquid air
When, temperature difference of heat exchanger is larger, will increase the design difficulty of auxiliary condenser/evaporator 12.The present embodiment is using oxygen rich gas as auxiliary
The cold source for helping condenser/evaporator 12 not only can guarantee the temperature difference, but also can make to assist the volume of condenser/evaporator 12 will not be too small, conducive to setting
Meter manufacture.
As an optimal technical scheme of the present embodiment, in step S11, except the argon gas after CO is cold through the first cooler 3
But it after cooling down, is mixed into oxygen-eliminating device 4 and is reacted with the hydrogen of addition, the high temperature argon after reaction is through the second cooler 5
Enter argon gas after cooling and purification system 6 is pre-chilled.
As an optimal technical scheme of the present embodiment, for from crystal pulling workshop, the argon gas total amount of recycling is general
The 80~95% of crystal pulling usage amount are accounted for, therefore there is still a need for the liquid argons of independent supplement 5%~20%.Therefore, in rapid S13, come
The argon is entered by the pure liquid argon of pipeline and the extraction of 9 bottom of rectifying column together from the rectifying ice chest 7 extraneous supplement liquid argon
The evaporation side of tower condenser/evaporator 11 supplements loss of refrigeration capacity for whole system.
As an optimal technical scheme of the present embodiment, in step S14, the gas extracted out at the top of the pure argon column 10
Be divided into three parts: first part's gas sends out rectifying ice chest 7 after cooling capacity is recycled in 8 re-heat of heat exchanger, the regeneration as purifier
Gas a part is sent into argon gas pre-cooling purification system 6 regeneration for participating in purifier with the nitrogen of rectifying ice chest 7 out together；Second
The gas side that portion gas enters condenser/evaporator 11 is condensed into liquid, flows into pure argon column 9, provides liquid for rectifying；Third portion
Divide gas to enter auxiliary condenser/evaporator 12, exchanges heat with part liquid air, after being condensed into liquid, with second part liquid joint
It is sent into pure argon column 9 afterwards.
As an optimal technical scheme of the present embodiment, in step S23, it is described be liquid nitrogen by cooling down after, one
The rectifying that nitrogen tower 13 participates in nitrogen tower is sent back, another part liquid nitrogen can be used as byproduct, extract rectifying ice chest 7 out.
Embodiment 2
Refering to Figure 1, the present embodiment provides a kind of integrated High Purity Nitrogens for recovery method described in above-described embodiment 1
With the recovery system of argon gas, including argon gas compressor 1, except carbon monoxide remover 2, oxygen-eliminating device 4, argon gas be pre-chilled purification system 6, air
It is compressor 15, air precooling purification system 16, heat exchanger 8, argon column reboiler 9, pure argon column 10, argon column condenser/evaporator 11, auxiliary
Help condenser/evaporator 12, nitrogen tower 13 and nitrogen tower condenser/evaporator 14.
In the present embodiment, as shown in Figure 1, the argon gas compressor 1 successively removes carbon monoxide remover through described by pipeline
2, oxygen-eliminating device 4 is connect with argon gas pre-cooling purification system 6, and the argon gas compressor 1 is used to carry out pressurized treatments to recycling argon gas, is added
Recycling argon gas after pressure is then fed into described successively through described except carbon monoxide remover 2 and oxygen-eliminating device 4 remove CO and oxygen therein
Water and carbon dioxide therein are removed after cooling down in argon gas pre-cooling purification system 6.
In the present embodiment, as shown in Figure 1, the argon gas pre-cooling purification system 6 by pipeline through the heat exchanger 8 with set
The argon column reboiler 9 for being placed in 10 bottom of pure argon column connects, and the argon gas dried is cooled to liquefaction temperature through the heat exchanger 8
Degree, and be sent into the argon column reboiler 9 and form gas-liquid mixture fluid, 9 bottom of argon column reboiler is connected to institute by pipeline
10 middle and upper part of pure argon column is stated, the gas-liquid mixture fluid in the argon column reboiler 9 is sent into the pure argon column 10 after pressure regulation
Middle and upper part participates in rectifying.
In the present embodiment, as shown in Figure 1, the bottom of the pure argon column 10 is connected to the argon column condensation evaporation by pipeline
The pure liquid argon of 10 tower bottom of pure argon column is pumped to the evaporation side of the argon column condenser/evaporator 11, and evaporated by device 11
Side is evaporated to argon gas；The evaporation side of the argon column condenser/evaporator 11 is by pipeline through the heat exchanger 8 and the rectifying ice chest 7
External world's connection, sends out the rectifying ice chest 7 after 8 re-heat of heat exchanger for the argon gas of evaporation side.
In the present embodiment, as shown in Figure 1, the top of the pure argon column 10 passes through pipeline respectively goes out through the heat exchanger 8
Rectifying ice chest 7 is connected to argon gas pre-cooling purification system 6, the gas side of the argon column condenser/evaporator 11 is connected to by pipeline with
And the auxiliary condenser/evaporator 12 is connected to by pipeline；The gas extracted out at the top of the pure argon column 10 is divided into three parts:
A part of gas sends out rectifying ice chest 7 after cooling capacity is recycled in 8 re-heat of heat exchanger, is sent into argon together with the nitrogen of rectifying ice chest 7 out
Gas is pre-chilled in purification system 6；The gas side that second part gas enters condenser/evaporator 11 is condensed into liquid, flows into pure argon column 9,
Liquid is provided for rectifying；Part III gas enters auxiliary condenser/evaporator 12, is exchanged heat with part liquid air, is condensed into liquid
Afterwards, with after second part liquid joint be sent into pure argon column 9.
In the present embodiment, as shown in Figure 1, the air compressor 15 passes through pipeline and the air precooling purification system
16 connections, air is sent into the air precooling purification system 16 after 15 pressurized treatments of air compressor, through cooling down
After remove water and carbon dioxide therein.
In the present embodiment, as shown in Figure 1, the air precooling purification system 16 is connected by pipeline through the heat exchanger 8
The air dried is sent into the nitrogen tower 13 after the heat exchanger 8 is cooled to condensing temperature by the bottom for leading to the nitrogen tower 13
Bottom provides rectifying gas for the nitrogen tower 13.
In the present embodiment, as shown in Figure 1, the top of the nitrogen tower 13 passes through pipeline respectively goes out essence through the heat exchanger 8
Evaporate the high temperature side that ice chest 7 is connected to the argon gas pre-cooling purification system 6, is connected to the nitrogen tower condenser/evaporator 14 by pipeline；From
The gas extracted out at the top of the nitrogen tower 13 is divided into two parts, and first part is sent into the high temperature side of the nitrogen tower condenser/evaporator 14,
It is sent at the top of the nitrogen tower 13 after cooling down is liquid nitrogen by pipeline and participates in rectifying；Second part is multiple through the heat exchanger 8
Go out rectifying ice chest 7 after heat and be sent into argon gas pre-cooling purification system 6 and is used as regeneration gas.
In the present embodiment, as shown in Figure 1, the bottom of the nitrogen tower 13 is connected to the nitrogen tower condenser/evaporator by pipeline
14 top, the oxygen-enriched liquid air extracted out from the bottom of the nitrogen tower 13 are sent into the condensation of nitrogen tower and are steamed after throttle valve adjusts pressure
Device 14 is sent out, oxygen rich air itself is vaporizated into and is discharged at the top of the nitrogen tower condenser/evaporator 14, subsequently into auxiliary condensation evaporation
Device 12 provides cooling capacity for it；The auxiliary condenser/evaporator 12 connects the air precooling through main heat exchanger 8 by pipeline and purifies
System 16 sends out rectifying ice chest after the oxygen rich air after exchanging heat from the auxiliary condenser/evaporator 12 is entered 8 re-heat of heat exchanger
7, it is then sent in air precooling purification system 16 as dry gas.
In the present embodiment, as shown in Figure 1, the recovery system of the integrated High Purity Nitrogen and argon gas, further includes the first cooler
3, it is set on the pipeline except between carbon monoxide remover 2 and oxygen-eliminating device 4, for being removed to through the carbon monoxide remover 2 that removes
Argon gas after CO carries out cooling treatment.And further include the second cooler 5, it is set to the oxygen-eliminating device 4 and argon gas pre-cooling is pure
Between change system 6 on pipeline；For carrying out cooling treatment to the high temperature argon after 4 deoxygenation of oxygen-eliminating device.
In the present embodiment, as shown in Figure 1, the evaporation side of the argon column condenser/evaporator 11 passes through pipeline and the rectifying
The extraneous connection of ice chest 7, to be that the argon column condenser/evaporator 11 supplements liquid argon by the pipeline.
In addition, in the present embodiment, as shown in Figure 1, the gas extracted out at the top of the nitrogen tower 13 is divided into two parts, second
The high temperature side of the nitrogen tower condenser/evaporator 14 is sent into part, and after cooling down is liquid nitrogen, a part of liquid nitrogen therein passes through
Pipeline is sent at the top of the nitrogen tower 13 and participates in rectifying, and another part liquid nitrogen sends out the rectifying ice chest 7 by pipeline.
Embodiment 3
The present embodiment provides a kind of answering for recovery system described in 1 recovery method based on the above embodiment and embodiment 2
Use-case, for from crystal pulling workshop, the argon gas total amount of recycling typically constitutes from the 80~95% of crystal pulling usage amount, it is still desirable to individually
The liquid argon of supplement 5%~20%.For specific industry, to removal process, 5%~20% liquid argon can be separately supplemented, is utilized
Its cooling capacity generates liquid nitrogen, improves the economic benefit of whole system.
(1) flow path is recycled for argon gas:
Recycle argon gas (O2<~0.8%, N2<~4%, CO :~1000ppm, remaining is Ar) pressure it is very low, first pass around
Argon gas compressor 1 is forced into~1.0MPa after, after removing oil removing and dust, by GAr-101, into removing carbon monoxide remover 2；It is removing
Loading catalyst in carbon monoxide remover 2 is reacted by catalysis, is carbon dioxide catalyzing carbon monoxide；The outlet CO content <
1ppm；The argon gas of removal CO enters the first cooler 3 by GAr-102 pipeline after coming out and is cooled to about 40 DEG C, in GAr-103
Enter oxygen-eliminating device 4 after mixing with the hydrogen of addition, in oxygen-eliminating device 4, oxygen reacts with hydrogen, generates water and discharges heat
Amount has difference depending on the rising of oxygen amount temperature, in O2When content is not higher than 0.8%, temperature can be at < 200 DEG C；By GA-104 high
Warm argon gas enters the second cooler 5 and is cooled to 40 DEG C, enters the argon gas that argon gas is pre-chilled in purification system 6 by GAr-105 and is pre-chilled
Machine is cooled to 5-8 DEG C and purifier removes water and carbon dioxide；Remaining argon gas mainly becomes are as follows: Ar, N2、H2Deng.
Dry crude argon enters rectifying ice chest 7 by pipeline GAr-106, initially enters heat exchanger 8 and is cooled to liquefaction point,
By GAr-107, into the argon column reboiler 9 for being built in 10 bottom of pure argon column, in argon column reboiler 9, most of gas
(80%~95%) is liquefied, and the gas-liquid mixture fluid of argon column reboiler 9 is flowed out from GAr-108 out, saves through crude argon throttle valve V2
Stream decompression is sent into 10 middle and upper part of pure argon column and participates in rectifying；The operating pressure of argon column reboiler 9 is~0.95MPaG, pure argon column 10
Pressure is 0.7MPaG since there are pressure difference, medium boiling temperature can make outside shape in argon column reboiler 9 according to pressure change
At about 1~1.5 DEG C of the temperature difference, guarantee the heat exchange of argon column reboiler 9.
Into the fluid of pure argon column 10, gas part therein is with gas rising in tower, and liquid is under liquid in tower
Drop, heat and mass transfer process occurs for gas-liquid in ascending and descending process, and the Ar content of liquid portion is higher and higher, obtains in tower bottom pure
Liquid argon (depending on national standard or customer requirement, routinely can reach N2<4ppm).It is taken out by LARS-201 pipeline from rectifier bottoms
Pure liquid argon is sent into the evaporation side of argon column condenser/evaporator 11 through pure liquid argon throttle valve V1 reducing pressure by regulating flow out；External world's supplement liquid argon passes through
Pipeline LAr-305 enters the evaporation side of condenser/evaporator 11 together, supplements loss of refrigeration capacity for whole system.Pure liquid argon is cold in argon column
Solidifying 11 evaporation side of evaporator is evaporated to argon gas, recycles cooling capacity by heat exchanger re-heat, sends out rectifying ice chest, can be according to user demand
Pressurization is directly supplied gas.The operating pressure of argon column condenser/evaporator 11 is related with process organization, 10 pressure of pure argon column be~
When 0.7MPaG, pressure is about 0.35~0.37MPaG.If cooling box pressure requirements reduce, the pressure of whole system is (containing smart argon
The pressure of tower 10 and argon gas compressor 1) operation can be reduced.
The gas at 10 top of pure argon column is mainly hydrogen and nitrogen, goes out after tower from GAr-301 pipeline and is divided into three parts, and one
Divide and extracted out from GAr-302, through 8 re-heat of heat exchanger to room temperature, is generally sent out with after 1.5~3 DEG C of recycling cooling capacity lower than intake air temperature
Outside tower, as regeneration gas a part of argon gas pre-cooling purification system 6, the nitrogen come out with ice chest is that purifier regeneration is used together；
The second part gas of tower top is condensed into liquid by the gas side that GAr-301 enters argon column condenser/evaporator 11, by LAr-
306 flow back to pure argon column 10, provide liquid for rectifying.Part III gas enters auxiliary condenser/evaporator 12 by GAr-304, with
Part liquid air exchanges heat, and after being condensed into liquid, is sent into after entering LAr-306 and second part liquid joint by LAr-305
Pure argon column 10.
(2) flow path is recycled for argon gas:
Air is compressed to 0.7~1.2MPaG by air compressor machine 15, enters air precooling purification system 16 by GA-101,
Remove water removal and carbon dioxide.In GAr-102 be it is dry after air, cool down into the heat exchanger 8 in rectifying ice chest 7, in GA-
In 103, the micro band liquid of air, temperature is -160~-175 DEG C；It is sent into 13 bottom of nitrogen tower, the rectifying for nitrogen tower 13 provides gas.
In the polylith column plate of nitrogen tower 13 (or filler) contacts uprising gas with dropping liq, heavy constituent (oxygen, argon
Gas) it can gather in a liquid, it is finally to obtain high-purity nitrogen in tower top that light component (mainly nitrogen) can be gathered in gas
(oxygen content is < 1ppm), the liquid of tower bottom become oxygen rich air because of the increase of liquid oxygen content (oxygen content is about 30%~40%)；Nitrogen
The pressure of tower 13 is 0.4~0.8MPaG, and temperature is the boiling point of liquid under the pressure.After 13 tower top of nitrogen tower extraction nitrogen, it is divided into
Two strands, one GN-301 is sent into the high temperature side of nitrogen tower condenser/evaporator 14, is sent back to after liquid nitrogen by LN-302 by cooling down
Nitrogen tower participates in the rectifying of nitrogen tower 13 as the liquid of decline, and can by LN-304 through V4 valve extraction section liquid nitrogen, as
Product sends out ice chest, storage or directly use；Another gang of GN-302 sends out rectifying after cooling capacity is recycled in 8 re-heat of heat exchanger
Ice chest 7 is sent into Argon Purifier 6 through GN-303, is used as regeneration gas.
The oxygen-enriched liquid air that the bottom of nitrogen tower 13 is extracted out by LA-201 by throttle valve V6 adjust pressure to 0.3~
0.5MPaA is sent into nitrogen tower condenser/evaporator 14, provides cold source for it, itself being vaporizated into oxygen rich air, through GRO-202 to go out nitrogen tower cold
Solidifying evaporator 14, the temperature of GRO-202 is the oxygen rich air boiling temperature of (0.3~0.5MPaA) or high by one at this pressure at this time
Point has 5~15 DEG C of the temperature difference with the crude argon boiling temperature at 10 top of pure argon column, because being oxygen-enriched gas side is gas, heat exchange effect
Rate is lower, and the volume of auxiliary condenser/evaporator 12 designs larger.Crude argon from pure argon column 10 enters auxiliary through GAr-304
Condenser/evaporator 12 is condensed into liquid, enters inflow pure argon column 10 in LAr-306 by LAr-305.Oxygen rich air is gone out by GRO-203
Condenser/evaporator 12 is assisted, into heat exchanger 8.After re-heat to room temperature, rectifying ice chest 7 is sent out；It is delivered to air precooling purifying system
System 18, as dry gas, participates in the regeneration of purifier.
Connection function of the present embodiment using auxiliary condenser/evaporator 12, argon gas recycling flow path (GAr-304, LAr-305)
Having carried out Cooling capacity exchanging with oxygen rich air flow path (GRO-202, GRO-203) makes liquid argon cooling capacity be transmitted to air hose by heat exchanger 8
Road GA-103, the cooling capacity for entering back into nitrogen tower 13 is partially recycled, can reduce the liquid argon amount of extraneous addition, reduce the operation of equipment at
This.
To sum up, advantage of the invention is that the convenience of liquid argon offer is had using recycling scene, provides cooling capacity, then benefit with liquid argon
Nitrogen, hydrogen are removed with cryogenic rectification method, the rate of recovery of argon gas and the utilization rate of hydrogen is improved, simplifies the stream of cryogenic rectification
Journey and operation, reduce operation energy consumption；Using integrated air nitrogen flow path, by the plentiful cooling capacity using liquid argon, in ice chest
Self-produced nitrogen can reduce the limitation of regeneration gas, improve the recovery rate of recycling argon gas；And is produced from part using rich liquid argon cooling capacity
Liquid nitrogen is increased economic efficiency.
Specific embodiments of the present invention are described in detail above, but it is merely an example, the present invention is simultaneously unlimited
It is formed on particular embodiments described above.To those skilled in the art, any couple of present invention carries out equivalent modifications and
Substitution is also all among scope of the invention.Therefore, without departing from the spirit and scope of the invention made by equal transformation and
Modification, all should be contained within the scope of the invention.
Claims (10)
1. a kind of recovery method of integrated High Purity Nitrogen and argon gas, including argon gas recycling flow path and air nitrogen flow path, feature exist
In:
The argon gas recycles flow path, includes the following steps:
S11 removes CO therein into except carbon monoxide remover by recycling argon gas after the pressurization of argon gas compressor；Except the argon after CO
Gas and the hydrogen of addition, which are mixed into oxygen-eliminating device, removes oxygen therein, and high temperature argon, which enters in argon gas pre-cooling purification system, to be taken off
Except water therein and carbon dioxide, dry crude argon is obtained；
Dry crude argon is sent into rectifying ice chest, first enters after heat exchanger is cooled to condensing temperature and be built in pure argon column by S12
The argon column reboiler of bottom, in argon column reboiler, most of gas is liquefied, out the gas-liquid mixture fluid warp of argon column reboiler
It is sent into pure argon column middle and upper part after reducing pressure by regulating flow and participates in rectifying；
S13, into the gas-liquid mixture fluid of pure argon column, liquid portion therein obtains pure with liquid decline in tower in tower bottom
Liquid argon；The evaporation side that pure liquid argon is sent into argon column condenser/evaporator after reducing pressure by regulating flow is extracted out from rectifier bottoms, and pure liquid argon is in argon
The evaporation side of tower condenser/evaporator is evaporated to argon gas, sends out rectifying ice chest after cooling capacity is recycled in heat exchanger re-heat；
S14, into the gas-liquid mixture fluid of pure argon column, gas part therein is with gas rising in tower, in the gas of tower top
A part of predominantly hydrogen and nitrogen, the gas extracted out from pure argon column top enters auxiliary condenser/evaporator, with part liquid air
It exchanges heat, is sent into pure argon column after being condensed into liquid；
The air nitrogen flow path, includes the following steps:
S21, air remove water and carbon dioxide therein after air compressor compresses, into air precooling purification system；It is dry
Air after dry is cooled to condensing temperature through the heat exchanger in rectifying ice chest, enters nitrogen tower bottom later, provides rectifying for nitrogen tower
Gas；
S22, into the band liquid air gas of nitrogen tower bottom, heavy constituent therein is gathered in a liquid, obtains the oxygen-enriched of liquid in tower bottom
Gas；Light component therein is gathered in gas, obtains high-purity nitrogen in tower top；
S23, the high-purity nitrogen extracted out from nitrogen column overhead are divided into two parts: first part's nitrogen is sent into nitrogen tower condenser/evaporator
High temperature side sends the rectifying that nitrogen tower participates in nitrogen tower back to by cooling down after liquid nitrogen；Second part nitrogen is returned by heat exchanger re-heat
After receiving cooling capacity, rectifying ice chest is sent out, is then fed into argon gas pre-cooling purification system and is used as regeneration gas；
S24 is sent into nitrogen tower condenser/evaporator, provides for it cold after the adjusted pressure of oxygen-enriched liquid air that the bottom of nitrogen tower is extracted out
Source itself is vaporizated into oxygen rich air and goes out nitrogen tower condenser/evaporator, cooling capacity is provided into auxiliary condenser/evaporator for it, from auxiliary
The oxygen rich air come out in condenser/evaporator sends out rectifying ice chest after entering heat exchanger re-heat, is then sent to air precooling purifying system
Dry gas is used as in system.
2. the recovery method of integrated High Purity Nitrogen and argon gas according to claim 1, which is characterized in that in step S11, remove CO
Argon gas afterwards is mixed into oxygen-eliminating device with the hydrogen of addition and is reacted, after reaction after the first cooler cools
High temperature argon enters argon gas after the cooling of the second cooler and purification system is pre-chilled.
3. the recovery method of integrated High Purity Nitrogen and argon gas according to claim 1, which is characterized in that in step S13, come from
The extraneous supplement liquid argon of the rectifying ice chest enters the evaporation side of the argon column condenser/evaporator by pipeline.
4. the recovery method of integrated High Purity Nitrogen and argon gas according to claim 1, which is characterized in that in step S14, from institute
State the gas extracted out at the top of pure argon column and be divided into three parts: it is cold that first part's gas sends out rectifying after cooling capacity is recycled in heat exchanger re-heat
Case is sent into argon gas pre-cooling purification system together with the nitrogen of rectifying ice chest out and is participated in as regeneration gas a part of purifier
The regeneration of purifier；The gas side that second part gas enters condenser/evaporator is condensed into liquid, flows into pure argon column, mentions for rectifying
For liquid；Part III gas enters auxiliary condenser/evaporator, exchanges heat with part liquid air, after being condensed into liquid, with second
Partially liq is sent into pure argon column after converging.
5. the recovery method of integrated High Purity Nitrogen and argon gas according to claim 1, which is characterized in that described in step S23
By cooling down for after liquid nitrogen, a part sends the rectifying that nitrogen tower participates in nitrogen tower back to, another part liquid nitrogen can be used as byproduct, extract out
Rectifying ice chest.
6. a kind of recovery system of integrated High Purity Nitrogen and argon gas based on any one of the claim 1-5 recovery method, special
Sign is, including argon gas compressor, except carbon monoxide remover, oxygen-eliminating device, argon gas pre-cooling purification system, air compressor, air it is pre-
Cold purification system, heat exchanger, argon column reboiler, pure argon column, argon column condenser/evaporator, auxiliary condenser/evaporator, nitrogen tower and nitrogen tower
Condenser/evaporator；Wherein:
The argon gas compressor is successively connected through described except purification system is pre-chilled in carbon monoxide remover, oxygen-eliminating device and argon gas by pipeline
It connects, the argon gas compressor is used to carry out pressurized treatments to recycling argon gas, and the recycling argon gas after pressurization successively removes an oxygen through described
Change carbon device and oxygen-eliminating device removes CO and oxygen therein, is then fed into the argon gas pre-cooling purification system and removes it after cooling down
In water and carbon dioxide；
The argon gas pre-cooling purification system is boiled through the heat exchanger with the argon column for being set to the pure argon column bottom again by pipeline
Device connection, is cooled to condensing temperature through the heat exchanger for the argon gas dried, and is sent into the argon column reboiler and forms gas
Liquid fluid-mixing, argon column reboiler bottom are connected to the pure argon column middle and upper part by pipeline, by the argon column reboiler
Interior gas-liquid mixture fluid is sent into the pure argon column middle and upper part after pressure regulation and participates in rectifying；
The bottom of the pure argon column is connected to the argon column condenser/evaporator by pipeline, by the pure liquid argon of the pure argon column tower bottom
It pumps to the evaporation side of the argon column condenser/evaporator, and be evaporated to argon gas in evaporation side；The steaming of the argon column condenser/evaporator
Hair side is connected to through the heat exchanger with the rectifying ice chest external world by pipeline, and the argon gas of evaporation side is answered through the heat exchanger
The rectifying ice chest is sent out after heat；
The top of the pure argon column passes through pipeline respectively and goes out the rectifying ice chest connection argon gas pre-cooling purifying system through the heat exchanger
It unites, the gas side of the argon column condenser/evaporator is connected to by pipeline and the auxiliary condenser/evaporator is connected to by pipeline；
The gas extracted out at the top of the pure argon column is divided into three parts: first part's gas sends out essence after cooling capacity is recycled in heat exchanger re-heat
Ice chest is evaporated, is sent into argon gas pre-cooling purification system together with the nitrogen of rectifying ice chest out；Second part gas enters condensation evaporation
The gas side of device is condensed into liquid, flows into pure argon column, provides liquid for rectifying；Part III gas enters auxiliary condensation evaporation
Device after being exchanged heat with part liquid air, be condensed into liquid, and is sent into pure argon column after second part liquid joint；
The air compressor is connect by pipeline with the air precooling purification system, and air pressurizes through the air compressor
It is sent into after processing in the air precooling purification system, to remove water and carbon dioxide therein after cooling down；
The air precooling purification system is connected to the bottom of the nitrogen tower, the air that will be dried by pipeline through the heat exchanger
It is sent into the nitrogen tower bottom after the heat exchanger is cooled to condensing temperature, provides rectifying gas for the nitrogen tower；
The top of the nitrogen tower pass through respectively pipeline through the heat exchanger go out rectifying ice chest be connected to argon gas pre-cooling purification system,
The high temperature side of the nitrogen tower condenser/evaporator is connected to by pipeline；The gas extracted out from the nitrogen top of tower is divided into two parts, the
A part is sent into the high temperature side of the nitrogen tower condenser/evaporator, is sent into the nitrogen tower top by pipeline after cooling down is liquid nitrogen
Portion participates in rectifying；Second part goes out rectifying ice chest after the heat exchanger re-heat and is sent into the argon gas pre-cooling purification system as again
Anger uses；And
The bottom of the nitrogen tower is connected to the top of the nitrogen tower condenser/evaporator by pipeline, extracts out from the bottom of the nitrogen tower
Oxygen-enriched liquid air is sent into nitrogen tower condenser/evaporator, itself is vaporizated into oxygen rich air from the nitrogen tower after throttle valve adjusts pressure
Discharge at the top of condenser/evaporator provides cooling capacity subsequently into auxiliary condenser/evaporator for it；The auxiliary condenser/evaporator passes through
Pipeline connects the air precooling purification system through main heat exchanger, by the oxygen rich air after exchanging heat from the auxiliary condenser/evaporator
Rectifying ice chest is sent out after into heat exchanger re-heat, is then sent in air precooling purification system as dry gas.
7. the recovery system of integrated High Purity Nitrogen and argon gas according to claim 6, which is characterized in that further include first cooling
Device is set on the pipeline except between carbon monoxide remover and oxygen-eliminating device, for described except carbon monoxide remover removes CO to warp
Argon gas afterwards carries out cooling treatment.
8. the recovery system of integrated High Purity Nitrogen and argon gas according to claim 6, which is characterized in that further include second cooling
Device is set between the oxygen-eliminating device and argon gas pre-cooling purification system on pipeline；For to after the oxygen-eliminating device deoxygenation
High temperature argon carries out cooling treatment.
9. the recovery system of integrated High Purity Nitrogen and argon gas according to claim 7, which is characterized in that the argon column condensation is steamed
The evaporation side of hair device is connected to by pipeline with the rectifying ice chest external world, to be argon column condenser/evaporator benefit by the pipeline
Filling liquid argon.
10. the recovery system of integrated High Purity Nitrogen and argon gas according to claim 7, which is characterized in that from the nitrogen tower top
The gas of portion's extraction is divided into two parts, and second part is sent into the high temperature side of the nitrogen tower condenser/evaporator, is liquid through cooling down
After nitrogen, a part of liquid nitrogen therein is sent into the nitrogen top of tower by pipeline and participates in rectifying, and another part liquid nitrogen is sent by pipeline
The rectifying ice chest out.
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| CN108645118A (en) * | 2018-06-07 | 2018-10-12 | 上海联风能源科技有限公司 | A kind of device and method improving the argon gas rate of recovery |
| CN109631495A (en) * | 2019-01-25 | 2019-04-16 | 上海联风能源科技有限公司 | A kind of method and device of integrated High Purity Nitrogen and argon gas recycling |
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| CN204373313U (en) * | 2014-11-06 | 2015-06-03 | 杭州杭氧股份有限公司 | A kind of argon gas of double tower coupling reclaims purifier apparatus |
| CN106288653A (en) * | 2016-10-21 | 2017-01-04 | 上海跃绅能源科技有限公司 | A kind of single column cryogenic rectification reclaims device and the method for purification recovery argon of argon |
| CN108645118A (en) * | 2018-06-07 | 2018-10-12 | 上海联风能源科技有限公司 | A kind of device and method improving the argon gas rate of recovery |
| CN109631495A (en) * | 2019-01-25 | 2019-04-16 | 上海联风能源科技有限公司 | A kind of method and device of integrated High Purity Nitrogen and argon gas recycling |
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Application publication date: 20190906 |