CN110203880B - Method for preparing CD-ROM magnetic control integrated micro-nano motor - Google Patents
Method for preparing CD-ROM magnetic control integrated micro-nano motor Download PDFInfo
- Publication number
- CN110203880B CN110203880B CN201910498592.7A CN201910498592A CN110203880B CN 110203880 B CN110203880 B CN 110203880B CN 201910498592 A CN201910498592 A CN 201910498592A CN 110203880 B CN110203880 B CN 110203880B
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- China
- Prior art keywords
- solution
- micro
- nano motor
- porous anodic
- aluminum oxide
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000000034 method Methods 0.000 title claims abstract description 23
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims abstract description 21
- 238000000151 deposition Methods 0.000 claims abstract description 12
- 230000008021 deposition Effects 0.000 claims abstract description 7
- 229910017390 Au—Fe Inorganic materials 0.000 claims abstract description 4
- 239000008367 deionised water Substances 0.000 claims abstract description 4
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 4
- 238000010438 heat treatment Methods 0.000 claims abstract description 4
- 238000004544 sputter deposition Methods 0.000 claims abstract description 4
- 238000005406 washing Methods 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 238000000137 annealing Methods 0.000 claims description 3
- 238000004070 electrodeposition Methods 0.000 claims description 3
- 235000003891 ferrous sulphate Nutrition 0.000 claims description 3
- 239000011790 ferrous sulphate Substances 0.000 claims description 3
- BAUYGSIQEAFULO-UHFFFAOYSA-L iron(2+) sulfate (anhydrous) Chemical compound [Fe+2].[O-]S([O-])(=O)=O BAUYGSIQEAFULO-UHFFFAOYSA-L 0.000 claims description 3
- 229910000359 iron(II) sulfate Inorganic materials 0.000 claims description 3
- 230000005653 Brownian motion process Effects 0.000 claims description 2
- 238000005537 brownian motion Methods 0.000 claims description 2
- 238000005266 casting Methods 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 238000005286 illumination Methods 0.000 abstract description 2
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 abstract 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 2
- 239000003153 chemical reaction reagent Substances 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000012377 drug delivery Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
- B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N11/00—Generators or motors not provided for elsewhere; Alleged perpetua mobilia obtained by electric or magnetic means
- H02N11/006—Motors
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Abstract
Description
Claims (6)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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CN2019104833943 | 2019-06-04 | ||
CN201910483394 | 2019-06-04 |
Publications (2)
Publication Number | Publication Date |
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CN110203880A CN110203880A (en) | 2019-09-06 |
CN110203880B true CN110203880B (en) | 2022-11-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201910498592.7A Expired - Fee Related CN110203880B (en) | 2019-06-04 | 2019-06-10 | Method for preparing CD-ROM magnetic control integrated micro-nano motor |
Country Status (1)
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CN (1) | CN110203880B (en) |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101192002B (en) * | 2007-12-12 | 2011-06-01 | 吉林大学 | Preparation method of magnetism remotely-controlled drive microstructure |
CN102925933B (en) * | 2012-11-05 | 2015-03-04 | 福州大学 | Au-FeNi double-section type alloy nano motor and production method thereof |
WO2018146537A1 (en) * | 2017-02-11 | 2018-08-16 | Mahmoud Amouzadeh Tabrizi | Fabrication of nanomotors and applications thereof for surface writing |
CN108462407B (en) * | 2018-03-13 | 2019-07-12 | 武汉理工大学 | Utilize the method for magnetic responsiveness topology track guidance micro-nano motor |
CN108669091B (en) * | 2018-05-03 | 2021-01-19 | 华南师范大学 | Preparation method of spirulina-based micron motor for sterilization |
CN108448943A (en) * | 2018-05-03 | 2018-08-24 | 华南师范大学 | It is light-initiated from driving Janus micro-nanos motor of electrophoresis and preparation method thereof and Properties Control method |
CN108609578B (en) * | 2018-05-03 | 2020-11-10 | 华南师范大学 | Preparation method of multistage micro-nano motor |
CN109504953A (en) * | 2018-12-10 | 2019-03-22 | 华南师范大学 | A kind of ZnO-Ni optical drive micro-pipe motor and preparation method thereof |
CN109534407B (en) * | 2019-01-04 | 2022-07-08 | 哈尔滨工业大学(深圳) | Preparation method and application of rod-shaped magnetic ferroferric oxide material |
CN109568591B (en) * | 2019-01-14 | 2020-08-25 | 中国科学院化学研究所 | Soft micro-nano motor and preparation method thereof |
-
2019
- 2019-06-10 CN CN201910498592.7A patent/CN110203880B/en not_active Expired - Fee Related
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CN110203880A (en) | 2019-09-06 |
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Application publication date: 20190906 Assignee: Guangxi Baixin New Materials Co.,Ltd. Assignor: BAISE University Contract record no.: X2023980046196 Denomination of invention: A preparation method for optical drive magnetic control integrated micro nano motor Granted publication date: 20221111 License type: Common License Record date: 20231108 |
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