CN107986230B - Preparation method of patterned bionic magnetic micro-nano robot - Google Patents

Preparation method of patterned bionic magnetic micro-nano robot Download PDF

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CN107986230B
CN107986230B CN201711287249.5A CN201711287249A CN107986230B CN 107986230 B CN107986230 B CN 107986230B CN 201711287249 A CN201711287249 A CN 201711287249A CN 107986230 B CN107986230 B CN 107986230B
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porous polycarbonate
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copper sheet
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CN107986230A (en
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邹强
苏奇
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Tianjin University
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
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    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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Abstract

The invention relates to a preparation method of a patterned bionic magnetic micro-nano robot, which comprises the following steps: preparing a polytetrafluoroethylene substrate, a red copper sheet and a porous polycarbonate template; preparing a working electrode; coating photoresist; exposing and developing; preparing an acid electrolyte; wetting the holes of the porous polycarbonate template; preparing a cobalt nanowire and a cobalt substrate; transferring the nanowire and the cobalt substrate; removing the red copper sheet and washing away the porous polycarbonate template; combination with a polytetrafluoroethylene substrate: after the polytetrafluoroethylene substrate and the cobalt nanowire array on one side are formed, the preparation method of the other side is the same, and a double-sided cobalt nanowire array based on the polytetrafluoroethylene substrate is formed; and cutting to obtain the magnetic micro-nano robot.

Description

Preparation method of patterned bionic magnetic micro-nano robot
Technical Field
The invention relates to the field of micro-nano robots, in particular to the field of magnetic field driven bionic magnetic micro-robots.
Background
The micro-nano robot refers to a small robot with the dimension in the micro-nano level (from several nanometers to several hundred micrometers), and has very important potential application in the fields of biomedicine, environmental protection and the like, for example, the micro-nano robot can be used for minimally invasive surgery, targeted therapy, cell operation, heavy metal detection, pollutant degradation and the like, so the micro-nano robot is widely concerned by researchers at home and abroad, and is rapidly developed in recent years.
Compared with the traditional large robot, the working environment of the micro-nano robot is located in the environment with a very low Reynolds coefficient, an object can be regarded as moving in a very viscous, tiny and slow environment, the viscous force plays a dominant role, and the inertial force can be ignored. Under the condition, if the micro-nano robot is driven, the micro-nano robot must be continuously provided with power. However, due to its small size, power sources such as batteries, motors, etc. are difficult to be loaded in the micro-nano robot, and thus, various driving methods of the micro-nano robot have been proposed, including self-driving (electrophoresis driving, diffusion driving, self-thermophoresis driving, bubble driving, etc.) and external field driving (magnetic field, sound field, and light driving). Because the magnetic field intensity of the magnetic field driving mode is lower, and the low-frequency magnetic field can penetrate through biological tissues and is harmless to organisms, the magnetic field driving mode becomes one of the most promising driving modes in the field of micro-nano robots. Therefore, how to prepare the micro-nano robot which is easy to be driven and controlled by an external magnetic field under the environment with a lower reynolds coefficient becomes the key point of research of researchers.
Disclosure of Invention
The invention aims to provide a graphical micro-nano robot which can be easily driven and controlled by an external magnetic field in an environment with a low Reynolds coefficient, and a preparation method of the robot. The scheme of the invention is from the research on the movement principle of the paramecium of the unicellular organism. The technical scheme is as follows:
a preparation method of a patterned bionic magnetic micro-nano robot comprises the following preparation steps:
(1) preparing a polytetrafluoroethylene substrate, a red copper sheet and a porous polycarbonate template.
(2) Preparation of a working electrode: after heating and melting a proper amount of Wude alloy, uniformly coating the Wude alloy on a red copper sheet, and then coating a porous polycarbonate template on the upper surface of the Wude alloy; coating the back and the side of the red copper sheet by using epoxy resin glue to ensure that cobalt ions can only deposit in the holes of the porous polycarbonate template; taking a lead, wherein one end of the lead is connected with the back surface of the red copper sheet, and the other end of the lead is connected with an electrode clamp to form a working electrode;
(3) coating photoresist: coating a proper amount of photoresist on the upper surface of the porous polycarbonate template, and placing the porous polycarbonate template in a spin coater to uniformly coat the photoresist.
(4) Exposure and development: irradiating the porous polycarbonate template coated with the photoresist through a mask by using ultraviolet light, wherein the irradiated photoresist generates a photochemical reaction, the property of the irradiated photoresist is changed, and the irradiated photoresist and a developing solution can generate a chemical reaction and are removed during development; the part blocked by the photoetching plate is not changed, and is not reacted with a developing solution during development to be reserved, so that the pattern of the photoetching plate can be reserved on the porous polycarbonate template through development.
(5) Preparing an acid electrolyte: the electrolyte includes: CoSO47H2O and H3BO3The molar concentration ranges from 0.60 to 0.66 respectivelyM/L and 0.62-0.68M/L, and adjusting the pH value to 2.5-3.5.
(6) Hole wetting of porous polycarbonate template: and placing the patterned porous polycarbonate template in electrolyte, so that cobalt ions in the electrolyte enter the pores of the porous polycarbonate template.
(7) Preparing a cobalt nanowire and a cobalt substrate: and (3) placing a platinum sheet counter electrode and a working electrode in an electrolyte, connecting the two electrodes to a power supply, monitoring the change condition of the deposition current to obtain the deposition condition of the cobalt nanowire, and after the cobalt nanowire overflows holes of a porous polycarbonate template and starts to deposit and is mutually connected to form a cobalt substrate, continuing to deposit until the thickness of the cobalt substrate reaches 5 microns, and stopping deposition.
(8) Transfer of nanowires and cobalt substrate: and taking the cobalt nanowire and the cobalt-based substrate after deposition out of the electrolyte, drying at low temperature, coating a small amount of conductive silver paste on one side of the cobalt-based substrate, placing the polytetrafluoroethylene substrate above the conductive silver paste, and placing at normal temperature to ensure that the cobalt substrate and the polytetrafluoroethylene substrate are firmly connected to obtain an intermediate combined structure.
(9) Removing the red copper sheet and washing away the porous polycarbonate template: and heating the intermediate combined structure at 70 ℃ in a water bath until the copper sheet coated with the Wude alloy falls off to obtain a final combined structure, putting the final combined structure into a dichloromethane solution, and washing away the porous polycarbonate template to obtain an integrated structure formed by connecting the cobalt nanowires, the cobalt substrate, the conductive silver paste and the polytetrafluoroethylene substrate, so as to form a polytetrafluoroethylene substrate and a cobalt nanowire array on one side.
(10) Combination with a polytetrafluoroethylene substrate: after the polytetrafluoroethylene substrate and the cobalt nanowire array on one side are formed, the preparation method of the other side is the same, and the double-sided cobalt nanowire array based on the polytetrafluoroethylene substrate is formed.
(11) And cutting to obtain the magnetic micro-nano robot.
Compared with the prior art, the distribution mode of the nano-wire array of the micro-nano robot is adjustable, and the problem that the nano-wires are mutually restricted before being prepared by a template method due to overlarge density is solved. The micro-nano robot is easy to be driven and controlled by an external electromagnetic field in the environment with a low Reynolds coefficient, and the application range of the micro-nano robot in the fields of biomedicine and environmental protection is expanded.
Drawings
In order that the present disclosure may be more readily and clearly understood, reference is now made to the following detailed description of the present disclosure taken in conjunction with the accompanying drawings, in which:
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic diagram of cilia of paramecium of a single-cell organism.
Reference numerals: 101-a cobalt substrate; 102-conductive silver paste; 103-polytetrafluoroethylene substrate; 104-cobalt nanowires; 201-paramecium cilia; 202-paramecium body.
Detailed Description
The invention provides a micro-nano robot which can be easily driven and controlled by an external magnetic field in an environment with a low Reynolds coefficient and a preparation method thereof, wherein the preparation method comprises the following steps:
(1) cleaning a polytetrafluoroethylene substrate and a red copper sheet substrate: before use, 200mL of deionized water, 100mL of acetone, 100mL of anhydrous ethanol and 200mL of deionized water are sequentially adopted to clean a polytetrafluoroethylene substrate (20 mm side length) and a copper sheet substrate (20 mm side length), and then the substrates are dried at a low temperature of 30 ℃ for later use.
(2) Preparation of a working electrode: putting a proper amount of Wude alloy (melting point 70 ℃) on a red copper sheet, putting the red copper sheet and the red copper sheet together into an oven, heating the red copper sheet and the red copper sheet to the melting point (70 ℃) of the red copper sheet, continuously and uniformly coating the Wude alloy by utilizing the edge of quartz glass in the temperature environment, then covering a porous polycarbonate template (circular, with the aperture of 200nm and the diameter of 19mm) on the upper surface of the Wude alloy, and simultaneously ensuring that the porous polycarbonate template is in good contact with the Wude alloy, and the lower surface of the porous polycarbonate template can be completely covered by the Wude alloy. A thin copper wire (diameter 0.8mm) is taken, one end of the thin copper wire is connected with the back of the red copper sheet, and the other end of the thin copper wire is connected with the electrode clamp. The back and the side of the red copper sheet are coated with epoxy resin glue, so that cobalt ions can only be deposited in the holes of the porous polycarbonate template.
(3) Coating photoresist: coating a proper amount of photoresist SU-8 on the upper surface of the working electrode (namely the upper surface of the polycarbonate template), and placing the working electrode in a spin coater at the rotating speed of 3000-4000 rpm.
(4) Exposure and development: irradiating the working electrode coated with the photoresist through the mask by using ultraviolet light, wherein the irradiated photoresist generates a photochemical reaction, the property of the irradiated photoresist is changed, and the irradiated photoresist and a developing solution can generate a chemical reaction and are removed during development; the part blocked by the photoetching plate is not changed, and the part is not reacted with the developing solution and is remained on the wafer during development, so that the pattern of the photoetching plate is transferred to the surface of the wafer, and the pattern can be remained on the wafer through development.
(5) Hole wetting of porous polycarbonate template: and placing the working electrode in the electrolyte of the quartz electrolytic cell, and stirring the electrolyte for 3min by using a magnetic stirrer so that cobalt ions in the electrolyte enter the pores of the porous polycarbonate template.
(6) Preparation of cobalt nanowires 104 and cobalt substrate 101: the electrolyte comprises the following components: 0.63M/L CoSO47H2O and 0.65M/L H3BO3While adjusting the pH of the solution to 3 with H2SO 4. The two-electrode system is characterized in that a platinum sheet counter electrode and a working electrode are placed in electrolyte of a quartz electrolytic tank, the two electrodes are connected to a power supply, and the power supply can provide output modes such as sine alternating current, constant voltage direct current bias, constant voltage direct current, pulse direct current and the like. And monitoring the change condition of the deposition current by using a digital multimeter, and when the cobalt nanowires are deposited in the holes, continuing to deposit on the upper surface of the porous polycarbonate template, wherein the deposition current jumps. Therefore, the deposition condition of the nanowire can be known from the change condition of the deposition current. And when the cobalt nanowires 104 overflow the holes of the porous polycarbonate template to start deposition and are connected with each other to form the cobalt substrate 101, continuing to deposit until the thickness of the cobalt substrate 101 reaches 5 microns, and stopping deposition.
(7) Transfer of nanowires 104 and cobalt-based substrate 101: and taking the cobalt nanowire 104 and the cobalt-based substrate 101 after deposition out of the electrolyte, drying at low temperature, coating a small amount of conductive silver paste on one side of the cobalt substrate 101, placing the polytetrafluoroethylene substrate above the conductive silver paste, and placing at normal temperature for 12 hours to ensure that the cobalt substrate 101 and the polytetrafluoroethylene substrate are firmly connected to obtain an intermediate combined structure.
(8) Removing the red copper sheet and washing away the porous polycarbonate template: and (3) putting the intermediate combined structure into a beaker filled with 300mL of water, and heating the intermediate combined structure in a water bath at 70 ℃ until the copper sheets coated with the Wude alloy fall off to obtain a final combined structure. And (3) placing the final combined structure in 100mL of dichloromethane, washing away the porous polycarbonate template to obtain an integrated structure formed by connecting the cobalt nanowire, the cobalt substrate, the conductive silver paste and the polytetrafluoroethylene substrate, and forming a polytetrafluoroethylene substrate and a cobalt nanowire array on one side.
(9) In combination with a polytetrafluoroethylene substrate 103: after the polytetrafluoroethylene substrate and the cobalt nanowire array on one side are formed, the preparation method of the other side is the same, and the double-sided cobalt nanowire array based on the polytetrafluoroethylene substrate is formed.
(10) And cutting the double-sided cobalt nanowire array into a rectangle of 800um multiplied by 200um through laser cutting to finally obtain a plurality of magnetic micro-nano robots.

Claims (1)

1. A preparation method of a patterned bionic magnetic micro-nano robot comprises the following preparation steps:
(1) preparing a polytetrafluoroethylene substrate, a red copper sheet and a porous polycarbonate template;
(2) preparation of a working electrode: after heating and melting a proper amount of Wude alloy, uniformly coating the Wude alloy on a red copper sheet, and then coating a porous polycarbonate template on the upper surface of the Wude alloy; coating the back and the side of the red copper sheet by using epoxy resin glue to ensure that cobalt ions can only deposit in the holes of the porous polycarbonate template; taking a lead, wherein one end of the lead is connected with the back surface of the red copper sheet, and the other end of the lead is connected with an electrode clamp to form a working electrode;
(3) coating photoresist: coating a proper amount of photoresist on the upper surface of the porous polycarbonate template, and placing the porous polycarbonate template in a spin coater to uniformly coat the photoresist on the porous polycarbonate template;
(4) exposure and development: irradiating the porous polycarbonate template coated with the photoresist through a mask by using ultraviolet light, wherein the irradiated photoresist generates a photochemical reaction, the property of the irradiated photoresist is changed, and the irradiated photoresist and a developing solution can generate a chemical reaction and are removed during development; the part blocked by the mask plate is not changed, and does not react with the developing solution during development and is reserved, so that the pattern of the mask plate can be reserved on the porous polycarbonate template through development;
(5) preparing an acid electrolyte: the electrolyte includes: CoSO4·7H2O and H3BO3The molar concentration ranges are 0.60-0.66M/L and 0.62-0.68M/L respectively, and the pH value is adjusted to 2.5-3.5;
(6) hole wetting of porous polycarbonate template: placing the patterned porous polycarbonate template in electrolyte, and enabling cobalt ions in the electrolyte to enter the pores of the porous polycarbonate template;
(7) preparing a cobalt nanowire and a cobalt substrate: placing a platinum sheet counter electrode and a working electrode in an electrolyte, connecting the two electrodes to a power supply, monitoring the change condition of deposition current to obtain the deposition condition of the cobalt nanowire, and after the cobalt nanowire overflows holes of a porous polycarbonate template and starts to deposit and is mutually connected to form a cobalt substrate, continuing to deposit until the thickness of the cobalt substrate reaches 5 microns, and stopping deposition;
(8) transfer of nanowires and cobalt substrate: taking the cobalt nanowires and the cobalt-based substrate after deposition out of the electrolyte, drying at low temperature, coating a small amount of conductive silver paste on one side of the cobalt-based substrate, placing the polytetrafluoroethylene substrate above the conductive silver paste, and placing at normal temperature to firmly connect the cobalt substrate and the polytetrafluoroethylene substrate to obtain an intermediate combined structure;
(9) removing the red copper sheet and washing away the porous polycarbonate template: heating the intermediate combined structure at 70 ℃ in a water bath until the copper sheet coated with the Wude alloy falls off to obtain a final combined structure, putting the final combined structure into a dichloromethane solution, washing off a porous polycarbonate template to obtain a structure in which the cobalt nanowires, the cobalt substrate, the conductive silver paste and the polytetrafluoroethylene substrate are connected into a whole, thereby forming a polytetrafluoroethylene substrate and a cobalt nanowire array on one side;
(10) combination with a polytetrafluoroethylene substrate: after the polytetrafluoroethylene substrate and the cobalt nanowire array on one side are formed, the preparation method of the other side is the same, and a double-sided cobalt nanowire array based on the polytetrafluoroethylene substrate is formed;
(11) and cutting to obtain the magnetic micro-nano robot.
CN201711287249.5A 2017-12-07 2017-12-07 Preparation method of patterned bionic magnetic micro-nano robot Active CN107986230B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006299284A (en) * 2006-07-28 2006-11-02 Yamauchi Corp Polymer composite molded article and method for producing polymer composite molded article
CN102324812A (en) * 2011-06-30 2012-01-18 青岛科技大学 Preparation method with plastic bonding magnet p-m rotor of resilient coating
CN103465250A (en) * 2013-09-11 2013-12-25 苏州大学张家港工业技术研究院 Micro-robot and micro mobile mechanism
CN105858598A (en) * 2016-04-06 2016-08-17 西安交通大学 Manufacturing and controlling method of flexible micro-driver for controlling micro-nano particles
CN105881492A (en) * 2016-06-01 2016-08-24 苏州大学 Magnetic force micro robot with multiple cilia, and manufacturing method and control system of magnetic force micro robot
US9528192B1 (en) * 2013-01-16 2016-12-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Solar powered CO2 conversion
CN106517081A (en) * 2016-10-28 2017-03-22 中国科学院深圳先进技术研究院 Magnetic packaged microrobot and preparation method thereof

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120329947A1 (en) * 2011-06-22 2012-12-27 University Of Florida Research Foundation, Inc. Integration of precoated nanostructures into bulk composite matrices
US9347141B2 (en) * 2011-10-27 2016-05-24 The Regents Of The University Of California Nanowire mesh solar fuels generator
WO2016067197A1 (en) * 2014-10-31 2016-05-06 King Abdullah University Of Science And Technology Magnetic nanocomposite sensor

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006299284A (en) * 2006-07-28 2006-11-02 Yamauchi Corp Polymer composite molded article and method for producing polymer composite molded article
CN102324812A (en) * 2011-06-30 2012-01-18 青岛科技大学 Preparation method with plastic bonding magnet p-m rotor of resilient coating
US9528192B1 (en) * 2013-01-16 2016-12-27 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Solar powered CO2 conversion
CN103465250A (en) * 2013-09-11 2013-12-25 苏州大学张家港工业技术研究院 Micro-robot and micro mobile mechanism
CN105858598A (en) * 2016-04-06 2016-08-17 西安交通大学 Manufacturing and controlling method of flexible micro-driver for controlling micro-nano particles
CN105881492A (en) * 2016-06-01 2016-08-24 苏州大学 Magnetic force micro robot with multiple cilia, and manufacturing method and control system of magnetic force micro robot
CN106517081A (en) * 2016-10-28 2017-03-22 中国科学院深圳先进技术研究院 Magnetic packaged microrobot and preparation method thereof

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