CN110203521B

CN110203521B - Wafer turnover box

Info

Publication number: CN110203521B
Application number: CN201910474676.7A
Authority: CN
Inventors: 王伟波; 鲁晓; 沈强益
Original assignee: Tangshan Guoxin Jingyuan Electronics Co ltd
Current assignee: TANGSHAN GUOXIN JINGYUAN ELECTRONICS Co.,Ltd.
Priority date: 2019-06-03
Filing date: 2019-06-03
Publication date: 2020-09-15
Anticipated expiration: 2039-06-03
Also published as: CN110203521A

Abstract

The present invention relates to a transfer case for storing semiconductor wafers. A wafer turnover box comprises a box body, a door frame, an air cylinder, a spring cylinder barrel, a wafer box mounting rack and a conveying manipulator; the rear part of the box body is provided with a connecting flange plate which is fixedly connected with the conveying manipulator; the left side and the right side of the lower end of the front part of the box body are respectively provided with two hinge seats; a hinge rod is arranged between the two hinge seats; the middle lower part of the door frame is hinged with two ends of the hinge rod; the fixed end of the cylinder is hinged to the outer wall of the right side of the box body, and the moving end of the cylinder is hinged to the outer wall of the right side of the lower part of the door plate; the fixed end of the spring cylinder barrel is hinged to the outer wall of the left side of the box body, and the moving end of the spring cylinder barrel is hinged to the outer wall of the left side of the lower portion of the door plate; the included angle between the door plate and the box body is 90 degrees in the open state; the wafer box mounting rack is arranged in the middle of the inner wall of the door plate. The wafer turnover box has the advantages of good sealing performance, convenient taking of the wafer box and good stability of wafers in the moving and transporting processes.

Description

Wafer turnover box

Technical Field

The present invention relates to a transfer case for storing semiconductor wafers.

Background

In the moving and transporting process of the wafer, the wafer is mostly placed in the wafer turnover box, and the existing wafer turnover box has the following problems: firstly, the sealing performance of the wafer box is not strong enough, so that air can easily enter, and certain influence is generated on the cleanliness of the surface of the wafer; secondly, the wafer box is manually opened or closed by manpower and is inconvenient to take, wafers of the wafer box are easy to shake in the opening or closing process, and the surfaces of the wafers are abraded due to instability; thirdly, the wafer is not detected during conveying, so that subsequent processing is influenced; and fourthly, the wafers in the wafer box cannot be observed in the conveying process, and the internal condition cannot be known.

Disclosure of Invention

The invention aims to solve the problems of poor sealing performance of a wafer turnover box, inconvenient taking of the wafer box and unstable wafers in the moving and transporting processes of the conventional wafer turnover box, and provides a sealed type wafer turnover box which can realize automatic opening and closing of a door plate and a box body through a spring cylinder and a cylinder, is convenient to take and simultaneously ensures sealing; a wafer transfer cassette for improving stability during transportation by placing a wafer cassette on a cassette mounting frame.

For the purpose of the invention, the following technical scheme is adopted for realizing the purpose: a wafer turnover box comprises a box body, a door frame, an air cylinder, a spring cylinder barrel, a wafer box mounting rack and a conveying manipulator; the front part of the box body is provided with a box body opening for placing the wafer box; a connecting flange plate is arranged at the rear part of the box body and is fixedly connected with the conveying manipulator; two hinge seats are respectively arranged on the left side and the right side of the lower end of the front part of the box body, and a hinge cover is arranged on each hinge seat; a hinged shaft is arranged between the two hinged seats, and two ends of the hinged shaft respectively penetrate through the two hinged seats; the portal comprises a first portal frame rod, a second portal frame rod and a portal connecting rod; the middle lower part of the first door frame rod is hinged with the right end of the hinge shaft; the middle lower part of the second frame rod is hinged with the left end of the hinge shaft; the lower end of the first door frame rod is fixedly connected with the lower end of the second door frame rod through the door frame connecting rod; the inner side walls of the first door frame rod and the second door frame rod are provided with door plates, the door plates are matched with the front plate of the box body, and the bottom surfaces of the door plates are connected with the top surface of the hinged cover when the box body is closed; door covers are arranged on the outer side walls of the first door frame rod and the second door frame rod, and the length of each door cover is greater than that of the box body; the door frame rotates by taking a hinge shaft as a rotating shaft, and an included angle between the door frame and the box body is 90 degrees in an open state; the fixed end of the air cylinder is hinged to the outer wall of the right side of the box body, and the moving end of the air cylinder is hinged to the first door frame rod through a first pin shaft and is positioned between the door frame connecting rod and the door cover; the fixed end of the spring cylinder barrel is hinged to the outer wall of the left side of the box body, and the moving end of the spring cylinder barrel is hinged to the second door frame rod through a second pin shaft and is positioned between the door frame connecting rod and the door cover; the door frame and the box body are opened and closed through the air cylinder and the spring cylinder barrel, and the inner side surface of the lower part of the door frame is propped against the bottom surface of the box body when the door frame is opened; the wafer box is arranged in the middle of the inner wall of the door plate through the wafer box mounting frame. The device increases the leakproofness, improves and carries stability, is convenient for more effectual detect the transition.

Preferably, the cross section of the wafer box mounting frame is L-shaped, and wafer box matching grooves are formed in the left side and the right side of a transverse plate of the wafer box mounting frame; the middle part of the vertical plate of the wafer box mounting rack is provided with a U-shaped notch. The stability of the wafer box in the box is improved, and the wafers are prevented from shaking in the box to cause abrasion.

Preferably, a sealing ring is arranged on the opening of the box body. The sealing performance is increased.

Preferably, the middle part of the inner side of the left wall of the box body is provided with a plurality of detection reflectors, and corresponding detection reflection sensors are arranged at symmetrical positions of the reflectors in the box body. Closure detection is achieved.

Preferably, an observation window pressing plate is arranged on a top plate of the box body, and small glass and large glass are arranged on the observation window pressing plate; the small glass is positioned behind the large glass. Facilitating better observation.

Preferably, a plurality of first ventilation joints are further arranged on the top plate of the box body, and a second ventilation joint is arranged in the middle of the bottom plate of the box body. Is convenient for vacuum conveying.

Preferably, the outer wall of the box body is also provided with a plurality of cable connectors.

Preferably, the rear side of the inner wall of the top plate and the rear side of the inner wall of the bottom plate of the box body are respectively provided with a photoelectric switch; the photoelectric switch is matched with the U-shaped notch. Electrical control is facilitated.

Compared with the prior art, the invention has the beneficial effects that: the spacing transverse plate at the bottom of the wafer box is arranged on the wafer box matching groove, so that the conveying stability of the wafer box is improved; the door plate is tightly attached to the box body through the air cylinder and the spring cylinder barrel, air is prevented from entering through the sealing ring, the quality of the wafer is improved, and meanwhile the door plate is opened at 90 degrees and is convenient for workers to take; the door plate closing detection is realized through the matching of the reflector and the reflector sensor, and the sealing performance is improved; the small glass and the large glass are convenient for workers to observe the wafers in the box body, so that the condition of the wafers inside the box body can be better concerned; the first ventilation joint and the second ventilation joint are connected with the air pipe, so that the interior of the box body can be conveniently evacuated, and the influence on the cleanliness of the surface of the wafer caused by the adhesion of dust to the surface of the wafer is prevented; the conveying manipulator replaces manual conveying, so that the stability in the conveying process is improved, and the abrasion of the wafers in the moving and conveying processes is reduced. The wafer turnover box has the advantages of good sealing performance, convenient taking of the wafer box and good stability of wafers in the moving and transporting processes.

Drawings

FIG. 1 is a schematic structural diagram of the present invention.

Fig. 2 is a schematic structural diagram of the wafer cassette.

Fig. 3 is an exploded view of the present invention.

Fig. 4 is an exploded view of the gantry.

The labels in the figures are: wafer cassette a, box 1, box opening 100, flange board 101, hinge seat 102, hinge cover 1021, hinge rod 103, sealing washer 104, portal 2, first portal frame pole 201, second portal frame pole 202, portal connecting rod 203, door panel 21, door cover 22, cylinder 3, spring cylinder 4, wafer cassette mounting bracket 5, wafer cassette cooperation groove 501, U-shaped notch 502, observation window clamp plate 6, small glass 61, big glass 62, cable joint 7, first air joint 8, second air joint 81, detection speculum 9, detection reflective sensor 91, photoelectric switch 10.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on the drawings, are used only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the present invention.

As shown in fig. 1 to 4, a wafer turnover box comprises a box body 1, a portal 2, a cylinder 3, a spring cylinder 4, a wafer box mounting rack 5 and a conveying manipulator; the front part of the box 1 is provided with a box opening 100 for placing the wafer box, and the box opening 100 is provided with a sealing ring 104, so that the sealing performance in closing is further ensured by the sealing ring 104, and air is prevented from entering. The top of box 1 is provided with flange board 101, flange board and conveying mechanical hand fixed connection, replaces artifical manual transport through conveying mechanical hand, promotes the stability in the handling, reduces the wearing and tearing of wafer in the handling. Two hinged seats 102 are respectively arranged on the left side and the right side of the lower end of the front portion of the box body 1, hinged covers 1021 are arranged on the two hinged seats 102, and the gap between the box body 1 and the door frame 2 is reduced through the hinged covers 1021, so that the sealing performance is improved. A hinge rod 103 is arranged between the two hinge seats 102, and two ends of the hinge rod 103 respectively penetrate through the two hinge seats 102; the gantry 2 comprises a first gantry bar 201, a second gantry bar 202 and a gantry connecting rod 203; the middle lower part of the first door frame rod 201 is hinged with the right end of the hinge shaft 103; the middle lower part of the second frame rod 202 is hinged with the left end of the hinge shaft 103; the portal connecting rod 203 fixedly connects the lower end of the first portal bar 201 and the lower end of the second portal bar 202; the inner side walls of the first frame door rod 201 and the second frame door rod 202 are provided with door plates 21, the door plates 21 are matched with the front plate of the box body 1, and the bottom surfaces of the door plates 21 are connected with the top surface of the hinged cover 1021 when the box body is closed; the outer side walls of the first door frame bar 201 and the second door frame bar 202 are provided with door covers 22, and the length of the door covers 22 is greater than that of the box body 1. The door frame 2 rotates by taking the hinge shaft 103 as a rotating shaft, the door frame 2 is hinged and matched with the box body 1 and forms 90-degree rotation opening, so that the door frame is convenient to take, and meanwhile, the bottom surface of the door plate 21 is connected with the top surface of the hinge cover 1021 during closing, so that the sealing performance is improved; when the door plate is opened, the door plate is horizontal, the wafer box is convenient to take and transport, and the inner side surface of the lower part of the door frame 2 is pushed against the bottom surface of the box body 1, so that the supporting strength of the wafer box is improved. The stiff end of cylinder 3 articulates on the right side outer wall of box 1, and the removal end of cylinder 3 articulates on first portal frame pole 201 through first round pin axle, and is located between portal connecting rod 203 and the door shield 22, and the further opening and shutting of being convenient for between control portal 2 and the box 1 through cylinder 3 alleviates artifical intensity of labour who opens and shuts, promotes the efficiency that opens and shuts. The stiff end of spring cylinder 4 articulates on the left side outer wall of box 1, and the removal end of spring cylinder 4 articulates on with second portal pole 202 through the second round pin axle, and is located between portal connecting rod 203 and the door casing 22, further strengthens the seal clearance between portal 2 and the box 1 through spring cylinder 4, prevents that the air from getting into, ensures the cleanliness on wafer surface, promotes the quality of wafer. The wafer box a is arranged in the middle of the inner wall of the door plate 21 through the wafer box mounting frame 5, a plurality of wafer grooves are formed in the wafer box a, wafers are vertically arranged in each wafer groove, and two strip-shaped limiting transverse plates are arranged at the bottom of the wafer box a; the cross-section of the wafer box mounting rack 5 is L-shaped, the left side and the right side of the transverse plate of the wafer box mounting rack 5 are provided with wafer box matching grooves 501, the limiting transverse plate at the bottom of the wafer box a is arranged on the wafer box matching grooves 501, the stability of the wafer box a is convenient to ensure in the conveying process, the wafer box a is prevented from shaking, the quality of wafers is ensured, and the abrasion of the wafers is reduced. The middle of the vertical plate of the wafer cassette mounting bracket 5 is provided with a U-shaped notch 502. The door frame 2 and the box body 1 move through the air cylinder 3 and the spring cylinder 4 to realize opening and closing, so that a wafer box in the wafer box mounting rack 5 on the door plate 21 enters the cavity of the box body. The inboard middle part of the left wall of box 1 is provided with a plurality of speculum 9, and the symmetric position that lies in speculum 9 in box 1 is provided with corresponding speculum sensor 91, and through the detection of speculum 9 and the speculum sensor 91 matched with portal 2 and the box 1 closed condition, the closed effect of improvement portal 2 promotes the leakproofness.

As shown in fig. 3, an observation window pressing plate 6 is arranged on the top plate of the box body 1, and a small glass 61 and a large glass 62 are arranged on the observation window pressing plate 6; little glass 61 is located big glass 62's rear, is convenient for the staff through little glass 61 and big glass 62 and observes the wafer in the box 1, and then the better quality of guaranteeing the wafer. Still be provided with a plurality of cable joint 7 on the box 1 outer wall, be convenient for better carry out cable junction through cable joint 7, and then better realization electric control. Still be provided with a plurality of first joints 8 of ventilating on the roof of box 1, the bottom plate middle part of box 1 is provided with second air joint 81, connects the trachea through connecting on first air joint 8 and the second air joint 81, is convenient for manage to find time to box 1 inside, makes and keeps vacuum state in the box 1, prevents that the dust from gluing the surface of wafer, produces the influence to the cleanliness on wafer surface. The rear sides of the inner walls of the top plate and the bottom plate of the box body 1 are respectively provided with a photoelectric switch 10, and the photoelectric switches 10 are convenient for better electric control and operation. The photoelectric switch 10 is matched with the U-shaped notch 502, so that the occupied space is saved.

During working, a worker only needs to easily insert the limiting transverse plate at the bottom of the wafer box a into the wafer box matching groove 501, so that the rear wall of the wafer box a leans against the vertical plate of the wafer box mounting frame 5, the door frame 2 rotates anticlockwise under the combined action of the air cylinder 3 and the spring cylinder 4, finally the door frame 2 is attached to the bottom of the box body 1, the box body 1 is sealed and closed, meanwhile, the reflector 9 is matched with the reflector sensor 91 to detect the closing condition to ensure complete closing, and air exhaust treatment is carried out in the box body through the first ventilation connector 8 and the second ventilation connector 81; carry the wafer cassette to next processing department through carrying mechanical hand, when reacing next processing department, portal 2 clockwise turning makes the contained angle between portal 2 and the box 1 be 90, and the lower part medial surface top of portal 2 is on the bottom surface of box 1, and the staff takes out wafer cassette a.

In summary, the apparatus is disposed on the wafer cassette mating groove 501 through the horizontal limiting plate at the bottom of the wafer cassette a, so as to improve the transportation stability of the wafer cassette a; the door frame 2 is tightly attached to the box body 1 through the air cylinder 3 and the spring cylinder 4, air is prevented from entering, the quality of a wafer is improved, and meanwhile, the door frame is rotated by 90 degrees and opened to be convenient for a worker or a manipulator to take; the door plate closing detection is realized by matching the reflector 9 with the reflector sensor 91, the sealing performance is improved, and the small glass 61 and the large glass 62 are convenient for workers to observe the wafers in the box body 1, so that the quality of the wafers is better ensured; the first air vent joint 8 and the second air vent joint 81 are connected with air pipes, so that the interior of the box body 1 can be conveniently evacuated, and dust is prevented from being adhered to the surface of the wafer to influence the cleanliness of the surface of the wafer; the conveying manipulator replaces manual conveying, so that the stability in the conveying process is improved, and the abrasion of the wafer in the conveying process is reduced.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention, including any reference to the above-mentioned embodiments. Various modifications to these embodiments will be readily apparent to those skilled in the art. The general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A wafer turnover box is characterized by comprising a box body (1), a door frame (2), an air cylinder (3), a spring cylinder barrel (4), a wafer box mounting rack (5) and a conveying manipulator; the front part of the box body (1) is provided with a box body opening (100) for placing the wafer box; a connecting flange plate (101) is arranged at the rear part of the box body (1), and the connecting flange plate (101) is fixedly connected with the conveying manipulator; the left side and the right side of the lower end of the front part of the box body (1) are respectively provided with two hinge seats (102), and hinge covers (1021) are arranged on the two hinge seats (102); a hinge shaft (103) is arranged between the two hinge seats (102), and two ends of the hinge shaft (103) respectively penetrate through the two hinge seats (102); the portal (2) comprises a first portal frame rod (201), a second portal frame rod (202) and a portal connecting rod (203); the middle lower part of the first door frame rod (201) is hinged with the right end of the hinged shaft (103); the middle lower part of the second frame rod (202) is hinged with the left end of the hinge shaft (103); the lower end of the first door frame rod (201) is fixedly connected with the lower end of the second door frame rod (202) through the door frame connecting rod (203); the inner side walls of the first frame rod (201) and the second frame rod (202) are provided with door plates (21), the door plates (21) are matched with the front plate of the box body (1), and the bottom surfaces of the door plates (21) are connected with the top surface of the hinged cover (1021) when the box body is closed; the outer side walls of the first door frame rod (201) and the second door frame rod (202) are provided with door covers (22), and the length of each door cover (22) is greater than that of the box body (1); the door frame (2) rotates by taking the hinge shaft (103) as a rotating shaft, and an included angle between the door frame (2) and the box body (1) is 90 degrees in an open state; the fixed end of the cylinder (3) is hinged to the outer wall of the right side of the box body (1), and the moving end of the cylinder (3) is hinged to the first door frame rod (201) through a first pin shaft and is positioned between the door frame connecting rod (203) and the door cover (22); the fixed end of the spring cylinder barrel (4) is hinged to the outer wall of the left side of the box body (1), and the moving end of the spring cylinder barrel (4) is hinged to the second door frame rod (202) through a second pin shaft and is positioned between the door frame connecting rod (203) and the door cover (22); the door frame (2) and the box body (1) are opened and closed through the air cylinder (3) and the spring cylinder barrel (4), and the inner side surface of the lower part of the door frame (2) is propped against the bottom surface of the box body (1) when the door frame is opened; the wafer box is arranged in the middle of the inner wall of the door plate (21) through a wafer box mounting frame (5).

2. The wafer turnover box of claim 1, wherein the cross-section of the wafer box mounting frame (5) is L-shaped, and wafer box fitting grooves (501) are formed on the left side and the right side of a transverse plate of the wafer box mounting frame (5); the middle part of the vertical plate of the wafer box mounting frame (5) is provided with a U-shaped notch (502).

3. A wafer transfer box according to claim 1, wherein a sealing ring (104) is disposed on the box opening (100).

4. A wafer transfer box according to claim 1, wherein a plurality of detection reflectors (9) are arranged in the middle of the inner side of the left wall of the box body (1), and corresponding detection reflective sensors (91) are arranged in the box body (1) at the symmetrical positions of the reflectors (9).

5. The wafer transfer box according to claim 1, wherein a top plate of the box body (1) is provided with an observation window pressing plate (6), and the observation window pressing plate (6) is provided with a small glass (61) and a large glass (62); the small glass (61) is positioned behind the large glass (62).

6. A wafer transfer box according to claim 1, wherein a plurality of first ventilation joints (8) are further disposed on the top plate of the box body (1), and a second ventilation joint (81) is disposed in the middle of the bottom plate of the box body (1).

7. A wafer transfer box according to claim 1, wherein a plurality of cable connectors (7) are further provided on the outer wall of the box body (1).

8. A wafer transfer box according to claim 2, wherein the box body (1) is provided with photoelectric switches (10) at the rear side of the inner wall of the top plate and the rear side of the inner wall of the bottom plate; the photoelectric switch (10) is matched with the U-shaped notch (502).