TWI348449B - Wafer container and door with vibration dampening latching mechanism - Google Patents

Wafer container and door with vibration dampening latching mechanism

Info

Publication number
TWI348449B
TWI348449B TW093133977A TW93133977A TWI348449B TW I348449 B TWI348449 B TW I348449B TW 093133977 A TW093133977 A TW 093133977A TW 93133977 A TW93133977 A TW 93133977A TW I348449 B TWI348449 B TW I348449B
Authority
TW
Taiwan
Prior art keywords
door
latching mechanism
vibration dampening
wafer container
wafer
Prior art date
Application number
TW093133977A
Other languages
Chinese (zh)
Other versions
TW200519019A (en
Inventor
Burns John
A Fuller Matthew
J King Jeffery
L Forbes Martin
V Smith Mark
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200519019A publication Critical patent/TW200519019A/en
Application granted granted Critical
Publication of TWI348449B publication Critical patent/TWI348449B/en

Links

TW093133977A 2003-11-07 2004-11-08 Wafer container and door with vibration dampening latching mechanism TWI348449B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51844203P 2003-11-07 2003-11-07

Publications (2)

Publication Number Publication Date
TW200519019A TW200519019A (en) 2005-06-16
TWI348449B true TWI348449B (en) 2011-09-11

Family

ID=39193552

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093133977A TWI348449B (en) 2003-11-07 2004-11-08 Wafer container and door with vibration dampening latching mechanism

Country Status (3)

Country Link
CN (1) CN101142129A (en)
MY (1) MY138210A (en)
TW (1) TWI348449B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105064819B (en) * 2015-08-18 2017-03-29 宁波宏都模塑有限公司 Pet cage lockset
CN110203521B (en) * 2019-06-03 2020-09-15 唐山国芯晶源电子有限公司 Wafer turnover box
TWI733345B (en) * 2020-02-21 2021-07-11 迅得機械股份有限公司 Automatic locking device

Also Published As

Publication number Publication date
TW200519019A (en) 2005-06-16
CN101142129A (en) 2008-03-12
MY138210A (en) 2009-05-29

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