CN110203521A - A kind of chip turnover box - Google Patents
A kind of chip turnover box Download PDFInfo
- Publication number
- CN110203521A CN110203521A CN201910474676.7A CN201910474676A CN110203521A CN 110203521 A CN110203521 A CN 110203521A CN 201910474676 A CN201910474676 A CN 201910474676A CN 110203521 A CN110203521 A CN 110203521A
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- Prior art keywords
- cabinet
- door frame
- hinged
- door
- plate
- Prior art date
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/02—Internal fittings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/38—Devices for discharging contents
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D25/00—Details of other kinds or types of rigid or semi-rigid containers
- B65D25/54—Inspection openings or windows
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D53/00—Sealing or packing elements; Sealings formed by liquid or plastics material
- B65D53/02—Collars or rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D81/00—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents
- B65D81/18—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient
- B65D81/20—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas
- B65D81/2007—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum
- B65D81/2038—Containers, packaging elements, or packages, for contents presenting particular transport or storage problems, or adapted to be used for non-packaging purposes after removal of contents providing specific environment for contents, e.g. temperature above or below ambient under vacuum or superatmospheric pressure, or in a special atmosphere, e.g. of inert gas under vacuum with means for establishing or improving vacuum
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65D—CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B65D85/00—Containers, packaging elements or packages, specially adapted for particular articles or materials
- B65D85/30—Containers, packaging elements or packages, specially adapted for particular articles or materials for articles particularly sensitive to damage by shock or pressure
Abstract
The present invention relates to the turnover boxes for storing semiconductor wafer.A kind of chip turnover box, including cabinet, door frame, cylinder, spring cylinder barrel, wafer case mounting rack and conveying mechanical arm；The rear portion of cabinet is provided with connecting flange plate, and connecting flange plate is fixedly connected with conveying mechanical arm；Hinged seat there are two being respectively set at left and right sides of cabinet front lower ends；Hinge bar is provided between two hinged seats；Door frame middle and lower part and the both ends of hinge bar are hinged；Cylinder fixing end is hinged in the outer right wall of cabinet, and the mobile terminal of cylinder and the lower part outer right wall of door-plate are hinged；The fixing end of spring cylinder barrel is hinged on the left side outer wall of cabinet, and the mobile terminal of spring cylinder barrel and the lower left side outer wall of door-plate are hinged；Angle under opening state between door-plate and cabinet is 90 °；The middle part of door-plate inner wall is arranged in wafer case mounting rack.The advantages of chip turnover box of the invention is good seal performance, and wafer case convenient and chip stability in mobile and transportational process of taking is good.
Description
Technical field
The present invention relates to the turnover boxes for storing semiconductor wafer.
Background technique
It in chip in mobile and transportational process, is placed the wafer in chip turnover box mostly, existing chip week
Turn box to have the following problems: one, the sealing performance of wafer case is not strong enough, is easy to admit air into, to the cleannes of wafer surface
Generate certain influence；Two, wafer case is not enough convenient by manually being opened or closed and being taken, opening or
It is easy to cause the chip of wafer case to be shaken in closing process, since the unstable surface for leading to chip will receive abrasion；Three,
It is not sent out in conveying and chip is detected, influence following process；Four, the crystalline substance in wafer case can not be observed during transportation
Piece can not understand internal situation.
Summary of the invention
The purpose of the present invention is to solve poor sealing performance, the chips of chip turnover box existing for existing chip turnover box
Box takes inconvenient and chip in movement and problem unstable in transportational process, provides a kind of by the gentle cylinder of spring cylinder barrel
It realizes door-plate and cabinet automatic open-close, closed type is ensured while conveniently taking；Wafer case mounting rack is placed on by wafer case
The chip turnover box of stability in upper promotion transmission process.
For the purpose of the present invention, be achieved using following technical scheme: a kind of chip turnover box, including cabinet, door frame,
Cylinder, spring cylinder barrel, wafer case mounting rack and conveying mechanical arm；The cabinet that the front of cabinet is provided with for being put into wafer case is opened
Mouthful；The rear portion of the cabinet is provided with connecting flange plate, the connecting flange plate and the fixed company of the conveying mechanical arm
It connects；It is respectively set at left and right sides of cabinet front lower ends there are two hinged seat, is provided with hinged cap on two hinged seats；Two
Articulated shaft is provided between a hinged seat, and the both ends of articulated shaft are each passed through two hinged seats；The door frame includes first
Door frame bar, the second door frame bar and door frame connecting rod；The middle and lower part of the first door frame bar and the right end of articulated shaft are hinged；It is described
The second door frame bar middle and lower part and articulated shaft left end it is hinged；The door frame connecting rod is by the lower end of the first door frame bar and
The lower end of two door frame bars is fixedly connected；Door-plate, the door-plate are provided on the inner sidewall of first door frame bar and the second door frame bar
The bottom surface of door-plate is mutually connected with the top surface of hinged cap when matching with the foreboard of cabinet, and being closed；First door frame bar and second
A cover is provided on the lateral wall of hack lever, the length of the door cover is greater than the length of cabinet；Door frame is using articulated shaft as rotary shaft
It is rotated, the angle between opening state lower mast and cabinet is 90 °；The fixing end of the cylinder is hinged on the right side of cabinet
On the outer wall of side, the mobile terminal of cylinder is hinged on the first door frame bar by the first pin shaft, and covers it positioned at door frame connecting rod and door
Between；The fixing end of the spring cylinder barrel is hinged on the left side outer wall of cabinet, and the mobile terminal of spring cylinder barrel passes through the second pin shaft
Be hinged on on the second door frame bar, and between door frame connecting rod and door cover；Door frame and cabinet pass through cylinder and spring cylinder barrel
The lower inside surface of door frame is withstood on the bottom surface of cabinet when realizing folding, and opening；The wafer case is installed by wafer case
The middle part of door-plate inner wall is arranged in frame.The device increases leakproofness, conveying stability is improved, convenient for more effectively carrying out detecting
It crosses.
Preferably, the wafer case mounting rack section is L-shaped, the left and right sides setting of the transverse slat of wafer case mounting rack
There is wafer case mating groove；U-shaped recess is provided in the middle part of the riser of wafer case mounting rack.The stability of wafer case in cabinet is improved,
It prevents from chip from shaking in cabinet to cause to wear.
Preferably, being provided with sealing ring on the box opening.Increase leakproofness.
Preferably, the left wall middle inside of the cabinet is provided with multiple detection reflecting mirrors, it is located at reflection in cabinet
The symmetric position of mirror is provided with corresponding detection reflective sensor.Realize occlusion detection.
Preferably, being provided with observation window pressing plate on the top plate of the cabinet, small glass is provided on observation window pressing plate
With big glass；The small glass is located at the rear of big glass.Convenient for preferably being observed.
Preferably, being additionally provided with multiple first ventilating joints on the top plate of the cabinet, set in the middle part of the bottom plate of cabinet
It is equipped with the second ventilating joint.Convenient for vacuum handling.
Preferably, being additionally provided with multiple cable connectors on the cabinet exterior.
Preferably, optoelectronic switch is respectively set on rear side of the top plate inner wall of the cabinet and on rear side of plate inner wall；It is described
Optoelectronic switch matched with U-shaped recess.It is convenient for electric control.
Compared with prior art, the beneficial effects of the present invention are: the limit transverse slat by wafer case bottom is arranged in crystalline substance
On film magazine mating groove, the stability of wafer cassette transport is improved；Door-plate is fitted closely with cabinet by cylinder and spring cylinder barrel, is led to
Crossing sealing ring prevents air from entering, and promotes the quality of chip, while taking convenient for staff in 90 ° of openings；Pass through reflecting mirror
It is matched with reflecting mirror sensor and realizes door-plate occlusion detection, lift-off seal；It is convenient for employee couple by small glass and big glass
The intracorporal chip of case is observed, and then better the case where paying close attention to internal chip；It is logical by the first ventilating joint and second
Tracheae is connected on gas connector, convenient for evacuating to box house, the surface for preventing dust from adhering to chip causes to wafer surface
Cleannes have an impact；Replace manual handling by conveying mechanical arm, promote the stability in handling process, reduce it is mobile and
The abrasion of chip in transportational process.The advantages of chip turnover box i.e. of the invention is good seal performance, wafer case take it is convenient with
And chip stability in mobile and transportational process is good.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention.
Fig. 2 is the structural schematic diagram of wafer case.
Fig. 3 is explosive view of the invention.
Fig. 4 is the explosive view of door frame.
The label in accompanying drawing is: wafer case a, cabinet 1, box opening 100, connecting flange plate 101, hinged seat 102, hinged
Cover 1021, hinge bar 103, sealing ring 104, door frame 2, the first door frame bar 201, the second door frame bar 202, door frame connecting rod 203, door
Plate 21, door cover 22, cylinder 3, spring cylinder barrel 4, wafer case mounting rack 5, wafer case mating groove 501, U-shaped recess 502, observation window pressure
Plate 6, small glass 61, big glass 62, cable connector 7, the first ventilating joint 8, the second ventilating joint 81, detection reflecting mirror 9, detection
Reflective sensor 91, optoelectronic switch 10.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
In the description of the present invention, it is to be understood that, term " on ", "lower", "front", "rear", "left", "right", "top",
The orientation or positional relationship of the instructions such as "bottom", "inner", "outside" is to be merely for convenience of describing based on attached drawing orientation or positional relationship
The present invention simplifies description, rather than the device or element of indication or suggestion meaning must have a particular orientation, with specific side
Position construction, operation, therefore be not considered as limiting the invention.
As shown in Figures 1 to 4, a kind of chip turnover box, including cabinet 1, door frame 2, cylinder 3, spring cylinder barrel 4, wafer case
Mounting rack 5 and conveying mechanical arm；The front of cabinet 1 is provided with the box opening 100 for being put into wafer case, box opening 100
On be provided with sealing ring 104, sealing performance when closure is further ensured that by sealing ring 104, prevents air from entering.Cabinet 1
Top be provided with connecting flange plate 101, connecting flange plate is fixedly connected with conveying mechanical arm, by conveying mechanical arm replace people
Work is carried manually, promotes the stability in handling process, reduces the abrasion of chip in handling process.1 front lower ends of cabinet or so
Two sides are respectively set there are two hinged seat 102, are provided with hinged cap 1021 on two hinged seats 102, are subtracted by hinged cap 1021
Gap between small box 1 and door frame 2, lift-off seal.Hinge bar 103, and hinge bar are provided between two hinged seats 102
103 both ends are each passed through two hinged seats 102；Door frame 2 is connected including the first door frame bar 201, the second door frame bar 202 with door frame
Bar 203；The middle and lower part of first door frame bar 201 and the right end of articulated shaft 103 are hinged；The middle and lower part of second door frame bar 202 and hinged
The left end of axis 103 is hinged；Door frame connecting rod 203, which fixes the lower end of the first door frame bar 201 and the lower end of the second door frame bar 202, to be connected
It connects；Door-plate 21, the foreboard phase of door-plate 21 and cabinet 1 are provided on the inner sidewall of first door frame bar 201 and the second door frame bar 202
The bottom surface of door-plate 21 is mutually connected with the top surface of hinged cap 1021 when matching, and being closed；First door frame bar 201 and the second door frame bar 202
Lateral wall on be provided with cover 22, the length of door cover 22 is greater than the length of cabinet 1.By door frame 2 with articulated shaft 103 be rotation
Axis is rotated, and door frame 2 hingedly cooperates with cabinet 1 and shape rotating opening in 90 °, is conveniently taken, door-plate 21 when being closed at
Bottom surface be mutually connected with the top surface of hinged cap 1021, lift-off seal；Door-plate is horizontal when opening, convenient for taking for wafer case
Conveying, and the lower inside surface of door frame 2 is withstood on the bottom surface of cabinet 1, promotes the support strength of wafer case.The fixation of cylinder 3
End is hinged in the outer right wall of cabinet 1, and the mobile terminal of cylinder 3 is hinged on the first door frame bar 201 by the first pin shaft, and position
Between door frame connecting rod 203 and door cover 22, by cylinder 3 further convenient for the folding between control door frame 2 and cabinet 1, subtract
The labor intensity gently manually opened and closed promotes folding efficiency.The fixing end of spring cylinder barrel 4 is hinged on the left side outer wall of cabinet 1, bullet
The mobile terminal of spring cylinder barrel 4 by the second pin shaft be hinged on on the second door frame bar 202, and be located at door frame connecting rod 203 and door cover
Between 22, the seal clearance between door frame 2 and cabinet 1 is further strengthened by spring cylinder barrel 4, prevents air from entering, it is ensured that is brilliant
The cleannes on piece surface promote the quality of chip.Wafer case a is arranged in the middle part of the inner wall of door-plate 21 by wafer case mounting rack 5,
Multiple wafer slots are provided on wafer case a, chip, which is vertically arranged, to be placed in each wafer slots, and the bottom of wafer case a is provided with
The limit transverse slat of two pieces of strips；5 section of wafer case mounting rack is L-shaped, is provided at left and right sides of the transverse slat of wafer case mounting rack 5
The limit transverse slat of wafer case mating groove 501, the bottom wafer case a is arranged on wafer case mating groove 501, convenient for during transportation
The stability for ensuring wafer case a prevents wafer case a from shaking, so that it is guaranteed that the quality of chip, makes chip reduce abrasion.Wafer case
U-shaped recess 502 is provided in the middle part of the riser of mounting rack 5.Door frame 2 is opened with cabinet 1 by mobile realize of cylinder 3 and spring cylinder barrel 4
It closes, so that the wafer case in the wafer case mounting rack 5 on door-plate 21 be made to enter in box cavity.In on the inside of the left wall of cabinet 1
Portion is provided with multiple reflecting mirrors 9, and the symmetric position that reflecting mirror 9 is located in cabinet 1 is provided with corresponding reflecting mirror sensor 91,
The detection of door frame 2 Yu 1 closure situation of cabinet is matched with reflecting mirror sensor 91 by reflecting mirror 9, improves the closure effect of door frame 2
Fruit, lift-off seal.
As shown in figure 3, being provided with observation window pressing plate 6 on the top plate of cabinet 1, small glass 61 is provided on observation window pressing plate 6
With big glass 62；Small glass 61 is located at the rear of big glass 62, by small glass 61 and big glass 62 convenient for employee in cabinet 1
Chip observed, and then preferably guarantee the quality of chip.It is additionally provided with multiple cable connectors 7 on 1 outer wall of cabinet, passes through
Cable connector 7 preferably realizes electric control convenient for preferably carrying out cable connection.It is additionally provided on the top plate of cabinet 1 more
The bottom plate middle part of a first ventilating joint 8, cabinet 1 is provided with the second ventilating joint 81, logical by the first ventilating joint 8 and second
Tracheae is connected on gas connector 81, convenient for evacuating inside cabinet 1, making to keep vacuum state in cabinet 1, prevents dust from adhering to
The surface of chip has an impact the cleannes of wafer surface.On rear side of the top plate inner wall of cabinet 1 respectively with plate inner wall rear side
Optoelectronic switch 10 is set, by optoelectronic switch 10 convenient for preferably carrying out electric control, convenient for operation.Optoelectronic switch 10 with it is U-shaped recessed
Mouth 502 matches, and saves occupied space.
When work, the limit transverse slat of the bottom wafer case a only easily need to be inserted into wafer case mating groove 501 by staff
On, rest on the rear wall of wafer case a on the riser of wafer case mounting rack 5, it will by cylinder 3 and 4 collective effect of spring cylinder barrel
Door frame 2 rotates counterclockwise, is finally bonded door frame 2 and the bottom of cabinet 1, realizes that the sealing of cabinet 1 is closed, while passing through reflecting mirror
9, which match progress closure situation detection with reflecting mirror sensor 91, ensures to be closed completely, logical by the first ventilating joint 8 and second
Gas connector 81 is to carrying out pumping process in cabinet；By conveying mechanical arm by wafer cassette transport to lower one of processing, under arrival
When at one of processing, door frame 2 is rotated clockwise, and makes 90 ° of angle between door frame 2 and cabinet 1, and the lower inside of door frame 2
Face is withstood on the bottom surface of cabinet 1, and staff takes out wafer case a.
In conclusion the device is arranged on wafer case mating groove 501 by the limit transverse slat of the bottom wafer case a, improve
The stability of wafer case a conveying；Door frame 2 is fitted closely with cabinet 1 by cylinder 3 and spring cylinder barrel 4, prevents air from entering,
The quality of chip is promoted, while being taken in 90 ° of Unscrews convenient for staff or manipulator；Pass through reflecting mirror 9 and reflecting mirror
Sensor 91, which matches, realizes door-plate occlusion detection, and lift-off seal is by small glass 61 and big glass 62 convenient for employee to cabinet
Chip in 1 is observed, and then preferably ensures the quality of chip；Pass through the first ventilating joint 8 and the second ventilating joint 81
Upper connection tracheae, the surface convenient for evacuating inside cabinet 1, preventing dust from adhering to chip lead to cleaning to wafer surface
Degree has an impact；Manual handling is replaced by conveying mechanical arm, promotes the stability in handling process, is reduced brilliant in handling process
The abrasion of piece.
The above are the descriptions to the embodiment of the present invention to keep this field special by the foregoing description of the disclosed embodiments
Industry technical staff can be realized or using the present invention.Various modifications to these embodiments carry out those skilled in the art
Saying will be apparent.The general principles defined herein can be the case where not departing from the spirit or scope of the present invention
Under, it realizes in other embodiments.Therefore, the present invention is not intended to be limited to these implementation columns shown in this article, but to accord with
Close the widest scope consistent with principles disclosed herein, novel point.
Claims (8)
1. a kind of chip turnover box, which is characterized in that including cabinet (1), door frame (2), cylinder (3), spring cylinder barrel (4), chip
Box mounting rack (5) and conveying mechanical arm；The front of cabinet (1) is provided with the box opening (100) for being put into wafer case；It is described
The rear portion of cabinet (1) be provided with connecting flange plate (101), the connecting flange plate (101) and the conveying mechanical arm
It is fixedly connected；There are two being respectively set at left and right sides of cabinet (1) front lower ends hinged seat (102), two hinged seats
(102) hinged cap (1021) are provided on；It is provided with articulated shaft (103) between two hinged seats (102), and articulated shaft (103)
Both ends be each passed through two hinged seats (102)；The door frame (2) includes the first door frame bar (201), the second door frame bar
(202) and door frame connecting rod (203)；The middle and lower part of the first door frame bar (201) and the right end of articulated shaft (103) are hinged；
The middle and lower part of the second door frame bar (202) and the left end of articulated shaft (103) are hinged；The door frame connecting rod (203) will
The lower end of first door frame bar (201) is fixedly connected with the lower end of the second door frame bar (202)；First door frame bar (201) and second
It is provided on the inner sidewall of hack lever (202) door-plate (21), the door-plate (21) and the foreboard of cabinet (1) match, and are closed
When door-plate (21) bottom surface be mutually connected with the top surface of hinged cap (1021)；First door frame bar (201) and the second door frame bar (202)
A cover (22) is provided on lateral wall, the length of the door cover (22) is greater than the length of cabinet (1)；Door frame (2) is with articulated shaft
(103) it is rotated for rotary shaft, the angle between opening state lower mast (2) and cabinet (1) is 90 °；The cylinder (3)
Fixing end be hinged in the outer right wall of cabinet (1), the mobile terminal of cylinder (3) is hinged on the first door frame bar by the first pin shaft
(201) on, and between door frame connecting rod (203) and door cover (22)；The fixing end of the spring cylinder barrel (4) is hinged on case
On the left side outer wall of body (1), the mobile terminal of spring cylinder barrel (4) by the second pin shaft be hinged on on the second door frame bar (202), and
Between door frame connecting rod (203) and door cover (22)；Door frame (2) and cabinet (1) are real by cylinder (3) and spring cylinder barrel (4)
The lower inside surface of door frame (2) is withstood on the bottom surface of cabinet (1) when now opening and closing, and opening；The wafer case passes through wafer case
Mounting rack (5) is arranged at the middle part of door-plate (21) inner wall.
2. a kind of chip turnover box according to claim 1, which is characterized in that described wafer case mounting rack (5) section
It is L-shaped, wafer case mating groove (501) are provided at left and right sides of the transverse slat of wafer case mounting rack (5)；Wafer case mounting rack (5)
Riser in the middle part of be provided with U-shaped recess (502).
3. a kind of chip turnover box according to claim 1, which is characterized in that be arranged on the box opening (100)
There are sealing ring (104).
4. a kind of chip turnover box according to claim 1, which is characterized in that on the inside of the left wall of the cabinet (1)
Portion is provided with multiple detection reflecting mirrors (9), and the symmetric position that reflecting mirror (9) are located in cabinet (1) is provided with corresponding detection
Reflective sensor (91).
5. a kind of chip turnover box according to claim 1, which is characterized in that be arranged on the top plate of the cabinet (1)
Have observation window pressing plate (6), small glass (61) and big glass (62) are provided on observation window pressing plate (6)；The small glass (61)
Positioned at the rear of big glass (62).
6. a kind of chip turnover box according to claim 1, which is characterized in that also set on the top plate of the cabinet (1)
Multiple first ventilating joints (8) are equipped with, are provided with the second ventilating joint (81) in the middle part of the bottom plate of cabinet (1).
7. a kind of chip turnover box according to claim 1, which is characterized in that also set up on described cabinet (1) outer wall
There are multiple cable connectors (7).
8. a kind of chip turnover box according to claim 1, which is characterized in that after the top plate inner wall of the cabinet (1)
Optoelectronic switch (10) are respectively set on rear side of side and plate inner wall；The optoelectronic switch (10) is matched with U-shaped recess (502).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910474676.7A CN110203521B (en) | 2019-06-03 | 2019-06-03 | Wafer turnover box |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910474676.7A CN110203521B (en) | 2019-06-03 | 2019-06-03 | Wafer turnover box |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110203521A true CN110203521A (en) | 2019-09-06 |
| CN110203521B CN110203521B (en) | 2020-09-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910474676.7A Active CN110203521B (en) | 2019-06-03 | 2019-06-03 | Wafer turnover box |
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|---|---|---|---|---|
| CN1037616A (en) * | 1988-04-29 | 1989-11-29 | 氟器皿有限公司 | Wafer carrier |
| JPH07153826A (en) * | 1993-11-29 | 1995-06-16 | Ebara Corp | Storage for semiconductor or liquid crystal |
| WO1995017004A1 (en) * | 1993-12-14 | 1995-06-22 | W.L. Gore & Associates, Inc. | Semiconductor wafer transport container |
| CN1163683A (en) * | 1994-10-11 | 1997-10-29 | 渐进系统技术公司 | Substrate housing and docking system |
| JPH09115997A (en) * | 1995-10-18 | 1997-05-02 | Advanced Display:Kk | Accommodation cassette |
| CN1643676A (en) * | 2002-06-06 | 2005-07-20 | 东京毅力科创株式会社 | Receiving container body for object to be processed |
| CN101142129A (en) * | 2003-11-07 | 2008-03-12 | 安堤格里斯公司 | Wafer container and door with vibration dampening latching mechanism |
| CN106005804A (en) * | 2016-07-15 | 2016-10-12 | 荣成中磊石材有限公司 | Upper cover opening transportation container |
| CN106383252A (en) * | 2016-10-09 | 2017-02-08 | 深圳市佳晨科技有限公司 | Turnover door type shielding box |
| CN208779908U (en) * | 2018-09-19 | 2019-04-23 | 成都先进功率半导体股份有限公司 | A kind of wafer oven automatically-controlled door |
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| CN110203521B (en) | 2020-09-15 |
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