CN110199089A - Pump assembly with stator splice seal - Google Patents

Abstract

A kind of pump assembly is disclosed comprising: two half-shell stators limit one or more pumping chambers；End pieces are mounted at the either end of described two half-shell stators；Transverse seals are used to be sealed between longitudinal contact surface of described two half-shell stators on the either side of the pumping chamber；And at least one other sealing element, it is used to be sealed between one of described end pieces and the stator half-shell.The transverse seals have the end sections adjacent against at least one described annular seal；And the wide high aspect ratio of the transverse seals and the other sealing element is between 1:1 and 2:1.

Description

Pump assembly with stator splice seal

Technical field

The field of the invention is related to pumping, and relates in particular to the sealing element of the stator for pump.

Background technique

By using half-shell stator, so that installation of the rotor in the stator of some pump assemblies is simpler.This allows rotor It is placed in a half-shell, and another half-shell is assemblied on top.Then top plate or end are used at the either end of stator Component is with spring bearing and drive system.Sealing element is needed between stator half-shell and between end pieces and stator.

The point that cut-off rule between half-shell stator reaches the sealing element being sealed between top plate and stator is referred to as T shape Connector.It is difficult to provide at this T junction and effectively or reliably seal, especially in the case where pump assembly operates at high temperature.

GB2489248 discloses a kind of vacuum pump with half-shell stator.It has close for carrying out between stator half-shell The longitudinal stator splice seal of envelope and annular stator sealing element for being sealed between stator and top part.Stator Half-shell has the shape for being held in place transverse seals against annular seal, so as to improve the engagement of this T shape Sealing at portion.

Summary of the invention

The first aspect of the present invention provides a kind of vacuum pump component comprising: two half-shell stators limit one or more Multiple vacuum pumping chambers；End pieces are mounted at the either end of described two half-shell stators；Transverse seals are used In being sealed between longitudinal contact surface of described two half-shell stators on the either side in the pumping chamber；And at least One other sealing element is used to be sealed between one of described end pieces and the stator half-shell；Wherein institute Stating transverse seals has the end sections adjacent against at least one other sealing element；And the transverse seals And the wide high aspect ratio of each of described other sealing element is between 1:1 and 2:1.

Present inventors have realized that the interface between two different seals will be by the stress on each sealing element With the influence of compression, the variation of stress and compression on each sealing element cause its elastomer properties and its distort to strain Change.In addition, it is recognized, when sealing element is under compression, the stress in the sealing element increases with the increase of the ratio of width to height Add, described the ratio of width to height increases because of increased distortion, this changes seal geometry, increases so as to cause failure at seal interface Risk.The beginning that high stress in sealing element also accelerates compression to be formed, this shortens the service life of sealing element.

Geometry to the sealing element of seal interface is especially impacted, wherein variation (example of the sealing element because of operating condition Such as the raising of temperature) and the stress variation of experience is different in each sealing element.If stress on a sealing element with it is another Stress on sealing element differently increases, and then this will lead to stress mismatch, this will affect the geometry of seal interface, and And therefore the sealed nature at interface will change.This problem is similar relatively low by providing for each of sealing element Wide high aspect ratio solves.This leads to any mismatch all very littles of the stress of each sealing element experience, changes in operation temperature When, corresponding small variation occurs for the interface geometry between sealing element, to provide effectively operation across wide temperature range.

In some embodiments, the other sealing element is annular seal and the O including the aspect ratio with 1:1 Shape ring, and the transverse seals have rectangular cross section.

Due to the geometry of pump assembly, the sealing element between end pieces and stator half-shell can have annular form, and It and in some cases may include O-ring.O-ring is effective sealing element and is easy to get.It usually has rounded cross section Face, to give the aspect ratio of its 1:1.In contrast, transverse seals will have rectangular cross section (can be square) simultaneously And will there is the aspect ratio between 1:1 and 2:1.Transverse seals can be in the form of washer, and washer is conventionally formed with Rectangular cross section with big wide high aspect ratio.There is provided have similar to O-ring aspect ratio aspect ratio sealing element by Big temperature range is crossed in the similar stress undergone in sealing element, and effectively sealing is provided.In addition, with 3:1 or higher The conventional washer of wide high aspect ratio is compared, and the low wide high aspect ratio in transverse seals leads to reduced stress, so as to cause more Long seal life.

In other embodiments, the other sealing element includes cyclic annular rectangular seal, and the transverse seals And the annular seal respectively has the wide high aspect ratio between 1:1 and 2:1.

Although O-ring is easy to get and is effective sealing element and is therefore typically used as annular seal, one In a little embodiments, use rectangular cross-sectional face seal as the other sealing element.Using rectangular seal, The cross section of the two sealing elements then can closely match.

In some embodiments, the transverse seals have the wide high aspect ratio between 1.1:1 and 1.3:1.

Transverse seals make it be easy manipulation and place in the trench less times greater than 1 aspect ratio.However, being close to Closer matching is provided in 1, wherein the other sealing element is O-ring, to provide answering more evenly across joint portion Power.Although connecing it in addition, having the aspect ratio less times greater than 1 that it is made to be easy manipulation, be positioned and retained in groove The thicker sealing element of 1 offer is provided, the thicker sealing element provides stress distribution more evenly especially towards the end of sealing element, Wherein stress distribution is critically important.Also reduce the chemosensitivity of sealing element compared with low stress, the chemosensitivity with stress increasing Add and increases.

In some embodiments, the other sealing element also has the wide high aspect ratio between 1.1:1 and 1.3:1.

In some embodiments, the other sealing element and the transverse seals, which have, differs each other less than 50%, is excellent Selection of land less than the 30% and in some embodiments cross-sectional area with the similar order of magnitude less than 10%.

Cross-sectional area of the maximum possible area at the interface between sealing element by the sealing element with minimum cross-section Limitation.Therefore it provides similar cross-sectional area avoids interfacial area from excessively being limited by an especially low cross-sectional area. In addition, this provides the pressure balance in each sealing element there are in the case where good Stress match in two different seals, To allow interface to maintain its shape, and flat sealing surface is provided in the case where matched well.

In some embodiments, the transverse seals include flat end surface when uncompressed so as to it is described in addition Sealing element it is adjacent.

Although the end surface of transverse seals can have into the shape of profile to match with such as O-ring, It is in some embodiments comprising flat surfaces.Flat surfaces are more easily manufactured and are easier to manipulate.In this respect, exist Group armored pump when, the end of transverse seals can prolong than the end of stator half-shell project farther and be pushed back with use tool with The end surface of stator half-shell is aligned.In the case where end surface is flat, then make the manufacture of this process and the tool It is simpler.

In addition, then this will provide and is a relatively flat surface in the compressed situation of O-ring, transverse seals are put down Smooth surface effectively can cooperate and seal on described be a relatively flat surface.

In some embodiments, the transverse seals are manufactured with height greater than 2mm, tolerance 0.07mm, And the groove is manufactured with the depth smaller by 20% than the height of the washer, tolerance 0.05mm, because of the public affairs The compression variation caused by difference is lower than 7%.

In some embodiments, the transverse seals are manufactured with height, tolerance greater than 2.5mm and are 0.07mm, and the groove is manufactured with the depth smaller by 20% than the height of the washer, tolerance 0.05mm, The compression variation caused by because of the tolerance is lower than 5.5%.

As noted above, being arranged to 2 millimeters and tolerance in the minimum constructive height of sealing element is 0.07 millimeter and ditch In the case that slot is manufactured with the depth smaller by 20% than this height, tolerance is 0.05 millimeter, because of the compression variation caused by tolerance It is limited to 7% or less.However, being manufactured with height greater than 2.5 millimeters, with similar tolerance in transverse seals In the case of, then because the compression variation caused by tolerance drops to 5.5% or less.In addition, being highly still further increased to 3 millis Rice, have same tolerances in the case where, then compression variation drops to 4.7% or less.In this way, it is possible to find out, in tolerance The height for increasing sealing element in the case where remaining unchanged reduces because of the compression variation caused by these tolerances, and this cause it is increased The better ability for the stress and strain that predictability and matching are experienced by sealing element in its interface.

For above sealing element, between 2.5 millimeters and 3.5 millimeters, preferably 3 millimeters of width provide it is desired Aspect ratio.

Compared with the width with sealing element select groove relative width when, should be selected to it is sufficiently wide so that close Groove is not run out of from space or overflowed to sealing when compressing or expanding because of the raising of temperature.However, it should not be than upper It states and requires much broader, otherwise sealing element may deviate or become to be misaligned.

Vacuum pump has extra high pressure difference and needs particularly effective sealing element.Therefore, the embodiment of the present invention Especially suitable for such vacuum pump.

Other specific and preferred aspect is illustrated in accompanying independent claim and dependent claims.Appurtenance is wanted The feature asked can optionally and by the combination in addition to those of being expressly recited combination in claim be wanted with independent right The feature combination asked.

In the case where device characteristic, which is described as, to be operated to provide function, it will be appreciated that this includes providing the function Or it is adapted or is configured to provide the device characteristic of the function.

Detailed description of the invention

Embodiments of the present invention will now be further described with reference to the accompanying drawings, in which:

Fig. 1 shows the section of the washer by the prior art, the width and 1mm under freedom and compressive state with 3mm Highly；

Fig. 2 shows the sections by the washer according to the embodiment under freedom and compressive state；

Fig. 3 shows influence of the tolerance to the washer and washer according to the embodiment of the prior art；

Fig. 4 a and Fig. 4 b show washer with different aspect ratios and for the transversal of the interface between the O-ring of transverse seals Face view；

Fig. 5 shows the pump assembly with horizontal division line；

Fig. 6 shows the isometric view of the pump assembly according to the embodiment with sealing element；And

Fig. 7 shows the profile of transverse seals according to the embodiment.

Specific embodiment

Before discussing embodiment in more detail, general introduction will be provided first.

Embodiment is proposed suitable for big temperature range and transverse seals or washer with low wide high aspect ratio, thus Low sealing distortion and low Sealing Stress are provided.Compared with conventional stator shell washer, there is increased height or thickness by providing Transverse seals this low aspect ratio is provided, and this not only reduces the stress in washer, but also it needs deeper groove, And this leads to the more easily placement of sealing element in the trench.

Reduced compression variation with end pieces sealing elements is adjacent or the end surface of cooperation on lead to more predictable table Surface pressure, thus allow better Stress match and with operating condition variation (such as temperature change) and change smaller Seal interface geometry.

Internal stress because reduction wide high aspect ratio caused by reduce and also reduce chemosensitivity and increase longevity of sealing element Life, because permanent set (that is, irreversible transformation) quickly occurs when stress increases.

By providing aspect ratio similar for the two sealing elements, realized for these sealing elements a degree of Stress match, and the variation that interface geometry varies with temperature reduces.

In the case where the cross-sectional area of two sealing elements is similar, this also provides improved Stress match and reduction Interface geometry variation, to lead to improved sealing effect in bigger temperature range.In addition, the class of two sealing elements Increased interfacial area is also provided like the cross-sectional area of size, because its full-size is by with smaller cross-sectional area area The limitation of the cross-sectional area of sealing element.

Compared with many typical seals, the sealing element with low wide high aspect ratio causes the height of transverse seals to increase Add.The increase of seal height causes the corresponding of trench depth to increase, and this not only makes sealing element be easier to place and protect It holds in the trench, and it also reduces the variation occurred by manufacturing tolerance.For example, in the case where tolerance is 0.05 millimeter, For the sealing element of 1 height, this is then related to 5% variation, and the sealing element high for 3 millimeters, variation are thirdly dividing it One.The small percentage variation of the size of sealing element leads to the small change of compression zone and applies to by the end surface of sealing element The more predictability of the surface pressing added.

Fig. 1 diagrammatically shows the washer of the width by uncompressed height and 3mm according to prior art with 1mm Cross section.As can be seen, (hair when between two stator cases for being mounted on pump assembly when such longitudinal washer is compressed It is raw), then it expands in the width of groove and undergoes relatively high distortion and stress.Particularly, as can be seen, sealing element Marginal portion have relatively sharp cross section.The sealing element end sections adjacent with annular seal will be by similar side Formula distortion, and this sharp cross section can be particularly dug into corresponding looped end part seal, and end piece is close Sealing does not undergo similar compression and stress, and this leads to the distortion at interface, this then leads to seal leakage.

Fig. 2 shows the cross sections of the washer for pump assembly by embodiment according to the present invention.In the case, exist When static, the width of washer is 3mm, and height is 2.5mm.When compared with the washer with Fig. 1, this shape provides much lower width High aspect ratio, and when washer is compressed, this leads to rather low distortion and stress.In addition, stress crosses over washer more evenly, So as to cause more flat and so not sharp edge and end surface.

Fig. 3 provides table, shows the increase with gasket thickness, the influence that manufacturing tolerance changes compression ratio.Particularly, Prior art washer in the gasket channel of 0.8 mm of depth with width 3mm and thickness 1mm is shown as with compression ratio variation, I.e. when assembling stator the compressed percentage of washer due to the manufacturing tolerance of gasket thickness 0.07mm and trench depth 0.05mm Between 7.5% and 34.4%.

Then consider tolerance to the influence according to the compression ratio of the washers of different embodiments.These washers are having the same 3mm width, but there is increased height or thickness.Think that the manufacturing tolerance of washer and groove is same as the prior art, i.e. washer Thickness is 0.07mm and trench depth is 0.05mm.

Firstly, considering 2mm thickness and the washer in the groove of 1.60 mm.In the case, tolerance is generated in 6.9 Hes Compression ratio between 6.5, i.e. lower than 7% changes.

Gasket thickness, which is increased to 2.5mm, makes compression ratio variation be reduced to 5.5% or lower.Thickness is further increased to 3mm (this provides the washer with square cross section) makes compression ratio variation be reduced to 4.6% or lower.

The compression ratio as caused by manufacturing tolerance is changed significantly reduction when the table of Fig. 3 is shown clearly in gasket thickness increase. This variation reduces the more predictable stress caused in washer, this allows to come with the better Stress match between sealing element Pump is manufactured more consistently.

In short, the low thickness of 1mm may lead to wide variation in compression zone, and the high compression at the upper end of this range Than the beginning for accelerating to compress sizing in washer, this leads to premature seal failure.High gasket compression also results in washer in interface It is cut into O-ring.

In a preferred embodiment, washer is 3mm wide and 2.5 mm high and has the cross roughly the same with annular seal Area of section.Low aspect ratio 1.2:1 leads to low sealing distortion and low Sealing Stress.2.5 mm thickness lead to narrow compression zone, and And the relatively low compression ratio at the upper end of this range reduces the beginning that sizing is compressed in washer, this extends seal life.Make Optimize the balance between the compression on O-ring and washer with finite element analysis, so that the extremum of compression and temperature is not led Cause the loss of interfacial pressure or the damage to O-ring.In addition, the washer ratio 1mm of 2.5mm thickness thick washer is more rigidly (positively) it engages in the housing and is less likely to come out from groove.This is helped avoid by fixing screws pressure Clamping washer when contracting washer observes the fixing screws in the washer of 1mm thickness once in a while.

Fig. 4 a and Fig. 4 b schematically show the end in longitudinal washer 20 between annular seal 40 and stator half-shell How the shape at the interface between part changes with the washer for increasing thickness.

Fig. 4 a shows the boundary between the washer 20 of increase thickness according to the embodiment and the O-ring 40 under compression Face.As can be seen, washer 20 and O-ring are so as to cause most of region at interface to quite equal pressure is applied each other The surface of general planar.Roughly equal pressure from every side is the roughly equal stress due to each sealing element experience It is caused.In addition, maintaining this matching across big temperature range.

Fig. 4 b shows relatively thin washer, and in the case, and the stress and strain of washer experience is significantly higher than O-ring experience Stress and strain, and therefore, the end of washer is pushed into O-ring, so as to cause the distortion at interface, and sealing element it Between leak a possibility that increase.

In short, in order to make sealing element work well, it should maintain the contact between washer and O-ring across operation temperature Pressure.Interface between washer and O-ring will be shaped according to the opposite compression on washer and O-ring.Pass through washer and O-ring On balance compression, the interface is substantially straight line (as is shown in fig. 4 a).Assuming that there is pressure enough on washer and O-ring Contracting, then here shown in will be without sealing problem under balance.

However, one will protrude into another if O-ring compression and gasket compression mismatch.For example, if pad Circle compression may be greater than O-ring compression because of its shape, then washer will protrude into O-ring, as shown in fig 4b.

Fig. 5 to Fig. 7 shows the specific example of transverse seals and annular seal and the vacuum pump component using it.This A little sealing elements benefit from the low wide high aspect ratio of the embodiment of the present invention.The sealing element has for keeping transverse seals placed in the middle With improvement and the interface of annular seal and the additional features of the axial elasticity for providing transverse seals.Some embodiments It further include for the inner surface biasing transverse seals closest to pumping chamber against groove to inhibit fluid along groove Leakage feature.

Fig. 5 schematically show tool there are two stator half-shell and end pieces multi-chamber rotatory vacuum pump assembly, described group Sealing element according to the embodiment can be advantageously used to seal in part.The pump assembly is by two shapes of stator half-shell 104 and 102 At rotor (not shown) is mounted between two stator half-shells 104 and 102.The two shells are fixed together to form pump chamber Room.Each of chamber 106,108,110,112,114 and 116 is separated by pump chamber locular wall 134.End pieces 122 and 124 are installed To complete pump assembly in stator half-shell.

Fig. 6 shows the isometric view for being arranged in the sealing element between stator half-shell between end face.In this embodiment, There are transverse seals 20 and 22 on the either side of pumping chamber 30.There is also O-rings between end pieces and stator half-shell Sealing element 40 and 42.

In this embodiment, annular seal 40,42 is standard O-ring and is mounted on the rectangle with constant cross-section In groove, the machining of plain cylindrical form tool is can be used in the groove.It is likely difficult to maintain 20,22 and O of transverse seals shape Effective sealing between ring 40,42.Particularly, transverse seals 20,22 be mounted in groove more broader than the sealing element with Some lateral movement freedom degrees and the ability that expands under compression and at elevated temperatures of washer are provided.However, this is The end surface of transverse seals provides freedom degree, it means that its position is not exactly determined and it may not be with O shape Annular seal accurate fit.

Fig. 7, which is shown, provides the feature placed in the middle to solve problem above of transverse seals in the trench.Particularly, washer 20 Including end ring 25, end ring 25 is in groove 50 and has the bending vertical arms for forming bowed shape.Due to The symmetric property of the ring, the bowed shape acts on the either side of ring against the outer surface of groove, each Side, which generates, has roughly the same magnitude but power in opposite direction, to keep sealing element placed in the middle and especially make from described The end sections 29 for the sealing element that ring extends and cooperates with O-ring are placed in the middle.

The bowed shape of ring keeps axial rigidity, but allows lateral flexibility to ensure that interference engagement is possible. Section/width of washer maintains in bowed shape feature placed in the middle to avoid the excessive expansion under high temperature.In arch lateral and pen Straight component inside provides space to provide stretching, extension freedom degree during compression and expansion at relatively high temperatures.

In addition to providing this feature placed in the middle, ring also provides some axial stabilities and axial elasticity.Axial stability It is provided by the axially aligned face 52 of groove, axially aligned face 52 forms the appearance of the arm extended in either direction from longitudinal groove Face.The ring part of sealing element contacts the axially aligned face, and this is axially held in place transverse seals. The length of groove between the axially aligned face of every an end portion of stator is constructed such that transverse seals are pacified with light tension It fills and is therefore more securely held in groove.Axial elasticity is provided by the flexure of lateral arms, the lateral arms allow close Some axial movements of sealing, so that it be inhibited to become over tensioning, the correspondence that over-tension may trigger in sealing element is thinning.

In the example of figure 7, ring 25 has tip (pip) 23 on the outer surface, abuts the axis of stator half-shell To alignment surface 52.These tips 23 provide the known contact position with axially aligned face 52, axially aligned face 52 for ring Space washer is tensioned for axial.Its towards ring outer side positioning, thus the portion because of ring between tip 23 of permission Point bending and increased axial deflection occurs.In this embodiment, by longitudinally deviation portion or lug boss (bump) 27 provide into The axial deflection of one step, longitudinal deviation portion or lug boss 27 also provide the biasing of inner surface of the washer against groove.This lug boss It can shrink and expand to allow axial deflection.

Every one end of washer includes the end sections 29 extended from ring 25.This end sections 29 and stator half-shell End alignment simultaneously contacts O-ring.In this embodiment, placed in the middle by the bowed shape of ring.

When assembling pump assembly, for lower part stator tool there are two washer, the two washers are mounted on appointing for pump in groove 50 On side.It is installed at the either end of stator against axially aligned face 52 under tension.Then pass through the work of flat end Nose portion 29 is kept into against the end of stator half-shell by tool, and upper stator half-shell is reduced in the stator half-shell of lower part And be secured together, so that washer is held in place under compression.It then can be against stator end face installation kit End pieces 122,124 containing O-ring packing 40,42.

As can be seen, groove 50 has constant width, and therefore can once added by middle machine by a tool Work.This, which is provided, is better than including the advantages of tip is to maintain groove in place for sealing element.Subtract in addition, lacking these tips Lack there are the chance of washer clamping point, because washer is being compressed and expanded under temperature change.

During assembly, protruding portion 29 is pushed back into flushes with the end face of stator.This because ring 25 flexibility and Especially because that can bend back and forth and provide the lateral arms of the ring of this axial elasticity but possible.When groove 50 is by paraxial When to aligning surface 52, groove 50 deviates towards pumping chamber.There is provided this deviate so that washer towards pumping chamber biasing not Bias washer close to its end against the inside of groove.The permission washer placed in the middle 20 of washer in the trench is in response to lateral force It is displaced sideways towards ring 25.When applying opposite lateral force from either side, this facilitates the placed in the middle of end protruding portion 29.

In short, the above gasket design uses simplified geometry.End regions, which have, provides " the one of required function Box " form.According to the present invention, the washer of flat end is formed with the wide Gao Zong illustrated above for the interface to end seal Horizontal ratio is in the case standard circular section O-ring according to the present invention.

The axially aligned sealing for high quality is critically important with O-ring groove for washer.By ensuring to be placed on when washer It protrudes past O-ring groove and then by the way that washer is back into O-ring groove come real by Customization Tool when in shell Now this is placed in the middle.

Axial elasticity is needed in the end of washer to provide the nose portion that can be pushed back.This flexibility is by supporting base end portion The transverse direction or lateral elements of sealing surfaces provide, referring to Fig. 7.

Axial elasticity in the center of washer helps to ensure that it is in tensioning state and not bent.Washer stretches simultaneously It positions against aligning surface 52, in some embodiments, is located on alignment tip 23.Flexibility is soft by the transverse direction of support alignment tip Property component provide.Lug boss 27 in the central area of washer provides additional axial elasticity.

Although illustrative embodiments of the invention is disclosed in detail by reference to attached drawing herein, however, it is understood that this hair It is bright to be not limited to the exact embodiment, and those skilled in the art can be without departing substantially from such as by appended claims and its waiting Various changes and modifications are realized wherein in the case where the scope of the present invention that effect content limits.

Appended drawing reference

20,22 transverse seals

23 tips

25 rings

27 deviation portions

29 end protruding portions

30,106,108,110,112,114 and 116 pump chambers

40,42 O-ring packing

50 grooves

52 axially aligned faces

102,104 stator half-shell

Contact surface between 120 stator half-shells

124, the cooperative end part surface of 126 stator half-shells

130, the matching surface of 132 end pieces

134 pump chamber locular walls

Claims (11)

1. a kind of vacuum pump component, comprising:

Two half-shell stators limit one or more vacuum pumping chambers；

End pieces are mounted at the either end of described two half-shell stators；

Transverse seals are used for the longitudinal direction contact on the either side of the vacuum pumping chamber in described two half-shell stators It is sealed between face；And

At least one other sealing element is used to carry out between one of described end pieces and the stator half-shell close Envelope；Wherein

The transverse seals have the end sections adjacent against at least one described annular seal；And

The wide high aspect ratio of the transverse seals and the other sealing element is between 1:1 and 2:1.

2. vacuum pump component according to claim 1, wherein the other sealing element be annular seal and including The O-ring of aspect ratio with 1:1, and the transverse seals have rectangular cross section.

3. vacuum pump component according to claim 1, wherein the other sealing element includes cyclic annular rectangular seal, And the transverse seals and the annular seal respectively have between 1:1 and 2:1, preferably each leisure 1.1:1 and Wide high aspect ratio between 1.3:1.

4. vacuum pump component according to any one of the preceding claims, wherein the transverse seals have Wide high aspect ratio between 1.1:1 and 1.3:1.

5. vacuum pump component according to any one of the preceding claims, wherein the other sealing element and described Transverse seals are with the cross-sectional area with the similar order of magnitude differed each other less than 50%.

6. vacuum pump component according to claim 5, wherein the other sealing element and the transverse seals have The cross-sectional area less than 30% is differed each other.

7. vacuum pump component according to any one of the preceding claims, wherein the transverse seals are not pressed It include flat end surface when contracting, so as to adjacent with the other sealing element.

8. vacuum pump component according to any one of the preceding claims, wherein the transverse seals are manufactured into With greater than the height of 2mm, tolerance 0.07mm, and the groove be manufactured with it is smaller than the height of the washer 20% depth, tolerance 0.05mm, because of the tolerance caused by the compression variation be lower than 7%.

9. vacuum pump component according to any one of the preceding claims, wherein the transverse seals are manufactured into With the height greater than 2.5mm, tolerance 0.07mm, and the groove is manufactured with the height than the washer Small 20% depth, tolerance 0.05mm, because of the tolerance caused by the compression variation be lower than 5.5%.

10. vacuum pump component according to any one of the preceding claims, wherein the transverse seals are manufactured into With greater than the height of 3mm, tolerance 0.07mm, and the groove be manufactured with it is smaller than the height of the washer 20% depth, tolerance 0.05mm, because of the tolerance caused by the compression variation be lower than 4.7%.

11. the vacuum pump component according to any one of claim 8 to 10, wherein the transverse seals are included in Between 2.5 and 3.5 mm, the preferably width of 3mm.