FR3124235B1 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
FR3124235B1
FR3124235B1 FR2107821A FR2107821A FR3124235B1 FR 3124235 B1 FR3124235 B1 FR 3124235B1 FR 2107821 A FR2107821 A FR 2107821A FR 2107821 A FR2107821 A FR 2107821A FR 3124235 B1 FR3124235 B1 FR 3124235B1
Authority
FR
France
Prior art keywords
vacuum pump
stator
elements
end support
pumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2107821A
Other languages
French (fr)
Other versions
FR3124235A1 (en
Inventor
François Houzé
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2107821A priority Critical patent/FR3124235B1/en
Priority to TW111126315A priority patent/TW202319646A/en
Priority to PCT/EP2022/069940 priority patent/WO2023001718A1/en
Publication of FR3124235A1 publication Critical patent/FR3124235A1/en
Application granted granted Critical
Publication of FR3124235B1 publication Critical patent/FR3124235B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/123—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially or approximately radially from the rotor body extending tooth-like elements, co-operating with recesses in the other rotor, e.g. one tooth
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/008—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids for other than working fluid, i.e. the sealing arrangements are not between working chambers of the machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/30—Casings or housings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)

Abstract

L’invention se rapporte à une pompe à vide (1) primaire sèche comportant un stator (11) formé d’au moins un support (12a, 12b) d’extrémité couplé axialement avec au moins deux éléments (13) de stator assemblés pour former au moins un étage (8a, 8b, 8c, 8d) de pompage et deux arbres (9) munis de rotors (10a, 10b, 10c, 10d) configurés pour tourner de façon synchronisée en sens inverse dans chaque étage (8a, 8b, 8c, 8d) de pompage. Selon l'invention, la pompe à vide (1) comporte en outre un dispositif (17) de sûreté monté de manière étanche sur le support (12a, 12b) d’extrémité et qui enveloppe au moins les éléments (13) de stator afin de former un volume (21) de confinement du gaz à pomper entre les éléments (13) de stator et le dispositif (17) de sûreté. Figure pour l’abrégé : figure 2The invention relates to a dry primary vacuum pump (1) comprising a stator (11) formed of at least one end support (12a, 12b) coupled axially with at least two stator elements (13) assembled to forming at least one pumping stage (8a, 8b, 8c, 8d) and two shafts (9) fitted with rotors (10a, 10b, 10c, 10d) configured to rotate synchronously in opposite directions in each stage (8a, 8b , 8c, 8d) pumping. According to the invention, the vacuum pump (1) further comprises a safety device (17) mounted in leaktight manner on the end support (12a, 12b) and which surrounds at least the stator elements (13) in order to to form a volume (21) of confinement of the gas to be pumped between the elements (13) of the stator and the device (17) of safety. Figure for abstract: Figure 2

FR2107821A 2021-07-20 2021-07-20 Vacuum pump Active FR3124235B1 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR2107821A FR3124235B1 (en) 2021-07-20 2021-07-20 Vacuum pump
TW111126315A TW202319646A (en) 2021-07-20 2022-07-13 Vacuum pump
PCT/EP2022/069940 WO2023001718A1 (en) 2021-07-20 2022-07-15 Vacuum pump

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2107821A FR3124235B1 (en) 2021-07-20 2021-07-20 Vacuum pump
FR2107821 2021-07-20

Publications (2)

Publication Number Publication Date
FR3124235A1 FR3124235A1 (en) 2022-12-23
FR3124235B1 true FR3124235B1 (en) 2023-06-09

Family

ID=77317165

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2107821A Active FR3124235B1 (en) 2021-07-20 2021-07-20 Vacuum pump

Country Status (3)

Country Link
FR (1) FR3124235B1 (en)
TW (1) TW202319646A (en)
WO (1) WO2023001718A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116006464B (en) * 2023-02-03 2024-02-23 安徽应流机电股份有限公司 Special air-cooled Roots vacuum pump

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2785361B1 (en) * 1998-11-02 2000-12-01 Cit Alcatel TRANSPORT OF GAS PUMPS IN A VACUUM PUMP OR PIPES
DE202010017258U1 (en) * 2010-10-08 2011-05-19 Gebr. Becker GmbH, 42279 Surrounding device and incorporated in a Umfassungsseinrichtung flow aggregate
GB201613794D0 (en) * 2016-08-11 2016-09-28 Edwards Ltd Enclosure system including wire mesh and thin non-porous membrane panels
GB2559134B (en) * 2017-01-25 2020-07-29 Edwards Ltd Pump assemblies with stator joint seals

Also Published As

Publication number Publication date
WO2023001718A1 (en) 2023-01-26
TW202319646A (en) 2023-05-16
FR3124235A1 (en) 2022-12-23

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Effective date: 20221223

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