CN110187726B - Temperature control algorithm for semiconductor temperature control device - Google Patents
Temperature control algorithm for semiconductor temperature control device Download PDFInfo
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- CN110187726B CN110187726B CN201910413250.0A CN201910413250A CN110187726B CN 110187726 B CN110187726 B CN 110187726B CN 201910413250 A CN201910413250 A CN 201910413250A CN 110187726 B CN110187726 B CN 110187726B
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- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/30—Automatic controllers with an auxiliary heating device affecting the sensing element, e.g. for anticipating change of temperature
Abstract
The invention discloses a temperature control algorithm for a semiconductor temperature control device, which relates to the field of temperature control and comprises a refrigeration system and a circulating system, wherein the refrigeration system is used for controlling temperature, the circulating system is used for liquid circulation, so that the temperature control precision of equipment is greatly improved, the temperature control algorithm meets the requirements that the temperature is within +/-0.1 ℃ in an idle state and within +/-1 ℃ in a loading state, the energy consumption of the equipment is also obviously reduced, the heating output is ensured to be in a lower range in both idle and loading, the energy consumption in the equipment is less, the energy consumption is reduced, different flow rates are compatible, the program structure is simpler, the temperature control algorithm is compatible with different flow rates, the energy consumption of the equipment is reduced, and the temperature control precision is.
Description
Technical Field
The invention relates to the field of temperature control, in particular to a temperature control algorithm for a semiconductor temperature control device.
Background
The semiconductor temperature control device is used as auxiliary equipment for producing semiconductors, and is required to keep constant temperature output in the process of manufacturing wafers, and meanwhile, the precision requirement is high.
The equipment is mainly used for refrigeration in the actual process, so that the temperature control precision of a refrigeration system in the equipment is very important.
The temperature control of the existing system is realized by controlling the target temperature to be consistent with the given temperature through a PID algorithm, the temperature control precision cannot be guaranteed when the load fluctuates, and energy consumption during no-load and loading cannot be considered simultaneously, so that the internal energy loss of equipment is large, and different flow conditions are difficult to be compatible.
Disclosure of Invention
The invention aims to provide a temperature control algorithm for a semiconductor temperature control device, which greatly improves the temperature control precision of equipment, meets the requirements that the temperature is within +/-0.1 ℃ in an idle state and within +/-1 ℃ in a loading state, obviously reduces the energy consumption of the equipment, ensures that the heating output is in a lower range in the idle state and the loading state, has less energy loss in the equipment, reduces the energy consumption, is compatible with different flows, has a simpler program structure, is compatible with different flows, reduces the energy consumption of the equipment and also improves the temperature control precision.
A temperature control algorithm for a semiconductor temperature control device comprises a refrigeration system and a circulating system, wherein the refrigeration system is used for controlling temperature, and the circulating system is used for circulating liquid; wherein circulation system external connection load can cause the return opening temperature to rise, and refrigerating system control water tank entry temperature is undulant at certain temperature, and heater control outlet temperature is stabilized at given target temperature, guarantees outlet temperature's accuse temperature precision, and the compressor is digital scroll compressor among this device refrigerating system, and the controlled object is YV11 discharge valve, and the object is controlled to the corresponding inverter compressor then for the converter.
The refrigeration system comprises a compressor, an unloading valve, a condenser, an electronic expansion valve and an evaporator, wherein the compressor is connected with the unloading valve, and the condenser is connected with the evaporator EVA1 through the unloading valve and the electronic expansion valve respectively;
the circulating system comprises a heater, a water tank, a water pump, an inlet temperature sensor, an outlet temperature sensor and a return temperature sensor, wherein the heater is positioned in the water tank, the water pump and the evaporator are sequentially connected to form a loop, the inlet temperature sensor is positioned at the inlet of the water tank, the outlet temperature sensor is positioned at the outlet of the water tank, and the return temperature sensor is positioned at the inlet of the evaporator; the refrigerating capacity is obtained by PID plus a feedforward temperature control algorithm, the unloading valve and the electronic expansion valve are controlled to ensure that the inlet temperature of the water tank fluctuates in a certain range, and the heating capacity is obtained by the PID algorithm to control the heater to ensure the stability of the outlet temperature.
The temperature control algorithm is as follows:
step one, judging the state of a temperature control device according to the collected and set target temperature;
the method is specifically divided into 3 states, namely no-load, loading and unloading;
firstly, setting the temperature collected by an outlet temperature sensor as T1, the temperature collected by a return temperature sensor as T2, the temperature collected by an inlet temperature sensor as T3, simultaneously setting the target temperature of an outlet as SV and the target temperature of a refrigerating system as SV1,
if T2 before T2-30s is 0.5 ℃, the T2 change rate is 0.1 ℃/s, the duration is 7s, -0.5 ℃ SV-T1 is 0.5 ℃ duration is 10s, and T2-T1 is 0.5 ℃, the state is judged to be in loading;
if in the state of loading, T2<0.5 ℃, T2 rate of change <0.1 ℃/s and duration > -7 s, -0.5 ℃ < -SV-T1 <0.5 ℃ duration > -10 s, T2-T1> -0.5 ℃ before T2-30s, the state is determined to be unloading;
if the T2-SV < ═ 0.8 ℃ is in the unloading state, the state is judged to be unloaded;
secondly, determining the refrigerating capacity;
in an idle state, (in the idle state, different fixed refrigeration amounts are given corresponding to different target temperatures, and the temperature requirement is met, for example, 40% of large refrigeration amount is needed at minus 20 ℃, 10% of minimum refrigeration amount is given at above 20 ℃, and the outlet is ensured to be stabilized within +/-0.1 ℃, so that the energy consumption of the whole temperature control device can be reduced through the output of low refrigeration amount), different fixed refrigeration amounts are given, namely, different idle refrigeration amounts COUT1 are given corresponding to different temperature points, and meanwhile, the minimum value in the first 20s of the temperature T3 collected by an inlet temperature sensor in the idle state is T4 and the maximum value T5; the 20S corresponds to the working period of the unloading valve of the digital scroll compressor, and the time can be reduced if the unloading valve is a variable frequency compressor;
when the loading state is identified, starting a refrigeration PID algorithm, wherein the target refrigeration temperature is SV1 ═ T4+ T5-T4X 1, X1 is a correction coefficient and ranges from 0 to 1, the corresponding SV1 ranges from T4 to T5, the refrigeration quantity COUT2 calculated by PID is obtained through the PID algorithm of a PLC, the output refrigeration quantity COUT3 ═ COUT1+ COUT2 × 2, X2 is the correction coefficient and ranges from 0 to 1, and the final corrected output refrigeration quantity COUT3 ranges from 10% to 100%;
when the unloaded state is identified, the refrigeration target SV1 is corrected to T4+ T5-T4 × 1+ X3, where X3 is 1;
when the no-load state is identified, the refrigerating capacity is given as a fixed value again, and the PID algorithm of the PLC is closed.
Preferably, the circulation system is externally connected with a load, the refrigeration system controls the inlet temperature of the water tank to fluctuate at a certain temperature, and the heater controls the outlet temperature to stabilize at a given target temperature.
Preferably, the compressor in the refrigeration system is a digital scroll compressor.
Preferably, in the loaded state, the target cooling temperature and the cooling output can be corrected in advance by the change in the return temperature. By identifying the state of the load, the target temperature of refrigeration is changed and the output of the refrigerating capacity is corrected, so that the temperature control precision of the equipment is improved. Meanwhile, the fixed refrigerating capacity is adopted in no-load, the minimum requirement of temperature is met, the temperature control precision is improved, the output of heating quantity is reduced, and the energy consumption of the whole equipment is reduced.
The invention has the advantages that: the temperature control precision of the equipment is greatly improved, the temperature control precision is within +/-0.1 ℃ in an idle state, the temperature control precision is within +/-1 ℃ in a loading state, the energy consumption of the equipment is obviously reduced, the heating output is ensured to be in a lower range in the idle state and the loading state, the energy consumption in the equipment is less, the energy consumption is reduced, different flows are compatible, the program structure is simpler, the temperature control method is compatible with different flows, the energy consumption of the equipment is reduced, and the temperature control precision is also improved.
Drawings
FIG. 1 is a schematic diagram of a refrigeration system and cycle system of the present invention;
FIG. 2 is a diagram of the present invention for a state determination during loading;
FIG. 3 is a schematic diagram of an off-load condition determination of the present invention;
FIG. 4 is a schematic diagram of the no load condition determination of the present invention;
FIG. 5 is a reset state decision schematic of the present invention;
FIG. 6 is a graph showing different flow test data at 20 ℃ in accordance with the present invention;
the system comprises a compressor 1, a compressor 2, an unloading valve 3, a condenser 4, an electronic expansion valve 5 and an evaporator 6, a heater 7, a water tank 8, a water pump 9, an inlet temperature sensor 10, an outlet temperature sensor 11 and a return temperature sensor.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
As shown in fig. 1 to 6, a temperature control algorithm for a semiconductor temperature control device is characterized by comprising a refrigeration system and a circulating system, wherein the refrigeration system is used for controlling temperature, and the circulating system is used for circulating liquid;
the refrigeration system comprises a compressor 1, an unloading valve 2, a condenser 3, an electronic expansion valve 4 and an evaporator 5, wherein the compressor 1 is connected with the unloading valve 2, and the condenser 3 is connected with the evaporator 5 through the unloading valve 2 and the electronic expansion valve 4 respectively;
the circulating system comprises a heater 6, a water tank 7, a water pump 8, an inlet temperature sensor 9, an outlet temperature sensor 10 and a return temperature sensor 11, wherein the heater 6 is positioned in the water tank 7, the water pump 8 and the evaporator 5 are sequentially connected to form a loop, the inlet temperature sensor 9 is positioned at the inlet of the water tank 7, the outlet temperature sensor 10 is positioned at the outlet of the water tank 7, and the return temperature sensor 11 is positioned at the inlet of the evaporator 5; compatible with different flow rates and simple program structure.
The temperature control algorithm is as follows:
step one, judging the state of a temperature control device according to the collected and set target temperature;
the method is specifically divided into 3 states, namely no-load, loading and unloading;
firstly, setting the temperature collected by an outlet temperature sensor 10 as T1, the temperature collected by a return temperature sensor 11 as T2, the temperature collected by an inlet temperature sensor 9 as T3, setting the target temperature of an outlet as SV and the target temperature of a refrigerating system as SV1,
if T2 before T2-30s is 0.5 ℃, the T2 change rate is 0.1 ℃/s, the duration is 7s, -0.5 ℃ SV-T1 is 0.5 ℃ duration is 10s, and T2-T1 is 0.5 ℃, the state is judged to be in loading;
if in the state of loading, T2<0.5 ℃, T2 rate of change <0.1 ℃/s and duration > -7 s, -0.5 ℃ < -SV-T1 <0.5 ℃ duration > -10 s, T2-T1> -0.5 ℃ before T2-30s, the state is determined to be unloading;
if the T2-SV < ═ 0.8 ℃ is in the unloading state, the state is judged to be unloaded;
secondly, determining the refrigerating capacity;
in the no-load state, different fixed refrigerating capacities are given corresponding to different target temperatures, namely different no-load refrigerating capacities COUT1 are given corresponding to different temperature points, and meanwhile, the minimum value in the first 20s of the temperature T3 collected by the inlet temperature sensor TS106 in the no-load state is T4 and the maximum value is T5; the 20S corresponds to the working period of the unloading valve of the digital scroll compressor, and the time can be reduced if the unloading valve is a variable frequency compressor;
when the loading state is identified, starting a refrigeration PID algorithm, wherein the target refrigeration temperature is SV1 ═ T4+ T5-T4X 1, X1 is a correction coefficient and ranges from 0 to 1, the corresponding SV1 ranges from T4 to T5, the refrigeration quantity COUT2 calculated by PID is obtained through the PID algorithm of a PLC, the output refrigeration quantity COUT3 ═ COUT1+ COUT2 × 2, X2 is the correction coefficient and ranges from 0 to 1, and the final corrected output refrigeration quantity COUT3 ranges from 10% to 100%;
when the unloaded state is identified, the refrigeration target SV1 is corrected to T4+ T5-T4 × 1+ X3, where X3 is 1;
when the no-load state is identified, the refrigerating capacity is given as a fixed value again, and the PID algorithm of the PLC is closed. By identifying the state of the load, the target temperature of refrigeration is changed and the output of the refrigerating capacity is corrected, so that the temperature control precision of the equipment is improved. Meanwhile, the fixed refrigerating capacity is adopted in no-load, the minimum requirement of temperature is met, the temperature control precision is improved, the output of heating quantity is reduced, and the energy consumption of the whole equipment is reduced.
The external part of the circulating system is connected with a load, the refrigerating system controls the inlet temperature of the water tank 7 to fluctuate at a certain temperature, and the heater 6 controls the outlet temperature to be stabilized at a given target temperature. The temperature control precision is improved.
The compressor 1 in the refrigeration system is a digital scroll compressor. Has high energy efficiency ratio.
In the loaded state, the target cooling temperature and the cooling output can be corrected in advance through the change of the return temperature. Is an alternative, providing more options.
The specific implementation mode and principle are as follows:
taking a single temperature point of 20 ℃ as an example, the temperature control device is judged to be in 3 states according to the acquired and set target temperature, namely no-load, loading and unloading. Here, the temperature of the outlet temperature sensor 10 is collected to be T1, the temperature of the return temperature sensor 11 is collected to be T2, the temperature of the inlet temperature sensor 9 is collected to be T3, the outlet target temperature corresponds to the outlet temperature sensor 10 to be SV, the target temperature of the refrigeration system corresponds to the inlet temperature sensor 9 to be SV1, and the flow of state judgment is shown in fig. 2 to fig. 5;
in the no-load state, different fixed refrigerating capacities are given corresponding to different target temperatures, the temperature requirement is met, for example, 40% of large refrigerating capacity is needed at minus 20 ℃, 10% of minimum refrigerating capacity is given at the temperature above 20 ℃, the outlet is guaranteed to be stabilized within +/-0.1 ℃, therefore, the energy consumption of the whole temperature control device can be reduced through lower refrigerating capacity output, different no-load refrigerating capacities COUT1 are given corresponding to different temperature points, meanwhile, the minimum value T4 and the maximum value T5 of the temperature T3 of an inlet temperature sensor 9 at the inlet of a water tank 7 are collected in the no-load state, 20S corresponds to the working period of an unloading valve of a digital scroll compressor, and the time can be reduced if the unloading valve is a variable-frequency compressor;
when the loading state is identified, a refrigeration PID algorithm is started, the refrigeration target temperature is SV1 ═ T4+ (T5-T4) × X1, wherein X1 is a correction coefficient and ranges from 0 to 1, the corresponding SV1 ranges from T4 to T5, and the refrigeration amount COUT2 calculated by PID is obtained through the PID algorithm of the PLC;
for the output refrigerating capacity COUT3 ═ COUT1+ COUT2 × X2, wherein X2 is a correction coefficient, the range is 0-1, and the final correction output refrigerating capacity COUT3 range is 10% -100%;
when the unloading state is identified, the refrigeration target SV1 is corrected to T4+ (T5-T4) × 1+ X3, where X3 is 1, which corresponds to increasing the refrigeration target temperature by 1 ℃, decreasing the output of COUT2, and correspondingly decreasing COUT 3;
when the no-load state is identified, the refrigerating capacity is given as a fixed value again, and the PID algorithm of the PLC is closed;
correspondingly taking 20 ℃ as an example, the no-load refrigerating capacity COUT1 is 10%, the correspondingly collected T4 is 14 ℃, T5 is 16 ℃, X1 is 1, X2 is 90%, the refrigerating target temperature SV1 is T4+ (T5-T4) X1 is 16 ℃ and the refrigerating capacity COUT3 is COUT1+ COUT 2X 2 is 10% + (0-100%) + 90%; the final output refrigerating capacity is corrected according to the return temperature, and the control range is 10-100%; the return temperature T2 was varied from 20 ℃ to 38 ℃ and the outlet temperature T1 was controlled between 19 ℃ and 21 ℃ as shown in FIG. 6.
Correspondingly, taking-20 ℃ as an example, the unloaded refrigerating capacity COUT1 is 40%, the correspondingly collected T4 is-23 ℃, T5 is-21 ℃, X1 is 0.5, X2 is 85%, the target refrigerating temperature SV1 is T4+ (T5-T4) X1 is-22 ℃ and the refrigerating capacity COUT3 is COUT1+ COUT2 is X2 is 40% + (0-100%) 85%.
By identifying the state of the load, the target temperature of refrigeration is changed and the output of the refrigerating capacity is corrected, so that the temperature control precision of the equipment is improved. Meanwhile, the fixed refrigerating capacity is adopted in no-load, the minimum requirement of temperature is met, the temperature control precision is improved, the output of heating quantity is reduced, and the energy consumption of the whole equipment is reduced.
Based on the above, the invention greatly improves the temperature control precision of the equipment, meets the requirements that the temperature is within +/-0.1 ℃ in an idle state and within +/-1 ℃ in a loading state, obviously reduces the energy consumption of the equipment, ensures that the heating output is in a lower range in both idle and loading, has less energy loss in the equipment, reduces the energy consumption, is compatible with different flows, has a simpler program structure, is compatible with different flows, reduces the energy consumption of the equipment and also improves the temperature control precision.
It will be appreciated by those skilled in the art that the invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The embodiments disclosed above are therefore to be considered in all respects as illustrative and not restrictive. All changes which come within the scope of or equivalence to the invention are intended to be embraced therein.
Claims (4)
1. The temperature control algorithm for the semiconductor temperature control device is characterized by comprising a refrigeration system and a circulating system, wherein the refrigeration system is used for controlling temperature, and the circulating system is used for circulating liquid;
the refrigeration system comprises a compressor (1), an unloading valve (2), a condenser (3), an electronic expansion valve (4) and an evaporator (5), wherein the compressor (1) is connected with the unloading valve (2), and the condenser (3) is connected with the evaporator (5) through the unloading valve (2) and the electronic expansion valve (4) respectively;
the circulating system comprises a heater (6), a water tank (7), a water pump (8), an inlet temperature sensor (9), an outlet temperature sensor (10) and a return temperature sensor (11), the heater (6) is positioned in the water tank (7), the water pump (8) and the evaporator (5) are sequentially connected to form a loop, the inlet temperature sensor (9) is positioned at the inlet of the water tank (7), the outlet temperature sensor (10) is positioned at the outlet of the water tank (7), and the return temperature sensor (11) is positioned at the inlet of the evaporator (5);
the temperature control algorithm is as follows:
step one, judging the state of a temperature control device according to the collected and set target temperature;
the method is specifically divided into 3 states, namely no-load, loading and unloading;
firstly, setting the temperature collected by an outlet temperature sensor (10) as T1, the temperature collected by a return temperature sensor (11) as T2, the temperature collected by an inlet temperature sensor (9) as T3, simultaneously setting an outlet target temperature as SV and a refrigerating system target temperature as SV1,
if T2 before T2-30s is 0.5 ℃, the T2 change rate is 0.1 ℃/s, the duration is 7s, -0.5 ℃ SV-T1 is 0.5 ℃ duration is 10s, and T2-T1 is 0.5 ℃, the state is judged to be in loading;
if in the state of loading, T2<0.5 ℃, T2 rate of change <0.1 ℃/s and duration > -7 s, -0.5 ℃ < -SV-T1 <0.5 ℃ duration > -10 s, T2-T1> -0.5 ℃ before T2-30s, the state is determined to be unloading;
if the T2-SV < ═ 0.8 ℃ is in the unloading state, the state is judged to be unloaded;
secondly, determining the refrigerating capacity;
in the no-load state, different fixed refrigerating capacities are given corresponding to different target temperatures, namely different no-load refrigerating capacities COUT1 are given corresponding to different temperature points, and meanwhile, the minimum value in the first 20s of the temperature T3 collected by the inlet temperature sensor (9) in the no-load state is T4 and the maximum value is T5;
when the loading state is identified, starting a refrigeration PID algorithm, wherein the target refrigeration temperature is SV1 ═ T4+ (T5-T4) × 1, wherein X1 is a correction coefficient and ranges from 0 to 1, the corresponding SV1 ranges from T4 to T5, the refrigeration quantity COUT2 calculated by PID is obtained through the PID algorithm of the PLC, and the output refrigeration quantity COUT3 ═ COUT1+ COUT2 × 2, wherein X2 is a correction coefficient and ranges from 0 to 1;
when the unloaded state is recognized, the refrigeration target SV1 ═ T4+ (T5-T4) × 1+ X3, where X3 ═ 1;
when the no-load state is identified, the refrigerating capacity is given as a fixed value again, and the PID algorithm of the PLC is closed.
2. The temperature control algorithm for a semiconductor temperature control device according to claim 1, wherein: the external part of the circulating system is connected with a load, the refrigerating system controls the inlet temperature of the water tank (7) to fluctuate at a certain temperature, and the heater (6) controls the outlet temperature to be stabilized at a given target temperature.
3. The temperature control algorithm for a semiconductor temperature control device according to claim 1, wherein: the compressor (1) in the refrigeration system is a digital scroll compressor.
4. The temperature control algorithm for a semiconductor temperature control device according to claim 1, wherein: in the loaded state, the target cooling temperature and the cooling output can be corrected in advance through the change of the return temperature.
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| CN111522324B (en) * | 2020-04-08 | 2021-06-22 | 北京京仪自动化装备技术股份有限公司 | Method and device for testing semiconductor temperature control device, electronic equipment and storage medium |
| CN112083742B (en) * | 2020-08-31 | 2021-10-26 | 北京京仪自动化装备技术股份有限公司 | Temperature control device, integrated circuit manufacturing equipment and method |
| CN114585869B (en) * | 2020-09-16 | 2023-11-14 | 伸和控制工业股份有限公司 | Temperature control system and control method thereof |
| CN112346493B (en) * | 2020-10-29 | 2021-11-09 | 北京京仪自动化装备技术有限公司 | Temperature control equipment and method |
| CN112596557B (en) * | 2020-12-18 | 2022-05-24 | 北京京仪自动化装备技术股份有限公司 | Method and device for controlling output quantity of semiconductor temperature control device |
| CN112594980A (en) * | 2020-12-18 | 2021-04-02 | 北京京仪自动化装备技术有限公司 | Refrigerating system and temperature control system |
| CN112414001B (en) * | 2021-01-25 | 2021-06-22 | 北京京仪自动化装备技术股份有限公司 | Temperature control system for semiconductor and control method thereof |
| CN112416029B (en) * | 2021-01-25 | 2021-07-20 | 北京京仪自动化装备技术股份有限公司 | Temperature control system and temperature control method for semiconductor production |
| CN112902484B (en) * | 2021-02-09 | 2022-09-16 | 北京京仪自动化装备技术股份有限公司 | Temperature regulation and control system and temperature regulation and control method |
| CN112965546B (en) * | 2021-02-09 | 2022-05-24 | 北京京仪自动化装备技术股份有限公司 | Temperature control system and temperature control method for semiconductor temperature control |
| CN113625799B (en) * | 2021-08-02 | 2023-02-17 | 北京京仪自动化装备技术股份有限公司 | Temperature control method and temperature control system for heat exchanger for semiconductor production |
| CN113741583B (en) * | 2021-09-07 | 2022-10-21 | 北京京仪自动化装备技术股份有限公司 | Fault early warning method and device for semiconductor temperature control equipment and electronic equipment |
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