CN101587355A - Temperature control equipment and temperature control method thereof - Google Patents
Temperature control equipment and temperature control method thereof Download PDFInfo
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- CN101587355A CN101587355A CNA2009100542235A CN200910054223A CN101587355A CN 101587355 A CN101587355 A CN 101587355A CN A2009100542235 A CNA2009100542235 A CN A2009100542235A CN 200910054223 A CN200910054223 A CN 200910054223A CN 101587355 A CN101587355 A CN 101587355A
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Abstract
The invention provides a piece of temperature control equipment and a temperature control method thereof. The equipment comprises a water pump, a heat exchanger, a triple valve, a circulation cooling liquid slot, a compressor and an electronic expansion valve. The circulation cooling liquid consists of an electric heater. The triple valve consists of a first input end, a second input end and an output end. The heat exchanger consists of a first input end, a second input end, a first output end, and a second output end. The output end of the triple valve is connected with an input end of the circulation cooling liquid slot, the first input end is connected with an output end of the water pump, and the second input end is connected with the second input end of the heat exchanger. The first input end of the heat exchanger is connected with an output end of the electronic expansion valve, the first input end is connected with an input end of the compressor, and the second input end is connected with the output end of the water pump. The piece of temperature control equipment and a temperature control method provided by the invention has advantages of simple control, high precision and energy conservation.
Description
Technical field
The present invention relates to a kind of control device and control method thereof, specifically, relate to a kind of temperature control equipment and temperature-controlled process thereof.
Background technology
Temperature control is the basis of many high-tech technical equipments and product development, is widely used on the equipment of industries such as iron and steel, chemical industry, food, pharmacy and electronics.
In field of semiconductor devices, temperature control is widely used in the various semiconductor equipments especially, such as the etching machine, in order to guarantee etching precision, etching technics has proposed very high requirement to the environment temperature of etch chamber, and because the variation of etching technics, different etching technology requires to have nothing in common with each other to the height of environment temperature, so the temperature controlling range of the etch chamber temperature control equipment of etching machine requires than broad, this class is Temperature-controlled appliance on a large scale, and its response speed is a key parameter; Simultaneously, etching technics is very high again to the requirement of temperature control precision, and will improve response speed and control accuracy simultaneously for a Temperature-controlled appliance, is difficult to obtain equilibrium.
The patent No. a kind of wide warm area liquid cooling temperature control equipment and temperature control method of quick response that be 6862405 U.S. Patent Publication.Its temperature controlling range reaches-10 ℃～110 ℃, and temperature control precision is ± 5 ℃.The temperature control method of this temperature control equipment is: by cooling system (CHILLER SYSTEM) cooling medium (COOLANT) temperature is reduced to below the set temperature value earlier, in heat exchanger (HEAT EXCHANGER) inside coolant temperature is risen to design temperature then.Wherein heat exchanger inside comprises that adds a hot water storgae (LIQUIDHEAT SINK), adds hot water storgae inside and well heater is housed cooling medium is heated.This temperature control system temperature controlling range is wide, and response speed is fast.But this system adopts identical control method in whole temperature controlling range, and the control characteristic of not considering cooling medium causes temperature control precision not high with variation of temperature; On the other hand, the volume that adds hot water storgae is too small, make that heated coolant volume is very little, though can make the intensification response speed like this accelerates, but can reduce temperature control precision, and well heater in adding hot water storgae to cooling medium heating, can cause coolant temperature inhomogeneous, can reduce temperature control precision equally.
Summary of the invention
The invention provides a kind of temperature control equipment and temperature-controlled process thereof, with the temperature control precision that improves wide warm area and shorten response time in the temperature controlled processes.
In order to realize the object of the invention, the invention provides a kind of temperature control equipment, comprise water pump, heat exchanger, T-valve, circulating cooling liquid groove, compressor, electric expansion valve, described circulating cooling liquid groove contains an electric heater, described T-valve contains first and second input end and an output terminal, described heat exchanger contains first and second input end and first and second output terminal respectively
The output terminal of described T-valve is connected with the input end of described circulating cooling liquid groove, and first input end is connected with the output terminal of water pump, and second input end is connected with second output terminal of described heat exchanger;
The first input end of described heat exchanger is connected with the output terminal of electric expansion valve, and first output terminal is connected with the input end of compressor, and second input end is connected with the output terminal of water pump;
The present invention also provides a kind of temperature-controlled process, carry out by a temperature control equipment, this temperature control equipment comprises water pump, heat exchanger, T-valve, circulating cooling liquid groove, compressor, electric expansion valve, described circulating cooling liquid groove contains an electric heater, and the step of described temperature-controlled process comprises:
Set the preset temperature value of the circulating cooling liquid of this temperature control equipment outlet;
Read the current temperature value of the circulating cooling liquid of this temperature control equipment outlet;
According to the deviation between current temperature value and the preset temperature value, regulate T-valve, compressor and electric heater, the variation of Control Circulation coolant temperature:
If current temperature value is lower than preset temperature value, electric heater capacity is outputed to maximal value, the dutycycle and the T-valve aperture of compressor horsepower output are all closed minimum value;
If current temperature value is higher than preset temperature value, the output duty cycle of compressor is reached maximum, the power output of electric heater is closed minimum value, kept the aperture of T-valve constant.
Further, T-valve, compressor and electric heater all adopt microcontroller to control respectively.
Further, described microcontroller is reference with the outlet preset temperature value, all forms the relation of tabling look-up between the preset temperature value with exporting in the aperture of circulating cooling liquid groove temperature in, electric expansion valve and the air entry temperature value of compressor.
Further, described temperature-controlled process is taked the mode that temperature classification control combines with segmentation control.
Further, described temperature controlling range is between-20 to 80 degrees centigrade.
Further, be divided into some temperature sections in described temperature controlling range, the control of each temperature section is divided into quick response phase and precision control stage.
Further, all be divided into a temperature section with 5 degrees centigrade in maximum temperature and minimum temperature two ends, other temperature then are divided into a temperature section with 10 degrees centigrade.
Further, each temperature section adopts different pid parameters to control.
Compare with existing temperature control equipment and temperature-controlled process thereof, temperature control equipment provided by the invention and temperature-controlled process thereof guarantee temperature controlled quick response and high precision simultaneously by temperature controlled processes being divided into quick response phase and precision control stage.And the control structure that each is separate in logic, respectively each controlled module is controlled, between the controlled module setting value, set up the relation of tabling look-up simultaneously again, make The whole control system become a single-input single-output system.
Description of drawings
Fig. 1 is a temperature control equipment synoptic diagram in the embodiment of the invention;
Fig. 2 is the temperature Control Circulation logical diagram in the embodiment of the invention;
Fig. 3 is the temperature control flow figure of electric heater, T-valve and compressor in the embodiment of the invention.
Embodiment
For technical characterictic of the present invention is become apparent, below in conjunction with accompanying drawing and embodiment, the present invention will be further described.
See also Fig. 1, Fig. 1 is a temperature control equipment synoptic diagram in the embodiment of the invention, this device comprises: water pump 7, heat exchanger 5, T-valve 2, circulating cooling liquid groove 1, compressor 3, electric expansion valve 6, wherein, circulating cooling liquid groove 1 contains an electric heater, described T-valve 2 contains first, two input ends (20,21) and output terminal 22, described heat exchanger 5 contains first respectively, two input ends (50,51) and first, two output terminals (52,53), the output terminal 22 of described T-valve 2 is connected with the input end of described circulating cooling liquid groove, first input end 20 is connected with the output terminal of water pump 7, and second input end 21 is connected with second output terminal 53 of described heat exchanger 5; The first input end 50 of described heat exchanger 5 is connected with the output terminal of electric expansion valve 6, first output terminal 52 is connected with the input end of compressor 3, second input end 51 is connected with the output terminal of water pump 7, and second output terminal 53 is connected with second input end 21 of described T-valve 2; The output terminal of described compressor 3 is connected with the input end of electric expansion valve 6 by other accessories 4 of refrigeration system.
What the temperature control equipment in the embodiment of the invention was controlled is the temperature of temperature control equipment outlet circulating cooling liquid, i.e. the temperature (T1) of circulating cooling liquid groove 1 outlet.Because circulating cooling liquid rises through outer load (not indicating) back temperature, and is higher than the preset temperature value (Tset) of temperature control equipment, so whole temperature controlled processes is actually the process that a temperature reduces.
Because there is fluctuation in the outer load of temperature control equipment, in order to guarantee the precision of temperature control equipment outlet temperature (T1), the circulating cooling liquid temperature with circulating cooling liquid groove 1 inlet controls to class precision one time earlier.And the temperature of circulating cooling liquid groove 1 inlet circulating cooling liquid to be element by a noenergy output be that T-valve 2 carries out is directly actuated.The control of T-valve 2 is carried out negative feedback PID control by microcontroller (not indicating), feedback quantity is circulating cooling liquid groove 1 an inlet circulating cooling liquid temperature, guarantee the precision of circulating cooling liquid groove 1 inlet circulating cooling liquid temperature by the aperture (V) of control T-valve 2, when actual cycle cooling liquid bath 1 temperature in (T2) is higher than circulating cooling liquid groove 1 temperature in setting value (T2 '), microcontroller is regulated T-valve 2 first ports, 20 apertures (V) and is increased, circulating cooling liquid in the increase heat exchanger 5 and the heat between the cold-producing medium, when actual cycle cooling liquid bath 1 temperature in (T2) is lower than circulating cooling liquid groove 1 temperature in setting value (T2 '), microcontroller is regulated T-valve 2 first ports, 20 apertures (V) and is reduced, and reduces the heat between circulating cooling liquid and the cold-producing medium.
Because T-valve 2 is noenergy output, in order to reach the purpose of Control Circulation cooling liquid bath 1 inlet circulating cooling liquid temperature, 3 pairs of circulating cooling liquid groove 1 temperature ins of compressor (T2) play a part indirect control.What compressor 3 adopted also is to feed back by microcontroller (not indicating), directly feedback quantity is compressor 3 air entry temperature (T3), refrigerating capacity by control compressor 3 guarantees that compressor 3 air entry temperature (T3) are unlikely to too high, when compressor 3 actual air entry temperature (T3) are higher than compressor 3 air entry desired temperatures (T3 '), microcontroller is regulated compressor 3 power output duty cycles (C) and is increased, when actual compressor 3 air entry temperature (T3) were lower than compressor 3 air entry desired temperatures (T3 '), microcontroller was regulated compressor 3 power output duty cycles (C) and is reduced.Also there is a mutual regulatory function in these two microcontrollers except respectively T-valve 2 and compressor 3 being controlled between T-valve 2 and the compressor 3.
See also Fig. 2, Fig. 2 is the temperature Control Circulation logical diagram in the embodiment of the invention, wherein:
In temperature control equipment stable operation process, because the fluctuation of outer load, when circulating cooling liquid groove 1 inlet circulating cooling liquid temperature (T2) rises to above circulating cooling liquid groove 1 temperature in setting value (T2 '), the aperture (V) that microcontroller can be regulated T-valve 2 immediately increases, the circulating cooling liquid flow of the feasible heat exchanger 5 of flowing through increases, and improves the heat between heat exchanger 5 interior refrigerating mediums and the cold-producing medium; Heat between refrigerating medium and the cold-producing medium increases, can cause compressor 3 air entry temperature (T3) to rise to above compressor 3 air entry desired temperatures (T3 '), so microcontroller can be regulated compressor 3 immediately, increase refrigeration output duty cycle (C), make compressor 3 refrigerating capacitys increase; Increase along with compressor 3 refrigerating capacitys, the exchange capability of heat of heat exchanger 5 inner refrigerants strengthens, thereby cause circulating cooling liquid groove 1 temperature in (T2) to descend, when T2 drops to when being lower than circulating cooling liquid groove 1 temperature in setting value (T2 '), microcontroller can be regulated T-valve 2 immediately, reduce T-valve 2 first ports, 20 apertures (V), the circulating cooling liquid flow of the feasible heat exchanger 5 of flowing through reduces, and reduces the heat between refrigerating medium and the cold-producing medium; Heat between refrigerating medium and the cold-producing medium reduces, can cause compressor 3 air entry temperature (T3) to descend, when T3 drops to when being lower than compressor 3 air entry desired temperatures (T3 '), microcontroller can be regulated compressor 3 immediately, reduce refrigeration output duty cycle (C), make compressor 3 refrigerating capacitys reduce; Along with reducing of compressor 3 refrigerating capacitys, the exchange capability of heat of heat exchanger 5 inner refrigerants reduces, thereby causes circulating cooling liquid groove 1 inlet circulating cooling liquid temperature T 2 to rise.Like this, formed a regulating ring of regulating at circulating cooling liquid groove 1 temperature in (T2) and compressor 3 air entry temperature (T3) between T-valve 2 and the compressor 3.Thereby can regulate circulating cooling liquid groove 1 inlet circulating cooling liquid temperature (T1) with T-valve 2 that can only Control Flow.
Because compressor 3 variable power are slower to the influence of refrigerant temperature, has bigger hysteresis quality, and T-valve 2 is by the control to the heat exchanger 5 circulating cooling liquid flows of flowing through, can carry out quick adjustment to the circulating cooling liquid temperature of circulating cooling liquid groove 1 porch, therefore, its fluctuation of load outside brings under the situation of considerable influence to temperature control precision, make temperature controlled precision reach ± 0.5 ℃.
Co-exist in three relations of tabling look-up in the temperature control equipment in the present embodiment, be respectively:
1) relation of tabling look-up between the preset temperature value (Tset) of circulating cooling liquid groove temperature in setting value (T2 ') and temperature control equipment, the principle that its relation of tabling look-up is determined is to make circulating cooling liquid groove temperature in setting value (T2 ') near the preset temperature value (Tset) of temperature control equipment, reach energy-conservation to greatest extent when guaranteeing precision under the condition that guarantees certain heating surplus as far as possible.The difference that said heating surplus refers between the preset temperature value (Tset) of circulating cooling liquid groove temperature in setting value (T2 ') and temperature control equipment can not be less than control accuracy ± 0.5 of circulating cooling liquid groove temperature in (T2) ℃, and should be a bit larger tham this value, as 0.8 ℃.
2) relation of tabling look-up between the preset temperature value (Tset) of electric expansion valve 6 apertures (V) and temperature control equipment, the principle that its relation of tabling look-up is determined is not make that again refrigerating capacity is excessive when guaranteeing the enough refrigerating capacitys of each temperature control point.
3) relation of tabling look-up between the preset temperature value (Tset) of compressor air suction mouth desired temperature (T3 ') and temperature control equipment, the principle that its relation of tabling look-up is determined are to guarantee that compressor air suction mouth temperature (T3) is unlikely to too high and stays certain surplus.
In order to realize the said temperature Control Circulation, what the embodiment of the invention adopted is the method that temperature-controlled process takes temperature classification control to combine with segmentation control.
Step control refers to temperature controlled processes is divided into the inferior class precision control of circulating cooling liquid groove 1 porch and the high class precision control that the circulating cooling liquid groove exports 1 place.Inferior class precision control changes directly assurance by aforesaid T-valve 2 first ports, 20 apertures (V), and high class precision control then realizes by electric heater 8.
Segmentation control has two layers of implication:
One, temperature controlled processes under each design temperature is divided into two stages, one is quick response phase, its objective is that the outlet circulating cooling liquid temperature that makes temperature control equipment reaches near the preset temperature value of outlet temperature fast, guarantees the fast-response of system; One is the temperature accuracy control stage, reduces overshoot, guarantees the precision of circulating cooling liquid outlet temperature (T1).
They are two years old, whole temperature control is divided into plurality of sections, is divided into 11 sections in the present embodiment, because high temperature section and low-temperature zone all are difficult control sections, so all be divided into a temperature section with 5 degrees centigrade in maximum temperature and minimum temperature two ends, other temperature then are divided into a temperature section with 10 degrees centigrade.When temperature control system is debugged, with whole 10 ℃ be design temperature, obtain the optimal PID controlled variable of this temperature spot, and this optimal PID parameter be cured to the temperature control equipment internal controller, the pid parameter during as the actual temperature control of temperature control equipment.The optimal PID parameter that each is whole 10 ℃ is opened up to both sides and to be prolonged 5 ℃, and like this except the optimal PID parameter of-20 ℃ of points and 80 ℃ of points, the optimal PID parameter of each whole 10 ℃ of temperature spot is all in the temperature control of 10 ℃ of scopes.For whole five temperature spots, at maximum temperature and minimum temperature two ends with whole 5 ℃ of temperature spots of 5 degrees centigrade of divisions, adopt the optimal PID parameter of more close 20 ℃ of points.Like this, adopt different pid parameters that refrigeration, heating are controlled, thereby can guarantee the temperature control precision under each desired temperature in each stage.
See also shown in Figure 3ly, Fig. 3 is an electric heater 8 in the embodiment of the invention, T-valve 2 and the temperature control flow figure of compressor 3:
Step S00: start-up temperature control system;
Step S01: read temperature control system preset temperature value (Tset);
Step S02: select optimum pid parameter;
Step S03: judge that whether preset temperature value (Tset) is greater than temperature initial value T0, if then enter step S04;
Step S04: whether the difference of judging preset temperature value (Tset) and circulating cooling liquid outlet temperature (T1) according to the control accuracy of temperature control system, selects suitable parameters e greater than parameter e, in the present embodiment, can select e=4.If then enter step S05;
Step S05: respectively electric heater 8 output powers (H) are set at maximal value, the refrigeration output duty cycle (C) of T-valve 2 first ports, 20 apertures (V), compressor 3 all is set at minimum value, be H=H (max), V=V (min), C=C (min), and return step S04 and proceed to judge.
In step S04, if the difference of preset temperature value (Tset) and circulating cooling liquid outlet temperature (T1) value T1 then enters step S06 less than parameter e;
Step S06: whether the output power (H) of judging electric heater 8 is maximal value, if then enter step S07;
Step S07: reduce the output power (H) of electric heater 8, the aperture (V) of T-valve 2 is set to current aperture (V), the refrigeration output duty cycle (C) of compressor 3 is set to current refrigeration dutycycle.In the present embodiment, the output power (H) of electric heater 8 is deducted a parameter f get final product, parameter is chosen as f=50.Enter step S14 then.
In above-mentioned steps S03, if preset temperature value (Tset) then enters step S08 less than temperature initial value T0;
Step S08: whether the difference of judging preset temperature value (Tset) and circulating cooling liquid outlet temperature (T1) if not, then enters step S09 greater than parameter e;
Step S09: whether the refrigeration output duty cycle (C) of judging compressor 3 is maximal value, i.e. C=C (max) is if then enter step S10; If not, then enter step S14;
Step S10: respectively electric heater 8 output powers (H), T-valve 2 first ports, 20 apertures (V) are set at currency, the refrigeration output duty cycle (C) that reduces compressor 3 deducts a parameter f, be H=H (cur), V=V (cur), C=C (max)-f, and enter step S14;
In above-mentioned steps S08, if the difference of preset temperature value (Tset) and circulating cooling liquid outlet temperature (T1) then enters step S11 greater than parameter e;
Step S11: whether the difference of judging compressor air suction mouth temperature (T3) higher limit Tclim and current compressor air suction mouth temperature value Tcin is less than parameter §, if then enter step S12; If not, then enter step S13;
Step S12: respectively electric heater 8 output powers (H) are set at minimum value, T-valve 2 first ports, 20 apertures (V) are set at currency, the refrigeration output duty cycle (C) of compressor 3 is set at maximal value, i.e. H=H (min), V=V (cur), C=C (max), and return step S08;
Step S11: electric heater 8 output powers (H) are set at minimum value, increase T-valve 2 first ports, 20 apertures (V), the refrigeration output duty cycle (C) of compressor 3 is set at maximal value, i.e. H=H (min), V=V (cur)+1, C=C (max), and return step S08;
At last, enter step S14, obtain the PID control relation of electric heater 8, T-valve 2, compressor 3 respectively, and feed back to electric heater 8, T-valve 2, compressor 3, enter step S15 then;
Step S15: judge whether to reset temperature, if desired, then return step S01; If do not need, then return step S14.
The effect that the embodiment of the invention is brought is:
1. high precision: by temperature control being divided into refrigeration control and adding the high precision that heat control two stages guarantee temperature control equipment outlet temperature (T1), the circulating cooling liquid that will have temperature fluctuation in the refrigerating capacity adjusting of the quick adjustment function of refrigeration control stage by T-valve 2 and compressor 3 controls to a higher temperature precision, controls to a more high precision by the circulating cooling liquid that well heater 8 and circulating cooling liquid groove 1 automatic agitating function will have elementary temperature accuracy adding the heat control stage.
2. energy-conservation: when setting circulating cooling liquid groove inlet circulating cooling liquid desired temperature, guaranteeing that a heating nargin is (promptly under circulating cooling liquid groove temperature in (T2) precision at ± 0.5 ℃, do not make actual cycle cooling liquid bath temperature in (T2) be higher than the preset temperature value (Tset) of temperature control equipment) prerequisite under, make the preset temperature value (Tset) of circulating cooling liquid groove temperature in setting value (T2 ') near temperature control equipment as far as possible, both can reduce the heat of refrigerating medium and cold-producing medium, thereby reduce consumption of compressor, can reduce the intensification amount again, reduce the power consumption of well heater.
3 simple control system.The present invention is divided into four separate in logic control structures with four controlled module (being electric heater 8, T-valve 2, compressor 3, electric expansion valve 6), respectively four controlled module are controlled, make the temperature-controlling system of temperature control equipment logically seem very simple, between the controlled module setting value, set up the relation of tabling look-up simultaneously again dexterously, make The whole control system become a single-input single-output system.
4 quick control on a large scale.Guarantee temperature controlled quick response and high precision simultaneously by temperature controlled processes being divided into quick response phase and precision control stage.At quick response phase,, circulating cooling liquid is carried out the fastest intensification control or the fastest cooling control by the preset temperature value (Tset) of judgement temperature control equipment and the relation of circulating cooling liquid initial temperature; In the precision control stage, compressor 3, T-valve 2 are all carried out closed loop PID control with electric heater 8, to guarantee the precision of temperature control equipment outlet temperature (T1).
5 reduce overshoot., earlier the output quantity of actuator is regulated during the stage to temperature accuracy control by quick temperature control step transition in temperature control, to reduce the temperature accuracy overshoot in control stage.
More than show and described ultimate principle of the present invention, principal character and advantage of the present invention.The technician of the industry should understand; the present invention is not restricted to the described embodiments; that describes in the foregoing description and the instructions just illustrates principle of the present invention; the present invention also has various changes and modifications without departing from the spirit and scope of the present invention, and these changes and improvements all fall in the claimed scope of the invention.The claimed scope of the present invention is defined by appending claims and equivalent thereof.
Claims (9)
1. temperature control equipment, comprise water pump, heat exchanger, T-valve, circulating cooling liquid groove, compressor, electric expansion valve, described circulating cooling liquid groove contains an electric heater, described T-valve contains first and second input end and an output terminal, described heat exchanger contains first and second input end and first and second output terminal respectively, it is characterized in that:
The output terminal of described T-valve is connected with the input end of described circulating cooling liquid groove, and first input end is connected with the output terminal of water pump, and second input end is connected with second output terminal of described heat exchanger;
The first input end of described heat exchanger is connected with the output terminal of electric expansion valve, and first output terminal is connected with the input end of compressor, and second input end is connected with the output terminal of water pump.
2. temperature-controlled process, carry out by a temperature control equipment, this temperature control equipment comprises water pump, heat exchanger, T-valve, circulating cooling liquid groove, compressor, electric expansion valve, described circulating cooling liquid groove contains an electric heater, it is characterized in that the step of described temperature-controlled process comprises:
Set the preset temperature value of the circulating cooling liquid of this temperature control equipment outlet;
Read the current temperature value of the circulating cooling liquid of this temperature control equipment outlet;
According to the deviation between current temperature value and the preset temperature value, regulate T-valve, compressor and electric heater, the variation of Control Circulation coolant temperature:
If current temperature value is lower than preset temperature value, electric heater capacity is outputed to maximal value, the dutycycle and the T-valve aperture of compressor horsepower output are all closed minimum value;
If current temperature value is higher than preset temperature value, the output duty cycle of compressor is reached maximum, the power output of electric heater is closed minimum value, kept the aperture of T-valve constant.
3. temperature-controlled process as claimed in claim 2 is characterized in that: T-valve, compressor and electric heater all adopt microcontroller to control respectively.
4. temperature-controlled process as claimed in claim 3, it is characterized in that: described microcontroller is reference with the outlet preset temperature value, all forms the relation of tabling look-up between the preset temperature value with exporting in the aperture of circulating cooling liquid groove temperature in, electric expansion valve and the air entry temperature value of compressor.
5. temperature-controlled process as claimed in claim 2 is characterized in that: the mode that described temperature-controlled process takes temperature classification control to combine with segmentation control.
6. temperature-controlled process as claimed in claim 2 is characterized in that: between described temperature controlling range is-20 to 80 degrees centigrade.
7. temperature-controlled process as claimed in claim 6 is characterized in that: be divided into some temperature sections in described temperature controlling range, the control of each temperature section is divided into quick response phase and precision control stage.
8. temperature-controlled process as claimed in claim 7 is characterized in that: all be divided into a temperature section with 5 degrees centigrade in maximum temperature and minimum temperature two ends, other temperature then are divided into a temperature section with 10 degrees centigrade.
9. temperature-controlled process as claimed in claim 8 is characterized in that: each temperature section adopts different pid parameters to control.
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2009
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