CN209623013U - A kind of temperature control system - Google Patents
A kind of temperature control system Download PDFInfo
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- CN209623013U CN209623013U CN201920371571.4U CN201920371571U CN209623013U CN 209623013 U CN209623013 U CN 209623013U CN 201920371571 U CN201920371571 U CN 201920371571U CN 209623013 U CN209623013 U CN 209623013U
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- wind cooling
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02B—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO BUILDINGS, e.g. HOUSING, HOUSE APPLIANCES OR RELATED END-USER APPLICATIONS
- Y02B30/00—Energy efficient heating, ventilation or air conditioning [HVAC]
- Y02B30/56—Heat recovery units
Abstract
The utility model discloses a kind of temperature control system, comprising: wind cooling unit is connect with external equipment, for carrying out temperature control to external equipment；Refrigeration unit is connect with wind cooling unit, for cooling down to the air in the wind cooling unit；Heat recovery unit is connect with the refrigeration unit and the wind cooling unit, is heated for recycling the heat in the refrigeration unit, and to the air in the wind cooling unit；Control unit is electrically connected with the wind cooling unit, the refrigeration unit and the heat recovery unit.Temperature control system provided by the utility model, can be by the way that the heat generated in refrigeration unit to be used to can be improved energy utilization rate to the air heating in wind cooling unit, reach energy-saving effect, reduce operating cost.
Description
Technical field
The utility model relates to domain of control temperature more particularly to a kind of temperature control systems.
Background technique
Semiconductor equipment to it is temperature controlled require it is quite stringent, pretreatment, upper piece, the technical process institute such as etching, bottom sheet
The heat consumption difference of generation is very big, and the temperature change of etching cavity has expanded to -20 DEG C~80 DEG C, and to temperature controlled precision
It is higher and higher.
At present temperature control system generally realized by cold and hot energy compensating high-precision, and it is cold be by refrigeration system come
It realizes, heat is realized by electric heater, and such system is complex, and at high cost, consumption of electric power is larger.And refrigeration system
The heat of generation fails to utilize, significant energy is caused to waste by water cooling or air-cooled indirect discharge.
Utility model content
The utility model provides a kind of temperature control system, can be by being used for the heat generated in refrigeration unit to wind
Air heating in cold unit, can be improved energy utilization rate, reaches energy-saving effect, reduce operating cost.
The utility model provides a kind of temperature control system, including wind cooling unit, connect with external equipment, for external
It connects equipment and carries out temperature control；
Refrigeration unit is connect with wind cooling unit, for cooling down to the air in the wind cooling unit；
Heat recovery unit is connect with the refrigeration unit and the wind cooling unit, single for recycling the refrigeration
Heat in member, and the air in the wind cooling unit is heated；
Control unit is electrically connected with the wind cooling unit, the refrigeration unit and the heat recovery unit.
Optionally, the wind cooling unit includes:
Return air adjuster, for adjusting the flow of the air entered in wind cooling unit；
Cooler, the input end of the cooler are connect with the outlet end of the return air adjuster, for described air-cooled
Air in unit is cooled down；
Heater, the input end of the heater are connect with the outlet end of the cooler, for the wind cooling unit
In air heated；
Blower, the input end of the blower are connect with the outlet end of the heater, the outlet end of the blower
It is connect with the external equipment, for providing cooling wind to the external equipment.
Optionally, the cooling unit includes compressor, triple valve, condenser and flow controller；
The outlet end of the compressor is connect with the input end of the triple valve, the first exit end of triple valve with it is described cold
The input end of condenser connects, and the outlet end of the condenser is connect with the input end of the flow controller, the outlet of the flow controller
End is connect with the refrigerant inlet end of the cooler, the refrigerant outlet end of the cooler and the input end of the compressor
Connection；
The control terminal of the triple valve is electrically connected with the control unit.
Optionally, the compressor includes quota compressor, and the triple valve is integrated in the outlet of the quota compressor
End.
Optionally, the second outlet end of the triple valve is connect with the refrigerant inlet end of the heater, the heating
The refrigerant outlet end of device is connect with the input end of the condenser.
Optionally, the return air adjuster also passes through a bypass and directly connect with the input end of the heater.
Optionally, temperature control system further includes the first temperature sensor, is set to the outlet end of the blower, described
First temperature sensor is electrically connected with the control unit.
Optionally, temperature control system further includes second temperature sensor and third temperature sensor, the second temperature
Sensor is set to the input end of the return air adjuster, and the third temperature sensor is set to the outlet of the cooler
End；The second temperature sensor and third temperature sensor are electrically connected with the control unit.
Temperature control system provided by the embodiment of the utility model is connected to refrigeration unit and air-cooled by heat recovery unit
The part gaseous refrigerant for carrying amount of heat is passed through in wind cooling unit by unit, the sky in gaseous refrigerant and wind cooling unit
Gas carries out contactless heat exchange, to heat to the air in wind cooling unit, and then realizes to generating in refrigeration unit
The purpose that is recycled of heat, due to simplifying system structure, reducing equipment cost without additional setting electric heater,
In addition, improving energy utilization rate, reach energy-saving effect, reduces system operation cost.
Detailed description of the invention
The utility model is described in further detail below according to drawings and examples.
Fig. 1 is a kind of structural schematic diagram of temperature control system provided by the utility model；
Fig. 2 is a kind of pipeline connecting figure of temperature control system provided by the utility model；
Fig. 3 is the pipeline connecting figure of another temperature control system provided by the utility model.
Specific embodiment
The technical issues of to solve the utility model, the technical solution of use and the technical effect that reaches are clearer,
It is described in further detail below in conjunction with technical solution of the attached drawing to the utility model embodiment, it is clear that described reality
Applying example is only the utility model a part of the embodiment, instead of all the embodiments.Based on the embodiments of the present invention,
It is practical new to belong to this for those skilled in the art's every other embodiment obtained without creative efforts
The range of type protection.
In the description of the present invention, unless otherwise clearly defined and limited, term " connected ", " connection ", " Gu
It is fixed " it shall be understood in a broad sense, for example, it may be being fixedly connected, it may be a detachable connection, or integral；It can be mechanical connect
It connects, is also possible to be electrically connected；It can be directly connected, can also can be in two elements indirectly connected through an intermediary
The interaction relationship of the connection in portion or two elements.For the ordinary skill in the art, it can be managed with concrete condition
Solve the concrete meaning of above-mentioned term in the present invention.
The utility model embodiment provides a kind of temperature control system, can for carrying out temperature control to external equipment
Choosing, external equipment may include semiconductor manufacturing facility.Fig. 1 is a kind of knot of temperature control system provided by the utility model
Structure schematic diagram, as shown in Figure 1, the temperature control system includes wind cooling unit 100, refrigeration unit 200, heat recovery unit 300
With control unit 400.Wherein, wind cooling unit 100 is connect with external equipment 500, for carrying out temperature control to external equipment 500
System.Refrigeration unit 200 is connect with wind cooling unit 100, for cooling down to the air in wind cooling unit 100.Illustratively, wind
Circulation has air in cold unit 100, and circulation has refrigerant, refrigerant and air in wind cooling unit 100 and system in refrigeration unit 200
The junction of cold unit 200 carries out contactless heat exchange, to cool down to the air in wind cooling unit 100.Heat returns
It receives unit 300 to connect with wind cooling unit 100 and refrigeration unit 200, wind cooling unit 100 and refrigeration unit 200 is connected to, for recycling
It is heated using the heat in refrigeration unit 200, and to the air in wind cooling unit 100.Illustratively, refrigeration unit 200
A large amount of heat can be generated in the process of refrigeration, and heat recovery unit 300 will carry the part gaseous refrigerant of amount of heat
It is passed through in wind cooling unit 100, the air in gaseous refrigerant and wind cooling unit 100 is in wind cooling unit 100 and heat recovery unit
300 junction carries out contactless heat exchange, to heat to the air in wind cooling unit 100, and then realizes to system
The purpose that the heat generated in cold unit 200 is recycled.By refrigeration unit 200 to the air to circulate in wind cooling unit 100
It is cooled down and heat recovery unit 300 heats the air to circulate in wind cooling unit 100, air-cooled list is adjusted with this
First 100 outlet ends, the i.e. temperature with the delivery air of the connecting pin of external equipment 500, realize the temperature control to external equipment 500
System.Control unit 400 is electrically connected with wind cooling unit 100, refrigeration unit 200 and heat recovery unit 300, is returned for controlling heat
The flow of gaseous refrigerant in unit 300 is received, to be precisely controlled the leaving air temp of 100 outlet end of wind cooling unit, is realized to external
The accurate control of the operating temperature of equipment 500.Certainly, control unit 400 can be used for the air in control wind cooling unit 100
Flow, by adjusting accurate control of the air mass flow to the operating temperature of external equipment 500, control unit 400 be can be used for
The flow for controlling the refrigerant in refrigeration unit 200 controls refrigeration unit 200 to air-cooled list by adjusting the flow of refrigerant
The refrigerating capacity of air in member 100 adjusts the leaving air temp of 100 outlet end of wind cooling unit, realizes the work to external equipment 500
Make the accurate control of temperature.
Temperature control system provided by the embodiment of the utility model is connected to refrigeration unit and air-cooled by heat recovery unit
The part gaseous refrigerant for carrying amount of heat is passed through in wind cooling unit by unit, the sky in gaseous refrigerant and wind cooling unit
Gas carries out contactless heat exchange, to heat to the air in wind cooling unit, and then realizes to generating in refrigeration unit
The purpose that is recycled of heat, due to simplifying system structure, reducing equipment cost without additional setting electric heater,
In addition, improving energy utilization rate, reach energy-saving effect, reduces system operation cost.
Fig. 2 is a kind of pipeline connecting figure of temperature control system provided by the utility model, optionally, as shown in Fig. 2, wind
Cold unit 100 includes return air adjuster 110, cooler 120, heater 130 and blower 140.Wherein, return air adjuster 110
Control terminal be electrically connected with control unit 400, for according to the control instruction of control unit adjust enter wind cooling unit 100 in
The flow of air.The input end of cooler 120 is connect with the outlet end of return air adjuster 110, air through return air adjuster 110 into
When entering cooler 120, cooler 120 is used to cool down the air for entering cooler 120.The input end of heater 130 with
The outlet end of cooler 120 connects, when air enters heater 130 after cooler 120 is cooling, heater 130 be used for into
The air for entering heater 130 is heated.The input end of blower 140 is connect with the outlet end of heater 130, external equipment
(being not shown in Fig. 2) is connected between the outlet end of blower 140 and the input end of return air adjuster 110, and blower 140 is used for
Cooling wind is provided to external equipment, to control the operating temperature of external equipment.Cooling wind is back to return air after external equipment
In adjuster 110, air-cooled circuit is formed.To external equipment by cooler 120 and heater 130 to the air in wind cooling unit
Temperature control is carried out, and then controls the leaving air temp of 140 outlet end of blower, is realized to the accurate of the operating temperature of external equipment
Control.Optionally, in the utility model embodiment, the heating source of heater 130 is wholly or largely by heat recovery unit
300 provide, that is, are not necessarily to additional heating source, to improve energy-saving effect, reduce system operation cost.
With continued reference to Fig. 2, optionally, cooling unit 200 includes compressor 210, triple valve 220, condenser 230 and throttling
Device 240.Wherein, the outlet end of compressor 210 is connect with the input end of triple valve 220, the first exit end of triple valve 220 with it is cold
The input end of condenser 230 connects, and the outlet end of condenser 230 is connect with the input end of flow controller 240, the outlet of flow controller 240
End is connect with the refrigerant inlet end of cooler 120, and the refrigerant outlet end of cooler 120 and the input end of compressor 210 connect
It connects, the control terminal of triple valve 220 is electrically connected with control unit 400.Specifically, circulation has refrigeration in the pipeline of cooling unit 200
Agent, compressor 210 is used for refrigerant compression into the gas of high temperature and pressure, and is conveyed to triple valve 220,220 basis of triple valve
The control instruction of control unit 400, control valve aperture are cold to adjust the flow of the gaseous refrigerant conveyed to condenser 230
230 pairs of the condenser gaseous refrigerants entered in it cool down, and gaseous refrigerant are changed into liquid, and be conveyed to flow controller
240, the control terminal of flow controller 240 receives the control instruction from control unit 400, controls the aperture of flow controller 240, to adjust
The flow of the liquid refrigerant conveyed to cooler 120, liquid refrigerant carries out in cooler 120 with air contactless
Heat exchange, and then accurately freeze to the air in cooler 120.Wherein, cooler 120 can be evaporator, liquid refrigerant
It is evaporated to gaseous state in evaporator, absorbs the heat of air in evaporator, and then realize to the hollow air cooling of evaporator.Heat exchange
Afterwards, gaseous refrigerant is back in compressor 210, so on circulate, forms refrigerating circuit.
Optionally, it is quota compressor that compressor 210, which can contract, and triple valve 220 is integrated in the outlet end of quota compressor.
Optionally, the second outlet end of triple valve 220 is connect with the refrigerant inlet end of heater 130, heater 130
Refrigerant outlet end is connect with the input end of condenser 230.Compressor 210 by refrigerant compression at the gas of high temperature and pressure, and
It is conveyed to triple valve 220, the gaseous refrigerant of part high temperature and pressure is defeated to heater 130 through the second outlet end of triple valve 220
It send, the gaseous refrigerant and the air in heater 130 of high temperature and pressure carry out contactless heat exchange, utilize high temperature and pressure
Gaseous refrigerant heats air.After heat exchange, gaseous refrigerant is back in condenser 230, so completion heat recovery.
Optionally, temperature control system further includes the first temperature sensor 610, and the first temperature sensor 610, which is set to, to be sent
The outlet end of wind device 140, the first temperature sensor 610 are electrically connected with the control unit.First temperature sensor 610 is for adopting
Collect the air themperature of the outlet end of blower 140, and feed back to control unit 400, control unit 400 is according to blower 140
The actual air temperature of the outlet end of the preset temperature and blower 140 of outlet end, regulating three-way valve 220 and flow controller 240
Aperture, to control the flow and the gaseous refrigerant for the high temperature and pressure for flowing to heater 130 of the liquid refrigerant for flowing to cooler 120
The flow of agent, and then the air themperature of the outlet end of blower 140 is controlled, so that it is met set temperature requirement.Illustratively, such as
The temperature that the first temperature sensor of fruit 610 acquires is higher than preset temperature, then the temperature of external equipment is higher than normal work at this time
Make temperature, the aperture of flow controller 240 can be increased, increases the flow for flowing to the liquid refrigerant of cooler 120, or reduce threeway
The aperture of valve 220 reduces the flow for flowing to the gaseous refrigerant of high temperature and pressure of heater 130, by the outlet end of blower 140
Air themperature be reduced to preset temperature.
Fig. 3 is the pipeline connecting figure of another temperature control system provided by the utility model, optionally, as shown in figure 3,
On the basis of embodiment shown in Fig. 2, the temperature control system of the present embodiment further includes second temperature sensor 620 and third
Temperature sensor 630, second temperature sensor 620 are set to the input end of return air adjuster 110, third temperature sensor 630
The outlet end of cooler 120, second temperature sensor 620 and third temperature sensor 630 is set to be electrically connected with control unit 400
It connects.Second temperature sensor 620 and third temperature sensor 630 are used to acquire the input end and cooler of return air adjuster 110
The air themperature of 120 outlet end, and feed back to control unit 400.Control unit 400 is according to the outlet end of cooler 120
The aperture of the actual temperature that set temperature and third temperature sensor 630 acquire, control flow controller 240 flows to cooler to control
The flow of 120 liquid refrigerant forms first order closed loop feedback control.For example, the reality that third temperature sensor 630 acquires
When temperature is greater than set temperature, it is possible to increase the aperture of flow controller 240 increases the flow for flowing to the liquid refrigerant of cooler 120,
To make the actual temperature of the outlet end of cooler 120 be down to set temperature.Control unit 400 is according to the outlet of blower 140
The actual temperature of the preset temperature at end and the acquisition of the first temperature sensor 610, the aperture of regulating three-way valve 220, to control flow direction
The flow of the gaseous refrigerant of the high temperature and pressure of heater 130 forms second level closed loop feedback control.Illustratively, when first
The temperature that temperature sensor 610 acquires is higher than preset temperature, it is possible to reduce the aperture of triple valve 220, reduction flow to heater 130
High temperature and pressure gaseous refrigerant flow, the air themperature of the outlet end of blower 140 is reduced to preset temperature.At this
In embodiment, the temperature that control unit 400 can also be acquired according to the first temperature sensor 610 and second temperature sensor 620,
The aperture of return air adjuster 110 is controlled, to control the air mass flow of the outlet end of blower 140, to realize to external equipment
Temperature control.Illustratively, it is acquired when the temperature that second temperature sensor 620 acquires much larger than the first temperature sensor 610
When temperature, illustrates that the workload of external equipment at this time is larger, the aperture of return air adjuster 110 can be increased, make more skies
Gas is back in return air adjuster 110, i.e. the air mass flow of the outlet end of increase blower 140, improves cooling effect.
In another embodiment of the utility model, third temperature sensor 630 is only used as temperature detection, without single to control
The temperature that 400 feedback of member measures.The temperature control system can refer to Fig. 2 to the control strategy of triple valve 220 and flow controller 240
Shown in temperature control system control strategy, details are not described herein.In this embodiment, control unit 400 can also basis
The temperature that first temperature sensor 610 and second temperature sensor 620 acquire, controls the aperture of return air adjuster 110, with control
The air mass flow of the outlet end of blower 140, to realize that the temperature to external equipment controls.Illustratively, when second temperature passes
When the temperature that sensor 620 acquires is much larger than the temperature that the first temperature sensor 610 acquires, illustrate that the work of external equipment at this time is negative
Lotus is larger, can increase the aperture of return air adjuster 110, makes more air returns into return air adjuster 110, that is, increases and send
The air mass flow of the outlet end of wind device 140 improves cooling effect.
Optionally, referring to figs. 2 and 3, input end of the return air adjuster 110 also by a bypass directly with heater 130
The air of return air adjuster 110 is passed through in connection, a portion flows through cooler 120, and the device 120 that is cooled is cooling, another portion
Divide around subcooler, flows directly into heater 130.A large amount of heat can be all not generated when external equipment works, i.e., for this
Kind of situation, air in air-cooled circuit can meet refrigeration requirement without all cooling through cooler 120.In this case,
The temperature that control unit 400 is acquired according to the first temperature sensor 610 and second temperature sensor 620, controls return air adjuster
110 aperture is matched with adjusting the ratio for entering the air mass flow of cooler 120 and being directly entered the air mass flow of heater 130
The flow control of triple valve 220 and flow controller 240 is closed, realizes the accurate control to the air themperature of 140 outlet end of blower.Example
Such as, when temperature of the temperature that second temperature sensor 620 acquires slightly larger than the acquisition of the first temperature sensor 610, illustrate external
For equipment in underrun, quantity of heat production is smaller, can be lowered into the air mass flow of cooler 120 and be directly entered heater
The ratio of 130 air mass flow.Due to only having the cooled device 120 of partial air cooling in air-cooled circuit, it is possible to reduce refrigeration is single
The power consumption of member further increases energy-saving effect, reduces system operation cost.
In the description of this article, it is to be understood that term " on ", "lower", " right side ", etc. orientation or positional relationships be based on
Orientation or positional relationship shown in the drawings is merely for convenience of description and simplification and operates, rather than the dress of indication or suggestion meaning
It sets or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to the utility model
Limitation.In addition, term " first ", " second ", are only used to distinguish between description, have no special meaning.
In the description of this specification, the description of reference term " embodiment ", " example " etc. means to combine the embodiment
Or example particular features, structures, materials, or characteristics described are contained at least one embodiment or example of the utility model
In.In the present specification, schematic expression of the above terms may not refer to the same embodiment or example.
In addition, it should be understood that although this specification is described in terms of embodiments, but not each embodiment is only wrapped
Containing an independent technical solution, this description of the specification is merely for the sake of clarity, and those skilled in the art should
It considers the specification as a whole, the technical solutions in the embodiments can also be appropriately combined, and forming those skilled in the art can
With the other embodiments of understanding.
Technical principle of the utility model has been described above with reference to specific embodiments.These descriptions are intended merely to explain this reality
With novel principle, and it cannot be construed to the limitation to scope of protection of the utility model in any way.Based on the explanation herein,
Those skilled in the art, which does not need to pay for creative labor, can associate with other specific implementation modes of this utility model,
These modes are fallen within the protection scope of the utility model.
Claims (8)
1. a kind of temperature control system characterized by comprising
Wind cooling unit is connect with external equipment, for carrying out temperature control to external equipment；
Refrigeration unit is connect with wind cooling unit, for cooling down to the air in the wind cooling unit；
Heat recovery unit is connect with the refrigeration unit and the wind cooling unit, for recycling in the refrigeration unit
Heat, and the air in the wind cooling unit is heated；
Control unit is electrically connected with the wind cooling unit, the refrigeration unit and the heat recovery unit.
2. temperature control system according to claim 1, which is characterized in that the wind cooling unit includes:
Return air adjuster, for adjusting the flow of the air entered in wind cooling unit；
Cooler, the input end of the cooler are connect with the outlet end of the return air adjuster, for the wind cooling unit
In air cooled down；
Heater, the input end of the heater are connect with the outlet end of the cooler, for in the wind cooling unit
Air is heated；
Blower, the input end of the blower are connect with the outlet end of the heater, the outlet end of the blower and institute
External equipment connection is stated, for providing cooling wind to the external equipment.
3. temperature control system according to claim 2, which is characterized in that the cooling unit includes compressor, threeway
Valve, condenser and flow controller；
The outlet end of the compressor is connect with the input end of the triple valve, the first exit end of triple valve and the condenser
Input end connection, the outlet end of the condenser connect with the input end of the flow controller, the outlet end of the flow controller and
The refrigerant inlet end of the cooler connects, and the refrigerant outlet end of the cooler and the input end of the compressor connect
It connects；
The control terminal of the triple valve is electrically connected with the control unit.
4. temperature control system according to claim 3, which is characterized in that the compressor includes quota compressor, institute
State the outlet end that triple valve is integrated in the quota compressor.
5. temperature control system according to claim 3, which is characterized in that the second outlet end of the triple valve with it is described
The refrigerant inlet end of heater connects, and the refrigerant outlet end of the heater is connect with the input end of the condenser.
6. according to any temperature control system of claim 2-5, which is characterized in that the return air adjuster also passes through one
Bypass is directly connect with the input end of the heater.
7. temperature control system according to claim 2, which is characterized in that further include the first temperature sensor, be set to
The outlet end of the blower, first temperature sensor are electrically connected with the control unit.
8. temperature control system according to claim 2, which is characterized in that further include second temperature sensor and third temperature
Sensor is spent, the second temperature sensor is set to the input end of the return air adjuster, and the third temperature sensor is set
It is placed in the outlet end of the cooler；The second temperature sensor and third temperature sensor are electrically connected with described control unit
It connects.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920371571.4U CN209623013U (en) | 2019-03-22 | 2019-03-22 | A kind of temperature control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920371571.4U CN209623013U (en) | 2019-03-22 | 2019-03-22 | A kind of temperature control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209623013U true CN209623013U (en) | 2019-11-12 |
Family
ID=68457566
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920371571.4U Active CN209623013U (en) | 2019-03-22 | 2019-03-22 | A kind of temperature control system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209623013U (en) |
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2019
- 2019-03-22 CN CN201920371571.4U patent/CN209623013U/en active Active
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