CN103294086A - Constant-temperature liquid circulating device and temperature-controlling method - Google Patents

Constant-temperature liquid circulating device and temperature-controlling method Download PDF

Info

Publication number
CN103294086A
CN103294086A CN2012100452550A CN201210045255A CN103294086A CN 103294086 A CN103294086 A CN 103294086A CN 2012100452550 A CN2012100452550 A CN 2012100452550A CN 201210045255 A CN201210045255 A CN 201210045255A CN 103294086 A CN103294086 A CN 103294086A
Authority
CN
China
Prior art keywords
temperature
compressor
electric
circulation fluid
shaped valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN2012100452550A
Other languages
Chinese (zh)
Other versions
CN103294086B (en
Inventor
李天水
王飞
卜荣翔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shanghai Micro Electronics Equipment Co Ltd
Original Assignee
Shanghai Micro Electronics Equipment Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Micro Electronics Equipment Co Ltd filed Critical Shanghai Micro Electronics Equipment Co Ltd
Priority to CN201210045255.0A priority Critical patent/CN103294086B/en
Publication of CN103294086A publication Critical patent/CN103294086A/en
Application granted granted Critical
Publication of CN103294086B publication Critical patent/CN103294086B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Abstract

The invention discloses a constant-temperature liquid circulating device which is used for conveying a constant-temperature liquid to an external device. The constant-temperature liquid circulating device comprises a refrigerating device unit, a circulating liquid loop unit and a controlling device. The refrigerating device comprises an electric three-way valve, an evaporation device, a condensing device, a compressor and an expansion device, the inlet end of the compressor is connected with one outlet end of the evaporation device, and the outlet end of the compressor is connected with the electric three-way valve; the circulating liquid loop unit comprises a temperature sensor, a frequency conversion device and a pump, the evaporation device is of a structure with three inlets and three outlets, the three inlets are respectively connected with the electric three-way valve, the expansion device and the external device, and the three outlets are respectively connected with the condensing device, the compressor and the pump. The controlling device is connected with the temperature sensor, the temperature sensor collects the temperature of the circulating liquid, and the controlling device is used for controlling the opening degree of the electric three-way valve according to the signal of the temperature sensor. The constant-temperature liquid circulating device is low in cost, small in size and capable of reducing system energy consumption.

Description

A kind of constant temperature liquid circulating device and temperature control method
Technical field
The present invention relates to a kind of constant temperature liquid circulating device and temperature control method, relate in particular to a kind of constant temperature liquid circulating device and temperature control method that applies to chip manufacturing factory.
Background technology
In current " low-carbon (LC) " economic society in vogue, all trades and professions all are faced with huge pressure--" energy-conservation ", especially semicon industry.And this has also just proposed higher design objective to the attemperating unit that the temperature control environment is provided to semicon industry: can satisfy the temperature-control range of technological requirement, can be issued to the many index of energy-saving and environmental protection, economy again in the assurance device normal operation.
As shown in Figure 1 be the constant temperature liquid circulating device that is widely used in deielectric-coating etching chip manufacturing factory at present, this device has refrigerating circuit, circulation fluid loop and control loop 21, wherein the circulation fluid loop is by water pump 22, water tank 23, T-valve 24 compositions such as grade.
This device temperature control process is divided into 2 grades, heats the temperature of coming the regulating tank outlet earlier by T-valve mixed flow coarse adjustment water tank inflow point temperature (than low 2-3 ℃ of water tank outlet temperature), and then by well heater.Thereby the temperature that makes the water tank outlet keeps constant, this shows:
1. no matter under any operating mode, the temperature of T-valve outlet is all than low 2-3 ℃ of the temperature of water tank outlet set point, and the cold that will export of refrigerating circuit is more so, and then consumption of compressor increases, and Overall Power Consumption increases;
2. no matter this device is in normal temperature control state or intensification operating mode, and the well heater in the water tank all can be exported, and then Overall Power Consumption increases;
3. according to the energy conservation principle, because refrigerating circuit need be exported more cold in this device, the heat that then needs condenser to exchange away also just increases, and the volume of condenser is increased, and is unfavorable for the miniaturization of equipment.
Summary of the invention
Technical matters to be solved by this invention provides that a kind of cost is low, volume is little, reduces constant temperature liquid circulating device and the temperature control method thereof of system energy consumption.
In order to solve the problems of the technologies described above, the present invention has adopted following technical scheme:
A kind of constant temperature liquid circulating device is given external device (ED) for delivery of constant temperature liquid, and it comprises refrigerating plant unit, circulation fluid circuit units, control device:
Described refrigerating plant unit comprises electric T-shaped valve, expansion gear and the vaporising device that is connected with electric T-shaped valve respectively, condensing unit and compressor, the entrance point of described compressor is connected with an endpiece of vaporising device, the endpiece of compressor is connected with electric T-shaped valve, the endpiece of described condensing unit is connected with expansion gear, wherein said vaporising device has three entrance points, three endpiece, three entrance points connect electric T-shaped valve respectively, expansion gear, external device (ED), three endpiece connect condensing unit respectively, compressor and circulation fluid circuit units; Described circulation fluid circuit units comprises temperature sensor, converter plant and pump, an endpiece of described vaporising device is connected with the entrance point of described pump, described temperature sensor is installed between described pump and the external device (ED), be used for gathering the temperature of circulation fluid, described converter plant is installed between described pump and the control device;
Described control device connects described expansion gear, compressor and converter plant respectively, by converter plant is carried out frequency control, regulate the rotating speed of pump, flow to the circulation fluid that is transported to the closed circuit unit is controlled, and described control device also is used for according to the aperture of the signal controlling electric T-shaped valve of temperature sensor and the output of described refrigerating plant unit cold size.
Preferably, described expansion gear can adopt heating power expansion valve, electric expansion valve or orifice plate.Preferably, described compressor can be selected digital scroll compressor, invariable frequency compressor, frequency-changeable compressor for use.
Simultaneously, the temperature control method that the present invention also provides a kind of constant temperature liquid circulating device to adopt adopts above-mentioned constant temperature liquid circulating device, comprises the steps:
Temperature sensor is gathered the temperature value of circulation fluid and is sent to control device;
Control device is judged the temperature value of the circulation fluid that described temperature sensor is gathered with the big or small of setting value and according to above-mentioned judged result, and control device sends action command to the compressor in the refrigerating plant unit, electric T-shaped valve and expansion gear;
The instruction of described compressor, electric T-shaped valve and expansion gear receiving control device, the cold output of corresponding adjusting compressor, the aperture of described electric T-shaped valve and the aperture of expansion gear make the temperature of circulation fluid fast near setting value.
Preferably, the temperature value of the circulation fluid of gathering when temperature sensor is greater than setting value, control device sends action command to compressor, electric T-shaped valve in the refrigerating plant, compressor is exported with maximum cooling capacity, reduce and the aperture of electric T-shaped valve is corresponding, make compressor outlet reflux through the corresponding minimizing of the cold-producing medium of evaporator heated side, make the temperature value of circulation fluid near setting value;
The temperature value of the circulation fluid of gathering when the temperature temperature sensor is less than setting value, control device sends action command to electric T-shaped valve in the refrigerating plant, guaranteeing under the normal operation of compressor, the corresponding increase of the aperture of electric T-shaped valve, make compressor outlet reflux through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side, make the temperature of circulation fluid rapidly near desired temperature.
As seen, the invention provides a kind of wide temperature range of control, a kind of temperature control equipment that can be issued to the many index of energy-saving and environmental protection, economy in the assurance device normal operation is provided again, and temperature control that it is mainly used in etching machine etch chamber has reached following effect:
1. utilize the threeway proportioning valve to increase by a hot gas bypass circuit between compressor outlet and evaporator, T-valve and well heater in the cancellation outer loop liquid loop reduce system energy consumption;
2. be used for heating of evaporator one side because the high-temperature gas of compressor outlet shunts one the tunnel, so reduce through the thermal load of condenser, heat exchanger volume reduced, make equipment miniaturization, reduce cost.
Description of drawings
Fig. 1 is the synoptic diagram of existing constant temperature liquid circulating device;
Fig. 2 is the synoptic diagram of constant temperature liquid circulating device of the present invention.
Embodiment
Below in conjunction with Fig. 2, describe the preferred implementation of patent of the present invention in detail:
As shown in Figure 2, the invention provides a kind of wide temperature range of control, a kind of temperature control equipment and temperature control method that can be issued to the many index of energy-saving and environmental protection, economy in the assurance device normal operation is provided again.This energy-saving constant temperature liquid circulating device comprises refrigerating plant unit 11, circulation fluid circuit units 12, control device 10 and external device (ED) 9.
Refrigerating plant described above unit 11 is used for the temperature of circulation fluid is controlled to predetermined temperature, described refrigerating plant unit 11 comprises electric T-shaped valve 3, expansion gear 2 and the vaporising device 4 that is connected with electric T-shaped valve 3 respectively, condensing unit 1 and compressor 5 etc., the entrance point of described compressor 5 is connected with an endpiece of vaporising device 4, the endpiece of compressor 5 is connected with electric T-shaped valve 3, the endpiece of described condensing unit 1 is connected with expansion gear 2, the high-temperature high-pressure refrigerant steam that described condensing unit 1 is used for compressor 5 discharges, be condensed into liquid refrigerant by heat radiation, flow into vaporising device 4 by expansion gear 2 backs, liquid refrigerant absorbs the gaseous steam that is gasificated into low pressure behind the heat of circulation fluid in vaporising device 4, be back in the condensing unit 1 after being compressed into the steam of high pressure by compressor 5 again, circulation fluid is through being reduced to temperature the temperature of setting behind the vaporising device 4 again.Particularly, described vaporising device 4 employings three are advanced three and are gone out the formula evaporator, that is to say that described vaporising device 4 selects for use three to advance three and go out the formula evaporator, described vaporising device 4 has three entrance points, three endpiece, three entrance points connect electric T-shaped valve 3, expansion gear 2,9, three endpiece of external device (ED) respectively and connect condensing unit 1, compressor 5 and circulation fluid circuit units 12 respectively.
Described circulation fluid circuit units 12 flows to external device (ED) 9 for the circulation fluid that temperature is reduced to design temperature, to guarantee that external device (ED) 9 can be in the duty of constant temperature, this circulation fluid circuit units 12 comprises temperature sensor 8, converter plant 7 and pump 6, particularly, an endpiece of described vaporising device 4 is connected with the entrance point of described pump 6, be used for the circulation fluid of design temperature is transported to external device (ED) 9, described temperature sensor 8 is installed between described pump 6 and the external device (ED) 9, be used for gathering the temperature that is delivered to the constant temperature liquid of external device (ED) 9 by described pump 6, described converter plant 7 is installed between described pump 6 and the control device 10, described pump 6 is controlled by control device 10, carry out frequency control by converter plant 7, the flow of the circulation fluid that is transported to closed circuit unit 12 is controlled.
Described control device 10 connects described expansion gear 2 respectively, compressor 5, electric T-shaped valve 3 and converter plant 7, by converter plant 7 is carried out frequency control, regulate the rotating speed of pump 6, flow to the circulation fluid that is transported to closed circuit unit 12 is controlled, described control device 10 can also be according under the different temperatures technological requirement, the signal that described temperature sensor 8 collects, and through calculation process, the aperture of performer electric T-shaped valve 3 and the output of described refrigerating plant unit 11 cold sizes are controlled, realized the function that the circulation fluid temperature is accurately controlled.
Optionally, described expansion gear 2 can adopt heating power expansion valve, electric expansion valve or orifice plate.
Optionally, described compressor 5 can be selected digital scroll compressor, invariable frequency compressor, frequency-changeable compressor for use.
Simultaneously, please continue to consult Fig. 2, the temperature control method that the present invention also provides a kind of constant temperature liquid circulating device to adopt adopts aforesaid constant temperature liquid circulating device, comprises the steps:
Temperature sensor 8 is gathered the temperature value of circulation fluid and is sent to control device 10;
The temperature value that control device 10 is judged the circulation fluid that described temperature sensor 8 is gathered and the big or small of setting value and according to the result of above-mentioned judgement, compressor 5, electric T-shaped valve 3 and expansion gear 2 in 10 pairs of refrigerating plant unit 11 of control device send action command;
The instruction of described compressor 5, electric T-shaped valve 3 and expansion gear 2 receiving control devices 10, the cold output of corresponding adjusting compressor 5, the aperture of described electric T-shaped valve 3 and the aperture of expansion gear 2 make the temperature of circulation fluid fast near setting value.
Particularly, constant temperature liquid circulating device of the present invention is under operation process requires, if the temperature value of the circulation fluid that temperature sensor 8 is gathered is greater than setting value, compressor 5 in 10 pairs of refrigerating plants of control device, electric T-shaped valve 3 sends action command, preventing that compressor 5 excessive discharge temperature and liquid hit phenomenon from taking place and guaranteeing that refrigerating plant is under the energy-conservation normal operation of higher evaporating pressure, compressor 5 is exported with maximum cooling capacity, reduce (being that compressor outlet refluxes through the corresponding minimizing of the cold-producing medium of evaporator heated side) and the aperture of electric T-shaped valve 3 is corresponding, the corresponding increase of the aperture of expansion gear 2 makes the temperature value of circulation fluid near setting value.
If the temperature value of the circulation fluid that temperature temperature sensor 8 is gathered is less than setting value, electric T-shaped valve 3 sends action command in 10 pairs of refrigerating plants of control device, guaranteeing under the compressor 5 normal operations, the corresponding increase of the aperture of electric T-shaped valve 3 (being that compressor outlet refluxes through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side), the aperture of expansion gear 2 is corresponding to be reduced, and makes the temperature of circulation fluid rapidly near desired temperature.
Above-mentioned constant temperature liquid circulating device is owing to can correctly control to predetermined temperature to the constant temperature liquid of supplying with external device (ED), so cancelled well heater and electric T-shaped valve in the circulation fluid circuit units, both reduced the consumption of electric energy, and also can make the layout of whole device compacter.
Above-mentioned constant temperature liquid circulating device so reduce through the thermal load of condensing unit 1, can make condensation vessel volume reduce because the high-temperature gas of compressor 5 outlets is used for heating of vaporising device 4 one sides through electric T-shaped valve 3 shuntings one tunnel.
Constant temperature liquid circulating device of the present invention can also make equipment miniaturization except can be energy-conservation, make device more economical.
Above-described embodiment is illustrative principle of the present invention and effect thereof only, but not is used for restriction the present invention.Any those skilled in the art all can be under spirit of the present invention and category, and above-described embodiment is modified and changed.Therefore, the scope of the present invention should be listed as claims.

Claims (5)

1. a constant temperature liquid circulating device is given external device (ED) (9) for delivery of constant temperature liquid, and it comprises refrigerating plant unit (11), circulation fluid circuit units (12) and control device (10), it is characterized in that,
Described refrigerating plant unit (11) comprises electric T-shaped valve (3), expansion gear (2) and the vaporising device (4) that is connected with electric T-shaped valve respectively, condensing unit (1) and compressor (5), the entrance point of described compressor (5) is connected with an endpiece of vaporising device (4), the endpiece of compressor (5) is connected with electric T-shaped valve (3), the endpiece of described condensing unit (1) is connected with expansion gear (2), wherein said vaporising device (4) has three entrance points, three endpiece, three entrance points connect electric T-shaped valve (3) respectively, expansion gear (2), external device (ED) (9), three endpiece connect condensing unit (1) respectively, compressor (5) and circulation fluid circuit units (12); Described circulation fluid circuit units (12) comprises temperature sensor (8), converter plant (7) and pump (6), an endpiece of described vaporising device (4) is connected with the entrance point of described pump (6), described temperature sensor (8) is installed between described pump (6) and the external device (ED) (9), be used for gathering the temperature of circulation fluid, described converter plant (7) is installed between described pump (6) and the control device (10);
Described control device (10) connects described expansion gear (2), compressor (5) and converter plant (7) respectively, by converter plant (7) is carried out frequency control, regulate the rotating speed of pump (6), flow to the circulation fluid that is transported to closed circuit unit (12) is controlled, and described control device (10) also is used for according to the aperture of the signal controlling electric T-shaped valve (3) of temperature sensor (8) and the output of described refrigerating plant unit (11) cold size.
2. constant temperature liquid circulating device according to claim 1 is characterized in that, described expansion gear (2) can adopt heating power expansion valve, electric expansion valve or orifice plate.
3. constant temperature liquid circulating device according to claim 1 is characterized in that, described compressor (5) can be selected digital scroll compressor, invariable frequency compressor, frequency-changeable compressor for use.
4. the temperature control method that the constant temperature liquid circulating device adopts adopts constant temperature liquid circulating device as claimed in claim 1, it is characterized in that, comprises the steps:
Temperature sensor (8) is gathered the temperature value of circulation fluid and is sent to control device (10);
Control device (10) judges that the temperature value of the circulation fluid that described temperature sensor (8) is gathered sends action command with the big or small of setting value and according to above-mentioned judged result to the compressor (5) in refrigerating plant unit (11), electric T-shaped valve (3) and expansion gear (2);
The instruction of described compressor (5), electric T-shaped valve (3) and expansion gear (2) receiving control device (10), the cold output of corresponding adjusting compressor (5), the aperture of described electric T-shaped valve (3) and the aperture of expansion gear (2) make the temperature of circulation fluid fast near setting value.
5. the temperature control method that adopts of constant temperature liquid circulating device according to claim 4 is characterized in that,
The temperature value of the circulation fluid of gathering when temperature sensor (8) is greater than setting value, control device (10) sends action command to compressor in the refrigerating plant (5), electric T-shaped valve (3), compressor (5) is exported with maximum cooling capacity, and corresponding the reducing of aperture of electric T-shaped valve (3), make compressor outlet reflux through the corresponding minimizing of the cold-producing medium of evaporator heated side, make the temperature value of circulation fluid near setting value;
The temperature value of the circulation fluid of gathering when temperature temperature sensor (8) is less than setting value, control device (10) sends action command to electric T-shaped valve in the refrigerating plant (3), guaranteeing under the normal operation of compressor (5), the corresponding increase of aperture of electric T-shaped valve (3), make compressor outlet reflux through the corresponding increase of high-temperature gas cold-producing medium of evaporator heated side, make the temperature of circulation fluid rapidly near desired temperature.
CN201210045255.0A 2012-02-27 2012-02-27 Constant-temperature liquid circulating device and temperature-controlling method Active CN103294086B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201210045255.0A CN103294086B (en) 2012-02-27 2012-02-27 Constant-temperature liquid circulating device and temperature-controlling method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201210045255.0A CN103294086B (en) 2012-02-27 2012-02-27 Constant-temperature liquid circulating device and temperature-controlling method

Publications (2)

Publication Number Publication Date
CN103294086A true CN103294086A (en) 2013-09-11
CN103294086B CN103294086B (en) 2015-06-17

Family

ID=49095141

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201210045255.0A Active CN103294086B (en) 2012-02-27 2012-02-27 Constant-temperature liquid circulating device and temperature-controlling method

Country Status (1)

Country Link
CN (1) CN103294086B (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106773153A (en) * 2016-11-10 2017-05-31 武汉华星光电技术有限公司 A kind of attemperator of etching solution
WO2019001413A1 (en) * 2017-06-29 2019-01-03 上海微电子装备(集团)股份有限公司 Liquid temperature-control apparatus and method
CN112379704A (en) * 2020-10-29 2021-02-19 北京京仪自动化装备技术有限公司 Temperature control system for semiconductor production
CN112817347A (en) * 2020-12-25 2021-05-18 北京京仪自动化装备技术有限公司 Rapid temperature rise and drop system and control method thereof
CN112856841A (en) * 2021-02-07 2021-05-28 爱美达(上海)热能系统有限公司 Temperature control device

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184200A2 (en) * 1984-12-07 1986-06-11 Hitachi, Ltd. Air-cooled heat pump type refrigerating apparatus
CN1340145A (en) * 1999-01-15 2002-03-13 约克国际有限公司 Adaptive hot gas bypass control for centrifugal chillers
EP1610076A2 (en) * 2004-06-24 2005-12-28 Samsung Electronics Co., Ltd. Cooling cycle apparatus and method of operating the same
CN2828675Y (en) * 2005-07-11 2006-10-18 贺煜 Environment protection heat pump
US20070137228A1 (en) * 2005-09-28 2007-06-21 Gang Li Heat pump system having a defrost mechanism for low ambient air temperature operation
CN101587355A (en) * 2009-06-30 2009-11-25 上海微电子装备有限公司 Temperature control equipment and temperature control method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0184200A2 (en) * 1984-12-07 1986-06-11 Hitachi, Ltd. Air-cooled heat pump type refrigerating apparatus
CN1340145A (en) * 1999-01-15 2002-03-13 约克国际有限公司 Adaptive hot gas bypass control for centrifugal chillers
EP1610076A2 (en) * 2004-06-24 2005-12-28 Samsung Electronics Co., Ltd. Cooling cycle apparatus and method of operating the same
CN2828675Y (en) * 2005-07-11 2006-10-18 贺煜 Environment protection heat pump
US20070137228A1 (en) * 2005-09-28 2007-06-21 Gang Li Heat pump system having a defrost mechanism for low ambient air temperature operation
CN101587355A (en) * 2009-06-30 2009-11-25 上海微电子装备有限公司 Temperature control equipment and temperature control method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106773153A (en) * 2016-11-10 2017-05-31 武汉华星光电技术有限公司 A kind of attemperator of etching solution
CN106773153B (en) * 2016-11-10 2019-10-25 武汉华星光电技术有限公司 A kind of attemperator of etching solution
WO2019001413A1 (en) * 2017-06-29 2019-01-03 上海微电子装备(集团)股份有限公司 Liquid temperature-control apparatus and method
CN112379704A (en) * 2020-10-29 2021-02-19 北京京仪自动化装备技术有限公司 Temperature control system for semiconductor production
CN112817347A (en) * 2020-12-25 2021-05-18 北京京仪自动化装备技术有限公司 Rapid temperature rise and drop system and control method thereof
CN112817347B (en) * 2020-12-25 2022-05-24 北京京仪自动化装备技术股份有限公司 Rapid temperature rise and drop system and control method thereof
CN112856841A (en) * 2021-02-07 2021-05-28 爱美达(上海)热能系统有限公司 Temperature control device

Also Published As

Publication number Publication date
CN103294086B (en) 2015-06-17

Similar Documents

Publication Publication Date Title
KR101109730B1 (en) Chiller apparatus for semiconductor process and Method for controlling temperature in the same
CN103294086A (en) Constant-temperature liquid circulating device and temperature-controlling method
US11137178B2 (en) Cold energy recovery-type variable-capacity air-source heat pump system
CN106051981A (en) Refrigerating method based on double-temperature drive and double cold sources
CN105890268A (en) Cooling system capable of defrosting
EP2751499B1 (en) Refrigeration system and refrigeration method providing heat recovery
CN103868265B (en) A kind of attemperating unit with cold-storage/heat accumulation function
CN102721225B (en) High-temperature heat pump and using method thereof
KR100818760B1 (en) Cooling and heating combined system using heat pump of parallel coupled type
CN205939837U (en) Air conditioning system between row based on mix cold source
CN109341121B (en) Refrigeration system and control method
JP2010133689A (en) Invertor energy-saving temperature control device for refrigerating device
CN108088103B (en) Air conditioning system and control method
GB2578533A (en) Refrigeration cycle device
JP2011226680A (en) Cooling water producing facility
CN208952511U (en) A kind of constant pressure water supply type industry cooling water circulation system that band bypass is adjusted
CN203501539U (en) Combined cooling heating and power air conditioning system
CN200975808Y (en) Frequency converting energy-saving heat pump freezing air-conditioner
CN206387143U (en) A kind of accurate heat-exchange system of the integral frozen water machine of two temperature
CN206176730U (en) Special safe energy -conserving air of circuit board can firing equipment
CN101435629B (en) Screw type cold source hot water machine unit
CN201463403U (en) Thermostatic industrial chiller
CN205002379U (en) Ultra -low temperature single heat formula heat pump water heater
CN104279789B (en) A kind of trilogy supply air-conditioning system
CN109341122A (en) A kind of refrigeration system and control method

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd

Address before: 201203 Pudong New Area East Road, No. 1525, Shanghai

Patentee before: Shanghai Micro Electronics Equipment Co., Ltd.