CN110187486A - It is a kind of to observe clearly heavy duty detergent chip detecting equipment - Google Patents

It is a kind of to observe clearly heavy duty detergent chip detecting equipment Download PDF

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Publication number
CN110187486A
CN110187486A CN201910366384.1A CN201910366384A CN110187486A CN 110187486 A CN110187486 A CN 110187486A CN 201910366384 A CN201910366384 A CN 201910366384A CN 110187486 A CN110187486 A CN 110187486A
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CN
China
Prior art keywords
lens barrel
chip
rotating casing
heavy duty
detecting equipment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
CN201910366384.1A
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Chinese (zh)
Inventor
刘殿坤
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Nanning Juzhong Information Technology Consulting Co Ltd
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Nanning Juzhong Information Technology Consulting Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nanning Juzhong Information Technology Consulting Co Ltd filed Critical Nanning Juzhong Information Technology Consulting Co Ltd
Priority to CN201910366384.1A priority Critical patent/CN110187486A/en
Publication of CN110187486A publication Critical patent/CN110187486A/en
Withdrawn legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B08CLEANING
    • B08BCLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00Cleaning by methods involving the use of air flow or gas flow
    • B08B5/02Cleaning by the force of jets, e.g. blowing-out cavities
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/0004Microscopes specially adapted for specific applications
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/24Base structure
    • G02B21/26Stages; Adjusting means therefor
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/34Microscope slides, e.g. mounting specimens on microscope slides

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  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Clearly heavy duty detergent chip detecting equipment is observed the present invention relates to a kind of, including pedestal, objective table, lens barrel and handel, it further include dedusting mechanism and jacking mechanism, the dedusting mechanism includes annular groove, rotating casing, first driving assembly, appendix, air pump, two gas blow pipes and at least two rotating wheels, the jacking mechanism includes the second driving assembly, cylindricality mounting hole, top plate, support rod, drive rod, two supporting sleeves and two elevating levers, first driving assembly includes first motor, gear and annular rack, second driving assembly includes the second motor, screw rod, drive block and slide bar, the observation is clearly in heavy duty detergent chip detecting equipment, chip is jacked up by jacking mechanism, improve the convenient degree that operator picks up chip, improve microscopical practicability, it can be will fall off by dedusting mechanism Dust on chip is blown off, and reduces the quantity of dust on chip, improves the clarity of micro- sem observation chip.

Description

It is a kind of to observe clearly heavy duty detergent chip detecting equipment
Technical field
The present invention relates to chip detecting equipment fields, in particular to a kind of to observe clearly heavy duty detergent chip detecting equipment.
Background technique
Microscope is a kind of optical instrument being made of the combination of a lens or several lens, is that the mankind enter the atomic time The mark in generation is mainly used for amplifying the instrument that small items can be seen as human eye.Microscope spectroscopy microscope and Electron microscope, optical microscopy are initiated in the Jansen father and son by Holland in 1590, and present optical microscopy can be object Body amplifies 1600 times, and the least limit of resolution reaches the 1/2 of wavelength, and domestic length of mechanical tube of microscopic degree is usually 160 millimeters, micro- The one kind of mirror as chip detecting equipment plays an important role in the detection of chip appearance.
The microscope of the prior art, due to thickness and volume all very littles of chip, causes to operate when detection chip Personnel are difficult to remove chip from objective table, reduce microscopical practicability, and moreover, the microscope of the prior art exists During use, dust is easy to fall on chip, then dust block effect under, reduce micro- sem observation chip Clarity.
Summary of the invention
The technical problem to be solved by the present invention is for overcome the deficiencies in the prior art, it is clearly high to provide a kind of observation Acting type chip detecting equipment.
The technical solution adopted by the present invention to solve the technical problems is: clearly the detection of efficient cake core is set for a kind of observation It is standby, including including pedestal, objective table, lens barrel and handel, the lens barrel is connect by handel with pedestal, the objective table setting exists Between pedestal and lens barrel, the axis of the lens barrel is vertical with objective table, and the objective table is fixedly connected with handel, further includes dedusting The side of the close objective table of lens barrel is arranged in mechanism and jacking mechanism, the dedusting mechanism, and the jacking mechanism setting is carrying On object platform;
The dedusting mechanism include annular groove, rotating casing, the first driving assembly, appendix, air pump, two gas blow pipes and At least two rotating wheels, the annular groove are arranged on the periphery of one end of the close objective table of lens barrel, the annular groove and turn Dynamic casing is coaxially disposed with lens barrel, and the inside of rotating casing is arranged in one end of the close objective table of the lens barrel, each to rotate It takes turns on the inner wall that the axis of rotating casing is circumferentially uniformly hinged on rotating casing, each rotating wheel is arranged at the interior of annular groove The side of rotating casing is arranged in portion, first driving assembly, and the side of rotating casing, two air blowings are arranged in the air pump Pipe is separately positioned on the two sides of one end of the close objective table of rotating casing, and two gas blow pipes pass through appendix and air pump connects It connects;
The jacking mechanism includes the second driving assembly, cylindricality mounting hole, top plate, support rod, drive rod, two support sleeves Pipe and two elevating levers, the cylindricality mounting hole and lens barrel are coaxially disposed, and the cylindricality mounting hole is arranged on objective table, described The status of top plate is circle, and the top plate is vertical with the axis of lens barrel, and the close lens barrel of cylindricality mounting hole is arranged in the top plate One end inside, the support rod is parallel with top plate, and the support rod is arranged in the inside of the other end of cylindricality mounting hole, two A supporting sleeve is arranged on support rod, and the axis of the supporting sleeve is vertical with top plate, and two supporting sleeves are about cylindricality The axisymmetrical of mounting hole is arranged, and the elevating lever and supporting sleeve are coaxially disposed, and two elevating levers are each passed through two supports Casing, the elevating lever are slidably connected with supporting sleeve, and one end of two elevating levers is fixedly connected with top plate, two elevating levers The other end be fixedly connected respectively with the both ends of drive rod, second driving assembly is arranged on support rod, and described second drives Dynamic component is connect with drive rod.
Preferably, in order to improve microscopical the degree of automation, the handel is equipped with control panel, the control plane The inside of plate is equipped with processor, and the control panel is equipped at least two control buttons, and each control button is electric with processor Connection.
Preferably, first driving assembly includes first motor, gear and ring in order to provide power to rotating casing The side of rotating casing is arranged in shape rack gear, the first motor, and the first motor is connect with gear drive, the annular tooth Item and lens barrel are coaxially disposed, and the annular rack is circumferentially arranged on the periphery of lens barrel, and the annular rack is engaged with gear.
Preferably, in order to provide power to top plate, second driving assembly includes the second motor, screw rod, drive block And slide bar, it is fixedly connected in the middle part of the drive block and drive rod, the inside of the drive block is equipped with through-hole, the slide bar and rises Drop bar is parallel, and one end of the slide bar is fixedly connected with support rod, and the slide bar passes through drive block, and the drive block and slide bar are sliding Dynamic connection, the both ends of the screw rod are equipped with bearing, and the screw rod is parallel with slide bar, the both ends of the screw rod pass through bearing and The both ends of slide bar connect, and the screw rod passes through drive block, and the screw rod is threadedly coupled with drive block, and the second motor setting exists On support rod, second motor is connect with screw rod transmission.
Preferably, being coated with lubricating grease on the screw rod to improve drive block mobile smooth degree.
Preferably, in order to improve the accuracy to the control of the second motor rotational angle, second motor is servo electricity Machine.
Preferably, in order to reduce the abrasion of top plate, one end of the close top plate of the supporting sleeve is equipped with cushion.
Preferably, in order to reduce the probability that rotating wheel skids, the periphery of the rotating wheel is equipped with anti-skid chequer.
Preferably, in order to reduce the probability that dust enters between rotating casing and lens barrel, the both ends of the rotating casing It is equipped with sealing ring, the rotating casing is tightly connected by sealing ring and lens barrel.
Preferably, circumferentially uniformly dividing on the inner wall of the rotating casing to improve the smooth degree of rotating casing rotation At least two balls are furnished with, the rotating casing is rolled by ball and lens barrel and connected.
It, can be with by jacking mechanism the invention has the advantages that the observation is clearly in heavy duty detergent chip detecting equipment The chip being placed on objective table is jacked up, then improves the convenient degree that operator picks up chip, improves microscopical reality With property, compared with existing jacking mechanism, the jacking mechanism structure is simple, reduces the quantity of the mechanism-trouble point, reduces this The failure rate of mechanism moreover can will fall off the dust on chip by dedusting mechanism and blow off, and reduce grey on chip The quantity of dirt improves the clarity of micro- sem observation chip, and compared with existing dedusting mechanism, which passes through rotating wheel Rolling friction between ball and lens barrel reduces the frictional force between lens barrel and rotating casing, improves rotating casing and turns Dynamic smooth degree.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is the structural schematic diagram for observing clearly heavy duty detergent chip detecting equipment of the invention;
Fig. 2 is the structural schematic diagram for observing the clearly dedusting mechanism of heavy duty detergent chip detecting equipment of the invention;
Fig. 3 is that clearly the lens barrel of heavy duty detergent chip detecting equipment and the connection structure of rotating casing are shown for observation of the invention It is intended to;
Fig. 4 is the structural schematic diagram for observing the clearly jacking mechanism of heavy duty detergent chip detecting equipment of the invention;
In figure: 1. annular racks, 2. handels, 3. pedestals, 4. objective tables, 5. gas blow pipes, 6. appendixs, 7. rotating casings, 8. air pump, 9. lens barrels, 10. gears, 11. first motors, 12. rotating wheels, 13. balls, 14. annular grooves, 15. top plates, 16. liftings Bar, 17. supporting sleeves, 18. second motors, 19. support rods, 20. drive rods, 21. drive blocks, 22. screw rods, 23. slide bars, 24. Cylindricality mounting hole.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.These attached drawings are simplified schematic diagram, only with Illustration illustrates basic structure of the invention, therefore it only shows the composition relevant to the invention.
As shown in Figure 1, a kind of observation clearly heavy duty detergent chip detecting equipment, including pedestal 3, objective table 4,9 and of lens barrel Handel 2, the lens barrel 9 are connect by handel 2 with pedestal 3, and the objective table 4 is arranged between pedestal 3 and lens barrel 9, the mirror The axis of cylinder 9 is vertical with objective table 4, and the objective table 4 is fixedly connected with handel 2, further includes dedusting mechanism and jacking mechanism, institute The side that the close objective table 4 of lens barrel 9 is arranged in dedusting mechanism is stated, the jacking mechanism is arranged on objective table 4;
The chip being placed on objective table 4 can be jacked up by jacking mechanism, then improve operator and pick up chip Convenient degree, improve microscopical practicability, moreover, the dust on chip can be will fall off by dedusting mechanism and blown It falls, reduces the quantity of dust on chip, improve the clarity of micro- sem observation chip;
As Figure 2-3, the dedusting mechanism include annular groove 14, rotating casing 7, the first driving assembly, appendix 6, The one of the close objective table 4 of lens barrel 9 is arranged in 8, two gas blow pipes 5 of air pump and at least two rotating wheels 12, the annular groove 14 On the periphery at end, the annular groove 14 and rotating casing 7 are coaxially disposed with lens barrel 9, the close objective table 4 of the lens barrel 9 The inside of rotating casing 7 is arranged in one end, and each rotating wheel 12 is circumferentially uniformly hinged on rotating casing around the axis of rotating casing 7 On 7 inner wall, each rotating wheel 12 is arranged at the inside of annular groove 14, and rotating casing 7 is arranged in first driving assembly The side of rotating casing 7 is arranged in side, the air pump 8, and two gas blow pipes 5 are separately positioned on the close loading of rotating casing 7 The two sides of one end of platform 4, two gas blow pipes 5 are connect by appendix 6 with air pump 8;
In supporting role of the annular groove 14 to each rotating wheel 12, the stability of rotating casing 7 is improved, while in rotating wheel Under rolling friction effect between 12 and the inner wall of annular groove 14, the smooth degree of the rotation of rotating casing 7, operator's control are improved Microscope processed provides power by the first driving assembly, and driving rotating casing 7 is rotated around lens barrel 9, then passes through rotating casing 7 It drives gas blow pipe 5 to rotate, expands the air blowing range of gas blow pipe 5, later under the action of air pump 8, air-flow is made by appendix 6 It is blown out from gas blow pipe 5, then the dust on chip is removed by air-flow, improve the clarity of micro- sem observation chip;
As shown in figure 4, the jacking mechanism include the second driving assembly, cylindricality mounting hole 24, top plate 15, support rod 19, 20, two supporting sleeves 17 of drive rod and two elevating levers 16, the cylindricality mounting hole 24 are coaxially disposed with lens barrel 9, the column Shape mounting hole 24 is arranged on objective table 4, and the status of the top plate 15 is circle, and the top plate 15 is vertical with the axis of lens barrel 9, The inside of one end of the close lens barrel 9 of cylindricality mounting hole 24 is arranged in the top plate 15, and the support rod 19 is parallel with top plate 15, The inside of the other end of cylindricality mounting hole 24 is arranged in the support rod 19, and two supporting sleeves 17 are arranged at support rod 19 On, the axis of the supporting sleeve 17 is vertical with top plate 15, axisymmetrical of two supporting sleeves 17 about cylindricality mounting hole 24 Setting, the elevating lever 16 are coaxially disposed with supporting sleeve 17, and two elevating levers 16 are each passed through two supporting sleeves 17, described Elevating lever 16 is slidably connected with supporting sleeve 17, and one end of two elevating levers 16 is fixedly connected with top plate 15, two elevating levers 16 other end is fixedly connected with the both ends of drive rod 20 respectively, and second driving assembly is arranged on support rod 19, described Second driving assembly is connect with drive rod 20;
When operator needs to pick up chip, power is provided by the second driving assembly, is driven by drive rod 20 Dynamic elevating lever 16 rises along supporting sleeve 17, then drives inside liter of the top plate 15 from cylindricality mounting hole 24 by elevating lever 16 It rises, is then jacked up chip by top plate 15, improve the convenient degree that operator picks up chip.
Preferably, in order to improve microscopical the degree of automation, the handel 2 is equipped with control panel, the control The inside of panel is equipped with processor, and the control panel is equipped at least two control buttons, and each control button is and processor Electrical connection;
Operator sends control signal to processor by control button, after processor receives control signal, Each component operation of microscope is controlled by processor, then improves microscopical the degree of automation.
As shown in figure 3, first driving assembly includes first motor 11, gear 10 and annular rack 1, first electricity The side of rotating casing 7 is arranged in machine 11, and the first motor 11 is sequentially connected with gear 10, the annular rack 1 and lens barrel 9 Coaxial arrangement, the annular rack 1 is circumferential to be arranged on the periphery of lens barrel 9, and the annular rack 1 is engaged with gear 10;
It drives gear 10 to rotate by first motor 11, then under the interaction of gear 10 and annular rack 1, makes gear 10 rotate along annular rack 1, then drive rotating casing 7 to rotate by gear 10.
As shown in figure 4, second driving assembly includes the second motor 18, screw rod 22, drive block 21 and slide bar 23, it is described Drive block 21 is fixedly connected with the middle part of drive rod 20, and the inside of the drive block 21 is equipped with through-hole, the slide bar 23 and lifting Bar 16 is parallel, and one end of the slide bar 23 is fixedly connected with support rod 19, and the slide bar 23 passes through drive block 21, the drive block 21 are slidably connected with slide bar 23, and the both ends of the screw rod 22 are equipped with bearing, and the screw rod 22 is parallel with slide bar 23, the screw rod 22 both ends pass through bearing and connect with the both ends of slide bar 23, and the screw rod 22 passes through drive block 21, the screw rod 22 and driving Block 21 is threadedly coupled, and second motor 18 is arranged on support rod 19, and second motor 18 is sequentially connected with screw rod 22;
Under the supporting role of support rod 19, the stability of the second motor 18 is improved, silk is driven by the second motor 18 Bar 22 rotates, then drives drive block 21 to move along slide bar 23 by screw rod 22, then drives drive rod 20 to go up and down by drive block.
Preferably, being coated with lubricating grease on the screw rod 22 to improve the mobile smooth degree of drive block 21;
The frictional force between screw rod 22 and drive block 21 is reduced by lubricating grease, then improves the suitable of the movement of drive block 21 Smooth degree.
Preferably, in order to improve the accuracy to the control of 18 rotational angle of the second motor, second motor 18 is to watch Take motor.
Preferably, in order to reduce the abrasion of top plate 15, one end of the close top plate 15 of the supporting sleeve 17 is equipped with slow Punching pad;
By the buffer function of cushion, the impact force that supporting sleeve 17 generates top plate 15 is reduced, then reduces top The abrasion of plate 15.
Preferably, in order to reduce the probability that rotating wheel 12 skids, the periphery of the rotating wheel 12 is equipped with anti-skidding Line;
The frictional force between rotating wheel 12 and the inner wall of annular groove 14 is increased by anti-skid chequer, then reduces rotating wheel 12 The probability to skid.
Preferably, in order to reduce the probability that dust enters between rotating casing 7 and lens barrel 9, the two of the rotating casing 7 End is equipped with sealing ring, and the rotating casing 7 is tightly connected by sealing ring and lens barrel 9;
The gap between rotating casing 7 and lens barrel 9 is reduced by sealing ring, then reduces dust and enters rotating casing 7 With the probability between lens barrel 9.
Preferably, circumferential direction is uniform on the inner wall of the rotating casing 7 in order to improve the smooth degree of the rotation of rotating casing 7 At least two balls 13 are distributed with, the rotating casing 7 is rolled by ball 13 and lens barrel 9 and connected;
The sliding friction between rotating casing 7 and lens barrel 9 is converted into rolling friction by ball 13, then reduces rotation Frictional force between casing 7 and lens barrel 9 then improves the smooth degree of the rotation of rotating casing 7.
Operator controls microscope, provides power by the first driving assembly, driving gas blow pipe 5 rotates, expands and blow The air blowing range of tracheae 5 blows out air-flow from gas blow pipe 5 by appendix 6, then passes through gas later under the action of air pump 8 Stream removes the dust on chip, the clarity of micro- sem observation chip is improved, when operator needs to pick up chip It waits, provides power by the second driving assembly, driving top plate 15 rises from the inside of cylindricality mounting hole 24, then will by top plate 15 Chip jacks up, and improves the convenient degree that operator picks up chip.
Compared with prior art, which can will be put clearly in heavy duty detergent chip detecting equipment by jacking mechanism The chip set on objective table 4 jacks up, then improves the convenient degree that operator picks up chip, improve microscopical practical Property, compared with existing jacking mechanism, the jacking mechanism structure is simple, reduces the quantity of the mechanism-trouble point, reduces the machine The failure rate of structure moreover can will fall off the dust on chip by dedusting mechanism and blow off, reduce dust on chip Quantity, improve the clarity of micro- sem observation chip, compared with existing dedusting mechanism, the dedusting mechanism pass through rotating wheel 12 Rolling friction between ball 13 and lens barrel 9 reduces the frictional force between lens barrel 9 and rotating casing 7, improves turning set The smooth degree that pipe 7 rotates.
Taking the above-mentioned ideal embodiment according to the present invention as inspiration, through the above description, relevant staff is complete Various changes and amendments can be carried out without departing from the scope of the technological thought of the present invention' entirely.The technology of this invention Property range is not limited to the contents of the specification, it is necessary to which the technical scope thereof is determined according to the scope of the claim.

Claims (10)

1. a kind of observation clearly heavy duty detergent chip detecting equipment, including pedestal (3), objective table (4), lens barrel (9) and handel (2), the lens barrel (9) connect by handel (2) with pedestal (3), the objective table (4) be arranged pedestal (3) and lens barrel (9) it Between, the axis of the lens barrel (9) is vertical with objective table (4), and the objective table (4) is fixedly connected with handel (2), and feature exists In further including dedusting mechanism and jacking mechanism, the dedusting mechanism is arranged in the side of the close objective table (4) of lens barrel (9), institute Jacking mechanism is stated to be arranged on objective table (4);
The dedusting mechanism includes annular groove (14), rotating casing (7), the first driving assembly, appendix (6), air pump (8), two A gas blow pipe (5) and at least two rotating wheels (12), the close objective table (4) of the annular groove (14) setting in lens barrel (9) On the periphery of one end, the annular groove (14) and rotating casing (7) are coaxially disposed with lens barrel (9), the lens barrel (9) it is close In the inside of rotating casing (7), each rotating wheel (12) is circumferential around the axis of rotating casing (7) for one end setting of objective table (4) It is uniformly hinged on the inner wall of rotating casing (7), each rotating wheel (12) is arranged at the inside of annular groove (14), and described first drives In the side of rotating casing (7), the air pump (8) is arranged in the side of rotating casing (7), two gas blow pipes for dynamic component setting (5) two sides of one end of the close objective table (4) of rotating casing (7) are separately positioned on, two gas blow pipes (5) pass through appendix (6) it is connect with air pump (8);
The jacking mechanism includes the second driving assembly, cylindricality mounting hole (24), top plate (15), support rod (19), drive rod (20), two supporting sleeves (17) and two elevating levers (16), the cylindricality mounting hole (24) and lens barrel (9) are coaxially disposed, institute It states cylindricality mounting hole (24) to be arranged on objective table (4), the status of the top plate (15) is circle, the top plate (15) and lens barrel (9) axis is vertical, the inside of one end of close lens barrel (9) of top plate (15) setting in cylindricality mounting hole (24), described Support rod (19) is parallel with top plate (15), and the support rod (19) setting is in the inside of the other end of cylindricality mounting hole (24), and two A supporting sleeve (17) is arranged on support rod (19), and the axis of the supporting sleeve (17) is vertical with top plate (15), and two Supporting sleeve (17) is arranged about the axisymmetrical of cylindricality mounting hole (24), and the elevating lever (16) and supporting sleeve (17) are coaxial Setting, two elevating levers (16) are each passed through two supporting sleeves (17), and the elevating lever (16) and supporting sleeve (17) are slided Connection, one end of two elevating levers (16) is fixedly connected with top plate (15), the other end of two elevating levers (16) respectively with biography The both ends of lever (20) are fixedly connected, and second driving assembly is arranged on support rod (19), second driving assembly with Drive rod (20) connection.
2. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that on the handel (2) Equipped with control panel, the inside of the control panel is equipped with processor, and the control panel is equipped at least two control buttons, Each control button is electrically connected with processor.
3. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that first driving group Part includes first motor (11), gear (10) and annular rack (1), and the first motor (11) is arranged in rotating casing (7) Side, the first motor (11) and gear (10) are sequentially connected, and the annular rack (1) and lens barrel (9) are coaxially disposed, described Annular rack (1) is circumferentially arranged on the periphery of lens barrel (9), and the annular rack (1) is engaged with gear (10).
4. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that second driving group Part includes the second motor (18), screw rod (22), drive block (21) and slide bar (23), the drive block (21) and drive rod (20) Middle part is fixedly connected, and the inside of the drive block (21) is equipped with through-hole, and the slide bar (23) is parallel with elevating lever (16), the cunning One end of bar (23) is fixedly connected with support rod (19), the slide bar (23) pass through drive block (21), the drive block (21) with Slide bar (23) is slidably connected, and the both ends of the screw rod (22) are equipped with bearing, and the screw rod (22) is parallel with slide bar (23), described The both ends of screw rod (22) pass through bearing and connect with the both ends of slide bar (23), and the screw rod (22) passes through drive block (21), described Screw rod (22) is threadedly coupled with drive block (21), and second motor (18) is arranged on support rod (19), second motor (18) it is sequentially connected with screw rod (22).
5. as claimed in claim 4 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that on the screw rod (22) It is coated with lubricating grease.
6. as claimed in claim 4 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that second motor It (18) is servo motor.
7. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that the supporting sleeve (17) one end of close top plate (15) is equipped with cushion.
8. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that the rotating wheel (12) Periphery be equipped with anti-skid chequer.
9. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that the rotating casing (7) both ends are equipped with sealing ring, and the rotating casing (7) is tightly connected by sealing ring and lens barrel (9).
10. as described in claim 1 observe clearly heavy duty detergent chip detecting equipment, which is characterized in that the rotating casing (7) it is circumferentially evenly distributed on inner wall at least two balls (13), the rotating casing (7) passes through ball (13) and lens barrel (9) connection is rolled.
CN201910366384.1A 2019-05-05 2019-05-05 It is a kind of to observe clearly heavy duty detergent chip detecting equipment Withdrawn CN110187486A (en)

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CN201910366384.1A CN110187486A (en) 2019-05-05 2019-05-05 It is a kind of to observe clearly heavy duty detergent chip detecting equipment

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CN107413769A (en) * 2017-05-31 2017-12-01 江苏芯力特电子科技有限公司 A kind of device for chip dedusting
CN108663790A (en) * 2018-07-17 2018-10-16 章慧妍 A kind of light microscope image camera lens
CN109037092A (en) * 2018-07-06 2018-12-18 江苏纳沛斯半导体有限公司 A kind of wafer visual inspection machine
CN109604822A (en) * 2019-01-28 2019-04-12 广州百士臣科技有限公司 A kind of laser engraving equipment of the high reliablity with dust reduction capability

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201962357U (en) * 2010-12-27 2011-09-07 中芯国际集成电路制造(上海)有限公司 Chemical vapor deposition equipment
JP6099967B2 (en) * 2012-12-21 2017-03-22 Ntn株式会社 Foreign matter removing apparatus and foreign matter removing method
CN106424006A (en) * 2015-08-11 2017-02-22 胡洋 Double-ring rotary spray washing device for multi-head mold
WO2017106648A1 (en) * 2015-12-16 2017-06-22 Robovent Products Group, Inc. Minimum floor space commercial air filter
CN107413769A (en) * 2017-05-31 2017-12-01 江苏芯力特电子科技有限公司 A kind of device for chip dedusting
CN109037092A (en) * 2018-07-06 2018-12-18 江苏纳沛斯半导体有限公司 A kind of wafer visual inspection machine
CN108663790A (en) * 2018-07-17 2018-10-16 章慧妍 A kind of light microscope image camera lens
CN109604822A (en) * 2019-01-28 2019-04-12 广州百士臣科技有限公司 A kind of laser engraving equipment of the high reliablity with dust reduction capability

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Application publication date: 20190830