CN110174781B - Micro-ring electro-optical switch array device with net structure - Google Patents

Micro-ring electro-optical switch array device with net structure Download PDF

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CN110174781B
CN110174781B CN201910372211.0A CN201910372211A CN110174781B CN 110174781 B CN110174781 B CN 110174781B CN 201910372211 A CN201910372211 A CN 201910372211A CN 110174781 B CN110174781 B CN 110174781B
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ring
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CN110174781A (en
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汪玉海
王春旭
秦政坤
宋明星
张永玲
王国峰
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Jilin Normal University
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    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/0305—Constructional arrangements
    • G02F1/0316—Electrodes
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
    • G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure

Abstract

The invention relates toThe array device is composed of n+1 horizontal channels, N vertical channels and 2N micro-rings, each array unit contains two micro-rings, and the radiuses of all micro-rings are equal to R=R 1 ＝R 2 ＝…＝R N Length of main channel l=2l 1 +(N‑1)L 3 Distance L between output port of ith vertical channel and coupling point adjacent thereto 5i ＝L 1 +(N‑i)L 2 - (r+d+w) distance L between output port of ith horizontal channel and coupling point adjacent thereto 8i ＝L 1 +(N‑i)L 3 Plus (R+d+w), electrodes are only added on the micro-ring, and no electrode is added on the channel; the structure of the micro-ring waveguide is sequentially provided with an upper electrode, an upper buffer layer, a waveguide core layer, a lower buffer layer and a lower electrode from top to bottom, wherein only the waveguide core layer is made of polymer electro-optic material, the refractive index of the core layer electro-optic material can be changed due to the working voltage U applied to the upper electrode and the lower electrode, and the refractive index of the dielectric layers of other non-electro-optic materials is not changed along with the working voltage. The device has the filtering function and the switching function, and as the resonant light wave resonates twice in the array unit, the array structure device can obtain lower non-resonant light and crosstalk relative to one resonance.

Description

Micro-ring electro-optical switch array device with net structure
Technical Field
The invention relates to an electro-optical switching device, belongs to an optical waveguide device, in particular to a mesh-structure micro-ring electro-optical switching array device which is applied to an optical communication system.
Background
With the rapid development of ultra-high-speed optical information processing technology, the demand of people for bandwidth is increasing. Communication network nodes typically have a large number of ports or wavelength channels, which requires a well-behaved, inexpensive optical switching device. The optical switch is mainly divided into a mechanical optical switch, a thermo-optical switch, an electro-optical switch, an acousto-optic switch, an all-optical switch and the like. The electro-optical switch has faster switching speed and shorter response time than other optical switches, and has very wide application in optical communication systems.
The micro-ring resonator has the advantages of compact structure, high integration level, small insertion loss, low crosstalk and the like, and has wide application in the aspects of optical signal processing, filtering, wavelength division multiplexing, demultiplexing, switching, laser and the like. In addition, the resonance of the micro-ring resonator does not need a cavity surface or a grating to provide optical feedback, so that the micro-ring resonator is beneficial to integration with other optoelectronic components.
Compared with other inorganic electro-optic materials, the polarized polymer electro-optic material has the excellent characteristics of high electro-optic coefficient, easily-adjustable refractive index, short response time, high response speed, low switching voltage, good molding performance and the like, and becomes an ideal material for manufacturing electro-optic switches and electro-optic modulators. In the process of manufacturing the photoelectronic device, high-temperature heating is not needed, and the processes such as spin coating, reactive ion etching and the like are adopted, so that the method has the advantages of simple process, easiness in integration, low cost and the like, the process difficulty and the manufacturing cost can be greatly reduced, and the cost performance and the market competitiveness of the product are improved.
The micro-ring electro-optical switch with the core layer material being made of polymer electro-optical material has short switching time because the micro-ring has small radius and the optical path of light transmitted in the micro-ring for one circle is short. The switching time is much smaller than for other configurations of electro-optical switches such as polymer-direction-coupled electro-optical switches and MZI-type switches. Therefore, the polymer micro-ring structure is expected to become a high-performance commercial electro-optical switch.
The electro-optical switch formed by the single-ring resonator has the Lorentz spectrum response of a convex shape, the non-resonant light is strong, and the crosstalk between channels is large, which affects the switching performance of the device to a certain extent.
Disclosure of Invention
The invention aims to solve the problems in the prior art and provide a mesh-structure micro-ring electro-optical switch array device which is a micro-ring resonant filter array when no external voltage is applied; when voltage is applied, the device is a micro-ring resonance electro-optical switch array; the array device has both a filtering function and a switching function. Because the resonant light wave resonates twice in the array unit, the array structure device can obtain lower non-resonant light and crosstalk relative to one resonance.
The invention aims at realizing the aim, namely a mesh-structure micro-ring electro-optical switch array device, which consists of n+1 horizontal channels, N vertical channels and 2N micro-rings, wherein each array unit contains two micro-rings, and the radius of each micro-ring is equal to R=R 1 ＝R 2 ＝…＝R N Length of main channel l=2l 1 +(N-1)L 3 Distance L between output port of ith vertical channel and coupling point adjacent thereto 5i ＝L 4 +(N-i)L 2 - (r+d+w) distance L between output port of ith horizontal channel and coupling point adjacent thereto 8i ＝L 1 +(N-i)L 3 ++ (R+d+w), where L 1 L is the distance from the main channel port to the adjacent vertical channel 3 For the distance between two adjacent vertical channels, L 2 Is the distance between every two adjacent horizontal channels, L 4 The distance from the vertical channel port to the horizontal channel adjacent thereto is d, the distance between the channel and the micro-ring, and w, the width of the waveguide core.
The electrode is only added on the micro-ring, and no electrode is added on the channel; the structure of the micro-ring waveguide is as follows from top to bottom in sequence: the upper electrode, the upper buffer layer, the waveguide core layer, the lower buffer layer and the lower electrode, wherein only the waveguide core layer is made of polymer electro-optic material, the operating voltage U applied to the upper electrode and the lower electrode can cause the refractive index change of the core layer electro-optic material, and the refractive index of the dielectric layers of other non-electro-optic materials does not change along with the operating voltage.
When no external working voltage is applied to the micro-ring in the column unit, signal light with different wavelengths is input from the input port of the main channel and continuously coupled into the first micro-ring of the first array unit, in the coupling process, only signal light with a specific wavelength meets the resonance condition of the micro-ring and resonates in the micro-ring, the resonant signal is coupled into the second micro-ring of the first array unit through the vertical channel and resonates again, the resonant signal is output from the output port of the first horizontal channel (the channel below the main channel), the output power of the output light with the resonant wavelength is the maximum, and the output power of the ports of other horizontal channels is the minimum, so that the filtering function is completed.
When the micro-ring in the i-column unit has an externally applied working voltage, the refractive index of the core electro-optic material changes, so that the resonance condition changes, and according to the micro-ring resonance principle, the output optical power is redistributed, when the working voltage U takes a proper value, the output optical power of the (i+1) -th horizontal channel can be maximized, and the output optical power of the corresponding ports of other horizontal channels is minimized, and at the moment, the corresponding working voltage U is defined as a switching voltage Us. By changing the value of i from 1 to N and sequentially applying the switching voltage Us to the micro-ring in the previous i columns of units, the switching function of n+1 horizontal channels can be completed.
The invention has the advantages and technical effects that: the array device has both the filtering function and the switching function. Because the resonant light wave resonates twice in the array unit, the array structure device can obtain lower non-resonant light and crosstalk relative to one resonance.
Drawings
Fig. 1 is a schematic perspective view of a device of the present invention.
Fig. 2 is a schematic plan view of the device of fig. 1 according to the present invention.
Fig. 3 is a schematic diagram of the structure of one column of cells in fig. 2 of the device of the present invention.
FIG. 4 is a cross-sectional view of the micro-ring waveguide structure A-A of FIG. 3 of the device of the present invention.
Fig. 5 is a cross-sectional view of the channel waveguide structure B-B of fig. 3 of the device of the present invention.
FIG. 6 is a graph of the output spectra of the horizontal channels of the present invention without an applied operating voltage.
Fig. 7 is a graph showing the variation of the output optical power of each horizontal channel with the operating voltage under different operating modes according to the present invention.
Fig. 8 is a graph of the output spectrum of each horizontal channel at the switching voltage according to the present invention.
Detailed Description
The following detailed description of specific embodiments of the invention refers to the accompanying drawings:
as shown in fig. 1 and 2: a network micro-ring electro-optical switch array device is composed of N+1 horizontal channels, N vertical channels and 2N micro-rings, all of which have equal radius of R=R 1 ＝R 2 ＝…＝R N Each array unit contains two micro-rings (see fig. 3), and the length of the main channel l=2l 1 +(N-1)L 3 Distance L between output port of ith vertical channel and coupling point adjacent thereto 5i ＝L 4 +(N-i)L 2 - (r+d+w) distance L between output port of ith horizontal channel and coupling point adjacent thereto 8i ＝L 1 +(N-i)L 3 ++ (R+d+w), where L 1 L is the distance from the main channel end to the adjacent vertical channel 3 For the distance between two adjacent vertical channels, L 2 Is the distance between every two adjacent horizontal channels. L (L) 4 The distance from the vertical channel port to the horizontal channel adjacent thereto is d, the distance between the channel and the micro-ring, and w, the width of the waveguide core.
The structure of the micro-ring waveguide is as follows from top to bottom in sequence: the upper electrode, the upper buffer layer, the waveguide core layer, the lower buffer layer and the lower electrode, wherein only the waveguide core layer is made of polymer electro-optic material (see figure 4), the refractive index of the core layer electro-optic material can be changed by the working voltage U applied to the upper electrode and the lower electrode, and the refractive index of the dielectric layers of other non-electro-optic materials is not changed along with the working voltage. The structure of the channel waveguide is as follows from top to bottom: an upper buffer layer, a waveguide core layer, a lower buffer layer (see fig. 5).
When no external working voltage is applied to the micro-ring in the column unit, signal light with different wavelengths is input from the input port of the main channel and continuously coupled into the first micro-ring of the first array unit, in the coupling process, only signal light with a specific wavelength meets the resonance condition of the micro-ring and resonates in the micro-ring, the resonant signal is coupled into the second micro-ring of the first array unit through the vertical channel and resonates again, the resonant signal is output from the output port of the first horizontal channel (the channel below the main channel), the output power of the output light with the resonant wavelength is the maximum, and the output power of the ports of other horizontal channels is the minimum, so that the filtering function is completed.
When an external working voltage is applied to the micro-ring in the unit of the row i, the refractive index of the core layer electro-optic material changes. Set beta 0 To the mode propagation constant, beta, of the microring without an external voltage applied U ＝β 0 +Δβ is the mode propagation constant of the micro-ring when an external voltage is applied, and Δβ is the amount of change in the mode propagation constant caused by the refractive index of the electro-optic material when an external voltage is applied. When light is transmitted in the micro-ring, the resonance equation 2pi_rβ=2pi_m needs to be satisfied. Under the external working voltage, the mode propagation constant is changed to change the resonance condition, and according to the micro-ring resonance principle, the output optical power is redistributed, when the working voltage U takes a proper value, the output optical power of the (i+1) th horizontal channel is maximized, the output optical power of the corresponding ports of other horizontal channels is minimized, and at the moment, the corresponding working voltage U is defined as the switching voltage U s . The channel is referred to as "ON" state when the output optical power of the resonance wavelength signal light is maximum, and as "OFF" state when the output optical power of the resonance wavelength signal light is minimum. Changing the value of i from 1 to N, sequentially applying a switching voltage U to the micro-loops in the cells of the previous i columns s The ON state and the OFF state of the N+1 horizontal channels can be completed, namely, the switching function of each horizontal channel is realized.
In the embodiment, a 9×8 channel 16 micro-ring array structure is adopted, the resonance wavelength is 1550nm, the refractive index of a metal electrode is 0.19, the bulk extinction coefficient is 6.1, the refractive index of an upper buffer layer and a lower buffer layer is 1.461, the bulk amplitude attenuation coefficient is 0.25dB/cm, the refractive index of a core layer is 1.643, the bulk amplitude attenuation coefficient is 2.0dB/cm, the polymer electro-optic material AJ309 and the left cladding layer and the right cladding layer are air. The width of the waveguide core is 1.5 μm, the thickness of the buffer layer is 2.0 μm, the thickness of the metal electrode is 0.05 μm, the distance between the micro-ring waveguide and the channel waveguide is 0.1 μm, and the radius of the micro-ring is 12.76 μm.
The output spectra for each horizontal channel without the applied operating voltage are shown in fig. 6. It can be seen that at the resonance wavelength 1550nm, the 1 st horizontal channel (CH 1) has an output optical power P 1 Becomes maximum, the insertion loss is about 2.95dB, and the output optical power of other channels becomes very highAnd small, their crosstalk is less than-20 dB. This means that the 1 st horizontal channel is in the "ON" state and the other channels are in the "OFF" state without applying a voltage, so that the 1 st horizontal channel implements the switching function.
In FIGS. 7 (a) and 8 (a), a voltage is applied to the 1 st row of micro-rings, and voltages U are applied to the other rows of micro-rings 2 ～U 8 =0v, taking U in fig. 7 (a) 1 =u+.0, take U in fig. 8 (a) 1 =10v. As can be seen from FIG. 7 (a), when the operating voltage U increases, the output power P of the 2 nd horizontal channel (CH 2) 2 Rapidly increasing and reaching saturation. As can be seen from FIG. 8 (a), when the operating voltage is 10V, the output optical power P of the 2 nd horizontal channel is at the resonance wavelength of 1550nm 2 To a maximum, the insertion loss is about 3.30dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 2 nd horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so the 2 nd horizontal channel implements the switching function.
In FIGS. 7 (b) and 8 (b), voltages are applied to the first 2 columns of micro-loops, voltages U on the other columns of micro-loops 3 ～U 8 =0v, taking U in fig. 7 (b) 1 ＝U 2 =u+.0, take U in fig. 8 (b) 1 ＝U 2 =10v. As can be seen from FIG. 7 (b), when the operating voltage U increases, the output power P of the 3 rd horizontal channel (CH 3) 3 Rapidly increasing and reaching saturation. As can be seen from FIG. 8 (b), when the operating voltage is 10V, the output optical power P of the 3 rd horizontal channel is at 1550nm 3 To a maximum, the insertion loss is about 3.64dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 3 rd horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so the 3 rd horizontal channel implements the switching function.
In FIGS. 7 (c) and 8 (c), voltages are applied to the first 3 columns of micro-loops, voltages U on the other columns of micro-loops 4 ～U 8 =0v, taking U in fig. 7 (c) 1 ～U 3 ＝U≥0, U is taken in FIG. 8 (c) 1 ～U 3 =10v. As can be seen from fig. 7 (c), when the operating voltage U increases, the output power P4 of the 4 th horizontal channel (CH 4) increases rapidly and reaches the saturated state. As can be seen from FIG. 8 (c), when the operating voltage is 10V, the output optical power P of the 4 th horizontal channel is at the resonance wavelength of 1550nm 4 To a maximum, the insertion loss is about 3.98dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 4 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so that the 4 th horizontal channel realizes the switching function.
In FIGS. 7 (d) and 8 (d), voltages are applied to the first 4 columns of micro-rings, voltages U on the other columns of micro-rings 5 ～U 8 =0v, taking U in fig. 7 (d) 1 ～U 4 =u+.0, take U in fig. 8 (d) 1 ～U 4 =10v. As can be seen from FIG. 7 (d), when the operating voltage U increases, the output power P of the 5 th horizontal channel (CH 5) 5 Rapidly increasing and reaching saturation. As can be seen from FIG. 8 (d), when the operating voltage is 10V, the output optical power P of the 5 th horizontal channel is at 1550nm 5 To a maximum, the insertion loss is about 4.32dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 5 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so that the 5 th horizontal channel realizes the switching function.
In FIGS. 7 (e) and 8 (e), voltages are applied to the first 5 columns of micro-loops, voltages U on the other columns of micro-loops 6 ～U 8 =0v, take U in fig. 7 (e) 1 ～U 5 =u+.0, take U in fig. 8 (e) 1 ～U 5 =10v. As can be seen from FIG. 7 (e), when the operating voltage U increases, the output power P of the 6 th horizontal channel (CH 6) 6 Rapidly increasing and reaching saturation. As can be seen from FIG. 8 (e), when the operating voltage is 10V, the output optical power P of the 6 th horizontal channel is at 1550nm 6 Becomes maximum, its insertion loss is about 4.67dB, while othersThe output optical power of the individual channels becomes very small and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 6 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so the 6 th horizontal channel realizes the switching function.
In FIGS. 7 (f) and 8 (f), voltages are applied to the first 6 columns of micro-loops, voltages U on the other columns of micro-loops 7 ～U 8 =0v, taking U in fig. 7 (f) 1 ～U 6 =u+.0, take U in fig. 84 (f) 1 ～U 6 =10v. As can be seen from fig. 7 (f), when the operating voltage U increases, the output power P7 of the 7 th horizontal channel (CH 7) increases rapidly and reaches the saturated state. As can be seen from FIG. 8 (f), when the operating voltage is 10V, the output optical power P of the 7 th horizontal channel is at the resonance wavelength of 1550nm 7 To a maximum, the insertion loss is about 5.01dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 7 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so that the 7 th horizontal channel realizes the switching function.
In fig. 7 (g) and 8 (g), voltages are applied to the first 7 columns of micro-rings, voltages u8=0v on the other columns of micro-rings, and U is taken in fig. 7 (g) 1 ～U 7 =u.gtoreq.0, take U in fig. 8 (g) 1 ～U 7 =10v. As can be seen from fig. 7 (g), when the operating voltage U increases, the output power P8 of the 8 th horizontal channel (CH 8) increases rapidly and reaches the saturated state. As can be seen from FIG. 8 (g), when the operating voltage is 10V, the output optical power P of the 8 th horizontal channel is at the resonance wavelength of 1550nm 8 To a maximum, the insertion loss is about 5.35dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with such an applied voltage, the 8 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so that the 8 th horizontal channel realizes the switching function.
In FIGS. 7 (h) and 8 (h), voltages are applied to all columns of micro-rings, and U is taken in FIG. 7 (h) 1 ～U 8 (h) Middle U 1 ～U 8 =10v. As can be seen from FIG. 7 (h), when the operating voltage U increases, the output power P of the 9 th horizontal channel (main channel) 9 Rapidly increasing and reaching saturation. As can be seen from FIG. 8 (h), when the operating voltage is 10V, the 9 th horizontal channel has an output optical power P at a resonance wavelength of 1550nm 9 To a maximum, the insertion loss is about 3.49dB, while the output optical power of the other channels becomes very small, and their crosstalk is less than-20 dB. This means that with this applied voltage, the 9 th horizontal channel is in the "ON" state, while the other channels are in the "OFF" state, so the 9 th horizontal channel implements the switching function.

Claims (1)

1. A mesh-structured micro-ring electro-optical switch array device, characterized in that: the array device consists of n+1 horizontal channels, N vertical channels and 2N micro-rings, each array unit contains two micro-rings, and the radiuses of all micro-rings are equal to R=R 1 ＝R 2 ＝…＝R N Length of main channel l=2l 1 +(N-1)L 3 Distance L between output port of ith vertical channel and coupling point adjacent thereto 5i ＝L 4 +(N-i)L 2 - (r+d+w) distance L between output port of ith horizontal channel and coupling point adjacent thereto 8i ＝L 1 +(N-i)L 3 ++ (R+d+w), where L 1 L is the distance from the main channel port to the adjacent vertical channel 3 For the distance between two adjacent vertical channels, L 2 Is the distance between every two adjacent horizontal channels, L 4 The distance from the vertical channel port to the horizontal channel adjacent to the vertical channel port is d, the distance between the channel and the micro-ring is d, and w is the width of the waveguide core; the electrode is only added on the micro-ring, and no electrode is added on the channel; the structure of the micro-ring waveguide is as follows from top to bottom in sequence: the upper electrode, the upper buffer layer, the waveguide core layer, the lower buffer layer and the lower electrode, wherein only the waveguide core layer is made of polymer electro-optic material, the operating voltage U applied to the upper electrode and the lower electrode can cause the refractive index change of the core layer electro-optic material, and the refractive index of the dielectric layers of other non-electro-optic materials does not change along with the operating voltage.
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