CN110170912A - A kind of vacuum suction and air blowing blanking device for glass substrate polishing - Google Patents
A kind of vacuum suction and air blowing blanking device for glass substrate polishing Download PDFInfo
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- CN110170912A CN110170912A CN201910464420.8A CN201910464420A CN110170912A CN 110170912 A CN110170912 A CN 110170912A CN 201910464420 A CN201910464420 A CN 201910464420A CN 110170912 A CN110170912 A CN 110170912A
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- air blowing
- suction
- vacuum
- gas circuit
- gas
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- 238000007664 blowing Methods 0.000 title claims abstract description 105
- 239000011521 glass Substances 0.000 title claims abstract description 59
- 239000000758 substrate Substances 0.000 title claims abstract description 51
- 238000005498 polishing Methods 0.000 title claims abstract description 31
- 238000010521 absorption reaction Methods 0.000 claims abstract description 47
- 238000005096 rolling process Methods 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 11
- 238000000926 separation method Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 abstract description 7
- 230000006378 damage Effects 0.000 abstract description 5
- 239000012530 fluid Substances 0.000 description 4
- 238000002955 isolation Methods 0.000 description 4
- 238000005299 abrasion Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 208000027418 Wounds and injury Diseases 0.000 description 2
- 208000002925 dental caries Diseases 0.000 description 2
- 208000014674 injury Diseases 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- TVEXGJYMHHTVKP-UHFFFAOYSA-N 6-oxabicyclo[3.2.1]oct-3-en-7-one Chemical compound C1C2C(=O)OC1C=CC2 TVEXGJYMHHTVKP-UHFFFAOYSA-N 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 238000010009 beating Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- -1 that is Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 239000002351 wastewater Substances 0.000 description 1
- 238000004065 wastewater treatment Methods 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/005—Feeding or manipulating devices specially adapted to grinding machines
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
The invention discloses a kind of vacuum suctions and air blowing blanking device for glass substrate polishing, including vaccum-suction attachement pad and vacuum suction gas circuit, multiple absorption stomatas are provided on vaccum-suction attachement pad, one end of vacuum suction gas circuit is connect with a gas source, the other end is connect with absorption stomata, it further include pre- air blowing blanking gas circuit and main air blowing blanking gas circuit, pre- air blowing blanking gas circuit includes pressure regulator valve and pre-blowing gas control valve, main air blowing blanking gas circuit includes main air blowing control valve, one end of pressure regulator valve is connect with gas source, the other end is connect with one end of pre-blowing gas control valve, one end of main air blowing control valve is connect with gas source, the other end of pre-blowing gas control valve and main air blowing control valve is connect with absorption stomata.The present invention is by being arranged pre- air blowing blanking gas circuit and main air blowing blanking gas circuit, so that the substep for realizing glass substrate is detached from, and then prevents larger blow gas pressure damage glass substrate at the beginning, and then saved the time for taking piece, improves production efficiency.
Description
Technical field
The present invention relates to glass substrate polishing technology field more particularly to a kind of vacuum suctions for glass substrate polishing
With air blowing blanking device.
Background technique
During the loading and unloading of polishing, glass substrate is adsorbed on absorption layer glass substrate, most of at present to use people
Work operation of feeding and discharging, manual operation slow motion and being easy scratch finger and cause industrial injury or damage glass and then influence yields, and
And hand touch glass influences the quality of glass substrate.Meanwhile during artificial loading and unloading, poured with water and take glass, water washes away
Partially polished liquid, that is, waste water and waste polishing fluid.To which the automation loading and unloading of glass substrate become trend.
Chinese patent CN103846788A discloses a kind of polishing machine for improving polished part suction type, can pass through vacuum
Absorption and the mode blown can be realized the auto loading of processed glass substrate and take piece, but in the process of air blowing blanking
In, processing glass substrate is easy to be blown rupture by air pressure, meanwhile, air pressure of each absorption stomata when blowing is also it is difficult to ensure that big
It is small consistent, it is equally also easy to cause and rupture is blown by air pressure, and then influence qualification rate；In addition, there is also central axises and vacuum suction
Bearing is obtained between disk does not have sealed set, is easy the polishing fluid being entered abrasion, corrosion and central axis centre bore, adsorbed gas
The problems such as processing of hole difficulty and central axis and not high vaccum-suction attachement pad centering precision.
Summary of the invention
It is an object of that present invention to provide a kind of vacuum suctions and air blowing blanking device for glass substrate polishing, to solve
The certainly above problem.
To achieve the above object, the invention discloses a kind of vacuum suctions for glass substrate polishing and air blowing blanking to fill
It sets, including vaccum-suction attachement pad and vacuum suction gas circuit, multiple absorption stomatas is provided on the vaccum-suction attachement pad, the vacuum is inhaled
The end of attached gas circuit is connect with the absorption stomata, further includes air blowing blanking gas circuit and for adjusting the air blowing blanking gas circuit gas
The air pressure regulator of size is pressed, one end of the air blowing blanking gas circuit is connect with a gas source, the other end and the air pressure adjustment
One end of device connects, and the other end of the air pressure regulator is connect with the absorption stomata, so as to realize glass base
Piece is blown in the blanking initial stage with lesser air pressure, and inflatable gas crushing bad glass substrate excessive at the beginning is avoided.
Further, the air blowing blanking gas circuit includes main air blowing blanking gas circuit and pre- air blowing blanking gas circuit, the air pressure
Regulating device includes pressure regulator valve, pre-blowing gas control valve and main air blowing control valve, the pressure regulator valve and at least one described pre- air blowing
Control valve is arranged in the pre- air blowing blanking gas circuit, and the main air blowing control valve is arranged in the main air blowing blanking gas circuit.
By the pre- air blowing of smaller air pressure, realize that glass substrate is tentatively detached from or is partially disengaged, then by opening main air blowing control
Valve, high pressure gas can be from absorption stomata blowout, and then blows off glass substrate completely.
Further, the vacuum suction gas circuit includes vacuum generator, vacuum regulating valve and vacuum filter, described true
One end of empty generator is connect with the gas source, and the other end is connect with one end of the vacuum regulating valve, the vacuum regulating valve
The other end connect with one end of the vacuum filter, the other end of the vacuum filter is connect with the absorption stomata,
The pre-blowing gas control valve is three-way magnetic valve, one end of the three-way magnetic valve and the pressure regulator valve and vacuum filter it is another
One end connection, the other end of the three-way magnetic valve are connect with the absorption stomata, and the suction of glass substrate is realized by same gas source
It is attached, simplify gas circuit structure.
Further, the air pressure regulator is the continuous tune that air blowing blanking gas circuit air pressure size can be achieved and continuously adjust
Valve is saved, to realize automatic, the step-less adjustment of the air pressure in air blowing blanking gas circuit.
Further, the concentration of the absorption stomata on the outside of the vaccum-suction attachement pad is greater than on the inside of the vaccum-suction attachement pad
The concentration of absorption stomata avoid glass base so that glass substrate be made to form the trend that gradually disengages from edge to center
The center of piece is detached from first and outer rim is compressed by atmospheric pressure, and then the situation for causing glass substrate broken.
It further, further include multiple expansion counterbores, the expansion counterbore, which extends to, is located substantially near the vaccum-suction attachement pad
Downside, it is described absorption stomata perforation is arranged in it is described expand counterbore bottom, guarantee vaccum-suction attachement pad entirety rigidity
While with the flatness of downside, that realizes lesser absorption stomata is drilled with success.
It further, further include that central axis, suction tray cover piece and rotation gas path joint, the suction tray cover piece are mounted on institute
It states on vaccum-suction attachement pad, the chamber being connected to the absorption stomata is formed between the suction tray cover piece and the vaccum-suction attachement pad
The end of body, the central axis and suction tray cover piece pivot joint is provided with centre bore, is provided on the side wall of the centre bore
The tracheae access aperture of perforation, the rotation gas path joint are mounted on the center of the suction tray cover piece, one end and the cavity
Connection, the other end is connect with the tracheae protruded into from the tracheae access aperture, by the setting of cavity, to respectively adsorb stomata
Blow, inhale it is more uniform consistent.
Further, it is provided with bearing hole on the suction tray cover piece, rolling bearing is installed in the bearing hole, it is described
The inner ring of central axis and the rolling bearing is socketed, and is provided with a bearing (ball) cover above the bearing hole, the bearing (ball) cover with
The center sealing pivot joint, so that rolling bearing be avoided to be polished corrosion, abrasion.
Further, the vaccum-suction attachement pad is provided centrally with a positioning counterbore, and the center of the suction tray cover piece is downward
A positioning convex platform is extended to form, the positioning convex platform is coaxially socketed in described positioning counterbore, on the side wall of the positioning counterbore
It is provided with the air channel for being connected to cavity described in both ends, improve central axis and vaccum-suction attachement pad is co-axially mounted precision.
Further, separation rib is circumferentially provided on the suction tray cover piece, the separation rib and the vacuum are inhaled
It is provided with cavity sealing ring on the face of attached disk fitting, the cavity is divided into multiple sub- cavitys, the son by the separation rib
By sub- air circuit connection between cavity, realizes and various sizes of glass substrate is polished, can also equally realize adaptation sizes
Glass substrate production, expand the polishing application range of the device.
Compared with the prior art, the advantages of the present invention are as follows:
1, the present invention is by being arranged pre- air blowing blanking gas circuit and main air blowing blanking gas circuit, to realize point of glass substrate
Step is detached from, and then prevents larger blow gas pressure damage glass substrate at the beginning；
2, present invention saves water, saved polishing fluid, further also save cost for wastewater treatment；
3, the configuration of the present invention is simple does not need artificial loading and unloading and takes piece, avoids artificial feeding and often scratches finger and causes
Industrial injury, and the problem of be easily damaged glass substrate；
4, the present invention is because can be improved quality stability and improve product quality using automation absorption and blanking operation；
5, present invention saves a large amount of absorption layers, also save the time of replacement absorption layer；
6, present invention saves the time for taking piece, production efficiency is improved, the most key is that automated production can be achieved.
Below with reference to accompanying drawings, the present invention is described in further detail.
Detailed description of the invention
The attached drawing constituted part of this application is used to provide further understanding of the present invention, schematic reality of the invention
It applies example and its explanation is used to explain the present invention, do not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 is the structure of the vacuum suction for glass substrate polishing and air blowing blanking device disclosed by the embodiments of the present invention
Schematic diagram；
Fig. 2 is the enlarged diagram at the A of Fig. 1；
Fig. 3 is the enlarged diagram at the B of Fig. 2.
Marginal data:
1, vaccum-suction attachement pad；2, stomata is adsorbed；3, gas source；4, pressure regulator valve；5, pre-blowing gas control valve；6, main air blowing control
Valve；7, vacuum generator；8, vacuum regulating valve；9, vacuum filter；10, central axis；11, suction tray cover piece；12, gas circuit is rotated
Connector；13, cavity；14, centre bore；15, tracheae access aperture；16, tracheae；17, bearing hole；18, rolling bearing；19, bearing end
Lid；20, positioning counterbore；21, positioning convex platform；22, air channel；23, expand counterbore；24, separation rib；25, cavity sealing ring；
26, sub- cavity；27, sub- gas circuit；28, cover board；29, bearing block；30, bearing flange；31, decking flanges；32, end cap seal circle；
33, gas-tpe fitting；34, isolation cover；36, absorption layer；37, retaining ring；38, locking nut；39, tee pipe coupling；40, under pre- air blowing
Expect gas circuit；41, main air blowing blanking gas circuit；42, vacuum suction gas circuit.
Specific embodiment
The embodiment of the present invention is described in detail below in conjunction with attached drawing, but the present invention can be defined by the claims
Implement with the multitude of different ways of covering.
Embodiment one:
As shown in Figure 1-Figure 3, the invention discloses a kind of vacuum suctions for glass substrate polishing and air blowing blanking to fill
It sets, including vaccum-suction attachement pad 1 and vacuum suction gas circuit 42, multiple absorption stomatas 2, vacuum suction is provided on vaccum-suction attachement pad 1
The downside of disk 1, which is cohered, absorption layer 36, and (in the present embodiment, gas source 3 is with a gas source 3 for one end of vacuum suction gas circuit 42
The gas source three linked piece of one input pressure-air) connection, the other end connect with stomata 2 is adsorbed, wherein vacuum suction gas circuit 42 includes
Vacuum generator 7, vacuum regulating valve 8 and vacuum filter 9 are provided with the electricity that control pressure-air enters on vacuum generator 7
One end of magnet valve, the vacuum generator 7 is connect with gas source 3, and the other end is connect with one end of vacuum regulating valve 8, vacuum regulating valve 8
The other end connect with one end of vacuum filter 9, the other end of vacuum filter 9 is connect with absorption stomata 2.To starting
After vacuum generator 7, absorption stomata 2 can produce negative-pressure adsorption glass substrate.
Specifically, when be adsorbed on vaccum-suction attachement pad 1 glass substrate polishing finish need blanking when, pass through blanking gas circuit
It blows to absorption stomata 2, glass substrate is blown brokenly in excessively high air pressure in order to prevent, further includes under air blowing in the present embodiment
Expect the air pressure regulator of gas circuit and adjustable air blowing blanking gas circuit air pressure, air blowing blanking gas circuit includes pre- air blowing blanking gas circuit 40
With main air blowing blanking gas circuit 41, wherein it is defeated that the gas pressure that pre- air blowing blanking gas circuit 40 exports is less than main air blowing blanking gas circuit 41
Gas pressure out, and air pressure regulator then includes pressure regulator valve 4, pre-blowing gas control valve 5 and main air blowing control valve 6.Wherein, it adjusts
Pressure valve 4 and multiple pre-blowing gas control valves 5 are arranged in pre- air blowing blanking gas circuit 40, and the input of pressure regulator valve 4 terminates gas source 3, output
End is arranged in parallel multiple pre-blowing gas control valves 5, to form the air pressure gearshift of one similar automobile " shift ", when successively beating
When opening different pre-blowing gas control valves 5, being gradually increased for air pressure during pre- air blowing can be realized, this is ladder-like air pressure size
Increase.And main air blowing control valve 6 is arranged in main air blowing blanking gas circuit 41, one end of pressure regulator valve 4 passes through tee pipe coupling 39
It is connect with gas source 3, the other end is connect with one end of pre-blowing gas control valve 5, and one end of main air blowing control valve 6 passes through tee pipe coupling
39 connect with gas source 3, the other end of pre-blowing gas control valve 5 and main air blowing control valve 6 with all 2 synchronized links of absorption stomata
(being connected by tracheae 16) first starts pre-blowing gas control valve 5 when specific operation, and pre- air blowing blanking gas circuit 40 is connected, and passes through tune
Then the size that section pressure regulator valve 4 controls air pressure in pre- air blowing blanking gas circuit 40 gradually opens different pre-blowing gas control valves 5, into
And the air pressure for realizing that absorption stomata 2 is blown out is gradually increased, so that glass substrate is tentatively detached from or is partially disengaged absorption layer 36, most
After start main air blowing control valve 6, high pressure gas can be blown out from absorption stomata 2, and then blow off glass substrate completely.
In the present embodiment, pre-blowing gas control valve 5 is three-way magnetic valve, one end of three-way magnetic valve and pressure regulator valve 4 and very
The other end of air filter 9 connects, and the other end of the three-way magnetic valve is connect with absorption stomata 2, when three-way magnetic valve is switched to
When pre- air blowing blanking gas circuit 40 is connected, vacuum suction gas circuit 42 is in close state, when three-way magnetic valve is switched under pre- air blowing
When expecting that gas circuit 40 is closed, vacuum suction gas circuit 42 is connected, as long as the solenoid valve on control vacuum generator 7, can be realized glass
The adsorption operation of substrate, to realize pre- air blowing blanking gas circuit 40 and vacuum suction gas circuit by a pre-blowing gas control valve 5
It is controlled while 42, simplifies gas circuit structure.
In the present embodiment, the concentration of the absorption stomata 2 in 1 outside of vaccum-suction attachement pad is greater than 1 inside of vaccum-suction attachement pad
Absorption stomata 2 concentration, thus, when pre- air blowing blanking gas circuit 40 and main air blowing blanking gas circuit 41 conducting blow when, glass
The outer rim of glass substrate is detached from absorption layer 36 at first, that is, forms the trend gradually disengaged from edge to center, avoid glass base
The center of piece is detached from first and outer rim is still compressed by atmospheric pressure, and then the situation for causing glass substrate broken.
It in the present embodiment, further include central axis 10, suction tray cover piece 11 and rotation gas path joint 12, suction tray cover piece 11
It is mounted on vaccum-suction attachement pad 1, the chamber being connected to absorption stomata 2 is formed between the suction tray cover piece 11 and vaccum-suction attachement pad 1
The end that body 13, central axis 10 and suction tray cover piece 11 are pivotally connected is provided with centre bore 14, is provided with and passes through on the side wall of centre bore 14
Logical tracheae access aperture 15, rotation gas path joint 12 are mounted on the center of suction tray cover piece 11, and one end is connect with cavity 13, separately
One end is connect with the tracheae 16 protruded into from tracheae access aperture 15.Specifically, being provided with bearing hole 17, axis on suction tray cover piece 11
One rolling bearing 18 is installed, one end of rolling bearing 18 is limited by the shaft shoulder of central axis 10, and the other end passes through in bearing bore 17
Retaining ring 37 and locking nut 38 are locked.The inner ring of central axis 10 and rolling bearing 18 is socketed, and rolling bearing 18 is mounted on by one
Bearing (ball) cover 19 on bearing hole 17 seals, and bearing (ball) cover 19 is sealed by the end cap seal circle 32 of two sides, prevents external polishing
Liquid enters in bearing hole 17, accelerate abrasion to rolling bearing 18 and corrosion the problem of, and then rolling bearing 18 can be risen
To good protective effect, further, in the present embodiment, bearing (ball) cover 19 is also equipped with an isolation cover 34, and 34 sets of isolation cover
It connects and fixes on the center shaft 10, thus further prevent polishing fluid to splashing at bearing (ball) cover 19 or flowing, meanwhile, in order to keep away
Exempt from the bending when entering centre bore 14 of tracheae 16, a gas-tpe fitting 33 is additionally provided on isolation cover 34, to realize into center
The smooth switching of the tracheae 16 in hole 14.
In the present embodiment, vaccum-suction attachement pad 1 is provided centrally with a positioning counterbore 20, and the center of suction tray cover piece 11 is downward
Extend to form a positioning convex platform 21, positioning convex platform 21 is coaxially socketed in described positioning counterbore 20, thus guarantee central axis 10 with
The concentricity of vaccum-suction attachement pad 1 is provided with the air channel 22 for being connected to two sides cavity 13 on the side wall of positioning counterbore 20.
Since the diameter of absorption stomata 2 is in 1mm or so, in order to guarantee the whole rigidity of vaccum-suction attachement pad 1 and downside
Flatness prevents its deformation, and 1 thickness of vaccum-suction attachement pad would generally be bigger, this will lead to directly be drilled with the hole that diameter is 1mm
Extremely difficult (drilling is deeper, and drill bit is easier to be disconnected), for this purpose, in the present embodiment, the mode taken is, first with outer diameter compared with
Greatly, the biggish drill bit of intensity is drilled with fabrication hole --- and expanding counterbore 23, (diameter expands counterbore 23 and extends to base in 10mm or more)
This is close to the downside of vaccum-suction attachement pad 1, then, then overturns the perforation of vaccum-suction attachement pad 1 and is drilled with the lesser absorption stomata 2 of diameter,
Absorption stomata 2 runs through the bottom for being arranged in and expanding counterbore 23.To, it on the one hand ensure that the flatness of 1 bottom surface of vaccum-suction attachement pad,
On the other hand also ensure absorption stomata 2 is drilled with success.
In the present embodiment, separation rib 24, separation rib 24 and vacuum suction are circumferentially provided on suction tray cover piece 11
It is provided with cavity sealing ring 25 on the face that disk 1 is bonded, cavity 13 is divided into multiple sub- cavitys 26, sub- cavity 26 by separation rib 24
Between by sub- gas circuit 27 connect, when polish smaller size glass substrate when, close between sub- cavity 26 sub- gas circuit 27 (son
Settable switch valve in gas circuit 27), so that vacuum and air blowing only occur in innermost sub- cavity 26, and encounter larger size
Glass substrate when, then by being connected to sub- gas circuit 27, keep one area coverage of connection formation between each sub- cavity 26 biggish
Cavity 13, and then it is adapted to the production of the glass substrate of sizes, the polishing application range of the device is expanded, is specifically set
When setting, suction tray cover piece 11 uses split type design, including cover board 28 and bearing block 29, bearing block 29 and 10 pivot of central axis
It connects, the outer rim of bearing block 29 is provided with bearing flange 30, and the inner edge of cover board 28 is provided with decking flanges 31, and decking flanges 31 press
In bearing flange 30, bearing block 29 and vaccum-suction attachement pad 1 are formed by sub- cavity 26, cover board 28 and 1 shape of vaccum-suction attachement pad
At sub- cavity 26 between connected by sub- gas circuit 27, equally, by selecting the cover board 28 of distinct coverage region, can be realized pair
Various sizes of glass substrate polishing, can also equally realize the production for adapting to the glass substrate of sizes, expand the device
Polishing application range.
Embodiment two:
In the present embodiment, air pressure regulator uses consecutive damper valve, so as to realize in air blowing blanking gas circuit
Automatic, the step-less adjustment of air pressure, consecutive damper valve are chosen as proportional control valve, in the specific control of air blowing blanking, first pass through
The proportional control valve makes absorption stomata 2 blow out lesser air pressure, is then gradually increased, equally can be realized the effect of pre- air blowing.
Finally, control proportional control valve makes air pressure standard-sized sheet, high pressure gas can be blown out from absorption stomata 2, and then blow off glass base completely
Piece.
These are only the preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of vacuum suction and air blowing blanking device for glass substrate polishing, including vaccum-suction attachement pad (1) and vacuum are inhaled
Attached gas circuit (42) is provided with multiple absorption stomatas (2), the end of the vacuum suction gas circuit (42) on the vaccum-suction attachement pad (1)
Portion is connect with the absorption stomata (2), which is characterized in that further includes air blowing blanking gas circuit and for adjusting the air blowing blanking gas
One end of the air pressure regulator of road air pressure size, the air blowing blanking gas circuit is connect with a gas source (3), the other end and the gas
One end connection of regulating device is pressed, the other end of the air pressure regulator is connect with the absorption stomata (2).
2. the vacuum suction and air blowing blanking device according to claim 1 for glass substrate polishing, which is characterized in that
The air blowing blanking gas circuit includes main air blowing blanking gas circuit (41) and pre- air blowing blanking gas circuit (40), the air pressure regulator packet
Include pressure regulator valve (4), pre-blowing gas control valve (5) and main air blowing control valve (6), the pressure regulator valve (4) and at least one described pre-blowing
Gas control valve (5) is arranged on the pre- air blowing blanking gas circuit (40), and the main air blowing control valve (6) is arranged in the main air blowing
In blanking gas circuit (41).
3. the vacuum suction and air blowing blanking device according to claim 2 for glass substrate polishing, which is characterized in that
The vacuum suction gas circuit (42) includes vacuum generator (7), vacuum regulating valve (8) and vacuum filter (9), the vacuum hair
The one end of raw device (7) is connect with the gas source (3), and the other end is connect with the one end of the vacuum regulating valve (8), the vacuum tune
The other end of pressure valve (8) is connect with one end of the vacuum filter (9), the other end of the vacuum filter (9) with it is described
Stomata (2) connection is adsorbed, the pre-blowing gas control valve (5) is three-way magnetic valve, one end of the three-way magnetic valve and the tune
Pressure valve (4) is connected with the other end of vacuum filter (9), and the other end of the three-way magnetic valve is connect with the absorption stomata (2).
4. the vacuum suction and air blowing blanking device according to claim 1 for glass substrate polishing, which is characterized in that
The air pressure regulator is the consecutive damper valve that air blowing blanking gas circuit air pressure size can be achieved and continuously adjust.
5. the vacuum suction and air blowing blanking device according to claim 1 for glass substrate polishing, which is characterized in that
The concentration of absorption stomata (2) on the outside of the vaccum-suction attachement pad (1) is greater than the adsorbed gas on the inside of the vaccum-suction attachement pad (1)
The concentration in hole (2).
6. the vacuum suction and air blowing blanking device according to claim 1 for glass substrate polishing, which is characterized in that
It further include multiple expansion counterbores (23), the expansion counterbore (23) extends to the downside for being located substantially near the vaccum-suction attachement pad (1)
Face, absorption stomata (2) the perforation setting is in the bottom for expanding counterbore (23).
7. -6 any vacuum suction and air blowing blanking device for glass substrate polishing according to claim 1, special
Sign is, further includes central axis (10), suction tray cover piece (11) and rotation gas path joint (12), suction tray cover piece (11) peace
On the vaccum-suction attachement pad (1), it is formed between the suction tray cover piece (11) and the vaccum-suction attachement pad (1) and the suction
During the end of the cavity (13) of attached stomata (2) connection, the central axis (10) and the suction tray cover piece (11) pivot joint is provided with
Heart hole (14) is provided with the tracheae access aperture (15) of perforation, the rotation gas path joint on the side wall of the centre bore (14)
(12) be mounted on the center of the suction tray cover piece (11), one end is connect with the cavity (13), the other end with from the gas
A tracheae (16) connection that pipe access aperture (15) protrudes into.
8. the vacuum suction and air blowing blanking device according to claim 7 for glass substrate polishing, which is characterized in that
It is provided with bearing hole (17) on the suction tray cover piece (11), is equipped with rolling bearing (18) in the bearing hole (17), it is described
Central axis (10) and the inner ring of the rolling bearing (18) are socketed, and are provided with a bearing (ball) cover above the bearing hole (17)
(19), the bearing (ball) cover (19) and the central axis (10) sealing are pivotally connected.
9. the vacuum suction and air blowing blanking device according to claim 7 for glass substrate polishing, which is characterized in that
The vaccum-suction attachement pad (1) is provided centrally with a positioning counterbore (20), and the center of the suction tray cover piece (11) extends downwardly shape
At a positioning convex platform (21), the positioning convex platform (21) is coaxially socketed in described positioning counterbore (20), the positioning counterbore
(20) air channel (22) for being connected to cavity described in both ends (13) is provided on side wall.
10. the vacuum suction and air blowing blanking device according to claim 7 for glass substrate polishing, feature exist
In being circumferentially provided with separation rib (24) on the suction tray cover piece (11), the separation rib (24) and the vacuum suction
It is provided with cavity sealing ring (25) on the face of disk (1) fitting, the cavity (13) is divided into multiple by the separation rib (24)
Sub- cavity (26) passes through sub- gas circuit (27) between the sub- cavity (26) and connects.
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| CN201910464420.8A CN110170912B (en) | 2019-05-30 | 2019-05-30 | Vacuum adsorption and blowing discharging device for polishing glass substrate |
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| CN201910464420.8A CN110170912B (en) | 2019-05-30 | 2019-05-30 | Vacuum adsorption and blowing discharging device for polishing glass substrate |
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| CN110170912A true CN110170912A (en) | 2019-08-27 |
| CN110170912B CN110170912B (en) | 2024-03-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111168564A (en) * | 2020-01-06 | 2020-05-19 | 业成科技（成都）有限公司 | Improved device for grinding and cleaning |
Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0516065A (en) * | 1991-07-12 | 1993-01-26 | Mitsubishi Electric Corp | Polishing device |
| JPH10296624A (en) * | 1997-02-27 | 1998-11-10 | Takahiro Oishi | Method and device for affixing wafer to porous surface plate |
| CN1249983A (en) * | 1998-08-19 | 2000-04-12 | 艾瓦·威斯里·麦卡夫 | Closed direct particle jet-flow grinding system |
| US6425812B1 (en) * | 1997-04-08 | 2002-07-30 | Lam Research Corporation | Polishing head for chemical mechanical polishing using linear planarization technology |
| JP2005279929A (en) * | 2005-06-03 | 2005-10-13 | Ebara Corp | Polishing device and method |
| KR100627613B1 (en) * | 2005-05-19 | 2006-09-25 | (주)미래컴퍼니 | Table and apparatus for grinding glass panel |
| KR100826211B1 (en) * | 2006-12-25 | 2008-04-30 | 우 옵트로닉스 코포레이션 | A polishing apparatus and a polishing method for a glass panel |
| CN201079921Y (en) * | 2007-08-10 | 2008-07-02 | 南京利生光学机械有限责任公司 | Load-dropping device for polishing machine correcting board |
| KR20100100594A (en) * | 2010-01-21 | 2010-09-15 | 주식회사 엘지화학 | System and method for polyshing glass |
| JP2012111013A (en) * | 2010-11-26 | 2012-06-14 | Asahi Glass Co Ltd | Polished body suction jig, manufacturing method for glass substrate, and glass substrate for magnetic recording medium |
| CN103846788A (en) * | 2014-03-07 | 2014-06-11 | 湖南永创机电设备有限公司 | Polishing machine with improved polished piece adsorption mode |
| KR20140083871A (en) * | 2012-12-24 | 2014-07-04 | 주식회사 케이씨텍 | Regulator for rotary union of cmp apparatus |
| CN104896303A (en) * | 2015-06-11 | 2015-09-09 | 湖南拓奇新创科技股份有限公司 | Automatic polishing auxiliary material discharging device |
| CN205331500U (en) * | 2015-12-23 | 2016-06-22 | 古棠测控科技（上海）有限公司 | High pressure valves |
| CN106826510A (en) * | 2016-12-30 | 2017-06-13 | 郑州晶润光电技术有限公司 | A kind of chip clears off technique |
| CN107310314A (en) * | 2017-07-28 | 2017-11-03 | 深圳市创世纪机械有限公司 | Vacuum air-channel and the glass carving machine with the vacuum air-channel |
| CN107877207A (en) * | 2017-12-14 | 2018-04-06 | 苏州市台群机械有限公司 | Vacuum air-channel and high ray machine |
| CN109732454A (en) * | 2019-02-15 | 2019-05-10 | 苏州博宏源机械制造有限公司 | A kind of mobile phone glass polishing machine |
| CN210209917U (en) * | 2019-05-30 | 2020-03-31 | 湖南永创机电设备有限公司 | Vacuum adsorption and blowing blanking device for polishing glass substrate |
-
2019
- 2019-05-30 CN CN201910464420.8A patent/CN110170912B/en active Active
Patent Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0516065A (en) * | 1991-07-12 | 1993-01-26 | Mitsubishi Electric Corp | Polishing device |
| JPH10296624A (en) * | 1997-02-27 | 1998-11-10 | Takahiro Oishi | Method and device for affixing wafer to porous surface plate |
| US6425812B1 (en) * | 1997-04-08 | 2002-07-30 | Lam Research Corporation | Polishing head for chemical mechanical polishing using linear planarization technology |
| CN1249983A (en) * | 1998-08-19 | 2000-04-12 | 艾瓦·威斯里·麦卡夫 | Closed direct particle jet-flow grinding system |
| KR100627613B1 (en) * | 2005-05-19 | 2006-09-25 | (주)미래컴퍼니 | Table and apparatus for grinding glass panel |
| JP2005279929A (en) * | 2005-06-03 | 2005-10-13 | Ebara Corp | Polishing device and method |
| KR100826211B1 (en) * | 2006-12-25 | 2008-04-30 | 우 옵트로닉스 코포레이션 | A polishing apparatus and a polishing method for a glass panel |
| CN201079921Y (en) * | 2007-08-10 | 2008-07-02 | 南京利生光学机械有限责任公司 | Load-dropping device for polishing machine correcting board |
| KR20100100594A (en) * | 2010-01-21 | 2010-09-15 | 주식회사 엘지화학 | System and method for polyshing glass |
| JP2012111013A (en) * | 2010-11-26 | 2012-06-14 | Asahi Glass Co Ltd | Polished body suction jig, manufacturing method for glass substrate, and glass substrate for magnetic recording medium |
| KR20140083871A (en) * | 2012-12-24 | 2014-07-04 | 주식회사 케이씨텍 | Regulator for rotary union of cmp apparatus |
| CN103846788A (en) * | 2014-03-07 | 2014-06-11 | 湖南永创机电设备有限公司 | Polishing machine with improved polished piece adsorption mode |
| CN104896303A (en) * | 2015-06-11 | 2015-09-09 | 湖南拓奇新创科技股份有限公司 | Automatic polishing auxiliary material discharging device |
| CN205331500U (en) * | 2015-12-23 | 2016-06-22 | 古棠测控科技（上海）有限公司 | High pressure valves |
| CN106826510A (en) * | 2016-12-30 | 2017-06-13 | 郑州晶润光电技术有限公司 | A kind of chip clears off technique |
| CN107310314A (en) * | 2017-07-28 | 2017-11-03 | 深圳市创世纪机械有限公司 | Vacuum air-channel and the glass carving machine with the vacuum air-channel |
| CN107877207A (en) * | 2017-12-14 | 2018-04-06 | 苏州市台群机械有限公司 | Vacuum air-channel and high ray machine |
| CN109732454A (en) * | 2019-02-15 | 2019-05-10 | 苏州博宏源机械制造有限公司 | A kind of mobile phone glass polishing machine |
| CN210209917U (en) * | 2019-05-30 | 2020-03-31 | 湖南永创机电设备有限公司 | Vacuum adsorption and blowing blanking device for polishing glass substrate |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111168564A (en) * | 2020-01-06 | 2020-05-19 | 业成科技（成都）有限公司 | Improved device for grinding and cleaning |
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| Publication number | Publication date |
|---|---|
| CN110170912B (en) | 2024-03-15 |
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