CN110165089B - Glass substrate stripping system of flexible OLED panel - Google Patents
Glass substrate stripping system of flexible OLED panel Download PDFInfo
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- CN110165089B CN110165089B CN201910386085.4A CN201910386085A CN110165089B CN 110165089 B CN110165089 B CN 110165089B CN 201910386085 A CN201910386085 A CN 201910386085A CN 110165089 B CN110165089 B CN 110165089B
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- 239000011521 glass Substances 0.000 title claims abstract description 72
- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 230000007246 mechanism Effects 0.000 claims abstract description 58
- 238000007599 discharging Methods 0.000 claims abstract description 16
- 230000007306 turnover Effects 0.000 claims abstract description 14
- 238000010030 laminating Methods 0.000 claims abstract description 12
- 238000001514 detection method Methods 0.000 claims description 15
- 239000000523 sample Substances 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 5
- 238000000034 method Methods 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 8
- 238000007664 blowing Methods 0.000 description 7
- 239000012528 membrane Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 230000004308 accommodation Effects 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
- H01L21/7813—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate leaving a reusable substrate, e.g. epitaxial lift off
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K77/00—Constructional details of devices covered by this subclass and not covered by groups H10K10/80, H10K30/80, H10K50/80 or H10K59/80
- H10K77/10—Substrates, e.g. flexible substrates
- H10K77/111—Flexible substrates
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
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- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
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Abstract
The invention discloses a glass substrate stripping system of a flexible OLED panel, which comprises a circulating conveying mechanism for conveying the OLED panel, wherein a plurality of positioning jigs for fixing the OLED panel are arranged on the circulating conveying mechanism, a discharging device, a laser stripping device, a glass removing device, a supporting film laminating device, a turn-over device and a detecting device are sequentially arranged in a passing area of the circulating conveying mechanism, and the full-automatic operation of removing the glass substrate and pasting a PET supporting film on the flexible OLED panel can be realized.
Description
Technical Field
The invention belongs to the field of flexible OLED panel production equipment, and particularly relates to a glass substrate stripping system of a flexible OLED panel.
Background
Modern electronics technology has evolved rapidly, particularly display technology, from the well-established LCD to the now increasingly widespread OLED applications, and flexible and bendable OLED display panels have evolved. The preparation of the flexible OLED display panel is greatly different from that of a common OLED display panel, the manufacturing difficulty is high, and the working procedure is also greatly different from that of the common OLED display panel.
Structurally, the most obvious difference between flexible OLEDs and common OLEDs is that the flexible OLED panels have the bottom glass substrate removed. However, the current flexible OLED panel is manufactured by paving a glass substrate at the bottom and then manufacturing a structural layer of each OLED.
Therefore, in the manufacture of the flexible OLED display screen, the removal of the glass substrate at the bottom is a necessary flow operation.
The flexible OLED display panel is manufactured by firstly manufacturing a plurality of flexible OLED display panels on a large glass substrate, which is generally called a master slice, and then cutting the master slice into single slices after manufacturing, and performing subsequent processing. At the time of dicing, there are currently 2 ways: firstly, removing a whole glass substrate of a master slice, replacing a large PET protective film, attaching the PET protective film, and then cutting the PET protective film into a single flexible OLED display panel; 2, directly cutting the OLED display panel with the glass substrate of the master slice into single slices; and then removing the glass substrate.
The technical scheme aims at mode 2, and the glass substrate stripping operation is carried out on the single flexible OLED display panel with the glass substrate. The method has the advantages that the cut single sheet is firstly cut and then the glass substrate is removed, the cut single sheet can be tested firstly, and then the subsequent procedures such as glass stripping and the like are removed under the condition of good products, so that a lot of subsequent cost can be reduced under the condition of low product yield.
At present, the stripping method of the glass substrate in the market basically adopts a laser stripping method, PI molecules on the contact surface of the glass and the PI layer are broken by laser irradiation, and then the glass substrate and the OLED display panel can be separated. However, at present, the market is operated manually by a single process on glass substrates, except that laser scanning is completed automatically, other operations such as manual placement, glass substrate removal and the like are needed, and the efficiency is low.
In addition, since the OLED panel is relatively fragile and has a high manufacturing cost, a PET support film is required to be attached after the glass substrate is removed. However, the support film is easily damaged in the process of being transported to the support film, unnecessary loss is caused, and no integrated equipment for peeling off the glass and then attaching the support film exists at present.
Disclosure of Invention
Aiming at the defects of the prior art, the invention provides the full-automatic operation for removing the glass substrate and pasting the PET support film on the flexible OLED display panel, each station can continuously work, the efficiency is high, the operation is simple, and the yield is high.
In order to achieve the above purpose, the present invention provides the following technical solutions: the utility model provides a glass substrate stripping system of flexible OLED panel, includes a circulation conveying mechanism that is used for transporting the OLED panel, be provided with the positioning jig of a plurality of fixed OLED panels on the circulation conveying mechanism, the region that circulation conveying mechanism passed has set gradually blowing device, laser stripping device, glass remove device, support film laminating device, turn over device and detection device.
Further circulation conveying mechanism includes the carousel, and a plurality of positioning jig circumference evenly distributed is on the carousel, and blowing device, laser stripping off device, glass shift out device, support film laminating device, turn over device and detection device follow circumference evenly distributed in the carousel outside.
Further be provided with two at least non-parallel limit blend stop on the location tool, correspond limit blend stop relative direction on the location tool and be provided with pushing mechanism, limit blend stop and pushing mechanism form the accommodation area, location tool corresponds accommodation area department and is provided with a plurality of negative pressure and inhale the hole, the negative pressure is inhaled the hole and is connected with vacuum generator.
Further the blowing device includes feed table and first sharp manipulator of getting put, first sharp manipulator of getting put is extended to circulation conveying mechanism by the feed table.
Further the laser lift-off apparatus comprises a laser.
Further the glass remove device includes glass collection device and second straight line and gets put the manipulator, the second straight line gets put the manipulator and extends to circulation conveying mechanism by glass collection device.
Further support membrane laminating device is got and is put the manipulator including support membrane leading-in mechanism and third straight line, is provided with support membrane tool on the support membrane leading-in mechanism, and the third straight line is got and is put the manipulator and extend to circulation conveying mechanism by support membrane leading-in mechanism.
Further, the structure of the support film jig is the same as that of the positioning jig.
The turn-over device further comprises a grabbing manipulator and a placing manipulator.
Further the other ejection of compact platform that is provided with of detection device, detection device includes flexible conductive probe, flexible conductive probe connects the power, be provided with fourth straight line between detection device and the ejection of compact platform and get and put the manipulator.
Compared with the prior art, the invention has the beneficial effects that:
1. through the device, full-automatic operation of removing the glass substrate, pasting the PET supporting film and finally detecting the flexible OLED display panel can be realized, each station can continuously work, the efficiency is high, the operation is simple, and the yield is high;
2. the positioning fixture is close to the edge positioning structure, so that the structure is simple and the positioning is accurate;
3. after the OLED display panel is loaded, the rotary table is communicated with the positioning jig to rotate together, and only one-time positioning is needed, so that the efficiency and the precision are greatly improved.
Drawings
FIG. 1 is a schematic flow diagram of a glass substrate stripping system for a flexible OLED panel according to the present invention;
FIG. 2 is a schematic diagram of a laser lift-off apparatus according to the present invention;
FIG. 3 is a schematic view of a glass removal device according to the present invention;
FIG. 4 is a schematic view of a supporting film laminating apparatus according to the present invention;
FIG. 5 is a schematic diagram of a turnover device according to the present invention;
FIG. 6 is a schematic diagram of a detecting device according to the present invention;
FIG. 7 is a schematic view of a support film introducing mechanism according to the present invention;
FIG. 8 is a schematic diagram of a support film introducing mechanism according to a second embodiment of the present invention;
FIG. 9 is a schematic view of a chuck structure for picking and placing a support film according to the present invention;
FIG. 10 is a schematic cross-sectional view of a positioning fixture according to the present invention;
FIG. 11 is a top view of a first embodiment of a positioning fixture according to the present invention;
fig. 12 is a top view of a second embodiment of the positioning fixture of the present invention.
Reference numerals: 1. a feed table; 11. a feed rail; 12. a tray; 2. a first linear pick-and-place manipulator; 21. a manipulator; 22. a linear rail; 3. a turntable; 4. a laser peeling device; 41. a laser; 5. positioning jig; 51. a negative pressure suction hole; 52. the side blocking strips are used for blocking; 53. a push plate; 54. a cushion pad; 55. positioning rollers; 6. a glass removal device; 61. a second linear pick-and-place manipulator; 62. a glass collection device; 63. a suction cup; 7. a support film laminating device; 71. a third linear pick-and-place manipulator; 72. a guide rail is introduced; 73. a support film jig; 74. a release film collection basket; 75. a spring; 8. a turn-over device; 81. a grabbing manipulator; 82. placing a manipulator; 9. a detection device; 91. a fourth linear pick-and-place manipulator; 92. telescoping the conductive probe; 93. a discharging table; 100. an OLED panel; 700. and (3) supporting the membrane.
Detailed Description
Embodiments of the glass substrate stripping system of the OLED panel of the present invention are further described with reference to fig. 1 to 12.
The utility model provides a glass substrate stripping system of flexible OLED panel, includes a circulation conveying mechanism that is used for transporting OLED panel 100, be provided with the location tool 5 of a plurality of fixed OLED panels 100 on the circulation conveying mechanism, the region that circulation conveying mechanism passed has set gradually blowing device, laser stripping device 4, glass remove device 6, support film laminating device 7, turn over device 8 and detection device 9.
The working process is as follows:
1. the OLED panel 100 is placed on the positioning jig 5 through the discharging device, one side of the glass substrate faces upwards, and the positioning jig 5 is moved to the laser stripping device 4 through the movement of the circulating conveying mechanism;
2. at this time, the laser peeling device 4 irradiates the OLED panel 100 to separate the glass substrate from the OLED panel 100;
3. the circulating conveying mechanism continues to move to enable the OLED panel 100 to the glass removing device 6, the detached glass substrate is removed through the glass removing device 6, and only the flexible OLED panel 100 is left on the positioning jig 5;
4. the circulating conveying mechanism moves to enable the flexible OLED panel 100 to be positioned at the supporting film attaching device 7, and the supporting film attaching device 7 attaches the PET supporting film 700 to the flexible OLED panel 100 (namely, the position of the glass substrate originally);
5. the circulating conveying mechanism moves to enable the flexible OLED panel 100 attached with the PET support film to move to the position of the turning device 8, and the turning device 8 turns over the flexible OLED panel 100, namely, one surface of the PET support film faces downwards;
6. the circulating conveying mechanism moves to enable the turned OLED panel 100 to move to the detection device 9, and the detection device 9 is used for detecting the good or defective condition of the OLED panel 100;
7. after the inspection is completed, the OLED panel 100 is taken out and the above-described process is repeated.
The preferred circulation conveying mechanism of this embodiment includes carousel 3, and a plurality of positioning jig 5 circumference evenly distributed is on carousel 3, and blowing device, laser stripping off device 4, glass shift-out device 6, support membrane laminating device 7, turn over device 8 and detection device 9 follow circumference evenly distributed in the carousel 3 outside.
In this embodiment, the number of positioning tools 5 is preferably 6, and the number of positioning tools 5 is matched according to the scheme by requiring several processes.
As shown in fig. 1, for convenience of description, in this embodiment, there are six positioning jigs 5 on the circulation conveying mechanism, and positions of the six positioning jigs 5 are named as a first station, a second station, a third station, a fourth station, a fifth station and a sixth station respectively.
The turntable 3 is connected with a driving mechanism, such as a stepping motor or other driving mechanisms, so that the turntable 3 can intermittently rotate, the turntable 3 rotates clockwise, the OLED panel 100 is placed on the positioning jig 5 of the first station, the OLED panel is rotated to the second station through the turntable 3, then another positioning jig 5 arrives at the discharging device, when the second station laser 41 irradiates the OLED panel 100, the discharging device sends another OLED panel 100 onto the positioning jig 5, after the completion, the turntable 3 continues to rotate, and all the positioning jigs 5 sequentially move to the next station and work simultaneously, so as to form continuous processing operation on the OLED panel 100; moreover, the OLED panel 100 is positioned once at the first station, the subsequent processing operation is automatically aligned with each processing device along with the rotation of the turntable 3, and the repositioning is not needed, so that the processing efficiency is higher.
The preferred positioning jig 5 of this embodiment is provided with at least two non-parallel side bars 52, and the positioning jig 5 is provided with pushing mechanism corresponding to the opposite direction of the side bars 52, and the side bars 52 and pushing mechanism form a holding area, the positioning jig 5 is provided with a plurality of negative pressure suction holes 51 corresponding to the holding area, and the negative pressure suction holes 51 are connected with a vacuum generator.
As shown in fig. 10, the OLED panel 100 is placed on the positioning fixture 5, negative pressure is generated by the vacuum generator, and the negative pressure suction holes 51 adsorb and fix the OLED panel 100 on the surface of the positioning fixture 5, so that the OLED panel 100 can be kept in place at each station, and the OLED panel 100 is kept motionless and accurate in position when the supporting film is attached when the glass substrate is cleaned; when the OLED panel 100 needs to be loosened, for example, at the position of the turn-over device 8, at this time, the negative pressure at the station is cut off, the OLED panel 100 is released, so that the OLED panel can be grasped and moved, the negative pressure suction holes 51 of each positioning jig 5 preferred in the embodiment are respectively provided with a branch air pipe, all air pipe branches are connected with a main air pipe or directly connected with a vacuum generator, a reversing valve is arranged on each branch air pipe, and the reversing valve can communicate the branch air pipe with the main air pipe or the vacuum generator; the reversing valve can be disconnected from the main gas pipe or the vacuum generator after reversing and is communicated with the outside, so that no negative pressure exists in the reversing valve, and the suction or release of the OLED panel 100 at each station can be independently and accurately controlled through the arrangement.
As shown in fig. 11 and 12, the positioning jig 5 is provided with two side bars 52, the angle between the two side bars 52 is determined according to the edge shape of the OLED panel 100, the two side bars 52 are generally L-shaped, and the two side bars 52 are preferably not contacted with each other, so as to leave a space for the top angle of the OLED panel 100 to extend into, when the OLED panel 100 is positioned, the OLED panel 100 is placed into the accommodating area by the discharging device, the edge of the OLED panel 100 is pushed by the pushing mechanism, so that the OLED panel 100 is tightly attached to the two side bars 52, at this time, the OLED panel 100 completes position determination, and the OLED panel 100 is firmly adsorbed on the surface of the positioning jig 5 by the negative pressure suction holes 51 through negative pressure, so as to complete the fixation of the OLED panel 100.
As shown in fig. 11, the pushing mechanism is a pushing plate 53, the pushing plate 53 is connected to an air cylinder, a hydraulic cylinder or a linear motor to move, and at least two pushing plates 53 are preferably disposed on one side of the longer side of the OLED panel 100 to prevent the OLED panel 100 from tilting and shifting and not being able to be accurately positioned, after the OLED panel 100 is placed in the accommodating area, the edge of the OLED panel 100 can be tightly attached to the side barrier strip 52 to complete positioning through movement of the pushing plate 53, and a cushion pad 54 is preferably disposed on the surface of the pushing plate 53, and the cushion pad 54 may be made of silica gel.
As shown in fig. 12, the pushing mechanism may also be a positioning roller 55, where the same positioning roller 55 is connected to a corresponding driving mechanism, and an air cylinder, a hydraulic cylinder or a linear motor, and meanwhile, the positioning roller 55 may perform free rotation, that is, the positioning roller 55 is rotationally connected to the end of the driving mechanism through a shaft, when the OLED panel 100 is pushed, the positioning roller 55 contacts with the edge of the OLED panel 100, and meanwhile, the OLED panel 100 moves towards the side barrier strip 52 and performs posture alignment, and at this time, the positioning roller 55 and the edge of the OLED panel 100 perform rolling friction, so that abrasion with the OLED panel 100 is reduced, and of course, the cushion 54 may still be further disposed on the surface of the positioning roller 55 for further protection.
The preferred blowing device of this embodiment includes feed table 1 and first sharp manipulator 2 of getting put, first sharp manipulator 2 of getting is got and is put by feed table 1 extension to circulation conveying mechanism.
The first linear picking and placing manipulator 2 includes a linear rail 22, and the manipulator 21 may move on the linear rail 22, that is, the linear rail 22 spans across the feeding table 1 and the turntable 3, so that the manipulator may reach a first station, the manipulator is preferably a universal manipulator, and the gripping manner of the manipulator is a suction cup 63, the universal manipulator of the suction cup 63 is the prior art, the applicant does not need to describe here in detail, and the second linear picking and placing manipulator 61, the third linear picking and placing manipulator 71, the fourth linear picking and placing manipulator 91, the gripping manipulator 81 and the placing manipulator 82 in this embodiment may all be of this structure.
Placing the OLED panel 100 to be processed on the feeding table 1, directly grabbing the OLED panel 100 by a manipulator, then moving the manipulator to the position above the first station through the linear rail 22, placing the OLED panel 100 on the positioning jig 5 at the time for a positioning procedure, and returning the manipulator to the position above the feeding table 1 to wait for grabbing the next OLED panel 100; wherein can set up a feeding track 11 on the feeding platform 1, set up a plurality of trays 12 above it, OLED panel 100 is arranged in on tray 12, and tray 12 all moves to fixed position at every turn, and the manipulator is when getting back to feeding platform 1 top, directly snatchs down can grasp (adsorb) OLED panel 100, and the here allows there is little deviation to do not influence the manipulator and snatch OLED panel 100, also can not influence the manipulator and put it in the accommodation area of station No. one accurately, the manipulator only need get back to round trip movement at the straight line this moment can, improves blowing efficiency.
As shown in fig. 2, the laser peeling device 4 in the preferred embodiment includes a laser 41, wherein the laser 41 irradiates laser light to the laser lens to scan the glass through the mirror, and irradiates the glass substrate of the OLED panel 100 with the laser light to separate the glass substrate into the prior art, and the specific principle thereof is not described herein, because the OLED panel 100 is positioned at the first station, and when rotating to the second station, the position of each OLED panel 100 reaching the second station is the same, so that only the laser scanning path needs to be initially set, and the laser peeling device 4 does not need to be repositioned with the OLED panel 100 separately each time.
As shown in fig. 3, the glass removing device 6 includes a glass collecting device 62 and a second linear pick-and-place robot 61, and the second linear pick-and-place robot 61 extends from the glass collecting device 62 to the circulation conveying mechanism.
The OLED panel 100 irradiated by the laser 41 at the second station has the glass substrate separated from the flexible OLED panel 100, and at this time, the glass substrate is sucked up by a manipulator at the third station and transported into the glass collecting device 62 through the linear rail 22, where the collecting device may be a collecting bucket or a collecting box, and is used as a waste collecting device.
As shown in fig. 4, 7 and 8, the support film laminating apparatus 7 according to the preferred embodiment includes a support film guiding mechanism and a third linear pick-and-place manipulator 71, wherein the support film guiding mechanism is provided with a support film jig 73, and the third linear pick-and-place manipulator 71 extends from the support film guiding mechanism to the circulating conveying mechanism.
Wherein the support film jig 73 has the same structure as the positioning jig 5.
The support film introducing mechanism in the application may have an introducing guide rail 72, wherein the support film jig 73 may have a plurality of support film holders, the support film is placed on the support film jig 73, the plurality of support film holders 73 move on the introducing guide rail, and the support film jig 73 moves to the lower part of the manipulator with the support film;
in order to reduce the equipment cost, only one support film jig 73 can be arranged, a plurality of support films are placed beside the support film jig 73 of the support film introducing mechanism, the support films are moved onto the support film jig 73 by a manipulator to perform positioning operation, then the support films are sucked up by the manipulator, release films which are originally attached to the support films are adsorbed on the surface of the support film jig 73, and the positions of the flexible OLED panels 100 reaching the fourth station are the same as each other along with the movement of the manipulator to the fourth station, so that the support films can be attached to the flexible OLED panels 100 just by moving the manipulator according to the preset positions and putting down the support films;
a release film collecting basket 74 is preferably arranged beside the support film jig 73 and is used for collecting release films left on the support film jig 73; as shown in fig. 7, a linear picking and placing manipulator a may be additionally provided for picking the release film into the collecting basket; as shown in fig. 8, the release film removing may also be performed by using a linear picking and placing manipulator B with a rotating arm, where the linear picking and placing manipulator with a rotating arm first moves the support film from the support film guiding mechanism to the support film fixture 73, and after the third linear picking and placing manipulator 71 removes the support film, the linear picking and placing manipulator with a rotating arm moves the release film into the release film collecting basket 74, so as to avoid mutual influence of the manipulators, and each manipulator may be set at different heights.
As shown in fig. 9, in the embodiment, the suction cup 63 type manipulator of the third linear picking and placing manipulator 71 is provided with a plurality of suction cups 63, a plurality of groups of springs 75 are arranged between the plurality of suction cups 63 and the main body of the manipulator, and meanwhile, the lengths of the plurality of groups of springs 75 are arranged in a step shape, so that the suction cup 63 on one side is higher than the other side and is arranged in a step shape, the springs 75 with the same length can be adopted, but the manipulator is slightly inclined, only the height of the suction cup 63 is required to be arranged in a step shape, when the suction cup 63 is pressed down, all suction cups 63 simultaneously suck the supporting film, and when the suction cup 63 is pulled up, one side of the suction cup 63 at a higher position is pulled up first, so that one side of the supporting film is pulled up first, and the supporting film is separated from the release film more easily; the fully pulled supporting film is also in an inclined state, and when the supporting film is attached to the flexible OLED panel 100, the lower end of the supporting film is attached to the flexible OLED panel 100 first by contact, then sequentially extends to the other side for attachment, and the attachment is smooth and free of bubbles.
The turnover device 8 according to the preferred embodiment shown in fig. 5 includes a grasping robot 81 and a placement robot 82.
At this time, the two manipulators can be placed on the same linear rail 22, when the flexible OLED panel 100 moves to the station No. five, the grabbing manipulator 81 grabs (adsorbs) the flexible OLED panel 100, and rotates 90 ° to make the flexible OLED panel 100 face the placing manipulator 82, the placing manipulator 82 adsorbs the other surface of the flexible OLED panel 100, the grabbing manipulator 81 is released, and the placing manipulator 82 rotates 90 ° to place the flexible OLED panel 100 back onto the positioning fixture 5 of the station No. five, so that the overturning action is completed.
The discharging device in this embodiment may also adopt the same manipulator as the turn-over device 8, and when the OLED panel 100 is produced, the glass is basically turned down, at this time, the stripping system may be directly connected to the production line, and the OLED panel 100 just produced is directly conveyed to the discharging device, and is grabbed onto the station No. one by the manipulator, and meanwhile, the turning action is completed, so that the glass substrate is turned up.
As shown in fig. 6, a discharging table 93 is disposed beside the detecting device 9, the detecting device 9 includes a telescopic conductive probe 92, the telescopic conductive probe 92 is connected to a power source, and a fourth linear pick-and-place manipulator 91 is disposed between the detecting device 9 and the discharging table 93.
The flexible conductive probe 92 only needs to be connected with a telescopic mechanism, after the flexible OLED panel 100 overturned through the station No. five reaches the station No. six, the flexible conductive probe 92 stretches out and contacts the conducting wire of the flexible OLED panel 100, the display panel is lightened to indicate that the product is qualified, otherwise, the flexible conductive probe 92 is retracted after detection is finished, the flexible conductive probe 92 is grabbed onto the discharging table 93 by the fourth linear picking and placing manipulator 91, so that the positioning jig 5 is emptied, and the novel OLED panel 100 to be processed can be smoothly received when the flexible OLED panel rotates to the station No. one, and the cyclic processing operation is realized.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above examples, and all technical solutions belonging to the concept of the present invention belong to the protection scope of the present invention. It should be noted that modifications and adaptations to the present invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (9)
1. A glass substrate stripping system for a flexible OLED panel, characterized by: the device comprises a circulating conveying mechanism for conveying the OLED panel, wherein the circulating conveying mechanism is provided with a plurality of positioning jigs for fixing the OLED panel, and a discharging device, a laser stripping device, a glass removing device, a supporting film laminating device, a turnover device and a detecting device are sequentially arranged in a region where the circulating conveying mechanism passes;
the support film laminating device comprises a support film guiding mechanism and a third linear picking and placing manipulator, wherein the support film guiding mechanism is provided with a support film jig, and the third linear picking and placing manipulator extends from the support film guiding mechanism to the circulating conveying mechanism;
the sucking disc formula manipulator of manipulator is put to third straight line is got has a plurality of sucking discs, has a plurality of groups of springs between a plurality of sucking discs and the main part of manipulator, and the length of a plurality of groups of springs is the echelonment and arranges simultaneously for the sucking disc of one side is higher than the opposite side, and is the ladder and arranges.
2. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the circular conveying mechanism comprises a turntable, a plurality of positioning jigs are uniformly distributed on the turntable in circumference, and a discharging device, a laser stripping device, a glass removing device, a supporting film laminating device, a turn-over device and a detecting device are uniformly distributed on the outer side of the turntable along circumference.
3. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the positioning jig is provided with at least two non-parallel side blocking strips, a pushing mechanism is arranged on the positioning jig corresponding to the opposite direction of the side blocking strips, the side blocking strips and the pushing mechanism form a containing area, a plurality of negative pressure suction holes are formed in the position, corresponding to the containing area, of the positioning jig, and the negative pressure suction holes are connected with a vacuum generator.
4. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the discharging device comprises a feeding table and a first linear picking and placing manipulator, and the first linear picking and placing manipulator extends from the feeding table to the circulating conveying mechanism.
5. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the laser lift-off apparatus includes a laser.
6. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the glass removing device comprises a glass collecting device and a second linear picking and placing manipulator, and the second linear picking and placing manipulator extends from the glass collecting device to the circulating conveying mechanism.
7. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the structure of the support film jig is the same as that of the positioning jig.
8. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the turn-over device comprises a grabbing manipulator and a placing manipulator.
9. The flexible OLED panel glass substrate stripping system of claim 1, wherein: the detection device is provided with a discharging table beside the detection device, the detection device comprises a telescopic conductive probe, the telescopic conductive probe is connected with a power supply, and a fourth linear picking and placing manipulator is arranged between the detection device and the discharging table.
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| CN201910386085.4A CN110165089B (en) | 2019-05-09 | 2019-05-09 | Glass substrate stripping system of flexible OLED panel |
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| CN116354611A (en) * | 2021-12-28 | 2023-06-30 | 威光自动化设备（南京）有限公司 | Curved glass coating blanking torsion mechanism and method |
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