CN110165089A - A kind of glass substrate stripping system of flexible OLED panel - Google Patents
A kind of glass substrate stripping system of flexible OLED panel Download PDFInfo
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- CN110165089A CN110165089A CN201910386085.4A CN201910386085A CN110165089A CN 110165089 A CN110165089 A CN 110165089A CN 201910386085 A CN201910386085 A CN 201910386085A CN 110165089 A CN110165089 A CN 110165089A
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- 239000011521 glass Substances 0.000 title claims abstract description 77
- 239000000758 substrate Substances 0.000 title claims abstract description 45
- 239000012528 membrane Substances 0.000 claims abstract description 67
- 230000004807 localization Effects 0.000 claims abstract description 40
- 238000007599 discharging Methods 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 22
- 238000010030 laminating Methods 0.000 claims abstract description 14
- 241000252254 Catostomidae Species 0.000 claims description 21
- 239000000203 mixture Substances 0.000 claims description 14
- 239000000523 sample Substances 0.000 claims description 11
- 230000000875 corresponding Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000005755 formation reaction Methods 0.000 claims description 3
- 238000007664 blowing Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 8
- 210000004279 Orbit Anatomy 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 230000002441 reversible Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000006011 modification reaction Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011112 process operation Methods 0.000 description 1
- 230000000717 retained Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09F—DISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
- G09F9/00—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
- G09F9/30—Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/7806—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate
- H01L21/7813—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices involving the separation of the active layers from a substrate leaving a reusable substrate, e.g. epitaxial lift off
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
- H01L51/0096—Substrates
- H01L51/0097—Substrates flexible substrates
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- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L51/00—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof
- H01L51/50—Solid state devices using organic materials as the active part, or using a combination of organic materials with other materials as the active part; Processes or apparatus specially adapted for the manufacture or treatment of such devices, or of parts thereof specially adapted for light emission, e.g. organic light emitting diodes [OLED] or polymer light emitting devices [PLED]
- H01L51/56—Processes or apparatus specially adapted for the manufacture or treatment of such devices or of parts thereof
-
- H—ELECTRICITY
- H01—BASIC ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H01L2251/00—Indexing scheme relating to organic semiconductor devices covered by group H01L51/00
- H01L2251/50—Organic light emitting devices
- H01L2251/56—Processes specially adapted for the manufacture or treatment of OLED
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
Abstract
The invention discloses a kind of glass substrate stripping systems of flexible OLED panel, circulation conveying mechanism including one to transport oled panel, the localization tool of several fixed oled panels is provided in the circulation conveying mechanism, the region that the circulation conveying mechanism is passed through is disposed with discharging device, laser lift-off device, glass moving-out device, support membrane laminating apparatus, turn-over rig and detection device, flexible OLED display panel removal glass substrate and patch PET support membrane full-automatic operation may be implemented in the present invention, each station can be with continuous work, it is high-efficient, it is easy to operate, high yield rate.
Description
Technical field
The invention belongs to flexible OLED panel production equipment field, more specifically to a kind of glass of flexible OLED panel
Glass strippable substrate system.
Background technique
Hyundai electronics development in science and technology is rapid, especially display screen technology, applies till now increasingly from mature LCD
Extensive OLED has had evolved to the OLED display panel of flexible at present.The preparation of flexible OLED display panel with
Common OLED display panel is different greatly, and the difficulty of production is higher, and process is also different greatly with common OLED display panel.
Structurally, flexibility OLED is exactly with the most apparent difference of common OLED, flexible OLED panel is by the glass of bottom
Glass substrate eliminates.But current oled panel flexible still uses bottom to be laid with glass substrate in production, then again
The structure sheaf of each OLED is made above.
So being that an indispensable process is grasped the glass substrate removal of bottom at present in flexible OLED display production
Make.
The production of flexible OLED display panel is all that more sheets of flexible OLED display surface is first carried out on a bulk of glass substrate
Plate makes together, is at this time generally referred to as master slice, needs to be cut into monolithic after completing, then do processing procedure below.In singulation piece
When, have 2 kinds of modes at present: 1 is bulk PET protection film first to be changed in the full wafer glass substrate removal of master slice to stick, then carry out
It is cut into monolithic flexibility OLED display panel；2 be that the OLED display panel band glass substrate of master slice is directly cut into list together
Piece；Then glass substrate is removed again.
The technical program is directed to the 2nd kind of mode, for monolithic the flexible OLED display panel with glass substrate into
Row glass substrate strip operation.First singulation piece removes glass substrate again, and this mode has certain advantage, and the monolithic cut can be first
It tests, does the later process such as glass removing in the case where non-defective unit again, can be much less in the case where product yield is low
After-cost.
It is substantially the method using laser lift-off in the stripping means of glass substrate currently on the market, passes through laser irradiation
The PI molecule of glass and PI layers of contact surface is interrupted, then glass substrate and OLED display panel can be separated.But
Existing market is all the manual operation of either simplex sequence to the glass of glass substrate, and in addition to laser scans are to be automatically performed, remaining is needed
It manually to put, operation, the efficiency such as glass substrate removal are lower.
In addition, because oled panel is relatively fragile, and manufacturing cost is relatively high, after glass substrate removal,
Also need to stick one layer of PET support membrane.But it is very easy to be damaged during transporting patch support membrane, causes unnecessary damage
It loses, there is presently no then equipment that support membrane is pasted in the removing of integrated glass.
Summary of the invention
In view of the deficiencies of the prior art, the present invention provides one kind, and flexible OLED display panel removal glass base may be implemented
Plate and patch PET support membrane full-automatic operation, each station can be with continuous work, high-efficient, easy to operate, high yield rate.
To achieve the above object, the present invention provides the following technical scheme that a kind of glass substrate of flexible OLED panel is shelled
From system, circulation conveying mechanism including one to transport oled panel is provided with several fixations in the circulation conveying mechanism
The localization tool of oled panel, the region that the circulation conveying mechanism is passed through be disposed with discharging device, laser lift-off device,
Glass moving-out device, support membrane laminating apparatus, turn-over rig and detection device.
The further circulation conveying mechanism includes turntable, several localization tool even circumferentials are distributed on turntable,
Discharging device, laser lift-off device, glass moving-out device, support membrane laminating apparatus, turn-over rig and detection device are circumferentially equal
It is even to be distributed on the outside of turntable.
At least two not parallel blend stops that keep to the side are provided on the further localization tool, correspondence is leaned on localization tool
Side bumper relative direction is provided with pushing mechanism, and keep to the side blend stop and pushing mechanism formation receiving area, the localization tool is corresponding to be held
Na Quchu is provided with several negative pressure suckers, and the negative pressure sucker is connected with vacuum generator.
The further discharging device includes loading bay and first straight line pick-and-place manipulator, the first straight line pick-and-place machine
Tool hand extends to circulation conveying mechanism by loading bay.
The further laser lift-off device includes laser.
The further glass moving-out device includes glass collection device and second straight line pick-and-place manipulator, and described second
Straight line pick-and-place manipulator extends to circulation conveying mechanism by glass collection device.
The further support membrane laminating apparatus includes support membrane introducing mechanism and third straight line pick-and-place manipulator, support
Supported film jig is set on film introducing mechanism, and third straight line pick-and-place manipulator extends to circulation conveying by support membrane introducing mechanism
Mechanism.
The further support membrane jig structure is identical as positioning tool structure.
The further turn-over rig includes catching robot and placement manipulator.
Discharging platform is provided with by the further detection device, the detection device includes flexible conducting probe, is stretched
Conducting probe connects power supply, and the 4th straight line pick-and-place manipulator is provided between the detection device and discharging platform.
Compared with prior art, the beneficial effects of the present invention are:
1, by the present apparatus, flexible OLED display panel removal glass substrate, patch PET support membrane may be implemented and finally detect
Full-automatic operation, each station can be with continuous work, high-efficient, easy to operate, high yield rates；
2, it is kept to the side location structure by localization tool, the simple accurate positioning of structure；
3, the workbench of rotating disc type, after loading OLED display panel, connection localization tool is rotated together, and only need to once be positioned, greatly
Efficiency and precision are improved greatly.
Detailed description of the invention
Fig. 1 is the flow diagram of the glass substrate stripping system of flexible OLED panel of the present invention；
Fig. 2 is the structural schematic diagram of laser lift-off device in the present invention；
Fig. 3 is the structural schematic diagram of glass moving-out device in the present invention；
Fig. 4 is the structural schematic diagram of support membrane laminating apparatus in the present invention；
Fig. 5 is the structural schematic diagram of turn-over rig in the present invention；
Fig. 6 is the structural schematic diagram of detection device in the present invention；
Fig. 7 is the structural schematic diagram one of support membrane introducing mechanism in the present invention；
Fig. 8 is the structural schematic diagram two of support membrane introducing mechanism in the present invention；
Fig. 9 is the sucker structure schematic diagram that support membrane is picked and placed in the present invention；
Figure 10 is the schematic diagram of the section structure of localization tool in the present invention；
Figure 11 is the top view of the first embodiment of localization tool in the present invention；
Figure 12 is the top view of second of embodiment of localization tool in the present invention.
Appended drawing reference: 1, loading bay；11, feed rail；12, pallet；2, first straight line pick-and-place manipulator；21, manipulator；
22, rectilinear orbit；3, turntable；4, laser lift-off device；41, laser；5, localization tool；51, negative pressure sucker；52, side bumper is leaned on
Item；53, push plate；54, cushion；55, positioning roller；6, glass moving-out device；61, second straight line pick-and-place manipulator；62, glass
Collection device；63, sucker；7, support membrane laminating apparatus；71, third straight line pick-and-place manipulator；72, guide rail is imported；73, support membrane
Jig；74, release film collects basket；75, spring；8, turn-over rig；81, catching robot；82, manipulator is placed；9, detection dress
It sets；91, the 4th straight line pick-and-place manipulator；92, stretch conducting probe；93, discharging platform；100, oled panel；700, support membrane.
Specific embodiment
It is described further referring to figs. 1 to embodiment of the Figure 12 to the glass substrate stripping system of oled panel of the present invention.
A kind of glass substrate stripping system of flexible OLED panel, it is defeated to transport the circulation of oled panel 100 including one
Mechanism is sent, the localization tool 5 of several fixed oled panels 100, the cyclic conveyor are provided in the circulation conveying mechanism
The region that structure passes through is disposed with discharging device, laser lift-off device 4, glass moving-out device 6, support membrane laminating apparatus 7, turns over
Face device 8 and detection device 9.
The course of work are as follows:
1, oled panel 100 is placed on localization tool 5 by discharging device, and makes glass substrate side upward,
It is mobile by circulation conveying mechanism, it is moved to localization tool 5 at laser lift-off device 4；
2, laser lift-off device 4 is irradiated oled panel 100 at this time, is detached from glass substrate and oled panel 100；
3, circulation conveying mechanism continues to move to make at oled panel 100 to glass moving-out device 6, will by glass moving-out device 6
The glass substrate of disengaging removes, and is only left flexible OLED panel 100 on localization tool 5；
4, circulation conveying mechanism movement makes at flexible OLED panel 100 to support membrane laminating apparatus 7, and support membrane laminating apparatus 7 will
PET support membrane 700 is fitted in flexible OLED panel 100 and (is originally used at glass substrate)；
5, circulation conveying mechanism is mobile is moved to the flexible OLED panel 100 for being bonded PET support membrane at turn-over rig 8, passes through
Flexible OLED panel 100 is carried out turn-over by turn-over rig 8, i.e., so that PET support membrane one side downward；
6, circulation conveying mechanism movement is moved to the oled panel 100 after turn-over at detection device 9, right using detection device 9
100 non-defective unit of oled panel or the detection of substandard products situation；
7, oled panel 100 is taken out after the completion of detecting, and is repeated the above process.
Preferably the circulation conveying mechanism includes turntable 3 to the present embodiment, several 5 even circumferentials of localization tool are distributed in
On turntable 3, discharging device, laser lift-off device 4, glass moving-out device 6, support membrane laminating apparatus 7, turn-over rig 8 and detection
Device 9 is circumferentially uniformly distributed in 3 outside of turntable.
The number that wherein localization tool 5 is arranged in the present embodiment is preferably 6, and the quantity of localization tool 5 is according to this
Scheme needs several processing procedures matched.
As shown in Figure 1, for convenience of describing, by there are six the localization tools 5 in circulation conveying mechanism in the present embodiment, six
5 position of localization tool is respectively designated as No.1 station, No. two stations, No. three stations, No. four stations, No. five stations and No. six
Station.
Its turntable 3 connects a driving mechanism, such as stepper motor or other driving mechanisms, enables turntable 3 intermittent
Rotation, turntable 3 are rotated in the clockwise direction, and oled panel 100 is placed on the localization tool 5 of No.1 station, passes through 3 turns of turntable
It moves to No. two stations, is reached at discharging device then having another localization tool 5 at this time, in No. two station lasers 41 to OLED
When panel 100 irradiates, another oled panel 100 is sent on localization tool 5 by discharging device, after, turntable 3 continues to rotate,
All localization tools 5 are sequentially moved to next station and work simultaneously, are formed continuously to the processing of oled panel 100
Operation；And only oled panel 100 need to once be positioned at No.1 station, subsequent processing operation is with turntable 3
Rotation is aligned with each processing unit automatically, and without repositioning, processing efficiency is higher.
The present embodiment is preferably provided at least two not parallel blend stops 52 that keep to the side on the localization tool 5, and positioning is controlled
Corresponding 52 relative direction of blend stop of keeping to the side is provided with pushing mechanism on tool 5, keep to the side blend stop 52 and pushing mechanism formation receiving area, described
Localization tool 5 is provided with several negative pressure suckers 51 at corresponding receiving area, and the negative pressure sucker 51 is connected with vacuum generator.
As shown in Figure 10, oled panel 100 is placed on localization tool 5, generates negative pressure by vacuum generator, negative pressure is inhaled
Oled panel 100 is absorbed and fixed at 5 surface of localization tool by hole 51, so that oled panel 100 can in each station
It is held in place, and when glass substrate is removed, oled panel 100 is remained stationary when support membrane is bonded, and position is accurate；It is needing
When unclamping oled panel 100, such as at turn-over rig 8, the negative pressure at this station is cut off at this time, oled panel 100 is discharged, makes it
Can be crawled and move, the present embodiment preferably each localization tool 5 negative pressure sucker 51 individually have a branch tracheae,
All tracheae branches connect a total road tracheae or are directly connected to vacuum generator, and a reversal valve is arranged on every branch tracheae,
Branch tracheae can be connected to by reversal valve with total road tracheae or vacuum generator；Reversal valve can also be in the commutation road Hou Yuzong tracheae or true
Empty generator is disconnected and is in communication with the outside, and makes individually be precisely controlled at each station without negative pressure by this setting inside it
Oled panel 100 is adsorbed or is discharged.
Such as Figure 11 and Figure 12, wherein there are two the blend stops 52 that keeps to the side for tool on localization tool 5, according to the edge of oled panel 100
Shape is to determine the angle between two blend stops 52 that keep to the side, and usually L-type is arranged, and preferred two 52 phases of blend stop of keeping to the side
It is not in contact with each other, space is protruded into the apex angle for reserving for oled panel 100, when positioning to oled panel 100, discharging device will
Oled panel 100 is put into receiving area, the edge of oled panel 100 is pushed by pushing mechanism, so that oled panel 100 is adjacent to
Two blend stops 52 that keep to the side, the position of the completion of oled panel 100 at this time determine that negative pressure sucker 51 passes through negative pressure for oled panel 100 again
It is firmly adsorbed on 5 surface of localization tool, completes the fixation of oled panel 100.
As shown in figure 11, wherein pushing mechanism is push plate 53, and push plate 53 connects cylinder, hydraulic cylinder or linear motor and moved
It is dynamic, and at least two push plates 53 preferably are set in 100 longer sides side of oled panel, to prevent oled panel 100 from inclining
Tiltedly offset can not be accurately positioned, and after oled panel 100 is put into receiving area, can make oled panel 100 by the movement of push plate 53
Edge and the blend stop 52 that keeps to the side are adjacent to completion positioning, cushion 54 preferably are arranged on the surface of push plate 53,54 material of cushion can
Using silica gel.
As shown in figure 12, wherein pushing mechanism can also be positioning roller 55, and same positioning roller 55 connects corresponding drive
Motivation structure, cylinder, hydraulic cylinder or linear motor, while positioning roller 55 can be freely rotated, i.e. positioning roller 55 and driving
Mechanism end is rotatablely connected by axis, when pushing oled panel 100, the EDGE CONTACT of positioning roller 55 and oled panel 100,
100 side of oled panel is mobile to the blend stop 52 that keeps to the side simultaneously, and Bian Jinhang posture is ajusted, at this time positioning roller 55 and oled panel 100
Edge rolling friction reduces the abrasion with oled panel 100, and cushion 54 can still be arranged again and do for certain 55 surface of positioning roller
Further protection.
Preferably the discharging device includes loading bay 1 and first straight line pick-and-place manipulator 2 to the present embodiment, and described first is straight
Line pick-and-place manipulator 2 extends to circulation conveying mechanism by loading bay 1.
Wherein first straight line pick-and-place manipulator 2 includes a rectilinear orbit 22, and manipulator 21 can move on rectilinear orbit 22,
I.e. rectilinear orbit 22 can make manipulator reach No.1 station across loading bay 1 and turntable 3, this manipulator is preferably universal
Manipulator, and its grasp mode is 63 formula of sucker, the universal manipulator of 63 formula of sucker is the prior art, and applicant does not do superfluous herein
It states, second straight line pick-and-place manipulator 61, the third straight line pick-and-place manipulator 71, the pick-and-place of the 4th straight line being previously mentioned in the present embodiment
Manipulator 91, catching robot 81 and place manipulator 82 can structure thus.
Oled panel 100 to be processed is placed on loading bay 1, manipulator directly grabs oled panel 100, then leads to
It crosses rectilinear orbit 22 and is moved to above No.1 station to place oled panel 100 and carry out positioning work on localization tool 5 at this moment
Sequence, and the top that manipulator returns to loading bay 1 waits the next oled panel 100 of crawl；A wherein settable charging on loading bay 1
Multiple pallets 12 are arranged in track 11 above it, and oled panel 100 is placed on pallet 12, and each pallet 12 is moved to fixation
Position, for manipulator when returning to above loading bay 1, crawl can catch (absorption) oled panel 100 directly down, allow herein
There is little deviation, has no effect on manipulator crawl oled panel 100, manipulator will not be influenced by it and be accurately put into No.1 station
Receiving area in, manipulator need to only return in straight line and move back and forth at this time, improve blowing efficiency.
As shown in Fig. 2, preferably the laser lift-off device 4 includes laser 41 to the present embodiment, wherein laser 41 is logical
It crosses reflecting mirror to adjust the angle laser, injects laser lens and glass is scanned, utilize the glass of laser irradiation oled panel 100
Glass substrate makes glass substrate be separated into the prior art, and this will not be repeated here by concrete principle applicant, since oled panel 100 exists
Positioning is completed in No.1 station, and when turning to No. two stations, 100 position of oled panel of each arrival herein is identical, therefore
Only need to laser beam scan path carry out initially set, laser lift-off device 4 without every time individually with oled panel 100 again
Positioning.
As shown in figure 3, the glass moving-out device 6 includes glass collection device 62 and second straight line pick-and-place manipulator 61,
The second straight line pick-and-place manipulator 61 extends to circulation conveying mechanism by glass collection device 62.
No. two stations through laser 41 irradiation after oled panel 100, glass substrate with flexible OLED panel
100 are separated from each other, and pick up glass substrate in No. three stations at this time using manipulator and pass through rectilinear orbit 22 and are transported to glass
In collection device 62, wherein collection device is collecting vessel or collecting box, as waste material collection device.
As shown in Fig. 4, Fig. 7 and Fig. 8, preferably the support membrane laminating apparatus 7 includes that support membrane imports machine to the present embodiment
Structure and third straight line pick-and-place manipulator 71, Supported film jig 73 is arranged on support membrane introducing mechanism, and third straight line picks and places mechanical
Hand 71 extends to circulation conveying mechanism by support membrane introducing mechanism.
Wherein support membrane jig 73 is identical as 5 structure of localization tool.
Support membrane introducing mechanism can have an importing guide rail 72 in the application, and wherein support membrane jig 73 can have multiple,
Support membrane is placed on support membrane jig 73, and multiple support membrane jigs 73 move on importing guide rail, and support membrane jig 73 takes support
Film is moved to below manipulator；
To reduce equipment cost, support membrane jig 73 can only be arranged one, put by the support membrane jig 73 of support membrane introducing mechanism
Multiple support membranes are set, support membrane is moved on support membrane jig 73 by manipulator and carries out positioning operation, then manipulator will
Support membrane picks up, and the release film being bonded originally with support membrane is then attracted to 73 surface of support membrane jig, as manipulator moves
It moves to No. four stations, each 100 position of flexible OLED panel for reaching No. four stations is all the same, therefore manipulator is according to pre-
If position is mobile and putting down support membrane can be such that support membrane is bonded just with flexible OLED panel 100；
Preferably by support membrane jig 73 be arranged release film collect basket 74, for collect be retained on support membrane jig 73 from
Type film；As shown in fig. 7, a straight line pick-and-place manipulator A can additionally be arranged for grabbing in release film to collection basket；As shown in figure 8,
Removing release film can also be straight line pick-and-place manipulator B using one with rotating arm, this straight line pick-and-place manipulator with rotating arm
Support membrane is moved on support membrane jig 73 by support membrane introducing mechanism first, will be supported to third straight line pick-and-place manipulator 71
After film is taken away, release film is moved to release film again and collected in basket 74 by this straight line pick-and-place manipulator with rotating arm, to keep away
Exempt from each manipulator to influence each other, each manipulator can be set to different height.
As shown in figure 9, the 63 formula manipulator of sucker of third straight line pick-and-place manipulator 71 has multiple suckers in the present embodiment
63, there is several groups spring 75, while the length of several groups spring 75 is in ladder between multiple suckers 63 and the main body of manipulator
Shape arrangement, so that equal length spring can also be used compared with other side height, and in step arrangement in the sucker 63 of side certainly herein
75, but manipulator itself is slightly tilted, and need to only reach 63 height of sucker and own in step arrangement when sucker 63 pushes
Sucker 63 is sucked support membrane simultaneously, when pull-up 63 side of sucker in higher position will pull-up first, make the side of support membrane
First pull-up, it is easier to make support membrane and release UF membrane；The support membrane being pulled up completely is also at heeling condition, with flexibility
It is then that first contact with flexible OLED panel 100 in lower one end is first bonded, then successively to the other side when oled panel 100 is bonded
Extend fitting, is bonded smooth bubble-free and generates.
Preferably the turn-over rig 8 includes catching robot 81 and placement manipulator 82 to the present embodiment as shown in Figure 5.
Two manipulators can be placed on same rectilinear orbit 22 at this time, when flexible OLED panel 100 is moved to No. five stations
When, wherein catching robot 81 picks up flexible OLED panel 100 (absorption), and rotates 90 °, makes 100 court of flexible OLED panel
To manipulator 82 is placed, the another side that manipulator 82 adsorbs this flexible OLED panel 100 is placed, catching robot 81 is unclamped, put
It sets manipulator 82 and rotates 90 ° and flexible OLED panel 100 is put back on the localization tool 5 of No. five stations i.e. completion rotary movement.
Manipulator identical with turn-over rig 8 can also be used in discharging device in the present embodiment, is existed by oled panel 100
When production, the basic side of glass downward, can be such that this stripping system directly connect with production line, just produce at this time
Oled panel 100 is fed directly at discharging device, is grabbed by manipulator to No.1 station, and be completed at the same time rotary movement,
Make glass substrate upward.
As shown in fig. 6, being provided with discharging platform 93 by the detection device 9, the detection device 9 includes flexible conducting probe
92, the conducting probe 92 that stretches connects power supply, is provided with the 4th straight line pick-and-place manipulator between the detection device 9 and discharging platform 93
91。
The conducting probe 92 that wherein stretches only needs conducting probe to connect telescoping mechanism, what is overturn by No. five stations
After flexible OLED panel 100 reaches No. six stations, the conducting probe 92 that stretches stretches out, and contacts the conducting wire of flexible OLED panel 100,
Display panel, which is lighted, indicates that product is qualified, is otherwise substandard products, and flexible conducting probe 92 retracts after the completion of detection, straight by the 4th
Line pick-and-place manipulator 91 is grabbed to discharging platform 93, and localization tool 5 herein is vacated, when it turns to No.1 station
New oled panel to be processed 100 can be smoothly received, realizes iteration process operation.
The above is only a preferred embodiment of the present invention, protection scope of the present invention is not limited merely to above-mentioned implementation
Example, all technical solutions belonged under thinking of the present invention all belong to the scope of protection of the present invention.It should be pointed out that for the art
Those of ordinary skill for, several improvements and modifications without departing from the principles of the present invention, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of glass substrate stripping system of flexible OLED panel, it is characterised in that: including one to transport oled panel
Circulation conveying mechanism is provided with the localization tool of several fixed oled panels, the circulation conveying in the circulation conveying mechanism
The region that mechanism is passed through is disposed with discharging device, laser lift-off device, glass moving-out device, support membrane laminating apparatus, turns over
Face device and detection device.
2. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the circulation is defeated
Sending mechanism includes turntable, several localization tool even circumferentials are distributed on turntable, discharging device, laser lift-off device, glass
Moving-out device, support membrane laminating apparatus, turn-over rig and detection device are circumferentially uniformly distributed on the outside of turntable.
3. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the positioning is controlled
At least two not parallel blend stops that keep to the side are provided on tool, corresponding blend stop relative direction of keeping to the side is provided with promotion machine on localization tool
Structure, keep to the side blend stop and pushing mechanism formation receiving area, the localization tool, which corresponds to, is provided with several negative pressure suckers at receiving area,
The negative pressure sucker is connected with vacuum generator.
4. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the blowing dress
It sets including loading bay and first straight line pick-and-place manipulator, the first straight line pick-and-place manipulator extends to circulation conveying by loading bay
Mechanism.
5. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the laser stripping
It include laser from device.
6. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the glass moves
Device includes glass collection device and second straight line pick-and-place manipulator out, and the second straight line pick-and-place manipulator is collected by glass and filled
It sets and extends to circulation conveying mechanism.
7. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the support membrane
Laminating apparatus includes support membrane introducing mechanism and third straight line pick-and-place manipulator, and setting Supported film is controlled on support membrane introducing mechanism
Tool, third straight line pick-and-place manipulator extend to circulation conveying mechanism by support membrane introducing mechanism.
8. the glass substrate stripping system of flexible OLED panel according to claim 7, it is characterised in that: the support membrane
Jig structure is identical as positioning tool structure.
9. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the turn-over dress
It sets including catching robot and places manipulator.
10. the glass substrate stripping system of flexible OLED panel according to claim 1, it is characterised in that: the detection
Discharging platform is provided with by device, the detection device includes flexible conducting probe, and the conducting probe that stretches connects power supply, the detection
The 4th straight line pick-and-place manipulator is provided between device and discharging platform.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910386085.4A CN110165089A (en) | 2019-05-09 | 2019-05-09 | A kind of glass substrate stripping system of flexible OLED panel |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910386085.4A CN110165089A (en) | 2019-05-09 | 2019-05-09 | A kind of glass substrate stripping system of flexible OLED panel |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110165089A true CN110165089A (en) | 2019-08-23 |
Family
ID=67634143
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910386085.4A Pending CN110165089A (en) | 2019-05-09 | 2019-05-09 | A kind of glass substrate stripping system of flexible OLED panel |
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| CN (1) | CN110165089A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114226296A (en) * | 2021-11-24 | 2022-03-25 | 湖南绿蔓生物科技股份有限公司 | Full-automatic intelligent extraction machine is used in production of cyclocarya paliurus concentrate |
-
2019
- 2019-05-09 CN CN201910386085.4A patent/CN110165089A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114226296A (en) * | 2021-11-24 | 2022-03-25 | 湖南绿蔓生物科技股份有限公司 | Full-automatic intelligent extraction machine is used in production of cyclocarya paliurus concentrate |
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