CN110161812A - Heavy industry medical fluid and preparation method thereof, reworking apparatus - Google Patents
Heavy industry medical fluid and preparation method thereof, reworking apparatus Download PDFInfo
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- CN110161812A CN110161812A CN201910489290.3A CN201910489290A CN110161812A CN 110161812 A CN110161812 A CN 110161812A CN 201910489290 A CN201910489290 A CN 201910489290A CN 110161812 A CN110161812 A CN 110161812A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/425—Stripping or agents therefor using liquids only containing mineral alkaline compounds; containing organic basic compounds, e.g. quaternary ammonium compounds; containing heterocyclic basic compounds containing nitrogen
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- G03F7/426—Stripping or agents therefor using liquids only containing organic halogen compounds; containing organic sulfonic acids or salts thereof; containing sulfoxides
Abstract
The present invention provides a kind of heavy industry medical fluid and preparation method thereof, reworking apparatus.Heavy industry medical fluid of the invention includes the component of following parts by weight: deionized water: 20~30 parts；Tetramethylammonium hydroxide: 3~10 parts；Dimethyl sulfoxide: 30~45 parts；N-Methyl pyrrolidone: 1~5 part；Diethylene glycol monomethyl ether: 10~20 parts；Azanol: 1~5 part.The present invention can be improved the effect to substrate heavy industry.
Description
Technical field
The present invention relates to field of display technology more particularly to a kind of heavy industry medical fluid and preparation method thereof, reworking apparatus.
Background technique
Currently, LCD technology has become the mainstream of display technology, liquid crystal display (Liquid Crystal
Display, LCD) there are many merits such as thin fuselage, power saving, radiationless, it has obtained widely answering in people's daily life
With.
However, often having foreign matter attached between the processing procedure of each film layer in the manufacturing process of panel of LCD
Or the film pattern size that exposes out the defects of not being inconsistent standardization, cause follow-up process to generate film layer is peeled off or display is abnormal etc.
Problem, therefore, in order to avoid the generation of the above problem, it is necessary to for such surface there is the substrate of bad defect to carry out heavy industry
(Rework) the step of, makes the substrate after heavy industry put into production again after the above-mentioned bad defect on removal substrate.COA
(Color Filter on Array) technology is that chromatic filter layer is prepared the technology in array substrate.It is with COA substrate
Example, after forming chromatic filter layer in array substrate, if being needed there are bad defect to the COA base in discovery chromatic filter layer
Plate carries out heavy industry step.In the prior art, the chromatic filter layer in array substrate is carried out straight by physics peel-off device mostly
Connect removing.
However, above-mentioned heavy industry step is easy to appear chromatic filter layer removing due to removing to chromatic filter layer using physics
It is not thorough, the problem of heavy industry effect difference.
Summary of the invention
The present invention provides a kind of heavy industry medical fluid and preparation method thereof, reworking apparatus, can be improved the effect of heavy industry.
In a first aspect, the present invention provides a kind of heavy industry medical fluid, the component including following parts by weight: deionized water: 20~30
Part；Tetramethylammonium hydroxide: 3~10 parts；Dimethyl sulfoxide: 30~45 parts；N-Methyl pyrrolidone: 1~5 part；Diethylene glycol (DEG)-first
Ether: 10~20 parts；Azanol: 1~5 part.
Second aspect, the present invention provide a kind of preparation method of above-mentioned heavy industry medical fluid, comprising: will be in addition to deionized water
Each component is added in the deionized water, obtains the heavy industry medical fluid.
The third aspect, the present invention provide a kind of reworking apparatus, comprising: reaction chamber and the base being arranged in inside reaction chamber
Plate bearing assembly and spray head are placed on base plate carrying component to heavy industry substrate, are stated spray head and are arranged in base plate carrying component
Top, spray head are used for above-mentioned heavy industry medical fluid is sprayed to heavy industry substrate, so that the color blocking material layer to heavy industry substrate surface
Removing.
Heavy industry medical fluid of the invention and preparation method thereof, reworking apparatus.Heavy industry medical fluid includes the component of following parts by weight: being gone
Ionized water: 20~30 parts；Tetramethylammonium hydroxide: 3~10 parts；Dimethyl sulfoxide: 30~45 parts；N-Methyl pyrrolidone: 1~
5 parts；Diethylene glycol monomethyl ether: 10~20 parts；Azanol: 1~5 part.The heavy industry medical fluid passes through tetramethylammonium hydroxide, dimethyl is sub-
Sulfone, N-Methyl pyrrolidone, diethylene glycol monomethyl ether, azanol and deionized water are rationally assembled, and make the heavy industry medical fluid to base
The chromatic filter layer of plate surface is dissolved and traditional physics removing is changed to chemical stripping, and removing is more thorough, thus
Improve heavy industry effect.
The preparation method of heavy industry medical fluid provided by the invention, simple process, convenient for being realized under general working condition.
Reworking apparatus of the invention is dissolved the color blocking material layer on substrate, PS, BM by spraying heavy industry medical fluid to substrate
To remove, since physics in the prior art removing is changed to chemolysis removing, more thorough, heavy industry effect is removed
It is good.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to make simply to introduce, it should be apparent that, the accompanying drawings in the following description is this hair
Bright some embodiments for those of ordinary skill in the art without creative efforts, can be with root
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the structural schematic diagram of reworking apparatus provided by the invention；
Fig. 2 is that heavy industry medical fluid provided by the invention carries out the array substrate photo after heavy industry to COA substrate；
Fig. 3 is the partial enlargement photo for the array substrate that heavy industry medical fluid provided by the invention carries out COA substrate after heavy industry；
Fig. 4 is the photo that heavy industry medical fluid provided by the invention carries out color blocking material layer overburden after heavy industry to COA substrate；
Fig. 5 is to remove cleaning solution using conventional base plate to carry out COA substrate in the array substrate photo after heavy industry；
Fig. 6 is the partial enlargement photograph removed cleaning solution using conventional base plate and carry out the array substrate after heavy industry to COA substrate
Piece；
Fig. 7 is the photo removed cleaning solution using conventional base plate and carry out color blocking material layer overburden after heavy industry to COA substrate；
Fig. 8 is the electrical testing image for the array substrate that heavy industry medical fluid provided by the invention carries out COA substrate after heavy industry；
Fig. 9 is the electrical testing figure that the array substrate that cleaning solution carries out COA substrate after heavy industry is removed using conventional base plate
Picture；
Figure 10 is the electrical testing image for not needing the array substrate of heavy industry normally.
Description of symbols:
1- reaction chamber；
2- base plate carrying component；
3- spray head；
4- waits for heavy industry substrate；
5- transport roller；
The first fluid reservoir of 6-；
The second fluid reservoir of 7-；
8- fluid reservoir；
9- heater；
10- changeover module；
The outlet end of the first fluid reservoir of 61-；
The outlet end of the second fluid reservoir of 71-；
101, the liquid feeding end of 102- changeover module；
The outlet end of 103- changeover module.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
All other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
After the prior art forms chromatic filter layer in color membrane substrates or COA substrate, if chromatic filter layer has bad defect,
When needing to carry out heavy industry, often directly chromatic filter layer physics is removed using heavy industry equipment, during being somebody's turn to do, it is possible to occur color
Color filtering optical layer is partially stripped not clean problem, and the substrate for remaining color blocking puts into production again, will lead to follow-up process and generates film
The problems such as layer peels off influences the yield of substrate and eventually leads to display panel display exception.In order to avoid the generation of the problem, originally
Invention considers to change the property of removing, physics is removed and is changed to chemolysis, can fully to remove during heavy industry
Chromatic filter layer.
Embodiment one
The embodiment of the present invention one provides a kind of heavy industry medical fluid, includes the component of following parts by weight in the heavy industry medical fluid:
Deionized water: 20~30 parts；
Tetramethylammonium hydroxide: 3~10 parts；
Dimethyl sulfoxide: 30~45 parts；
N-Methyl pyrrolidone: 1~5 part；
Diethylene glycol monomethyl ether: 10~20 parts；
Azanol: 1~5 part.
The heavy industry medical fluid is used to remove the color blocking material layer (chromatic filter layer) in color membrane substrates or COA substrate.Specifically
, by using heavy industry medical fluid to the color blocking material layer on substrate, PS (Photo Spacer, light sensitive spacer), BM (Black
Matrix, black matrix") dissolution is to remove, since physics in the prior art removing is changed to chemolysis removing,
Removing is more thorough, and heavy industry effect is good.
Wherein, deionized water (DIW, CAS No.:7732-18-5) is used as solvent, for dissolving remaining component.
Tetramethylammonium hydroxide (TMAH, CAS No.:75-59-2) has stronger corrosivity, for removing on substrate
Color blocking material layer, PS, BM remove color blocking material layer, PS, BM from substrate.
N-Methyl pyrrolidone (NMP, CAS No.:872-50-4) is soluble easily in water, can dissolve it is most of it is organic with it is inorganization
Object, polar gas, natural and synthetic macromolecular compound are closed, as excellent solvent, as the component of heavy industry medical fluid, energy
The various impurity of enough effectively dissolution substrate surfaces, and it is not damaged to substrate, it is also biodegradable.
Dimethyl sulfoxide (DMSO, CAS No.:67-68-5) and N-Methyl pyrrolidone (NMP, CAS No.:872-50-
4) cooperate, for dissolving color blocking material layer, PS and BM after removing.This is because removing after color blocking material layer, PS and
The strainer of the easy occluding device such as BM, causes equipment fault, in order to avoid this kind of situation, the color blocking after needing to remove
Material layer, PS and BM dissolution.Further, since dimethyl sulfoxide has passivation, therefore tetramethylammonium hydroxide and diformazan
Base sulfoxide is used cooperatively, and can reduce heavy industry medical fluid to the corrosivity of the metal wiring on substrate.
Diethylene glycol monomethyl ether (DGME, CAS No.:111-77-3) and azanol (Hydroxylamine, CAS No.:7803-
It can 49-8) increase the mobility of heavy industry medical fluid.Wherein, diethylene glycol monomethyl ether can inhibit heavy industry medical fluid to corrode as bleeding agent
Metal wiring on substrate.
In addition, need to be monitored the medical fluid liquid level in drug solution preparing tank in the configuration process of heavy industry medical fluid, but by
It is easy to influence the accuracy of the judgement of the liquid level in drug solution preparing tank in medical fluid producing bubbles inside etc. in stirring.Therefore, may be used
It further include the defoaming agent and/or surfactant of 1~5 parts by weight to select the recipe ingredient for making heavy industry medical fluid, to eliminate stirring
Generated bubble in the process, defoaming agent can be the polymer without containing machine silicon class.In addition, surfactant is mainly used for having
Effect reduces the surface tension of medical fluid, improves the levelability of medical fluid.
The heavy industry medical fluid of an embodiment of the present invention is in terms of 100% by heavy industry medical fluid total weight, comprising:
Deionized water: 20%~30%；Tetramethylammonium hydroxide: 3%~10%；Dimethyl sulfoxide: 30%~45%；N-
Methyl pyrrolidone: 1%~5%；Diethylene glycol monomethyl ether: 10%~20%；Azanol: 1%~5%.
Wherein, weight (quality) percentage composition of each component in heavy industry medical fluid specifically refers to the effective content of each component.
In addition, in the case where heavy industry medical fluid includes defoaming agent and/or surfactant, the matter of defoaming agent and/or surfactant
Measuring percentage composition is 1%~5%.
Further, heavy industry medical fluid of the invention is to be made of in terms of 100% following component by heavy industry medical fluid total weight:
Deionized water: 20%~30%；Tetramethylammonium hydroxide: 3%~10%；Dimethyl sulfoxide: 30%~45%；N-
Methyl pyrrolidone: 1%~5%；Diethylene glycol monomethyl ether: 10%~20%；Azanol: 1%~5%.
Above-mentioned implementation is further improved, then the parts by weight of each component in heavy industry medical fluid are as follows:
Deionized water: 22~26 parts；Tetramethylammonium hydroxide: 5~10 parts；Dimethyl sulfoxide: 35~41.5 parts；N- methyl
Pyrrolidones: 3~5 parts；Diethylene glycol monomethyl ether: 15~20 parts；Azanol: 1~4 part；In addition, including defoaming agent in heavy industry medical fluid
And/or in the case where surfactant, the parts by weight of defoaming agent and/or surfactant are 5 parts.
Further, heavy industry medical fluid of the invention is in terms of 100% by heavy industry medical fluid total weight, comprising:
Deionized water: 22%~26%；Tetramethylammonium hydroxide: 5%~10%；Dimethyl sulfoxide: 35%~41.5%；
N-Methyl pyrrolidone: 3%~5%；Diethylene glycol monomethyl ether: 15%~20%；Azanol: 1%~4%.
In addition, defoaming agent and/or surface are living in the case where heavy industry medical fluid includes defoaming agent and/or surfactant
Property agent mass percentage be 5%.
In addition, optional, heavy industry medical fluid of the invention is to be made of in terms of 100% following component by heavy industry medical fluid total weight:
Deionized water: 22%~26%；Tetramethylammonium hydroxide: 5%~10%；Dimethyl sulfoxide: 35%~41.5%；
N-Methyl pyrrolidone: 3%~5%；Diethylene glycol monomethyl ether: 15%~20%；Azanol: 1%~4%.
The present embodiment also provides the preferred embodiment of each component of several heavy industry medical fluids: as an alternative embodiment,
The parts by weight of each component in heavy industry medical fluid are as follows:
Deionized water: 20 parts；Tetramethylammonium hydroxide: 10 parts；Dimethyl sulfoxide: 41.5 parts；N-Methyl pyrrolidone: 5
Part；Diethylene glycol monomethyl ether: 17 parts；Azanol: 1.5 parts；In addition, including the feelings of defoaming agent and/or surfactant in heavy industry medical fluid
Under condition, the parts by weight of defoaming agent and/or surfactant are 5 parts.
Further, heavy industry medical fluid of the invention is in terms of 100% by heavy industry medical fluid total weight, comprising:
Deionized water: 20%；Tetramethylammonium hydroxide: 10%；Dimethyl sulfoxide: 41.5%；N-Methyl pyrrolidone:
5%；Diethylene glycol monomethyl ether: 17%；Azanol: 1.5%.In addition, including defoaming agent and/or surfactant in heavy industry medical fluid
In the case of, the mass percentage of defoaming agent and/or surfactant is 5%.
In addition, optional, heavy industry medical fluid of the invention is to be made of in terms of 100% following component by heavy industry medical fluid total weight:
Deionized water: 20%；Tetramethylammonium hydroxide: 10%；Dimethyl sulfoxide: 41.5%；N-Methyl pyrrolidone:
5%；Diethylene glycol monomethyl ether: 17%；Azanol: 1.5%；Defoaming agent and/or surfactant: 5%.
As another optional embodiment, the parts by weight of each component in heavy industry medical fluid are as follows:
Deionized water: 25 parts；Tetramethylammonium hydroxide: 9 parts；Dimethyl sulfoxide: 40 parts；N-Methyl pyrrolidone: 4.5
Part；Diethylene glycol monomethyl ether: 16 parts；Azanol: 2 parts；In addition, the case where heavy industry medical fluid includes defoaming agent and/or surfactant
Under, the parts by weight of defoaming agent and/or surfactant are 3.5 parts.
Further, heavy industry medical fluid of the invention is in terms of 100% by heavy industry medical fluid total weight, comprising:
Deionized water: 25%；Tetramethylammonium hydroxide: 9%；Dimethyl sulfoxide: 40%；N-Methyl pyrrolidone:
4.5%；Diethylene glycol monomethyl ether: 16%；Azanol: 2%.In addition, including defoaming agent and/or surfactant in heavy industry medical fluid
In the case of, the mass percentage of defoaming agent and/or surfactant is 3.5%.
In addition, optional, heavy industry medical fluid of the invention is to be made of in terms of 100% following component by heavy industry medical fluid total weight:
Deionized water: 25%；Tetramethylammonium hydroxide: 9%；Dimethyl sulfoxide: 40%；N-Methyl pyrrolidone:
4.5%；Diethylene glycol monomethyl ether: 16%；Azanol: 2%；Defoaming agent and/or surfactant: 3.5%.
As another optional embodiment, the parts by weight of each component in heavy industry medical fluid are as follows:
Deionized water: 23 parts；Tetramethylammonium hydroxide: 10 parts；Dimethyl sulfoxide: 39 parts；N-Methyl pyrrolidone: 5 parts；
Diethylene glycol monomethyl ether: 17 parts；Azanol: 3 parts；In addition, in the case where heavy industry medical fluid includes defoaming agent and/or surfactant,
The parts by weight of defoaming agent and/or surfactant are 3 parts.
Further, heavy industry medical fluid of the invention is in terms of 100% by heavy industry medical fluid total weight, comprising:
Deionized water: 23%；Tetramethylammonium hydroxide: 10%；Dimethyl sulfoxide: 39%；N-Methyl pyrrolidone: 5%；
Diethylene glycol monomethyl ether: 17%；Azanol: 3%.In addition, in the case where heavy industry medical fluid includes defoaming agent and/or surfactant,
The mass percentage of defoaming agent and/or surfactant is 3%.
In addition, optional, heavy industry medical fluid of the invention is to be made of in terms of 100% following component by heavy industry medical fluid total weight:
Deionized water: 23%；Tetramethylammonium hydroxide: 10%；Dimethyl sulfoxide: 39%；N-Methyl pyrrolidone: 5%；
Diethylene glycol monomethyl ether: 17%；Azanol: 3%；Defoaming agent and/or surfactant: 3%.
In addition, the heavy industry medical fluid in the present embodiment further includes other groups of timesharing, it can be continuously added in deionized water
Its component does not have particularly the addition sequencing of component disclosed in other components and the present embodiment to form heavy industry medical fluid
It limits.
Underneath with it is above-mentioned by heavy industry medical fluid total weight be 100% in terms of, component includes: deionized water: 20%；Tetramethyl hydrogen
Amine-oxides: 10%；Dimethyl sulfoxide: 41.5%；N-Methyl pyrrolidone: 5%；Diethylene glycol monomethyl ether: 17%；Azanol: 1.5%；
The COA substrate that the heavy industry medical fluid of defoaming agent and/or surfactant 5% treats heavy industry carries out heavy industry, in addition also using conventional base
Plate removes cleaning solution and waits for that the COA substrate of heavy industry carries out heavy industry to another group, and the heavy industry result of two kinds of medical fluids is compared.
Experiment condition: temperature 70 C, when experiment a length of 1000S.
Fig. 2 is that heavy industry medical fluid provided by the invention carries out the array substrate photo after heavy industry to COA substrate；Fig. 3 is this hair
The heavy industry medical fluid of bright offer carries out the partial enlargement photo of the array substrate after heavy industry to COA substrate；Fig. 4 is provided by the invention
Heavy industry medical fluid carries out the photo of color blocking material layer overburden after heavy industry to COA substrate；Fig. 5 is to remove cleaning solution using conventional base plate
Array substrate photo after carrying out heavy industry to COA substrate；Fig. 6 is to remove cleaning solution using conventional base plate to carry out weight to COA substrate
The partial enlargement photo of array substrate after work；Fig. 7 is that cleaning solution is removed using conventional base plate to color after COA substrate progress heavy industry
Hinder the photo of material layer overburden；
As shown in Fig. 2, the color blocking after carrying out heavy industry to COA substrate using the heavy industry medical fluid of said components, in array substrate
Material layer is stripped clean, as shown in figure 3, to the metallic wiring layer no corrosion in array substrate, heavy industry effect is preferable.Such as figure
Shown in 5, the heavy industry medical fluid of said components is slowly dissolved to color blocking material layer.
In contrast, as shown in figure 5, after carrying out heavy industry to COA substrate using conventional base plate removing cleaning solution, array base
Color blocking material layer removing on plate is also more clean, but as shown in fig. 6, to the metallic wiring layer heavy corrosion in array substrate.
As shown in fig. 7, conventional base plate removing cleaning solution gets off to color blocking material layer flaking, although the removing to color blocking material layer
It is relatively easy to, but due to the metal wiring in heavy corrosion array substrate, heavy industry effect is poor.
In addition, the present embodiment has also carried out electrical testing experiment to the COA substrate after above-mentioned heavy industry, Fig. 8 mentions for the present invention
The heavy industry medical fluid of confession carries out the electrical testing image of the array substrate after heavy industry to COA substrate；Fig. 9 is to be removed using conventional base plate
Cleaning solution carries out the electrical testing image of the array substrate after heavy industry to COA substrate；Figure 10 is the battle array for not needing heavy industry normally
The electrical testing image of column substrate.It as shown in Figure 8,9, 10, is horizontally and vertically length dimension, and the spot in figure represents base
The position of electrical test crash on plate, as shown in figure 8, after carrying out heavy industry to COA substrate using heavy industry medical fluid provided by the invention
Array substrate on do not occur electrical testing failure position, yield 100%, as shown in figure 9, being removed using conventional base plate
Cleaning solution carries out occurring the position of a large amount of electrical testing failure in the array substrate after heavy industry to COA substrate, yield 0%,
And for the array substrate shown in Fig. 10 for not needing heavy industry, due to uncontrollable factor in manufacturing process etc., occur one
The position of a electrical testing failure, yield 98%.It can be seen from the above above-mentioned heavy industry medical fluid can be improved the heavy industry of substrate
Effect greatly improves the yield of product.
The heavy industry medical fluid of the present embodiment includes the component of following parts by weight: deionized water: 20~30 parts；Tetramethyl hydroxide
Ammonium: 3~10 parts；Dimethyl sulfoxide: 30~45 parts；N-Methyl pyrrolidone: 1~5 part；Diethylene glycol monomethyl ether: 10~20 parts；Hydroxyl
Amine: 1~5 part.By using heavy industry medical fluid on substrate color blocking material layer, PS, BM dissolution to removing, due to by existing skill
Physics removing in art is changed to chemolysis removing, therefore removing is more thorough, and heavy industry effect is good.
Embodiment two
The present embodiment provides a kind of heavy industry medical fluid preparation method, it is used to prepare heavy industry medical fluid, the party described in embodiment one
Method includes: to be add to deionized water each component in addition to deionized water, obtains heavy industry medical fluid.
Specifically, can be by tetramethylammonium hydroxide, dimethyl sulfoxide, N-Methyl pyrrolidone, diethylene glycol monomethyl ether, hydroxyl
Amine is added in deionized water, and is uniformly mixed so that heavy industry medical fluid is made.Certainly, include the case where other components in heavy industry medical fluid
Under, other components in addition to the aforementioned components can be also added in deionized water, and be uniformly mixed.
Wherein, tetramethylammonium hydroxide, dimethyl sulfoxide, N-Methyl pyrrolidone, diethylene glycol monomethyl ether, azanol are added
It is specifically referred in deionized water, by tetramethylammonium hydroxide, dimethyl sulfoxide, N-Methyl pyrrolidone, diethylene glycol monomethyl ether, hydroxyl
Amine is added in deionized water according to the ratio of documented formula in embodiment 1.In addition, here uniformly mixed can be stirring
Uniformly, it is also possible to realize by other known method and is uniformly mixed, details are not described herein again.In the following description, with
It is illustrated for stirring evenly.
Specifically, by tetramethylammonium hydroxide: 3~10 parts, dimethyl sulfoxide: 30~45 parts, N-Methyl pyrrolidone: 1
~5 parts, diethylene glycol monomethyl ether: it 10~20 parts, azanol: 1~5 part of addition deionized water: in 20~30 parts, and stirs evenly to make
Obtain heavy industry medical fluid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also in deionized water
The middle defoaming agent and/or surfactant that 1~5 parts by weight are added.
In another optional embodiment, by tetramethylammonium hydroxide: 5~10 parts, dimethyl sulfoxide: 35~41.5
Part, N-Methyl pyrrolidone: 3~5 parts, diethylene glycol monomethyl ether: 15~20 parts, azanol: 1~4 part of addition deionized water: 22~26
In part, and stir evenly so that heavy industry medical fluid is made.It include defoaming agent and/or surfactant in the component of heavy industry medical fluid
In the case of, the defoaming agent and/or surfactant that parts by weight are 5 parts are also added in deionized water.
The present embodiment also provides the preparation method of several preferred embodiments of each component of heavy industry medical fluid, as a kind of optional reality
Mode is applied, by tetramethylammonium hydroxide: 10 parts, dimethyl sulfoxide: 41.5 parts, N-Methyl pyrrolidone: 5 parts, diethylene glycol (DEG)-first
Ether: it 17 parts, azanol: 1.5 parts of addition deionized waters: in 20 parts, and stirs evenly so that heavy industry medical fluid is made.In the group of heavy industry medical fluid
Point in include defoaming agent and/or surfactant in the case where, be also added in deionized water 5 parts by weight defoaming agent and/
Or surfactant.
As another optional embodiment, by tetramethylammonium hydroxide: 9 parts, dimethyl sulfoxide: 40 parts, N- methyl
Pyrrolidones: it 4.5 parts, diethylene glycol monomethyl ether: 16 parts, azanol: 2 parts of addition deionized waters: in 25 parts, and stirs evenly to be made
Heavy industry medical fluid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also in deionized water
The defoaming agent and/or surfactant of 3.5 parts by weight is added.
As another optional embodiment, by tetramethylammonium hydroxide: 10 parts, dimethyl sulfoxide: 39 parts, N- methyl
Pyrrolidones: it 5 parts, diethylene glycol monomethyl ether: 17 parts, azanol: 3 parts of addition deionized waters: in 23 parts, and stirs evenly so that weight is made
Work medical fluid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also add in deionized water
Enter the defoaming agent and/or surfactant of 3 parts by weight.
In addition, correspondingly, if in the configuration process of heavy industry medical fluid of the invention, being with final heavy industry medical fluid total weight
100% counts, then the configuration method of the heavy industry medical fluid are as follows:
By tetramethylammonium hydroxide: 3~10%, dimethyl sulfoxide: 30~45%, N-Methyl pyrrolidone: 1~5%, two
Glycol-methyl ether: 10~20%, azanol: 1~5% is added deionized water: in 20~30%, and stirring evenly so that heavy industry medicine is made
Liquid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, weight is also added in deionized water
Measure defoaming agent and/or surfactant that percentage composition is 1~5%.
Further, by tetramethylammonium hydroxide: 5~10%, dimethyl sulfoxide: 35~41.5%, N- crassitude
Ketone: it 3~5%, diethylene glycol monomethyl ether: 15~20%, azanol: 1~4% addition deionized water: in 22~26%, and stirs evenly
Heavy industry medical fluid is made.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also go from
The defoaming agent and/or surfactant that weight percentage is 5% are added in sub- water.
The present embodiment also provides the preparation method of several preferred embodiments of each component of heavy industry medical fluid, as a kind of optional reality
Mode is applied, by tetramethylammonium hydroxide: 10%, dimethyl sulfoxide: 41.5%, N-Methyl pyrrolidone: 5%, diethylene glycol (DEG)-first
Ether: 17%, azanol: 1.5% is added deionized water: in 20%, and stirring evenly so that heavy industry medical fluid is made.In the group of heavy industry medical fluid
In the case where including defoaming agent and/or surfactant in point, it is 5% that weight percentage is also added in deionized water
Defoaming agent and/or surfactant.
As another optional embodiment, by tetramethylammonium hydroxide: 9%, dimethyl sulfoxide: 40%, N- methyl
Pyrrolidones: 4.5%, diethylene glycol monomethyl ether: 16%, azanol: 2% is added deionized water: in 25%, and stirring evenly to be made
Heavy industry medical fluid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also in deionized water
Defoaming agent and/or surfactant that weight percentage is 3.5% is added.
As another optional embodiment, by tetramethylammonium hydroxide: 10%, dimethyl sulfoxide: 39%, N- methyl
Pyrrolidones: 5%, diethylene glycol monomethyl ether: 17%, azanol: 3% is added deionized water: in 23%, and stirring evenly so that weight is made
Work medical fluid.In the case where including defoaming agent and/or surfactant in the component of heavy industry medical fluid, also add in deionized water
Enter defoaming agent and/or surfactant that weight percentage is 3%.
In above process, it selects tetramethylammonium hydroxide, dimethyl sulfoxide, N-Methyl pyrrolidone, diethylene glycol (DEG)-first
Ether, azanol are added in deionized water, heat release when this is in order to avoid other components other than deionized water are mixed with each other,
Security risk is caused to the configuration process of medical fluid, and other components in addition to deionized water are separately added into deionized water,
It can be to avoid the generation of such case.
In addition, it is optional, in above-mentioned process for preparation, tetramethylammonium hydroxide, dimethyl sulfoxide, N- methyl pyrrole can be made
Pyrrolidone, diethylene glycol monomethyl ether, azanol sequentially add in deionized water, and stir evenly, can further avoid each group point it
Between mix when heat release.
Further, the above-mentioned each component by addition to deionized water is added in the deionized water, is specifically included:
In the deionized water it is every a kind of component is added after, stirring preset time adds next component after such as 30 minutes.This
Sample can make every kind of component dissolve and then be added next component adequately, and entire heavy industry medical fluid can be made more uniform.
Additionally, it is preferred that the preparation process of above-mentioned heavy industry medical fluid carries out at normal temperature, i.e., 25 DEG C or so.
The preparation method of the heavy industry medical fluid of the present embodiment includes: that each component in addition to deionized water is added to described go
In ionized water, the heavy industry medical fluid is obtained.Preparation method is simple, and the heavy industry medical fluid prepared in this way carries out heavy industry to substrate
When, it can be improved the effect to substrate heavy industry.
Embodiment three
Fig. 1 is the structural schematic diagram of reworking apparatus provided by the invention, as shown in Figure 1, the present embodiment provides a kind of heavy industrys
Device, heavy industry medical fluid used in the reworking apparatus of the present embodiment is heavy industry medical fluid described in embodiment one, uses embodiment
Method described in two is prepared.For heavy industry medical fluid specific ingredient and its specific preparation method in embodiment one and embodiment
It is described in detail in two, details are not described herein again.
Reworking apparatus provided in this embodiment includes: reaction chamber 1 and the base plate carrying group that is arranged in inside reaction chamber 1
Part 2 and spray head 3, base plate carrying component 2 can will be placed on substrate to heavy industry substrate 4 for placing to heavy industry substrate
On bearing assembly 2, spray head 3 is arranged above base plate carrying component 2, and spray head 3 is used for to heavy industry substrate 4 spray such as implementation
Heavy industry medical fluid described in example one, so that the color blocking material layer to 4 surface of heavy industry substrate is removed.
Reaction chamber 1 in the present embodiment is the chamber chemically reacted during heavy industry, can according to need and sets
There is one or more.Spray head 3 is arranged above base plate carrying component 2, for spraying heavy industry medical fluid to heavy industry substrate 4,
Number can select according to actual needs.Certainly, it is contemplated that the heavy industry effect of substrate, can suitably increase of spray head
Number.As described in above-described embodiment, heavy industry medical fluid can be removed to the color blocking material layer on heavy industry substrate 4, PS, BM.
In addition, optional, base plate carrying component 2 includes multiple transport roller 5 arranged side by side, the axis of multiple transport roller 5
It is formed in one plane, and the plane with respect to the horizontal plane has angle α.It, can be with that is, be obliquely installed each transport roller 5
Make also to be obliquely installed to heavy industry substrate 4, in this way, heavy industry medical fluid can be improved when heavy industry liquid medicine jet pours when on heavy industry substrate 4
Displacement property, and improve the activity of heavy industry medical fluid.Specifically, have the part at higher position on to heavy industry substrate 4,
Have be located at lower position at part, such as spray to the heavy industry medical fluid at the higher position on heavy industry substrate 4 in addition to and this
Except color blocking material layer at higher position reacts, it can also flow at lower position, increase along to heavy industry substrate 4
Heavy industry medical fluid and time of contact and contact area to heavy industry substrate 4, therefore the displacement property of heavy industry medical fluid can be improved, it can
Keep the removing of color blocking material layer more thorough.It is the side view of reworking apparatus in Fig. 1, it is further, parallel between multiple transport roller 5
Setting, and spacing is equal each other.In addition, regardless of the angle α of base plate carrying component 2 with respect to the horizontal plane is how many degree, all
Guarantee the surface to heavy industry to heavy industry substrate 4 upward, heavy industry liquid medicine jet is poured to the surface to heavy industry convenient for spray head 3
On.
What is illustrated in Fig. 1 is the case where base plate carrying component 2 is obliquely installed, reaction chamber does not tilt, in practice, can also be with
It is that entire reaction chamber 1 is obliquely installed, and the case where base plate carrying component 2 is arranged in parallel relative to the bottom wall of reaction chamber 1, this
Sample base plate carrying component 2 is tilted also relative to horizontal plane, i.e., base plate carrying component 2 has angle α also relative to horizontal plane.
In addition, optional, the reworking apparatus of the present embodiment further includes fluid reservoir 8, and heavy industry medical fluid is equipped in fluid reservoir 8,
Fluid reservoir 8 is connected with spray head 3, and to supply heavy industry medical fluid to spray head 3,8 are equipped with for in fluid reservoir 8 on fluid reservoir
The heater 9 that is heated of heavy industry medical fluid.In this way, can be by heavy industry liquid medicine storage in fluid reservoir 8, fluid reservoir 8 and spray
It can be connected to by pipeline (not shown) etc. between first 3, to supply heavy industry medical fluid to spray head 3.
During carrying out heavy industry to substrate, if being provided only with a fluid reservoir, the heavy industry medical fluid stored in fluid reservoir
Using finishing or when fluid reservoir breaks down, it is possible to fluid reservoir normally can not provide heavy industry medical fluid to spray head 3, this
When need to suspend the running of fluid reservoir, add heavy industry medical fluid to fluid reservoir or exclude to restart again after the failure of fluid reservoir
Heavy industry process, this will lead to taking a long time for heavy industry processing procedure.In order to avoid this kind of situation, it may be considered that two storages of setting
Flow container, the two fluid reservoirs use in turn, wherein a fluid reservoir due to heavy industry medical fluid be exhausted or due to failure and
When can not continue to supply heavy industry medical fluid, spray head 3 can supply heavy industry medical fluid by another fluid reservoir, not interfere with normal weight
The rapid progress of work step.
Specific optional, the reworking apparatus of the present embodiment further includes changeover module 10, and fluid reservoir 8 includes the first fluid reservoir 6
With the second fluid reservoir 7, the outlet end 71 of the outlet end 61 of the first fluid reservoir and the second fluid reservoir respectively with the feed liquor of changeover module
End 101, liquid feeding end 102 connect, and the outlet end 103 of changeover module is connected with spray head 3, and changeover module 10 is for controlling first
The outlet end 61 of fluid reservoir is connected to spray head 3, or the outlet end 71 of the second fluid reservoir of control is connected to spray head 3.In addition,
When the outlet end 61 that changeover module 10 controls the first fluid reservoir is connected to spray head 3, while controlling the liquid out of the second fluid reservoir
End 71 is connected to the cutting of spray head 3；When the outlet end 71 that changeover module 10 controls the second fluid reservoir is connected to spray head 3, together
When control the outlet end 61 of the first fluid reservoir and be connected to the cutting of spray head 3, with guarantee only one fluid reservoir of synchronization to
Spray head 3 provides heavy industry medical fluid.Changeover module 10 specifically can be switching valve etc..During specifically used, when the first storage
Flow container 6 due to medical fluid deplete or failure and other reasons can not continue supply heavy industry medical fluid when, changeover module 10 be switched to immediately by
Second fluid reservoir 7 is supplied.Likewise, changeover module 10 is immediately when the second fluid reservoir 7 can not continue to supply heavy industry medical fluid
It is switched to and is supplied by the first fluid reservoir 6.
Optionally, the reworking apparatus of the present embodiment further includes irrigation chamber (not shown), and irrigation chamber is used for reacting
Being rinsed to heavy industry substrate after heavy industry in chamber.After carrying out heavy industry to substrate using heavy industry medical fluid in reaction chamber, have
Color blocking material layer that may be stripped etc. can also adhere on the surface of the substrate, can carry out in irrigation chamber to substrate in this way
It rinses again, color blocking material granule remaining on substrate is completely removed.Spray head for example can be set in irrigation chamber
Deng, using spray head spray cleaning solution substrate is rinsed, in addition, can choose to increase the flushing effect to substrate
Make 7 kilograms of ejection pressure of the spray head in irrigation chamber.
A kind of rework method of substrate is described below, this method comprises:
S10, it places a substrate on substrate bearing device；
S20, above-mentioned heavy industry medical fluid is sprayed to substrate；
S30, substrate is rinsed.
Wherein, S10, place a substrate on substrate bearing device and specifically include, place a substrate in reaction chamber 1
In transport roller 5, and make to heavy industry surface upward, in general, spray head 3 be arranged in reaction chamber 1 base plate carrying component 2
Top, the spray port of spray head 3 is towards base plate carrying component 2 so that it is convenient to which heavy industry liquid medicine jet is poured substrate by spray head 3
To on the surface of heavy industry.
In addition, S20, spraying to substrate above-mentioned heavy industry medical fluid and specifically referring to spray heavy industry medicine described in embodiment one to substrate
Liquid, spray are chemically reacted to the heavy industry medical fluid on substrate and the color blocking material layer on substrate, shell color blocking material layer
From, and dissolve.
After color blocking material layer on substrate dissolves, may there are part heavy industry medical fluid or the color blocking removed of part
Material granule remains in substrate surface, at this moment it is contemplated that executing S30, being rinsed to substrate, specifically, substrate is transported to
In above-mentioned irrigation chamber, substrate is rinsed using cleaning solutions such as deionized waters.After above-mentioned such step cleaning
Substrate can put into next processing procedure again and normally produced.
In addition, can be the color membrane substrates in liquid crystal display panel to heavy industry substrate in the present invention, it is also possible to COA base
Plate.
For common color membrane substrates, if finding after newly formed color blocking material layer, bad lack occurs for color blocking material layer
It falls into, needs to remove color blocking material layer, which can be put into the reworking apparatus of the present embodiment, use the substrate of the present embodiment
Rework method carries out heavy industry to substrate, removes color blocking material layer and BM, and the substrate that heavy industry finishes is glass substrate.
For common color membrane substrates, if finding after newly formed PS, bad defect occurs for color blocking material layer, needs
When except color blocking material layer, which can be put into the reworking apparatus of the present embodiment, use the substrate heavy industry side of the present embodiment
Method carries out heavy industry to substrate, first removes PS, after being then removed using corrosive medicament such as hydrochloric acid to ITO layer, then with
Rework method removing color blocking material layer and BM are stated, the substrate that heavy industry finishes is glass substrate.
For COA substrate, structure is to form passivation layer (such as silicon nitride) in common array substrate, and be passivated
Color blocking material layer is formed on layer, bad defect occurs for color blocking material layer, needs if finding after newly formed color blocking material layer
Except color blocking material layer, which can be put into the reworking apparatus of the present embodiment, use the substrate rework method of the present embodiment
Heavy industry is carried out to substrate, removes color blocking material layer, the substrate that heavy industry finishes is common array substrate.In addition, in passivation layer
Lower section is formed with the metal materials such as source electrode, drain electrode, source wiring, the drain electrode distribution of array substrate, therefore when heavy industry medical fluid is to blunt
When color blocking material layer above change layer is removed, if passivation layer thickness is excessively thin, or since partial region passivation layer is excessively thin, hold
Easily there is the case where heavy industry medical fluid erodes to the metal materials such as source electrode, drain electrode, source wiring, drain electrode distribution, in order to avoid such
The occurrence of, can suitably thicken the thickness of passivation layer, such as can make the thickness of passivation layer byThickening is
The reworking apparatus of the present embodiment includes: reaction chamber and the base plate carrying component being arranged in inside reaction chamber and spray
Drench head, be placed on base plate carrying component to heavy industry substrate, spray head be arranged above base plate carrying component, spray head be used for
Above-mentioned heavy industry medical fluid is sprayed to heavy industry substrate, so that the color blocking material layer to heavy industry substrate surface is removed.Due to reworking apparatus
Above-mentioned heavy industry medical fluid is sprayed to substrate, the color blocking material layer to heavy industry substrate surface is removed, therefore the heavy industry effect of substrate
Preferably.
In the description of the present invention, it is to be understood that, term " on ", "lower", "front", "rear", "left", "right", " perpendicular
Directly ", the orientation or positional relationship of the instructions such as "horizontal", "top", "bottom", "inner", "outside" is orientation based on the figure or position
Relationship is set, is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In addition, in the present invention unless specifically defined or limited otherwise, term " connection ", " connected ", " fixation ", " peace
Dress " etc. shall be understood in a broad sense, such as can be mechanical connection, be also possible to be electrically connected；It can be and be directly connected to, can also pass through
Intermediary is indirectly connected, and can be the connection inside two elements or the interaction relationship of two elements, unless otherwise bright
True restriction, for the ordinary skill in the art, can understand as the case may be above-mentioned term in the present invention
Concrete meaning.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (10)
1. a kind of heavy industry medical fluid, which is characterized in that the component including following parts by weight:
Deionized water: 20~30 parts；
Tetramethylammonium hydroxide: 3~10 parts；
Dimethyl sulfoxide: 30~45 parts；
N-Methyl pyrrolidone: 1~5 part；
Diethylene glycol monomethyl ether: 10~20 parts；
Azanol: 1~5 part.
2. heavy industry medical fluid according to claim 1, which is characterized in that the component of the heavy industry medical fluid further includes 1~5 weight
The defoaming agent and/or surfactant of part.
3. heavy industry medical fluid according to claim 1 or 2, which is characterized in that the weight of each component in the heavy industry medical fluid
Part are as follows:
Deionized water: 22~26 parts；
Tetramethylammonium hydroxide: 5~10 parts；
Dimethyl sulfoxide: 35~41.5 parts；
N-Methyl pyrrolidone: 3~5 parts；
Diethylene glycol monomethyl ether: 15~20 parts；
Azanol: 1~4 part.
4. a kind of preparation method of heavy industry medical fluid a method according to any one of claims 1-3 characterized by comprising
Each component in addition to deionized water is added in the deionized water, the heavy industry medical fluid is obtained.
5. the preparation method of heavy industry medical fluid according to claim 4, which is characterized in that it is described will be in addition to deionized water
Each component is added in the deionized water, is obtained the heavy industry medical fluid, is specifically included:
In the deionized water it is every a kind of component is added after, add next described group after stirring preset time
Point.
6. a kind of reworking apparatus characterized by comprising reaction chamber and the substrate being arranged in inside the reaction chamber are held
Component and spray head are carried, the base plate carrying component for placing to heavy industry substrate, hold in the substrate by the spray head setting
It carrying above component, the spray head is used to spray heavy industry medical fluid a method according to any one of claims 1-3 to heavy industry substrate to described,
So that the color blocking material layer to heavy industry substrate surface is removed.
7. reworking apparatus according to claim 6, which is characterized in that the base plate carrying component includes multiple is arranged side by side
Transport roller, in one plane, and the plane with respect to the horizontal plane has angle to the axis of the multiple transport roller.
8. reworking apparatus according to claim 6, which is characterized in that further include fluid reservoir, be equipped in the fluid reservoir
The heavy industry medical fluid, the fluid reservoir are connected with the spray head, to supply the heavy industry medical fluid to the spray head, in institute
Fluid reservoir is stated equipped with the heater for being heated to the heavy industry medical fluid in the fluid reservoir.
9. reworking apparatus according to claim 8, which is characterized in that further include changeover module, the fluid reservoir includes the
The outlet end of one fluid reservoir and the second fluid reservoir, the outlet end of first fluid reservoir and second fluid reservoir respectively with switching
Two liquid feeding ends of component connect, and the outlet end of the changeover module is connected with the spray head, and the changeover module is used for
The outlet end for controlling first fluid reservoir is connected to the spray head, or outlet end and the institute of control second fluid reservoir
State spray head connection.
10. according to any reworking apparatus of claim 6-9, which is characterized in that it further include irrigation chamber, the flushing chamber
Room is used for being rinsed described in after the heavy industry in the reaction chamber to heavy industry substrate.
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Application publication date: 20190823 |