CN110137093A - A kind of high protectiveness sealed in unit of silicon base chip group - Google Patents

A kind of high protectiveness sealed in unit of silicon base chip group Download PDF

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Publication number
CN110137093A
CN110137093A CN201910542883.1A CN201910542883A CN110137093A CN 110137093 A CN110137093 A CN 110137093A CN 201910542883 A CN201910542883 A CN 201910542883A CN 110137093 A CN110137093 A CN 110137093A
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CN
China
Prior art keywords
control
bevel gear
gear
connecting rod
rack
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201910542883.1A
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Chinese (zh)
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CN110137093B (en
Inventor
吴美俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang Jinguo Intellectual Property Co ltd
Original Assignee
Fuzhou Economic And Technological Development Zone Meimexuan Stationery Co Ltd
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Application filed by Fuzhou Economic And Technological Development Zone Meimexuan Stationery Co Ltd filed Critical Fuzhou Economic And Technological Development Zone Meimexuan Stationery Co Ltd
Priority to CN201910542883.1A priority Critical patent/CN110137093B/en
Publication of CN110137093A publication Critical patent/CN110137093A/en
Priority to GBGB1912208.4A priority patent/GB201912208D0/en
Priority to GBGB1912210.0A priority patent/GB201912210D0/en
Application granted granted Critical
Publication of CN110137093B publication Critical patent/CN110137093B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/50Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
    • H01L21/56Encapsulations, e.g. encapsulation layers, coatings

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Transmission Devices (AREA)

Abstract

A kind of high protectiveness sealed in unit of silicon base chip group disclosed by the invention, including cabinet, power cavity is equipped in the box top wall, the power mechanism of power can be provided for device by being equipped in the power cavity, control chamber is equipped in the cabinet lower wall, control mechanism is equipped in the control chamber, the configuration of the present invention is simple, maintenance convenience, it is easy to use, it can make silicon base chip in closed environment, processing encapsulation, extraneous factor interference is not will receive, and whole process is automatical and efficient, without human interaction, device internal structure is stablized simultaneously, injury will not be generated to chip, it is capable of being packaged silicon base chip of safety and stability, greatly improve product qualified rate, the production cost of factory is saved, improve the utilization rate of raw material.

Description

A kind of high protectiveness sealed in unit of silicon base chip group
Technical field
The present invention relates to silicon base chip encapsulation technology field, the high protectiveness encapsulation of specially a kind of silicon base chip group is set It is standby.
Background technique
With the development of science and technology, electronic chip uses more and more extensive in every field, this also causes in various industries A large amount of silicon base chip is needed, and since the particularity of material and manufacture craft is made in silicon base chip, generally add to it Working hour needs dustless environment, and chip core position itself is more fragile, unbearable external environment to its intense impact, It therefore, can be to silicon base chip core if the interference or processing unit (plant) itself by extraneous factor are unstable when encapsulating chip Component damages, and then it is made to lose use value, therefore needs to develop one kind in encapsulation process, and chip can be kept static steady Automatic packaging device that is fixed, and not interfered by extraneous factor.
Summary of the invention
Technical problem: the silicon base chip sealed in unit of traditional open needs to run under dustless environment, and chip core Center portion position itself is more fragile, therefore when encapsulating chip, if the interference or processing unit (plant) itself by extraneous factor are unstable, Silicon base chip core component can then be damaged, and then it is made to lose use value.
To solve the above problems, this example devises a kind of high protectiveness sealed in unit of silicon base chip group, one kind of this example The high protectiveness sealed in unit of silicon base chip group, including cabinet, the box top wall is interior to be equipped with power cavity, sets in the power cavity The power mechanism of power can be provided for device by having, and control chamber is equipped in the cabinet lower wall, is equipped with control machine in the control chamber Structure, the power cavity lower wall is interior to be equipped with drive cavity, and push transmission mechanism is equipped in the drive cavity, is set in the drive cavity lower wall There is push chamber, the push is intracavitary to be equipped with delivery device, is equipped with package board storage chamber, the package board in the drive cavity left wall The cushion that can provide buffer function is equipped at left and right sides of storage chamber in wall, is stacked with cap in the package board storage chamber Plate, the package board storage chamber left wall connection are equipped with working chamber, are equipped with cam mechanism, the working chamber in the working chamber roof It is interior and be located at the cam mechanism lower end be equipped with pressing mechanism, and then can to chip carry out punching press encapsulation, the working chamber lower wall Equipped with transport mechanism, it is equipped with chip substrate above the transport mechanism, is equipped with the institute that can be fixedly clamped in the working chamber left wall The clamp system of chip substrate is stated, is equipped with linkage transmission chamber in the cabinet left wall, the linkage transmission is intracavitary to be set There is link mechanism.
Wherein, the power mechanism includes the main motor in the power cavity, and the main motor, which is equipped with, can be rotated Main shaft, the main shaft right end is installed with first bevel gear, rotatable first transmission is equipped in the power cavity Axis, first transmission shaft top and is located in the power cavity and is installed with second bevel gear, the second bevel gear with it is described First bevel gear engagement, first transmission shaft bottom end are installed with third hand tap gear, and the third hand tap gear can transmit power To the control mechanism, it is installed with the first control bevel gear in the power cavity and on the main shaft outer wall, it is described It is installed with the second control bevel gear in power cavity and on the main shaft outer wall, is equipped in the power cavity rotatable Second driving shaft, the second driving shaft top and is located in the power cavity and is installed with the 4th bevel gear, the 4th cone tooth Wheel can alternately be engaged with the second control bevel gear or the first control bevel gear.
Wherein, the control mechanism includes the control transmission shaft in the control chamber, the control transmission shaft right end It is installed with the first control bevel gear, the first control bevel gear engages with the third hand tap gear, and then can drive the control Transmission shaft rotation processed, the control transmission shaft left end are installed with the second control bevel gear, are equipped in the control chamber rotatable First control locating shaft is installed with the first control bevel gear on the first control locating shaft, the first control bevel gear with The second control bevel gear engages, and is installed with the first control gear, the control chamber on the first control locating shaft outer wall It is interior to be equipped with slidable second control locating shaft, the second control gear, second control are installed on the first control belt wheel Gear processed is engaged with the first control gear, is installed with the first control belt wheel on the second control locating shaft outer wall, described It is equipped with rotatable third in control chamber and controls locating shaft, is installed with the second control belt wheel, institute on the third control locating shaft It states the second control belt wheel and is connected with the first control belt wheel by the first belt, it is fixed on the third control locating shaft outer wall There is the second control bevel gear, rotatable second control transmission shaft is equipped in the working chamber, the second control transmission shaft is right End is installed with third control bevel gear, and the third control bevel gear engages with the second control bevel gear, and then works as third When controlling bevel gear rotation, the transport mechanism can be driven to run, described second controls transmission shaft outer wall and be located at the control It is intracavitary to be installed with third control gear, it is equipped with rotatable third in the control chamber and controls transmission shaft, the third control passes The 4th control gear is installed on moving axis, the 4th control gear is engaged with third control gear.
Wherein, the transport mechanism includes the second control transmission shaft in the working chamber, second control Transmission shaft outer wall processed is equipped with transmission wheel, is equipped with feed belt in the transmission wheel, is placed on the feed belt described Chip substrate.
Wherein, the link mechanism includes the link transmission axis intracavitary set on the linkage transmission, and the connecting rod passes Moving axis bottom end is installed with first connecting rod bevel gear, and the third control transmission shaft right end is installed with second connecting rod bevel gear, described Second connecting rod bevel gear engages with the first connecting rod bevel gear, and link transmission axis top is installed with third connecting rod cone tooth Wheel, the linkage transmission is intracavitary to be equipped with rotatable first connecting rod locating shaft, is installed on the first connecting rod locating shaft Fourth link bevel gear, the fourth link bevel gear engage with the third connecting rod bevel gear, the first connecting rod locating shaft First connecting rod is installed on outer wall, the first connecting rod can drive the clamp system to rotate.
Wherein, the clamp system includes the second connecting rod in the working chamber, and the second connecting rod passes through second Connecting rod locating shaft and the first connecting rod are hinged, and rotatable third connecting rod is equipped in the working chamber, and the third connecting rod is logical It crosses third connecting rod locating shaft to be hinged in the cabinet left wall, the third connecting rod top is hinged on by fourth link locating shaft On the second connecting rod, the second connecting rod right end is installed with fixture, and then for clamping the chip substrate.
Wherein, the push transmission mechanism includes the first rack-driving axis in the drive cavity, first tooth Transmission shaft left end is installed with the first rack gear bevel gear, in the drive cavity and is located at the second driving shaft lower end and is installed with the Two rack gear bevel gears, the second rack gear bevel gear can engage with the first rack gear bevel gear, the first rack-driving axis Right end is installed with third rack gear bevel gear, is equipped with rotatable second rack-driving axis, second rack gear in the drive cavity The 4th rack gear bevel gear is installed on transmission shaft, the 4th rack gear bevel gear can engage with the third rack gear bevel gear, institute It states and is installed with the first rack gear belt wheel on the second rack-driving axis outer wall, be arranged with rack gear belt on the first rack gear belt wheel, into And power is passed into the delivery device by the rack gear belt.
Wherein, the delivery device includes the third rack-driving axis intracavitary set on the push, and the third rack gear passes The second rack gear belt wheel is installed on moving axis, the second rack gear belt wheel is connected with the rack gear belt, and the push chamber lower wall is set There is slidable rack gear push plate, and then when the rack gear push plate horizontally slips, it can be by the encapsulation in the package board storage chamber Cover board is pushed to above the chip substrate in the working chamber.
Wherein, the cam mechanism includes the camshaft in the working chamber, is installed with cam on the camshaft Bevel gear, the main shaft left end and be located at the working chamber in be installed with the second cam bevel gear, the cam bevel gear It is engaged with the second cam bevel gear, is installed with cam on the camshaft.
Wherein, the pressing mechanism includes the pressurizing piston in the working chamber, the pressurizing piston inner elastomeric It is connected with reset spring.
The beneficial effects of the present invention are: the configuration of the present invention is simple, maintenance convenience is easy to use, silicon base chip can be made close In the environment closed, processing encapsulation not will receive extraneous factor interference, and whole process is automatical and efficient, is not necessarily to human interaction, together When device internal structure stablize, injury will not be generated to chip, be capable of being packaged silicon base chip of safety and stability, mention significantly High product qualified rate has saved the production cost of factory, improves the utilization rate of raw material.
Detailed description of the invention
The present invention is described in detail by following specific embodiments and drawings for ease of explanation,.
Fig. 1 is a kind of overall structure diagram of the high protectiveness sealed in unit of silicon base chip group of the invention;
Fig. 2 is the enlarged structure schematic diagram of " A " of Fig. 1;
Fig. 3 is the enlarged structure schematic diagram of " B " of Fig. 1;
Fig. 4 is the enlarged structure schematic diagram of " C " of Fig. 1.
Specific embodiment
Below with reference to Fig. 1-Fig. 4, the present invention is described in detail, for sake of convenience, now provides to hereafter described orientation As follows: hereafter described front-rear direction up and down is consistent with the front-rear direction up and down of Fig. 1 projection relation itself.
The present invention relates to a kind of high protectiveness sealed in unit of silicon base chip group, are mainly used in silicon base chip group encapsulation neck Domain, below in conjunction with attached drawing of the present invention, the present invention will be further described:
A kind of high protectiveness sealed in unit of silicon base chip group of the present invention, including cabinet 10, in 10 roof of cabinet Equipped with power cavity 300, the power mechanism 301 of power, 10 lower wall of cabinet can be provided for device by being equipped in the power cavity 300 It is interior to be equipped with control chamber 500, it is equipped with control mechanism 501 in the control chamber 500, is equipped with drive cavity in 300 lower wall of power cavity 400, the drive cavity 400 is interior to be equipped with push transmission mechanism 401, is equipped in 400 lower wall of drive cavity and pushes chamber 600, described It pushes and is equipped with delivery device 601 in chamber 600, be equipped with package board storage chamber 900, the package board in 400 left wall of drive cavity It is equipped with the cushion 24 that can provide buffer function in 900 left and right sides wall of storage chamber, is stacked in the package board storage chamber 900 Encapsulation cover plate 25,900 left wall of the package board storage chamber connection are equipped with working chamber 800, are equipped in 800 roof of working chamber Cam mechanism 802, the working chamber 800 is interior and is located at 802 lower end of cam mechanism equipped with pressing mechanism 804, and then can be right Chip carries out punching press encapsulation, and 800 lower wall of working chamber is equipped with transport mechanism 803, is equipped with core above the transport mechanism 803 Plate base 34, the interior clamp system 801 for being equipped with the chip substrate 34 that can be fixedly clamped of 800 left wall of working chamber, the case It is equipped with linkage transmission chamber 700 in 10 left wall of body, is equipped with link mechanism 701 in the linkage transmission chamber 700.
According to embodiment, power mechanism 301 is described in detail below, the power mechanism 301 includes set on described Main motor 19 in power cavity 300, the main motor 19 are equipped with rotatable main shaft 15,15 right end of main shaft It is installed with first bevel gear 20, rotatable first transmission shaft 22 is equipped in the power cavity 300, first transmission shaft 22 pushes up It holds and is located in the power cavity 300 and be installed with second bevel gear 21, the second bevel gear 21 and the first bevel gear 20 Engagement, 22 bottom end of the first transmission shaft are installed with third hand tap gear 26, and the third hand tap gear 26 drives the control mechanism 501 rotations, the power cavity 300 is interior and is installed with the first control bevel gear 18 on 15 outer wall of main shaft, described It is installed with the second control bevel gear 16 in power cavity 300 and on 15 outer wall of main shaft, is set in the power cavity 300 There is a rotatable second driving shaft 23,23 top of second driving shaft and is located in the power cavity 300 and is installed with the 4th cone Gear 17, the 4th bevel gear 17 can replace with the second control bevel gear 16 or the first control bevel gear 18 to nibble It closes, and then the push transmission mechanism 401 can be driven to rotate.
According to embodiment, control mechanism 501 is described in detail below, the control mechanism 501 includes set on described Control transmission shaft 28 in control chamber 500,28 right end of control transmission shaft are installed with the first control bevel gear 27, and described first Control bevel gear 27 engages with the third hand tap gear 26, and then the control transmission shaft 28 can be driven to rotate, and the control passes 28 left end of moving axis is installed with the second control bevel gear 53, and rotatable first control locating shaft 54 is equipped in the control chamber 500, The first control bevel gear 55 is installed on first control, 54 outer wall of locating shaft, the first control bevel gear 55 and described the Two control bevel gears 53 engage, and are installed with the first control gear 56, the control chamber on the first control 54 outer wall of locating shaft It is equipped with slidable second control locating shaft 59 in 500, is installed with the second control gear 57, institute on the first control belt wheel 58 It states the second control gear 57 to engage with the first control gear 56, is installed with first on the second control 59 outer wall of locating shaft Belt wheel 58 is controlled, rotatable third is equipped in the control chamber 500 and controls locating shaft 62, the third controls on locating shaft 62 It is installed with the second control belt wheel 61, the second control belt wheel 61 passes through 60 phase of the first belt with the first control belt wheel 58 Even, it is installed with the second control bevel gear 63 on third control 62 outer wall of locating shaft, being equipped in the working chamber 800 can be rotated Second control transmission shaft 32, it is described second control 32 right end of transmission shaft is installed with third control bevel gear 64, the third control Bevel gear 64 processed engages with the second control bevel gear 63, and then when third control bevel gear 64 rotates, can drive described Transport mechanism 803 rotates, and described second controls 32 outer wall of transmission shaft and be installed with third control tooth in the control chamber 500 Wheel 65, the control chamber 500 is interior to be equipped with rotatable third control transmission shaft 29, is installed on the third control transmission shaft 29 4th control gear 66, the 4th control gear 66 are engaged with third control gear 65.
According to embodiment, transport mechanism 803 is described in detail below, the transport mechanism 803 includes that front and back is symmetrical Be set to the working chamber 800 in it is described second control transmission shaft 32, it is described second control 32 outer wall of transmission shaft be equipped with pass Wheel 33 is sent, feed belt 31 is equipped between the transmission wheel 33 of front and rear sides, is placed with the core on the feed belt 31 Plate base 34.
According to embodiment, following linkage 701 is described in detail, and the link mechanism 701 includes set on described Link transmission axis 37 in linkage transmission chamber 700,37 bottom end of link transmission axis are installed with first connecting rod bevel gear 36, Third control 29 right end of transmission shaft is installed with second connecting rod bevel gear 35, the second connecting rod bevel gear 35 and described first Connecting rod bevel gear 36 engages, and 37 top of link transmission axis is installed with third connecting rod bevel gear 67, the linkage transmission It is equipped with rotatable first connecting rod locating shaft 71 in chamber 700, fourth link cone tooth is installed on the first connecting rod locating shaft 71 Wheel 68, the fourth link bevel gear 68 engages with the third connecting rod bevel gear 67,71 outer wall of first connecting rod locating shaft On be installed with first connecting rod 72, the first connecting rod 72 can drive the clamp system 801 to rotate.
According to embodiment, clamp system 801 is described in detail below, the clamp system 801 includes set on described Second connecting rod 74 in working chamber 800, the second connecting rod 74 are cut with scissors by second connecting rod locating shaft 73 and the first connecting rod 72 It connects, rotatable third connecting rod 76 is equipped in the working chamber 800, the third connecting rod 76 is cut with scissors by third connecting rod locating shaft 75 It connects on 800 bottom wall of working chamber, 76 top of third connecting rod is hinged on described second by fourth link locating shaft 77 On connecting rod 74,74 right end of second connecting rod is installed with fixture 78, and then for clamping the chip substrate 34.
According to embodiment, push transmission mechanism 401 is described in detail below, the push transmission mechanism 401 includes The first rack-driving axis 43 in the drive cavity 400,43 left end of the first rack-driving axis are installed with the first rack gear Bevel gear 42, the drive cavity 400 is interior and is installed with the second rack gear bevel gear 41 positioned at 23 lower end of second driving shaft, described Second rack gear bevel gear 41 can engage with the first rack gear bevel gear 42, and 43 right end of the first rack-driving axis is installed with Three rack gear bevel gears 44, the drive cavity 400 is interior to be equipped with rotatable second rack-driving axis 47, the second rack-driving axis The 4th rack gear bevel gear 45 is installed on 47, the 4th rack gear bevel gear 45 can engage with the third rack gear bevel gear 44, It is installed with the first rack gear belt wheel 46 on second rack-driving axis, 47 outer wall, is arranged with rack gear on the first rack gear belt wheel 46 Belt 48, and then power is passed into the delivery device 601 by the rack gear belt 48.
According to embodiment, delivery device 601 is described in detail below, the delivery device 601 includes set on described The third rack-driving axis 51 in chamber 600 is pushed, is installed with the second rack gear belt wheel 49 on the third rack-driving axis 51, it is described Second rack gear belt wheel 49 is connected with the rack gear belt 48, and 600 lower wall of push chamber is equipped with slidable rack gear push plate 52, into And when the rack gear push plate 52 horizontally slips, the encapsulation cover plate 25 in the package board storage chamber 900 can be pushed to described 34 top of the chip substrate in working chamber 800.
According to embodiment, cam mechanism 802 is described in detail below, the cam mechanism 802 includes set on described Camshaft 13 in working chamber 800 is installed with cam bevel gear 12,15 left end of main shaft and position on the camshaft 13 In being installed with the second cam bevel gear 14 in the working chamber 800, the cam bevel gear 12 and the second cam bevel gear 14 engage, and are installed with cam 11 on the camshaft 13.
According to embodiment, pressing mechanism 804 is described in detail below, the pressing mechanism 804 includes set on described Pressurizing piston 38 in working chamber 800,38 inner elastomeric of pressurizing piston are connected with reset spring 39.
Below in conjunction with Fig. 1 to Fig. 4 to the use step of the high protectiveness sealed in unit of one of this paper silicon base chip group It is described in detail:
The operation of main motor 19 drives main shaft 15 to rotate, and main shaft 15 drives the second cam bevel gear 14, second control cone Gear 16, first controls bevel gear 18, first bevel gear 20 and rotates simultaneously, and first bevel gear 20 passes through second bevel gear 21, the One transmission shaft 22, third hand tap gear 26, first control bevel gear 27, control transmission shaft 28, second controls bevel gear 53, first and controls Bevel gear 55, first processed controls locating shaft 54 and the first control gear 56 is driven to rotate, the flank of tooth on the first control gear 56 and the Two control gears 57 periodically engagements, and then drive the second control 57 periodic rotary of gear, the second control gear 57 pass through the One control belt wheel 58, second controls locating shaft 59, the first belt 60, second control belt wheel 61 and then third is driven to control locating shaft 62 rotations, third control locating shaft 62 and the second control bevel gear 63 are driven to rotate, and the second control bevel gear 63 is controlled by third Bevel gear 64 drives the second control transmission shaft 32 to rotate, and the second control transmission shaft 32 drives 31 turns of feed belt by transmission wheel 33 It is dynamic, and then chip substrate 34 may make to slide into designated position on feed belt 31, meanwhile, the second control transmission shaft 32 passes through Third, which controls gear the 65, the 4th and controls gear 66, drives third control transmission shaft 29 to rotate, and third controls transmission shaft 29 by the Two connecting rod bevel gears 35, first connecting rod bevel gear 36, link transmission axis 37, third connecting rod bevel gear 67 and then drive fourth link Bevel gear 68 rotates, and fourth link bevel gear 68 drives first connecting rod locating shaft 71 and first connecting rod 72 to rotate, first connecting rod 72 Pass through second connecting rod locating shaft 73, third connecting rod locating shaft 75, third connecting rod 76, fourth link locating shaft 77, second connecting rod 74 And then fixture 78 is driven to clamp chip substrate 34 downwards, at this point, the first control gear 56 is separated with the second control gear 57, in turn So that feed belt 31 stops operating, chip substrate 34 is by clamping to be processed in designated position etc., while the second control bevel gear 16 engage with the 4th bevel gear 17, and the 4th bevel gear 17 passes through second driving shaft 23, the second rack gear bevel gear 41, the first rack gear cone Gear 42, the first rack-driving axis 43, third rack gear bevel gear 44 drive the rotation of the 4th rack gear bevel gear 45, and the 4th rack gear bores tooth Wheel 45 drives third rack gear by the first rack gear belt wheel 46, the second rack-driving axis 47, rack gear belt 48, the second rack gear belt wheel 49 Transmission shaft 51 rotates counterclockwise, and third rack-driving axis 51 is slided with carry-over bar push plate 52 to the left in turn, and rack gear push plate 52 pushes Encapsulation cover plate 25 in package board storage chamber 900 is slided into the left on chip substrate 34, while the second cam bevel gear 14 passes through Cam bevel gear 12, camshaft 13, band moving cam 11 rotate, and 11 top of cam pushes pressurizing piston 38 to overcome reset spring 39 Pre set force slide downward, and then encapsulation cover plate 25 is pressed on chip substrate 34, then process finishing, pressurizing piston 38 pass through Reset spring 39 resets, and the first control bevel gear 18 engages with the 4th bevel gear 17, and then passes through second driving shaft 23, the second tooth Article bevel gear 41, the first rack gear bevel gear 42, the first rack-driving axis 43, third rack gear bevel gear 44, the 4th rack gear bevel gear 45, the first rack gear belt wheel 46, the second rack-driving axis 47, rack gear belt 48, the second rack gear belt wheel 49 drive third rack-driving Axis 51 rotates clockwise, and third rack-driving axis 51 slides to the right with carry-over bar push plate 52, and retraction pushes in chamber 600, is stored in Encapsulation cover plate 25 in package board storage chamber 900 slides down to 900 bottom end of package board storage chamber, the first control with gravity Gear 56 processed is periodically engaged with the second control gear 57 again, and then passes through the first control control positioning of belt wheel 58, second Axis 59, the first belt 60, second control belt wheel 61, third control locating shaft 62, second control bevel gear 63, third control cone tooth Wheel 64 drives the second control transmission shaft 32 to rotate, and second controls transmission shaft 32 and then transmission wheel 33 and feed belt 31 is driven to continue Rotation, meanwhile, the second control transmission shaft 32 controls the control of gear the 65, the 4th gear 66 by third, third controls transmission shaft 29, Second connecting rod bevel gear 35, first connecting rod bevel gear 36, link transmission axis 37, third connecting rod bevel gear 67 drive fourth link cone Gear 68 rotates, and fourth link bevel gear 68 drives clamp system 801 by first connecting rod locating shaft 71, first connecting rod 72 Operation, so that fixture 78 is separated with the chip substrate 34 processed, chip substrate 34 is transplanted on down together by feed belt 31 Process, whole device enter next fabrication cycles process.
The beneficial effects of the present invention are: the configuration of the present invention is simple, maintenance convenience is easy to use, silicon base chip can be made close In the environment closed, processing encapsulation not will receive extraneous factor interference, and whole process is automatical and efficient, is not necessarily to human interaction, together When device internal structure stablize, injury will not be generated to chip, be capable of being packaged silicon base chip of safety and stability, mention significantly High product qualified rate has saved the production cost of factory, improves the utilization rate of raw material.
The above, the specific embodiment only invented, but invent protection scope be not limited thereto, it is any without The change or replacement that creative work is expected are crossed, should all be covered within the protection scope of invention.Therefore, the protection scope of invention It should be determined by the scope of protection defined in the claims.

Claims (10)

1. a kind of high protectiveness sealed in unit of silicon base chip group of the invention, including cabinet, interior be equipped with of the box top wall is moved Power chamber, interior be equipped with of the power cavity can provide the power mechanism of power for device, control chamber is equipped in the cabinet lower wall, described Control mechanism is equipped in control chamber;
It is equipped with drive cavity in the power cavity lower wall, is equipped in the drive cavity and pushes transmission mechanism, in the drive cavity lower wall Equipped with push chamber, the push is intracavitary to be equipped with delivery device, is equipped with package board storage chamber, the encapsulation in the drive cavity left wall The cushion that can provide buffer function is equipped at left and right sides of plate storage chamber in wall, is stacked with cap in the package board storage chamber Plate;
The package board storage chamber left wall connection is equipped with working chamber, is equipped with cam mechanism, the work in the working chamber roof It is intracavitary and be located at the cam mechanism lower end be equipped with pressing mechanism, the working chamber lower wall be equipped with transport mechanism, the conveyer It is equipped with chip substrate above structure, the clamp system for the chip substrate that can be fixedly clamped is equipped in the working chamber left wall;
Linkage transmission chamber is equipped in the cabinet left wall, the linkage transmission is intracavitary to be equipped with link mechanism.
2. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the engine Structure includes the main motor in the power cavity, and the main motor is equipped with rotatable main shaft, the main shaft Right end is installed with first bevel gear, is equipped with rotatable first transmission shaft in the power cavity, first transmission shaft top and Second bevel gear is installed in the power cavity, the second bevel gear is engaged with the first bevel gear;
First transmission shaft bottom end is installed with third hand tap gear, and the third hand tap gear can impart power to the control machine Structure, the power cavity is interior and the first control bevel gear is installed on the main shaft outer wall, in the power cavity and position In being installed with the second control bevel gear on the main shaft outer wall, it is equipped with rotatable second driving shaft in the power cavity, The second driving shaft top and it is located in the power cavity and is installed with the 4th bevel gear, the 4th bevel gear can be with described the Two control bevel gears or the first control bevel gear alternately engage.
3. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the control machine Structure includes the control transmission shaft in the control chamber, and the control transmission shaft right end is installed with the first control bevel gear, institute The first control bevel gear is stated to engage with the third hand tap gear;
The control transmission shaft left end is installed with the second control bevel gear, and it is fixed that rotatable first control is equipped in the control chamber Position axis is installed with the first control bevel gear on the first control locating shaft, the first control bevel gear and second control Bevel gear engagement processed;
It is installed with the first control gear on the first control locating shaft outer wall, slidable second control is equipped in the control chamber Locating shaft processed is installed with the second control gear on the first control belt wheel, the second control gear and first control Gear engagement;
It is installed with the first control belt wheel on the second control locating shaft outer wall, is equipped with rotatable third control in the control chamber Locating shaft processed, the third control and are installed with the second control belt wheel on locating shaft, the second control belt wheel and first control Belt wheel processed is connected by the first belt;
It is installed with the second control bevel gear on the third control locating shaft outer wall, is equipped with rotatable second in the working chamber Transmission shaft is controlled, the second control transmission shaft right end is installed with third control bevel gear, the third control bevel gear and institute State the engagement of the second control bevel gear;
Described second controls transmission shaft outer wall and is installed with third control gear in the control chamber, sets in the control chamber There is rotatable third control transmission shaft, the 4th control gear, the 4th control are installed on the third control transmission shaft Gear is engaged with third control gear.
4. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the conveyer Structure includes the second control transmission shaft in the working chamber, and the second control transmission shaft outer wall is equipped with transmission It takes turns, is equipped with feed belt in the transmission wheel, the chip substrate is placed on the feed belt.
5. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the connecting rod machine Structure includes the link transmission axis intracavitary set on the linkage transmission, and link transmission axis bottom end is installed with first connecting rod cone Gear, the third control transmission shaft right end are installed with second connecting rod bevel gear, the second connecting rod bevel gear and described first The engagement of connecting rod bevel gear;
Link transmission axis top is installed with third connecting rod bevel gear, and the linkage transmission is intracavitary to be equipped with rotatable the One connecting rod locating shaft is installed with fourth link bevel gear, the fourth link bevel gear and institute on the first connecting rod locating shaft The engagement of third connecting rod bevel gear is stated, is installed with first connecting rod on the first connecting rod locating shaft outer wall.
6. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the clamping machine Structure includes the second connecting rod in the working chamber, and the second connecting rod passes through second connecting rod locating shaft and the first connecting rod Hingedly, rotatable third connecting rod is equipped in the working chamber, the third connecting rod is hinged on institute by third connecting rod locating shaft It states in cabinet left wall, the third connecting rod top is hinged on the second connecting rod by fourth link locating shaft, and described second Connecting rod right end is installed with fixture.
7. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the push passes Motivation structure includes the first rack-driving axis in the drive cavity, and the first rack-driving axis left end is installed with the first tooth Bevel gear in the drive cavity and is located at the second driving shaft lower end and is installed with the second rack gear bevel gear, second tooth Bevel gear can engage with the first rack gear bevel gear;
The first rack-driving axis right end is installed with third rack gear bevel gear, is equipped with rotatable second tooth in the drive cavity Transmission shaft, is installed with the 4th rack gear bevel gear on the second rack-driving axis, the 4th rack gear bevel gear can with it is described Third rack gear bevel gear engages, and is installed with the first rack gear belt wheel, the first rack gear band on the second rack-driving axis outer wall Rack gear belt is arranged on wheel.
8. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the pusher Structure includes the third rack-driving axis intracavitary set on the push, is installed with the second rack gear band on the third rack-driving axis Wheel, the second rack gear belt wheel are connected with the rack gear belt, and the push chamber lower wall is equipped with slidable rack gear push plate.
9. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the cam machine Structure includes the camshaft in the working chamber, is installed with cam bevel gear, the main shaft left end on the camshaft And be located in the working chamber and be installed with the second cam bevel gear, the cam bevel gear nibbles with the second cam bevel gear It closes, is installed with cam on the camshaft.
10. a kind of high protectiveness sealed in unit of silicon base chip group as described in claim 1, it is characterised in that: the pressurization Mechanism includes the pressurizing piston in the working chamber, and the pressurizing piston inner elastomeric is connected with reset spring.
CN201910542883.1A 2019-06-21 2019-06-21 High-protectiveness packaging equipment for silicon-based chip set Active CN110137093B (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
CN201910542883.1A CN110137093B (en) 2019-06-21 2019-06-21 High-protectiveness packaging equipment for silicon-based chip set
GBGB1912208.4A GB201912208D0 (en) 2019-06-21 2019-08-27 A high protective packaging device for silicon-based chipsets
GBGB1912210.0A GB201912210D0 (en) 2019-06-21 2019-08-27 A high protective packaging device for silicon-based chipsets

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CN201910542883.1A CN110137093B (en) 2019-06-21 2019-06-21 High-protectiveness packaging equipment for silicon-based chip set

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CN110137093A true CN110137093A (en) 2019-08-16
CN110137093B CN110137093B (en) 2020-11-03

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110970377A (en) * 2019-12-18 2020-04-07 冯聪 Packaging device convenient for packaging integrated circuit chip

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Publication number Priority date Publication date Assignee Title
CN108376650A (en) * 2018-01-29 2018-08-07 梁瑞城 A kind of small outline integrated circuit packaging system
CN108417513A (en) * 2018-03-13 2018-08-17 南安泉鸿孵化器管理有限公司 A kind of integrated chip package equipment
CN108565240A (en) * 2018-05-06 2018-09-21 莆田市长吉贸易有限公司 The tube supplying device of expects pipe in integrated antenna package equipment
CN208240716U (en) * 2018-04-04 2018-12-14 南安艺同工业产品设计有限公司 A kind of LED sealed in unit

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108376650A (en) * 2018-01-29 2018-08-07 梁瑞城 A kind of small outline integrated circuit packaging system
CN108417513A (en) * 2018-03-13 2018-08-17 南安泉鸿孵化器管理有限公司 A kind of integrated chip package equipment
CN208240716U (en) * 2018-04-04 2018-12-14 南安艺同工业产品设计有限公司 A kind of LED sealed in unit
CN108565240A (en) * 2018-05-06 2018-09-21 莆田市长吉贸易有限公司 The tube supplying device of expects pipe in integrated antenna package equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110970377A (en) * 2019-12-18 2020-04-07 冯聪 Packaging device convenient for packaging integrated circuit chip

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GB201912208D0 (en) 2019-10-09
CN110137093B (en) 2020-11-03

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