CN110132328B - Optical fiber sensor based on thermal coupling enhancement effect and preparation method thereof - Google Patents
Optical fiber sensor based on thermal coupling enhancement effect and preparation method thereof Download PDFInfo
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- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35338—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using other arrangements than interferometer arrangements
- G01D5/35354—Sensor working in reflection
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
- G01J1/429—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to measurement of ultraviolet light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/55—Specular reflectivity
- G01N21/552—Attenuated total reflection
- G01N21/553—Attenuated total reflection and using surface plasmons
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1717—Systems in which incident light is modified in accordance with the properties of the material investigated with a modulation of one or more physical properties of the sample during the optical investigation, e.g. electro-reflectance
- G01N2021/1731—Temperature modulation
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Abstract
The invention discloses an optical fiber sensor based on a thermal coupling enhancement effect and a preparation method thereof, wherein the side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect comprises the following steps: the micro-structure optical fiber comprises a micro-structure optical fiber with an exposed fiber core and heating equipment for heating the exposed area of the micro-structure optical fiber, wherein a metal particle layer (101), a heat-sensitive material layer (102) and a sensitive layer (103) are sequentially deposited on the surface of the exposed area of the micro-structure optical fiber, the metal particle layer (101) is used for absorbing and amplifying evanescent waves, the evanescent waves are generated by electromagnetic waves transmitted in the optical fiber at the micro-structure optical fiber, and the sensitive layer (103) is used for detecting signals to be detected. The optical fiber sensor provided by the invention has the characteristic of high sensitivity.
Description
Technical Field
The invention relates to the technical field of optical fiber sensing, in particular to an optical fiber sensor based on a thermal coupling enhancement effect and a preparation method thereof.
Background
The optical fiber sensor has the advantages of small volume, flexibility, electromagnetic interference resistance and the like, can realize a smart structure, and has important research, development and application values. With the gradual maturity of the optical fiber processing technology, the application of the optical fiber in the sensing field is more and more extensive, and the microstructure optical fiber of the surface local polished optical fiber or the optical fiber structure formed by adopting the tapering provides a new means and method for the research and manufacture of a novel optical fiber sensing device. The optical fiber has the characteristics of unique optical characteristics, low cost, capability of being made into an all-fiber device and the like, and is more and more concerned by researchers.
However, since the optical fiber itself is not sensitive to certain chemical or biological parameters and material properties, it is not possible to directly use the optical fiber for detecting such materials or parameters. Therefore, it is necessary to research the design and preparation of the sensing material, and attach the sensing material and the optical fiber together, the optical fiber itself only plays the function of signal transmission, i.e. "sensing", but not sensing, and the material attached on the optical fiber plays the function of sensitive response as a sensitive medium, i.e. "sensing", but not sensing.
A sensing film is generally prepared on the end face of the optical fiber, and the refractive index of the sensing film is changed under the influence of the environment (target object), so that the change of the environment is sensed in the form of the change of the reflected power, namely, the so-called end face reflection type optical fiber sensor based on the micro lens principle. In this solution, the response of the sensitive film material to the trace target probe is usually small.
Disclosure of Invention
In view of the above technical deficiencies, the present invention provides an optical fiber sensor based on a thermal coupling enhancement effect and a method for manufacturing the same, wherein the sensor has a high sensitivity.
In order to achieve the purpose, the invention provides the following scheme:
side-throwing structure optical fiber sensor based on thermal coupling enhancement effect comprises: the microstructure fiber comprises a microstructure fiber with an exposed fiber core and heating equipment for heating a bare area of the microstructure fiber, wherein a metal particle layer, a heat-sensitive material layer and a sensitive layer are sequentially deposited on the surface of the bare area of the microstructure fiber;
the metal particle layer is used for absorbing and amplifying an evanescent wave, and the evanescent wave is generated at the microstructure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer is used for detecting a signal to be detected.
Optionally, the microstructured optical fiber is an optical fiber with a cladding layer partially stripped and exposed to a core.
Optionally, the sensitive layer is made of a gas sensitive material, a pressure sensitive material, a biological sensing material or an ultraviolet detection material.
The preparation method of the side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect comprises the following steps of;
depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 5-100 mm;
depositing a layer of heat-sensitive material on the metal particle layer, wherein the thickness of the heat-sensitive material layer is 10-500 nm;
and depositing a layer of sensitive material on the photosensitive material, wherein the thickness of the sensitive material is 10-150 nm, and the sensitive material is used for detecting a signal to be detected.
Optionally, before depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, and before the thickness of the metal particle layer is 5-100 mm, stripping a partial cladding layer of the optical fiber by using a physical or chemical method to expose a fiber core, so as to obtain the microstructure optical fiber with the exposed fiber core.
A tapered structure optical fiber sensor based on a thermal coupling enhancement effect comprises: the optical fiber comprises an optical fiber end with an exposed fiber core and heating equipment for heating the optical fiber end, wherein a metal particle layer is deposited on the surface of the optical fiber end, the metal particle layer is conical, the metal particle layer is in contact with the fiber core, and a thermosensitive material layer and a sensitive layer are sequentially coated on the surface of the metal particle layer;
the metal particle layer is used for absorbing and amplifying an evanescent wave, and the evanescent wave is generated at the end of the optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer is used for detecting a signal to be detected.
Optionally, the sensitive layer is made of a gas sensitive material, a pressure sensitive material, a biological sensing material or an ultraviolet detection material.
The preparation method of the tapered structure optical fiber sensor based on the thermal coupling enhancement effect comprises the following steps of;
depositing a metal particle layer on the surface of the optical fiber end, wherein the metal particle layer is conical and is in contact with the fiber core;
depositing a layer of heat-sensitive material on the surface of the metal particle layer, wherein the heat-sensitive material layer is coated on the metal particle layer;
and depositing a layer of sensitive material on the thermosensitive material, wherein the sensitive layer is coated on the thermosensitive material layer, and the sensitive material is used for detecting a signal to be detected.
According to the specific embodiment provided by the invention, the invention discloses the following technical effects:
the optical fiber sensor provided by the invention adopts heating equipment to heat the bare area of the microstructure optical fiber, the concentration of carriers in the thermosensitive material layer has obvious change under the heating condition, meanwhile, the electromagnetic wave propagated in the microstructure optical fiber forms Surface Plasmon Resonance (SPR) at the interface of the metal particles and the fiber core, the evanescent wave of the surface of the optical fiber is improved, and thus, the sensitivity of the optical fiber sensor to the response of a signal to be measured is improved.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without inventive exercise.
FIG. 1 is a schematic structural diagram of a side-polished structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention;
FIG. 2 is a flowchart of a method for manufacturing a side-polished structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a tapered structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention;
fig. 4 is a flowchart of a method for manufacturing a tapered structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The invention aims to provide an optical fiber sensor based on a thermal coupling enhancement effect and a preparation method thereof.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in further detail below.
Example 1:
fig. 1 is a schematic structural diagram of a side-polished structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention, and as shown in fig. 1, the side-polished structure optical fiber sensor based on the thermal coupling enhancement effect includes: the microstructure fiber comprises a microstructure fiber with an exposed fiber core and heating equipment for heating a bare area of the microstructure fiber, wherein a metal particle layer 101, a heat-sensitive material layer 102 and a sensitive layer 103 are sequentially deposited on the surface of the bare area of the microstructure fiber; the metal particle layer 101 is used for absorbing and amplifying an evanescent wave, wherein the evanescent wave is generated at the microstructure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer 103 is used for detecting a signal to be detected.
Specifically, the optical fiber is a single mode optical fiber or a multimode optical fiber. The microstructure optical fiber is an optical fiber with a cladding 106 partially stripped and exposed to a fiber core 105. The microstructure fiber is in a D-shaped groove, a U-shaped groove or a conical tip.
The sensitive layer 103 is made of gas sensitive material, pressure sensitive material, biosensing material or ultraviolet detecting material, but is not limited to these materials, and is applied to various application occasions such as biosensing, pressure sensing, ultraviolet detecting, pollutant detecting, microspur measuring and the like.
If the sensitive layer 103 is made of gas-sensitive material, gas can be detected; if the sensitive layer 103 is made of a pressure-sensitive material, the pressure can be detected; if the sensitive layer 103 is made of a biosensing material, the living beings can be detected; if the sensitive layer 103 is made of an ultraviolet detection material, ultraviolet light can be detected.
Specifically, the gas sensitive material is a metal oxide (such as one of tin oxide, zinc oxide, tungsten oxide, iron oxide, titanium oxide, and the like, or an oxide of a plurality of metal alloys thereof), graphene and a derivative thereof, and a two-dimensional material (such as stibene, black phosphorus, molybdenum disulfide, and the like). The pressure sensitive material is silicon, germanium, metal oxide, or the like. The biosensing material is a material modified by substances related to organisms such as enzyme, microorganism, antigen or cell. The ultraviolet detecting material is silicon carbide, nitride, oxide, etc. Contaminant detection material: toxic and harmful gases in life can be used as target detection objects. Macro measurement material: magnetic materials containing iron, cobalt, nickel, etc.
The heating device adopts an infrared light source which generates infrared radiation to heat the bare area of the microstructure optical fiber.
The metal particle layer 101 is made of at least one of Au, Pt, Ag, and Cu, and specifically, the metal particle layer 101 is made of one simple metal or an alloy of more metals selected from Au, Pt, Ag, and Cu.
The material of the thermosensitive material layer 102 is an oxide containing one of metals such as Mn, Co, Ni, Cu, etc. or an oxide containing a plurality of metal alloys thereof, and the thermosensitive material in this embodiment is an NTC thermistor material.
The deposition adopts chemical vapor deposition, physical vapor deposition or solution deposition.
The invention also provides a preparation method of the side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect, as shown in fig. 2, the preparation method comprises the following steps;
step S101: and stripping off the partial cladding of the optical fiber by using a physical or chemical method to expose the fiber core, thereby obtaining the microstructure optical fiber with the exposed fiber core.
Specifically, the physical or chemical method is one or a combination of a plurality of methods of mechanical polishing, ion etching and chemical corrosion.
Step S102: and depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 5-100 mm.
Step S103: and depositing a layer of heat-sensitive material on the metal particle layer, wherein the thickness of the heat-sensitive material layer is 10-500 nm.
Specifically, the thermosensitive material is used to improve the sensitivity of the optical fiber sensor by utilizing the change of the carrier concentration of the thermosensitive material at different temperatures. The environment working temperature range of the thermosensitive material layer is 150-500 ℃, and the working temperature can be reached by adopting direct heating, electromagnetic induction heating, thermal radiation heating and other modes. And annealing the thermal sensitive material layer after deposition, wherein the annealing temperature range is 150-1500 ℃, and the annealing time is 1-300 min.
Step S104: and depositing a layer of sensitive material on the photosensitive material, wherein the thickness of the sensitive material is 10-150 nm, and the sensitive material is used for detecting a signal to be detected.
Specifically, annealing is carried out after the sensitive material is deposited, the annealing temperature range is 150-500 ℃, and the annealing time is 1-120 min.
The working principle is as follows:
the signal to be detected is detected according to the intensity changes of the incident electromagnetic wave and the emergent electromagnetic wave, the electromagnetic wave enters from the optical fiber inlet 107, and then exits from the optical fiber outlet 108 through the micro-structural optical fiber, when the electromagnetic wave passes through the optical fiber core, evanescent waves are generated in the bare area of the micro-structural optical fiber and absorbed and amplified by the metal particle layer, the carrier concentration of the heat-sensitive material layer is greatly modulated under the heating of heating equipment, when the sensitive layer contacts the signal to be detected, the carrier state of the surface of the heat-sensitive material layer is changed after the signal is absorbed, at the moment, the heat-sensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased.
In the embodiment of the invention, an optical fiber with a side-polished D-shaped microstructure is obtained by adopting a mechanical polishing or chemical corrosion method, the interval length is about 0.05-1.0mm, Au metal particles are deposited on the surface of the optical fiber microstructure by adopting a magnetron sputtering method, the sputtering current is about 20mA, the time is 60s, annealing is carried out for 30min at 150 ℃, and the size of the obtained metal particle layer is about 15 nm; then, preparing a Mn-Co-Ni-Cu metal alloy oxide as a heat-sensitive transition layer material by a solution method, titrating the prepared Sol-Gel solution onto an optical fiber microstructure, and annealing for 3min at 500 ℃ by using a rapid thermal treatment furnace; and finally, preparing the metal alloy oxide of In-Ga-Zn-O above the thermosensitive material layer by using a similar solution method, thereby realizing the optical fiber sensor probe based on the thermal radiation enhancement structure. In the embodiment of the application, the heat-sensitive material layer is a thin film material with obvious heat radiation enhancement effect, and the sensitive material layer is sensitive to a specific target gasThe thin film material of (1). The optical fiber is an optical fiber with a side-polishing microstructure or a tapered optical fiber, when laser passes through the fiber core of the optical fiber, an evanescent field is generated in a side-polishing or tapered area and is absorbed and amplified by the metal particle layer; the hot carrier concentration of the thermosensitive material layer can be increased to a large extent (10) at different working temperatures15-1019cm-3) Modulation of (3). When the sensitive material layer contacts the target gas to be detected, the carrier state of the surface of the sensitive material layer is changed after gas molecules are adsorbed. At this time, the thermosensitive material layer can function to increase the carrier concentration of the gas-sensitive material layer, thereby increasing the sensitivity of the optical fiber sensor, i.e., improving the sensitivity to low-concentration gas.
Example 2:
fig. 3 is a schematic structural diagram of a tapered structure optical fiber sensor based on a thermal coupling enhancement effect according to an embodiment of the present invention, and as shown in fig. 3, the tapered structure optical fiber sensor based on the thermal coupling enhancement effect includes: the optical fiber comprises an optical fiber end with an exposed fiber core and heating equipment for heating the optical fiber end, wherein a metal particle layer 201 is deposited on the surface of the optical fiber end, the metal particle layer 201 is conical and is in contact with the fiber core, and a thermosensitive material layer 202 and a sensitive layer 203 are sequentially coated on the surface of the metal particle layer 201; the metal particle layer 201 is used for absorbing an amplified evanescent wave, wherein the evanescent wave is generated at the end of the optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer 203 is used for detecting a signal to be detected.
Specifically, the optical fiber is a single mode optical fiber or a multimode optical fiber.
The sensitive layer (203) is made of gas sensitive material, pressure sensitive material, biological sensing material or ultraviolet detection material, but is not limited to the materials, and is applied to various application occasions such as biological sensing, pressure sensing, ultraviolet detection, pollutant detection, microspur measurement and the like.
If the sensitive layer 203 is made of gas-sensitive material, gas can be detected; if the sensitive layer 203 is made of a pressure-sensitive material, the pressure can be detected; if the sensitive layer 203 is made of a biosensing material, the living beings can be detected; if the sensitive layer 203 is made of an ultraviolet detection material, ultraviolet light can be detected.
Specifically, the gas sensitive material is a metal oxide (such as one of tin oxide, zinc oxide, tungsten oxide, iron oxide, titanium oxide, and the like, or an oxide of a plurality of metal alloys thereof), graphene and a derivative thereof, and a two-dimensional material (such as stibene, black phosphorus, molybdenum disulfide, and the like). The pressure sensitive material is silicon, germanium, metal oxide, or the like. The biosensing material is a material modified by substances related to organisms such as enzyme, microorganism, antigen or cell. The ultraviolet detecting material is silicon carbide, nitride, oxide, etc. Contaminant detection material: toxic and harmful gases in life can be used as target detection objects. Macro measurement material: magnetic materials containing iron, cobalt, nickel, etc.
The heating device employs an infrared light source that generates infrared radiation to heat the fiber tip.
The metal particle layer 201 is made of at least one of Au, Pt, Ag, and Cu, and specifically, the metal particle layer 201 is made of one or more of Au, Pt, Ag, and Cu.
The material of the thermosensitive material layer 202 is at least one of Mn, Co, Ni, and Cu, specifically, the material of the metal particle layer 201 is an oxide of one of Mn, Co, Ni, Cu, etc. or an oxide containing a plurality of metal alloys thereof, and the thermosensitive material in this embodiment is an NTC thermistor material.
The deposition adopts chemical vapor deposition, physical vapor deposition or solution deposition.
The invention also provides a preparation method of the tapered structure optical fiber sensor based on the thermal coupling enhancement effect, as shown in fig. 4, the preparation method comprises the following steps;
step S201: and depositing a metal particle layer on the surface of the optical fiber end, wherein the metal particle layer is conical and is in contact with the fiber core.
Step S202: and depositing a layer of heat-sensitive material on the surface of the metal particle layer, wherein the heat-sensitive material layer is coated on the metal particle layer.
Specifically, the thermosensitive material is used to improve the sensitivity of the optical fiber sensor by utilizing the change of the carrier concentration of the thermosensitive material at different temperatures. The environment working temperature range of the thermosensitive material layer is 150-500 ℃, and the working temperature can be reached by adopting direct heating, electromagnetic induction heating, thermal radiation heating and other modes. And annealing the thermal sensitive material layer after deposition, wherein the annealing temperature range is 150-1500 ℃, and the annealing time is 1-300 min.
Step S203: and depositing a layer of sensitive material on the thermosensitive material, wherein the sensitive layer is coated on the thermosensitive material layer, and the sensitive material is used for detecting a signal to be detected.
Specifically, annealing is carried out after the sensitive material is deposited, the annealing temperature range is 150-500 ℃, and the annealing time is 1-120 min.
The working principle is as follows:
the signal to be detected is detected according to the intensity changes of the incident electromagnetic wave 206 and the emergent electromagnetic wave 207, the electromagnetic wave is emitted from the optical fiber, reflected by the optical fiber port and then emitted from the optical fiber, when the electromagnetic wave passes through the fiber core of the optical fiber, evanescent waves are generated in the port area of the optical fiber and absorbed and amplified by the metal particle layer, the carrier concentration of the thermosensitive material layer is greatly modulated under the heating of heating equipment, when the sensitive layer contacts the signal to be detected, the carrier state of the surface of the thermosensitive material layer can change after the signal is adsorbed, and at the moment, the thermosensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the optical fiber sensor.
It is common to prepare a sensitive film on the end face of the optical fiber, and the refractive index of the sensitive film is changed by the influence of the environment (target object), so as to sense the change of the environment in the form of reflected power change, that is, the so-called end face reflection type optical fiber sensor based on the micro lens principle. In this solution, the response of the sensitive film material to the trace target probe is usually tiny, and the response signal needs to be amplified by other means for observation and measurement. The invention provides a method for enhancing the carrier concentration by using a thermosensitive material as a transition layer and assisting in a heat radiation mode, which can effectively improve the sensitivity of the optical fiber sensor. The sensitive layer in the embodiment of the invention can select different materials according to different application occasions, and can be applied to various application occasions such as gas sensing, biological sensing, pressure sensing, ultraviolet detection, pollutant detection, microspur measurement and the like.
The principles and embodiments of the present invention have been described herein using specific examples, which are provided only to help understand the method and the core concept of the present invention; meanwhile, for a person skilled in the art, according to the idea of the present invention, the specific embodiments and the application range may be changed. In view of the above, the present disclosure should not be construed as limiting the invention.
Claims (8)
1. The side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect is characterized by comprising the following components: the microstructure fiber comprises a microstructure fiber with an exposed fiber core and heating equipment for heating a bare area of the microstructure fiber, wherein a metal particle layer (101), a heat-sensitive material layer (102) and a sensitive layer (103) are sequentially deposited on the surface of the bare area of the microstructure fiber;
the metal particle layer (101) is used for absorbing and amplifying an evanescent wave, and the evanescent wave is generated at the micro-structure optical fiber by electromagnetic waves transmitted in the optical fiber; the sensitive layer (103) is used for detecting a signal to be detected;
the heating equipment adopts an infrared light source which generates infrared radiation to heat the bare area of the microstructure optical fiber; the carrier concentration of the thermosensitive material layer is greatly modulated under the heating of the heating equipment, when the sensitive layer contacts a signal to be detected, the carrier state of the surface can change after the signal is adsorbed, and at the moment, the thermosensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the optical fiber sensor is increased.
2. The side-polished structure optical fiber sensor based on the thermal coupling enhancement effect according to claim 1, wherein the micro-structured optical fiber is an optical fiber with a partially stripped and bare core of a cladding layer.
3. The side-polished structure optical fiber sensor based on the thermal coupling enhancement effect according to claim 1, wherein the material of the sensitive layer (103) is a gas-sensitive material, a pressure-sensitive material, a biosensing material or an ultraviolet detection material.
4. The preparation method of the side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect is characterized by comprising the following steps of;
depositing a metal particle layer on the surface of the bare area of the microstructure optical fiber, wherein the thickness of the metal particle layer is 5-100 mm;
depositing a heat-sensitive material layer on the metal particle layer, wherein the thickness of the heat-sensitive material layer is 10-500 nm;
depositing a sensitive layer on the thermosensitive material layer, wherein the thickness of the sensitive layer is 10-150 nm, and the sensitive layer is used for detecting a signal to be detected;
the thermal sensitive material layer is used for improving the sensitivity of the optical fiber sensor by utilizing the change of the carrier concentration of the thermal sensitive material at different temperatures;
the carrier concentration of the thermosensitive material layer is greatly modulated under the heating of heating equipment, when the sensitive layer contacts a signal to be detected, the carrier state of the surface can change after the signal is adsorbed, and at the moment, the thermosensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the optical fiber sensor is increased.
5. The method for preparing the side-polishing structure optical fiber sensor based on the thermal coupling enhancement effect according to claim 4, wherein a metal particle layer is deposited on the surface of the bare area of the microstructure optical fiber, and before the thickness of the metal particle layer is 5-100 mm, the method further comprises stripping a partial coating layer of the optical fiber to expose a fiber core by using a physical or chemical method, so as to obtain the microstructure optical fiber with the exposed fiber core.
6. The tapered structure optical fiber sensor based on the thermal coupling enhancement effect is characterized by comprising: the optical fiber comprises an optical fiber end with an exposed fiber core and heating equipment for heating the optical fiber end, wherein a metal particle layer (201) is deposited on the surface of the optical fiber end, the metal particle layer (201) is conical, the metal particle layer (201) is in contact with the fiber core, and the surface of the metal particle layer (201) is sequentially coated with a heat-sensitive material layer (202) and a sensitive layer (203);
the metal particle layer (201) is used for absorbing an amplified evanescent wave, and the evanescent wave is generated at the end of the optical fiber by electromagnetic waves propagating in the optical fiber; the sensitive layer (203) is used for detecting a signal to be detected;
the heating device adopts an infrared light source which generates infrared radiation to heat the optical fiber end; the carrier concentration of the thermosensitive material layer is greatly modulated under the heating of the heating equipment, when the sensitive layer contacts a signal to be detected, the carrier state of the surface can change after the signal is adsorbed, and at the moment, the thermosensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the optical fiber sensor is increased.
7. The tapered structure optical fiber sensor based on the thermal coupling enhancement effect according to claim 6, wherein the material of the sensitive layer (203) is a gas sensitive material, a pressure sensitive material, a biological sensing material or an ultraviolet detection material.
8. The preparation method of the tapered structure optical fiber sensor based on the thermal coupling enhancement effect is characterized by comprising the following steps of;
depositing a metal particle layer on the surface of the optical fiber end head exposed out of the fiber core, wherein the metal particle layer is conical and is in contact with the fiber core;
depositing a layer of heat-sensitive material on the surface of the metal particle layer, wherein the heat-sensitive material layer is coated on the metal particle layer;
depositing a sensitive layer on the thermosensitive material layer, wherein the sensitive layer is coated on the thermosensitive material layer and is used for detecting a signal to be detected;
the thermal sensitive material layer is used for improving the sensitivity of the optical fiber sensor by utilizing the change of the carrier concentration of the thermal sensitive material at different temperatures;
the carrier concentration of the thermosensitive material layer is greatly modulated under the heating of heating equipment, when the sensitive layer contacts a signal to be detected, the carrier state of the surface can change after the signal is adsorbed, and at the moment, the thermosensitive material layer plays a role in increasing the carrier concentration of the sensitive layer, so that the response change amplitude of the optical fiber spectrum signal is increased, and the sensitivity of the optical fiber sensor is increased.
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