CN110129747B - 一种用于团簇束流源的电转向器 - Google Patents

一种用于团簇束流源的电转向器 Download PDF

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CN110129747B
CN110129747B CN201910131442.2A CN201910131442A CN110129747B CN 110129747 B CN110129747 B CN 110129747B CN 201910131442 A CN201910131442 A CN 201910131442A CN 110129747 B CN110129747 B CN 110129747B
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CN110129747A (zh
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曹路
宋凤麒
步海军
张敏昊
张同庆
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Nanjing University
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
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    • H—ELECTRICITY
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    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control

Abstract

用于团簇束流源的电转向器，设有8个1/8金属球体安装于立方体框架的顶点处，正方体框架为陶瓷或者聚四氟乙烯材质的绝缘体；正方体框架边长为60±10cm。8个1/8球体相互独立，能够单独加上不同电压。8个1/8金属球体的球心在六面体的8个顶点上。本发明采用8个1/8球形电极上同时加上正或负电压，可以方便控制经过本发明控制体的离子束流，可以正以直线或发生偏转，可以按任意方式控制，尤其是电极的形状精确，施加的电压均衡，电控制束流的性能好。

Description

一种用于团簇束流源的电转向器
技术领域
本发明涉及一种对原子团簇束流源的控制装置。
背景技术
近年来，随着原子制造的快速发展，团簇、单原子单分子器件等新材料以及新器件的需求日益扩大，通过束流源制备团簇成为了满足原子制造材料需求的主要手段。比如我们可以通过磁控溅射方式溅射出团簇原子气，通过气相冷凝使原子气冷凝为簇，再通过超声膨胀和离子光学系统将团簇聚焦成为束流。在飞行过程中对适合加工的团簇进行转向，进行不同方式的处理。
发明内容
本发明目的是，提出一种对原子团簇束流源的控制装置。即一种用于团簇束流源的电转向器。
本发明技术方案是，用于团簇束流源的电转向器，8个1/8金属球体安装于立方体框架的顶点处，正方体框架为陶瓷或者聚四氟乙烯材质的绝缘体；正方体框架边长为60 ±10cm。8个1/8球体相互独立，能够单独加上不同电压。8个1/8金属球体的球心在六面体的8个顶点上。
球体半径为20±5cm，加工孔洞为4±2mm螺纹孔。
有益效果，本发明采用8个1/8球形电极上同时加上正或负电压，可以方便控制经过本发明控制体的离子束流，可以正以直线或发生偏转，可以按任意方式控制，尤其是电极的形状精确，施加的电压均衡，电控制束流的性能好。
附图说明
图1为本发明电转向器结构示意图。
具体实施方式
入射离子束流为金100团簇，束流能量为100eV，每个团簇粒子带一个正电荷，在 4个1/8球形电极(红色)上同时加上-500V电压，在4个1/8球形电极(黄色)上同时加上+500V电压，离子束流向下偏转90度射出。
每个电极为1/8球体，1/8球体半径为25cm，1/8球体上设有加工孔洞为3mm直径螺纹孔，用于安装以及加装电极。
方案如下，采用8个1/8的球体，单个球体采用304不锈钢金属制成，圆弧面做抛光，并可以加工孔洞以利安装。图纸如图1所示，球体半径为25cm，加工孔洞为3mm 螺纹孔，用于安装以及加装电极。
按照图1所示对零件进行装配。8个1/8球体安装于正方体框架的顶点处，正方体框架为陶瓷或者聚四氟乙烯材质，为绝缘体。正方体框架边长为60cm。8个1/8球体相互独立，能够单独加上不同电压。
对零件进行装配。8个1/8球体安装于正方体框架的顶点处，正方体框架为陶瓷或者聚四氟乙烯材质，为绝缘体。正方体框架边长为60cm。8个1/8球体相互独立，能够单独加上不同电压。
通过对各个1/8球型电极加以不同的电压，可以使穿过该转向器的离子束流偏转，偏转角度为90度，偏转方向为5个方向，红色部分为8个1/8球形电极，灰色部分为陶瓷支架，蓝色为离子束流。
通过对各个1/8球型电极加以不同的电压，可以使穿过该转向器的离子束流偏转，偏转角度为90度，偏转方向为5个方向。红色部分为8个1/8球形电极，灰色部分为陶瓷支架，离子束流在六面体表面物垂直或以一定角度射出。
使用实例如下：入射离子束流为金100团簇，束流能量为100eV，每个团簇粒子带一个正电荷，在8个1/8球形电极上同时加上-500V电压，离子束流不发生偏转，平行射出。
离子束流在六面体的平面上垂直或成一定角度射入或射出。
在8个1/8球形电极上同时加上-500V电压，离子束流不发生偏转，平行射出。即从ABE面向DCG面射出。
入射离子束流为金100团簇，束流能量为100eV，每个团簇粒子带一个正电荷，在 4个1/8球形电极(红色即ABFG四个电极)上同时加上-500V电压，在4个1/8球形电极 (黄色，另外四个电极)上同时加上+500V电压，离子束流向下偏转90度射出。即从ABE 面向向EDF面射出。
入射离子束流为金100团簇，束流能量为100eV，每个团簇粒子带一个正电荷，在4个1/8球形电极(红色)上同时加上-500V电压，在4个1/8球形电极(黄色)上同时加上+500V电压，离子束流向右偏转90度射出。
在4个1/8球形电极(红色即ADHF四电极)上同时加上-500V电压，在4个1/8球形电极(黄色，另外四个电极)上同时加上+500V电压，离子束流向右偏转90度射出。即 ABE进入ADE面射出。

Claims (4)

1.用于团簇束流源的电转向器，其特征是，设有8个1/8金属球体安装于立方体框架的顶点处，正方体框架为陶瓷或者聚四氟乙烯材质的绝缘体；正方体框架边长为60±10cm；8个1/8球体相互独立，能够单独加上不同电压；8个1/8金属球体的球心在六面体的8个顶点上；
1/8金属球体半径为20±5cm，1/8金属球体平面上加工孔洞为4±2mm螺纹孔。
2.根据权利要求1所述的用于团簇束流源的电转向器，其特征是，1/8金属球体采用不锈钢制成，圆弧面抛光，并加工孔洞。
3.根据权利要求2所述的用于团簇束流源的电转向器，其特征是，1/8金属球体半径为25cm，孔洞为3mm螺纹孔。
4.根据权利要求1所述的用于团簇束流源的电转向器，其特征是，正方体框架边长为60cm。
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6215576B1 (en) * 1997-03-27 2001-04-10 Matsuhshita Electric Industrial Co., Ltd. Method for making a second-order nonlinear optical material, the material obtained by the method, and an optical modulation device comprising the material
CN1906728A (zh) * 2003-12-04 2007-01-31 日新意旺机械股份公司 离子束装置
CN205680654U (zh) * 2012-10-23 2016-11-09 珀金埃尔默健康科技有限公司 离子导引设备
CN208521894U (zh) * 2015-05-26 2019-02-19 珀金埃尔默健康科学股份有限公司 双转向离子导向器和使用它们的装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6891157B2 (en) * 2002-05-31 2005-05-10 Micromass Uk Limited Mass spectrometer

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6215576B1 (en) * 1997-03-27 2001-04-10 Matsuhshita Electric Industrial Co., Ltd. Method for making a second-order nonlinear optical material, the material obtained by the method, and an optical modulation device comprising the material
CN1906728A (zh) * 2003-12-04 2007-01-31 日新意旺机械股份公司 离子束装置
CN205680654U (zh) * 2012-10-23 2016-11-09 珀金埃尔默健康科技有限公司 离子导引设备
CN208521894U (zh) * 2015-05-26 2019-02-19 珀金埃尔默健康科学股份有限公司 双转向离子导向器和使用它们的装置

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