CN110129740A - The preparation of coated cutting tool and coating surface processing method and coated cutting tool - Google Patents
The preparation of coated cutting tool and coating surface processing method and coated cutting tool Download PDFInfo
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- CN110129740A CN110129740A CN201910330858.7A CN201910330858A CN110129740A CN 110129740 A CN110129740 A CN 110129740A CN 201910330858 A CN201910330858 A CN 201910330858A CN 110129740 A CN110129740 A CN 110129740A
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- coated cutting
- hard conating
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- 239000011248 coating agent Substances 0.000 title claims abstract description 258
- 238000000576 coating method Methods 0.000 title claims abstract description 258
- 238000005520 cutting process Methods 0.000 title claims abstract description 109
- 238000002360 preparation method Methods 0.000 title claims abstract description 28
- 238000003672 processing method Methods 0.000 title claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 59
- 238000007733 ion plating Methods 0.000 claims abstract description 29
- 238000005530 etching Methods 0.000 claims abstract description 15
- 238000012545 processing Methods 0.000 claims abstract description 14
- 230000003746 surface roughness Effects 0.000 claims abstract description 14
- 239000000314 lubricant Substances 0.000 claims description 33
- 239000000463 material Substances 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 20
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 14
- 230000008021 deposition Effects 0.000 claims description 14
- 239000010410 layer Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 8
- 229910010038 TiAl Inorganic materials 0.000 claims description 6
- 239000011159 matrix material Substances 0.000 claims description 5
- 239000011247 coating layer Substances 0.000 claims description 4
- 230000008569 process Effects 0.000 claims description 3
- 238000004062 sedimentation Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 2
- 238000010891 electric arc Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 15
- 239000002131 composite material Substances 0.000 description 28
- 230000002708 enhancing effect Effects 0.000 description 11
- 238000003754 machining Methods 0.000 description 9
- 238000007514 turning Methods 0.000 description 8
- 238000010422 painting Methods 0.000 description 7
- 229910052761 rare earth metal Inorganic materials 0.000 description 5
- 229910008482 TiSiN Inorganic materials 0.000 description 4
- 238000010276 construction Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000011261 inert gas Substances 0.000 description 4
- QRXWMOHMRWLFEY-UHFFFAOYSA-N isoniazide Chemical compound NNC(=O)C1=CC=NC=C1 QRXWMOHMRWLFEY-UHFFFAOYSA-N 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005260 corrosion Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000004215 Carbon black (E152) Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000004381 surface treatment Methods 0.000 description 2
- 229910000760 Hardened steel Inorganic materials 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 239000008199 coating composition Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23D—PLANING; SLOTTING; SHEARING; BROACHING; SAWING; FILING; SCRAPING; LIKE OPERATIONS FOR WORKING METAL BY REMOVING MATERIAL, NOT OTHERWISE PROVIDED FOR
- B23D79/00—Methods, machines, or devices not covered elsewhere, for working metal by removal of material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5873—Removal of material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention provides a kind of preparation of coated cutting tool and coating surface processing method and coated cutting tools.Wherein, the preparation of coated cutting tool and coating surface processing method include the following steps: step S10, and coating is deposited on substrate using multi-Arc Ion Plating；Step S20, the furnace chamber for controlling multi-Arc Ion Plating is in vacuum state, performs etching processing to the surface of coating, to reduce the surface roughness of coating surface.Technical solution of the present invention solves the problems, such as that the high production cost and production efficiency of the preparation of coated cutting tool in the prior art and coating surface processing method are low.
Description
Technical field
The present invention relates to cutting tool technical fields, preparation and coating surface in particular to a kind of coated cutting tool
Processing method and coated cutting tool.
Background technique
With the fast development of processing manufacturing industry and the expansion of industrial requirement, there are some unmanageable green woods
Material, so that requirement of the processing enterprise to cutting tool is higher and higher.Coated cutting tool because of it with good machining property and
Cheap price, is widely used in machining.
Coating is deposited on substrate using multi-Arc Ion Plating in the related technology and obtains coated cutting tool, but production in this way
The roughness of the coating surface of obtained coated cutting tool is larger, and glossiness is poor.In order to solve this technical problem, the prior art
Increase equipment for after-treatment is generallyd use, by coated cutting tool by being post-processed after being taken out in multi-Arc Ion Plating to it, thus
Promote the surface quality of coated cutting tool.But the preparation of above-mentioned coated cutting tool and coating surface processing method, which exist, leads to coated cutting tool
The production cost increases, reduces the problem of coated cutting tool production efficiency.
Summary of the invention
The main purpose of the present invention is to provide a kind of preparation of coated cutting tool and coating surface processing method and coating knives
Tool, with solve coated cutting tool in the prior art preparation and coating surface processing method high production cost and production efficiency it is low
The problem of.
To achieve the goals above, according to an aspect of the invention, there is provided preparation and the coating of a kind of coated cutting tool
Surface treatment method includes the following steps: step S10, and coating is deposited on substrate using multi-Arc Ion Plating；Step
S20, the furnace chamber for controlling multi-Arc Ion Plating are in vacuum state, processing are performed etching to the surface of coating, to reduce coating
The surface roughness on surface.
Further, in step S20, the furnace chamber for controlling multi-Arc Ion Plating is in vacuum state, leads into furnace chamber
The Ar for entering predetermined amount of flow ionizes Ar under conditions of predetermined bias, and the Ar+ for ionizing generation carves the surface of coating
Erosion processing, to reduce the surface roughness of coating surface.
Further, in step S20, vacuumize process is carried out to furnace chamber and make vacuum degree 1.33Pa in furnace chamber~
3.99Pa；The flow that Ar is passed through into furnace chamber is 80ml/min~150ml/min, right under conditions of bias is 400V~600V
Ar is ionized, and the Ar+ for ionizing generation performs etching processing to the surface of coating.
Further, step S10 includes the following steps: step S11, installs Cr target and/or Ti target, is passed through Ar,
Deposited on substrates Cr coating and/or Ti coating；Step S12 installs TiAl target, is passed through N2, applied in deposited on substrates AlTiN
Layer；Step S13 installs the SiTi target containing Er, is passed through N2, in deposited on substrates TiSiErN coating；Step S14 installs Cr
Target and/or Ti target, are passed through N2, in deposited on substrates CrN coating and/or TiN coating.
Further, control depositing temperature is 400 DEG C~550 DEG C；In step s 11, control coating bias be 600V~
1000V, control arc current are 50A~100A, and the flow for being passed through Ar is 40ml/min~90ml/min, and sedimentation time is
15min~25min, the Cr coating of deposition and/or Ti coating with a thickness of 0.02 μm~0.05 μm；In step s 12, TiAl target
The mass fraction ratio of material is Ti:Al=40/60, and control coating bias is 30V~50V, is passed through N2Flow be 80ml/min~
120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the AlTiN coating of deposition
With a thickness of 0.2 μm~0.4 μm；In step s 13, the SiTi target containing 0.5wt%Er~3wt%Er, and SiTi target are installed
The mass fraction ratio of material is Si:Ti=20/80, and control coating bias is 30V~50V, is passed through N2Flow be 80ml/min~
120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the TiSiErN coating of deposition
With a thickness of 0.4 μm~1 μm；In step S14, control coating bias is 30V~50V, is passed through N2Flow be 80ml/min
~120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the CrN coating of deposition
And/or TiN coating with a thickness of 0.2 μm~0.4 μm.
According to another aspect of the present invention, a kind of coated cutting tool is provided, coated cutting tool utilizes above-mentioned coated cutting tool
Preparation and coating surface processing method are prepared, and coated cutting tool includes: substrate；Hard conating, hard conating are arranged on substrate, firmly
Coating is made of the material with Er element.
Further, hard conating is AlTiErN coating and/or TiSiErN coating.
Further, along the direction far from matrix surface, coated cutting tool further include: be arranged between substrate and hard conating
Tie coat, and the lubricant coating of the separate tie coat side of hard conating is set；Hard conating includes two straton hard conatings,
Sub- hard conating close to tie coat is AlTiN coating, and the sub- hard conating close to lubricant coating is TiSiErN coating.
Further, the coating layer thickness of AlTiN coating be 0.2 μm~0.4 μm, TiSiErN coating with a thickness of 0.4 μm~
1μm。
Further, tie coat with a thickness of 0.02 μm~0.05 μm, lubricant coating with a thickness of 0.2 μm~0.4 μm.
Using the technical solution of the application, the preparation and coating surface processing method of a kind of new coated cutting tool are provided,
After coating is deposited on substrate using multi-Arc Ion Plating, not by the substrate of depositing coating by multi-Arc Ion Plating
Middle taking-up, but directly the surface for adhering to coating on base material is performed etching using multi-Arc Ion Plating, it solves more
Arc ion plating equipment, which deposits the coating surface to be formed, has drop phenomenon, thus obtain coating surface quality preferably and table
The lesser coated cutting tool of surface roughness, due to do not need increase after-treatment device, can reduce the production cost of coated cutting tool, by
It is post-processed in not needing to take out coated cutting tool, is able to ascend the production efficiency of coated cutting tool.
Detailed description of the invention
The accompanying drawings constituting a part of this application is used to provide further understanding of the present invention, and of the invention shows
Examples and descriptions thereof are used to explain the present invention for meaning property, does not constitute improper limitations of the present invention.In the accompanying drawings:
Fig. 1 shows a kind of structural schematic diagram of the coated cutting tool of alternative embodiment according to the present invention.
Wherein, the above drawings include the following reference numerals:
10, substrate；20, composite coating；21, tie coat；22, hard conating；221, sub- hard conating；23, lubricant coating.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that the described embodiment is only a part of the embodiment of the present invention, instead of all the embodiments.It is right below
The description only actually of at least one exemplary embodiment be it is illustrative, never as to the present invention and its application or use
Any restrictions.Based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
Every other embodiment obtained, shall fall within the protection scope of the present invention.
In order to solve the preparation of coated cutting tool in the prior art and the high production cost and life of coating surface processing method
The problem of producing low efficiency, the present invention provides a kind of preparation of coated cutting tool and coating surface processing method and coated cutting tools.
As shown in Figure 1, coated cutting tool includes substrate 10 and the coating that is deposited on substrate 10.This application provides a kind of paintings
The preparation and coating surface processing method of layer cutter, include the following steps: step S10, using multi-Arc Ion Plating by coating
It is deposited on substrate 10；Step S20, the furnace chamber for controlling multi-Arc Ion Plating are in vacuum state, carry out to the surface of coating
Etching processing, to reduce the surface roughness of coating surface.
Using the technical solution of the application, the preparation and coating surface processing method of a kind of new coated cutting tool are provided,
After coating is deposited on substrate using multi-Arc Ion Plating, not by the substrate of depositing coating by multi-Arc Ion Plating
Middle taking-up, but directly the surface for adhering to coating on base material is performed etching using multi-Arc Ion Plating, it solves more
Arc ion plating equipment, which deposits the coating surface to be formed, has drop phenomenon, thus obtain coating surface quality preferably and table
The lesser coated cutting tool of surface roughness, due to do not need increase after-treatment device, can reduce the production cost of coated cutting tool, by
It is post-processed in not needing to take out coated cutting tool, is able to ascend the production efficiency of coated cutting tool.
Optionally, in step S20, the furnace chamber for controlling multi-Arc Ion Plating is in vacuum state, is passed through into furnace chamber
The inert gas of predetermined amount of flow ionizes the inert gas under conditions of predetermined bias, and the ion pair for ionizing generation applies
The surface of layer performs etching processing, to reduce the surface roughness of coating surface.It, will not since inert gas performance is more stable
It reacts with coating material, impurity phase will not be generated, to ensure that the stabilization of coating composition, while gas etching compares
Mildly, biggish stress will not be generated.It is obtained by the preparation and coating surface processing method of coated cutting tool provided by the present application
Coated cutting tool have the advantages that surface quality is good, surface roughness is small, glossiness is good, not only beautiful but also corrosion resistant.
Specifically, in step S20, the furnace chamber for controlling multi-Arc Ion Plating is in vacuum state, is passed through into furnace chamber
The Ar of predetermined amount of flow ionizes Ar under conditions of predetermined bias, and the Ar+ for ionizing generation performs etching the surface of coating
Processing, to reduce the surface roughness of coating surface.Ar is more easier in inert gas, and cost is relatively low.
Optionally, in step S20, vacuumize process is carried out to furnace chamber and make vacuum degree 1.33Pa in furnace chamber~
3.99Pa；The Ar that flow is 80ml/min~150ml/min is passed through into furnace chamber；It is right under conditions of bias is 400V~600V
Ar is ionized, and the Ar+ for ionizing generation performs etching processing to the surface of coating, to reduce the surface roughness of coating surface.
As shown in Figure 1, coated cutting tool provided by the present application includes substrate 10 and coating, coating is composite coating 20, compound
Coating 20 is arranged on the surface of substrate 10, along far from matrix surface direction, composite coating 20 successively include tie coat 21,
Hard conating 22 and lubricant coating 23, tie coat 21 is used to remove the oxide on 10 surface of substrate, convenient for adhering to hard conating 22
On tie coat 21, hard conating 22 is used to enhance the hardness of coated cutting tool, lubricant coating 23 for reduce coated cutting tool with to
Frictional force between cutting workpiece.
In this application, a kind of coated cutting tool with composite coating is devised, so as to improve the use of coated cutting tool
Performance, specifically, along the direction far from matrix surface, composite coating successively includes tie coat, hard conating and lubricant coating,
Wherein, tie coat is used to remove the oxide of substrate surface, convenient for hard conating to be attached on tie coat；Hard conating is used for
The hardness for enhancing coated cutting tool improves between hard conating and substrate since tie coat is arranged between substrate and hard conating
Bond strength, can be avoided hard conating and fall off in use；Lubricant coating is for reducing coated cutting tool and work to be cut
Frictional force between part, lubricant coating can be avoided the problems such as crushing knife occurs when coated cutting tool is contacted with turning work piece to be cut.Therefore,
Coated cutting tool provided by the present application has good service performance and service life.Utilize the preparation and painting of above-mentioned coated cutting tool
When layer surface treatment method produces the cutter shown in fig. 1 with composite coating 20, the coated cutting tool prepared also has
Have the advantages that coating surface is high-quality.
Optionally, tie coat 21 be Cr coating and/or Ti coating, lubricant coating 23 be TiN coating and/or CrN coating,
Hard conating 22 includes two straton hard conatings 221, and the sub- hard conating 221 close to tie coat 21 is AlTiN coating, is applied close to lubrication
The sub- hard conating 221 of layer 23 is TiSiErN coating.Using the preparation and coating surface processing method of above-mentioned coated cutting tool to this
When coated cutting tool is produced, step S10 includes the following steps: step S11, installs Cr target and/or Ti target, is passed through Ar,
Cr coating and/or Ti coating are deposited on substrate 10；Step S12 installs TiAl target, is passed through N2, deposited on substrate 10
AlTiN coating；Step S13 installs the SiTi target containing Er, is passed through N2, the depositing Ti SiErN coating on substrate 10；Step
S14 installs Cr target and/or Ti target, is passed through N2, CrN coating and/or TiN coating are deposited on substrate 10.
In this application, the material for also optimizing hard conating 22, by being added to rare earth member in the material of hard conating 22
The performance and used life of plain Er, Lai Tisheng coated cutting tool.The results showed addition rare earth element er has refinement crystal grain, mentions
The consistency of high coating, the microhardness for improving coating, the toughness for enhancing coating, the bond strength for enhancing coating and enhancing coating
Thermal stability effect.
Optionally, control overall deposition temperature is 400 DEG C~550 DEG C；In step s 11, control coating bias is 600V
~1000V, control arc current are 50A~100A, and the flow for being passed through Ar is 40ml/min~90ml/min, and sedimentation time is
15min~25min, the Cr coating of deposition and/or Ti coating with a thickness of 0.02 μm~0.05 μm；In step s 12, TiAl target
The mass fraction ratio of material is Ti:Al=40/60, and control coating bias is 30V~50V, is passed through N2Flow be 80ml/min~
120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the AlTiN coating of deposition
With a thickness of 0.2 μm~0.4 μm；In step s 13, the SiTi target containing 0.5wt%Er~3wt%Er, and SiTi target are installed
The mass fraction ratio of material is Si:Ti=20/80, and control coating bias is 30V~50V, is passed through N2Flow be 80ml/min~
120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the TiSiErN coating of deposition
With a thickness of 0.4 μm~1 μm；In step S14, control coating bias is 30V~50V, is passed through N2Flow be 80ml/min
~120ml/min, controlling pressure in furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the CrN coating of deposition
And/or TiN coating with a thickness of 0.2 μm~0.4 μm.
The preparation of coated cutting tool provided by the present application and coating surface processing method early period are bombarded using Ti/Cr target, the later period
It is etched using Ar, the roughness of the coating surface of obtained coated cutting tool wants small, and glossiness will be got well.
As shown in Figure 1, embodiments herein provides a kind of coated cutting tool, including substrate 10 and composite coating 20, it is multiple
It closes coating 20 to be arranged on the surface of substrate 10, along the direction far from matrix surface, composite coating 20 successively includes: tie coat
21；Hard conating 22, hard conating 22 are used to enhance the hardness of coated cutting tool；Lubricant coating 23, lubricant coating 23 is for reducing coating
Frictional force between cutter and turning work piece to be cut；Wherein, tie coat 21 is used to remove the oxide on 10 surface of substrate, and being convenient for will
Hard conating 22 is attached on tie coat 21.
In this application, a kind of coated cutting tool with composite coating 20 is devised, so as to improve making for coated cutting tool
With performance, specifically, along the direction far from 10 surface of substrate, composite coating 20 successively includes tie coat 21, hard conating 22
With lubricant coating 23, wherein tie coat 21 is used to remove the oxide of substrate surface, activates workpiece surface, promotes compound painting
The formation and attachment of layer 20 are convenient for for hard conating 22 being attached on tie coat 21；Hard conating is for enhancing coated cutting tool
Hardness improves the bond strength between hard conating and substrate since tie coat is arranged between substrate and hard conating, can
Hard conating is avoided to fall off in use；Lubricant coating is used to reduce the frictional force between coated cutting tool and turning work piece to be cut,
Lubricant coating can be avoided the problems such as crushing knife occurs when coated cutting tool is contacted with turning work piece to be cut.Therefore, painting provided by the present application
Layer cutter has good service performance and service life.
Optionally, composite coating 20 with a thickness of 0.8 μm~1.8 μm.
Optionally, tie coat 21 is Cr coating.Cr coating has the advantages that high rigidity, anti-oxidation and high-wearing feature.
Optionally, tie coat 21 is Ti coating.Ti coating has good caking property, high-wearing feature and highly corrosion resistant
The advantages of.
Optionally, tie coat 21 is the Cr/Ti coating that Cr coating and Ti coating are alternatively formed.
Optionally, tie coat 21 with a thickness of 0.02 μm~0.05 μm.
Optionally, hard conating 22 is AlTiN coating and/or TiSiN coating.AlTiN coating has high rigidity, high-fire resistance
And high tenacity, TiSiN coating have high heat resistance, are suitble to hard machining, workhardness is up to 65HRC.
Optionally, hard conating 22 includes the sub- hard conating 221 of multilayer being made from a different material.
Optionally, AlTiN coating and/or TiSiN coating alternating deposit form the sub- hard conating 221 of multilayer.
Optionally, hard conating 22 with a thickness of 0.6 μm~1.4 μm.
Optionally, lubricant coating 23 is TiN coating.TiN coating has good wearability, reduction coefficient of friction and prevents from bonding
The advantages of.
Optionally, lubricant coating 23 is CrN coating.CrN coating has low stress, high adhesion force, high tenacity and high anti-corrosion
The advantages of property.
Optionally, lubricant coating 23 is the TiN/CrN coating that TiN coating and CrN coating are alternatively formed.
Optionally, lubricant coating 23 with a thickness of 0.2 μm~0.4 μm.
Optionally, hard conating 22 is made of the material with Er element.Hard painting is also optimized in the technical solution of the application
The material of layer 22, by being added to rare earth element er, the performance and used life of Lai Tisheng coated cutting tool in the material of coating.
The results showed addition rare earth element er has refinement crystal grain, the consistency of raising coating, the microhardness of raising coating, increases
The effect of the toughness of strong coating, the bond strength for enhancing coating and the thermal stability for enhancing coating.
Optionally, hard conating 22 is AlTiErN coating and/or TiSiErN coating.By in AlTiN coating or TiSiN painting
Er element is added in layer, to promote the bond strength between two sub- hard conatings 221.
Optionally, hard conating 22 includes the sub- hard conating 221 of multilayer.
Optionally, hard conating 22 includes two straton hard conatings 221, and is close to the sub- hard conating 221 of tie coat 21
AlTiN coating, the sub- hard conating 221 close to lubricant coating 23 are TiSiErN coating.
Optionally, the coating layer thickness of AlTiN coating be 0.2 μm~0.4 μm, TiSiErN coating with a thickness of 0.4 μm~1 μ
m。
In alternative embodiment shown in fig. 1, along the direction far from 10 surface of substrate, composite coating 20 successively includes Ti/
Cr tie coat, AlTiN hard conating, TiSiErN hard conating and TiN/CrN lubricant coating.The painting that embodiments herein provides
Layer cutter has many advantages, such as hardness height, stable chemical performance and heat-resistant oxidized, treats cutting when cutting workpiece is cut
Speed, machining accuracy and service life have promotion.
It should be noted that the coat type of coated cutting tool provided by the present application is not limited to the above-mentioned coat type enumerated,
As long as can be realized its corresponding function.
The application implemented using multi-Arc Ion Plating preparation and the coating surface processing method of above-mentioned coated cutting tool come
Above-mentioned coated cutting tool is prepared, specifically, multi-Arc Ion Plating is used to composite coating 20 being deposited on substrate 10, also uses
Processing is performed etching in the outer surface to composite coating 20, to reduce the surface roughness of 20 outer surface of composite coating.In this way,
After composite coating 20 is deposited on substrate using multi-Arc Ion Plating, will not deposited the substrate 10 of composite coating 20 by
It is taken out in multi-Arc Ion Plating, but directly using multi-Arc Ion Plating to the composite coating 20 being attached on substrate 10
Surface performs etching, and solves outer surface the asking there are drop phenomenon that multi-Arc Ion Plating deposits the composite coating 20 to be formed
Topic, thus obtain coating surface quality preferably and the lesser coated cutting tool of surface roughness, due to do not need increase post-processing fill
It sets, can reduce the production cost of coated cutting tool, post-processed due to not needing to take out coated cutting tool, be able to ascend coating
The production efficiency of cutter.
Optionally, the upstream of multi-Arc Ion Plating is arranged in hydrocarbon cleaning machine, carries out for the surface to substrate 10 clear
Wash drying process.In this way, cleaning using surface of the hydrocarbon cleaning machine to substrate 10, the greasy dirt on its surface is removed, thus just
It is attached on substrate 10 in composite coating 20, is conducive to the quality for promoting coated cutting tool.
The coated cutting tool that the application is prepared has that surface quality is good, hardness is high, stable chemical performance and heat-resisting oxytolerant
The advantages that change, treating cutting speed when cutting workpiece is cut, machining accuracy and service life has promotion.
Embodiments herein additionally provides a kind of coated cutting tool, including substrate 10 and coating, and coating is arranged in substrate 10
Surface on, coating includes the hard conating 22 made of the material with Er element.
In some embodiments of the present application, the material of coating is also optimized, it is dilute by being added in the material of coating
The performance and used life of earth elements Er, Lai Tisheng coated cutting tool.Adding rare earth element er has refinement crystal grain, improves coating
Consistency, the microhardness for improving coating, the toughness for enhancing coating, the bond strength for enhancing coating and the thermostabilization for enhancing coating
The effect of property.
Optionally, hard conating 22 includes the sub- hard conating 221 of multilayer, and at least one layer in the sub- hard conating 221 of multilayer is by having
The material of Er element is made.
Optionally, the material with Er element is AlTiErN or TiSiErN.
Optionally, coating with a thickness of 0.8 μm~1.8 μm.
Optionally, coating is composite coating 20, and composite coating 20 further includes tie coat 21, and tie coat 21 is arranged in base
Between material 10 and hard conating 22, tie coat 21 is used to remove the oxide on 10 surface of substrate, convenient for hard conating 22 to be attached to
On tie coat 21, hard conating 22 is used to enhance the hardness of coated cutting tool.
Optionally, coating is composite coating 20, and composite coating 20 further includes lubricant coating 23, and lubricant coating 23 is arranged hard
On coating 22, lubricant coating 23 is used to reduce the frictional force between coated cutting tool and turning work piece to be cut, and lubricant coating 23 can be kept away
Exempt from the problems such as crushing knife occurs when coated cutting tool is contacted with turning work piece to be cut.
Optionally, coating is composite coating 20, and along the direction far from 10 surface of substrate, composite coating 20 successively includes transition
Coating 21, hard conating 22 and lubricant coating 23.Wherein, tie coat 21 is used to remove the oxide on 10 surface of substrate, activates work
Part surface promotes the formation and attachment of composite coating 20, convenient for hard conating 22 to be attached on tie coat 21；Hard conating 22 is used
Hard conating 22 is improved since tie coat 21 is arranged between substrate 10 and hard conating 22 in the hardness of enhancing coated cutting tool
With the bond strength between substrate 10, it can be avoided hard conating 22 and fall off in use；Lubricant coating 23 is applied for reducing
Frictional force between layer cutter and turning work piece to be cut, lubricant coating 23 can be avoided hair when coated cutting tool is contacted with turning work piece to be cut
The problems such as raw crushing knife.Therefore, coated cutting tool provided by the present application has good service performance and service life.
Optionally, hard conating 22 with a thickness of 0.6 μm~1.4 μm.
Specifically, along the direction far from 10 surface of substrate, composite coating 20 is successively hard including Ti/Cr tie coat, AlTiN
Coating, TiSiErN hard conating and TiN/CrN lubricant coating.
Optionally, Ti/Cr tie coat with a thickness of 0.02 μm~0.05 μm.
Optionally, the coating layer thickness of AlTiN coating be 0.2 μm~0.4 μm, TiSiErN coating with a thickness of 0.4 μm~1 μ
m。
Optionally, TiN/CrN lubricant coating with a thickness of 0.2 μm~0.4 μm.
Coated cutting tool provided by the present application is with surface quality is good, glossiness is good, hardness is high, high-densit, good toughness, chemistry
The advantages that performance is stable and heat-resistant oxidized treats cutting speed when cutting workpiece is cut, machining accuracy and uses the longevity
Life has promotion.Coated cutting tool provided by the present application can be applied to the machining of the high rigidity hard-cutting material such as hardened steel, mention
The high quality of cutting-tool's used life and material machining.Coated cutting tool provided by the present application has biggish using model
It encloses, has great meaning to the development of Machining Technology for Cutting.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, operation, device, component and/or their combination.
Unless specifically stated otherwise, positioned opposite, the digital table of the component and step that otherwise illustrate in these embodiments
It is not limited the scope of the invention up to formula and numerical value.Simultaneously, it should be appreciated that for ease of description, each portion shown in attached drawing
The size divided not is to draw according to actual proportionate relationship.For technology, side known to person of ordinary skill in the relevant
Method and equipment may be not discussed in detail, but in the appropriate case, and the technology, method and apparatus should be considered as authorizing explanation
A part of book.In shown here and discussion all examples, any occurrence should be construed as merely illustratively, and
Not by way of limitation.Therefore, the other examples of exemplary embodiment can have different values.It should also be noted that similar label
Similar terms are indicated in following attached drawing with letter, therefore, once it is defined in a certain Xiang Yi attached drawing, then subsequent attached
It does not need that it is further discussed in figure.
In the description of the present invention, it is to be understood that, the noun of locality such as " front, rear, top, and bottom, left and right ", " it is laterally, vertical,
Vertically, orientation or positional relationship indicated by level " and " top, bottom " etc. is normally based on orientation or position shown in the drawings and closes
System, is merely for convenience of description of the present invention and simplification of the description, in the absence of explanation to the contrary, these nouns of locality do not indicate that
It must have a particular orientation or be constructed and operated in a specific orientation with the device or element for implying signified, therefore cannot manage
Solution is limiting the scope of the invention；The noun of locality " inside and outside " refers to inside and outside the profile relative to each component itself.
For ease of description, spatially relative term can be used herein, as " ... on ", " ... top ",
" ... upper surface ", " above " etc., for describing such as a device shown in the figure or feature and other devices or spy
The spatial relation of sign.It should be understood that spatially relative term is intended to comprising the orientation in addition to device described in figure
Except different direction in use or operation.For example, being described as if the device in attached drawing is squeezed " in other devices
It will be positioned as " under other devices or construction after part or construction top " or the device of " on other devices or construction "
Side " or " under other devices or construction ".Thus, exemplary term " ... top " may include " ... top " and
" in ... lower section " two kinds of orientation.The device can also be positioned with other different modes and (is rotated by 90 ° or in other orientation), and
And respective explanations are made to the opposite description in space used herein above.
In addition, it should be noted that, limiting components using the words such as " first ", " second ", it is only for be convenient for
Corresponding components are distinguished, do not have Stated otherwise such as, there is no particular meanings for above-mentioned word, therefore should not be understood as to this
The limitation of invention protection scope.
It should be noted that term used herein above is merely to describe specific embodiment, and be not intended to restricted root
According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singular
Also it is intended to include plural form, additionally, it should be understood that, when in the present specification using term "comprising" and/or " packet
Include " when, indicate existing characteristics, step, work, device, component and/or their combination.
It should be noted that the description and claims of this application and term " first " in above-mentioned attached drawing, "
Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way
Data be interchangeable under appropriate circumstances, so that presently filed embodiment described herein can be in addition to illustrating herein
Or the sequence other than those of description is implemented.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (10)
1. the preparation and coating surface processing method of a kind of coated cutting tool, which comprises the steps of:
Coating is deposited on substrate (10) by step S10 using multi-Arc Ion Plating；
Step S20, the furnace chamber for controlling the multi-Arc Ion Plating are in vacuum state, perform etching to the surface of the coating
Processing, to reduce the surface roughness of the coating surface.
2. the preparation and coating surface processing method of coated cutting tool according to claim 1, which is characterized in that in the step
In rapid S20, the furnace chamber for controlling the multi-Arc Ion Plating is in vacuum state, is passed through predetermined amount of flow in Xiang Suoshu furnace chamber
Ar ionizes Ar under conditions of predetermined bias, and the Ar+ for ionizing generation performs etching processing to the surface of the coating,
To reduce the surface roughness of the coating surface.
3. the preparation and coating surface processing method of coated cutting tool according to claim 2, which is characterized in that in the step
In rapid S20, vacuumize process is carried out to the furnace chamber and makes vacuum degree 1.33Pa~3.99Pa in the furnace chamber；To described
The flow that Ar is passed through in furnace chamber is 80ml/min~150ml/min, carries out electricity to Ar under conditions of bias is 400V~600V
From the Ar+ for ionizing generation performs etching processing to the surface of the coating.
4. the preparation of coated cutting tool according to any one of claim 1 to 3 and coating surface processing method, feature exist
In the step S10 includes the following steps:
Step S11 installs Cr target and/or Ti target, is passed through Ar, and Cr coating is deposited on the substrate (10) and/or Ti is applied
Layer；
Step S12 installs TiAl target, is passed through N2, the depositing Al TiN coating on the substrate (10)；
Step S13 installs the SiTi target containing Er, is passed through N2, the depositing Ti SiErN coating on the substrate (10)；
Step S14 installs Cr target and/or Ti target, is passed through N2, CrN coating is deposited on the substrate (10) and/or TiN is applied
Layer.
5. the preparation and coating surface processing method of coated cutting tool according to claim 4, which is characterized in that control deposition
Temperature is 400 DEG C~550 DEG C；
In the step S11, control coating bias is 600V~1000V, and control arc current is 50A~100A, is passed through Ar
Flow be 40ml/min~90ml/min, sedimentation time be 15min~25min, the Cr coating of deposition and/or the Ti
Coating with a thickness of 0.02 μm~0.05 μm；
In the step S12, the mass fraction ratio of TiAl target is Ti:Al=40/60, control coating bias for 30V~
50V is passed through N2Flow be 80ml/min~120ml/min, controlling in the furnace chamber pressure is 1Pa~5Pa, control electric arc electricity
Stream be 100A~150A, the AlTiN coating of deposition with a thickness of 0.2 μm~0.4 μm；
In the step S13, the SiTi target containing 0.5wt%Er~3wt%Er, and the mass fraction of SiTi target are installed
Than for Si:Ti=20/80, control coating bias is 30V~50V, it is passed through N2Flow be 80ml/min~120ml/min, control
Making pressure in the furnace chamber is 1Pa~5Pa, and control arc current is 100A~150A, the thickness of the TiSiErN coating of deposition
Degree is 0.4 μm~1 μm；
In the step S14, control coating bias is 30V~50V, is passed through N2Flow be 80ml/min~120ml/min,
Controlling in the furnace chamber pressure is 1Pa~5Pa, and control arc current is 100A~150A, the CrN coating of deposition and/or
The TiN coating with a thickness of 0.2 μm~0.4 μm.
6. a kind of coated cutting tool, which is characterized in that the coated cutting tool utilizes coating described in any one of any one of claims 1 to 55
The preparation of cutter and coating surface processing method are prepared, and the coated cutting tool includes:
Substrate (10)；
Hard conating (22), the hard conating (22) are arranged on the substrate (10), and the hard conating (22) is by with Er element
Material be made.
7. coated cutting tool according to claim 6, which is characterized in that the hard conating (22) be AlTiErN coating and/or
TiSiErN coating.
8. coated cutting tool according to claim 7, which is characterized in that along the direction far from matrix surface, the coating knife
Tool further include: the tie coat (21) being arranged between the substrate (10) and the hard conating (22), and be arranged described
The lubricant coating (23) far from the tie coat (21) side of hard conating (22)；The hard conating (22) includes that two stratons are hard
Coating (221), the sub- hard conating (221) close to the tie coat (21) is AlTiN coating, close to the lubricant coating (23)
Sub- hard conating (221) be TiSiErN coating.
9. coated cutting tool according to claim 8, which is characterized in that the coating layer thickness of the AlTiN coating be 0.2 μm~
0.4 μm, the TiSiErN coating with a thickness of 0.4 μm~1 μm.
10. coated cutting tool according to claim 8 or claim 9, which is characterized in that the tie coat (21) with a thickness of 0.02
μm~0.05 μm, the lubricant coating (23) with a thickness of 0.2 μm~0.4 μm.
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| CN201910330858.7A CN110129740A (en) | 2019-04-23 | 2019-04-23 | The preparation of coated cutting tool and coating surface processing method and coated cutting tool |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114173974A (en) * | 2019-10-10 | 2022-03-11 | 住友电工硬质合金株式会社 | Cutting tool |
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