CN110118573A - It is a kind of can conformal attaching multifunction flexible sensor and its application - Google Patents
It is a kind of can conformal attaching multifunction flexible sensor and its application Download PDFInfo
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- CN110118573A CN110118573A CN201910337198.5A CN201910337198A CN110118573A CN 110118573 A CN110118573 A CN 110118573A CN 201910337198 A CN201910337198 A CN 201910337198A CN 110118573 A CN110118573 A CN 110118573A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
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- G—PHYSICS
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- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/08—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring variation of an electric variable directly affected by the flow, e.g. by using dynamo-electric effect
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Abstract
The invention belongs to flexible sensor fields, and disclose it is a kind of can conformal attaching multifunction flexible sensor and its application.Flexible sensor includes left electrode and right electrode, left electrode includes gate structure and two leads, right electrode includes gate structure and a lead, wherein, gate structure includes the multiple parallel grids formed by a multiple bending of metallic film, and the grid in left electrode is staggered to form multiple parallel capacitors with the grid in right electrode.The invention also discloses the multi-modal sensors prepared by flexible sensor, it includes the flexible sensor of middle layer and symmetrically arranged two sides up and down, middle layer includes substrate, piezoelectric unit and photovoltaic element, piezoelectric unit is used to convert the strain of generation to voltage difference, and photovoltaic element is used to convert voltage difference for the illumination being subject to.Through the invention, provide it is ultra-thin, it is flexible, be bonded close sensor with object to be measured, have multi-modal while the advantages of measure.
Description
Technical field
The invention belongs to flexible sensor field, more particularly, to it is a kind of can the multifunction flexible of conformal attaching sense
Device and its application.
Background technique
A variety of flexible electronic devices such as flexible electronic, including flexible sensor, nanometer flexible device have flexible and draw
It stretches, characteristics, these characteristics such as good bio-compatibility have flexible skin electronic device in vegetation monitoring field
Wide application prospect.Flexible multi-modal sensor is the structural unit of the ratio between a kind of high function number and port number, has and passes through one
The function of a multi-modal combined monitoring for realizing various plants growth parameter(s), and array then allows entire device carry out big face
Product multiple spot monitoring, therefore vegetation monitoring is had a very important significance.
Growth monitoring refers to measurement and monitoring to plant items physical signs.The growth course of plant is carried out accurate
Monitoring intelligent plant regulatory, plant growth control accurate, growing process research etc. fields suffer from it is extremely important
Effect.Currently, having the method for some growth monitorings, such as Patent No. CN108370744A proposes that a kind of controllable plant is planted
Humidity is trained, improves planting environment air quality, and raw by a kind of plant that trim mode accelerates plant growth and growth quality
Long monitoring device.
However traditional growth monitoring method that above-mentioned patent proposes has one of following or several disadvantages: 1) measuring
As a result inaccurate, it is non-contact measurement, measurement result is larger by environmental disturbances；2) it is unable to measure the near field weather of plant, is surveyed
The parameter of amount is the overview of environment where plant, cannot accurately reflect plant near field climate state；3) due to the factors such as blocking,
In the presence of the dead zone for being not easy to measure；4) can not physiological status to some organ (such as blade) of individual plants and distribution carry out it is accurate
Monitoring；5) measurement function has certain limitation, cannot achieve multi-functional duplex measurement.Therefore it for these problems, needs
Develop a kind of ultra-thin, flexible and breathable growth monitoring sensor.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides it is a kind of can conformal attaching it is multi-functional soft
Property sensor and its application, designed by the structure to flexible sensor, multi-modal sensor and electric resistance sensor, make it
It is flexible with ultra-thin, it is good and be able to achieve the multiple characteristic parameters of object to be measured and measure simultaneously that compactness is bonded with object to be measured
The advantages of.
To achieve the above object, according to one aspect of the present invention, provide it is a kind of can conformal attaching multifunction flexible
Sensor design, the flexible sensor include two parts of left electrode and right electrode, and the left electrode includes gate structure and sets
Two leads at the gate structure both ends are set, the right electrode includes that gate structure and one are connected to the gate structure midpoint
Lead, wherein the gate structure includes the multiple parallel grids formed by a multiple bending of metallic film, the left side
Grid in electrode is staggered to form multiple parallel capacitors with the grid in right electrode；
When the flexible sensor is attached at subject surface to be measured, if being passed through electricity in two leads of the left electrode
Stream, characteristics of objects Parameters variation to be measured causes the resistance variations in the left electrode gate structure, by the change for measuring the resistance
Change the variation for obtaining characteristics of objects parameter to be measured；If passing through electricity between a lead and the lead of right electrode for the left electrode
When stream, characteristics of objects Parameters variation to be measured causes capacitance variations in staggered grid, and the variation by measuring the capacitor obtains
Obtain the variation of characteristics of objects parameter to be measured.
It is further preferred that the thickness of the flexible sensor is between 10 nanometers~1000 nanometers.
It is further preferred that the lead preferably uses serpentine structure, width is not less than 100 μm, angle of wriggling
It is 10 °~30 °, radius is less than 5mm, the ductility of the flexible sensor and stickiness with object to be measured are guaranteed with this,
Processing method preferably uses machine cuts or photoetching.
It is another aspect of this invention to provide that providing a kind of multi-modal biography prepared using flexible sensor described above
Sensor, the multi-modal sensor include middle layer and the flexible sensor for being symmetricly set on the middle layer or more two sides, in which:
The middle layer includes substrate and the piezoelectric unit and photovoltaic element that are embedded in the substrate, the piezoelectric unit and light
Electric unit is symmetrically distributed in the left and right sides of the staggered grid of the flexible sensor, the piezoelectric unit simultaneously with it is upper and lower
The gate structure of left electrode or right electrode in the flexible sensor of two sides is in parallel, and the photovoltaic element is simultaneously with upper and lower two
The gate structure of right electrode or left electrode in the flexible sensor of side is in parallel, and the piezoelectric unit is used for will be to be measured right
As the strain of generation is converted into the voltage difference between flexible sensor described in upper and lower two sides, the photovoltaic element be used for will it is described to
The illumination that measurement object is subject to is converted into the voltage difference between flexible sensor described in upper and lower two sides；
Three leads of upside flexible sensor, three leads of downside flexible sensor or upper and lower two flexible sensors
Lead combination of two form multiple mode, when measuring object to be measured, it is to be measured right to be reflected by measurement to different modalities
The different characteristic parameter of elephant.
It is further preferred that the base material is preferably dimethyl silicone polymer, polyamide or poly- ethylene two
Alcohol.
It is further preferred that the piezoelectric unit is preferably organic polymer piezoelectric material, the photovoltaic element is preferably
Perovskite, organic solar batteries light absorbing material or silicon photovoltaic material.
It is further preferred that the thickness of the multi-modal sensor is no more than 3 microns, guarantee that it is docile with object to be measured
Degree.
Another aspect according to the invention provides a kind of resistance survey prepared using multi-modal sensor described above
Quantity sensor, the electric resistance sensor include two multi-modal sensors being oppositely arranged, wherein a multi-modal sensing
Be passed through electric current in the left electrode of flexible sensor of upside in device its fever made to form thermostimulation, in another multi-modal sensor on
Under the influence of the thermostimulation and characteristics of objects parameter to be measured, resistance changes the left electrode of the flexible sensor of side, leads to
It crosses and measures the variation that the resistance reflects characteristics of objects parameter to be measured.
It is further preferred that when the characteristics of objects parameter to be measured is the fluid flow rate of subject surface to be measured, preferably
It calculates and obtains according to the following formula:
Q=(a+bvn)(Tw-Tf)
Wherein, v is fluid flow rate, and a, b are physical constants related with fluid and multi-modal sensor itself, by testing
It determines；N is constant related with flow velocity, TwFor the temperature of another multi-modal sensor described in actual measurement, TfFor fluid temperature
Degree, the temperature of another multi-modal sensor actual measurement and the temperature difference in no cross-ventilation or runoff rate
It can reflect another described multi-modal sensor dispersed heat Q, fluid stream can be extrapolated using above formula after knowing heat Q
Speed.
Last aspect according to the invention provides one kind multi-modal sensor described above in plant monitoring
Using.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1, the gate structure of the flexible sensor in the present invention is formed multiple flat using the multiple bending of a metallic film
Capable grid, compared with existing hydration electrode, measure resistance when measure be entire gate structure resistance, extend electricity
The length and area of resistance, resistance is changed significantly when being changed by external world's influence, and existing hydration electrode becomes due to resistance
Change is too small to measure, and is easily disturbed by noise, that is, is not used to measurement resistance, can be used using flexible sensor of the invention
In the variation of measurement resistance, and measurement accuracy is high, and accuracy is good；
2, the present invention uses three layers of structure using multi-modal sensor, by the flexible sensors of upper and lower two sides and with
The mating reaction of piezoelectric unit and broadcasting and TV unit, so that three leads of upside flexible sensor, the three of downside flexible sensor
The lead combination of two of root lead or upper and lower two flexible sensors forms multiple mode, and multi-modal measurement is realized with this；
3, electric resistance sensor provided by the invention is by after two multi-modal sensor combinations, one of them as thermostimulation,
The variation of another resistance under thermostimulation is measured, the variation of subject surface to be measured characteristic parameter is obtained with this, structure is simple,
The application of multi-modal sensor is expanded, adaptation range is wider；
4, using multi-modal sensor in the present invention in measurement plant growth parameter, it can be achieved that intensity of illumination, generation
Strain, the measurement of temperature, humidity, rain and dew size, air velocity and runoff rate, and pass through the array of multiple multi-modal sensors
Arrange the large area multiple spot monitoring that individual plants surface can be achieved.
Detailed description of the invention
Fig. 1 be constructed by preferred embodiment according to the invention can conformal attaching multifunction flexible sensor structure
Schematic diagram；
Fig. 2 is the structural schematic diagram of left electrode constructed by preferred embodiment according to the invention；
Fig. 3 is the structural schematic diagram of right electrode constructed by preferred embodiment according to the invention；
Fig. 4 is the sectional view of multi-modal sensor constructed by preferred embodiment according to the invention；
Fig. 5 is the top view of multi-modal sensor constructed by preferred embodiment according to the invention；
Fig. 6 is resistance measurement sensor schematic constructed by preferred embodiment according to the invention；
Fig. 7 is the structural schematic diagram that plant surface characteristic parameter is measured constructed by preferred embodiment according to the invention.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1- flexible sensor, 2- piezoelectric unit, 3- photovoltaic element, 4- substrate, the left electrode of 11-, the right electrode of 12-, 13- draw
Line, 14- gate structure.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
Fig. 1 be constructed by preferred embodiment according to the invention can conformal attaching multifunction flexible sensor structure
Schematic diagram, as shown in Figure 1, flexible sensor includes 12 two parts of left electrode 11 and right electrode, Fig. 2 is according to the invention
The structural schematic diagram of left electrode constructed by preferred embodiment, Fig. 3 are right electricity constructed by preferred embodiment according to the invention
The structural schematic diagram of pole, as shown in Figures 2 and 3, left electrode include gate structure 14 and are arranged in the two of gate structure head and the tail both ends
Root lead 13, right electrode 12 include the lead 13 that gate structure 14 and one are connected to the gate structure midpoint, and lead is at midpoint
Position makes the grid of upper and lower ends symmetrical, wherein gate structure 14 include formed by a multiple bending of metallic film it is more
A parallel grid, the grid in left electrode are staggered to form multiple parallel capacitors, left electrode with the grid in right electrode
In grid it is identical as the grid quantity in right electrode, a grid in a grid of left electrode and right electrode forms one
Capacitor, multiple grids form multiple parallel grids；
In measurement process, flexible sensor 1 is attached on object to be measured, is led in two leads of left electrode 11
When entering electric current, the resistance of left 11 gate structure of electrode, or a lead with lead and right electrode in left electrode 11 are measured
Between when passing through electric current, measure the capacitor of left electrode 11 and the staggered gate structure of right electrode 12, characteristics of objects ginseng to be measured
Number variation causes the resistance of flexible sensor 1 or capacitor to change, and it is to be measured right to be reflected by the variation of measurement capacitor or resistance
As the variation of characteristic parameter.
Specifically, the lead of flexible sensor is A11, A12 and A13, and A11 and A12 are the leads of left electrode, and A13 is right
The lead of electrode measures the resistance of left 11 gate structure of electrode, Huo Zhe when being passed through electric current in two leads of A11 and A12
When passing through electric current between A11/A12 and A13, the capacitor of left electrode 11 and the staggered gate structure of right electrode 12, example are measured
Such as: when the temperature is changed, so that the resistance of left electrode gate structure changes, then can obtain temperature by the variation of the resistance
Variation, so that multiple parallel capacitors change, humidity can be obtained by the variation of capacitor when humidity changes
Variation.
Further, the thickness of flexible sensor 1 is between 10 nanometers~1000 nanometers, for guarantee with it is to be measured right
The docile degree of elephant.
Further, gate structure 14 is metallic film, may be selected to be gold, silver, copper or platinum etc., can be resistant to 150 DEG C of height
Temperature.
Further, lead 13 preferably uses serpentine structure, and the design of width w, radius R and angle a are meeting
It is appropriate to increase R/w and a in the case where size and process requirements, in general, its width is at 100 μm or more, angle of wriggling is 10 °~
30 °, radius is less than 5mm, and the processing method that machine cuts or photoetching may be selected obtains, and guarantees the ductility of flexible sensor with this
With the stickiness with object to be measured.
Fig. 4 is the sectional view of multi-modal sensor constructed by preferred embodiment according to the invention, as shown in figure 4, more
Modal sensor includes middle layer and the flexible sensor 1 for being symmetricly set on the middle layer or more two sides, and middle layer includes substrate 4
With inlay piezoelectric unit 2 and photovoltaic element 3 in the substrate, piezoelectric unit 2 and photovoltaic element 3 are symmetrically distributed in flexible sensor
The left and right sides of 1 staggered grid, piezoelectric unit 2 simultaneously in the flexible sensor 1 of upper and lower two sides left electrode or the right side
The gate structure of electrode is in parallel, photovoltaic element 3 while the grid with right electrode or left electrode in the flexible sensor of upper and lower two sides
Pole structure is in parallel, and the strain that piezoelectric unit 2 is used to occur multi-modal sensor is converted into the electricity between upper and lower flexible sensor
Pressure difference, photovoltaic element 3 are used for the voltage converted the illumination that multi-modal sensor is subject to between upper and lower two flexible sensors
Difference；
Fig. 5 is the top view of multi-modal sensor constructed by preferred embodiment according to the invention, as shown in figure 5, pressure
Electric unit setting is arranged on the right in the left side, photovoltaic element, and the two position is interchangeable, and in the present embodiment, piezoelectric unit uses zirconium
Lead titanate piezoelectric ceramics (PZT), photovoltaic element is using silicon photocell.
Three leads of upside flexible sensor, three leads of downside flexible sensor or upper and lower two flexible sensors
Lead combination of two form multiple mode, when measuring object to be measured, it is to be measured right to be reflected by measurement to different modalities
The different characteristic parameter of elephant.
Specifically, three leads of the flexible sensor on the upside of multi-modal sensor be A11, A12 and A13, downside it is soft
Property sensor three leads be B11, B12 and B13, A11 and A12, B11 and B12 are the lead of left electrode, and A13 and B13 are equal
For the lead of right electrode, when multi-modal sensor to be used to measure the characteristic parameter of plant, when monitoring plant leaf blade surface
When light intensity, under the photoelectric effect of the generation of photovoltaic element 3, so that the voltage difference between lead A11/A12 and B11/B12 occurs
Variation, measuring the voltage difference can get the intensity of illumination on plant leaf blade surface；When monitoring plant surface strains, in piezoelectricity
It is generated under piezoelectric effect under the action of unit 2, so that generating voltage difference between lead A13 and B13, measuring the voltage difference be can get
The strain of the generation on plant leaf blade surface；When monitoring plant leaf blade surface temperature, since temperature and stress can make grid
The resistance of structure changes, especially directly obvious with the resistance variations of the flexible sensor of the downside of blade contact, because
This, the resistance variations between measurement lead B11 and B12 subtract the variation of the resistance as caused by stress, can be obtained due to temperature
Resistance variations caused by degree can be obtained the temperature on plant leaf blade surface according to the variation of the resistance；When monitoring plant leaf blade table
When the humidity in face, humidity make downside flexible sensor in multiple parallel capacitors change, by measurement B11/B12 with
The variation of capacity plate antenna value can be obtained the variation of blade surface humidity between B13；When the rain and dew on plant leaf blade surface, rain and dew
It falls on multi-modal sensor, capacitance basically reaches saturation, can not accurately reflect the virtual condition of plant, therefore select measurement
Resistance sizes between the lead A11/A12 and A13 of upper layer flexible sensor, can reflect the rain and dew of attached plant blade surface
Size.
Further, Choice of substrate materials can be converted into solid material, in formation when interbed, basis material from liquid
For liquid, photovoltaic element and piezoelectric unit are placed in liquid material, i.e. so that photovoltaic element and piezoelectricity list after its solidification
Member is inlayed wherein, in addition, base material also needs heat-resist, ductility is good, so that the ductility of multi-modal sensor is good,
It is more docile in subject surface to be measured when measurement, such as when being attached to plant leaf blade surface, can be mentioned with the surface for being bonded blade completely
High measurement accuracy, above-mentioned base material are preferably dimethyl silicone polymer, polyamide or polyphenyl dioctyl phthalate ethylene glycol.
Further, piezoelectric unit is preferably organic polymer piezoelectric material, and photovoltaic element is preferably perovskite, You Jitai
Positive energy battery light absorbing material or silicon photovoltaic material.The thickness of multi-modal sensor is no more than 3 microns.
A kind of resistance measurement sensor, the multi-modal sensor being oppositely arranged including two, wherein a multi-modal biography
Being passed through electric current in the left electrode of flexible sensor of upside in sensor makes its fever form thermostimulation, in another multi-modal sensor
Under the influence of thermostimulation and characteristics of objects parameter to be measured, resistance changes the left electrode of the flexible sensor of upside, passes through
Measure the variation that the resistance reflects characteristics of objects parameter to be measured.
It, will wherein one when specifically, using the air velocity and Stemflow Rate on electric resistance sensor measurement plant leaf blade surface
A current heating that is passed through forms thermostimulation, work of another multi-modal sensor II in thermostimulation, air velocity and Stemflow Rate
It is increased with lower temperature, resistance changes, and is worth, can extrapolate air velocity and Stemflow Rate by the variation of resistance.Fig. 6 be by
According to resistance measurement sensor schematic constructed by the preferred embodiment of the present invention, as shown in fig. 6, I upside of multi-modal sensor
The lead of flexible sensor are as follows: acquisition A11, A12 and A13, the lead of downside flexible sensor are B11, B12 and B13, multi-modal
The lead of II upside flexible sensor of sensor are as follows: acquisition A21, A22 and A23, the lead of downside flexible sensor are B21, B22
And B23, when measuring air velocity, since upside flexible sensor is directly contacted with air, heat transfer conditions mainly reflect air
Flow velocity applies electric current between lead A11 and A12, makes the gate structure fever shape of multi-modal I upside flexible sensor of sensor
At thermostimulation, the resistance variations between lead A21 and A22 are acquired, are reflected on multi-modal sensor II by the variation of the resistance
Side flexible sensor temperature change, so as to extrapolate air velocity；When herborization blade Stemflow Rate, since downside is soft
Property sensor directly contacted with plant leaf blade, heat transfer conditions mainly reflect Stemflow Rate in plant, lead B11 and B12 it
Between apply electric current, make the gate structure of multi-modal I upside flexible sensor of sensor generate heat to forming thermostimulation, acquire lead B21
With the resistance variations between the B22 of port, multi-modal II downside flexible sensor temperature of sensor is reflected by the variation of the resistance
Variation, so as to extrapolate plant stem flow rate.
When one of them multi-modal sensor I is used as heat source, when fluid flow rate can take away one of multi-modal sensor II
Divide heat, according to convective heat exchange theory, multi-modal II dispersed heat Q of sensor and air velocity or runoff rate can be exported
Relationship between v:
Q=(a+bvn)(Tw-Tf)
In formula, v is fluid flow rate, and a, b are physical constants related with fluid and multi-modal sensor itself, by testing
It determines；N is constant related with flow velocity, TwFor the temperature of the multi-modal sensor II of actual measurement, TfFor fluid temperature (F.T.), multimode
The temperature of II actual measurement of state sensor can reflect multi-modal biography with the temperature difference in no cross-ventilation or runoff rate
II dispersed heat Q of sensor, can extrapolate flow velocity using above formula after knowing heat Q.
By above-mentioned multi-modal sensor application in the measurement of fabric vanes surface characteristics parameter, specifically include intensity of illumination,
In the strain of generation, temperature, humidity, rain and dew size, air velocity and runoff rate, wherein multi-modal sensor
Quantity can be 1,2 or the multi-modal sensor of multiple arrays arrangement, and Fig. 7 is constructed by preferred embodiment according to the invention
Measurement plant surface characteristic parameter structural schematic diagram, as shown in fig. 7, wherein using multiple arrays arrangement multimode sensing
Device, the sensor measurement connected using multiple arrays, since the lead between adjacent multimode sensor is connected with each other, because
This, the external lead of the sensor of the array of formation greatly reduces, meanwhile, the arrangement mode of the array, so that multimode
Be in hollow grid shape between state sensor, this hollow grid has certain gas permeability, do not influence the eupnea of plant with
Photosynthesis.As shown in Figure 7, there are 16 multi-modal sensors, if being used alone, there will be 16 × 3 leads, and form battle array
After column, the external lead of the sensor of the array only has 8, greatly reduces the complexity of route with this, reduces measurement process
In error probability.
Multi-modal sensor is that one kind is ultra-thin, directly conformal can be attached on 2 surface of plant leaf blade, by multi-functional
The integrated flexible sensor that the measurement of various plants growth parameter(s) is carried out with Mode-switch.The present embodiment, upper and lower two sides flexible sensing
Device with a thickness of 0.1 μm, intermediate layer thickness is 1 μm, and overall thickness is 1.2 μm, is attached to blade table so as to completely conformal
Face.The design of the serpentine structure of lead ensure that electrode has certain stretchable ability, adapt to the large deformation of plant.
Have following advantages using multi-modal sensor measurement of the invention: 1) can precisely monitor plant near field weather: is logical
The multi-modal sensor array of flexibility for crossing this method preparation conformal can be attached at plant surface, accurately measure the near field of plant surface
The measurement of weather, compared with ambient condition where measurement plant, result is more accurate；2) it is able to achieve multinomial plant growth parameter
Duplex measurement: the multi-modal sensor array of flexibility prepared by this method be listed in each it is flexible it is multi-modal in be integrated with temperature
Sensor needed for the monitoring of a variety of physiological parameters such as degree, humidity, growth rate and intensity of illumination, so that the function of single sensor
It can be enhanced；3) be able to achieve the large area multiple spot monitoring on individual plants surface: the flexibility prepared by this method is multi-modal
Sensor array can monitor the plant growth physiological parameter of each multi-modal sensor position, pass through multiplexing
Mode carries out array, to realize large area multiple spot monitoring；4) it is able to achieve ultra thin conformal attaching, and will not influence plant just
Normal physiological activity: the multi-modal sensor array of flexibility prepared by this method is interconnected due to using hollow out serpentine band,
Make device have it is certain can respiratory, and the ultra-thin feature of device is able to achieve and the ultra thin conformal on plant surface attaches.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (10)
1. one kind can conformal attaching multifunction flexible sensor, which is characterized in that the flexible sensor (1) includes left electrode
(11) and (12) two parts of right electrode, the left electrode (11) include gate structure (14) and setting in gate structure head and the tail
Two leads (13) at both ends, the right electrode (12) include that gate structure (14) He Yigen is connected to the gate structure midpoint
Lead (13), wherein the gate structure (14) includes the multiple parallel grids formed by a multiple bending of metallic film,
Grid in the left electrode is staggered to form multiple parallel capacitors with the grid in right electrode；
When the flexible sensor is attached at subject surface to be measured, if being passed through electricity in two leads of the left electrode (11)
Stream, characteristics of objects Parameters variation to be measured causes the resistance variations in the left electrode gate structure, by the change for measuring the resistance
Change the variation for obtaining characteristics of objects parameter to be measured；If the left electrode (11) a lead and right electrode (12) lead it
Between when passing through electric current, characteristics of objects Parameters variation to be measured causes capacitance variations in staggered grid, by measuring the capacitor
Variation obtain the variation of characteristics of objects parameter to be measured.
2. one kind as described in claim 1 can conformal attaching multifunction flexible sensor, which is characterized in that it is described flexible to pass
The thickness of sensor (1) is between 10 nanometers~1000 nanometers.
3. one kind as claimed in claim 1 or 2 can conformal attaching multifunction flexible sensor, which is characterized in that it is described to draw
Line (13) preferably uses serpentine structure, and width is not less than 100 μm, and angle of wriggling is 10 °~30 °, and radius is less than 5mm,
Guarantee that the ductility of the flexible sensor and stickiness with object to be measured, processing method preferably use machine cuts with this
Or photoetching.
4. a kind of multi-modal sensor using the described in any item flexible sensor preparations of claim 1-3, which is characterized in that
The multi-modal sensor includes middle layer and the flexible sensor (1) for being symmetricly set on the middle layer or more two sides, in which:
The middle layer includes substrate (4) and the piezoelectric unit (2) and photovoltaic element (3) that are embedded in the substrate, the piezoelectricity list
First (2) and photovoltaic element (3) are symmetrically distributed in the left and right sides of the staggered grid of the flexible sensor, the piezoelectricity list
First (2) while, the photoelectricity in parallel with the gate structure of left electrode or right electrode in the flexible sensor of upper and lower two sides
Unit (3) while, the pressure in parallel with the gate structure of right electrode or left electrode in the flexible sensor of upper and lower two sides
The strain that electric unit (2) is used to occur object to be measured is converted into the voltage difference between flexible sensor described in upper and lower two sides,
The photovoltaic element (3) is used for the electricity converted the illumination that object to be measured is subject to between flexible sensor described in upper and lower two sides
Pressure difference；
Three leads of upside flexible sensor, three leads of downside flexible sensor or drawing for upper and lower two flexible sensors
Line combination of two forms multiple mode, when measuring object to be measured, reflects object to be measured by the measurement to different modalities
Different characteristic parameter.
5. multi-modal sensor as claimed in claim 4, which is characterized in that substrate (4) material is preferably poly dimethyl
Siloxanes, polyamide or polyphenyl dioctyl phthalate ethylene glycol.
6. multi-modal sensor as described in claim 4 or 5, which is characterized in that the piezoelectric unit (2) is preferably organic high
Molecule piezoelectric material, the photovoltaic element (3) are preferably perovskite, organic solar batteries light absorbing material or silicon photovoltaic material
Material.
7. multi-modal sensor as described in claim 4 or 5, which is characterized in that the thickness of the multi-modal sensor does not surpass
3 microns are crossed, guarantees its docile degree with object to be measured.
8. a kind of resistance measurement sensor prepared using multi-modal sensor described in claim 4-7, which is characterized in that should
Electric resistance sensor includes two multi-modal sensors being oppositely arranged, and upside is soft in a wherein multi-modal sensor
Property the left electrode of sensor in be passed through electric current its fever made to form thermostimulation, the flexible sensing of upside in another multi-modal sensor
Under the influence of the thermostimulation and characteristics of objects parameter to be measured, resistance changes the left electrode of device, by measuring the resistance
Reflect the variation of characteristics of objects parameter to be measured.
9. the resistance measurement sensor of multi-modal sensor preparation as claimed in claim 8, which is characterized in that when described to be measured
When characteristics of objects parameter is the fluid flow rate of subject surface to be measured, preferably calculates and obtains according to the following formula:
Q=(a+bvn)(Tw-Tf)
Wherein, v is fluid flow rate, and a, b are physical constants related with fluid and multi-modal sensor itself, true by testing
It is fixed；N is constant related with flow velocity, TwFor the temperature of another multi-modal sensor described in actual measurement, TfFor fluid temperature
Degree, the temperature of another multi-modal sensor actual measurement and the temperature difference in no cross-ventilation or runoff rate
It can reflect another described multi-modal sensor dispersed heat Q, fluid stream can be extrapolated using above formula after knowing heat Q
Speed.
10. application of the multi-modal sensor in plant monitoring described in a kind of claim 4-7.
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