CN106949827B - A kind of array resistance strain sensor and the measurement compensation system with the sensor - Google Patents
A kind of array resistance strain sensor and the measurement compensation system with the sensor Download PDFInfo
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- CN106949827B CN106949827B CN201710136161.7A CN201710136161A CN106949827B CN 106949827 B CN106949827 B CN 106949827B CN 201710136161 A CN201710136161 A CN 201710136161A CN 106949827 B CN106949827 B CN 106949827B
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- resistance
- strain
- sensing unit
- circuit
- desensitization
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D3/00—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups
- G01D3/028—Indicating or recording apparatus with provision for the special purposes referred to in the subgroups mitigating undesired influences, e.g. temperature, pressure
Abstract
The invention belongs to strain measurement circuit fields, and disclose a kind of array resistance strain sensor with desensitization function, including flexible substrates, desensitization layer, resistance-strain sensing unit, connecting lead wire and coating, resistance-strain sensing unit is attached on the upper surface of the flexible substrates and is linked together by connecting lead wire；Desensitization layer is arranged on the upper surface of flexible substrates；The connecting wire is arranged on desensitization layer upper surface；Coating, which is arranged in, covers in all desensitization layers, resistance-strain sensing unit and connecting lead wire in the flexible substrates.The present invention is provided with one layer of material with desensitization function between connecting lead wire and flexible substrates; the strain that flexible base layer can be reduced is transmitted in connecting lead wire; it is very small to make to act on resistance-strain between different resistance-strain sensing units in connection line; effectively improve the precision of strain measurement; connecting lead wire can be protected again; its fracture is prevented, working sensor performance is influenced.
Description
Technical field
The invention belongs to strain measurement circuit fields, more particularly, to a kind of array resistance strain sensor and tool
There is the measurement compensation system of the sensor.
Background technique
Resistance strain sensor is as a kind of common high-precision stress, strain measurement element, by being pasted onto measured object
Body surface face measures the logarithmic strain of component using deforming together with testee.
With the development of electronic information technology and intelligent equipment, resistance strain type sensor has been widely used each
In a field, to strain-type sensing technology, higher requirements are also raised accordingly, wearable especially in biomedical devices
Electronics, aircraft smart skins, monitoring structural health conditions etc., it is desirable that strain transducer have flexibility, can large area array
Change the performance indicators such as measurement and precision height.In order to meet above-mentioned performance requirement, has some scholars at present and be made that relevant work
Make.As Shenzhen Institutes of Advanced Technology, Chinese Academy of Science discloses a kind of resistance strain-gauge transducer (patent No.
CN1040880206), the foil gauge of the sensor is made of one layer of conductive film with micron and nano gap, and foil gauge is attached
On a flexible substrate, therefore, sensor has good elasticity, maximum measurement strain up to 200%, and integrated level is high,
Expansibility is good.The village fragrance of Shanghai Communications University is grand to have made a kind of strain transducer for monitoring structural health conditions, the sensing
Device is made on flexible substrate PET of LBL self-assembly carbon nano-tube film and photoetching process, and sensor has quick well
Perception.Rogers the and Huang Yonggang team of Northwestern Univ USA devises a kind of large surface of skin physiology with self-similar structure
Electrode, for the monitoring to physiology signal, sensitivity with higher.The Bao Zhenan team of Stanford University has invented one
The hypersensitive conductive film of the flexible micro-structure of kind, the conductive film is very sensitive to power, can make strain, and pressure sensor is used
In to physiological signal acquisition and monitoring structural health conditions.Above-mentioned scholars are by improving material property and optimization material structure very big
Strain transducer performance is improved in degree, improves measurement accuracy, is had to the design of subsequent strain gauge transducer very strong
Reference.
But design and measurement for large area array resistance strain sensor wait there are still some problems at present
It solves, such as how to eliminate the measurement too long bring resistance error problem of lead in large area array strain sensing network? in addition,
When large area array strain-type sensing unit Tensile strains, the lead of connection can also be strained, and how reduce
Array strain transducer connects lead strain bring interference between network.For these problems, has some solutions at present and do
Method can eliminate temperature biography if proposed a kind of three-wire system thermal resistance temperature surveying circuit scheme in patent CN101109662A
The influence of lead resistance when sensor measures, but this method is only suitable for the measurement of single temperature sensor, is not appropriate for array electricity
The measurement of strain transducer network is hindered, while the three-wire system measurement scheme is influenced there is no temperature error is eliminated.Patent
CN104470212A proposes a kind of compensation method of circuit board impedance line, can be to a certain extent by impedance-compensated mode
The interference of lead resistance is reduced, but the impedance-compensated situation for being only applicable to have output without input, in smart skins, structural health prison
The various fields such as survey are simultaneously not suitable for.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of array resistance strain sensors
And the measurement compensation system with the sensor, it is both able to achieve and is poised for battle columnization strain transducer lead resistance and strain implementation benefit
It repays, and temperature-compensating can be carried out to strain sensing unit in design, eliminating temperature drift influences.
To achieve the above object, it is proposed, according to the invention, provide a kind of array resistance-strain sensing with desensitization function
Device, which is characterized in that including flexible substrates, desensitization layer, resistance-strain sensing unit, connecting lead wire and coating, wherein
The resistance-strain sensing unit at least two, they are attached on the upper surface of the flexible substrates simultaneously respectively
It is linked together by the connecting lead wire；
The desensitization layer is arranged on the upper surface of the flexible substrates and is arranged in the resistance-strain sensing unit
The strain of connecting lead wire is transmitted with the strain generated for absorption resistance strain sensing unit and isolated flexible substrate in side, into
And protect connecting lead wire；
The connecting wire is arranged on desensitization layer upper surface；
The coating is arranged in the flexible substrates, and it is single to cover in all desensitization layers, resistance-strain sensing
Member and connecting lead wire, to be sealed protection.
Preferably, the resistance-strain sensing unit includes two resistance-strain sensing unit electrodes and is arranged in two electricity
Hinder the resistance-strain sensing unit sensitizing range between strain sensing cell electrode.
Preferably, the resistance-strain sensing unit is made of conducting polymer.
Preferably, the coating is made of polyimides.
Preferably, the flexible base layer is made of polyimides.
Preferably, the desensitization layer is made of silicon rubber.
A kind of measurement compensation system with desensitization function, which is characterized in that including measurement compensation circuit and the battle array
Columnization resistance strain sensor, wherein
The measurement compensation circuit includes constant-current source, operational amplification circuit, slide rheostat and multichannel analog switch, institute
It states every two resistance-strain sensing unit in array resistance strain sensor and forms a measuring unit, each measuring unit tool
There are a positive line end, a negative line end and a public line end, positive line end and the first multichannel analog of measuring unit switch phase
Even and the first multichannel analog switch is connected with constant current source output terminal, and the first multichannel analog, which switches on-off, passes through single-chip microcontroller
Control, thus realize the array strain sensing unit real-time measurement to access, the negative line end of measuring unit and the second multi-pass
Road analog switch corresponding interface is connected and second multichannel analog switch ground connection, the public line end of measuring unit and the
One operational amplification circuit is connected, the backward end of amplifier in the output end of the first operational amplification circuit and the second operational amplification circuit
Be connected, the positive input of the second operational amplification circuit is connected with constant current source output terminal, the second operational amplification circuit also with third
Operational amplification circuit is connected.
Preferably, first operational amplification circuit is scaling circuit, to amplify the voltage of access circuit.
Preferably, second operational amplification circuit is subtraction circuit, the voltage of positive input and its reversed input
The voltage at end subtracts each other to make the voltage of the second operational amplification circuit output end only related with the measurement strain of resistance, to eliminate
Fall the influence of lead wire circuit.
Preferably, the third operational amplification circuit is scaling circuit, the sliding variable resistance with one with display
Device can control the multiple of amplification, to meet measurement demand.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, can obtain down and show
Beneficial effect:
1) present invention between connecting lead wire and flexible substrates, is provided with when making array resistance strain sensor
One layer of material with desensitization function, the function of strain is absorbed using desensitization material, and the strain that can reduce flexible base layer passes
It is delivered in connecting lead wire, so that the resistance-strain for making to act between different resistance-strain sensing units in connection line is very micro-
It is small, it can effectively improve the precision of strain measurement in this way, and connecting lead wire can be protected, prevent its fracture, influence working sensor
Performance.
2) measurement compensation circuit part can satisfy array using monolithic processor controlled multichannel analog switch measurement scheme
Change the needs of measurement, three-wire system measurement method can completely eliminate the too long line resistance band of array resistance strain gage connecting lead wire
The influence come.Every two resistance-strain sensing unit is formed into a measuring unit when measurement, this method can be from design to electricity
It hinders foil gauge and carries out temperature-compensating, eliminating temperature drift influences, and improves accuracy of measurement.And setting has display function in amplifying circuit
Rheostat, the amplification factor of output voltage can be regulated and controled by changing sliding resistance value.
3) on a flexible substrate, resistance-strain sensing unit uses to be had resistance-strain sensing unit integral manufacturing of the present invention
The conducting polymer of micron and nano gap, therefore there is very high sensitivity, it is very suitable for wearable device and structure
The application in the fields such as health detection.
Detailed description of the invention
Fig. 1 is the functional block diagram that compensation system is measured in the present invention；
Fig. 2 is that array resistance strain sensor removes the schematic diagram after coating in the present invention；
Fig. 3 is the cross-sectional view of array resistance strain sensor in the present invention；
Fig. 4 is the structure chart that compensation system is measured in the present invention；
Fig. 5 is the specific embodiment structure chart that measurement compensation is circuit in the present invention；
Fig. 6 is the structural schematic diagram of array resistance strain sensor in the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.As long as in addition, technical characteristic involved in the various embodiments of the present invention described below
Not constituting a conflict with each other can be combined with each other.
As shown in Figure 1, the present invention includes array resistance strain sensor and measurement compensation circuit two parts.
As shown in Fig. 2, the array resistance strain sensor in the present invention, including flexible substrates 1, desensitization layer 2, connection are drawn
7 five part of line 3, coating 6 and resistance-strain sensing unit.Resistance-strain sensing unit 7 includes resistance-strain sensing unit again
Electrode 4 and resistance-strain sensing unit sensitizing range 5.The resistance-strain sensing unit 7 of array it is neat be attached to flexible substrates 1
On, and be connected by connecting lead wire 3.It is worth noting that, being provided with one layer of desensitization between connecting lead wire 3 and flexible substrates 1
Layer 2, connecting lead wire 3 is attached on desensitization layer 2, and desensitization layer 2 is attached in flexible substrates 1, and the effect of desensitization layer 2 utilizes desensitization
The performance characteristics isolated flexible substrate 1 that material absorbs strain transmits the strain of connecting lead wire 3 resistance-strain sensing unit 7,
It is used as buffer area simultaneously, protects connecting lead wire 3, prevents its fracture, influence working sensor performance.Coating 6 is covered on electricity
It hinders on strain sensing unit 7 and connecting lead wire 3, protection is sealed to it.
As shown in figure 3, being provided with desensitization layer 2 below every connecting lead wire 3 for array strain transducer.
As shown in figure 4, the measurement compensation circuit in the present invention, including the array of the first multichannel analog switch 8,2 × 3
Resistance strain sensor 9, the second multichannel analog switch 10, the first operational amplification circuit 11, the second operational amplification circuit 12, the
Three operational amplification circuits 13, band display slide rheostat 14 and constant-current source 15.It is worth noting that, the first multichannel analog switchs
8 and second multichannel analog switch 10 port number it is corresponding with array resistance strain sensor number, multichannel analog switch
On-off controlled by SCM program, to realize to the array strain sensing unit real-time measurement of access.2 herein ×
3 array resistance strain sensors 9 are merely illustrative, and in practical applications, resistance strain sensor quantity is very big.2 × 3 arrays
Change resistance strain sensor 9 to be connected by three-wire system with measuring circuit other parts.In addition as shown in figure 3, array strain passes
Every two resistance-strain sensing unit forms a measuring unit 16, two resistance-strain sensing unit conducts in 9 circuit of sensor
One independent measuring unit 16 can improve measurement accuracy in the enterprising trip temperature compensation of hardware.Each measuring unit 16 includes
One positive line end, a negative line end and a public line end, positive line end are connected with the first multichannel analog switch 8, the first multi-pass
Road analog switch 8 is connected with 15 output end of constant-current source.10 pairs of the negative line end of measuring unit 16 and the second multichannel analog switch
Interface is answered to be connected, the second multichannel analog switch 10 ground connection.The public line end of measuring unit 16 and the first operational amplification circuit 11
It is connected.First operational amplification circuit 11 is scaling circuit, can amplify the voltage of access circuit, the voltage amplified here times
Number is twice.First operational amplification circuit, 11 output end will be connected with the backward end of amplifier in the second operational amplification circuit 12,
The positive input of second operational amplification circuit 12 is connected with 15 output end of constant-current source.Second operational amplification circuit 12 is subtraction electricity
Road, the voltage of positive input and the voltage of reverse input end subtract each other to make the voltage of amplifier out only with measurement resistance
Strain it is related, to eliminate the influence of lead wire circuit.Second operational amplification circuit 12 and 13 phase of third operational amplification circuit
Even, third operational amplification circuit 13 is scaling circuit, and the amplifier out in third operational amplification circuit 13, which exports, to be surveyed
Measure voltage, it should be noted that third operational amplification circuit 13 is provided with a slide rheostat 14, can effectively control amplification
Multiple, to meet measurement demand.
Measurement compensation circuit is explained below in conjunction with Fig. 5 and eliminates measurement lead resistance influence, carries out the principle of temperature-compensating.
RLFor lead resistance, electric current IoIt flows out from constant-current source forward end and is flowed in measuring unit through A point, due to integrated operational amplifier
Impedance is very high, therefore passes through resistance R5And R2Electric current is approximately zero.V can then be calculated1And V2Voltage it is as follows:
V1=2Io(R+ΔRT) (1)
V2=Io(R+ΔRT-ΔR) (2)
By the voltage V of the first operational amplification circuit3Are as follows:
Because of RF1=R1, so
V3=2V2 (4)
By the voltage V of the second operational amplification circuit4Are as follows:
Because of RF2=R4=R5=R6, so:
V4=V1-V3=2IoΔR (6)
After third operational amplification circuit, output voltage are as follows:
As slide rheostat RXWith fixed resistance R7Resistance value determine after, just can pass through input current and output voltage and calculate
Out strain transducer by stress-strain the case where.It is also seen that the strain of resistance strain sensor is not drawn from above formula (7)
Line resistance RLInfluence, therefore the interference of lead resistance can be completely eliminated using this kind of scheme, while again can be right in design
Strain sensing unit carries out temperature-compensating, and eliminating temperature drift influences, to realize the high-precision to array resistance strain sensor
Measurement.
Referring to Fig. 6, it can be seen that coating covers in all desensitization layers, resistance-strain sensing unit and connecting lead wire,
To be sealed protection.
A kind of array resistance strain sensor compensation system integral manufacturing with desensitization function of the present invention is in flexible base
On bottom material, epidermis electronic system can be used as obtaining the physiological signal of human body.
Human epidermal electronic system is the sensor network of a kind of large area, complication, conformal in order to adapt to human skin
It needs, it is desirable that epidermis electronic system has flexibility, is able to carry out extension.The present invention is well positioned to meet these performance requirements, will
Array strain transducer is made into physiological electrode and is pasted onto skin surface, for obtaining the physiological signal of human body, array strain
Sensor is provided with desensitization layer, can reduce the interference of internal connecting lead wire strain, while protecting to connecting lead wire.Then
It is measured using the flexible measuring compensation circuit in the present invention, measurement compensation circuit can eliminate lead resistance and
Temperature-compensating is carried out to resistance strain sensor, avoids the influence of temperature drift.Further, in human epidermal electronic system
Other measuring cells, such as temperature sensor also can reduce strain to temperature sensor by being arranged desensitization layer on its substrate
The influence of precision.Therefore the present invention can greatly improve the measurement accuracy of epidermis electronic measurement system.
The present invention can be used for structural health detection, such as measure to aircraft surfaces strain, the array of large area is answered
Become sensor and be pasted onto aircraft surfaces, for obtaining the strain information of aircraft skin.Aircraft surfaces curved surface is complicated, and connecting lead wire is many
More, lead strain can bring very big influence to measurement accuracy, and have the array strain transducer of compensating effect in the present invention,
Lead strain can be reduced, improve measurement accuracy.Connecting lead wire error can be eliminated by measuring compensation circuit simultaneously, while carry out temperature
Degree compensation.Further, energy integral manufacturing of the present invention is convenient to be integrated aboard on flexible base material, measures
The data obtained on circuit can also be transferred to computer processing terminal by way of wireless transmission, to obtain measurement structure table
The performance state in face.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of measurement compensation system with desensitization function, which is characterized in that it includes measurement compensation circuit and array electricity
Hinder strain transducer, wherein
The array resistance strain sensor includes flexible substrates, desensitization layer, resistance-strain sensing unit, connecting lead wire and covering
Layer, wherein the resistance-strain sensing unit at least two, they are attached on the upper surface of the flexible substrates simultaneously respectively
It is linked together by the connecting lead wire；The desensitization layer is arranged on the upper surface of the flexible substrates and is arranged in institute
It states by resistance-strain sensing unit, with the strain and the isolation flexible substrates for absorbing the generation of this resistance-strain sensing unit
Strain transmitting to the connecting lead wire, and then protect this connecting lead wire；The upper of the desensitization layer is arranged in the connecting lead wire
On surface；The coating is arranged in the flexible substrates, and covers in all desensitization layers, the resistance-strain
Sensing unit and the connecting lead wire, to be sealed protection；
The measurement compensation circuit includes constant-current source, operational amplification circuit, slide rheostat and multichannel analog switch, wherein described
Every two resistance-strain sensing unit forms a measuring unit in array resistance strain sensor, and each measuring unit has
One positive line end, a negative line end and a public line end；In the positive line end of the measuring unit and multichannel analog switch
The first multichannel analog switch be connected, and first multichannel analog switch be connected with the constant current source output terminal, first
Multichannel analog is switched on-off to be controlled by single-chip microcontroller, to realize real-time to the array strain sensing unit of access
Measurement；The negative line end of the measuring unit switchs corresponding interface phase with the second multichannel analog in multichannel analog switch
Even, and second multichannel analog switch is grounded, in the public line end of the measuring unit and the operational amplification circuit
The first operational amplification circuit be connected；The second fortune in the output end of first operational amplification circuit and the operational amplification circuit
The backward end for calculating amplifier in amplifying circuit is connected, and the positive input of second operational amplification circuit is defeated with the constant-current source
Outlet is connected, which is also connected with the third operational amplification circuit in the operational amplification circuit.
2. a kind of measurement compensation system with desensitization function according to claim 1, which is characterized in that first fortune
Calculation amplifying circuit is scaling circuit, to amplify the voltage of access circuit.
3. a kind of measurement compensation system with desensitization function according to claim 1, which is characterized in that second fortune
Calculation amplifying circuit is subtraction circuit, and the voltage of positive input and the voltage of its reverse input end subtract each other to make the second operation
The voltage of amplification circuit output end is only related with the measurement strain of resistance, to eliminate the influence of lead wire circuit.
4. a kind of measurement compensation system with desensitization function according to claim 1, which is characterized in that the third fortune
Calculation amplifying circuit is scaling circuit, and the slide rheostat with one with display can control the multiple of amplification, to meet
Measurement demand.
5. a kind of measurement compensation system with desensitization function according to claim 1, which is characterized in that the resistance is answered
Become sensing unit to include two resistance-strain sensing unit electrodes and be arranged between two resistance-strain sensing unit electrodes
Resistance-strain sensing unit sensitizing range.
6. a kind of measurement compensation system with desensitization function according to claim 1, which is characterized in that the resistance is answered
Become sensing unit to be made of conducting polymer.
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| CN110375706A (en) * | 2019-08-21 | 2019-10-25 | 深圳市朋辉科技术有限公司 | A kind of sensing arrangement for road strain measurement |
| CN111189493B (en) * | 2019-12-17 | 2020-12-08 | 华中科技大学 | Flexible intelligent skin for multi-physical-field measurement, metamorphic structure and application thereof |
| CN115628761B (en) * | 2022-09-30 | 2023-10-13 | 华南理工大学 | Low-power-consumption anti-disturbance resistance type sensor and wearable equipment |
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