A kind of fragmentation checking device and fragmentation inspection method
Technical field
The present invention relates to display panel manufacturing technology field more particularly to a kind of fragmentation checking device and fragmentation detection sides
Method.
Background technique
Fragmentation is to take place frequently bad in the display such as TFT-LCD, OLED and related upstream and downstream industry, can lead to extensive fragmentation
And quality scraps situation etc., seriously affects product yield.Therefore, carrying out detection to fragmentation in time is the weight for promoting product yield
Want means.
Light sensation fragmentation detection sensor is set mostly on the arid region of equipment export and gateway unit at present in industry, but
If detection is a certain wet before fragmentation producing cause can not be clearly positioned to outlet port unit to fragmentation in equipment export unit
Formula unit or a certain drying unit, Anomaly investigation often relate to whole equipment, lead to heavy workload and efficiency is lower.
In the wet type unit of equipment, because photosensitive sensors should not be arranged containing liquid such as medical fluid and pure water, temporarily nothing has
The fragmentation detection means of effect effectively detection and cannot stop fragmentation in wet type unit, and the fragmentation stopped not in time may draw
It is bad to play the products such as subsequent substrate generation scuffing.
For the light sensation fragmentation detection sensor being arranged at present there is also false alarm defect, Fig. 1 show a kind of existing light sensation
The operation principle schematic diagram of fragmentation detection sensor, light sensation fragmentation detection sensor judge base by light transmitting and light receiver
Whether plate is complete.Production capacity is constantly promoted in industry at present, the transmission speed of each unit is promoted obvious in equipment, causes acutely to shake
It is dynamic, influence the work of light sensation fragmentation detection sensor, false alarm occur often, substrate is caused to rest in equipment, for a long time by
The influence of the factors such as medical fluid, influences product quality in unit.Light sensation fragmentation detection sensor needs to be symmetrical arranged, root
Determine whether front substrate has rupture, light sensation fragmentation according to the sync status of two sensor sensing light transmittings and light receiver
The debugging of detection sensor is complicated and error easily occurs.
Summary of the invention
The present invention provides a kind of fragmentation checking device, which passes through induction contact and substrate
Contact situation judge substrate whether there is or not breakage, it is high to perceive accuracy rate, effectively avoids false alarm.
Technical solution provided by the invention is as follows:
The invention discloses a kind of fragmentation checking devices, comprising: screw rod, around the screw rod rotation N number of induction swing part,
Incude transport part and for limiting the induction swing part around two gag lever posts of the screw rod rotational steps;Wherein, N is positive
Integer;
Each induction swing part includes two and is arranged in parallel and contact connector, induction contact and pendulum in the shape of a rod,
Induction contact is located between two contact connectors and is connected with the first end of two contact connectors, and pendulum fixes two
It contact connector and is fixedly connected with the second end of two contact connectors;Screw rod passes through N number of pendulum, and pendulum is with screw rod
It is rotated for axis, pendulum includes metal parts;
Induction transport part includes the table of N number of inductor, inductive signal line and package N number of inductor and inductive signal line
Layer, inductor according to the metal parts of pendulum between inductor at a distance from generate inductive signal, inductive signal line is used for transmission sense
Induction signal;
Two gag lever posts are parallel to screw rod setting and the two sides of induction swing part are arranged in.
Preferably, the induction swing part further includes contact fixed screw and contact hold-doun nut, contact fixed screw
Bar portion sequentially passes through a contact connector, induction contact, another contact connector and contact hold-doun nut;Induction contact around
Contact fixed screw is rotated.
Preferably, the induction swing part further includes pendulum fixing clasp or pendulum hold-doun nut, and pendulum is solid by pendulum
Determine snap ring or pendulum hold-doun nut is fixed on the certain position of screw rod, the relative position of pendulum and screw rod passes through pendulum fixing clasp
Or pendulum hold-doun nut is adjusted.
Preferably, for N number of induction swing part along screw rod extending direction laid out in parallel, N number of inductor and N number of pendulum one are a pair of
It answers, when incuding swing part and being in initial position, inductor is located at the lower section of corresponding bob position.
Preferably, which further includes pedestal and two supporting supports being vertically fixed on pedestal;Pedestal
It is fixed in equipment, screw rod, induction transport part and gag lever post is fixed in supporting support.
Preferably, screw rod passes through the location hole in two supporting supports, and passes through screw rod hold-doun nut and supporting support phase
It is fixed;Pendulum is located between two supporting supports, and the opposite position of pendulum and supporting support is adjusted by adjusting screw rod hold-doun nut
It sets.
Preferably, which further includes plant control unit, and plant control unit connects inductive signal line simultaneously
Inductive signal is received, whether plant control unit control equipment shuts down;Plant control unit includes N number of induction indicator light, N number of sense
Indicator light and N number of inductor is answered to correspond.
The invention also discloses a kind of fragmentation inspection methods, are applied to any of the above-described kind of fragmentation checking device, this method packet
Include step:
Step 1: fragmentation checking device is mounted on inside equipment, the position of fragmentation checking device is adjusted, induction contact pair is made
It should be arranged point-blank in substrate corners position, and with the position sensor for being used for detection substrate position in equipment;
Step 2: carrying out location confirmation using substrate, confirming N number of induction contact after being installed while contacting plain substrate
Edge;
Step 3: being required according to accuracy in measurement, using the fixation position of snap ring or nut setting sensor, and/or pass through
The relative position of adjusting screw rod hold-doun nut adjustment pendulum and supporting support;
Step 4: inductive signal line is connected to plant control unit, by plant control unit configure equipment control and
Alert levels;
Step 5: starting device, makes to be transmitted in equipment on substrate, whether deposited using fragmentation checking device detection substrate
In fragmentation.
Preferably, N=3;The equipment control of plant control unit and alert levels are configured as in 4th step:
When three induction indicator lights are respectively dark secretly, equipment is not shut down;
When three induction indicator lights be respectively it is bright secretly when, equipment is not shut down, plant control unit issue warning;
When three induction indicator lights are respectively bright dark, equipment is shut down after substrate outflow, and plant control unit issues
Abnormal alarm;
When three induction indicator lights are respectively that bright bright and position sensor perceives substrate, equipment hard stop, if
Standby control device issues severe abnormality alarm;
When three induction indicator lights are all bright and position sensor does not perceive substrate, equipment in no substrate state,
It does not shut down.
Fragmentation checking device of the invention judge that substrate whether there is or not breakage, perceives by contact situation of the induction contact with substrate
Mode is contact, and perception accuracy rate is high, and settable different alert levels effectively avoid false alarm caused by fragmentation erroneous detection;
It can be set in drying unit, while also can be set in wet type unit, comparing optical perception sensor has wider application
Range;Use can be separately provided, also can be used in combination;Mechanism installation and debugging are simple.
Detailed description of the invention
Below by clearly understandable mode, preferred embodiment is described with reference to the drawings, the present invention is given furtherly
It is bright.
Fig. 1 is a kind of operation principle schematic diagram of existing light sensation fragmentation detection sensor;
Fig. 2 is the structural schematic diagram according to the fragmentation checking device of one embodiment of the invention;
Fig. 3 is the main view of fragmentation checking device shown in Fig. 2;
Fig. 4 is the top view of fragmentation checking device shown in Fig. 2;
Fig. 5 is the side view of fragmentation checking device shown in Fig. 2;
Fig. 6 is the sectional view that transport part is incuded in fragmentation checking device shown in Fig. 2.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the present invention is furture elucidated, it should be understood that these embodiments are merely to illustrate
It the present invention rather than limits the scope of the invention, after the present invention has been read, those skilled in the art are to of the invention each
The modification of kind equivalent form falls within the application range as defined in the appended claims.
Embodiment one:
Fig. 2 show the structural schematic diagram of according to embodiments of the present invention one fragmentation checking device, fragmentation checking device packet
Screw rod 10 is included, swing part is incuded around N number of (N is positive integer) that screw rod rotates, is rotated for limiting induction swing part around screw rod 10
Two gag lever posts 30 of amplitude and induction transport part 40.Fig. 3 is the front view of the fragmentation checking device, and Fig. 4 is fragmentation inspection
Know that the top view of device, Fig. 5 are the side view of the fragmentation checking device.
As shown in Fig. 2, each induction swing part include two be arranged in parallel and contact connector 201 in the shape of a rod, induction
Contact 202 and pendulum 203, induction contact 202 be located between two contact connectors 201 and with two contact connectors 201
First end be connected, pendulum 203 fixes two contact connectors 201 and the second end with two contact connectors 201
It is fixedly connected.In the present embodiment, 3 N.
Screw rod 10 passes through N number of pendulum 203, and pendulum 203 is that axis is rotated with screw rod 10.Pendulum 203 includes metal
Component;When fragmentation checking device is used for acidic environment chamber, pendulum 203 includes metal parts (not shown) on its interior
With the main structure (not shown) being wrapped in outside metal parts, main structure is preferably PVC or PEEK material to prevent metal
Component is corroded.When fragmentation checking device is used for alkaline environment chamber, stainless steel material is can be used in the entirety of pendulum 203, i.e.,
The generally metal parts of pendulum 203.
Preferably, as shown in figure 3, each induction swing part further includes contact fixed screw 204 and contact hold-doun nut
205, the bar portion of contact fixed screw 204 sequentially passes through a contact connector 201, induction contact 202, the connection of another contact
Part 201 and contact hold-doun nut 205, i.e. induction contact 202 are fixed by contact fixed screw 204 and contact hold-doun nut 205
Between two contact connectors 201, and induction contact 202 is rotated around contact fixed screw 204, to reduce base to be measured
The plate impact force suffered when overwhelming induction contact 202.
Preferably, each induction swing part further includes pendulum fixing clasp or pendulum hold-doun nut (not shown), pendulum 203
The certain position of screw rod 10, the opposite position of pendulum 203 and screw rod 10 are fixed on by pendulum fixing clasp or pendulum hold-doun nut
It sets and is adjusted by pendulum fixing clasp or pendulum hold-doun nut.
The sectional view of transport part 40 is incuded as shown in fig. 6, induction transport part 40 includes N number of inductor 401, inductive signal line
402 and package multiple inductors 401 and inductive signal line 402 surface layer 403, inductor 401 is according to the metal portion of pendulum 203
Part between inductor 401 at a distance from generate inductive signal, inductive signal line 402 is used for transmission inductive signal, and surface layer 403 is for protecting
Shield internal structure protects it from medical fluid influence.
Two gag lever posts 30 are parallel to the setting of screw rod 10 and the two sides of induction swing part are arranged in, and swing for limiting induction
The amplitude that portion is rotated around screw rod 10 avoids rotation excessive influence signal perception.
As shown in Figure 2, it is preferable that N number of induction swing part is along 10 extending direction laid out in parallel of screw rod.Substrate to be measured is in equipment
It is inside transmitted, direction of transfer and 10 extending direction of screw rod are perpendicular.N number of inductor 401 and N number of pendulum 203 correspond,
Inductor 401 is located at the lower section of corresponding 203 position of pendulum when induction swing part is in initial position.
As shown in Fig. 2, fragmentation checking device of the invention further includes pedestal 50 and be vertically fixed on pedestal 50 two
Supporting support 60.Each mechanism on 50 firm banking 50 of pedestal, and pedestal 50 is fixed in equipment by modes such as screws, branch
Screw rod 10, induction transport part 40 and gag lever post 30 is fixed in support bracket 60.Screw rod 10 passes through in two supporting supports 60
Location hole, and fixed by screw rod hold-doun nut 70 and 60 phase of supporting support, pendulum 203 is located between two supporting supports 60,
The relative position of pendulum 203 and supporting support 60 can be adjusted, by adjusting screw rod hold-doun nut 70 to play adjusting perceived accuracy
Effect.
Fragmentation checking device of the invention further includes plant control unit (not shown), plant control unit connection induction letter
Number line 402 simultaneously receives inductive signal, and whether plant control unit control equipment shuts down;Plant control unit includes that N number of induction refers to
Show that lamp, N number of induction indicator light and N number of inductor 401 correspond.
When substrate reaches detection position, complete substrate can contact simultaneously with N number of induction contact 202, induction contact 202
Pendulum 203 is driven to be rotated with screw rod 10 for axis with contact connector 201.The substrate of generation fragmentation and N number of induction contact 202
The time of contact may be inconsistent, and the time that the induction contact 202 of fragmentation position is in contact with substrate is later than entopic induction
The time that contact 202 is in contact with substrate, the time that the pendulum 203 of fragmentation position rotates also accordingly lag.
Each inductor 401 monitors the location status of corresponding 203 inner metal component of pendulum;When pendulum 203 is not revolved
When turning to rest on initial position, indicate that substrate does not overwhelm the induction contact 202 being connected with pendulum 203, corresponding inductor 401 is defeated
Bright signal out;When pendulum 203 carries out being rotated away from initial position, indicate that substrate overwhelms the induction contact being connected with pendulum 203
202, corresponding inductor 401 exports the signal that goes out.Bright signal or dark signal are transferred to equipment control by inductive signal line 402 and fill
It sets, induction indicator light is lighted when receiving bright signal, the extinguishing when receiving dark signal.
The invention also discloses a kind of fragmentation inspection methods using above-mentioned fragmentation checking device.Due to fragmentation position in equipment
The quadrangle for often betiding substrate is set, because preferably, fragmentation checking device is arranged in the position in counterpart substrate corner.Of the invention
Fragmentation inspection method the following steps are included:
Step 1: fragmentation checking device is mounted on inside equipment, the position of fragmentation checking device is adjusted, induction contact is made
202 correspond to substrate corners position, and are arranged point-blank with the position sensor for being used for detection substrate position in equipment;
Step 2: carrying out location confirmation using substrate, confirming N number of induction contact 202 after being installed while contacting element
Substrate edges;
Step 3: being required according to accuracy in measurement, using the fixation position of snap ring or nut setting sensor, and/or pass through
The relative position of adjusting screw rod hold-doun nut 70 adjustment pendulum 203 and supporting support 60;
Step 4: inductive signal line 402 is connected to plant control unit, by plant control unit configure equipment control and
Alert levels;
Step 5: starting device, makes to be transmitted in equipment on substrate, whether deposited using fragmentation checking device detection substrate
In fragmentation.
As a preferred embodiment, fragmentation checking device includes three induction swing parts, correspondingly, incudes transport part
40 include three inductors 401, and plant control unit includes three induction indicator lights, i.e. N=3 in this implementation.In other implementations
In example, fragmentation checking device can be set in the position in two corners of counterpart substrate or more, fragmentation checking device may include
The induction swing part of other quantity.
The equipment control of plant control unit and alert levels are configured as in above-mentioned 4th step:
When three induction indicator lights are respectively dark secretly, no fragmentation risk, equipment is not shut down, normal to produce;
When three induction indicator lights be respectively it is bright secretly when, fragmentation possibility is small, fragmentation probability 5% hereinafter, equipment not
It shuts down, plant control unit issues warning;
When three induction indicator lights are respectively bright dark, fragmentation probability is 5%~30%, and equipment is stopped after substrate outflow
Machine, plant control unit issue abnormal alarm;
When three induction indicator lights are respectively that bright bright and position sensor perceives substrate, fragmentation probability 30% with
On, equipment hard stop, plant control unit issues severe abnormality alarm;
When three induction indicator lights are all bright and position sensor does not perceive substrate, equipment in no substrate state,
It does not shut down.
Fragmentation checking device of the invention by contact situation of the induction contact 202 with substrate judge substrate whether there is or not breakage,
Perceptive mode is contact, and perception accuracy rate is high, settable different alert levels, effectively avoids wrong report caused by fragmentation erroneous detection
It is alert;It can be set in drying unit, while also can be set in wet type unit, compare optical perception sensor and have and widely answer
Use range;Use can be separately provided, also can be used in combination;Mechanism installation and debugging are simple.
The preferred embodiment of the present invention has been described above in detail, but during present invention is not limited to the embodiments described above
Detail can carry out a variety of equivalents to technical solution of the present invention (in full within the scope of the technical concept of the present invention
Amount, shape, position etc.), these equivalents all belong to the scope of protection of the present invention.