CN110095054B - Resistance type strain gauge - Google Patents

Resistance type strain gauge Download PDF

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Publication number
CN110095054B
CN110095054B CN201910264171.8A CN201910264171A CN110095054B CN 110095054 B CN110095054 B CN 110095054B CN 201910264171 A CN201910264171 A CN 201910264171A CN 110095054 B CN110095054 B CN 110095054B
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film
line segment
conductive film
strain gauge
strain
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CN110095054A (en
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苏业旺
李爽
刘国栋
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Institute of Mechanics of CAS
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Institute of Mechanics of CAS
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

The invention relates to a resistance-type strain gauge, which comprises at least one layer of conductive film, wherein the conductive film is of a curve structure, and the curve structure comprises a first line segment consistent with the strain direction measured by the strain gauge and a second line segment inconsistent with the strain direction measured by the strain gauge; the width of the first line segment is smaller than that of the second line segment, so that a larger sensitivity coefficient is realized. Compared with the traditional metal foil type resistance strain gauge, the resistance strain gauge provided by the invention has larger measuring range and the elastic measuring range can be improved by multiple times. Compared with the elastic film or the elastic fabric containing the mixture of carbon-series powder or structure, the elastic film or the elastic fabric has high stability and is not easy to age.

Description

Resistance type strain gauge
Technical Field
The invention belongs to the technical field of strain sensor design, and particularly relates to a resistance type strain gauge.
Background
The strain is a very important geometrical parameter for measuring the state of an object, and accurate measurement of the strain is very important. Strain sensors are of a wide variety, classified according to the sensing principle, and include resistive, capacitive, piezoelectric, inductive, and optical, among others. Resistive strain sensors, the resistive materials of which can be further classified as metals, semiconductors, conductive solutions, conductive polymers, graphene, and the like.
The metal resistor type and the semiconductor resistor type are most widely applied, but the strain range measured is also smaller due to the limitation of the stretching rate of the metal and the semiconductor. In recent years, a metal resistance type strain gauge capable of measuring large strain also appears, but the strain gauge enters plasticity once the large strain is measured, and the strain gauge is not suitable for long-time dynamic monitoring. The prior patent, publication number CN208223387U, provides a resistance-type strain sensor, which has a large measuring range, good linearity, good stability, and high processing cost.
Disclosure of Invention
Aiming at the defects of the conventional strain gauge, the invention aims to design a resistance-type strain gauge, which can remarkably increase the elastic range of the strain gauge and simultaneously improve the sensitivity coefficient of strain measurement.
The technical scheme of the invention is as follows:
a resistance-type strain gauge comprises at least one layer of conductive film, wherein the conductive film is of a curve structure, and the curve structure comprises a first line segment consistent with the strain direction measured by the strain gauge and a second line segment inconsistent with the strain direction measured by the strain gauge;
the width of the first line segment is smaller than that of the second line segment, so that a larger sensitivity coefficient is realized.
Further, the first line segment is a straight line segment; the second line segment is a curve segment or a straight line segment.
Furthermore, the curved structures of the conductive film are arranged and combined and communicated with each other to form a single-row curved structure, a multi-row curved structure or a continuous net structure.
Further, the continuous mesh structure is a continuous hexagonal mesh structure.
Furthermore, two ends of the conductive film are of compact film structures and are respectively connected with the outgoing lines.
Further, the conductive film is a conductive material;
or the like, or, alternatively,
the conductive film is a composite layer of a conductive material and an insulating film.
Further, the conductive material of the conductive film is any one of constantan, neoconstantan, nichrome alloy, iron-chromium-aluminum alloy, platinum-tungsten alloy, semiconductor monocrystalline silicon, graphene and gold.
Further, the material of the insulating film of the composite layer is any one of polyimide, phenolic resin, and epoxy resin.
Furthermore, the conductive film also comprises a soft adhesive and an insulating substrate, wherein the conductive film is adhered to the insulating substrate through the soft adhesive;
preferably, the soft glue is an OCA glue film or a Silbeione elastic soft glue;
preferably, the insulating substrate is any one of polyimide, phenolic resin, and epoxy resin.
Further, the packaging film is further included, and the insulating substrate base body covered with the conducting film is packaged in a wrapping mode;
preferably, the packaging film is an elastic film;
more preferably, the encapsulation film is a PDMS film or an Ecoflex film.
The invention discloses the technical effects that:
(1) the conducting film provided by the invention adopts a curve structure design, and compared with the traditional metal foil type resistance strain gauge, the conducting film has larger measuring range and the elastic measuring range can be improved by multiple times.
(2) Compared with the elastic film or the elastic fabric containing the mixture of carbon-series powder or structure, the elastic film or the elastic fabric has high stability and is not easy to age.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. Wherein:
FIG. 1 is a resistive strain gage having a conductive film with a single row of curved structures;
FIG. 2 is a resistance strain gauge having a multi-row curved structure formed by the periodic arrangement of the curved structures shown in FIG. 1;
FIG. 3 is a schematic partial structure diagram of a conductive film with a hexagonal mesh structure;
FIG. 4 is a schematic partial structure diagram of a conductive film with a polygonal mesh structure;
FIG. 5a is a resistive strain gage made from a continuous hexagonal mesh conductive film;
FIG. 5b is an enlarged partial view of the hexagonal network of FIG. 5 a;
FIG. 6 is a front view of the conductive film adhered to the insulating film by the elastic soft adhesive;
the area filled with oblique lines represents the conductive film, the area filled with cross grid lines represents the insulating substrate, and the area filled with thin dots represents the elastic soft glue.
Reference numerals:
1. the flexible circuit board comprises an insulating substrate, 2. a conductive film, 21. a first line segment (straight line segment), 22. a second line segment (straight line segment/curved line segment), 23. a hexagonal reticular structure and 3. an elastic soft adhesive layer.
Detailed Description
The invention will be described in detail below with reference to specific embodiments with reference to the attached drawings. The various examples are provided by way of explanation of the invention, and not limitation of the invention. In fact, it will be apparent to those skilled in the art that modifications and variations can be made in the present invention without departing from the scope or spirit thereof. For instance, features illustrated or described as part of one embodiment, can be used with another embodiment to yield a still further embodiment. It is therefore intended that the present invention encompass such modifications and variations as fall within the scope of the appended claims and equivalents thereof.
A resistance-type strain gauge is disclosed, as shown in FIG. 1, comprising at least one conductive film 2, wherein the conductive film 2 is a curve structure, and the curve structure comprises a first line segment 21 consistent with the strain direction measured by the strain gauge and a second line segment 22 inconsistent with the strain direction measured by the strain gauge; the width of the first line segment 21 is smaller than the width of the second line segment 22.
In this scheme, among the curvilinear structure, at least, include the first line segment 21 unanimous with the strain gauge direction of surveying, this first line segment 21 is stretched along with the deformation of strain gauge, still include simultaneously with the inconsistent second line segment 22 of the direction of surveying strain, second line segment 22 becomes the contained angle with the extending direction of the foil gauge of being stretched, so set up, when the foil gauge is stretched, second line segment 22 draws close to the direction of straining from the direction inconsistent with the direction of straining gradually, so be used for providing good stretchability, and then can realize that the foil gauge has great range in the measurement process.
Meanwhile, the width of the first line segment 21 is smaller than that of the second line segment 22, so that the first line segment 21 consistent with the strain direction can generate larger resistance change in the stretching process, and the sensitivity coefficient in the strain measurement process of the strain gauge is further improved. As can be seen in fig. 1, 2, 5b, in the strain gauge, the width of the designated first line segment 21 is smaller than the width of the second line segment 22. The purpose of this is that the thinner wire section assumes the function of a resistance change, that is to say that the thinner wire changes its resistance when the strain gauge is stretched or compressed, and its resistance value is greater with respect to the oblique side and therefore predominates. And the straight line section or the curve section which forms an included angle with the strain direction is wider, and the function of expanding the elastic range is played.
In one embodiment of the present invention, the first line segment 21 on the conductive film 2, which is aligned with the strain direction, is usually a straight line segment, while the second line segment 22, which is not aligned with the strain direction, may be a straight line segment or a curved line segment, and when the first line segment is arranged as a curved line segment, the range of the strain gauge is larger.
In one embodiment of the present invention, the curved structures of the conductive films 2 may be periodically arranged and combined and connected with each other, and may form a single-row curved structure as shown in fig. 1, a multi-row curved structure as shown in fig. 2, or a continuous network structure as shown in fig. 3, 4, 5a and 5 b. Specifically, whether a single-row curved structure, a multi-row curved structure or a continuous net structure needs to be formed is determined according to the area of the insulating substrate for making the strain gauge or the actual requirement of the measured object.
In an embodiment of the present invention, the continuous mesh structure is a continuous hexagonal mesh structure 23, and in the mesh structure formed by periodic arrangement, it is necessary to ensure that not only line segments consistent with the strain direction are required, but also the strain gauge has a large range to realize periodic arrangement, so that the hexagonal mesh structure 23 meets the requirement.
In one embodiment of the present invention, two ends of the conductive film 2 are respectively connected with a leading wire for measurement connection with an external circuit.
As shown in fig. 5a, for the structural schematic diagram of the resistive strain gauge provided by the present invention, the outer contour of the conductive film 2 is a rectangular sheet, the conductive film 2 is a hexagonal mesh structure 23, the width of the mesh line consistent with the measured strain direction is smaller, that is, along the length extension direction of the conductive film 2, the side consistent with the extension direction is called "straight side", the other sides are called "oblique side", and the width of the "straight side" is smaller than the width of the "oblique side".
In one embodiment of the present invention, the conductive film 2 may be a conductive material; alternatively, the conductive film 2 is a composite layer of a conductive material and the insulating film 1.
The conductive material of the conductive film 2 may be any one of constantan, neoconstantan, nichrome alloy, iron-chromium-aluminum alloy, platinum-tungsten alloy, semiconductor monocrystalline silicon, graphene, and gold. The material of the insulating film 1 of the composite layer may be any of polyimide, phenol resin, and epoxy resin.
In one embodiment of the present invention, the conductive film 2 has a thickness of generally less than 0.1mm, preferably 0.001 to 0.01mm, and the insulating substrate has a thickness of 0.01 to 2mm, preferably 0.01 to 0.5 mm.
In an embodiment of the present invention, when the conductive film 2 with a mesh structure is manufactured, a laser or a plasma etcher may be used to cut or etch the conductive film 2 into a predetermined mesh structure according to a predetermined pattern.
In one embodiment of the present invention, the conductive film 2 and the insulating substrate 1 may be bonded, and during the bonding, the conductive film 2 with a mesh structure may be bonded to the surface of the insulating substrate 1 by using an elastic soft adhesive. As shown in fig. 6, the distribution of each layer can be clearly seen for the front view of the strain gauge after the conductive film 2 and the insulating substrate 1 are bonded by the elastic soft glue, the conductive film 2 is covered on the insulating substrate layer, and the conductive film 2 and the insulating substrate layer are bonded by the elastic soft glue layer 3. The elastic modulus of the flexible glue is less than 100MPa, so that the strain between the reticular structure and the insulating substrate can be coordinated conveniently, and the flexible glue can be specifically OCA glue film and Sildione flexible glue; the insulating substrate may be any of polyimide, phenol resin, and epoxy resin.
After bonding, still need to weld or bond the lead wire of being connected with external circuit to resistance-type foil gage both ends, lead wire sets up the back, can also decide whether need encapsulate it according to the specific service environment of resistance-type foil gage. When the use environment is relatively closed and dust or environmental pollution is not easy to generate, the packaging can be omitted.
When packaging is needed, an elastic film can be selected for packaging, and the insulating substrate 1 base body covered with the conductive film 2 is wrapped and packaged; the packaging film can be selected from the prior PDMS film or Ecoflex film.
Example (b):
a resistance strain gauge is provided, wherein the conductive film is a hexagonal net structure, and the included angle between adjacent edges is 60 degrees.
Size design: the thickness of the PI film is 0.4mm, the thickness of the constantan film is 0.005mm, the length of the mesh wire along the stretching direction is 20mm, the width of the mesh wire along the stretching direction is 0.05mm, and the length of the mesh wire forming an angle of 60 degrees with the stretching direction is 20mm, and the width of the mesh wire is 0.7 mm; the chamfer radius between the mesh wires is 1 mm.
The elastic range of the material is 0.3%, the elastic range of the structure is increased to 1.8% through the net design, and the resistance change rate can reach about 0.26%.
The above is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made to the present invention by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (8)

1. A resistance-type strain gauge is characterized by comprising at least one layer of conductive film, wherein the conductive film is of a curve structure, and the curve structure comprises a first line segment consistent with the strain direction measured by the strain gauge and a second line segment inconsistent with the strain direction measured by the strain gauge;
the width of the first line segment is smaller than that of the second line segment so as to realize a larger sensitivity coefficient;
the curved structures of the conductive films are arranged and combined and communicated with each other to form a continuous net structure;
the continuous net structure is a continuous hexagonal net structure.
2. The resistive strain gage of claim 1,
the first line segment is a straight line segment;
the second line segment is a curve segment or a straight line segment.
3. The resistive strain gage of claim 1,
and two ends of the conductive film are respectively connected with the outgoing lines.
4. The resistive strain gage of any of claims 1-3,
the conductive film is made of a conductive material;
or the like, or, alternatively,
the conductive film is a composite layer of a conductive material and an insulating film.
5. The resistive strain gage of claim 4,
the conductive material of the conductive film is any one of constantan, neoconstantan, nickel-chromium alloy, nickel-chromium-aluminum alloy, iron-chromium-aluminum alloy, platinum-tungsten alloy, semiconductor monocrystalline silicon, graphene and gold.
6. The resistive strain gage of claim 4,
the insulating film of the composite layer is made of any one of polyimide, phenolic resin and epoxy resin.
7. The resistive strain gage of claim 5 or 6,
the conductive film is pasted on the insulating substrate through soft glue;
preferably, the soft glue is an OCA glue film or a Silbeione elastic soft glue;
preferably, the insulating substrate is any one of polyimide, phenolic resin, and epoxy resin.
8. The resistive strain gage of claim 5 or 6,
the packaging film is used for packaging the insulating substrate base body covered with the conducting film;
preferably, the packaging film is an elastic film;
more preferably, the encapsulation film is a PDMS film or an Ecoflex film.
CN201910264171.8A 2019-04-03 2019-04-03 Resistance type strain gauge Active CN110095054B (en)

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Publication number Priority date Publication date Assignee Title
CN111521106A (en) * 2020-03-09 2020-08-11 江苏柔世电子科技有限公司 Resistance type strain sensor

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US4299130A (en) * 1979-10-22 1981-11-10 Gould Inc. Thin film strain gage apparatus with unstrained temperature compensation resistances
JPH0321850A (en) * 1989-06-20 1991-01-30 Sanyo Electric Co Ltd Humidity sensing element
RU2200300C2 (en) * 1998-08-31 2003-03-10 Научно-исследовательский институт физических измерений Semiconductor deformation converter and process of its manufacture
CN1796954A (en) * 2004-12-22 2006-07-05 中国科学院合肥智能机械研究所 Flexible 3D force-touch sensor
CN202403843U (en) * 2011-12-30 2012-08-29 郑州炜盛电子科技有限公司 Thick film pressure sensor
CN205644489U (en) * 2016-03-31 2016-10-12 汕头超声显示器技术有限公司 Touch -sensitive screen of embedded forced induction function

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GB1154125A (en) * 1967-01-25 1969-06-04 Statham Instrument Inc Improvements in or relating to Transducers.
JPS57191527A (en) * 1981-05-21 1982-11-25 Toshiba Corp Load cell
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US5079535A (en) * 1990-09-11 1992-01-07 Case Western Reserve University Strain gauge and method of making and using the same
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CN202304895U (en) * 2011-10-27 2012-07-04 中国电子科技集团公司第四十八研究所 Sputtered film chip for realizing simultaneous test of temperature and pressure signals
EP3015815A1 (en) * 2014-10-31 2016-05-04 Agisco S.r.l. Device for measurement of strain in flexible structural elements
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Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4299130A (en) * 1979-10-22 1981-11-10 Gould Inc. Thin film strain gage apparatus with unstrained temperature compensation resistances
JPH0321850A (en) * 1989-06-20 1991-01-30 Sanyo Electric Co Ltd Humidity sensing element
RU2200300C2 (en) * 1998-08-31 2003-03-10 Научно-исследовательский институт физических измерений Semiconductor deformation converter and process of its manufacture
CN1796954A (en) * 2004-12-22 2006-07-05 中国科学院合肥智能机械研究所 Flexible 3D force-touch sensor
CN202403843U (en) * 2011-12-30 2012-08-29 郑州炜盛电子科技有限公司 Thick film pressure sensor
CN205644489U (en) * 2016-03-31 2016-10-12 汕头超声显示器技术有限公司 Touch -sensitive screen of embedded forced induction function

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