CN110091073B - Multi-beam coupling laser processing system and method - Google Patents

Multi-beam coupling laser processing system and method Download PDF

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Publication number
CN110091073B
CN110091073B CN201910454010.5A CN201910454010A CN110091073B CN 110091073 B CN110091073 B CN 110091073B CN 201910454010 A CN201910454010 A CN 201910454010A CN 110091073 B CN110091073 B CN 110091073B
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laser
processed
processing
laser beams
focusing lens
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CN110091073A (en
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张文武
王恒
陈晓晓
张天润
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/062—Shaping the laser beam, e.g. by masks or multi-focusing by direct control of the laser beam
    • B23K26/0626—Energy control of the laser beam
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
    • B23K26/0648—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

Abstract

The invention discloses a multi-beam coupling laser processing system and a method. The multi-beam coupling laser processing method comprises the following steps: providing at least two first laser beams and arranging a focusing lens on the light path of the at least two first laser beams, so that the at least two first laser beams can pass through the same focusing lens in a controlled manner and are overlapped in a crossed manner, a processing energy domain is formed in the crossed overlapped region, and the part of the workpiece to be processed is placed in the processing energy domain, so that the processing treatment of the workpiece to be processed is realized; wherein the power density of the first laser beam is less than an ablation threshold of the workpiece material to be processed, and the power density within the processing energy domain is greater than the ablation threshold of the workpiece material to be processed. The multi-beam coupling laser processing method provided by the invention can regulate and control the space volume and the posture of a processing energy domain, realizes high-speed and high-resolution processing, and has the advantages of high reliability, high controllability, low equipment requirement and the like.

Description

Multi-beam coupling laser processing system and method
Technical Field
The invention relates to a multi-beam coupling laser processing method, in particular to a multi-beam coupling laser processing system and a multi-beam coupling laser processing method capable of realizing high resolution, high precision and low heat influence laser processing, and belongs to the technical field of laser processing.
Background
At present, the traditional mechanical processing is the main precise processing mode at present, but the problems of cutter abrasion, poor processing consistency, difficult measurement and control of micro-cracks and sub-surface damage and the like exist. Controllable laser processing energy, large energy density, wide material application range, no contact, almost no cutting force and the like.
When the laser processing material, the material will be ablated and removed when the power density reaches the ablation threshold of the material. The laser beam is focused by the lens, the power density is maximum at the beam waist, but the power density change is extremely small in a certain range in the axial direction, so that a processing energy domain with certain thickness and material ablation capacity exists, and the processing resolution is low. Therefore, it is an urgent need to improve the axial resolution of the laser beam to achieve laser precision machining.
Short focal length laser processing can improve processing resolution, but its applicability is poor. A common method for improving the resolution of long-focus laser processing is to make the incident light beam form a certain angle with the normal of the surface to be processed, but this may cause the quality of the processed surface to be degraded, and the practical operation has limitations, and is not suitable for processing complex geometric shapes.
Disclosure of Invention
Aiming at the problems of small processing resolution, large thermal influence, poor depth capability and the like in the existing laser processing, the invention mainly aims to provide a multi-beam coupling laser processing system and method, thereby overcoming the defects in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention comprises the following steps:
an embodiment of the present invention provides a multi-beam coupling laser processing system, which includes:
the laser light source is used for providing at least two laser beams, and the power density of any laser beam is less than the ablation threshold value of a workpiece material to be processed;
and the focusing lens corresponds to the at least two laser beams and is correspondingly arranged on the light paths of the at least two laser beams, wherein the at least two laser beams can be controlled to be crossed and overlapped after being focused by the focusing lens, a processing energy domain is formed in the crossed and overlapped area, and the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed.
An embodiment of the present invention provides a multi-beam coupling laser processing system, which includes:
the laser light source is used for providing N laser beams, the power density of any laser beam is less than the ablation threshold of a workpiece material to be processed, wherein N is more than or equal to 2;
and the focusing lens corresponds to the N laser beams and is correspondingly arranged on the light path of the N laser beams, wherein the N laser beams can be controlled to be focused by the focusing lens and then be crossed and overlapped, a processing energy domain is formed in the crossed and overlapped area, the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed, and the power density in the crossed and overlapped area of the N-1 laser beams after being focused by the focusing lens is less than the ablation threshold value of the workpiece material to be processed.
The embodiment of the invention provides a multi-beam coupling laser processing method, which comprises the following steps:
providing at least two first laser beams and arranging a focusing lens on the optical path of the at least two first laser beams, so that the at least two first laser beams can pass through the same focusing lens in a controlled manner and are overlapped in a crossed manner, and a processing energy domain is formed in the crossed and overlapped area,
placing the part of the workpiece to be processed in the processing energy domain, and further realizing the processing treatment of the workpiece to be processed; wherein the power density of the first laser beam is less than an ablation threshold of the workpiece material to be processed, and the power density within the processing energy domain is greater than the ablation threshold of the workpiece material to be processed.
Compared with the prior art, the multi-beam coupling laser processing method provided by the invention can regulate and control the space volume and the posture of the processing energy domain, realizes high-speed and high-resolution processing, and has the advantages of high reliability, high controllability, low equipment requirement and the like.
Drawings
FIG. 1a is a schematic diagram of an incident light beam emitted from a light source for processing;
FIG. 1b is a schematic diagram of a multi-beam coupled laser processing method;
FIGS. 2a and 2b are schematic diagrams of different spatial distributions of different numbers of laser beams, respectively;
FIG. 3 is a schematic diagram illustrating the principle of machining a workpiece by the multi-beam coupled laser machining method according to the present invention;
FIG. 4 is a schematic diagram illustrating the extended coupling principle of the multi-beam coupled laser processing method provided by the present invention;
FIG. 5a is a schematic diagram of a principle structure of coupling two light beams in the multi-beam coupled laser processing method according to the present invention;
FIG. 5b shows the coupling area of the two beams of FIG. 5 a;
fig. 5c is a cross-sectional incoherent intensity diagram of a coupling region formed by coupling two light beams in the multi-beam coupled laser processing method provided by the invention.
Detailed Description
In view of the deficiencies in the prior art, the inventors of the present invention have made extensive studies and extensive practices to provide technical solutions of the present invention. The technical solution, its implementation and principles, etc. will be further explained as follows.
The multi-beam coupling laser processing method provided by the invention divides a high-energy laser beam into 2 or more laser beams, the single laser beam after beam division has no capability of ablating materials, and the multi-beam coupling has processing capability; the space size of a processing energy domain with ablation capacity can be reduced in a multi-beam coupling mode, and particularly the normal thickness of a surface to be processed can be reduced (as shown in figure 1, the transverse length of the processing energy domain in figure 1 is the direction of the processing surface, and is obviously reduced), so that the processing resolution is improved, the precision processing is realized, and the thermal influence can be reduced; the volume and the spatial attitude of the processing energy domain after multi-beam coupling can be changed through reasonable regulation, so that some complex features can be processed; moreover, the invention can be combined with a large-aperture scanning galvanometer to realize high-speed and high-precision processing.
An embodiment of the present invention provides a multi-beam coupling laser processing system, which includes:
the laser light source is used for providing at least two laser beams, and the power density of any laser beam is less than the ablation threshold value of a workpiece material to be processed;
and the focusing lens corresponds to the at least two laser beams and is correspondingly arranged on the light paths of the at least two laser beams, wherein the at least two laser beams can be controlled to be crossed and overlapped after being focused by the focusing lens, a processing energy domain is formed in the crossed and overlapped area, and the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed.
In some more specific embodiments, the laser light source includes at least two lasers, and the at least two laser beams are directly emitted from different lasers respectively.
In some more specific embodiments, the laser light source includes a laser, a beam splitter is further disposed at a light source output end of the laser, and the at least two laser beams are formed by splitting a light beam directly emitted from the same laser by the beam splitter; wherein the power density of the beam directly emitted by the laser is greater than the ablation threshold of the workpiece material to be processed.
In some more specific embodiments, the system for multiple beam coupled laser processing further comprises: and the scanning galvanometer is arranged between the laser light source and the focusing lens, is correspondingly arranged on the light path of at least one laser beam, and is at least used for adjusting the angle and the direction of the laser beam incident on the focusing lens.
An embodiment of the present invention provides a multi-beam coupling laser processing system, which includes:
the laser light source is used for providing N laser beams, the power density of any laser beam is less than the ablation threshold of a workpiece material to be processed, wherein N is more than or equal to 2;
and the focusing lens corresponds to the N laser beams and is correspondingly arranged on the light path of the N laser beams, wherein the N laser beams can be controlled to be focused by the focusing lens and then be crossed and overlapped, a processing energy domain is formed in the crossed and overlapped area, the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed, and the power density in the crossed and overlapped area of the N-1 laser beams after being focused by the focusing lens is less than the ablation threshold value of the workpiece material to be processed.
The embodiment of the invention provides a multi-beam coupling laser processing method, which comprises the following steps:
providing at least two first laser beams and arranging a focusing lens on the optical path of the at least two first laser beams, so that the at least two first laser beams can pass through the same focusing lens in a controlled manner and are overlapped in a crossed manner, and a processing energy domain is formed in the crossed and overlapped area,
placing the part of the workpiece to be processed in the processing energy domain, and further realizing the processing treatment of the workpiece to be processed; wherein the power density of the first laser beam is less than an ablation threshold of the workpiece material to be processed, and the power density within the processing energy domain is greater than the ablation threshold of the workpiece material to be processed.
In some more specific embodiments, the at least two first laser beams are respectively from different lasers, or the at least two first laser beams are formed by splitting laser beams directly emitted from the same laser, and the power density of the laser beam directly emitted from the laser source is greater than the ablation threshold of the workpiece material to be processed.
In some more specific embodiments, the method for multiple beam coupled laser processing further comprises: providing at least one second laser beam and arranging a focusing lens on the optical path of the second laser beam, enabling the second laser beam to pass through the focusing lens and to be crossed and overlapped with the focused first laser beam, and further forming the processing energy domain in a crossed and overlapped area, wherein the power density of the second laser beam is larger than or smaller than the ablation threshold value of the workpiece material to be processed.
Further, the method for processing the multi-beam controllably coupled laser further comprises: adjusting the volume and/or spatial pose of the processing energy domain by changing at least one of the parameters, number, spatial distribution, parameters of a focusing lens of the first laser beam and/or the second laser beam.
Further, the multi-beam controllable coupling laser processing method is realized based on the multi-beam controllable coupling laser processing system.
The principle of the present application will be described in detail with reference to the accompanying drawings, and the principle of the multi-beam coupling laser processing method provided by the present invention is shown in fig. 1a and 1b, and the laser light source is directly connected to the laser beamWhen the emitted laser beam is not split, the processing energy domain after the split laser beam is focused is larger, and the beam power density I in the processing energy domain is larger than the material ablation threshold IthThe workpiece material can be processed; in the case of coupling a plurality of laser beams, taking two laser beams as an example, the power density (I) of at least two laser beams formed by splitting a laser beam directly emitted from a light source or of any single laser beam of the two laser beams directly emitted from the light source1，I2) Less than material ablation threshold IthCoupling (i.e. cross-overlapping of the foci) of the two laser beams is carried out only in the overlapping region or in the partial overlapping region (where the processing energy field is formed) I1+I2＞IthTherefore, the space volume of a processing energy domain is reduced, and the processing resolution is further improved; and the spatial attitude of the processing energy domain can be changed by changing the lens parameters, the laser beam parameters (such as power), the laser beam quantity and the spatial distribution mode of the laser beams (the spatial distribution of the laser beams can be adjusted by a scanning galvanometer), so that the precise processing of different characteristics can be realized. The distribution pattern of the single independent light beam is shown in fig. 2a and 2b, which is not limited to 2 in the figure, but can be set according to specific processing requirements.
Specifically, a material processing process of multi-beam coupled laser processing is shown in FIG. 3; the laser beam directly emitted by the laser is split by a beam splitter or other splitting technologies to form at least two laser beams (only two laser beams are taken as an example in the figure, or a plurality of laser beams can be emitted by a plurality of lasers), then the laser beams are transmitted to a scanning galvanometer through light path transmission, the scanning galvanometer can select a larger or conventional aperture according to different application occasions, then the laser beams are focused and coupled through a field lens (namely a focusing lens), and finally the laser beams reach the surface of a material to remove and process the material.
In some more specific embodiments, as shown in fig. 4, in order to further improve the controllability of the processing energy domain, the coupled laser beam may be further coupled with the uncoupled laser beam or the coupled laser beam conducted by another optical path (i.e., the at least two first laser beams are coupled with the at least one second laser beam in a focusing manner), so as to further adjust and control the spatial posture and volume of the processing energy domain, and the beams of different optical paths may be emitted by the same laser or different lasers.
Fig. 5a is a schematic diagram of a principle structure of coupling two light beams in the multi-beam coupling laser processing method provided by the present invention, where the coupling region of the two light beams is shown in fig. 5b, and the cross-sectional incoherent intensity of the coupling region formed by coupling the two light beams is shown in fig. 5c, where the darker the color is, the greater the laser intensity in the middle region after visible coupling is, the processing capability is provided, and the area is significantly reduced compared with that before coupling.
The invention provides a multi-beam coupling laser processing method, which comprises the steps of splitting laser emitted by the same laser or different lasers into a plurality of beams of laser, wherein the split laser beams still have no material processing capability after being focused, the laser beams are distributed according to a certain spatial rule, the distribution rule is designed according to processing requirements, and then a processing energy domain with a specific spatial attitude is formed after focusing and coupling through a lens, so that the specific processing requirements are met; and the three-dimensional processing can be carried out by combining a numerical control technology, or the high-speed processing can be carried out by combining a scanning galvanometer. In addition, after the multiple light beams are coupled, the processing energy domain can be further regulated and controlled through the coupled light beams or the common light beams conducted by other light paths.
It should be noted that, before focusing, the laser beam has a large beam diameter and an uneven power density distribution, and the power density of the laser beam in the focused beam waist area is large, and the laser beam has processing capability only in the focused beam waist area; in the invention, the comparison between the power density of the laser beam and the ablation threshold of the workpiece material to be processed is actually the comparison between the power density of the laser beam in a focused beam waist area (i.e. an area with processing capability) and the ablation threshold of the workpiece material to be processed, and the processing energy area (which can be understood as a coupling area) is also formed by overlapping at least one focused beam waist area of the laser beam with another focused beam waist area of the laser beam in a crossing manner; for example, the phrase "the power density of any one of the laser beams is less than the ablation threshold of the workpiece material to be processed" in the present invention means that "the power density of the beam waist region focused by any one of the laser beams is less than the ablation threshold of the workpiece material to be processed", and "the power density of the beam directly emitted from the laser is greater than the ablation threshold of the workpiece material to be processed", and "the power density of the beam waist region focused by the beam directly emitted from the laser is greater than the ablation threshold of the workpiece material to be processed".
The multi-beam coupling laser processing method provided by the invention can reduce the spatial volume of the processing energy domain, control the spatial attitude of the processing energy domain, and the like, has the advantages of low implementation cost and small technical difficulty, and has great significance for realizing the precise high-integrity high-speed processing and complex characteristic processing of laser, especially the precise processing of difficult-to-process materials.
It should be understood that the above-mentioned embodiments are merely illustrative of the technical concepts and features of the present invention, which are intended to enable those skilled in the art to understand the contents of the present invention and implement the present invention, and therefore, the protection scope of the present invention is not limited thereby. All equivalent changes and modifications made according to the spirit of the present invention should be covered within the protection scope of the present invention.

Claims (10)

1. A multiple beam coupled laser processing system, comprising:
the laser light source is used for providing at least two laser beams, and the power density of any laser beam is less than the ablation threshold value of a workpiece material to be processed;
and the focusing lens corresponds to the at least two laser beams and is correspondingly arranged on the light paths of the at least two laser beams, wherein the at least two laser beams can be controlled to be crossed and overlapped after being focused by the focusing lens, a processing energy domain is formed in the crossed and overlapped area, and the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed.
2. The multiple beam-coupled laser processing system of claim 1, wherein: the laser light source comprises at least two lasers, and the at least two laser beams are directly emitted by different lasers respectively.
3. The multiple beam-coupled laser processing system of claim 1, wherein: the laser light source comprises a laser, a spectroscope is further arranged at the light source output end of the laser, and the at least two laser beams are formed by light beams directly emitted by the same laser and split by the spectroscope; wherein the power density of the beam directly emitted by the laser is greater than the ablation threshold of the workpiece material to be processed.
4. The multiple beam-coupled laser processing system of claim 1, further comprising: and the scanning galvanometer is arranged between the laser light source and the focusing lens, is correspondingly arranged on the light path of at least one laser beam, and is at least used for adjusting the angle and the direction of the laser beam incident on the focusing lens.
5. A multiple beam coupled laser processing system, comprising:
the laser light source is used for providing N laser beams, the power density of any laser beam is less than the ablation threshold of a workpiece material to be processed, wherein N is more than or equal to 2;
and the focusing lens corresponds to the N laser beams and is correspondingly arranged on the light path of the N laser beams, wherein the N laser beams can be controlled to be focused by the focusing lens and then be crossed and overlapped, a processing energy domain is formed in the crossed and overlapped area, the power density in the processing energy domain is greater than the ablation threshold value of the workpiece material to be processed, and the power density in the crossed and overlapped area of the N-1 laser beams after being focused by the focusing lens is less than the ablation threshold value of the workpiece material to be processed.
6. A multiple beam coupling laser processing method, characterized by comprising:
providing at least two first laser beams and arranging a focusing lens on the optical path of the at least two first laser beams, so that the at least two first laser beams can pass through the same focusing lens in a controlled manner and are overlapped in a crossed manner, and a processing energy domain is formed in the crossed and overlapped area,
placing the part of the workpiece to be processed in the processing energy domain, and further realizing the processing treatment of the workpiece to be processed; wherein the power density of the first laser beam is less than an ablation threshold of the workpiece material to be processed, and the power density within the processing energy domain is greater than the ablation threshold of the workpiece material to be processed.
7. The multiple beam coupling laser processing method according to claim 6, wherein: the at least two first laser beams are respectively from different lasers, or the at least two first laser beams are formed by splitting laser beams directly emitted by the same laser, and the power density of the laser beams directly emitted by the laser is larger than the ablation threshold of the workpiece material to be processed.
8. The multiple beam coupling laser processing method according to claim 6, further comprising: providing at least one second laser beam and arranging a focusing lens on the optical path of the second laser beam, enabling the second laser beam to pass through the focusing lens and to be crossed and overlapped with the focused first laser beam, and further forming the processing energy domain in a crossed and overlapped area, wherein the power density of the second laser beam is larger than or smaller than the ablation threshold value of the workpiece material to be processed.
9. The multiple beam coupling laser processing method according to claim 8, further comprising: adjusting the volume and/or spatial pose of the processing energy domain by changing at least one of the parameters, number, spatial distribution, parameters of a focusing lens of the first laser beam and/or the second laser beam.
10. The multiple beam coupling laser processing method according to claim 6, wherein: the multi-beam coupled laser processing method is realized based on the multi-beam coupled laser processing system of any one of claims 1 to 4 or the multi-beam coupled laser processing system of claim 5.
CN201910454010.5A 2019-05-28 2019-05-28 Multi-beam coupling laser processing system and method Active CN110091073B (en)

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CN112935555B (en) * 2021-03-15 2022-11-18 中国科学院宁波材料技术与工程研究所 Compound type precise laser polishing method and processing system based on light beam modulation
CN114932307A (en) * 2022-06-27 2022-08-23 中国科学院宁波材料技术与工程研究所 Light splitting element capable of controllably generating multiple laser beams and application thereof

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