CN110081976A - A kind of big visual field grating prism spectrum imaging system - Google Patents

A kind of big visual field grating prism spectrum imaging system Download PDF

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Publication number
CN110081976A
CN110081976A CN201910423663.7A CN201910423663A CN110081976A CN 110081976 A CN110081976 A CN 110081976A CN 201910423663 A CN201910423663 A CN 201910423663A CN 110081976 A CN110081976 A CN 110081976A
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CN
China
Prior art keywords
grating
prism
incident
grating prism
visual field
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CN201910423663.7A
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Chinese (zh)
Inventor
魏立冬
周锦松
冯蕾
李雅灿
何晓英
景娟娟
杨雷
付锡禄
徐丽
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Academy of Opto Electronics of CAS
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Academy of Opto Electronics of CAS
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Priority to CN201910423663.7A priority Critical patent/CN110081976A/en
Publication of CN110081976A publication Critical patent/CN110081976A/en
Pending legal-status Critical Current

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0256Compact construction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/04Slit arrangements slit adjustment
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2823Imaging spectrometer

Abstract

The invention discloses a kind of big visual field grating prism spectrum imaging systems, including slit, spherical reflector, plane mirror, grating prism module, microscope group, second level optical filter and detector are focused, is reflected after the light beam of the slit is incident on the spherical reflector;Light beam after reflection is incident on the plane mirror;Light beam after plane mirror reflection is incident on the grating prism module, diffraction occurs at the grating prism module, wherein: the incident focusing microscope group of the first-order diffraction light of different wave length completes imaging process using the detector is reached after the second level optical filter;Aperture diaphragm of the front surface of the grating prism module as whole system, the aperture diaphragm are located at the centre of sphere C of the spherical reflector, and are overlapped with the plane of incidence of the grating prism module.System entirety size is compact, light-weight, structure is simple for this, and the non-run-off the straight of image planes is conducive to the adjustment of system.

Description

A kind of big visual field grating prism spectrum imaging system
Technical field
The present invention relates to spectral imaging technology field more particularly to a kind of big visual field grating prism spectrum imaging systems.
Background technique
Spectral imaging technology is a kind of novel multi-vitamin technology for information acquisition for combining imaging technique and spectral technique, it Can obtain detected target two-dimensional space information and one-dimensional spectral information, formed data cube.Spectral imaging technology exists Military surveillance and agriculture, woods, water, soil, mine lamp resource investigation etc. have broad application prospects.
The spectroscopic modes of high light spectrum image-forming technology common in the art mainly have prism and grating beam splitting etc., for example, Fery prism-type, Offner grating type, Czerny-Turner grating type and Dyson grating type etc., but this kind of spectrometer be from The defects of the deficiencies of axle construction, there is structure is complicated and development cost is high, it is unable to satisfy the big visual field of current EO-1 hyperion instrument, width The demand for development of spectral region.
Summary of the invention
The object of the present invention is to provide a kind of big visual field grating prism spectrum imaging system, the system entirety size is compact, It is light-weight, structure is simple, the non-run-off the straight of image planes is conducive to the adjustment of system, be able to satisfy current light spectrum imaging technique development need It asks.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of big visual field grating prism spectrum imaging system, the system comprises slit, spherical reflector, plane reflections Mirror, focuses microscope group, second level optical filter and detector at grating prism module, in which:
It is reflected after the light beam of the slit is incident on the spherical reflector;
Light beam after reflection is incident on the plane mirror;
Light beam after plane mirror reflection is incident on the grating prism module, in the grating prism module Diffraction occurs for place, in which: the incident focusing microscope group of the first-order diffraction light of different wave length, using being arrived after the second level optical filter Up to the detector, imaging process is completed;
Aperture diaphragm of the front surface of the grating prism module as whole system, the aperture diaphragm are located at the spherical surface At the centre of sphere C of reflecting mirror, and it is overlapped with the plane of incidence of the grating prism module.
Be provided with rectangular opening in the centre of the plane mirror, using the rectangular opening make the plane mirror do not block from The light beam of slit outgoing.
The grating prism module is formed by grating substrate, grating, protection glass and prism cementing, in which:
The grating substrate, protection glass and prism are all made of same material;
The optical axis of the grating prism module is parallel with mould group bottom surface, and central wavelength chief ray is with 1 jiao of incidence grating substrate of α Plane, with incident angle α after reflecting2Incident grating, light are emitted with angle of diffraction α 3, and with α4Incidence angle reaches prism hypotenuse/facet surfaces;
The inclined-plane apex angle of the prism is β, and last light is with α5Angle of emergence outgoing.
Long wave, which is formed with, close to the plating of the surface of the detector in the second level optical filter leads to cut-off light filtering films, short wavelength cutoff wave A length of 550nm, and by the second level optical filter close to the surface of the detector.
The slit length of the system can reach 29.4mm, spectral region 420-1000nm, F number 2.4.
The system uses coaxial design, is avoided that the very cureless off-axis aberration that off-axis system introduces.
As seen from the above technical solution provided by the invention, above system entirety size is compact, light-weight, structure is simple Single, the non-run-off the straight of image planes is conducive to the adjustment of system, is able to satisfy current light spectrum imaging technique growth requirement.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment Attached drawing be briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for this For the those of ordinary skill in field, without creative efforts, it can also be obtained according to these attached drawings other Attached drawing.
Fig. 1 is big visual field grating prism spectrum imaging system overall structure diagram provided in an embodiment of the present invention;
Fig. 2 is the structural schematic diagram of grating prism module provided by the embodiment of the present invention;
Fig. 3 provides the structural schematic diagram of spherical reflector by the embodiment of the present invention.
Specific embodiment
With reference to the attached drawing in the embodiment of the present invention, technical solution in the embodiment of the present invention carries out clear, complete Ground description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on this The embodiment of invention, every other implementation obtained by those of ordinary skill in the art without making creative efforts Example, belongs to protection scope of the present invention.
The embodiment of the present invention is described in further detail below in conjunction with attached drawing, is implemented as shown in Figure 1 for the present invention The big visual field grating prism spectrum imaging system overall structure diagram that example provides, the system mainly includes slit 101, spherical surface Reflecting mirror 102, grating prism module 104, focuses microscope group 105, second level optical filter 106 and detector 107 at plane mirror 103, Wherein:
It is reflected after the light beam of the slit 101 is incident on the spherical reflector 102;
Light beam after reflection is incident on the plane mirror 103;In the specific implementation, in the plane mirror 103 centre is also provided with rectangular opening, so that the plane mirror 103 is not blocked the light being emitted from slit 101 using the rectangular opening Beam;
Light beam after the plane mirror 103 reflection is incident on the grating prism module 104, in the grating rib Diffraction occurs at mirror module 104, in which: the incident focusing microscope group 105 of the first-order diffraction light of different wave length, using described two The detector 107 is reached after grade optical filter 106, completes imaging process;
Aperture diaphragm of the front surface of the grating prism module 104 as whole system, the aperture diaphragm are located at described At the centre of sphere C of spherical reflector 102, and it is overlapped with the plane of incidence of the grating prism module 104.
It is illustrated in figure 2 the structural schematic diagram of grating prism module provided by the embodiment of the present invention, the grating prism Module 104 is formed by grating substrate, grating, protection glass and prism cementing, in which:
The grating substrate, protection glass and prism are all made of same material, such as H-K9L;
The optical axis OO ' of the grating prism module 104 is parallel with mould group bottom surface, and central wavelength chief ray is with 1 jiao of incident light of α Grid base baseplane, with incident angle α after reflecting2Incident grating, light are emitted with angle of diffraction α 3, and with α4Incidence angle reaches rib Mirror inclined-plane;
The inclined-plane apex angle of the prism is β, and last light is with α5Angle of emergence outgoing.
Further, in order to keep central wavelength emergent ray parallel with optical axis OO ', according to geometrical relationship needs
β=α5(1)
When the incidence angle of light incidence volume holographic grating substrate meets Bragg diffraction angle, diffraction efficiency highest, at this time Incidence angle and the angle of diffraction are equal, it may be assumed that
Wherein, λBIt is Bragg diffraction wavelength, d is grating constant.According to Fresnel reflections law, central wavelength light beam enters Penetrate the angle of grating are as follows:
Wherein, nCIt is refractive index of the central wavelength inside prism.By grating diffraction occurs for light beam, and it is fixed to follow diffraction It restrains, then the angle of diffraction of central wavelength are as follows:
α3C=arcsin (λC/(d·nC)-sin(α2C)) (4)
According to geometrical relationship
β=α3C4C (5)
And had according to Fresnel reflections law
nC·sinα4C=sin α5C (6)
Prism vertex angle can be acquired by bringing above-mentioned (1), (4) and (6) formula into (5) formula
It is illustrated in figure 3 the structural schematic diagram of the provided spherical reflector of the embodiment of the present invention, the system uses spherical surface Reflecting mirror is as collimating structure, slit object point light beam incidence spherical reflector, then collimated incident grating prism.As shown in figure 3, C point is the centre of sphere of spherical reflector, and F ' is that the focus of spherical reflector and slit location are overlapped, quasi- according to light path principle Straight light path is considered as infinity image objects, i.e. object distance l=- ∞, at this time the first-order aberration coefficient of spherical reflector are as follows:
S in above formula, S, S, SAnd SRespectively the primary spherical aberration coefficient of spherical reflector, coma coefficient, astigmatism system Number, curvature of field coefficient and distortion factor.R is sphere curvature radius, and h is height of incidence of the paraxial rays on surface, and i is light in ball The incident angle in face, incident izFor chief ray incident light door screen angle, J is to draw conspicuous invariant.Due to being reflecting mirror, so being not present Color difference.
The aperture diaphragm of above system is located at spherical reflector centre of sphere C and the plane of incidence weight of grating prism light splitting original part It closes, at this time iz=0, then S in (8) formula=S=S=0, for the object point of the focal plane spherical reflector system there is no coma, Astigmatism, distortion and color difference, only exist spherical aberration and the curvature of field.Since the system uses the slit of certain length, visual field is larger, in this way The aberration relevant with visual field of introducing can be mutually compensated with the residual aberration of collimating mirror.
In addition, understand since the dispersion element of the system is transmission grating there is second order spectrum, i.e. 400-500nm's Second-order diffraction light can overlap onto the spectral regions of image planes 800-1000nm, in order to avoid Spectra aliasing places second level filter before image planes Mating plate is formed with long wave close to the plating of the surface of the detector 107 in the second level optical filter 106 and leads to cut-off light filtering films, and shortwave is cut Only wavelength is 550nm, and by the second level optical filter 106 close to the surface of the detector 107.
Finally, the slit length of above system can reach 29.4mm, spectral region 420-1000nm, can covering visible light To near infrared band, F number 2.4, spectral resolution reaches 1.2nm, meets current light spectrum imaging technique growth requirement.
In addition, the system uses coaxial design, it is avoided that the very cureless off-axis aberration that off-axis system introduces.
Emulation experiment is carried out with the course of work of the specific example to above system below, in this example: system single order Parameter are as follows: spectral region reaches 420-1000nm, covering visible light near infrared band, and slit length 29.4mm, F number is 2.4, Pixel size is 11 μm, and grating demand pairs are 170lines/mm.
Based on system 420nm, 550nm, 700nm and 1000nm modulation transfer function result figure, in cutoff frequency When 46lines/mm, in entire wavelength band, although what the transmission function of all visual fields of imaging spectrometer was blocked by system Influence is declined, but MTF is all larger than 0.6 in nyquist frequency.
In addition, point range figure is to give the root mean square radii of the point range figure of system at different wavelengths by ray tracing figure Numerical value, it was found from the point range figure that emulation obtains: point picture on the detector is preferably fallen in a pixel.
The data information that the system finally obtains includes two dimensional image information and one-dimensional spectral information, for spectrum dimension at As the Standard General of quality evaluation will cause the mistake of spectrum recovering using spectral line winding bent (Smile) and chromatic variation of distortion, these distortion Difference, the error for causing target signature ingredient to identify.The two bending can be brought a great deal of trouble to follow-up data processing, be needed Effective control is given when Optical System Design, in optical design software to 5 wavelength 420nm, 500nm, 700nm, 800nm and The chief ray of 1000nm and 5 visual field (0,0), (0,0.3), (0,0.5), (0,0.7) and (0,1) visual field carries out trace, as a result Show to be respectively less than 3 μm (0.32pixel) in the maximum Spectral line bend of all wave bands and chromatic variation of distortion, meets spectrum imaging system Technical requirements ensure that the accuracy of spectrum recovering.
It is worth noting that, the content being not described in detail in the embodiment of the present invention belongs to professional and technical personnel in the field's public affairs The prior art known.
In conclusion system entirety size is compact provided by the embodiment of the present invention, light-weight, structure is simple, image planes are not Run-off the straight, conducive to the adjustment of system;And final slit length can reach 29.4mm, spectral region 420-1000nm can cover Lid visible light is near infrared band, and F number 2.4, spectral resolution reaches 1.2nm, meets current light spectrum imaging technique growth requirement.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Within the technical scope of the present disclosure, any changes or substitutions that can be easily thought of by anyone skilled in the art, It should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention should be with the protection model of claims Subject to enclosing.

Claims (6)

1. a kind of big visual field grating prism spectrum imaging system, which is characterized in that the system comprises slit, spherical reflector, Plane mirror, focuses microscope group, second level optical filter and detector at grating prism module, in which:
It is reflected after the light beam of the slit is incident on the spherical reflector;
Light beam after reflection is incident on the plane mirror;
Light beam after plane mirror reflection is incident on the grating prism module, sends out at the grating prism module Raw diffraction, in which: the incident focusing microscope group of the first-order diffraction light of different wave length, using reaching institute after the second level optical filter Detector is stated, imaging process is completed;
Aperture diaphragm of the front surface of the grating prism module as whole system, the aperture diaphragm are located at the spheric reflection At the centre of sphere C of mirror, and it is overlapped with the plane of incidence of the grating prism module.
2. big visual field grating prism spectrum imaging system according to claim 1, which is characterized in that
It is provided with rectangular opening in the centre of the plane mirror, does not block the plane mirror from slit using the rectangular opening The light beam of outgoing.
3. big visual field grating prism spectrum imaging system according to claim 1, which is characterized in that the grating prism module It is formed by grating substrate, grating, protection glass and prism cementing, in which:
The grating substrate, protection glass and prism are all made of same material;
The optical axis of the grating prism module is parallel with mould group bottom surface, and central wavelength chief ray is flat with 1 jiao of incidence grating substrate of α Face, with incident angle α after reflecting2Incident grating, light are emitted with angle of diffraction α 3, and with α4Incidence angle reaches prism hypotenuse/facet surfaces;
The inclined-plane apex angle of the prism is β, and last light is with α5Angle of emergence outgoing.
4. big visual field grating prism spectrum imaging system according to claim 1, which is characterized in that
Long wave is formed with close to the plating of the surface of the detector in the second level optical filter and leads to cut-off light filtering films, and short wavelength cutoff wavelength is 550nm, and by the second level optical filter close to the surface of the detector.
5. big visual field grating prism spectrum imaging system according to claim 1, which is characterized in that
The slit length of the system can reach 29.4mm, spectral region 420-1000nm, F number 2.4.
6. big visual field grating prism spectrum imaging system according to claim 1, which is characterized in that
The system uses coaxial design, is avoided that the very cureless off-axis aberration that off-axis system introduces.
CN201910423663.7A 2019-05-21 2019-05-21 A kind of big visual field grating prism spectrum imaging system Pending CN110081976A (en)

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