CN110045516A - A kind of lens adjustment device for excimer laser - Google Patents
A kind of lens adjustment device for excimer laser Download PDFInfo
- Publication number
- CN110045516A CN110045516A CN201910323425.9A CN201910323425A CN110045516A CN 110045516 A CN110045516 A CN 110045516A CN 201910323425 A CN201910323425 A CN 201910323425A CN 110045516 A CN110045516 A CN 110045516A
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- China
- Prior art keywords
- positioning
- guiding
- module component
- excimer laser
- calibration module
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- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 37
- 230000007246 mechanism Effects 0.000 claims abstract description 22
- 230000005540 biological transmission Effects 0.000 claims description 16
- 229910000831 Steel Inorganic materials 0.000 claims description 9
- 239000010959 steel Substances 0.000 claims description 9
- 230000005611 electricity Effects 0.000 claims 1
- 239000007787 solid Substances 0.000 abstract description 5
- 230000003287 optical effect Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 2
- 230000008450 motivation Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
Abstract
Lens adjustment device for excimer laser of the invention, including driving mechanism, positioning and guiding pedestal, calibration module component, several positioning guide columns, 2 travel switches；Travel switch is installed on the two sides up and down of the limit sliding rail of positioning and guiding pedestal；Positioning guide column is fixed on the positioning and guiding pedestal, and calibration module component is socketed on positioning guide column；Calibration module component is equipped with limit guiding structure, and limit guiding structure one end is fixedly connected with driving mechanism, and the limit sliding rail of the other end and the positioning and guiding pedestal cooperates；Driving mechanism driving calibration module component is moved up and down along the positioning guide column, and when limiting guiding structure touching travel switch, driving mechanism stops driving.The present invention realizes excimer laser when carrying out light path calibration, and calibration prism can be moved in and out by way of electronic adjustment, saves the time and efforts that calibration prism is adjusted, and calibrate prism location can accurately control, is in solid and reliable when operating position.
Description
Technical field
The present invention relates to laser technology fields, and in particular to a kind of lens adjustment device for excimer laser.
Background technique
In the light path module of excimer laser, need to use light path calibration module.When needing to calibrate, rib will be calibrated
Mirror moves into optical path and carries out light path calibration；When not needing to be calibrated, calibration prism is removed into optical path.The shifting of the calibration prism at present
Enter, remove optical path generally by the way of manually adjusting, but manually adjusts time-consuming and laborious, and degree of regulation also bad control
System.
Summary of the invention
It is an object of the invention in view of the above drawbacks of the prior art, provide a kind of eyeglass for excimer laser
Device is adjusted, realizes excimer laser when carrying out light path calibration, calibration prism can be carried out in optical path by electronic adjustment, be adjusted
Precision height is saved, and the position for calibrating prism can accurately control.
The present invention provides a kind of lens adjustment devices for excimer laser, including driving mechanism, positioning and guiding
Pedestal, calibration module component, several positioning guide columns, 2 travel switches；
The travel switch is installed on the two sides up and down of the limit sliding rail of the positioning and guiding pedestal, for constraining the school
The stroke up and down of quasi-mode block assembly；The positioning guide column is fixed on the positioning and guiding pedestal, the calibration module assembly set
It is connected to the positioning guide column；The calibration module component be equipped with limit guiding structure, described limit guiding structure one end with it is described
Driving mechanism is fixedly connected, and the limit sliding rail of the other end and the positioning and guiding pedestal cooperates；Described in the driving mechanism driving
Calibration module component is moved up and down along the positioning guide column, the drive when the limit guiding structure touches the travel switch
Motivation structure stops driving.
Further, the driving mechanism includes motor, transmission shaft, the driven converter with horizontal connection interface；It is described
Motor is fixed on the positioning and guiding pedestal, and the transmission shaft is installed on motor, and the motor drives the transmission shaft to turn
Dynamic, the driven converter is installed on the transmission shaft, and the horizontal connection interface and described limit guiding structure one end are solid
Fixed connection, the driven converter will be for that will be converted to moving up and down for the calibration module component.
Further, the motor is rotating electric machine, and the transmission shaft is screw rod, and the driven converter is nut block.
Further, the driving mechanism is linear motor, directly drives the calibration module component and moves up and down.
Further, the motor is fixedly connected on the positioning and guiding pedestal.
Further, the limit guiding structure is two stretching rivets.
Further, on the bottom of the positioning and guiding pedestal and the calibration module component it is corresponding be reserved with it is several right
Location hole, the positioning hole in the bottom of the calibration module component is embedded in steel ball, when the limit guiding structure touches down
When the travel switch of side, the calibration module component is accurately located on the positioning and guiding pedestal by the steel ball.
Further, several magnet are also pressed on the positioning and guiding pedestal, in the bottom pair of the calibration module component
Position is answered to be also provided with magnet, when the limit guiding structure touches the travel switch of lower section, each pair of magnet is mutual
Attract, so that calibration module component is accurately located on the positioning and guiding pedestal.
Further, the quantity of the positioning guide column is no less than 2, not more than 6.
Further, the positioning guide column elastic conjunction is on the positioning and guiding pedestal.
The beneficial effects of the present invention are the lens adjustment device provided for excimer laser, realize that quasi-molecule swashs
When carrying out light path calibration, calibration prism can be carried out in optical path light device by electronic adjustment, and degree of regulation is high, and calibrate prism position
Setting accurately to control, and be in solid and reliable when operating position；When not needing to carry out light path calibration, calibration prism can be by electronic
Adjustment removes optical path, and the time and efforts that calibration prism is adjusted is saved by way of electronic adjustment.
Detailed description of the invention
Fig. 1 is the lens adjustment device structural schematic diagram for excimer laser of one embodiment of the invention；
Fig. 2 is the structural schematic diagram of Fig. 1 lens adjustment device alignment modular assembly；
Fig. 3 is to be shown between Fig. 1 lens adjustment device alignment modular assembly and positioning and guiding pedestal by steel ball positioning structure
It is intended to；
Description of symbols: 1- driving mechanism；11- motor；12- transmission shaft；The driven converter of 13-；131- horizontal connection
Interface；2- positioning and guiding pedestal；21- limits sliding rail；3- calibration module component；31- limits guiding structure；32- prism mounting base；
33- calibrates prism；34- cross target；35- fluorescence eyeglass；36- location hole；4- positioning guide column；5- travel switch；6- steel ball.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawing and specific implementation
Invention is further described in detail for example.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention,
Do not limit the present invention.
In order to keep the narration of this disclosure more detailed with it is complete, below for embodiments of the present invention and specific real
It applies example and proposes illustrative description；But this not implements or uses the unique forms of the specific embodiment of the invention.Embodiment
In cover multiple specific embodiments feature and to construction with operate these specific embodiments method and step it is suitable with it
Sequence.However, can also reach identical or impartial function and sequence of steps using other specific embodiments.
As shown in Figure 1, be the lens adjustment device structural schematic diagram for excimer laser of one embodiment of the invention,
Including 4,2 driving mechanism 1, positioning and guiding pedestal 2, calibration module component 3, several positioning guide columns travel switches 5；
The travel switch 5 is installed on the two sides up and down of the limit sliding rail 21 of the positioning and guiding pedestal 2, for constraining
State the stroke up and down of calibration module component 3；The positioning guide column 4 is fixed on the positioning and guiding pedestal 2, the calibration module
Component 3 is socketed on the positioning guide column 4；The calibration module component 3 is equipped with limit guiding structure 31, the limit guiding structure
31 one end are fixedly connected with the driving mechanism 1, and the limit sliding rail 21 of the other end and the positioning and guiding pedestal 2 cooperates；It is described
Driving mechanism 1 drives the calibration module component 3 to move up and down along the positioning guide column 4, when the limit guiding structure 31 touches
It touches the driving mechanism 1 when the travel switch 5 and stops driving.
In the present embodiment, the quantity of the positioning guide column 4 is 2, and 4 elastic conjunction of positioning guide column is in the positioning
In guide seats 2.In some other embodiment, the quantity of the positioning guide column 4 can be 2,3,4,5,6.
In the present embodiment, the driving mechanism 1 includes motor 11, transmission shaft 12, with the driven of horizontal connection interface 131
Converter 13；The motor 11 is fixed on the positioning and guiding pedestal 2, and the transmission shaft 12 is installed on motor 11, described
Motor 11 drives the transmission shaft 12 to rotate, and the driven converter 13 is installed on the transmission shaft 12, the horizontal connection
Interface 131 is fixedly connected with described 31 one end of limit guiding structure, and the driven converter 13 is described for that will be converted to
Calibration module component 3 moves up and down.
Preferably, the motor 11 is rotating electric machine, and the transmission shaft 12 is screw rod, and the driven converter 13 is nut
Block.
In some other embodiment, the driving mechanism 1 can also be linear motor, and linear motor is fixedly connected on described
Positioning and guiding pedestal 2 directly drives the calibration module component 3 and moves up and down.
As shown in Fig. 2, being the structural schematic diagram of Fig. 1 lens adjustment device alignment modular assembly, the calibration module group
Part 3 includes prism mounting base 32, calibration prism 33, cross drone 34, fluorescence eyeglass 35, limit guiding structure 31, the calibration
Prism 33 is fixedly installed in the prism mounting base 32, and the cross drone 34 is equipped with 2, is fixedly installed in the prism peace
It fills on seat 32, and is located at the lower section of the fluorescence eyeglass 35.The calibration prism 33 and the cross drone 34 are installed in institute
It states in prism mounting base 32, it is ensured that the relative position of calibration prism 33 and the cross drone 34 is accurate.The calibration rib
Mirror 33 moves down under the driving of driving mechanism 1, when the limit guiding structure 31 touches the travel switch 5 of lower section, drive
Motivation structure 1 stops driving, and the calibration prism 33 no longer moves down, and calibrates prism 33 at this time and is in calibration optical path, is work
Operation mode；The calibration prism 33 moves up under the driving of driving mechanism 1, when the limit guiding structure 31 touches
The travel switch 5 of side, driving mechanism 1 stop driving, and the calibration prism 33 no longer moves up, and calibrate prism 33 at this time and remove
It calibrates in optical path, is non-operating mode.
In the present embodiment, the limit guiding structure 31 is two stretching rivets.
As shown in figure 3, being positioned between Fig. 1 lens adjustment device alignment modular assembly and positioning and guiding pedestal by steel ball
Structural schematic diagram.In the present embodiment, corresponding pre- on the bottom of the positioning and guiding pedestal 2 and the calibration module component 3
There are several pairs of location holes 6, the location hole 6 in the bottom of the calibration module component 3 is embedded in steel ball 7, when the limit is led
When guiding structure 31 touches the travel switch 5 of lower section, the calibration module component 3 is accurately located at by the steel ball 7
On the positioning and guiding pedestal 2, the positioning accuracy of calibration 33 operating position of prism can be improved.
In some other embodiment, several magnet are also pressed on the positioning and guiding pedestal 2, in the calibrating die
The bottom corresponding position of block assembly 3 is also provided with magnet, when the stroke that the limit guiding structure 31 touches lower section is opened
When closing 5, each pair of magnet attracts each other, so that calibration module component 3 is accurately located on the positioning and guiding pedestal 2, so as to
It is solid and reliable when guaranteeing that the calibration prism 33 is in operating position.
A kind of lens adjustment device for excimer laser of the invention realizes that excimer laser is carrying out optical path
When calibration, calibration prism can be carried out in optical path by electronic adjustment, and degree of regulation is high, and calibration prism location can be controlled accurately,
It is solid and reliable when in operating position；When not needing to carry out light path calibration, calibration prism can remove optical path by electronic adjustment,
The time and efforts that calibration prism is adjusted is saved by way of electronic adjustment.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of lens adjustment device for excimer laser, which is characterized in that including driving mechanism, positioning and guiding bottom
Seat, calibration module component, several positioning guide columns, 2 travel switches；
The travel switch is installed on the two sides up and down of the limit sliding rail of the positioning and guiding pedestal, for constraining the calibrating die
The stroke up and down of block assembly；The positioning guide column is fixed on the positioning and guiding pedestal, and the calibration module component is socketed on
The positioning guide column；The calibration module component is equipped with limit guiding structure, described limit guiding structure one end and the driving
Mechanism is fixedly connected, and the limit sliding rail of the other end and the positioning and guiding pedestal cooperates；The driving mechanism drives the calibration
Modular assembly is moved up and down along the positioning guide column, the driving machine when the limit guiding structure touches the travel switch
Structure stops driving.
2. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the driving machine
Structure includes motor, transmission shaft, the driven converter with horizontal connection interface；The motor is fixed on the positioning and guiding pedestal
On, the transmission shaft is installed on motor, and the motor drives the transmission shaft rotation, and the driven converter is installed on described
On transmission shaft, the horizontal connection interface is fixedly connected with described limit guiding structure one end, and the driven converter is used for will
Be converted to moving up and down for the calibration module component.
3. the lens adjustment device according to claim 2 for excimer laser, which is characterized in that the motor is
Rotating electric machine, the transmission shaft are screw rod, and the driven converter is nut block.
4. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the driving machine
Structure is linear motor, directly drives the calibration module component and moves up and down.
5. the lens adjustment device according to claim 2 or 4 for excimer laser, which is characterized in that the electricity
Machine is fixedly connected on the positioning and guiding pedestal.
6. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the limit is led
Guiding structure is two stretching rivets.
7. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that in the positioning
Correspondence is reserved with several pairs of location holes on the bottom of guide seats and the calibration module component, in the calibration module component
The positioning hole of bottom is embedded in steel ball, when the limit guiding structure touches the travel switch of lower section, the calibration
Modular assembly is accurately located on the positioning and guiding pedestal by the steel ball.
8. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the positioning is led
It is also pressed into several magnet on pedestal, magnet is also provided in the bottom corresponding position of the calibration module component, when the limit
When position guiding structure touches the travel switch of lower section, each pair of magnet attracts each other, so that calibration module component is accurately fixed
On the positioning and guiding pedestal.
9. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the positioning is led
The quantity of column is no less than 2, not more than 6.
10. the lens adjustment device according to claim 1 for excimer laser, which is characterized in that the positioning
Guide post elastic conjunction is on the positioning and guiding pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910323425.9A CN110045516A (en) | 2019-04-22 | 2019-04-22 | A kind of lens adjustment device for excimer laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910323425.9A CN110045516A (en) | 2019-04-22 | 2019-04-22 | A kind of lens adjustment device for excimer laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110045516A true CN110045516A (en) | 2019-07-23 |
Family
ID=67278313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910323425.9A Pending CN110045516A (en) | 2019-04-22 | 2019-04-22 | A kind of lens adjustment device for excimer laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110045516A (en) |
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2019
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| CN2525540Y (en) * | 2001-09-14 | 2002-12-11 | 上海上诠光纤通信设备有限公司 | Electric control mechanical light switch |
| CN1637892A (en) * | 2003-12-30 | 2005-07-13 | Lg电子有限公司 | Spherical aberration compensation actuator and optical pickup system |
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