CN110026372A - A kind of mask cleaning device - Google Patents
A kind of mask cleaning device Download PDFInfo
- Publication number
- CN110026372A CN110026372A CN201910256333.3A CN201910256333A CN110026372A CN 110026372 A CN110026372 A CN 110026372A CN 201910256333 A CN201910256333 A CN 201910256333A CN 110026372 A CN110026372 A CN 110026372A
- Authority
- CN
- China
- Prior art keywords
- mask
- rinse bath
- boom
- clamping jaw
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
Abstract
The present invention relates to liquid crystal display panel manufacturing technology fields, and in particular to a kind of mask cleaning device, comprising: rinse bath (1), for accommodating cleaning solution；Microscope carrier (2), the mask clamping piece (22) including the depth direction setting along the rinse bath (1), the mask clamping piece (22) is for installing mask (7)；First driving structure (3) is connect with the mask clamping piece (22), for driving the mask clamping piece (22) to move up and down in the rinse bath (1).The present invention provides the solution between a kind of different groove bodies is non-cross, the good mask cleaning device of cleaning effect.
Description
Technical field
The present invention relates to liquid crystal display panel manufacturing technology fields, and in particular to a kind of mask cleaning device.
Background technique
Surface can deposit organic or metal to the mask (MASK) that OLED industry vapor deposition section uses in use for some time
Material layer just needs periodic cleaning after organic or metal material layer reaches certain thickness, otherwise material layer or falls off or blocks
Mask gap, influences processing procedure.The cleaning of mask is usually completed in mask cleaning machine, and exposure mask board cleaning machine is in board
Portion's clamping and transmission mask use the mode of boom, and boom picks and places mask in all groove bodies and requires clamping jaw
(Fork) immerse in groove body solution, such Fork on remaining solution will into next groove body, cause different groove bodies it
Between solution cross contamination, and then will affect solution to the cleaning ability of mask.
Summary of the invention
Therefore, the technical problem to be solved in the present invention is that overcoming molten between the different groove bodies of the cleaning device of the prior art
The easy cross contamination of liquid, influences the defect of the cleaning effect of mask, to provide a kind of mask cleaning device.
In order to solve the above-mentioned technical problems, the present invention provides a kind of mask cleaning devices, comprising:
Rinse bath, for accommodating cleaning solution；
Microscope carrier, the mask clamping piece including the depth direction setting along the rinse bath, the mask clamping piece are used
In installation mask；
First driving structure is connect with the mask clamping piece, for driving the mask clamping piece described clear
It is moved up and down in washing trough.
In one embodiment, the groove body for allowing the mask to be inserted into is formed on the mask clamping piece.
In one embodiment, first driving structure is set to the outside of the rinse bath,
Preferably, first driving structure includes crane, and the microscope carrier is connect with the crane；
Preferably, the crane sets up separately outside the opposite two side walls of the rinse bath；
Preferably, the crane includes support rod and the actuator that connect with the support rod, and the actuator is used for
Drive the support rod movement to drive the microscope carrier to move up and down in the rinse bath.
In one embodiment, the rinse bath is internally provided with a partition, and the rinse bath is divided by the partition
The first area of seal isolation and second area, the cleaning solution and the microscope carrier are located at the first area, and described first drives
Dynamic structure is at least partially disposed in the second area,
Preferably, the first area is located at the top of the second area；
Preferably, first driving structure includes support rod and the actuator that connect with the support rod, the driving
Part is located at the second area, and for driving the support rod to move along the direction perpendicular to the partition, the support rod is passed through
The partition setting is worn, extends to the first area, the microscope carrier is set to one of the support rod far from the actuator
End.
In one embodiment, the periphery that the support rod is located at the part of the first area is arranged with protective cover, institute
Protective cover is stated with the scalable setting of lifting of the support rod.
It in one embodiment, further include that mask fetches structure, it includes clamping jaw that the mask, which fetches structure, the folder
The position of the liquid level of cleaning solution in at least above described rinse bath is arranged in pawl,
Preferably, the clamping jaw is higher than setting at the top of the rinse bath；
Preferably, the mask cleaning device further includes the support frame being arranged on the outside of the rinse bath, the mask
Version fetches structure setting on support frame as described above；
Preferably, support frame as described above includes the support column outside the rinse bath, and is connected with the support column
The boom for connecing and being located above the rinse bath；The mask fetches structure setting on the boom；
Preferably, it is described along being movably disposed at perpendicular to the rinse bath depth direction to fetch structure for the mask
On boom or the boom is arranged on the support column along perpendicular to the rinse bath depth direction is telescopic；
Preferably, support column is along the scalable setting of rinse bath depth direction.
In one embodiment, the support column is internally provided with the second driving structure, and second driving structure is used for
The boom is driven to move along the direction perpendicular to the support column,
Preferably, the boom includes the first boom and the second boom, and the clamping jaw includes the first clamping jaw and the second clamping jaw,
First clamping jaw is arranged on the first boom, and second clamping jaw is arranged on the second boom；
Preferably, second driving structure is for driving first boom with the second boom movement so that described
First clamping jaw and second clamping jaw generate relative movement；
Preferably, second driving structure includes being respectively used to drive first boom and second boom mobile
Two the second driving structures.
In one embodiment, first clamping jaw and second clamping jaw are symmetrical arranged, it is preferable that each clamping jaw
On form the clamping end that angle is 90 °.
In one embodiment, limit is equipped with close to the position of the upper end opening of the rinse bath on the inner wall of the rinse bath
Position device, the limiting device are used to sense and fix the position of the mask.
In one embodiment, the limiting device includes limit sensors, and the limit sensors are used to cover when described
Template sends out sensing signal when reaching predetermined position；Preferably, the limiting device further includes Telescopic Fixed device, described flexible solid
Device is determined for the mask to be fixed on the predetermined position according to the sensing signal.
Technical solution of the present invention has the advantages that
1. mask cleaning device provided by the invention need to only pacify mask when needing to clean mask
On the mask clamping piece of microscope carrier, then the first driving structure driving mask clamping piece and mask are according to rinse bath
Depth direction is completely immersed in cleaning solution, after the completion of cleaning, the first driving structure drive again mask clamping piece and
Mask rises to mask part and exposes outside cleaning solution, consequently facilitating the clamping of boom operates.Due to clamping jaw be not necessarily into
Enter to clamp mask that cleaning is completed in cleaning solution to next station, therefore effectively prevents cleaning solution in different rinse baths
Cross contamination, ensure that cleaning effect；In addition, mask is entered in cleaning solution according to the depth direction of its rinse bath, i.e.,
Two operative end surfaces contact cleaning solution simultaneously, ensure that the uniformity that two operative end surfaces are contacted with cleaning solution, further increase
Cleaning effect；Mask clamping piece is arranged along the depth direction of rinse bath, and is equipped with the installation space of mask, is not only convenient for
The installation of mask, and install after without adjust position can enter cleaning solution in clean, easy to operate, cleaning effect is good
It is good.
2. mask cleaning device provided by the invention, the first driving structure is set to the outside of rinse bath, it is possible to reduce clear
Corrosion of the washing lotion to the first driving structure, while reducing the change to rinse bath internal structure to the greatest extent.
3. mask cleaning device provided by the invention, a pair of of crane drives mask clamping piece in rinse bath simultaneously
Elevating movement so that lifting is steady.
4. mask cleaning device provided by the invention, the top of microscope carrier is higher than the upper end opening of rinse bath and is connected to liter
It drops on frame, so that microscope carrier is totally immersed into cleaning solution mask as far as possible in the process of cleaning, improves cleaning efficiency, guarantee cleaning
Effect.
5. mask cleaning device provided by the invention, microscope carrier and actuator set up separately in the two sides of rinse bath partition, protecting
While demonstrate,proving cleaning effect, reduce occupied space.
6. mask cleaning device provided by the invention, screw rod periphery is stretched the setting of protective cover, avoids screw rod and clear
The corrosion phenomenon of the pollution of solution caused by washing lotion directly contacts and screw rod, while the elevating movement of screw rod is not influenced.
7. mask cleaning device provided by the invention, since the junction of support column and boom is located at the outer of rinse bath
Side.Accordingly even when certain displacement occurs with respect to support column for boom, the particle that phase mutual friction between the two generates will not fall
It falls in rinse bath, to ensure that the cleaning ability of cleaning solution.
8. mask cleaning device provided by the invention, the angle between clamping jaw and a pair of of mask clamping piece is 90 °,
Mask will be fixed on corresponding position under the effect of gravity in this way, will not shift in fetching structure lifting process,
Further reduce the particle that friction generates.
9. mask cleaning device provided by the invention, the setting of rinse bath inner upper end location structure is so that mask exists
It is capable of fixing after being moved out cleaning solution in the top of rinse bath, consequently facilitating sufficiently drop is except the remaining cleaning on mask
Liquid reduces the cross contamination of different cleaning solutions.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the schematic diagram of the first embodiment of mask cleaning device provided by the invention；
Fig. 2 is the schematic diagram of second of embodiment of mask cleaning device provided by the invention；
Fig. 3 is the schematic diagram of the third embodiment of mask cleaning device provided by the invention.
Description of symbols:
1- rinse bath；2- microscope carrier；The first driving structure of 3-；4- mounting base；5- support frame；7- mask；11- partition；21-
First part；22- second part；23- support plate；31- support rod；32- actuator；51- mask fetches structure；53- boom；
221- supporting parts；511- clamping jaw；521- pedestal；522- support column.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
As long as in addition, the non-structure each other of technical characteristic involved in invention described below different embodiments
It can be combined with each other at conflict.
As described in background, existing mask cleaning machine be entered by the clamping jaw of boom in groove body solution to
Mask is cleaned, and is completed in cleaning, when clamping jaw and mask leave solution, is inevitably remained on clamping jaw
Solution, when clamping jaw and mask enter in next groove body, remaining solution can be with the solution in next groove body on clamping jaw
Cross contamination occurs for mixing, to affect to cleaning effect.In addition, due to solution in groove body generally in stream
Dynamic state, therefore the uniformity that two operative end surfaces of mask need to guarantee to contact with solution in the process of cleaning, otherwise can
Influence cleaning effect.
The clamping jaw clamping mask on boom mainly passes through about two stationary fixtures at present and two sides move clip
It completes, since clip needs move horizontally, to adjust the position that mask enters rinse bath, such clip is inevitably wanted
Occur rubbing action between the mounting base of top, move back and forth for a long time in this way the particle generated will fall mask with
And in the cleaning solution of lower section, the pollution of cleaning solution is caused, finally will affect the cleaning effect of mask.In addition, clip is from mask
The two sides of version, which are moved horizontally, applies chucking power to it, and rubbing action between the two in this way is larger, can also generate more particle.
Again, for mask when removing from a rinse bath, surface can adhere to a large amount of cleaning solutions, will also result in cleaning solution
Certain waste.
Based on this, the present invention provides a kind of mask cleaning devices, including rinse bath 1, microscope carrier 2 and the first driving structure
3。
Rinse bath 1 is cuboid container, and top is opening, and rinse bath 1 is provided with cleaning solution.In order to guarantee cleaning effect,
Rinse bath 1 can be arranged in parallel multiple, different cleaning solutions be contained in each rinse bath 1, so that mask 7 is successively through multiple
Rinse bath 1 meets cleaning requirement after cleaning.
Microscope carrier 2 includes the mask clamping piece 22 being arranged along the depth direction of the rinse bath 1, the mask clamping piece
22 for installing mask 7；First driving structure 3 is connect with the mask clamping piece 22, for driving the mask clamp bar
Gripping member 22 moves up and down in the rinse bath 1.Before cleaning, mask 7 can be installed by manually or mechanically arm and be fixed
On the mask clamping piece 22 of microscope carrier 2, microscope carrier 2 drives 7 synchronization lifting of mask to transport under the action of the first driving structure 3
It is dynamic.Mask 7 on the microscope carrier 2 has the operative end surface along the mask 7 under the action of the first driving structure 3
The cleaning positions and be at least partially exposed through outside cleaning solution that the extending direction of place plane is completely immersed in the cleaning solution
Fetch position.Mask 7 is inserted into cleaning solution along the vertical direction, and two opposite operative end surfaces of such mask 7 will be simultaneously
It is contacted with cleaning solution, cleaning solution cleans the same horizontal position of mask 7 in flow process simultaneously, to guarantee clear
The uniformity of 7 two operative end surfaces of washing lotion and mask contact, improves cleaning effect.
A kind of specific embodiment as shown in Figure 1, first driving structure 3 are set to the outside of the rinse bath 1,
Including setting up the crane outside the opposite two side walls of the rinse bath 1 separately, the microscope carrier 2 is connect with the crane；It is described
Crane sets up separately outside the opposite two side walls of the rinse bath 1；The crane include support rod 31 and with the support rod
The actuator 32 of 31 connections, the actuator 32 is for driving the movement of support rod 31 to drive the microscope carrier 2 in institute
It states and is moved up and down in rinse bath 1.
Specifically, crane can be a pair of of the crane set up separately outside the opposite two side walls of rinse bath 1, the crane
Upper end be higher than the upper end opening of the rinse bath 1 and be arranged, to reserve the rising space of microscope carrier 2, the top of microscope carrier 2 is higher than cleaning
It the upper end opening of slot 1 and is connected on crane, the highest point of mask 7 is slightly below the highest point installation of microscope carrier 2, so only need
Crane drives microscope carrier 2 to drop to the position flushed with the upper end opening of rinse bath 1, and entire mask 7 will be completely submerged in
It fills in the rinse bath 1 of cleaning solution, to carry out comprehensive cleaning.It is set on crane relative to by the middle part of microscope carrier 2, though
So by rotating microscope carrier 2 it is also possible that two operative end surfaces of mask 7 are completely attached to cleaning solution, but are being rotated through
Cheng Zhong, necessarily mask 7 a operative end surface is first contacted with cleaning solution, is contacted after another operative end surface with cleaning solution,
Due to the presence of sequencing, the inevitable uniformity for influencing cleaning solution and being contacted with two operative end surfaces, and then influence cleaning
Effect.The microscope carrier 2 includes a pair of of the mask clamping piece 22 set up separately on a pair of crane, the mask clamping
Part 22 is arranged along the depth direction of the rinse bath 1, has formed permission institute in the opposite two side walls of mask clamping piece 22
The groove body of the insertion of mask 7 is stated, the spacing between a pair of of mask clamping piece 22 can be adjusted according to the size of mask 7
Whole, the mask 7 is mounted in the groove body of the mask clamping piece 22.Mask 7 is mounted on by way of insertion
It is easy for installation on mask clamping piece 22, wherein, can be between mask 7 and groove body after the installation of mask 7 is into groove body
Certain gap is kept, so, it is possible to guarantee that mask 7 comes into full contact with cleaning solution, improve cleaning effect, while mask clamp bar
Gripping member 22 can also play the role of permanent mask version 7, prevent the flowing of cleaning solution from being washed upside down, and influence cleaning effect, inconvenient
In taking-up.
Further, the crane includes support rod 31 and the actuator 32 that connect with the support rod 31, the drive
Moving part 32 is for driving the movement of support rod 31 to drive the microscope carrier 2 to move up and down in the rinse bath 1.
Specifically, the support rod 31 on crane may include screw rod, and actuator 32 may include motor, wherein screw rod
Bottom end and the output shaft of motor connected by bearing, motor connect with PLC control system, and PLC control system control motor is just
Reversion, and then drive screw rod elevating movement.Wherein, mask clamping piece 22 can be L shape, the first part 21 of L clevis gripping member
It is connect by mounting base 4 with the nut on the screw rod, forming in mounting base 4 allows first part 21 and nut to be inserted into respectively
Mounting hole, nut converts the rotary motion of screw rod to the straight line elevating movement of mounting base 4, to drive the synchronous fortune of crane
It is dynamic；Second part 22 extends along the depth direction of the rinse bath 1, and in the second part 22 close to the rinse bath 1
Bottom is equipped with several supporting parts 221, and the groove body for allowing the mask 7 to be inserted into is formed on the supporting parts 221.Supporting parts
221 for the integrally formed convex block of second part 22, convex block is distributed with multiple along the depth direction of rinse bath 1, forms on convex block
There is the mounting groove of mask 7.
It further include that mask fetches structure 51, it includes folder that the mask, which fetches structure, for the ease of the pick-and-place of mask 7
The position of the liquid level of cleaning solution in at least above described rinse bath 1 is arranged in pawl 511, the clamping jaw 511,
Preferably, the clamping jaw 511 is higher than at the top of the rinse bath 1 and is arranged；
Preferably, the mask cleaning device further includes the support frame 5 that 1 outside of rinse bath is arranged in, described to cover
Template fetches structure setting on support frame as described above 5；
Preferably, support frame as described above 5 includes the support column 522 outside the rinse bath 1, and with the support column
522 are connected and are located at the boom 53 of 1 top of rinse bath；The mask fetches structure setting on the boom 53；
Preferably, the mask fetches structure edge and is movably disposed at institute perpendicular to 1 depth direction of rinse bath
It states on boom 53 or the boom 53 is arranged along perpendicular to 1 depth direction of rinse bath is telescopic in the support column
On 522；
Preferably, support column 522 is along the scalable setting of 1 depth direction of rinse bath.
In the present embodiment, the support column 522 is internally provided with the second driving structure, and second driving structure is used for
The boom 53 is driven to move along the direction perpendicular to the support column 522,
Preferably, the boom 53 includes the first boom and the second boom, and the clamping jaw 511 includes the first clamping jaw and second
Clamping jaw, first clamping jaw are arranged on the first boom, and second clamping jaw is arranged on the second boom；
Preferably, second driving structure is for driving first boom with the second boom movement so that described
First clamping jaw and second clamping jaw generate relative movement；
Preferably, second driving structure includes being respectively used to drive first boom and second boom mobile
Two the second driving structures.
For the ease of the pick-and-place of mask 7, it is additionally provided with support frame 5 in the outside of rinse bath 1, support frame 5 includes support column
522, along the boom 53 perpendicular to the setting of 1 depth direction of rinse bath, and along the mask for being parallel to the setting of 1 depth direction of rinse bath
Version fetches structure 51, and the clamping jaw 511 that mask fetches structure 51 is at least above the position of the liquid level of cleaning solution in rinse bath 1, such as
This, can keep clamping jaw not generate with cleaning solution and contact, to reduce pollution of the cleaning solution to clamping jaw.Mask fetches structure 51
Clamping jaw 511.The junction of boom 53 and support column 522 is located at the outside of the rinse bath 1.It is provided on the support column 522
Second driving structure, second driving structure is for driving the boom 53 along the depth direction perpendicular to the rinse bath 1
It is mobile, wherein boom 53 may include the first boom and the second boom, and the second driving structure corresponds to the first boom and the second boom
Two are set as, the first boom of control is respectively used to and the second boom generates opposite shifting on the direction perpendicular to support column 522
It is dynamic, wherein the second driving structure can be cylinder or motor.Accordingly even when occurring centainly between boom 53 and support column 522
Displacement, the particle that the two friction generates will not be fallen into rinse bath, to ensure that the cleanliness of cleaning solution.
Support frame 5 includes the support column 522 for being set to the side of rinse bath 1 and the pedestal for being set to 1 bottom end of rinse bath
521, support column 522 is along the scalable setting of depth direction for being parallel to rinse bath 1, convenient for the pick-and-place of mask 7,521 He of pedestal
Rinse bath 1 is fixedly connected, and boom 53 is connected on support column 522, and mask fetches one end that structure 51 is mounted on boom 53, with
Boom 53 is integrally formed.Specifically, as shown in Fig. 2, the mask, which fetches, forms a pair of folder being oppositely arranged in structure 51
Pawl 511, it is preferable that 90 ° of angle is formed on each clamping jaw 511.Specifically, clamping jaw 511 by two and horizontal plane at
The inclined plate of 45 ° of angles is formed, and carries out automatic standard under the effect of gravity convenient for mask 7；A pair mask being oppositely arranged
Angle between clamping piece 22 may be 90 °, and the angle between the groove body and horizontal plane of each mask clamping piece is
45°；In order to further increase the stability of installation, the bottom of a pair of of mask clamping piece 22 is equipped with a supporting parts 221, this holds
An opening up groove body is formed in supporting piece 221.
For the cross contamination being further reduced between different cleaning solutions, the limiting device includes limit sensors, institute
Limit sensors are stated for sending out sensing signal when the mask 7 reaches predetermined position；Preferably, the limiting device also wraps
Telescopic Fixed device is included, and the Telescopic Fixed device is used to the mask 7 is fixed on according to the sensing signal described pre-
Positioning is set.
Specifically, limit dress is equipped with close to the position of the upper end opening of the rinse bath 1 on the inner wall of the rinse bath 1
It sets, the upper surface that limiting device is higher than cleaning solution is arranged.Specifically, the limiting device includes setting up separately described in opposite two
Limit sensors on inner wall, when mask 7 rises to predetermined position, limit sensors issue sensing signal, control driving
Part 32 shuts down, so that mask 7 stops at predetermined position, and mask 7 is hung or is dried until remaining cleaning
Liquid is sufficiently removed.
Further, the limiting device can also include Telescopic Fixed device.When limit sensors detect mask 7
When reaching predetermined position, limit sensors issue sensing signal, and Telescopic Fixed device consolidates mask 7 according to the detection signal
It is scheduled on the predetermined position.The line of limit sensors and Telescopic Fixed device perpendicular to mask 7 operative end surface, and in order to protect
The accuracy and fixed stability of detection are demonstrate,proved, limit sensors and Telescopic Fixed device can be symmetrical arranged two.Wherein, it stretches
The fixed device that contracts includes third driving structure and the telescopic rod with the output axis connection of third driving structure, and mask 7 is equipped with
Through-hole corresponding with the telescopic rod.After limit sensors detect that mask 7 moves to the predetermined position above cleaning solution,
Controller is sent a signal to, controller control third driving structure driving telescopic rod is retractable to the through-hole on mask 7, with
It is fixed, and hangs or dry until remaining cleaning solution is sufficiently removed.
When needing to clean mask 7, the mask that mask 7 is mounted on 53 lower section of boom is fetched into knot first
In structure 51, and position corresponding with a pair of of mask clamping piece 22 is dropped to, boom 53 and mask fetch structure 51 towards hanging down
Directly in 7 operative end surface of mask and separate direction movement, so that mask 7, which is detached from mask, fetches structure 51, and install
It is fixed in the groove body of a pair of of mask clamping piece 22, PLC control system controls actuator 32 (motor) rotation, and drives support
Bar 31 (screw rod) rotates, and the nut on screw rod transports the decline that the rotary motion of screw rod is converted into a pair of of mask clamping piece 22
It is dynamic, until mask 7 is completely submerged in cleaning solution, the dirt under the continuous flushing action of the cleaning solution of flowing, on mask 7
Stain is once cleaned.Then PLC control system control motor rotates backward, effect of a pair of of mask clamping piece 22 in motor
Under rise to mask 7 and completely reveal cleaning solution.Limit sensors detect that mask 7 reaches dry place, send signal
To controller, controller controls the movement of third driving structure, and telescopic rod is driven to be retractable to the through-hole on mask 7, with
It is fixed, and hangs or dry until remaining cleaning solution is sufficiently removed, telescopic rod is retracted to initial position.Mask fetches
Structure 51 clamps the mask 7 after once cleaning, and is transferred in next rinse bath 1 and continues to clean.
Another specific embodiment as shown in Figure 3, the rinse bath 1 are internally provided with a partition 11, the partition
11 are divided into the rinse bath 1 first area and the second area of seal isolation, and the cleaning solution and the microscope carrier 2 are located at institute
First area is stated, first driving structure 3 is at least partially disposed in the second area,
Preferably, the first area is located at the top of the second area；
Preferably, first driving structure 3 includes support rod 31 and the actuator 32 connecting with the support rod 31, institute
It states actuator 32 and is located at the second area, for driving the support rod 31 to move along the direction perpendicular to the partition 11,
The support rod 31 is arranged through the partition 11, extends to the first area, the microscope carrier 2 is set to the support rod 31
One end far from the actuator 32.
Specifically, rinse bath 1 is internally provided with a partition 11, and partition 11 is arranged close to the lower part of rinse bath 1, can with it is clear
Washing trough 1 is integrally machined molding, and cleaning solution and microscope carrier 2 are located at the top of partition 11, and the first driving structure 3 is at least partially disposed in partition
11 lower part.Specifically, the first driving structure 3 includes actuator 32 and support rod 31, wherein actuator 32 is motor, branch
Strut 31 is screw rod, and screw rod is connected with motor, and motor is located at the lower part of partition 11, to prevent solution from entering inside motor or to horse
Up to certain corrosion is caused, screw rod is arranged through partition 11.Corrosion of the cleaning solution to support rod 31 (screw rod) in order to prevent, and
Friction generates Particle to pollute to cleaning solution when preventing support rod 31 from moving up and down in rinse bath 1, supports
The periphery that bar 31 (screw rod) is located at 11 top of partition is arranged with protective cover 6, and the protective cover 6 is with the support rod 31 (screw rod)
Scalable setting is gone up and down, in this way, telescopic protective cover 6 can more be coated on screw rod with elevating movement is located at the firstth area
The part in domain, wherein protective cover 6 can be made of the anti-corrosion material with multilayer folding layer.
Microscope carrier 2 includes a pair of of mask set on the support plate 23 on 32 top of actuator and set on 23 upper end of support plate
Clamping piece 22, the mask 7 are mounted on the slot that the depth direction along the rinse bath 1 of mask clamping piece 22 extends
In.Support plate 23 is welded on the top of support rod 31 (screw rod), and the spacing of mask clamping piece 22 is set according to the size of mask 7
It sets, slot is provided on two opposite end faces of a pair of of mask clamping piece 22.
Another specific embodiment as shown in Figure 3, the boom 53 include the first boom and the second boom, the folder
Pawl 511 includes the first clamping jaw and the second clamping jaw, and first boom and first clamping jaw are integrally formed, second boom and
Second clamping jaw is integrally formed, second driving structure for drive first boom and second boom it is mobile with
First clamping jaw and second clamping jaw is set to generate relative movement, second driving structure includes being respectively used to described in driving
Two the second actuators of the first boom and second boom movement.First clamping jaw and the second clamping jaw respectively in the first boom and
On second boom along 1 depth direction of rinse bath be distributed, the second driving structure be two motors or cylinder, respectively with the first clamping jaw and
Mask 7 is clamped to the first clamping jaw to control the spacing between the first clamping jaw and the second clamping jaw by the connection of the second clamping jaw
And second between clamping jaw.First clamping jaw and second clamping jaw are symmetrical arranged, it is preferable that on each clamping jaw 511 at
Type has the clamping end that angle is 90 °.Specifically, mask fetches and forms a pair of symmetrically arranged clamping jaw 511 in structure 51, the
Being oppositely arranged on one side with groove body, two opposite corners of mask 7 are fixed on one clamping jaw and the second clamping jaw.Positioned at one
To the clamping rectify it is plastic on the mask clamping piece of lower section to have angle be 90 ° of groove body, when mask 7 is transferred to one
When on clamping jaw 511, the groove body of 7 the lowermost corner of mask and the mask clamping piece, which is installed, to be fixed.
As alternative embodiment, motor may be replaced by cylinder, and the charge and discharge of cylinder is controlled by PLC control system
Gas and then the lifting for driving microscope carrier 2.
As alternative embodiment, microscope carrier 2 and the first driving structure 3 be may be provided in rinse bath 1, only be needed conduct
The actuator 32 (motor or cylinder) of first driving structure 3 is placed in a waterproof shell.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (10)
1. a kind of mask cleaning device characterized by comprising
Rinse bath (1), for accommodating cleaning solution；
Microscope carrier (2), the mask clamping piece (22) including the depth direction setting along the rinse bath (1), the mask clamp bar
Gripping member (22) is for installing mask (7)；
First driving structure (3) is connect with the mask clamping piece (22), for driving the mask clamping piece (22) to exist
It is moved up and down in the rinse bath (1).
2. mask cleaning device according to claim 1, which is characterized in that formed on the mask clamping piece (22)
There is the groove body for allowing the mask (7) to be inserted into.
3. mask cleaning device according to claim 1, which is characterized in that first driving structure (3) is set to
The outside of the rinse bath (1),
Preferably, first driving structure (3) includes crane, and the microscope carrier (2) connect with the crane；
Preferably, the crane sets up separately outside the opposite two side walls of the rinse bath (1)；
Preferably, the crane includes support rod (31) and the actuator (32) connecting with the support rod (31), the drive
Moving part (32) is for driving the support rod (31) movement to drive the microscope carrier (2) to do lifting fortune in the rinse bath (1)
It is dynamic.
4. mask cleaning device according to claim 1, which is characterized in that the rinse bath (1) is internally provided with one
Partition (11), the rinse bath (1) is divided into first area and the second area of seal isolation by the partition (11), described clear
Washing lotion and the microscope carrier (2) are located at the first area, and first driving structure (3) is at least partially disposed in secondth area
Domain,
Preferably, the first area is located at the top of the second area；
Preferably, first driving structure (3) includes support rod (31) and the actuator that connect with the support rod (31)
(32), the actuator (32) is located at the second area, for driving the support rod (31) along perpendicular to the partition
(11) direction is mobile, and the support rod (31) is arranged through the partition (11), extends to the first area, the microscope carrier
(2) it is set to the one end of the support rod (31) far from the actuator (32).
5. mask cleaning device according to claim 4, which is characterized in that the support rod (31) is located at described first
The periphery of the part in region is arranged with protective cover (6), and the protective cover (6) scalable sets with the lifting of the support rod (31)
It sets.
6. mask cleaning device according to claim 1, which is characterized in that it further include that mask fetches structure (51),
It includes clamping jaw (511) that the mask, which fetches structure (51), and the clamping jaw (511) is arranged in at least above described rinse bath (1)
The position of the liquid level of middle cleaning solution,
Preferably, the clamping jaw (511) is higher than setting at the top of the rinse bath (1)；
Preferably, the mask cleaning device further includes the support frame (5) being arranged on the outside of the rinse bath (1), described to cover
Template fetches structure setting on support frame as described above (5)；
Preferably, support frame as described above (5) includes support column (522) external positioned at the rinse bath (1), and with the support
Column (522) is connected and is located at the boom (53) above the rinse bath (1)；The mask fetches structure setting and hangs described
On arm (53)；
Preferably, it is described along being movably disposed at perpendicular to the rinse bath (1) depth direction to fetch structure for the mask
On boom (53) or the boom (53) is arranged along perpendicular to the rinse bath (1) depth direction is telescopic in the branch
On dagger (522)；
Preferably, support column (522) is along the scalable setting of the rinse bath (1) depth direction.
7. mask cleaning device according to claim 6, which is characterized in that the support column (522) is internally provided with
Second driving structure, second driving structure are used to drive the boom (53) along the side perpendicular to the support column (522)
To movement,
Preferably, the boom (53) includes the first boom and the second boom, and the clamping jaw (511) includes the first clamping jaw and second
Clamping jaw, first clamping jaw are arranged on the first boom, and second clamping jaw is arranged on the second boom；
Preferably, second driving structure is for driving first boom and second boom movement so that described first
Clamping jaw and second clamping jaw generate relative movement；
Preferably, second driving structure includes be respectively used to drive first boom and second boom movement two
A second driving structure.
8. mask cleaning device according to claim 7, which is characterized in that first clamping jaw and second clamping jaw
It is symmetrical arranged, it is preferable that form the clamping end that angle is 90 ° on each clamping jaw (511).
9. mask cleaning device described in -8 according to claim 1, which is characterized in that leaned on the inner wall of the rinse bath (1)
The position of the upper end opening of the nearly rinse bath (1) is equipped with limiting device, and the limiting device is for sensing and fixing described cover
The position of template.
10. mask cleaning device according to claim 9, which is characterized in that the limiting device includes limit sensing
Device, the limit sensors are used to send out sensing signal when the mask (7) reach predetermined position；Preferably, the limit
Device further includes Telescopic Fixed device, and the Telescopic Fixed device is used for according to the sensing signal that the mask (7) are solid
It is scheduled on the predetermined position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910256333.3A CN110026372A (en) | 2019-03-29 | 2019-03-29 | A kind of mask cleaning device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910256333.3A CN110026372A (en) | 2019-03-29 | 2019-03-29 | A kind of mask cleaning device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110026372A true CN110026372A (en) | 2019-07-19 |
Family
ID=67237152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910256333.3A Pending CN110026372A (en) | 2019-03-29 | 2019-03-29 | A kind of mask cleaning device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110026372A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112871831A (en) * | 2020-12-31 | 2021-06-01 | 常州高光半导体材料有限公司 | Mask dust and oil removing equipment |
| CN114721231A (en) * | 2022-04-17 | 2022-07-08 | 江苏晟驰微电子有限公司 | Tool clamp for cleaning photoetching plate |
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Application publication date: 20190719 |