CN110007556A - A kind of electromagnetic induction heating type nano-imprinting device - Google Patents
A kind of electromagnetic induction heating type nano-imprinting device Download PDFInfo
- Publication number
- CN110007556A CN110007556A CN201910259870.3A CN201910259870A CN110007556A CN 110007556 A CN110007556 A CN 110007556A CN 201910259870 A CN201910259870 A CN 201910259870A CN 110007556 A CN110007556 A CN 110007556A
- Authority
- CN
- China
- Prior art keywords
- electromagnetic induction
- lifting platform
- lifting
- induction heating
- heating type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005674 electromagnetic induction Effects 0.000 title claims abstract description 24
- 238000010438 heat treatment Methods 0.000 title claims abstract description 24
- 230000005307 ferromagnetism Effects 0.000 claims abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 6
- 238000004804 winding Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 abstract description 6
- 230000005291 magnetic effect Effects 0.000 description 8
- 239000003302 ferromagnetic material Substances 0.000 description 4
- 230000006698 induction Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000009529 body temperature measurement Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
- 230000005417 remagnetization Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B6/00—Heating by electric, magnetic or electromagnetic fields
- H05B6/02—Induction heating
- H05B6/10—Induction heating apparatus, other than furnaces, for specific applications
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- General Induction Heating (AREA)
Abstract
The invention discloses a kind of electromagnetic induction heating type nano-imprinting devices, including coining chamber, lifting platform, pressure-bearing platform and lifting column.Wherein, lifting platform is located at the top of coining chamber, and electromagnetic induction coil, substrate and ferromagnetism template are sequentially placed on lifting platform；Pressure-bearing platform is fixed on lifting column, and is located at the top of lifting platform；Lifting platform is connect with lifting column, and can be moved up and down along lifting column；Coining chamber is connect by forcing pipe with pressurizer.The device of the invention may be implemented hot nano impression be rapidly heated and fast cooling, greatly improve the efficiency of nano impression.
Description
Technical field
The invention belongs to micro-nano manufacture fields, and in particular to a kind of electromagnetic induction heating type nano-imprinting device.
Background technique
The rapid development with rapid changepl. never-ending changes and improvements for be unableing to do without micro-nano processing technology of science and technology, nanometer embossing are based on as one kind
The processing method that physics forming method forms patterning can have low cost, high yield by printing by template massive duplication
The advantages of amount, ultrahigh resolution.
Currently, the major way of nano impression heating is resistance-type heating, i.e., stainless steel base is made by resistive heater
Heating, and so that impression materials is warming up to glass transition temperature or more, this heating method low efficiency, loss by heat transfer
Greatly, bulk temperature is high and cooling is slow, has seriously affected the efficiency of hot padding.
Electromagnetic induction heating is to generate alternating magnetic field by the alternating current in coil, the ferromagnetic material in alternating magnetic field
Expect surface fly-cutting magnetic induction line, to generate alternating current of inducting (that is: being vortexed), vortex exacerbates the atom fortune of ferromagnetic material
It is dynamic to realize quick heat production, therefore electromagnetic induction heating has many advantages, such as that heating efficiency is high, safe, easy to control.
Summary of the invention
In order to overcome the defect and deficiency of the above prior art, the object of the present invention is to provide one kind can be realized quick liter
The electromagnetic induction heating type nano-imprinting device of mild fast cooling.
The technical solution adopted by the invention is as follows:
A kind of electromagnetic induction heating type nano-imprinting device, including coining chamber, lifting platform, pressure-bearing platform and lifting column, it is described
Lifting platform is located at the top of coining chamber, and electromagnetic induction coil, substrate and ferromagnetism template are sequentially placed on lifting platform；It is described to hold
It presents a theatrical performance as the last item on a programme and is fixed on lifting column, and be located at the top of lifting platform；The lifting platform is connect with lifting column, and can be along on lifting column
Lower movement；The coining chamber is connect by forcing pipe with pressurizer.
Further, the bottom of the lifting platform is provided with coining chamber vacuum evacuation device.
Further, thermocouple is provided between the substrate and ferromagnetism template.
Further, the electromagnetic induction coil is connect with Temperature Control Type switch and electromagnetic induction controller respectively.
Further, the electromagnetic induction coil uses the winding mode of spiral of Archimedes circle.
The device of the invention is the magnetic hysteresis using the Joule heat and ferromagnetism template of vortex generation during remagnetization
Heat production is lost to realize being rapidly heated for template.Device generates alternating current using electromagnetic induction controller, and alternating current is in electricity
Alternating magnetic field is generated in magnetic induction coil, the fly-cutting magnetic induction line generation in alternating magnetic field of the template surface of ferromagnetic material is inducted
Alternating current (vortex), vortex accelerate the atomic motion of ferromagnetic material to realize being rapidly heated for template.In temperature-fall period, due to
Template is small, and thermal capacity is small, and system temperature can decline rapidly to realize fast cooling after closing Temperature Control Type switch.Electromagnetism simultaneously
Induction coil can achieve the effect of homogeneous heating using the winding mode of spiral of Archimedes circle.
Compared with prior art, the present invention greatly shortening heating-up time and temperature fall time, hot nano impression is improved
Efficiency both can avoid impression materials and be integrally heated and melt simultaneously because template self-heating and directly acting on contact surface,
Quickly local hot padding can be realized again, had a good application prospect.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of apparatus of the present invention.
Specific embodiment
In the following with reference to the drawings and specific embodiments, the present invention is furture elucidated, it should be appreciated that these embodiments are merely to illustrate
It the present invention rather than limits the scope of the invention, after the present invention has been read, those skilled in the art are to of the invention each
The modification of kind equivalent form falls within the application range as defined in the appended claims.
As shown in Figure 1, the present invention provides a kind of electromagnetic induction heating type nano-imprinting device, including coining chamber 1, lifting platform
3, pressure-bearing platform 2 and lifting column 4, lifting platform 3 are located at the top of coining chamber 1, and electromagnetic induction coil 6, lining are sequentially placed on lifting platform 3
Nickel template can be used in the ferromagnetism template 9 of bottom 8 and ferromagnetism template 9, the present embodiment.It imprints there are four being arranged in chamber 1 towards pressure
The lifting column 4 that 1 top of print chamber longitudinally extends, lifting column 4 run through pressure-bearing platform 2 and lifting platform 3, and pressure-bearing platform 2 is fixed on lifting column 3
On, and it is located at the top of lifting platform 3.Lifting platform 3 is connect with lifting column 3, and can be moved up and down along lifting column 3.It is logical to imprint chamber 1
Pipe 71 is overpressurized to connect with pressurizer 7.
Electromagnetic induction coil 6 using spiral of Archimedes circle winding mode, by conducting wire and Temperature Control Type switch 10 and
Electromagnetic induction controller 11 connects, and regulates and controls heating power by controller, passes through switch control heating and cooling.The bottom of lifting platform 3
It is provided with coining chamber vacuum evacuation device 5.It is provided with thermocouple 12 between substrate 8 and ferromagnetism template 9 and carries out temperature measurement.
The operating procedure of the present embodiment device includes: to place sample to be imprinted and ferromagnetism template 9, lifting platform 3 move up with
Pressure-bearing platform 2 opens coining chamber vacuum evacuation device 5 after being bonded, then adjust heating power opening Temperature Control Type switch 10 and heated,
Pressurization starts to imprint after set temperature to be achieved, and Temperature Control Type switch 10 is closed after the completion of coining and is cooled down, to ferromagnetism template 9
Sample is taken out after cooling.
Claims (5)
1. a kind of electromagnetic induction heating type nano-imprinting device, including coining chamber (1), lifting platform (3), pressure-bearing platform (2) and lifting
Column (4), which is characterized in that the lifting platform (3) is located at the top of coining chamber (1), is sequentially placed electromagnetism sense on lifting platform (3)
Answer coil (6), substrate (8) and ferromagnetism template (9)；The pressure-bearing platform (2) is fixed on lifting column (4), and is located at lifting platform
(3) top；The lifting platform (3) connect with lifting column (4), and can move up and down along lifting column (4)；The coining chamber
(1) it is connect by forcing pipe (71) with pressurizer (7).
2. a kind of electromagnetic induction heating type nano-imprinting device according to claim 1, which is characterized in that the lifting platform
(3) bottom is provided with coining chamber vacuum evacuation device (5).
3. a kind of electromagnetic induction heating type nano-imprinting device according to claim 1, which is characterized in that the substrate
(8) it is provided between ferromagnetism template (9) thermocouple (12).
4. a kind of electromagnetic induction heating type nano-imprinting device according to claim 1, which is characterized in that the electromagnetism sense
Coil (6) is answered to connect respectively with Temperature Control Type switch (10) and electromagnetic induction controller (11).
5. a kind of electromagnetic induction heating type nano-imprinting device according to claim 1, which is characterized in that the electromagnetism sense
Coil (6) are answered to use the winding mode of spiral of Archimedes circle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910259870.3A CN110007556A (en) | 2019-04-02 | 2019-04-02 | A kind of electromagnetic induction heating type nano-imprinting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910259870.3A CN110007556A (en) | 2019-04-02 | 2019-04-02 | A kind of electromagnetic induction heating type nano-imprinting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110007556A true CN110007556A (en) | 2019-07-12 |
Family
ID=67169452
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910259870.3A Pending CN110007556A (en) | 2019-04-02 | 2019-04-02 | A kind of electromagnetic induction heating type nano-imprinting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110007556A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023136727A1 (en) * | 2022-01-17 | 2023-07-20 | Morphotonics Holding B.V. | Flexible stamp and method for manufacturing a flexible stamp |
| EP4307048A1 (en) * | 2022-07-11 | 2024-01-17 | Morphotonics Holding B.V. | Electrical flexible stamp |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2842969Y (en) * | 2005-11-29 | 2006-11-29 | 李茂军 | Electromagnetic induction heater |
| CN107561856A (en) * | 2017-08-23 | 2018-01-09 | 无锡英普林纳米科技有限公司 | A kind of Intelligent pressing nano marking press |
| CN107608176A (en) * | 2017-08-23 | 2018-01-19 | 无锡英普林纳米科技有限公司 | A kind of pressure adjust automatically nano marking press |
-
2019
- 2019-04-02 CN CN201910259870.3A patent/CN110007556A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2842969Y (en) * | 2005-11-29 | 2006-11-29 | 李茂军 | Electromagnetic induction heater |
| CN107561856A (en) * | 2017-08-23 | 2018-01-09 | 无锡英普林纳米科技有限公司 | A kind of Intelligent pressing nano marking press |
| CN107608176A (en) * | 2017-08-23 | 2018-01-19 | 无锡英普林纳米科技有限公司 | A kind of pressure adjust automatically nano marking press |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023136727A1 (en) * | 2022-01-17 | 2023-07-20 | Morphotonics Holding B.V. | Flexible stamp and method for manufacturing a flexible stamp |
| EP4307048A1 (en) * | 2022-07-11 | 2024-01-17 | Morphotonics Holding B.V. | Electrical flexible stamp |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190712 |