CN109585120A - Permanent magnet magnetization method based on magnetic seal transcription technology - Google Patents
Permanent magnet magnetization method based on magnetic seal transcription technology Download PDFInfo
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- CN109585120A CN109585120A CN201811325924.3A CN201811325924A CN109585120A CN 109585120 A CN109585120 A CN 109585120A CN 201811325924 A CN201811325924 A CN 201811325924A CN 109585120 A CN109585120 A CN 109585120A
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- magnetic
- thin film
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- magnetic seal
- permanent magnet
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F13/00—Apparatus or processes for magnetising or demagnetising
- H01F13/003—Methods and devices for magnetising permanent magnets
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- Thin Magnetic Films (AREA)
- Hard Magnetic Materials (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
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Abstract
The invention discloses the permanent magnet magnetization method based on magnetic seal transcription technology, step includes: 1) to prepare magnetic seal and body to be marked, and the Curie temperature of the permanent magnetic thin film of the magnetic seal is higher than the Curie temperature of the permanent magnetic thin film of body to be marked；2) lower surface of the magnetic seal prepared is bonded with the upper surface of body to be marked, is then heated, then gradually annealed, thus by the magnetic transcription of magnetic seal to wait mark on body.Compared to conventional method, the present invention can easily realize magnetic history, and be suitable for any substrate, expand the scope of application significantly.
Description
Technical field
The present invention relates to the magnetization technology fields of membranaceous permanent magnet, and in particular to the permanent magnetism based on magnetic seal transcription technology
Body Magnitizing method.
Background technique
Actuator miniaturization and it is integrated be realize current technological development trend and industry needs, for make it is small-sized
Change high-performance micromagnetism actuator, needs to make the permanent magnet of miniaturization.However, the assembly to small magnet, the operations such as magnetization are multiple
It is miscellaneous.To solve this problem, Fujiwara et al. has used the method for laser thermally assisted magnetic to realize a kind of thin-film permanent magnet
Microsize region magnetizes (bibliography: Fujiwara, et al, " Micromagnetization patterning of
Sputtered NdFeB/Ta multilayered films utilizing laser assisted heating ",
Sensors and Actuators A:Physical, Vol. 220, pp. 298-304,2014.), as shown in Figure 1, should
Technology is formed substantially according to following steps: 1, being formed a film, magnetize (PM film deposition and pulse
Magnetization)；2, apply external magnetic field (Application of external DC magnetic field)；3, swash
Light heats (Laser heating)；4, region magnetic pole overturning (Partial magnetization reversal)；5, laser is swept
It retouches and completes film micro area magnetization (micro magnetization).The technology can the heating easy to accomplish to permanent magnetic thin film magnetize,
But in order to realize the local heating to permanent magnetic thin film, it is necessary to using the good quartz base plate of thermal insulation, to other thermal insulations
Substrate such as Si, metal of difference etc. is not applicable, therefore has limited to the scope of application of the technology significantly.
Summary of the invention
It is an object of the invention in view of the above-mentioned problems, providing the permanent magnet magnetization side based on magnetic seal transcription technology
Method, this Magnitizing method is easy to operate, and the requirement to substrate without thermal insulation.
To achieve the above object, the present invention is special using the permanent magnet magnetization method as follows based on magnetic seal transcription technology
Sign is that steps are as follows:
1) magnetic seal and body to be marked are prepared；
The body to be marked includes underlying substrate and permanent magnetic thin film, and the permanent magnetic thin film of body to be marked selects Fe-B rare-earth permanent magnet
(NdFeB).Because the underlying substrate deposited to NdFeB permanent magnet does not have the requirement of thermal insulation, made in deposition
Cheng Zhong need to only meet and bear process environments, such as film deposition temperature, baking oven heating temperature.Further, the magnetic print
The Curie temperature of the permanent magnetic thin film of chapter is higher than the Curie temperature of the permanent magnetic thin film of body to be marked.
The magnetic seal includes the permanent magnetic thin film of top substrate layer and carrying magnetic pattern.The permanent magnetic thin film of carrying magnetic pattern is selected
Be shirt cobalt rare-earth permanent magnet (SmCo)；The top substrate layer substrate excellent using thermal insulation, such as quartz base plate etc..So,
SmCo permanent magnet need to be deposited in the excellent top substrate layer of thermal insulation, be made by conventional laser thermally assisted magnetic technology,
Required magnetic pattern is written in magnetic seal.
2) lower surface of the magnetic seal prepared is bonded with the upper surface of body to be marked, i.e. the lower surface of SmCo film
It is bonded with the upper surface of NdFeB film, is then heated, heating temperature rises to the Curie temperature of NdFeB, then gradually moves back
Fire, thus by the magnetic pattern transcription of magnetic seal to wait mark on body.
In step 2, the heating requirements are as follows: heating temperature is greater than the Curie temperature of NdFeB, and heating temperature is less than
The Curie temperature of SmCo.
In step 2, the process gradually annealed and requirement are as the hot magnetization process of body to be marked.
In the heating process of step 2, when the temperature wait mark body reaches Curie temperature, itself does not both have magnetic
Property, and coercive force also becomes zero.And the Curie temperature of magnetic seal has not yet been reached at this time, still have magnetism, can for magnetization to
It marks body and external magnetic field is provided.Under external magnetic field effect, the direction of magnetization of body to be marked can be along this magnetic direction.With
Temperature gradually cools down, and is finally completed magnetization.
Beneficial effects of the present invention are as follows:
Magnetization method of the invention is easy to operate, is suitable for any substrate；This method can be magnetized with mass, it is only necessary to prepare one
Magnetic seal is covered, then then can be recycled, realizes magnetizing for multiple batches of print body.
Detailed description of the invention
Fig. 1 is the step schematic diagram of the laser thermally assisted magnetic technology of background technique.
Fig. 2-4 is the realization step schematic diagram of magnetic seal transcription of the present invention.
Specific embodiment
Below by specific embodiment and cooperate attached drawing, the present invention is described in detail.
Based on the permanent magnet magnetization method of magnetic seal transcription technology, magnetization step is as follows:
1) magnetic seal and body to be marked are prepared；The body to be marked includes underlying substrate and permanent magnetic thin film, and the magnetic seal includes
The permanent magnetic thin film of top substrate layer and carrying magnetic pattern.
In the present embodiment, the Curie temperature of the permanent magnetic thin film as magnetic seal carrying magnetic pattern needs to be higher than body to be marked
The Curie temperature of permanent magnetic thin film.In the present embodiment, the material that the permanent magnetic thin film of magnetic seal is selected is shirt cobalt rare-earth permanent magnet
(SmCo), the material that the permanent magnetic thin film of body to be marked is selected is Fe-B rare-earth permanent magnet (NdFeB).
As in Figure 2-4, in the present embodiment: by using the mode of thermally assisted magnetic shown in FIG. 1 by required magnetic
Property pattern be written in magnetic seal, the substrate for needing to select thermal insulation excellent, thus magnetic seal top substrate layer using quartz
Substrate；And the substrate that NdFeB permanent magnet is deposited does not have the requirement of thermal insulation, is only subjected to process environments, such as film
Depositing temperature, baking oven heating temperature etc., therefore the underlying substrate of body to be marked can use any substrate.
In the present embodiment, the laser thermally assisted magnetic technology of magnetic seal is made, with reference to describing in background technique bibliography
Specific step and parameter index.
2) lower surface of the magnetic seal prepared is bonded with the upper surface of body to be marked, i.e. the lower surface of SmCo film
It is bonded with the upper surface of NdFeB film, is subsequently placed in oven and is heated, then gradually annealing (i.e. with furnace, that is, cold), thus
By the magnetic transcription of magnetic seal to wait mark on body.
In the present embodiment, the requirement of oven heat are as follows: the Curie temperature of the temperature > NdFeB of heating, and the temperature heated
The Curie temperature of < SmCo.
The principle process that the present invention realizes is as follows:
The magnetic seal prepared is bonded up and down with body to be marked, is then heated.During heating, when body to be marked
When temperature reaches Curie temperature, itself both do not have magnetism, and coercive force also becomes zero.And at this point, magnetic print has not yet been reached
The Curie temperature of chapter material still has magnetism, can provide external magnetic field to magnetize body to be marked.Under this magnetic fields, to
The direction of magnetization for marking body can be along this magnetic direction.As temperature gradually cools down, it is finally completed magnetization.
Claims (9)
1. the permanent magnet magnetization method based on magnetic seal transcription technology, it is characterised in that steps are as follows:
1) magnetic seal and body to be marked are prepared；Wherein, the Curie temperature of the permanent magnetic thin film of the magnetic seal is higher than body to be marked
The Curie temperature of permanent magnetic thin film；
2) the magnetic seal prepared is bonded with body to be marked, i.e. the lower surface of the permanent magnetic thin film of magnetic seal and body to be marked
The upper surface of permanent magnetic thin film be bonded, then heated, heating temperature rises to the Curie of the permanent magnetic thin film of body to be marked
Temperature, then gradually anneal, thus by the permanent magnetic thin film of the magnetic pattern transcription on the permanent magnetic thin film of magnetic seal to body to be marked.
2. the permanent magnet magnetization method according to claim 1 based on magnetic seal transcription technology, it is characterised in that: the magnetic
Seal includes the permanent magnetic thin film of top substrate layer and the carrying magnetic pattern positioned at lower layer.
3. the permanent magnet magnetization method according to claim 2 based on magnetic seal transcription technology, it is characterised in that: the band
The permanent magnetic thin film of magnetic pattern uses shirt cobalt rare-earth permanent magnet.
4. the permanent magnet magnetization method according to claim 2 or 3 based on magnetic seal transcription technology, it is characterised in that: institute
Top substrate layer is stated using quartz base plate.
5. the permanent magnet magnetization method according to claim 4 based on magnetic seal transcription technology, it is characterised in that: the magnetic
Seal is made of laser thermally assisted magnetic technology, required magnetic pattern is written in the permanent magnetic thin film of magnetic seal.
6. the permanent magnet magnetization method according to claim 1 based on magnetic seal transcription technology, it is characterised in that: it is described to
Marking body includes underlying substrate and the permanent magnetic thin film positioned at upper layer.
7. the permanent magnet magnetization method according to claim 6 based on magnetic seal transcription technology, it is characterised in that: it is described to
The permanent magnetic thin film for marking body selects Fe-B rare-earth permanent magnet.
8. the permanent magnet magnetization method according to claim 6 or 7 based on magnetic seal transcription technology, it is characterised in that: institute
Underlying substrate is stated using any substrate.
9. the permanent magnet magnetization method according to claim 1 based on magnetic seal transcription technology, it is characterised in that: step 2
In, the heating temperature is greater than the Curie temperature of NdFeB, and heating temperature is less than the Curie temperature of SmCo.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811325924.3A CN109585120B (en) | 2018-11-08 | 2018-11-08 | Permanent magnet magnetizing method based on magnetic seal transfer technology |
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| CN201811325924.3A CN109585120B (en) | 2018-11-08 | 2018-11-08 | Permanent magnet magnetizing method based on magnetic seal transfer technology |
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| CN109585120B CN109585120B (en) | 2021-02-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114141470A (en) * | 2021-11-29 | 2022-03-04 | 中国工程物理研究院电子工程研究所 | Micro-area magnetizing device and method based on MEMS (micro-electromechanical systems) micro-coil |
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| JPH0669034A (en) * | 1992-08-17 | 1994-03-11 | Daido Steel Co Ltd | Magnetizing coil for rodlike multipolar magnet and magnetizing device thereof |
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2018
- 2018-11-08 CN CN201811325924.3A patent/CN109585120B/en not_active Expired - Fee Related
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| CN1969210A (en) * | 2004-02-12 | 2007-05-23 | 帕诺拉马实验室有限公司 | Structured waveguide including holding bounding region |
| CN1755387A (en) * | 2004-09-28 | 2006-04-05 | 雅马哈株式会社 | Magnetic sensor using giant magnetoresistive elements and method for manufacturing the same |
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Cited By (1)
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| CN114141470A (en) * | 2021-11-29 | 2022-03-04 | 中国工程物理研究院电子工程研究所 | Micro-area magnetizing device and method based on MEMS (micro-electromechanical systems) micro-coil |
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