CN110006256A - A kind of practical diffusion furnace pushes away the anti-offset protective device of boat - Google Patents
A kind of practical diffusion furnace pushes away the anti-offset protective device of boat Download PDFInfo
- Publication number
- CN110006256A CN110006256A CN201910371321.5A CN201910371321A CN110006256A CN 110006256 A CN110006256 A CN 110006256A CN 201910371321 A CN201910371321 A CN 201910371321A CN 110006256 A CN110006256 A CN 110006256A
- Authority
- CN
- China
- Prior art keywords
- boat
- range sensor
- laser range
- paddle
- protective device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 title claims abstract description 15
- 230000001681 protective effect Effects 0.000 title claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000004519 manufacturing process Methods 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 8
- 230000008569 process Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000005493 welding type Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B17/00—Furnaces of a kind not covered by any preceding group
- F27B17/0016—Chamber type furnaces
- F27B17/0025—Especially adapted for treating semiconductor wafers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/0084—Charging; Manipulation of SC or SC wafers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/04—Ram or pusher apparatus
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D3/12—Travelling or movable supports or containers for the charge
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D3/00—Charging; Discharging; Manipulation of charge
- F27D2003/0034—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities
- F27D2003/0059—Means for moving, conveying, transporting the charge in the furnace or in the charging facilities comprising tracks, e.g. rails and wagon
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0059—Regulation involving the control of the conveyor movement, e.g. speed or sequences
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0071—Regulation using position sensors
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention discloses a kind of practical diffusion furnaces to push away the anti-offset protective device of boat; it is related to technical field of solar cell manufacturing; a kind of practical diffusion furnace of the invention pushes away the anti-offset protective device of boat; including quartz boat, laser range sensor one, laser range sensor two and SIC paddle; the quartz boat is placed on SIC paddle; the laser range sensor one and laser range sensor two are both secured on the paddle head bracket of SIC paddle; the present invention can detect the position deviation of quartz boat in time; quartz boat and silicon wafer are protected, avoids causing to damage because of deviation.
Description
Technical field
The invention belongs to technical field of solar cell manufacturing, and in particular to the practical diffusion furnace of one kind pushes away the anti-offset guarantor of boat
Protection unit.
Background technique
With the rapid development of photovoltaic industry, solar energy and photovoltaic cell goods producer's is continuously increased, most enterprise
The cost control of manufacture is required to become higher and higher, people tend to the capital equipment of solar-energy photo-voltaic cell production
Production domesticization, the research invention of equipment composition components and manufacturing cost tend to gradually reduce, succinct flexible operating characteristics at
For the principal concern of numerous battery product manufacturers.
For diffusion furnace, interior in a limited space, the quantity of single device boiler tube determines the production capacity of equipment, therefore
The device space is reduced as far as possible, and furnace body is vertically arranged, and the production capacity in unit workshop can be effectively improved, since furnace body layout is close
Collection, boiler tube is uniform in order to effectively guarantee to manage interior gas field, therefore quartz boat in the space of boiler tube internal operation than narrow.Simultaneously
The operation of paddle running gear long term high temperature environment, is easy to appear position deviation, once deviation is greater than the safety travel of boat, then will appear
Quartz boat cannot can smoothly enter into boiler tube, occur pushing away boat phenomenon, which is easy to cause product broken and quartz boat damage risk.
Summary of the invention
It is an object of the invention to: easily occur pushing away boat phenomenon to solve the prior art, causes product broken and quartz boat damage
Bad technological deficiency provides the practical diffusion furnace of one kind and pushes away the anti-offset protective device of boat.
The technical solution adopted by the invention is as follows:
A kind of practical diffusion furnace pushes away the anti-offset protective device of boat, including quartz boat, laser range sensor one, Laser Measuring
Away from sensor two and SIC paddle, the quartz boat is placed on SIC paddle, and the laser range sensor one and laser ranging pass
Sensor two is both secured on the paddle head bracket of SIC paddle.
Preferably, further including L-type support, the L-type support is fixed on paddle head bracket, the laser range sensor
One and laser range sensor two be fixed in L-type support at being arranged above and below.
Preferably, the quartz boat includes end plate, before the laser range sensor one sets detected value as end plate
5mm, 5mm after the laser range sensor two sets detected value as end plate.
Preferably, further including guide rail, the paddle head bracket is slidably connected with guide rail.
Preferably, the guide rail has two, two guide rails are arranged in parallel.
In conclusion by adopting the above-described technical solution, the beneficial effects of the present invention are:
1, in the present invention, by setting laser range sensor one and laser range sensor two, real time monitoring is deviated, when
Interrupt the power supply of paddle head mobile motor when deviating immediately, stopping movement protect quartz boat not to be damaged or silicon wafer breakage.
2, in the present invention, quartz boat is placed on SIC paddle, and the paddle head of SIC paddle is fixed on by the drive of paddle head mobile motor
It on driving belt, is moved with driving belt, is slidably connected by paddle head bracket with guide rail, the transmission of guide rail and driving belt
Direction is parallel, and the mobile route of paddle head bracket is limited by guide rail, using two guide rails, mitigates paddle head bracket and follows paddle head mobile
The load that motor frequent start-stop commutates to guide rail, improves the service life of guide rail.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is main view of the present invention.
Fig. 2 is partial enlarged view A of the present invention.
Fig. 3 is schematic diagram when laser range sensor one of the present invention and laser range sensor two work.
Fig. 4 is that one laser range sensor one of the embodiment of the present invention and two circuit of laser range sensor access schematic diagram.
Marked in the figure: 1- quartz boat, 11- end plate, 2- laser range sensor one, 3- laser range sensor two, 4-SIC
Paddle, 41- paddle head bracket, 5-L type bracket, 6- guide rail, 7- silicon wafer.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention, i.e., described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is logical
The component for the embodiment of the present invention being often described and illustrated herein in the accompanying drawings can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiment of the present invention, those skilled in the art
Member's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
It should be noted that the relational terms of term " first " and " second " or the like be used merely to an entity or
Operation is distinguished with another entity or operation, and without necessarily requiring or implying between these entities or operation, there are any
This actual relationship or sequence.Moreover, the terms "include", "comprise" or its any other variant be intended to it is non-exclusive
Property include so that include a series of elements process, method, article or equipment not only include those elements, but also
Further include other elements that are not explicitly listed, or further include for this process, method, article or equipment it is intrinsic
Element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that including described
There is also other identical elements in the process, method, article or equipment of element.
Feature and performance of the invention are described in further detail with reference to embodiments.
Embodiment 1
The practical diffusion furnace of one kind that present pre-ferred embodiments provide pushes away the anti-offset protective device of boat, including quartz boat 1,
Laser range sensor 1, laser range sensor 23 and SIC paddle 4, the quartz boat 1 is placed on SIC paddle 4, described
Laser range sensor 1 and laser range sensor 23 are both secured on the paddle head bracket 41 of SIC paddle 4.
It further include L-type support 5, the L-type support 5 is fixed on paddle head bracket 41, one 2 He of laser range sensor
3 one-tenth of laser range sensor 2, which is arranged above and below, to be fixed in L-type support 5.
The quartz boat 1 includes end plate 11,5mm before the laser range sensor 1 sets detected value as end plate 11, institute
State 5mm after laser range sensor 23 sets detected value as end plate 11.
The working principle of the present embodiment:
Measuring principle: laser range sensor 1, laser range sensor 23 pass through a spacing in front of measurement sensor
From whether having barrier and decide whether effectively to export high and low level signal；Measurement distance can debug setting.It is detected article
Distance detection sensor position is greater than set distance, exports low level signal 0V；Article range sensor position is detected to be less than
Set distance exports high level signal 24V.
Adjustment method are as follows: blocked at 1 end plate of quartz boat, 11 rear 5mm using baffle, the induction of laser range sensor 23 has
It imitates, at moving stop to 1 end plate 11 of quartz boat, debugging laser range sensor 1 is effective.Under normal condition, quartz boat 1 is in paddle
On when not occurring shift state, laser range sensor 1 exports high level 24V signal and is labeled as V1, laser range sensor
23 output low level 0V signals are labeled as V2.
Laser range sensor 1 and laser range sensor 23 distinguish output signal V1, V2 and pass through diode 1 and two
Pole pipe 2 is connected to intermediate relay K coil, drives intermediate relay K coil using V1, V2, makes contact closure, while by paddle head
The electric machine controller input terminal of mobile motor accesses the normally opened point of intermediate relay K.When detecting point exception, intermediate relay
K deactivation coil point, be open-circuit condition, paddle head mobile motor power loss, stopping movement, protect quartz boat 1 be not damaged or silicon wafer 7 break
Damage.
Laser range sensor 1 and laser range sensor 23 are mounted in the reserved mounting groove of L-type support 5, L-type
Bracket 5 is mounted on paddle head bracket 41 using bolt or the connection type of welding, laser range sensor 1 and laser ranging
Sensor 23 is powered using the power module that diffusion furnace carries.
Embodiment 2
Present pre-ferred embodiments have done following optimization on the basis of example 1, further include guide rail 6, the paddle head branch
Frame 41 is slidably connected with guide rail 6.
The guide rail 6 has two, and two guide rails 6 are arranged in parallel.
The working principle of the present embodiment: quartz boat 1 is placed on SIC paddle 4, and the paddle head of SIC paddle 4 is fixed on to be moved by paddle head
On motor-driven driving belt, moved with driving belt, be slidably connected by paddle head bracket 41 and guide rail 6, guide rail 6 with
The transmission direction of driving belt is parallel, and the mobile route of paddle head bracket 41 is limited by guide rail 6, using two guide rails 6, mitigates paddle
Head bracket 41 follows the commutation of paddle head mobile motor frequent start-stop to improve the service life of guide rail 6 to the load of guide rail 6.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (5)
1. a kind of practical diffusion furnace pushes away the anti-offset protective device of boat, it is characterised in that: passed including quartz boat (1), laser ranging
Sensor one (2), laser range sensor two (3) and SIC paddle (4), the quartz boat (1) is placed on SIC paddle (4), described
Laser range sensor one (2) and laser range sensor two (3) are both secured on the paddle head bracket (41) of SIC paddle (4).
2. practical diffusion furnace as described in claim 1 pushes away the anti-offset protective device of boat, it is characterised in that: further include L-type branch
Frame (5), the L-type support (5) are fixed on paddle head bracket (41), and the laser range sensor one (2) and laser ranging pass
Sensor two (3) is fixed on L-type support (5) at being arranged above and below.
3. practical diffusion furnace as described in claim 1 pushes away the anti-offset protective device of boat, it is characterised in that: the quartz boat
It (1) include end plate (11), 5mm before the laser range sensor one (2) sets detected value as end plate (11), the laser ranging
Sensor two (3) sets detected value as end plate (11) 5mm afterwards.
4. practical diffusion furnace as described in claim 1 pushes away the anti-offset protective device of boat, it is characterised in that: further include guide rail
(6), the paddle head bracket (41) is slidably connected with guide rail (6).
5. practical diffusion furnace as claimed in claim 4 pushes away the anti-offset protective device of boat, it is characterised in that: the guide rail (6)
There are two, two guide rails (6) are arranged in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910371321.5A CN110006256A (en) | 2019-05-06 | 2019-05-06 | A kind of practical diffusion furnace pushes away the anti-offset protective device of boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910371321.5A CN110006256A (en) | 2019-05-06 | 2019-05-06 | A kind of practical diffusion furnace pushes away the anti-offset protective device of boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110006256A true CN110006256A (en) | 2019-07-12 |
Family
ID=67175798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910371321.5A Pending CN110006256A (en) | 2019-05-06 | 2019-05-06 | A kind of practical diffusion furnace pushes away the anti-offset protective device of boat |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110006256A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07147314A (en) * | 1993-11-25 | 1995-06-06 | Kokusai Electric Co Ltd | Wafer transfer equipment |
| KR20050064706A (en) * | 2003-12-24 | 2005-06-29 | 동부아남반도체 주식회사 | Boat loader having paddle level check bar |
| CN101133371A (en) * | 2005-01-19 | 2008-02-27 | 三菱电机株式会社 | Positioning device and positioning method |
| CN208240712U (en) * | 2018-06-20 | 2018-12-14 | 镇江大全太阳能有限公司 | A kind of protection system for preventing quartz boat from falling |
| CN208422865U (en) * | 2018-07-12 | 2019-01-22 | 通威太阳能（成都）有限公司 | A kind of diffusion furnace carrying out the sedimentation detection of SIC paddle |
| CN210051159U (en) * | 2019-05-06 | 2020-02-11 | 通威太阳能（成都）有限公司 | Practical diffusion furnace pushes away boat and prevents excursion protection device |
-
2019
- 2019-05-06 CN CN201910371321.5A patent/CN110006256A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07147314A (en) * | 1993-11-25 | 1995-06-06 | Kokusai Electric Co Ltd | Wafer transfer equipment |
| KR20050064706A (en) * | 2003-12-24 | 2005-06-29 | 동부아남반도체 주식회사 | Boat loader having paddle level check bar |
| CN101133371A (en) * | 2005-01-19 | 2008-02-27 | 三菱电机株式会社 | Positioning device and positioning method |
| CN208240712U (en) * | 2018-06-20 | 2018-12-14 | 镇江大全太阳能有限公司 | A kind of protection system for preventing quartz boat from falling |
| CN208422865U (en) * | 2018-07-12 | 2019-01-22 | 通威太阳能（成都）有限公司 | A kind of diffusion furnace carrying out the sedimentation detection of SIC paddle |
| CN210051159U (en) * | 2019-05-06 | 2020-02-11 | 通威太阳能（成都）有限公司 | Practical diffusion furnace pushes away boat and prevents excursion protection device |
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