CN109991363A - A kind of array type MEMS gas sensor - Google Patents
A kind of array type MEMS gas sensor Download PDFInfo
- Publication number
- CN109991363A CN109991363A CN201711467754.8A CN201711467754A CN109991363A CN 109991363 A CN109991363 A CN 109991363A CN 201711467754 A CN201711467754 A CN 201711467754A CN 109991363 A CN109991363 A CN 109991363A
- Authority
- CN
- China
- Prior art keywords
- gas sensor
- control mechanism
- electrical control
- sensing platform
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/0004—Gaseous mixtures, e.g. polluted air
- G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
- G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
- G01N33/0031—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array
- G01N33/0032—General constructional details of gas analysers, e.g. portable test equipment concerning the detector comprising two or more sensors, e.g. a sensor array using two or more different physical functioning modes
Abstract
A kind of array type MEMS gas sensor, including substrate, the electrical control mechanism positioned at substrate upper end, the gas sensor array positioned at electrical control mechanism upper end and with the sensing platform of electrical control mechanism circuit interconnection and positioned at sensing platform upper end, the gas sensor array includes more than one gas sensor, and the gas sensor array is equipped with gas osmosis type film；A heat-insulation chamber is equipped between the gas sensor and the sensing platform；The electrical control mechanism and the sensing platform are integrated by monolithic integration process and the substrate.
Description
Technical field
The present invention relates to a kind of gas sensor more particularly to a kind of array type MEMS gas sensors.
Background technique
Gas sensor is a kind of converter that certain gas volume fraction is converted to corresponding electric signal, with micro element
Application range constantly expands, micromation and integrated, low-power consumption and low cost, high-precision and long-life to gas sensor,
It is multi-functional and intelligent more stringent requirements are proposed.Micro-structure and integrated circuit it is integrated can be very good to meet it is above-mentioned
It is required that.
Summary of the invention
Present invention feature according to prior art, provides a kind of array type MEMS gas sensor.
The technical scheme to solve the above technical problems is that a kind of array type MEMS gas sensor, including base
Bottom, the electrical control mechanism positioned at substrate upper end, the sensing platform positioned at electrical control mechanism upper end and with electrical control mechanism circuit interconnection
And the gas sensor array positioned at sensing platform upper end, the gas sensor array include more than one gas sensing
Device, the gas sensor array are equipped with gas osmosis type film.
It is advanced optimized as of the invention, it is heat-insulated equipped with one between the gas sensor and the sensing platform
Chamber.
It is advanced optimized as of the invention, the electrical control mechanism and the sensing platform pass through monolithic integration process and institute
Substrate is stated to be integrated into.
It is advanced optimized as of the invention, the gas sensor is semiconductor gas sensor, electrochemical gas biography
One or more of sensor, catalytic combustion method gas sensor, thermal conductivity gas sensor, infrared gas sensor
Combination.
It is advanced optimized as of the invention, the sensing platform is MEMS sensing platform.
It is advanced optimized as of the invention, the gas osmosis type film is silica material.
The electrical control mechanism is the microprocessor unit being integrated in substrate.
The beneficial effects of the present invention are: simple production process of the present invention, low manufacture cost, new invention creates one kind
Integrated chip mode, collection gas with various sensor are a substrate, can detect gas with various parameter, can also be according to different gas
Body selects different gas sensors, to reduce use cost；It is heat-insulated between gas sensor and sensing platform
Chamber can improve the induction precision of gas sensor while improving heat dissipation.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention；
Wherein, 1, substrate；2, electrical control mechanism；3, sensing platform；4, gas sensor array；5, gas sensor；6, gas
Body osmosis type film；7, heat-insulation chamber.
Specific embodiment
The principle and features of the present invention will be described below with reference to the accompanying drawings, and the given examples are served only to explain the present invention, and
It is non-to be used to limit the scope of the invention.
A kind of array type MEMS gas sensor 5, including substrate 1, positioned at 1 upper end of substrate electrical control mechanism 2, be located at it is automatically controlled
2 upper end of mechanism and the sensing platform 3 interconnected with 2 circuit of electrical control mechanism and the gas sensor positioned at 3 upper end of sensing platform
Array 4, the gas sensor array 4 include more than one gas sensor 5, and the gas sensor array 4 is equipped with
Gas osmosis type film 6.
A heat-insulation chamber 7 is equipped between the gas sensor 5 and the sensing platform 3.
The electrical control mechanism 2 and the sensing platform 3 are integrated by monolithic integration process with the substrate 1.
The gas sensor 5 is semiconductor gas sensor 5, electrochemical gas sensor 5, catalytic combustion type gas biography
The combination of one or more of sensor 5, thermal conductivity gas sensor 5, infrared gas sensor 5.
The sensing platform 3 is MEMS sensing platform 3.
The gas osmosis type film 6 is silica material.
The electrical control mechanism 2 is integrated microprocessor unit on the base 1.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the invention, it is all in spirit of the invention and
Within principle, any modification, equivalent replacement, improvement and so on be should all be included in the protection scope of the present invention.
Claims (7)
1. a kind of array type MEMS gas sensor, it is characterised in that: including substrate, the electrical control mechanism positioned at substrate upper end, position
In electrical control mechanism upper end and the sensing platform interconnected with the electrical control mechanism circuit and the gas sensing positioned at sensing platform upper end
Device array, the gas sensor array include more than one gas sensor, and the gas sensor array is equipped with gas
Body osmosis type film.
2. a kind of array type MEMS gas sensor according to claim 1, it is characterised in that: the gas sensor with
A heat-insulation chamber is equipped between the sensing platform.
3. a kind of array type MEMS gas sensor according to claim 1, it is characterised in that: the electrical control mechanism and institute
Sensing platform is stated to be integrated by monolithic integration process and the substrate.
4. a kind of array type MEMS gas sensor according to claim 1 or 2, it is characterised in that: the gas sensing
Device be semiconductor gas sensor, electrochemical gas sensor, catalytic combustion method gas sensor, thermal conductivity gas sensor,
The combination of one or more of infrared gas sensor.
5. a kind of array type MEMS gas sensor according to claim 1 or 2, it is characterised in that: the sensing platform
For MEMS sensing platform.
6. a kind of array type MEMS gas sensor according to claim 1, it is characterised in that: the gas osmosis type is thin
Film is silica material.
7. a kind of array type MEMS gas sensor according to claim 1, it is characterised in that: the electrical control mechanism is collection
At the microprocessor unit in substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711467754.8A CN109991363A (en) | 2017-12-29 | 2017-12-29 | A kind of array type MEMS gas sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711467754.8A CN109991363A (en) | 2017-12-29 | 2017-12-29 | A kind of array type MEMS gas sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109991363A true CN109991363A (en) | 2019-07-09 |
Family
ID=67108522
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201711467754.8A Pending CN109991363A (en) | 2017-12-29 | 2017-12-29 | A kind of array type MEMS gas sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109991363A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110361423A (en) * | 2019-07-12 | 2019-10-22 | 北京机械设备研究所 | MEMS gas sensor and the method for improving MEMS gas sensor stability |
| CN110749629A (en) * | 2019-10-25 | 2020-02-04 | 清华大学 | MEMS gas detection system and method |
-
2017
- 2017-12-29 CN CN201711467754.8A patent/CN109991363A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110361423A (en) * | 2019-07-12 | 2019-10-22 | 北京机械设备研究所 | MEMS gas sensor and the method for improving MEMS gas sensor stability |
| CN110361423B (en) * | 2019-07-12 | 2023-04-07 | 北京机械设备研究所 | MEMS gas sensor and method for improving stability of MEMS gas sensor |
| CN110749629A (en) * | 2019-10-25 | 2020-02-04 | 清华大学 | MEMS gas detection system and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190709 |
|
| WD01 | Invention patent application deemed withdrawn after publication |