CN109991305A - Incude lotus root and closes the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method - Google Patents
Incude lotus root and closes the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method Download PDFInfo
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- CN109991305A CN109991305A CN201910027201.3A CN201910027201A CN109991305A CN 109991305 A CN109991305 A CN 109991305A CN 201910027201 A CN201910027201 A CN 201910027201A CN 109991305 A CN109991305 A CN 109991305A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/02—Devices for withdrawing samples
- G01N1/22—Devices for withdrawing samples in the gaseous state
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/38—Diluting, dispersing or mixing samples
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
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Abstract
The present invention relates to a kind of induction lotus roots to close the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method, it includes have an ammonia feed end and a helium feed end to be constituted with a reaction gas supply equipment, the reaction gas supply equipment and ammonia feed end and the helium feed end, and the reaction gas supply equipment is equipped with ammonia mass flowmenter, the helium mass flowmeter of adjustment ammonia and helium gas flow；The specified reaction gas ratio of plasma-based mass spectrograph is closed by induction lotus root and adjusts ammonia mass flowmenter above-mentioned, helium mass flowmeter, is allowed after ammonia and helium mix and is formed reaction gas, then reaction gas is supplied to induction lotus root and closes plasma-based mass spectrograph；It can achieve protection detecting instrument through technological means of the invention, reduce the multiple advantages such as reaction gas cost.
Description
[technical field]
The present invention relates to a kind of induction lotus roots to close the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method, belongs to detection and sets
The standby related technical field of reaction gas supply mould group.
[background technique]
Induction lotus root closes plasma-based mass spectrograph and measures analysis, and analytical technology can be with the constituent content of quantitative measurment material, range
Ppt to wt%.Only C (charcoal), H (hydrogen), O (oxygen), N (nitrogen) and halogen are not applicable.
Its application mode is that sample solution is sprayed into induction lotus root to close in the core of plasma-based, and plasma-based temperature is up to 8000 °C,
At a high temperature of, all analysis species all can by atomization, ionization and thermal excitation, then determinand can be detected and
It is quantitative.
Wherein induction lotus root closes plasma-based mass spectrograph and mainly measures the element ion quality generated by High Temperature Argon ion plasma-based；In electricity
The ion generated in slurry is separated according to its charge-mass ratio, and unknown material is allow to be identified and quantify.
Therefore such as: aerospace industry, sputtering target, chemicals, alloy production quotient, food/beverage, geology, pharmacy, ambient water,
The industries such as waste water and processing water mostly can be through detection unit through induction lotus root when needing to propose the correlation reports such as material proof
It closes plasma-based mass spectrograph and carries out the Correlative data analysis such as constituent content, concentration.
Wherein, plasma-based mass spectrograph is closed by the country with the induction lotus root of Agilent Technologies' product Agilent8900 series
Major Inspection Unit or semiconductor high-tech company are used, due in the manufacturing process of semiconductor, in order to determine spy
Fixed element, it is necessary to close plasma-based mass spectrograph through induction lotus root and verify the element that such as chip contains；It is anti-provided by the said firm
Answering gas specifications is 10%NH3 (ammonia) and 90%He (helium), but the inventor of this case, which has found domestic all big enterprises, is all
Ammonia steel cylinder is bought to gas companies, element inspection is carried out with 100% NH3 (ammonia), therefore cause following point:
Characteristic of the 1.NH3 (ammonia) with corrosion, which closes plasma-based mass spectrograph to induction lotus root, has destructiveness, therefore domestic major inspection
Unit is reported for repairment often, not only postpones inspection progress, induction lotus root closes the mass spectrometric supplier of plasma-based, and also problem is worried thus.
2. inventor has found that aforementioned problem is domestic detection unit because can not voluntarily regulate and control reaction gas ratio
Reviewer is caused directly to detect using ammonia as reaction gas.
3. and reaction gas above-mentioned (ammonia, ammonia) usage amount is little, leads to Inspection Unit more in order to save cost
Ammonia is directly used, causes the damage problem of testing instruments indirectly.
4. it is costly to incude lotus root conjunction plasma-based mass spectrograph maintenance, Inspection Unit's cost is caused to increase.
5. since reaction gas is ammonia, if may cause pipeline breakage using pure ammonia as reaction gas, ammonia leaks
Doubt, and ammonia is harmful to the human body, and be easy to cause work An Wenti.
Therefore how to solve the problems, such as above-mentioned known and missing, as related dealer wants the project of research and development.
[summary of the invention]
It is an object of the invention to: it is in view of the drawbacks of the prior art and insufficient, it is mass spectrometric anti-to provide a kind of induction lotus root conjunction plasma-based
Gas supply equipment and its concocting method are answered, an ammonia gas feed end and a helium are connected by a reaction gas supply equipment
Gas feed end by two kinds of reaction gas in mixed pipe line, then controls the line pressure in mixed pipe line, can allow reaction gas
It is sufficiently mixed, reaction gas, which is exported to induction lotus root conjunction plasma-based mass spectrograph, to test, technological means through the invention
It can achieve protection detecting instrument, reduce the multiple advantages such as reaction gas cost.
To achieve the above object, the technical solution adopted by the present invention is that: a kind of induction lotus root closes the mass spectrometric reaction gas of plasma-based
Body supply equipment includes:
One ammonia feed end, can provide ammonia；
One helium feed end, can provide helium；
One reaction gas supply equipment is connected with the ammonia feed end, helium feed end respectively, and the reaction gas supplies
It answers equipment to be equipped with an output end, closes plasma-based mass spectrograph with induction lotus root and connect, which includes an ammonia
Pipeline and a helium pipeline；
One first ammonia pressure regulator valve, an ammonia mass flowmenter and one second ammonia pressure regulation have been further included on ammonia pipeline above-mentioned
Valve；
Helium tube road above-mentioned has further included one first helium pressure regulator valve, a helium mass flowmeter and one second helium pressure regulation
Valve；The ammonia pipeline pulls up a mixing tube with respect to the helium feed end side with respect to the ammonia feed end side, the helium pipeline
Road, the mixed pipe line and the ammonia pipeline, the helium piping connection；
The mixed pipe line connects with the output end is supplied to the induction lotus root to close plasma-based mass spectrograph reaction gas.
In the present invention: the ammonia pipeline is mixed with mixed pipe line above-mentioned, helium pipeline above-mentioned with above-mentioned
Between pipeline, being respectively arranged with one prevents the check valve of gas backstreaming.
In the present invention: will become ammonium hydroxide (NH4OH) if ammonia penetrates into steam, ammonium hydroxide is the compound of strong alkali, physics
Property and chemically to human body and the mordant harm of pipeline, therefore the ammonia pipeline of the invention, the mixed pipe line and this is defeated
It being connect in outlet and sets a heating module and heated, heating module above-mentioned, which is lain on pipeline, winds multiple METAL HEATING PROCESS bands, and
The heating module those METAL HEATING PROCESSs are taken to be warming up to 70 ~ 80 DEG C Celsius or so range prevention pipeline be mixed into steam formed ammonia
The case where water, is sent out.
In the present invention: the mixed pipe line is more connected to a gas storage element.
In the present invention: an ammonia pressure table, helium feed end are equipped between the ammonia feed end and ammonia pipeline
It is equipped with a helium pressure table between the helium supply line, ammonia is quickly adjusted by the ammonia pressure table, the helium pressure table
The loine pressure of pipeline, helium pipeline.
A kind of induction lotus root closes the dispensing mode of the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: including such as
Lower step:
Step 1: ammonia feed end and helium feed end are opened, and ammonia and helium is made to flow into the ammonia pipeline and the helium tube
Road；
Step 2: the first ammonia pressure regulator valve of adjustment, the second ammonia pressure regulator valve, the first helium pressure regulator valve, the second helium pressure regulator valve are
10 ~ 20psi, the overpressure of the mixed pipe line connected in this case can also be maintained at 10 ~ 20psi；
Step 3: the provision parameter of adjustment ammonia mass flowmenter is 0.1L/min, the provision parameter of helium mass flowmeter is
0.9 L/min；Whereby, ammonia and helium close plasma-based for the induction lotus root through being thoroughly mixed to form under the pressure state of 10 ~ 20psi
The reaction gas that mass spectrograph uses.
After adopting the above structure, the invention has the following beneficial effects:
1. the present invention can provide induction lotus root really and close correct gas ratio when plasma-based mass spectrograph is examined；Inspection Unit need not be to gas
The reaction gas of the customized special requirement of body supplier, can reduce the inspection cost of Inspection Unit；
2. preventing the problem of causing induction lotus root to close the damage of plasma-based mass spectrometer apparatus using pure ammonia as reaction gas.
[Detailed description of the invention]
Described herein the drawings are intended to provide a further understanding of the invention, constitutes part of this application, but not
Inappropriate limitation of the present invention is constituted, in the accompanying drawings:
Fig. 1 is structural schematic diagram of the invention；
Fig. 2 is the schematic diagram of pipeline winding METAL HEATING PROCESS band in the present invention；
Fig. 3 is the structural schematic diagram that the present invention includes a gas storage element；
Fig. 4 is flow chart of the method for the present invention.
In figure: ammonia feed end 1；Purifier 11；Helium feed end 2；Reaction gas supply equipment 3；Output end 31；Fuselage
32；Ammonia pipeline 33；First ammonia pressure regulator valve 331；Ammonia mass flowmenter 332；Second ammonia pressure regulator valve 333；Check valve
334；Ammonia pressure meter 335；Helium pipeline 34；First helium pressure regulator valve 341；Helium mass flowmeter 342；Second helium pressure regulation
Valve 343；Check valve 344；Helium pressure meter 345；Mixed pipe line 35；Heating module 36；METAL HEATING PROCESS band 37；Gas storage element
38；Incude lotus root and closes plasma-based mass spectrograph 4.
[specific embodiment]
It is that embodiments of the present invention are illustrated by particular specific embodiment below, it is ripe via content disclosed in specification
Knowing the operator in the field will be appreciated that varifocal light projector device, and the efficacy and advantages of can understand the present invention easily.
Right person skilled in art is it is understood that this creation can also be carried out without these details.In addition, will not in text
To some well known structure or functions or make datail description, to avoid the mixed of associated description unnecessary between various embodiments
Confuse, be described below used in term will explain in the broadest sense, even if it creates certain specific embodiment with this
Datail description is used together.
The present invention will be described with preferred embodiment and viewpoint to explain structure of the invention, is only used to illustrate rather than use
To limit claim of the invention, therefore, in addition to the preferred embodiment in specification, the present invention can be also rendered in extensively
In other embodiments.
Fig. 1 to 3 is please referred to, a kind of induction lotus root of the present invention closes the mass spectrometric reaction gas supply equipment of plasma-based, includes: one
Ammonia feed end 1, a helium feed end 2 and a reaction gas supply equipment 3 are constituted；
It can provide ammonia to ammonia feed end 1 above-mentioned, and wherein the purity of ammonia, which needs access to 100%, can generate preferably analysis
Data simultaneously reduce ambient impurities；As shown in Figure 1,3, the ammonia feed end 1 be equipped with a purifier 11 its may filter that it is miscellaneous in ammonia
Matter.
Helium feed end 2 above-mentioned provides helium, and wherein the purity of helium needs access to 100% and can generate and preferably divides
Analysis data simultaneously reduce ambient impurities.
Reaction gas supply equipment 3 above-mentioned is connected with the ammonia feed end 1, the helium feed end 2 respectively, and
And the reaction gas supply equipment 3 is equipped with an output end 31 it closes plasma-based mass spectrograph 4 with the induction lotus root and connect；As shown in Figure 1,3,
The reaction gas supply equipment 3 is equipped with a fuselage 32, and aftermentioned equipment is installed on mostly in fuselage 3, and reaction gas supply is set
Standby 3 include an ammonia pipeline 33 and a helium pipeline 34；It sequentially include one first ammonia tune on ammonia pipeline 33 above-mentioned
Pressure valve 331, an ammonia mass flowmenter 332 and one second ammonia pressure regulator valve 333；Sequentially include on helium pipeline 34 above-mentioned
One first helium pressure regulator valve 341, a helium mass flowmeter 342 and one second helium pressure regulator valve 343.
Please continue to refer to as shown in Figure 1,3, the ammonia pipeline 33 opposite 1 side of ammonia feed end, the helium pipeline 34
Opposite 2 side of helium feed end pulls up a mixed pipe line 35, the mixed pipe line 35 and the ammonia pipeline 33, the helium pipeline 34
Connection；The mixed pipe line 35 connects with the output end 31 is supplied to the induction lotus root to close plasma-based mass spectrograph 4 reaction gas.
Also, ammonia pipeline 33 above-mentioned and mixed pipe line 35 above-mentioned, the helium pipeline 34 and mixed pipe line 35 above-mentioned
Between, being respectively arranged with one prevents the check valve 334,344 of gas backstreaming；In addition, the ammonia pipeline 33, the mixed pipe line 35 and
It is connect on the output end 31 and sets a heating module 36 and heated, heating module 36 above-mentioned is in ammonia pipeline 33 above-mentioned, mixed
Multiple METAL HEATING PROCESS bands 37 are wound on conjunction pipeline 35, output end 31, and the heating module 36 arrives those METAL HEATING PROCESS bands 37
It is warming up to 70 ~ 80 DEG C Celsius or so of range prevention pipeline and is mixed into the case where steam forms ammonium hydroxide generation.
By above-mentioned equipment, Inspection Unit can buy ammonia steel cylinder, helium steel cylinder as this hair to gas supplier
Bright ammonia feed end 1, helium feed end 2；Ammonia pipeline 33 is connect with ammonia feed end 1, helium pipeline 34 and helium supply
It 2 connections should be held i.e. can pass through reaction gas supply equipment 3 above-mentioned to be mixed to form the induction lotus root is provided to close the anti-of plasma-based mass spectrograph 4
Answer gas.
As shown in figure 3, its structure is substantially identical as the structure of the 1st figure, difference is: mixed pipe line 35 is more connected to one
Gas storage element 38 can store a large amount of reaction gas by the gas storage element 38, thus need a large amount of anti-
The convenience that reaction gas increases detection can be supplied by the gas storage element 38 when gas by answering.
As shown in figure 4, the present invention further includes the concocting method of a reaction gas by above-mentioned equipment are as follows:
Step 1: ammonia feed end 1 above-mentioned is opened with helium feed end 2, and ammonia and helium is made to flow into the ammonia pipeline 33
And the helium pipeline 34；
Step 2: the aforementioned first ammonia pressure regulator valve 331 of adjustment, the second ammonia pressure regulator valve 333, the first helium pressure regulator valve 341, second
Helium pressure regulator valve 343 is 10 ~ 20psi, the overpressure of the mixed pipe line 35 connected in this case can also be maintained at 10 ~
20psi；Wherein, pressure is adjusted in order to facilitate the operation of personnel, an ammonia is equipped between the ammonia feed end 1 and the ammonia pipeline 33
A helium pressure meter 345 is equipped between pressure gauge 335, the helium feed end 2 and the helium supply line 34, by the ammonia pressure
Power meter 335, the helium pressure meter 345 quickly adjust the ammonia pipeline 33, the helium pipeline 34 in 10 ~ 20psi.
Step 3: the provision parameter for adjusting ammonia mass flowmenter 332 above-mentioned is 0.1L/min, helium mass above-mentioned
The provision parameter of flowmeter 342 is 0.9L/min；Whereby, ammonia and helium under the pressure state of 10 ~ 20psi through being sufficiently mixed
It is formed and closes the reaction gas that plasma-based mass spectrograph 4 uses for the induction lotus root.
Therefore, the dispensing mode of reaction gas of the present invention makes reaction gas meet induction lotus root conjunction plasma-based mass spectrograph 4 just
Reaction gas correct ratio when testing, since reaction gas provided by the present invention can reduce the usage amount of ammonia,
The burn into damage problem for easily causing induction lotus root to close 4 equipment of plasma-based mass spectrograph is not allowed, and ambient impurities can be reduced to enable detectable substance
Correct interpretation goes out the concentration of included element, constituent content even element.
No matter the present invention is showing its totally different feature in known techniques with regard to purpose, means and effect, is one big prominent
It is broken.Only it should be noted that above-described embodiment is only that the principle of the present invention and its effect is illustrated, and is not intended to limit the present invention
Range.Although having illustrated herein and having explained specific embodiment and disclosed application, which is not intended to be limited to essence
It really explains, any ripe personage in this can make an amendment to embodiment without prejudice under technical principle and spirit of the invention
With variation.It should also be recognized that without departing substantially from disclosed herein spirit and scope under, disclosed herein in this element with
Its various amendments, are the apparent extension arranged, operation, this method for the operator in this field at change
Details, and apparatus and method disclosed herein will not be confined, and should be contained in the patent claim.
Claims (7)
1. a kind of induction lotus root closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that:
Include:
One ammonia feed end, can provide ammonia；
One helium feed end, can provide helium；
One reaction gas supply equipment is connected with the ammonia feed end, helium feed end respectively, and the reaction gas supplies
It answers equipment to be equipped with an output end, closes plasma-based mass spectrograph with induction lotus root and connect, which includes an ammonia
Pipeline and a helium pipeline；
One first ammonia pressure regulator valve, an ammonia mass flowmenter and one second ammonia pressure regulation have been further included on ammonia pipeline above-mentioned
Valve；
Helium tube road above-mentioned has further included one first helium pressure regulator valve, a helium mass flowmeter and one second helium pressure regulation
Valve；The ammonia pipeline pulls up a mixing tube with respect to the helium feed end side with respect to the ammonia feed end side, the helium pipeline
Road, the mixed pipe line and the ammonia pipeline, the helium piping connection；
The mixed pipe line connects with the output end is supplied to the induction lotus root to close plasma-based mass spectrograph reaction gas.
2. the dispensing mode that a kind of induction lotus root closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: including as follows
Step:
Step 1: ammonia feed end and helium feed end are opened, and ammonia and helium is made to flow into the ammonia pipeline and the helium tube
Road；
Step 2: the first ammonia pressure regulator valve of adjustment, the second ammonia pressure regulator valve, the first helium pressure regulator valve, the second helium pressure regulator valve are
10 ~ 20psi, the overpressure of the mixed pipe line connected in this case can also be maintained at 10 ~ 20psi；
Step 3: the provision parameter of adjustment ammonia mass flowmenter is 0.1L/min, the provision parameter of helium mass flowmeter is
0.9 L/min；Whereby, ammonia and helium close plasma-based for the induction lotus root through being thoroughly mixed to form under the pressure state of 10 ~ 20psi
The reaction gas that mass spectrograph uses.
3. induction lotus root according to claim 1 closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: described
Ammonia pipeline and mixed pipe line above-mentioned, helium pipeline above-mentioned and mixed pipe line above-mentioned between, it is anti-to be respectively arranged with one
The only check valve of gas backstreaming.
4. induction lotus root according to claim 1 closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: described
Ammonia pipeline, connect on mixed pipe line and output end and to set a heating module and heated, heating module above-mentioned is on pipeline
Wind multiple METAL HEATING PROCESS bands.
5. induction lotus root according to claim 4 closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: described
Heating module METAL HEATING PROCESS taken to be warming up to 70 ~ 80 DEG C of range Celsius, prevention pipeline is mixed into the feelings that steam forms ammonium hydroxide
Condition occurs.
6. induction lotus root according to claim 1 closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: described
Mixed pipe line be more connected to a gas storage element.
7. induction lotus root according to claim 1 closes the mass spectrometric reaction gas supply equipment of plasma-based, it is characterised in that: described
Ammonia feed end and ammonia pipeline between be equipped with an ammonia pressure table, be equipped between helium feed end and the helium supply line
One helium pressure table is quickly adjusted the loine pressure of ammonia pipeline, helium pipeline by the ammonia pressure table, the helium pressure table.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910027201.3A CN109991305A (en) | 2019-01-11 | 2019-01-11 | Incude lotus root and closes the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910027201.3A CN109991305A (en) | 2019-01-11 | 2019-01-11 | Incude lotus root and closes the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method |
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| Publication Number | Publication Date |
|---|---|
| CN109991305A true CN109991305A (en) | 2019-07-09 |
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ID=67129969
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910027201.3A Pending CN109991305A (en) | 2019-01-11 | 2019-01-11 | Incude lotus root and closes the mass spectrometric reaction gas supply equipment of plasma-based and its concocting method |
Country Status (1)
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| CN (1) | CN109991305A (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2702918Y (en) * | 2004-05-19 | 2005-06-01 | 江苏苏净集团有限公司 | Automatic gas distribution apparatus |
| CN107058889A (en) * | 2016-12-23 | 2017-08-18 | 安徽景昌铝业有限公司 | The pipeline transmitted for ammonia |
| CN206508941U (en) * | 2017-02-28 | 2017-09-22 | 成都嘉轩阳流体技术开发有限公司 | Analytical instrument gaseous mixture air distributing device |
| CN207430231U (en) * | 2017-10-19 | 2018-06-01 | 广西华大骄阳能源环保科技有限公司 | A kind of multifunctional gas matching device |
-
2019
- 2019-01-11 CN CN201910027201.3A patent/CN109991305A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2702918Y (en) * | 2004-05-19 | 2005-06-01 | 江苏苏净集团有限公司 | Automatic gas distribution apparatus |
| CN107058889A (en) * | 2016-12-23 | 2017-08-18 | 安徽景昌铝业有限公司 | The pipeline transmitted for ammonia |
| CN206508941U (en) * | 2017-02-28 | 2017-09-22 | 成都嘉轩阳流体技术开发有限公司 | Analytical instrument gaseous mixture air distributing device |
| CN207430231U (en) * | 2017-10-19 | 2018-06-01 | 广西华大骄阳能源环保科技有限公司 | A kind of multifunctional gas matching device |
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Application publication date: 20190709 |