CN109974629A - A kind of measurement method at transmission-type plane balzed grating, flute profile angle - Google Patents
A kind of measurement method at transmission-type plane balzed grating, flute profile angle Download PDFInfo
- Publication number
- CN109974629A CN109974629A CN201910309119.XA CN201910309119A CN109974629A CN 109974629 A CN109974629 A CN 109974629A CN 201910309119 A CN201910309119 A CN 201910309119A CN 109974629 A CN109974629 A CN 109974629A
- Authority
- CN
- China
- Prior art keywords
- balzed grating
- grating
- angle
- flute profile
- balzed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
This application discloses a kind of measurement methods at transmission-type plane balzed grating, flute profile angle, include the following steps: the collimated light beam for issuing linear light source along grating face normal direction incidence balzed grating, record the light energy value of the initial angle K1 between the reference line and zero-bit of balzed grating, and the linear light source at this time；Keep light source motionless, balzed grating, described in center axis rotation along the balzed grating, and continue to detect the diffraction light energy value being emitted from the indentation facet of the balzed grating, when between the balzed grating, often turns over 1 ° of two T values difference it is exhausted to value≤5% when, end of record angle K2；Balzed grating, flute profile angle θ is calculated according to following formula:Wherein, n is the refractive index of the balzed grating, substrate material, k=K2-K1.The measurement method optical path at flute profile angle described herein is simple, and requirement of experiment is low, and is lossless to balzed grating, to be measured without slice.
Description
Technical field
This application involves optical field more particularly to a kind of measurement methods at transmission-type plane balzed grating, flute profile angle.
Background technique
When the wire casing section of grating ruling toothing, the light energy of grating is just concentrated in a predetermined direction, i.e., certain
On one order of spectrum.When from this orientation detection, the maximum intensity of spectrum, this phenomenon is known as glittering (blaze), and this grating claims
For balzed grating,.By working principle, transmission-type balzed grating, and reflective balzed grating, can be divided into.
The side of transmission-type plane balzed grating, is grating face, and side is zigzag, and zigzag side is equipped with multiple quarters
Trace facet has an angle theta, referred to as flute profile angle between indentation facet and grating face.The mismachining tolerance at flute profile angle can directly be led
It causes grating diffration efficiency, resolution ratio, stray light etc. error occur, and then influences the quality of test spectral, currently, common survey
The method at measuring tank shape angle mainly has the following two kinds:
(1) direct method of measurement.It is first replicated using transmission-type plane balzed grating, as mother matrix, then by the grating base of duplication
Plate separates and solidifies with mother matrix, finally thinly slices the grating substrate of duplication, with electron microscope to the flute profile of replicated substrate
It is directly observed and is measured in angle.The measurement order of accuarcy of this method is limited to duplication and chipping qualities, and in the mistake of duplication
The damage of unrepairable may be caused in journey to grating.
(2) anti-pushing manipulation.The spectrogram that transmission-type plane balzed grating, is obtained using Fourier modal method, by increasing this
Noise carrys out the measure spectrum figure in simulated experiment, according to evaluation function, selects suitable inversion algorithm, determines the model of parameter
It encloses, finds the value of parameter to be measured.This Method And Principle is complicated, and deduction step is more, and error is up to 5%.
Summary of the invention
In view of the measurement method above shortcomings at current balzed grating, flute profile angle, it is flat that the application provides a kind of transmission-type
The measurement method at face balzed grating, flute profile angle can measure flute profile angle, operation step without being replicated and being sliced to balzed grating,
It is rapid simple and transmission-type plane balzed grating, will not be caused to damage.
The further technical problems to be solved of the application are to find suitable measurement parameter, make the deduction step at flute profile angle more
Add simple.
In order to achieve the above objectives, embodiments herein adopts the following technical scheme that
A kind of measurement method at transmission-type plane balzed grating, flute profile angle, includes the following steps:
The collimated light beam for issuing linear light source is along grating face normal direction incidence balzed grating, record balzed grating, at this time
The light energy value of initial angle K1 and the linear light source between reference line and zero-bit；Keep light source motionless, along the glittering
Balzed grating, described in the center axis rotation of grating, and continue to detect the diffraction light being emitted from the indentation facet of the balzed grating,
Energy value, as the Jue Dui Zhi≤5% of difference between the balzed grating, often turns over 1 ° of two T values, end of record angle K2,
Wherein, the central axis refers to the normal and any indentation facet normal both perpendicular to grating face, and passes through the glittering
The axis of grating；The T value are as follows: the diffraction light energy value/linear light source light energy value of current angular；
Balzed grating, flute profile angle θ is calculated according to the following formula:
Wherein, n is the refractive index of the balzed grating, substrate material, k=K2-K1.
The central axis of the balzed grating, refers to the normal and any indentation facet normal both perpendicular to grating face, and
It, can there are many selections across the axis of the balzed grating,.The linear light source refers to the light source for being capable of providing single wavelength.Institute
It states reference line and refers to the reference line chosen from balzed grating, projection line of the reference line on precision rotation stage and zero-bit are pressed from both sides
Angle value is the reading value of K1 or K2.
Monochromatic parallel rays is chosen, so that it is entered balzed grating, from grating face, and enter after balzed grating, reflects
It penetrates on indentation facet, control parallel rays enters the angle of grating, the i.e. angle of the first incidence angle, can be small flat in indentation
Different optical phenomenas is generated on face, transmission direction diffraction light energy also can be different.When adjusting the first incidence angle, make by glittering
Incidence angle after grating refraction on indentation facet, i.e. the second incidence angle are just equal to balzed grating, substrate material and air shape
At the cirtical angle of total reflection when, the balzed grating, can mutate in the diffraction light energy of the outgoing of indentation facet, this
Mutation is easy to be perceived by photodetector.Using this phenomenon, we have chosen two optical paths and carry out acquisition angles data, and then calculate
The flute profile angle of balzed grating:
First optical path: the collimated light beam that linear light source issues is entering light along grating face normal direction incidence balzed grating,
After grid, light does not change the direction of propagation, continues the normal direction along grating face and propagates to indentation facet, in this optical path,
First incidence angle is equal to 0 degree, records the initial angle K1 between the reference line and zero-bit of the balzed grating, and institute at this time
State the light energy value of linear light source；Article 2 optical path: the collimated light beam that linear light source issues is incident on grating face with the first incidence angle k
On, collimated light beam reflects in balzed grating, at this time, refraction angle i, and refracted light continuation is propagated forward, and it is small to reach indentation
Plane, the incidence angle on indentation facet, i.e. the second incident angle α are just equal to balzed grating, substrate material and are formed with air at this time
The cirtical angle of total reflection.In this optical path, since the light beam from linear light source incidence finally has occurred on indentation facet entirely
Reflection, therefore the diffraction light energy of the outgoing in the indentation facet of the balzed grating, can mutate, this mutation Yi Beiguang
Detector perception, in actual measurement, we be can choose when the balzed grating, often turns over difference between 1 ° of two T values
Jue Dui Zhi≤5% when, the record termination point K2 between the reference line and zero-bit of the balzed grating, at this time, wherein the T
Value are as follows: the diffraction light energy value/linear light source light energy value of current angular.
It sets first optical path to the original state of test, sets Article 2 optical path to the final state of test, it will
First light path converting can be realized to Article 2 optical path by rotating around center axis balzed grating,.Due to original state light
Incident ray and grating face normal parallel, therefore by accurately control balzed grating, rotation, when balzed grating, rotate to terminate shape
When state, the angle of the balzed grating, rotation is equal to the first incidence angle k, the i.e. k=K2-K1 of final state, refraction angle i at this time
It can be calculated by the snell law of refraction:
Wherein, k is the first incidence angle that light enters balzed grating, by grating face, and i is refraction angle, and n is balzed grating,
The refractive index of substrate material, the refractive index of air are 1.
Light is propagated further along, is incident on indentation facet, is totally reflected at this time, it is small that light is incident on indentation
The second incident angle α in plane meets following relation of equal quantity according to the principle of right angled triangle:
α=i+ θ ... ... ... (2)
Wherein i is refraction angle, and θ is the angle between flute profile angle, i.e. indentation facet and grating face.
Meanwhile the cirtical angle of total reflection formed according to total reflection law, balzed grating, substrate material and air, second is incident
Angle α also meets following relation of equal quantity:
Wherein, n is the refractive index of balzed grating, substrate material.
Formula (1) and formula (3) are substituted into formula (2), the value of flute profile angle θ can be acquired, specific as follows:
With method as above, it is only necessary to measure two angles K1 and K2, can accurately calculate flute profile angle.And in total reflection,
It can mutate in the diffraction light energy that the indentation facet of the balzed grating, is emitted, i.e., can have greatly changed, pass through
Photodetector in the prior art can accurately indicate the reading position of K2 value, during the test, without flat to transmission-type
Face balzed grating, which is replicated and is sliced, can accurately measure flute profile angle, will not damage to grating, in addition, optical path is simple,
Test requirements document is low, by being monitored to the balzed grating, in the diffraction light energy that indentation facet is emitted, measures the sudden strain of a muscle
Shine grating in measurement process from first light path converting to Article 2 optical path when the angle value that rotates, pass through the angle of the rotation
Value deduces the angle value at flute profile angle, and principle is simple, it is few to deduce step.
Preferably, the reference line is one of lines as described below: the normal in the grating face of the balzed grating, is carved
The extended line of the normal of trace facet, the extended line in grating face or indentation facet.The comfort level that reference line can be read
It is selected.
Preferably, the linear light source is the light source of metal steam gas lamp, air cathode lamp or laser transmitter projects.
Preferably, the metal steam gas lamp is mercury lamp or sodium vapour lamp.
Preferably, the wavelength of the laser transmitter projects is the light of 632.8nm.
Preferably, the diffraction light energy is detected using one of following fluorescence detector: selenium cell, photoelectricity
Diode, photomultiplier tube, silicon diode array detector, light power meter or semiconductor detector.
Compared with prior art, the application has the advantages that
(1) measurement method at flute profile angle described herein can measuring flume without being replicated and being sliced to balzed grating,
Shape angle, operating procedure is simple and will not cause to damage to transmission-type plane balzed grating,；
(2) the measurement method optical path at flute profile angle described herein is simple, and requirement of experiment is low；
(3) the measurement method principle at flute profile angle described herein is simple, and deduction step is few, and the accuracy rate of detection is high, surveys
Measuring error is only 2.8%.
Detailed description of the invention
It in order to more clearly explain the technical solutions in the embodiments of the present application, below will be to needed in the embodiment
Attached drawing is briefly described, it should be apparent that, the drawings in the following description are only some examples of the present application, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of optical system for testing signal of the measurement method at transmission-type plane balzed grating, flute profile angle described herein
Figure；
Fig. 2 is a kind of initial shape of the test of the measurement method at transmission-type plane balzed grating, flute profile angle described herein
The index path of state；
Fig. 3 is a kind of termination shape of the test of the measurement method at transmission-type plane balzed grating, flute profile angle described herein
The index path of state.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present application, technical solutions in the embodiments of the present application carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of embodiments of the present application, instead of all the embodiments.It is based on
Embodiment in the application, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall in the protection scope of this application.
As shown in Figure 1, Figure 2 and Figure 3, the measurement method at a kind of transmission-type plane balzed grating, flute profile angle, starts in test
Before, optical system for testing is first built, the optical system for testing is specific as shown in Figure 1, being vertically arranged glittering to be measured on a precision rotation platform 2
Grating 1, and the central axis of balzed grating, 1 is made to be overlapped setting, i.e. precision rotation platform 2 with the pivot center of the precision rotation platform 2
Rotation axis both perpendicular to grating face normal and any indentation facet normal, and pass through the balzed grating,.In turntable
It is equipped with zero-bit and identifies the groove of angle, the normal line of the balzed grating, 1 is mainly used to read, can be there are many setting side
Formula, the application chooses normal line of the normal in grating face 11 as balzed grating, 1, for reading initial angle K1 value and final angle
K2 value is spent, wherein the maximum angular rate of precision rotation platform is no more than 40o/s, and precision controlling is in ± 0.01o.It is, for example, possible to use
The precision rotation platform 2 of the URS100BPP or URS150BPP of the model of Newport company production, the balzed grating, medium
Refractive index be 1.514, the flute profile footmark definite value of the balzed grating, is 30 °, such as the balzed grating, base material can be with
The glass B270 produced using Schott company.
In the side of precision rotation platform 2, with turntable setting linear light source 3 spaced apart, the minimum range at interval can
To be set as the distance normally rotated that the linear light source 3 does not interfere precision rotation platform 2.The linear light source 3 is used to provide specific
The light of wavelength, the linear light source 3 can use metal steam gas lamp, air cathode lamp or laser emitter, wherein the metal
Vapour lamp can select mercury lamp and sodium vapour lamp, and laser emitter can be selected arbitrarily, select and swash in the subsequent measurement of the application
Optical transmitting set emits the collimated light beam of single wavelength, and the wavelength of the laser is 632.8nm.
Photodetector 4 is set in the side opposite with the linear light source 3 of precision rotation platform 2, for detecting by glaring
Monochromatic diffraction light energy after grid 1 is supervised it is furthermore preferred that computer and detector combination can also be arranged by computer
The variation for surveying the diffraction light energy value during rotation of precision rotation platform 2, keeps visual effect more intuitive, the photodetector 4
It can select in selenium cell, photodiode, photomultiplier tube, silicon diode array detector or semiconductor detector
Any one selects THORLABS light power meter to carry out detection of diffracted light energy in this application.
After putting up optical path, start to test as follows:
Step 1: as shown in Fig. 2, the collimated light beam for the wavelength 632.8nm for issuing laser emitter is along 11 method of grating face
Line direction is incident to balzed grating, 1, and the initial angle K1 between the reference line and zero-bit of the balzed grating, 1 is made to be equal to 0 degree,
And the light energy value Q1 of the linear light source.
In this original state, since air refraction is numerically equal to 1,1 substrate material refractive index of balzed grating, is n,
Flute profile angle is θ, and L is incident ray, and L ' is the direction of largest light intensity.Because the grating face 11 perpendicular to balzed grating, 1 is incident, institute
With incident ray by air incidence to balzed grating, 1 grating face 11 when do not change the direction of propagation, in balzed grating, 1 remain unchanged edge
It propagates in the direction of incident ray.Diffraction occurs when incident ray is incident to indentation facet 12, meets grating equation, uses light detection
The light energy value Q1 that device 4 directly detects the linear light source is 3.8mW.
Step 2: as shown in figure 3, keeping light source motionless, rotating precision rotation platform 2, the drive of precision rotation platform 2 is made to glare
Grid 1 continue to detect the diffraction light energy being emitted in indentation facet 12 around center axis rotation, when the balzed grating, often turns over
1 ° of record is primary, when the balzed grating, often turns over 1 °, between two T values when the Jue Dui Zhi≤5% of difference, and end of record angle
Spend K2, wherein the T value are as follows: the diffraction light energy value/linear light source light energy value of current angular.It is incident at this time
Incidence angle on indentation facet 12 is just equal to the cirtical angle of total reflection that 1 substrate material of balzed grating, and air are formed, note
Termination point K2 is recorded, during balzed grating, rotation, the data before and after total reflection occurs are shown in table 1, institute
1 ° of data for recording the primary diffraction light energy of the every rotation of balzed grating, are stated to be measured in parallel three times as can be seen from the table
In, K2 value is 16 °；
Table 1:
T value in table 1 are as follows: the diffraction light energy value/linear light source light energy value of current angular；Z is described
When balzed grating, often turns over 1 °, the absolute value of the difference of former and later two T values.
In the final state of above-mentioned rotation, as shown in figure 3, the second incidence angle formed on indentation facet 12 is just
Equal to the critical angle that balzed grating, 1 and air form total reflection, wherein L is incident ray, and L' is that incident ray is injected by air
Refracted light when 1 basal surface of balzed grating, L " is the total reflection light on indentation facet 12, wherein being incident on balzed grating,
The first incidence angle k in 1 grating face 11 is the angle that precision rotation platform 2 rotates, i.e. k=K2-K1, in specific calculate, by
It is numerically equal to K2 in K1 most 0, the k, i is refraction angle, and α is the second incidence angle for being incident on indentation facet 12.
Step 3: the 1 flute profile angle θ of balzed grating, is calculated according to the following formula:
Wherein, refractive index of the n for 1 substrate material of balzed grating, k=K2-K1, calculated numerical value are shown in table 2
In.
| n | θ calibration value | K1 | K2 | k | θ calculated value | Error |
| 1.514 | 30° | 0 | 16° | 16° | 30.85° | 2.8% |
The calculation method of error is as follows in table 2:
Difference/θ calibration value between error=θ calculated value and the calibration value of θ.
The derivation process of flute profile angle calculation formula is illustrated with reference to the accompanying drawing.In the final state of rotation, such as Fig. 3
Shown, incident ray can reflect when injecting the grating face 11 of balzed grating, 1 by air.According to the snell law of refraction, refraction
Angle i are as follows:
Wherein, the n in formula (1) is the refractive index of 1 substrate material of balzed grating, and k is the first incidence angle, the refraction of air
Rate is 1.
As shown in figure 3, being 180 degree according to the sum of three interior angles of right angled triangle and triangle, second is incident at this time
Angle α meets:
α=i+ θ ... (2)
Wherein, θ is flute profile angle.
According to total reflection law, the incident angle α that 1 indentation facet 12 of balzed grating, is formed just is equal to 1 base of balzed grating,
The cirtical angle of total reflection that sheet material and air are formed.So having
Wherein, n is the refractive index of 1 substrate material of balzed grating,.
It by above-mentioned formula (1) and formula (3), substitutes into formula (2), the calculation formula for obtaining flute profile angle is as follows:
The measurement method that can be seen that flute profile angle described herein from above-mentioned specific embodiment has the advantages that
The measurement method at flute profile angle described herein can measure flute profile without being replicated and being sliced to balzed grating,
Angle, operating procedure is simple and will not cause to damage to transmission-type plane balzed grating,；
The measurement method optical path at flute profile angle described herein is simple, and requirement of experiment is low；
The measurement method principle at flute profile angle described herein is simple, and deduction step is few, and the accuracy rate of detection is high, and measurement misses
Difference is only 2.8%.
The above, the only specific embodiment of the application, but the protection scope of the application is not limited thereto, it is any
Those skilled in the art is in technical scope disclosed in the present application, and any changes or substitutions that can be easily thought of, all answers
Cover within the scope of protection of this application.Therefore, the protection scope of the application should be with the scope of protection of the claims
It is quasi-.
Claims (6)
1. a kind of measurement method at transmission-type plane balzed grating, flute profile angle, which comprises the steps of:
The collimated light beam for issuing linear light source records the benchmark of balzed grating, at this time along grating face normal direction incidence balzed grating,
The light energy value of initial angle K1 and the linear light source between line and zero-bit；Keep light source motionless, along the balzed grating,
Center axis rotation described in balzed grating, and continue to detect the diffraction light energy being emitted from the indentation facet of the balzed grating,
Value, as the Jue Dui Zhi≤5% of difference between the balzed grating, often turns over 1 ° of two T values, end of record angle K2；
Wherein, the central axis refers to the normal and any indentation facet normal both perpendicular to grating face, and passes through described
The axis of balzed grating,；The T value are as follows: the diffraction light energy value/linear light source light energy value of current angular；
Balzed grating, flute profile angle θ is calculated according to the following formula:
Wherein, n is the refractive index of the balzed grating, substrate material, k=K2-K1.
2. the measurement method at transmission-type plane balzed grating, flute profile according to claim 1 angle, which is characterized in that the base
Directrix is one of lines as described below: the normal in the grating face of the balzed grating, the normal of indentation facet, grating face
Extended line or indentation facet extended line.
3. the measurement method at transmission-type plane balzed grating, flute profile according to claim 1 angle, which is characterized in that the line
Light source is the light source of metal steam gas lamp, air cathode lamp or laser transmitter projects.
4. the measurement method at transmission-type plane balzed grating, flute profile according to claim 3 angle, which is characterized in that the gold
Belonging to vapour lamp is mercury lamp or sodium vapour lamp.
5. the measurement method at transmission-type plane balzed grating, flute profile according to claim 3 angle, feature exist, the laser
The light that the wavelength of transmitter transmitting is 632.8nm.
6. the measurement method at transmission-type plane balzed grating, flute profile according to claim 1 angle, which is characterized in that described to spread out
It penetrates light energy to be detected using one of following fluorescence detector: selenium cell, photodiode, photomultiplier tube, silicon
Diode array detector, light power meter or semiconductor detector.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910309119.XA CN109974629B (en) | 2019-04-17 | 2019-04-17 | Method for measuring groove angle of transmission type plane blazed grating |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910309119.XA CN109974629B (en) | 2019-04-17 | 2019-04-17 | Method for measuring groove angle of transmission type plane blazed grating |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109974629A true CN109974629A (en) | 2019-07-05 |
| CN109974629B CN109974629B (en) | 2020-11-24 |
Family
ID=67085090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910309119.XA Active CN109974629B (en) | 2019-04-17 | 2019-04-17 | Method for measuring groove angle of transmission type plane blazed grating |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109974629B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112649179A (en) * | 2020-07-28 | 2021-04-13 | 上海复享光学股份有限公司 | Method, system, computing device and storage medium for detecting blazed gratings |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11183251A (en) * | 1997-12-16 | 1999-07-09 | Shimadzu Corp | Spectrophotometer |
| TW518435B (en) * | 1999-09-03 | 2003-01-21 | Zolo Technologies Inc | Echelle grating dense wavelength division multiplexer/demultiplexer |
| CN104019910A (en) * | 2014-06-23 | 2014-09-03 | 山东科技大学 | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof |
| CN106405701A (en) * | 2016-11-21 | 2017-02-15 | 上海理工大学 | Precision re-processing method for blaze angle of echelle gratings not meeting precision requirement |
| CN107917680A (en) * | 2017-11-07 | 2018-04-17 | 南京航空航天大学 | Minute angle method for quickly identifying based on balzed grating, |
| CN108759722A (en) * | 2018-05-04 | 2018-11-06 | 华中科技大学 | A kind of beam deflection angle amplifying unit based on balzed grating, |
-
2019
- 2019-04-17 CN CN201910309119.XA patent/CN109974629B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11183251A (en) * | 1997-12-16 | 1999-07-09 | Shimadzu Corp | Spectrophotometer |
| TW518435B (en) * | 1999-09-03 | 2003-01-21 | Zolo Technologies Inc | Echelle grating dense wavelength division multiplexer/demultiplexer |
| CN104019910A (en) * | 2014-06-23 | 2014-09-03 | 山东科技大学 | Blazed grating-based fabry-perot THz wavelength measurement instrument and measurement method thereof |
| CN106405701A (en) * | 2016-11-21 | 2017-02-15 | 上海理工大学 | Precision re-processing method for blaze angle of echelle gratings not meeting precision requirement |
| CN107917680A (en) * | 2017-11-07 | 2018-04-17 | 南京航空航天大学 | Minute angle method for quickly identifying based on balzed grating, |
| CN108759722A (en) * | 2018-05-04 | 2018-11-06 | 华中科技大学 | A kind of beam deflection angle amplifying unit based on balzed grating, |
Non-Patent Citations (2)
| Title |
|---|
| 陶卫等: "新型反射式闪耀光栅楔形平板", 《光电工程》 * |
| 黄元申等: "闪耀透射光栅衍射规律的分析和验证", 《光学精密工程》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112649179A (en) * | 2020-07-28 | 2021-04-13 | 上海复享光学股份有限公司 | Method, system, computing device and storage medium for detecting blazed gratings |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109974629B (en) | 2020-11-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102128600B (en) | Method and device for measuring curvature radius of lens by use of laser | |
| US9212991B2 (en) | Refractive index measurment apparatus and refractive index measurment method | |
| JPWO2013147038A1 (en) | Material property measuring device | |
| CN204203099U (en) | A kind of haze pick-up unit | |
| KR20200138342A (en) | Prism-coupled stress meter with wide weighing process window | |
| CN110736721B (en) | Glass plate refractive index uniformity detection device and detection method based on diffraction grating | |
| CN109974629A (en) | A kind of measurement method at transmission-type plane balzed grating, flute profile angle | |
| CN104180901A (en) | Transmittance spectrum measurement device and method for ultra-narrow band filter | |
| CN111189397A (en) | Transparent film thickness measuring device and method | |
| CN1374529A (en) | Simultaneous in-situ sea water salinity and temperature measuring method and device | |
| CN201247048Y (en) | Thickness meter for optical film | |
| CN103983609A (en) | Transparent material refractive index and thickness measuring device and measuring method based on spectrum interference | |
| JP7382629B2 (en) | Optical measurement device and wavelength calibration method | |
| CN114061803B (en) | Circular polarization photoelastic stress measuring system and measuring method | |
| CN104101481B (en) | A kind of eyeglass scattering optical detector with double light path | |
| CN204854955U (en) | Improve light detector radiation sensitivity testing accuracy's device | |
| JP2960905B2 (en) | Apparatus for measuring flying height and azimuth of magnetic head with respect to transparent medium based on leaky total internal reflection | |
| CN102253011B (en) | Use of calculating relative equivalent transmittance of integrating sphere | |
| TWI453433B (en) | Wafer-level led measuring device and measuring method thereof | |
| US20240133749A1 (en) | Brdf measurement system and method, electronic device, and storage medium | |
| CN108801979A (en) | Smelly water clarity measuring device and method in a kind of municipal works | |
| CN117030205B (en) | Detection method and detection system for comprehensive transmittance of combined prism | |
| CN110927117B (en) | Forward scattering visibility meter and parameter determination method | |
| CN213068614U (en) | Gradient refractive index optical material on-line parameter testing device | |
| CN212275581U (en) | Device for rapidly measuring refractive index of optical glass |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |