CN109946386A - The method for obtaining print surface acoustic wave phase velocity using dual probe piezoelectric transducer - Google Patents
The method for obtaining print surface acoustic wave phase velocity using dual probe piezoelectric transducer Download PDFInfo
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- CN109946386A CN109946386A CN201910158332.5A CN201910158332A CN109946386A CN 109946386 A CN109946386 A CN 109946386A CN 201910158332 A CN201910158332 A CN 201910158332A CN 109946386 A CN109946386 A CN 109946386A
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Abstract
The present invention relates to a kind of methods for obtaining print surface acoustic wave phase velocity using dual probe piezoelectric transducer, including the following steps: removable dual probe piezoelectric transducer is placed in sample surface to be measured；Preceding piezoelectric probe is placed in lowest part, makes its contact measured sample surface, acquires the surface acoustic wave signal at sample surface to be measured；Preceding piezoelectric probe is moved up, away from sample surface to be measured, acquires the surface acoustic wave signal at sample surface to be measured；Corresponding frequency domain variation is done to collected surface acoustic wave signal twice, calculates the velocity of wave for obtaining surface acoustic wave.
Description
Technical field
The invention belongs to surface acoustic wave non-destructive detecting device fields, and being related to one kind can be used for accurate, Quick Acquisition print table
The dual probe piezoelectric transducer of the preceding probe packaged type of face surface acoustic wave signal.
Background technique
Surface acoustic wave non-destructive testing technology will be used wider and wider film characteristics detection field, in particular for super
The detection that the mechanical property and Interface Adhesion characteristic of film are interconnected in large scale integrated circuit, since its is lossless, measuring process
It is easy, without being handled print, many advantages, such as on-line checking can be achieved, surface acoustic wave techniques application prospect ten is divided
It is bright.Currently, the theoretical developments for surface acoustic wave techniques detection field are very swift and violent, surface acoustic wave nondestructive detection system should be set
Standby equipment gradually, miniaturization, to meet the needs of carrying out non-destructive testing in industrial circle using surface acoustic wave techniques.Patent
A kind of dual probe is also related in the application 20182039297.0 dual probe Piezoelectric detectors of surface wave velocity of wave " a kind of measure "
Piezoelectric detector, but since piezoelectric probe is fixed probe, in that probe acquisition signal farther away apart from excitaton source, sound
Surface wave signal has had been subjected to the closer probe in distance signal source, treats the surface of test sample piece due to popping one's head in there are certain extruding
Effect, can have an impact surface acoustic wave signal.
Summary of the invention
The purpose of the present invention is overcoming the above-mentioned deficiency of the prior art, provide it is a kind of provide one kind can be used for it is accurate, fast
It is provided on the basis of the dual probe piezoelectric transducer of speed acquisition sample surface surface acoustic wave signal and obtains print surface acoustic wave phase velocity
The method of degree.The present invention avoids surface acoustic wave by being that can move up and down formula by the preceding probe designs of dual probe piezoelectric transducer
Noise and error in communication process due to being generated by probe.Technical solution is as follows:
A method of print surface acoustic wave phase velocity, used sensor packet are obtained using dual probe piezoelectric transducer
Metal shell, preceding piezoelectric probe, rear piezoelectric probe are included, is opened up in the bottom of metal shell there are two parallel through-hole, preceding piezoelectricity
The splitter of probe and rear piezoelectric probe is stretched out from parallel via holes, is offered at the top of metal shell opposite with two parallel via holes
The aperture answered, the top of two piezoelectric probes are fixedly connected with a tubing string respectively, and the conducting wire being connected with piezoelectric probe is from tubing string
Metal shell is exported, is filled with insulating materials around rear piezoelectric probe, preceding piezoelectric probe is placed in inside metal shell and is not filled by
In the partial cavity of insulating materials, piezoelectric probe be can move up and down before the presence of partial cavity makes, using such sensor
The method for obtaining print surface acoustic wave phase velocity, including the following steps:
(1) removable dual probe piezoelectric transducer is placed in sample surface to be measured；
(2) preceding piezoelectric probe is placed in lowest part, makes its contact measured sample surface, acquires the sound at sample surface to be measured
Surface wave signal；
(3) preceding piezoelectric probe is moved up, away from sample surface to be measured, acquires the sound surface at sample surface to be measured
Wave signal；
(4) corresponding frequency domain is done to collected surface acoustic wave signal twice to change, calculate the velocity of wave for obtaining surface acoustic wave.
Detailed description of the invention
Schematic diagram when the mono- probe acquisition surface acoustic wave signal of Fig. 1 is calculated for surface acoustic wave velocity of wave
Fig. 2 is used to acquire the structural schematic diagram of the removable dual probe piezoelectric transducer of surface acoustic wave signal
Fig. 3 is used to acquire the bottom surface structure schematic diagram of the removable dual probe piezoelectric transducer of surface acoustic wave signal
Specific embodiment
The present invention provides a kind of tables of handheld acquisition sample surface used for surface acoustic wave non-destructive detecting device
The dual probe piezoelectric transducer of the preceding probe packaged type of surface wave signal.The device is by the way that piezoelectric membrane (pvdf membrane) to be placed on
The tip of piezoelectric probe, so that pressure signal is converted into electric signal, to acquire the surface acoustic wave signal of sample surface.The dress
It sets and dual probe has been done to previous piezoelectric probe, it is moveable to design.Due to obtain surface acoustic wave velocity of wave when, need at two
Different location acquires signal, as shown in Figure 1, and according to the phase velocity of formula (1) calculating surface acoustic wave, x1And x2As acquire
Two positions of signal, Φ2(f) and Φ1It (f) is respectively in x1And x2The frequency spectrum for locating collected signal, to x1And x2Place's acquisition
To signal do fast Fourier variation the frequency spectrums of two signals can be obtained.
Dual probe can be designed so that piezoelectric transducer is detached from precise mobile platform, by x2-x1Value as fixed value come
It calculates, and due to not needing to manually adjust distance, it is ensured that the factors such as the position that two positions are not generated by adjusting is not parallel
Bring error.Preceding probe design moving up and down, it is ensured that latter one is popped one's head in when acquiring surface acoustic wave signal, sound table
Surface wave signal is influenced to generate error and noise by preceding probe when will not be because of preceding probe excessively.
The specific structure of surface acoustic wave piezoelectric sensor of the invention as shown in Fig. 2, include Piezoelectric detector main body and
Pressure point probe, the parts such as insulated cavity, having a size of 40mm × 18mm × 26mm.As shown in Fig. 2, the shell of entire piezoelectric transducer is
Metal shell 1, using brass material, the wall thickness of metal shell 1 is 5mm, is formed in metal shell filled with insulation filling material
Insulated cavity 2, the insulating materials of filling are polytetrafluoroethylene material, pay attention to the probe one side in piezoelectric transducer, and metal shell 1 is
Middle part hollow out surrounding include one circle thin layer shell, centre is insulated cavity 2, i.e., at piezoelectric probe stretching around wrap up be
Insulated cavity 2, as shown in Figure 3.The material of piezoelectric probe 3,4 is metal red copper, is that wedge shape stretches out Piezoelectric detector at probe
The size of periphery, piezoelectric probe 3,4 is equal are as follows: height H is 8mm, and section S is 8mm × 8mm.Column gold is done in the inside of detector
Belong to pipe 5,6, the material of cylindrical metal pipe 5,6 is red copper, and the size of cylindrical metal pipe 5,6 is identical, are as follows: height h is 4mm, is cut
Face S ' is 2mm × 2mm.Conducting wire 7,8 is passed among metal tube 5,6 with connecting at probe to transmit signal, one end of conducting wire 7,8
It is separately fixed on piezoelectric probe 3,4, the other end accesses oscillograph, stays in the corresponding position of metal shell 1 and insulated cavity
There is aperture 9,10, the conducting wire 7,8 made can be pierced by.The fixation of left side probe 3 is realized by the structure of insulated cavity in Fig. 2, will be put
The dielectric chamber for setting the probe area is hollowed out by the shape that left side is popped one's head in, by being embedded into insulated cavity for left side probe fixation.Fig. 2
Middle right side probe 4 is unfixed probe moving up and down, and movement is also to be realized by the structure of dielectric chamber, will be placed
The dielectric chamber of right side probe area is according to cross sectional shape, that is, rectangle face S of probe and the shape in the section of cylindrical metal pipe
The slideway that shape, that is, rectangle face S ' digs out cuboid cavity to slide up and down as probe, the height of cavity are designed to a probe
Right side probe can be then hidden in detector by height H/2 by the conducting wire that lifting right side is popped one's head in.
Technical scheme is as follows:
(1) by removable probe placement to lowest part, two piezoelectric membranes are placed on probe, pressurization electric explorer is put
In sample surface to be measured；
(2) using the surface acoustic wave signal at the piezoelectric probe acquisition sample surface of movable terminal, with oscillograph to acquisition
To signal observed and recorded；
(3) by conducting wire corresponding to lifting movable terminal piezoelectric probe, the piezoelectric probe of movable terminal is lifted upwards
To retraction Piezoelectric detector, with the piezoelectric probe of fixing end to surface acoustic wave signal to the surface acoustic wave signal at sample surface
It is acquired, collected signal is observed and recorded also with oscillograph.
(4) corresponding frequency domain is done to collected signal twice to change, and calculated using formula (1) and obtain surface acoustic wave
Velocity of wave, the x in formula (1)2-x1Distance L (12mm) as in Piezoelectric detector between two probes.
Claims (4)
1. a kind of method for obtaining print surface acoustic wave phase velocity using dual probe piezoelectric transducer, used sensor include
Metal shell, preceding piezoelectric probe, rear piezoelectric probe are opened up in the bottom of metal shell there are two parallel through-hole, and preceding piezoelectricity is visited
The splitter of head and rear piezoelectric probe is stretched out from parallel via holes, is offered at the top of metal shell corresponding with two parallel via holes
Aperture, the top of two piezoelectric probes is fixedly connected with a tubing string respectively, and the conducting wire being connected with piezoelectric probe is led from tubing string
Metal shell out is filled with insulating materials around rear piezoelectric probe, and preceding piezoelectric probe, which is placed in inside metal shell, to be not filled by absolutely
In the partial cavity of edge material, piezoelectric probe be can move up and down before the presence of partial cavity makes.It is obtained using such sensor
The method of coupongs surface acoustic wave phase velocity, including the following steps:
(1) removable dual probe piezoelectric transducer is placed in sample surface to be measured；
(2) preceding piezoelectric probe is placed in lowest part, makes its contact measured sample surface, acquire the sound surface at sample surface to be measured
Wave signal；
(3) preceding piezoelectric probe is moved up, away from sample surface to be measured, acquires the surface acoustic wave letter at sample surface to be measured
Number；
(4) corresponding frequency domain is done to collected surface acoustic wave signal twice to change, and calculate the velocity of wave of surface acoustic wave.
2. the method according to claim 1, wherein the tubing string is cylindrical metal pipe.
3. the method according to claim 1, wherein being provided with and rear piezoelectric probe ruler on the periphery of partial cavity
The very little vertical baffle to match, to do so that the slideway that can be moved up and down of popping one's head in.
4. the method according to claim 1, wherein the insulating materials is polytetrafluoroethylene material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910158332.5A CN109946386B (en) | 2019-02-28 | 2019-02-28 | Method for acquiring acoustic surface wave phase velocity of sample wafer by using dual-probe piezoelectric sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910158332.5A CN109946386B (en) | 2019-02-28 | 2019-02-28 | Method for acquiring acoustic surface wave phase velocity of sample wafer by using dual-probe piezoelectric sensor |
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| Publication Number | Publication Date |
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| CN109946386A true CN109946386A (en) | 2019-06-28 |
| CN109946386B CN109946386B (en) | 2021-08-06 |
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| CN201910158332.5A Expired - Fee Related CN109946386B (en) | 2019-02-28 | 2019-02-28 | Method for acquiring acoustic surface wave phase velocity of sample wafer by using dual-probe piezoelectric sensor |
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Citations (6)
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| JP2007335939A (en) * | 2006-06-12 | 2007-12-27 | Epson Toyocom Corp | Probe device for adjustment and method of measuring frequency of surface mount type piezoelectric oscillator |
| CN102252967A (en) * | 2011-04-06 | 2011-11-23 | 天津大学 | Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film |
| CN104019777A (en) * | 2014-06-13 | 2014-09-03 | 西安热工研究院有限公司 | Method for ultrasonic measurement of depth of crack on surface of turbine blade |
| CN107688051A (en) * | 2017-08-15 | 2018-02-13 | 浙江大学 | A kind of measuring method of the subsurface defect width based on Laser thermo-elastic generated surface acoustic waves |
| CN107727747A (en) * | 2017-11-08 | 2018-02-23 | 中国石油集团渤海石油装备制造有限公司 | A kind of big chip twin crystal longitudinal wave probe of high-frequency |
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
-
2019
- 2019-02-28 CN CN201910158332.5A patent/CN109946386B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007335939A (en) * | 2006-06-12 | 2007-12-27 | Epson Toyocom Corp | Probe device for adjustment and method of measuring frequency of surface mount type piezoelectric oscillator |
| CN102252967A (en) * | 2011-04-06 | 2011-11-23 | 天津大学 | Piezoelectric detection device based on LSAW (laser surface acoustic wave) locating of PVDF (Polyvinylidene Fluoride) piezoelectric thin film |
| CN104019777A (en) * | 2014-06-13 | 2014-09-03 | 西安热工研究院有限公司 | Method for ultrasonic measurement of depth of crack on surface of turbine blade |
| CN107688051A (en) * | 2017-08-15 | 2018-02-13 | 浙江大学 | A kind of measuring method of the subsurface defect width based on Laser thermo-elastic generated surface acoustic waves |
| CN107727747A (en) * | 2017-11-08 | 2018-02-23 | 中国石油集团渤海石油装备制造有限公司 | A kind of big chip twin crystal longitudinal wave probe of high-frequency |
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
Non-Patent Citations (2)
| Title |
|---|
| XIA XIAO等: "Nondestructive determination of film thickness with laser-induced surface acoustic waves", 《CHIN. PHYS. B》 * |
| 门平 等: "测量距离对超声表面波评价不同组织的材料表层硬度的影响", 《中国表面工程》 * |
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