CN109945996A - A kind of novel robot electronic skin and preparation method thereof - Google Patents

A kind of novel robot electronic skin and preparation method thereof Download PDF

Info

Publication number
CN109945996A
CN109945996A CN201910219611.8A CN201910219611A CN109945996A CN 109945996 A CN109945996 A CN 109945996A CN 201910219611 A CN201910219611 A CN 201910219611A CN 109945996 A CN109945996 A CN 109945996A
Authority
CN
China
Prior art keywords
layer
electronic skin
electrode layer
novel robot
robot electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910219611.8A
Other languages
Chinese (zh)
Inventor
王凤霞
林起航
章云霖
陈涛
孙立宁
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou University
Original Assignee
Suzhou University
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou University filed Critical Suzhou University
Priority to CN201910219611.8A priority Critical patent/CN109945996A/en
Publication of CN109945996A publication Critical patent/CN109945996A/en
Pending legal-status Critical Current

Links

Abstract

The invention discloses a kind of novel robot electronic skin and preparation method thereof, which includes the pressure sensitive cells and electroluminescence cell of compound setting, is not only responded to ambient pressure, and can be shown by electroluminescence cell.Electronic skin preparation method provided by the invention is simple, low energy consumption, is suitable for large area and prepares, and the electronic skin of preparation has the advantages such as low cost, high sensitivity, high stability, and have the characteristics such as flexible, stretchable, it is with a wide range of applications in robot field.

Description

A kind of novel robot electronic skin and preparation method thereof
Technical field
The invention belongs to flexible sensing technical field, it is related to a kind of robot electronic skin and its preparation, and in particular to one The kind novel robot electronic skin and preparation method thereof compound based on pressure sensitive cells and electroluminescence cell.
Background technique
Robot is the automation for integrating the multidisciplinary advanced technology such as machinery, electronics, control, sensing, artificial intelligence Equipment.After being born from Robot industry in 1956, by 60 years developments, robot be widely used in equipment preparation, The high technology industries such as new material, biological medicine, wisdom new energy.Robot and artificial intelligence technology, advanced technology of preparing and movement The fusion development of Internet technology has pushed the change of human society life mode.
Robot carries out corresponding operation to preferably realize the perception for external environment, it is necessary to have and The sensing capabilities such as the similar tactile of the mankind, vision, the sense of hearing.In order to realize these functions, under the effort of scientist, electronic skin It is continuously created and, for imitating the sense organ of the mankind, external environment is perceived, robot operating system is to obtained letter It number is handled, to carry out a series of behavior.
Electronic skin, a kind of system that robot can be allowed to generate tactile, structure is simple, can be processed to various shapes Shape can be attached to equipment surface as clothes, and robot perception can be allowed to believe to the place of object and orientation and hardness etc. Breath.But general electronic skin is translated into electricity under a series of auxiliary of additional circuit modules by perceiving outside stimulus Signal, such as capacitor, resistance variations are learned, operates extremely complex, needs many special instruments, it is with high costs, and do not have There is visuality, can not can not be made a response in time by stimulation suffered by direct visual perception robot, operator.
Summary of the invention
In view of this, that the purpose of the present invention is to provide a kind of is compound based on pressure sensitive cells and electroluminescence cell Novel robot electronic skin, pointedly to solve deficiency of the existing electronic skin in terms of visualizing with human-computer interaction, Widen the application field of robot electronic skin.
Novel robot electronic skin of the invention, including the successively pressure sensitive cells of compound setting and electroluminescent list Member.
Wherein, the pressure sensitive cells include flexible substrates and set gradually power sensitive layer on a flexible substrate and Upper electrode layer.
The flexible substrates are dimethyl silicone polymer (PDMS), platinum catalysis silicon rubber (Eco-flex) polyimides (PI), one of polyethylene terephthalate (PET) or a variety of.
The power sensitive layer includes the conductive layer of pyramid micro-structure.
The upper electrode layer of the pressure sensitive cells is carbon nanotube, silver nanowires, copper nano-wire, nanowires of gold, leads One of graphene is a variety of.
Wherein, the electroluminescence cell includes the lower electrode layer, luminescent layer and upper electrode layer set gradually.
The electroluminescence cell lower electrode layer and upper electrode layer are carbon nanotube, silver nanowires, copper nano-wire, Jenner One of rice noodles, conductive graphene are a variety of.
The luminescent layer is the doped layer of gel rubber material and luminescent quantum dot.
The gel rubber material be sodium chloride hydrogel, calcium nitrate hydrogel, lithium chloride hydrogel, lithium fluoride hydrogel, One of poly ion liquid gel or cross-linked gel are a variety of.
The luminescent quantum dot is one of chromic sulfide, zinc sulphide, vulcanization zinc-copper, tin chromium or a variety of.
Present invention provides a kind of preparation methods of above-mentioned novel robot electronic skin, include the following steps:
S1, pyramid microstructure graph is prepared on a flexible substrate;
S2, one layer of conductive layer formation power sensitive layer is shifted on pyramid microstructure graph;
S3, upper electrode layer of the electrode layer as pressure sensitive cells is prepared below the flexible material of face on the electrically conductive;
S4, lower electrode layer of the electrode layer as electroluminescence cell is prepared again on flexible material;
S5, gel doped quantum dot layer is prepared on the lower electrode layer of electroluminescence cell as luminescent layer;
S6, the upper electrode layer for preparing electroluminescence cell on the light-emitting layer.
Compared with prior art, the invention has the benefit that
Novel robot electronic skin provided by the invention can not only perceive external force, and can pass through electroluminescent The intensity of unit light shows.The electronic skin has the advantages that high flexibility, highly sensitive, inexpensive, production is simple, for intelligence There is great progradation in the fields such as the development of energy Robot industry, safe early warning, human-computer interaction.
Detailed description of the invention
Fig. 1 is the concise structure schematic diagram of novel robot electronic skin of the invention;
Fig. 2 is electron microscope picture (5 μ of the pyramid microstructured conductive layers of novel robot electronic skin of the invention m);
Fig. 3 is the electric property figure of the pyramid microstructured conductive layers of novel robot electronic skin of the invention.
Specific embodiment
Below in conjunction with the embodiment of the present invention and attached drawing, technical solution in the embodiment of the present invention carries out detailed retouch It states.
Embodiment 1
PDMS prepolymer is poured in the mold made, is placed on warm table and heats, taken off after solidification, as entire electricity The flexible substrates 1 of sub- skin.The mold for producing pyramid microstructure aspects on silicon plate with etching method, PDMS prepolymer is applied It on the pyramid microstructural mold processed, is placed on warm table and heats, at 80 DEG C, 30 minutes, taken off after solidification.With spraying Method coat carbon nanotube on the PDMS with pyramid micro-structure, as power sensitive layer 2.In the PDMS that one piece is made Lower section covers one layer of silver nanowires electrode, the upper electrode layer 3 as pressure sensitive cells with sputtering mode.Then on PDMS Side covers one layer of conductive graphene with spraying method, the lower electrode layer 4 as electroluminescence cell.Later, with sodium chloride water-setting Glue adulterates chromic sulfide, stirs 2 hours in a vacuum, heats 1 hour on warm table, form solid ion doping quantum point Composite layer is placed on above conductive graphene layer, the luminescent layer 5 as electroluminescence cell.One is covered with spraying method on it Layer carbon nanotube, the upper electrode layer 6 as electroluminescence cell.Finally use the mode of hot pressing by pressure sensitive cells and electroluminescent hair Light unit is combined together, and structure is as shown in Figure 1.
Embodiment 2
Ecoflex prepolymer is poured in the mold made, is placed on warm table and heats, taken off after solidification, as whole The flexible substrates of a electronic skin.The mold for producing pyramid microstructure aspects on silicon plate with etching method, by PDMS pre-polymerization Object is coated on the pyramid microstructural mold processed, is placed on warm table and is heated, and at 80 DEG C, 30 minutes, is taken off after solidification.With Sputtering mode coated with metal silver nanowires on the PDMS with pyramid micro-structure, as power sensitive layer.It is made at one piece PDMS below, with sputtering mode, cover one layer of nanowires of gold electrode, the upper electrode layer as pressure sensitive cells.Then exist One layer of conductive graphene is covered with spraying method above PDMS, the lower electrode layer as electroluminescence cell.Later, calcium nitrate is used Hydrogel doped zinc sulphide vibrates 30 minutes on oscillating table, heats 1 hour under vacuum, form solid ions dosage The composite layer of son point, is placed on above conductive graphene layer, the luminescent layer as electroluminescence cell.It is covered on it with spraying method Upper one layer of carbon nanotube, the upper electrode layer as electroluminescence cell.Finally use the mode of hot pressing by pressure sensitive cells and electricity Electroluminescent unit is combined together.
Embodiment 3
PDMS prepolymer is poured in the mold made, is placed on warm table and heats, taken off after solidification, as entire electricity The flexible substrates of sub- skin.The mold for producing pyramid microstructure aspects on silicon plate with etching method, PDMS prepolymer is applied It on the pyramid microstructural mold processed, is placed on warm table and heats, at 80 DEG C, 30 minutes, taken off after solidification.With spraying Mode coats conductive graphene on the PDMS with pyramid micro-structure, as power sensitive layer.In the PDMS that one piece is made Lower section covers one layer of silver nanowires electrode, the upper electrode layer as pressure sensitive cells with sputtering mode.Then on PDMS Side covers one layer of conductive graphene with spraying method, the lower electrode layer as electroluminescence cell.Later, with lithium fluoride hydrogel Chromic sulfide is adulterated, is vibrated on oscillating table 30 minutes, is heated 1 hour under vacuum, form solid ion doping quantum point Composite layer is placed on above conductive graphene layer, the luminescent layer as electroluminescence cell.One layer is covered with sputtering mode on it Nano line electrode, the upper electrode layer as electroluminescence cell.Finally use the mode of hot pressing by pressure sensitive cells and electroluminescent hair Light unit is combined together.
Embodiment 4
Ecoflex prepolymer is poured in the mold made, is placed on warm table and heats, taken off after solidification, as whole The flexible substrates of a electronic skin.The mold for producing pyramid microstructure aspects on silicon plate with etching method, by PDMS pre-polymerization Object is coated on the pyramid microstructural mold processed, is placed on warm table and is heated, and at 80 DEG C, 30 minutes, is taken off after solidification.With Spraying method coats carbon nanotube on the PDMS with pyramid micro-structure, as power sensitive layer.It is made at one piece Below PDMS, with sputtering mode, one layer of nanowires of gold electrode, the upper electrode layer as pressure sensitive cells are covered.Then exist One layer of carbon nanotube is covered with spraying method above PDMS, the lower electrode layer as electroluminescence cell.Later, with sodium chloride water Gel doped tin chromium vibrates 30 minutes on oscillating table, heats 1 hour under vacuum, form solid ion doping quantum The composite layer of point is placed on above carbon nanotube layer, the luminescent layer as electroluminescence cell.One is covered with sputtering mode on it Layer metal silver nanowires, the upper electrode layer as electroluminescence cell.Finally use the mode of hot pressing by pressure sensitive cells and electricity Electroluminescent unit is combined together.
Embodiment 5
PDMS prepolymer is poured in the mold made, is placed on warm table and heats, taken off after solidification, as entire electricity The flexible substrates of sub- skin.The mold for producing pyramid microstructure aspects on silicon plate with etching method, PDMS prepolymer is applied It on the pyramid microstructural mold processed, is placed on warm table and heats, at 80 DEG C, 30 minutes, taken off after solidification.With sputtering Mode coats copper as power sensitive layer on the PDMS with pyramid micro-structure.Below the PDMS that one piece is made, with spray The method of ink print covers one layer of silver nanowires electrode, the upper electrode layer as pressure sensitive cells.Then it is used above PDMS Spraying method covers one layer of conductive graphene, the lower electrode layer as electroluminescence cell.Later, it is mixed with poly ion liquid gel Miscellaneous tin chromium vibrates 30 minutes on oscillating table, heats one hour under vacuum, form answering for solid ion doping quantum point Layer is closed, is placed on above conductive graphene layer, the luminescent layer as electroluminescence cell.One layer of gold is covered with sputtering mode on it Belong to silver, the upper electrode layer as electroluminescence cell.Finally use the mode of hot pressing by power sensing unit and electroluminescence cell knot It is combined.
The pressure sensitive unit of novel robot electronic skin of the invention is due to using with pyramid micro-structure Power sensitive layer has apparent electrical response signal for pressure.Electroluminescent material is based on solutionization processing preparation, by solution The gel of change adulterates luminescent quantum dot material, to prepare luminous composite layer, has that simple process, low in cost, material is sharp The features such as high, highly sensitive with rate, electrical signal derived from the pressure sensitive unit for bottom convert it into luminous composite layer The luminous intensity of itself is intuitive, easy.The novel robot electronic skin of preparation is in outside stimulus visualization, human-computer interaction, peace The fields such as full early warning have broad application prospects.

Claims (9)

1. a kind of novel robot electronic skin, which is characterized in that including successively pressure sensitive cells of compound setting and electroluminescent Luminescence unit;
Wherein, the pressure sensitive cells include flexible substrates and set gradually power sensitive layer on a flexible substrate and power on Pole layer;The electroluminescence cell includes the lower electrode layer, luminescent layer and upper electrode layer set gradually.
2. novel robot electronic skin according to claim 1, which is characterized in that the flexible substrates are poly- diformazan Radical siloxane, hydrogenated styrene-butadiene block copolymer, platinum catalysis silicon rubber, polyimides, polyethylene terephthalate One of or it is a variety of.
3. novel robot electronic skin according to claim 1, which is characterized in that the power sensitive layer includes golden word The conductive layer of tower micro-structure.
4. novel robot electronic skin according to claim 1, which is characterized in that the pressure sensitive cells it is upper Electrode layer is one of carbon nanotube, silver nanowires, copper nano-wire, nanowires of gold, conductive graphene or a variety of.
5. novel robot electronic skin according to claim 1, which is characterized in that electric under the electroluminescence cell Pole layer and upper electrode layer are one of carbon nanotube, silver nanowires, copper nano-wire, nanowires of gold, conductive graphene or a variety of.
6. novel robot electronic skin according to claim 1, which is characterized in that the luminescent layer is gel rubber material With the doped layer of luminescent quantum dot.
7. novel robot electronic skin according to claim 6, which is characterized in that the gel rubber material is sodium chloride In hydrogel, calcium nitrate hydrogel, lithium chloride hydrogel, lithium fluoride hydrogel, poly ion liquid gel or cross-linked gel It is one or more.
8. novel robot electronic skin according to claim 6, which is characterized in that the luminescent quantum dot is vulcanization One of chromium, zinc sulphide, vulcanization zinc-copper, tin chromium are a variety of.
9. a kind of preparation method of the claim 1~8 novel robot electronic skin, which is characterized in that including following steps It is rapid:
S1, pyramid microstructure graph is prepared on a flexible substrate;
S2, one layer of conductive layer formation power sensitive layer is shifted on pyramid microstructure graph;
S3, upper electrode layer of the electrode layer as pressure sensitive cells is prepared below the flexible material of face on the electrically conductive;
S4, lower electrode layer of the electrode layer as electroluminescence cell is prepared again on flexible material;
S5, gel doped quantum dot layer is prepared on the lower electrode layer of electroluminescence cell as luminescent layer;
S6, the upper electrode layer for preparing electroluminescence cell on the light-emitting layer.
CN201910219611.8A 2019-03-21 2019-03-21 A kind of novel robot electronic skin and preparation method thereof Pending CN109945996A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910219611.8A CN109945996A (en) 2019-03-21 2019-03-21 A kind of novel robot electronic skin and preparation method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910219611.8A CN109945996A (en) 2019-03-21 2019-03-21 A kind of novel robot electronic skin and preparation method thereof

Publications (1)

Publication Number Publication Date
CN109945996A true CN109945996A (en) 2019-06-28

Family

ID=67011284

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910219611.8A Pending CN109945996A (en) 2019-03-21 2019-03-21 A kind of novel robot electronic skin and preparation method thereof

Country Status (1)

Country Link
CN (1) CN109945996A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110608825A (en) * 2019-09-12 2019-12-24 复旦大学 Flexible pressure sensor based on polyimide substrate microstructure and preparation method thereof
CN112097962A (en) * 2020-09-11 2020-12-18 苏州大学 Triboelectric pressure sensor and preparation method thereof
CN112321862A (en) * 2020-11-11 2021-02-05 杭州师范大学 Simple process for high-transparency multifunctional ultrathin ionized skin
CN112798153A (en) * 2020-12-25 2021-05-14 苏州大学 Flexible capacitive pressure sensor and preparation method thereof
CN113103259A (en) * 2021-05-17 2021-07-13 浙江大学 Interactive flexible robot skin of extensible
CN116202661A (en) * 2023-01-10 2023-06-02 苏州锐光科技有限公司 Pressure sensor and manufacturing method thereof

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102690646A (en) * 2012-06-04 2012-09-26 仝泽彬 Electrochromism material and electrochromism device
CN103858242A (en) * 2011-08-26 2014-06-11 加州大学校务委员会 Nanostructured transparent conducting oxide electrochromic device
CN104803339A (en) * 2015-04-21 2015-07-29 电子科技大学 Flexible micro pressure sensor and preparation method thereof
US20170338287A1 (en) * 2016-05-18 2017-11-23 Japan Display Inc. Display device
CN108534930A (en) * 2018-03-23 2018-09-14 京东方科技集团股份有限公司 Pressure visualization device and preparation method thereof, detection device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103858242A (en) * 2011-08-26 2014-06-11 加州大学校务委员会 Nanostructured transparent conducting oxide electrochromic device
CN102690646A (en) * 2012-06-04 2012-09-26 仝泽彬 Electrochromism material and electrochromism device
CN104803339A (en) * 2015-04-21 2015-07-29 电子科技大学 Flexible micro pressure sensor and preparation method thereof
US20170338287A1 (en) * 2016-05-18 2017-11-23 Japan Display Inc. Display device
CN108534930A (en) * 2018-03-23 2018-09-14 京东方科技集团股份有限公司 Pressure visualization device and preparation method thereof, detection device

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110608825A (en) * 2019-09-12 2019-12-24 复旦大学 Flexible pressure sensor based on polyimide substrate microstructure and preparation method thereof
CN110608825B (en) * 2019-09-12 2021-08-20 复旦大学 Flexible pressure sensor based on polyimide substrate microstructure and preparation method thereof
CN112097962A (en) * 2020-09-11 2020-12-18 苏州大学 Triboelectric pressure sensor and preparation method thereof
CN112097962B (en) * 2020-09-11 2022-02-22 苏州慧闻纳米科技有限公司 Triboelectric pressure sensor and preparation method thereof
CN112321862A (en) * 2020-11-11 2021-02-05 杭州师范大学 Simple process for high-transparency multifunctional ultrathin ionized skin
CN112321862B (en) * 2020-11-11 2023-03-10 杭州师范大学 Simple process for high-transparency multifunctional ultrathin ionized skin
CN112798153A (en) * 2020-12-25 2021-05-14 苏州大学 Flexible capacitive pressure sensor and preparation method thereof
CN112798153B (en) * 2020-12-25 2022-12-23 苏州大学 Flexible capacitive pressure sensor and preparation method thereof
CN113103259A (en) * 2021-05-17 2021-07-13 浙江大学 Interactive flexible robot skin of extensible
CN116202661A (en) * 2023-01-10 2023-06-02 苏州锐光科技有限公司 Pressure sensor and manufacturing method thereof
CN116202661B (en) * 2023-01-10 2023-09-29 苏州锐光科技有限公司 Pressure sensor and manufacturing method thereof

Similar Documents

Publication Publication Date Title
CN109945996A (en) A kind of novel robot electronic skin and preparation method thereof
Corzo et al. Flexible electronics: status, challenges and opportunities
Lopes et al. Hydroprinted electronics: ultrathin stretchable Ag–In–Ga E-skin for bioelectronics and human–machine interaction
Ma et al. Bimodal tactile sensor without signal fusion for user-interactive applications
Wu Stretchable electronics: functional materials, fabrication strategies and applications
Wu et al. Ultrasensitive, stretchable, and fast-response temperature sensors based on hydrogel films for wearable applications
Won et al. Recent advances in liquid-metal-based wearable electronics and materials
Wang et al. Stretchable unsymmetrical piezoelectric BaTiO3 composite hydrogel for triboelectric nanogenerators and multimodal sensors
Tee et al. Soft electronically functional polymeric composite materials for a flexible and stretchable digital future
Yang et al. Liquid-metal-based super-stretchable and structure-designable triboelectric nanogenerator for wearable electronics
Seung et al. Nanopatterned textile-based wearable triboelectric nanogenerator
Sun et al. Scalable fabrication of hierarchically structured graphite/polydimethylsiloxane composite films for large-area triboelectric nanogenerators and self-powered tactile sensing
Wang et al. Enhanced high-resolution triboelectrification-induced electroluminescence for self-powered visualized interactive sensing
Yi et al. Highly sensitive and wide linear-response pressure sensors featuring zero standby power consumption under bending conditions
CN107525613A (en) Stretchable pliable pressure sensor and its manufacture method
Li et al. Ultrastretchable high-conductivity mxene-based organohydrogels for human health monitoring and machine-learning-assisted recognition
Feng et al. Self-powered multifunctional electronic skin based on carbon nanotubes/poly (dimethylsiloxane) for health monitoring
Zhang et al. Flexible triboelectric tactile sensor based on a robust MXene/leather film for human–machine interaction
Xing et al. Cellulose nanofiber-reinforced MXene membranes as stable friction layers and effective electrodes for high-performance triboelectric nanogenerators
Wang et al. Integrated and shape-adaptable multifunctional flexible triboelectric nanogenerators using coaxial direct ink writing 3D printing
Chen et al. Heterogeneous surface orientation of solution-deposited gold films enables retention of conductivity with high strain—a new strategy for stretchable electronics
CN108333227B (en) Flexible gas sensor and preparation method thereof
Xie et al. A machine learning-combined flexible sensor for tactile detection and voice recognition
CN108076591B (en) The preparation method and preparation facilities of a kind of flexible circuit or electrode
Zhao et al. Track-etch membranes as tools for template synthesis of highly sensitive pressure sensors

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20190628

RJ01 Rejection of invention patent application after publication