CN109932050B - Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system - Google Patents
Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system Download PDFInfo
- Publication number
- CN109932050B CN109932050B CN201910233041.8A CN201910233041A CN109932050B CN 109932050 B CN109932050 B CN 109932050B CN 201910233041 A CN201910233041 A CN 201910233041A CN 109932050 B CN109932050 B CN 109932050B
- Authority
- CN
- China
- Prior art keywords
- optical
- microcavity
- displacement
- coupling
- mixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 230000008878 coupling Effects 0.000 title claims abstract description 62
- 238000010168 coupling process Methods 0.000 title claims abstract description 62
- 238000005859 coupling reaction Methods 0.000 title claims abstract description 62
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 36
- 230000003287 optical effect Effects 0.000 claims abstract description 146
- 239000013307 optical fiber Substances 0.000 claims abstract description 28
- 238000005086 pumping Methods 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 6
- 238000001069 Raman spectroscopy Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 claims description 3
- 239000004005 microsphere Substances 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract description 17
- 238000012545 processing Methods 0.000 abstract description 11
- 238000004891 communication Methods 0.000 abstract description 6
- 238000001514 detection method Methods 0.000 abstract description 5
- 238000004519 manufacturing process Methods 0.000 abstract description 5
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 238000011161 development Methods 0.000 abstract description 3
- 238000000034 method Methods 0.000 description 17
- 230000014509 gene expression Effects 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- 230000008859 change Effects 0.000 description 9
- 230000003321 amplification Effects 0.000 description 4
- 238000009795 derivation Methods 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- 238000003199 nucleic acid amplification method Methods 0.000 description 4
- 238000002310 reflectometry Methods 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000006855 networking Effects 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 229920000148 Polycarbophil calcium Polymers 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 239000013543 active substance Substances 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 230000002269 spontaneous effect Effects 0.000 description 2
- NAWXUBYGYWOOIX-SFHVURJKSA-N (2s)-2-[[4-[2-(2,4-diaminoquinazolin-6-yl)ethyl]benzoyl]amino]-4-methylidenepentanedioic acid Chemical compound C1=CC2=NC(N)=NC(N)=C2C=C1CCC1=CC=C(C(=O)N[C@@H](CC(=C)C(O)=O)C(O)=O)C=C1 NAWXUBYGYWOOIX-SFHVURJKSA-N 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
- G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
- H01S3/08—Construction or shape of optical resonators or components thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The divisional application relates to the technical field of laser self-mixing sensing, the existing laser self-mixing vibration, displacement and speed sensing system is difficult to realize sensing measurement with high precision and high detection sensitivity, the structure is difficult to realize miniaturization in a real sense, the existing laser self-mixing vibration, displacement and speed sensing system cannot be well integrated with a chip of a modern communication system, and large-scale integrated development and application cannot be realized. In order to solve the problems, the application of the divisional application provides a different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system, the system is based on a laser self-mixing interference measurement principle, utilizes an optical microcavity to construct a laser self-mixing sensing system, realizes high-precision and high-sensitivity sensing measurement, is more suitable for large-scale chip manufacturing and processing due to the fact that the system has the advantage of miniaturization, is more suitable for field measurement in narrow and small occasions and complex environments, can be fully combined with a commercial system in the existing optical fiber communication, is low in cost, and can efficiently realize remote and special application occasion sensing and data processing.
Description
The application is divisional application with application number 201610255764.4, application date 2016, 4 and 20, and title "microcavity chip-type laser self-mixing vibration, displacement, and speed sensing method and system".
Technical Field
The invention relates to the technical field of laser self-mixing sensing, in particular to a different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system.
Background
The laser self-mixing interference measurement technology is a modern optical sensing test technology which is used in a laser application system, wherein after emergent light of a laser is reflected or scattered by an external object, a part of light is fed back into a resonant cavity of the laser, the feedback light carries state information of surface elements of the external object, and is mixed and amplified with original output light in the laser cavity to cause changes of output power and output frequency of the laser, and finally, physical quantities such as speed, displacement, vibration, morphology or temperature of a measured object are obtained through demodulation and analysis of the output power or the output frequency. In the laser self-mixing interference system, the laser is not only used as a system light source, but also used as a sensitive element for detecting the surface information of the measured object, thereby simplifying the structure of the laser interference system, being easier to collimate, having simple and compact light path and saving cost.
The laser self-mixing interference measurement technology has the advantages of wide measurement range, high precision, convenient use, compact and small structure, suitability for field measurement and the like due to the natural single-light-path characteristic, thereby being widely applied to the sensing measurement fields of vibration, displacement, speed and the like. However, the existing laser self-mixing vibration (displacement, velocity) sensing system still has the following problems:
1. the laser self-mixing vibration (displacement, speed) sensing device is still based on a space optical device and a traditional optical fiber device, cannot achieve miniaturization in a real sense, and cannot fully embody the superiority of a laser self-mixing vibration (displacement, speed) sensing system relative to other sensing systems (such as a heterodyne interference sensing system).
2. The laser self-mixing sensing signal highly depends on the energy level life of a carrier in a laser cavity, and the laser cannot obtain longer energy level life generally due to the limitation of the cavity structure, the length of a resonant cavity and the loss in the cavity, so that the laser self-mixing vibration (displacement and speed) sensing system is difficult to realize sensing measurement with high precision and high detection sensitivity.
3. Due to the system characteristics, certain limitation exists in the implementation process of distributed sensing, the distributed sensing is difficult to be well integrated with a chip of a communication system, and large-scale integrated development and application cannot be realized.
With the continuous development of optical micromachining technology and micro-device manufacturing technology, the advantages of the micro-cavity laser are more and more obvious compared with other types of lasers, and the micro-cavity laser has the advantages of small volume, low energy consumption, high quality coefficient, large-scale integration realization and the like, so the micro-cavity laser has wide application prospect.
The invention aims to utilize the advantages of the micro-cavity laser, and realizes the vibration (displacement and speed) sensing measurement of an object by using the self-mixing interferometry principle based on the micro-cavity laser, and the technical scheme of the method has not been reported at present.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a microcavity chip type laser self-mixing vibration, displacement and speed sensing method and system based on an optical microcavity.
In order to achieve the technical purpose, the technical scheme of the invention is as follows:
a micro-cavity chip type laser self-mixing vibration, displacement and speed sensing method is characterized in that pump light is coupled into an optical micro-cavity, signal light in the cavity is amplified, resonated and frequency-selected by the optical micro-cavity and then is coupled and output, the output signal light is emitted to the surface of a target to be detected and then returns, feedback signal light carrying information of the target to be detected is coupled again into the optical micro-cavity, the feedback signal light is mixed with original signal light in the optical micro-cavity and finally output, and the vibration, displacement or speed information of the target to be detected is obtained by detecting, demodulating and analyzing power change of the final output signal light.
The sensing method has the following advantages:
1. the optical microcavity device is adopted, so that the miniaturization, networking and chip formation of the laser self-mixing sensing technology are realized;
2. the micro-cavity laser is adopted, so that the defect that the traditional laser self-mixing system light source is difficult to combine with the chip technology is overcome;
3. the optical microcavity coupling is adopted, so that the coupling efficiency is high, and the difficulty that the traditional laser self-mixing system cannot couple laser into an optical fiber at high efficiency is solved;
4. the optical coupling part of the sensing system is compressed to the maximum extent, and the coupling structure is more compact;
5. the whole system has compact structure, flexible and changeable light path, high measurement precision and high detection sensitivity;
6. the system structure is miniaturized, so that the system is more suitable for manufacturing and processing large-scale chips and more suitable for field measurement in narrow occasions and complex environments;
7. the optical fiber sensing and data processing system can be fully combined with a commercial system in the existing optical fiber communication, and sensing and data processing in remote and special application occasions can be realized with low cost and high efficiency.
Preferably, the pump light and the feedback signal light carrying the target information to be measured are coupled from the same position of the optical microcavity and enter the optical microcavity; the coupling is carried out at the same position, and the coupling mechanism is simple.
Preferably, the pump light and the feedback signal light carrying the target information to be measured are coupled into the optical microcavity from different positions of the optical microcavity; coupling at different positions, and adjusting the optical coupling part of the sensing system is more flexible and changeable.
In order to realize the sensing method, the invention provides a microcavity chip type laser self-mixing vibration, displacement and speed sensing system based on an optical microcavity, and the technical scheme comprises two types:
the first technical scheme is as follows: a micro-cavity chip type laser self-mixing vibration, displacement and speed sensing system comprises a pumping light source, a first wavelength division multiplexer, a coupling device, an optical micro-cavity with a gain effect on laser, a second wavelength division multiplexer, an optical circulator, a coupler and a photoelectric detector; the output end of the pumping light source is connected with the first input end of the first wavelength division multiplexer; the output end of the first wavelength division multiplexer and the input end of the second wavelength division multiplexer are coupled with the optical microcavity through a coupling device; the first output end of the second wavelength division multiplexer is connected with the first port of the optical circulator; the second port of the optical circulator emits signal light to a target to be detected and receives the signal light fed back by the target to be detected, and the third port is connected with the input end of the coupler; and a first output end of the coupler is connected with an input end of the photoelectric detector, and a second output end of the coupler is connected with a second input end of the first wavelength division multiplexer.
The sensing system has the following advantages:
1. the optical microcavity device is adopted, so that the miniaturization, networking and chip formation of the laser self-mixing sensing technology are realized;
2. the micro-cavity laser is adopted, so that the defect that the traditional laser self-mixing system light source is difficult to combine with the chip technology is overcome;
3. the optical microcavity coupling is adopted, so that the coupling efficiency is high, and the difficulty that the traditional laser self-mixing system cannot couple laser into an optical fiber at high efficiency is solved;
4. the optical circulator is used for ensuring the injection direction of feedback signal light so as to meet the single operation of an optical path in the optical microcavity and eliminate the interference caused by fusion point scattering and the reverse injection of useless reflected light on the end face into the optical microcavity;
5. the optical coupling part of the sensing system is compressed to the maximum extent, and the coupling structure is more compact;
6. the whole system has compact structure, flexible and changeable light path, high measurement precision and high detection sensitivity;
7. the system structure is miniaturized, so that the system is more suitable for manufacturing and processing large-scale chips and more suitable for field measurement in narrow occasions and complex environments;
8. the optical fiber sensing and data processing system can be fully combined with a commercial system in the existing optical fiber communication, and sensing and data processing in remote and special application occasions can be realized with low cost and high efficiency.
The second technical scheme is as follows: a micro-cavity chip type laser self-mixing vibration, displacement and speed sensing system comprises a pumping light source, a first wavelength division multiplexer, 2 coupling devices, an optical micro-cavity, a second wavelength division multiplexer, an optical circulator and a photoelectric detector; the output end of the pump light source and the input end of the first wavelength division multiplexer are coupled with one side of the optical microcavity through one of the coupling devices; the first output end of the first wavelength division multiplexer is connected with the first port of the optical circulator; the second port of the optical circulator emits signal light to a target to be detected and receives the signal light fed back by the target to be detected; the third port of the optical circulator and the input end of the second wavelength division multiplexer are coupled with the other side of the optical microcavity through another coupling device; and the first output end of the second wavelength division multiplexer is connected with the input end of the photoelectric detector.
The sensing system has the following advantages: besides the advantages of the first technical solution, compared with the first technical solution: the structure is simpler, the number of the optical microcavity coupling positions is two, and the coupling part is adjusted more flexibly and changeably.
In the above two sensing systems:
preferably, the optical microcavity is an optical microcavity doped with an active gain material, and the pump light source generates 980nm pump light or 1480nm pump light accordingly. The active optical microcavity structure is adopted, and the gain material is utilized to realize amplification, resonance and frequency selection of the optical microcavity to the pump light.
Preferably, the optical microcavity is a passive microcavity, and accordingly the optical power of the pump light generated by the pump light source satisfies that the pump light can generate a raman effect after being coupled into the optical microcavity. The passive optical microcavity structure is adopted, and the Raman effect is utilized to realize amplification, resonance and frequency selection of the optical microcavity to the pump light.
Preferably, the coupling device is any one of a taper, an optical fiber with one end polished obliquely, a waveguide and a prism. And multiple coupling modes are optional, so that the device is convenient to apply in different occasions.
Preferably, the optical microcavity has any one of a micro-ring, a microsphere, a micro-disk, a micro-column, a micro-core ring and a deformable cavity. Various structures are optional, so that the application in different occasions is facilitated.
Drawings
FIG. 1 is a schematic diagram of a theoretical model of the present invention;
FIG. 2 is a schematic structural view of embodiment 1 of the present invention;
FIG. 3 is a schematic view of the coupling between the optical fiber taper and the optical microcavity in example 1 of the present invention;
FIG. 4 is a schematic structural view of embodiment 2 of the present invention;
FIG. 5 is a schematic view of the coupling between the optical fiber taper and the optical microcavity in example 2 of the present invention;
reference numerals: 1. the optical fiber laser comprises a pumping light source, 2 parts of a first wavelength division multiplexer, 3 parts of a coupling device, 4 parts of an optical microcavity, 5 parts of a second wavelength division multiplexer, 6 parts of an optical circulator, 7 parts of a coupler and 8 parts of a photoelectric detector.
Detailed Description
The theoretical principle on which the invention is based is as follows:
since the Amplified Spontaneous Emission (ASE) and the amplified spontaneous absorption (ESA) are much weaker than the stimulated emission and the stimulated absorption in the laser generation process, the influence of the ASE and the ESA is ignored, and a theoretical model of the optical microcavity self-mixing sensing can be established, which is shown in fig. 1.
In fig. 1, pump light is coupled into an optical microcavity, the optical microcavity amplifies, resonates, and frequency-selects signal light in the cavity and then couples and outputs the amplified signal light, the output signal light exits to the surface of a target to be detected and returns, feedback light is coupled into the optical microcavity again and mixed and amplified with original output light in the optical microcavity, so that the output power of the final output laser changes, self-mixing interference of the laser is realized, and information of the target to be detected can be obtained through demodulation and analysis of the output power of the output laser.
Based on the theory, the invention provides a microcavity chip type laser self-mixing vibration, displacement and speed sensing system based on an optical microcavity. There are two embodiments of the system depending on the coupling location at which the feedback light is re-coupled into the optical microcavity.
As shown in fig. 2, a microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system includes a pump light source 1, a first wavelength division multiplexer 2, a coupling device 3, an optical microcavity 4 having a gain effect on laser, a second wavelength division multiplexer 5, an optical circulator 6, a coupler 7, and a photodetector 8; the output end of the pumping light source 1 is connected with the first input end of the first wavelength division multiplexer 2; the output end of the first wavelength division multiplexer 2 and the input end of the second wavelength division multiplexer 5 are coupled with the optical microcavity 4 through the coupling device 3; a first output end of the second wavelength division multiplexer 5 is connected with a first port of the optical circulator 6; a second port of the optical circulator 6 emits signal light to a target to be detected and receives the signal light fed back by the target to be detected, and a third port is connected with an input end of the coupler 7; a first output terminal of the coupler 7 is connected to an input terminal of the photodetector 8, and a second output terminal is connected to a second input terminal of the first wavelength division multiplexer 2.
The coupling device 3 is an optical fiber taper, the pump light source 1 generates pump light with the wavelength of 980nm, and the optical microcavity 4 is an optical microcavity of a micro-ring structure doped with active substances.
The sensing process is as follows:
the pump light enters the first wavelength division multiplexer 2 through the first input end of the first wavelength division multiplexer 2 and is output, then enters the optical microcavity 4 through the optical fiber cone coupling, because the optical microcavity 4 is doped with a gain medium, the optical microcavity 4 amplifies, resonates and selects the frequency of the signal light in the cavity, then the signal light is output to the second wavelength division multiplexer 5 through the optical fiber cone coupling by the optical microcavity 4, the second wavelength division multiplexer 5 filters out stray light, the signal light is reserved and is output, the output signal light enters the optical circulator 6 through the first port of the optical circulator 6 and then enters the target to be detected through the second port and returns, the feedback signal light carrying the information of the target to be detected enters the coupler 7, a part of the signal light is output to the photoelectric detector 8 after being split by the coupler 7, the other part of the signal light enters the first wavelength division multiplexer 2 through the second input end of the first wavelength division multiplexer 2 and then enters the optical microcavity 4 through the optical fiber cone coupling again, the signal light finally output by the system (i.e., the self-mixed signal light) is output to the photodetector 8 by the first output terminal of the coupler 7.
The vibration or displacement or speed information of the target to be detected can be obtained by demodulating and analyzing the output power of the self-mixing signal light received by the photoelectric detector 8.
The derivation process of the sensing principle of the sensing system is as follows:
FIG. 3 is a schematic diagram of the coupling between the optical fiber taper and the optical microcavity in example 1.
In fig. 3, P denotes optical power, P denotes pump light, s denotes signal light, in denotes input, out denotes output, seed denotes feedback light reintroduced into the optical microcavity, Laser denotes signal light finally coupled out of the optical microcavity, Laser1 denotes signal light received by the photodetector, and ∈ denotes1And ε2Representing the attenuation of the signal light caused by losses during transmission through the optical microcavity.
The coupling ratio of the optical fiber taper is k1:(1-k1) The splitting ratio of the first output end and the second output end of the coupler is (1-k)2):k2。
The expression of the optical power at the coupling position in the optical microcavity can be obtained through the amplification process and the rate equation, and is as follows:
in the formula (1), alpha is a small signal loss coefficient, L is an optical microcavity length, and delta PpAnd Δ PsRespectively representing the power difference before and after the incidence of the pump light and the signal light,
indicating the saturated optical power of the pump light and the signal light in the optical microcavity.
The optical power expression of the signal light in the optical microcavity is as follows:
p in formula (2)seedThe optical power reflected or scattered back into the optical microcavity by the target to be measured is expressed by the following expression:
in the formula (3), the reaction mixture is,
the effective reflectivity of the external cavity is expressed by the expression:
in the formula (4), rextIs the reflectivity of the target to be measured.
According to the steady-state characteristic of the laser and the structure of the microcavity laser in the figure, a power expression of the signal light can be obtained. Thus, P can be found when the laser parameters, pumping conditions and the target to be measured are givens outThe optical signal power which is finally coupled and output by the optical microcavity is P can be obtained by the numerical solution of (2)LaserExpression (c):
the output power P of the optical signal received by the photodetector (i.e., the self-mixing signal)Laser1The expression of (a) is:
from the derivation process, the displacement (vibration, speed) of the target to be measured can cause the phase of the external cavity to change, so that the feedback light carrying the displacement (vibration, speed) information of the target to be measured finally causes the power of the self-mixing signal light to change, and the frequency information corresponding to the power change is obtained by detecting the power change of the output self-mixing signal light, so that the displacement (vibration, speed) condition of the target to be measured can be obtained.
Embodiment 2 of the present invention is described in detail with reference to fig. 4 and 5, but the present invention is not limited in any way by the claims.
As shown in fig. 4, a microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system includes a pump light source 1, a first wavelength division multiplexer 2, 2 coupling devices 3, an optical microcavity 4, a second wavelength division multiplexer 5, an optical circulator 6, and a photodetector 8; the output end of the pumping light source 1 and the input end of the first wavelength division multiplexer 2 are coupled with one side of the optical microcavity 4 through one of the coupling devices 3; the first output end of the first wavelength division multiplexer 2 is connected with the first port of the optical circulator 6; a second port of the optical circulator 6 emits signal light to a target to be detected and receives the signal light fed back by the target to be detected; the third port of the optical circulator 6 and the input end of the second wavelength division multiplexer 5 are coupled with the other side of the optical microcavity 4 through another coupling device 3; a first output of the second wavelength division multiplexer 5 is connected to an input of the photodetector 8.
The 2 coupling devices 3 are all optical fiber cones, the pump light source 1 generates pump light with the wavelength of 980nm, and the optical microcavity 4 is an optical microcavity of a micro-ring structure doped with active substances.
The sensing process is as follows:
the pumping light enters the optical microcavity 4 through the optical fiber cone from one side of the optical microcavity 4 in a coupling mode, because the optical microcavity 4 is doped with a gain medium, the optical microcavity 4 amplifies, resonates and selects frequency of signal light in the cavity, and then the signal light is coupled and output from two sides of the optical microcavity 4 at the same time, and the two transmission paths are respectively as follows: A. side connected to the first wavelength division multiplexer 2: stray light is filtered by the first wavelength division multiplexer 2, signal light is reserved and output, the output signal light enters the optical circulator 6 from the first port of the optical circulator 6, then enters a target to be detected from the second port and returns, and feedback signal light carrying information of the target to be detected is recoupled from the other side of the optical microcavity 4 through the optical fiber cone and enters the optical microcavity 4; B. side connected to the second wavelength division multiplexer 5: stray light is filtered by the second wavelength division multiplexer 5, and signal light is retained and output to the photodetector 8. The signal light finally output by the system (i.e., the self-mixed signal light) is output to the photodetector 8 by the first output terminal of the second wavelength division multiplexer 5.
The vibration or displacement or speed information of the target to be detected can be obtained by demodulating and analyzing the self-mixing signal light received by the photoelectric detector.
The derivation process of the sensing principle of the sensing system is as follows:
as shown in fig. 5, the coupling of the 2 optical fiber tapers to the optical microcavity in example 2 is schematically illustrated.
In fig. 5, P denotes optical power, P denotes pump light, s denotes signal light, in denotes input, out denotes output, seed denotes feedback light reintroduced into the optical microcavity, Laser1 and Laser2 denote final output signal light at two coupling positions of the optical microcavity, respectively, epsilon1And ε2Indicating the attenuation of the laser light due to losses during transmission through the optical microcavity. The coupling ratios of the 2 optical fiber cones are respectively k1:(1-k1)、k2:(1-k2)。
The expressions of the optical power at two coupling positions in the optical microcavity can be obtained through the amplification process and the rate equation, and are respectively:
in the formulae (7) and (8), α is the small signal loss coefficient, L is the optical microcavity length, Δ PpTo represent
And
difference of (a) PsTo represent
And
the difference of (a).
Indicating the saturated optical power of the pump light and the signal light in the optical microcavity.
The optical power expression of the signal light in the microcavity is as follows:
p in formula (9)seedThe optical power reflected or scattered back into the optical microcavity by the target to be measured is expressed by the following expression:
in the formula (10)
The effective reflectivity of the external cavity is expressed by the expression:
r in formula (11)extIs the reflectivity of the target to be measured.
According to the steady-state characteristic of the laser and the structure of the microcavity laser in the figure, a power expression of the signal light can be obtained. Thus, when the laser parameters, pumping conditions and the object to be measured are given, it is possible to find
Then the output power P of the optical signal received by the photodetector (i.e., the self-mixing signal) can be obtainedLaser2The expression of (a) is:
from the derivation process, the displacement (vibration, speed) of the target to be measured can cause the phase of the external cavity to change, so that the feedback light carrying the displacement (vibration, speed) information of the target to be measured finally causes the power of the self-mixing signal light to change, and the frequency information corresponding to the power change is obtained by detecting the power change of the output self-mixing signal light, so that the displacement (vibration, speed) condition of the target to be measured can be obtained.
With respect to the two embodiments described above, it should be noted that:
1. the optical microcavity is not limited to be an optical microcavity doped with an active gain medium, but can also be replaced by a passive microcavity, and accordingly, a pumping light source needs to provide laser with high enough power, so that the laser generates a Raman effect after entering the passive microcavity, and the optical microcavity can amplify, resonate and select frequency of the laser.
2. The coupling device for the laser to enter the optical microcavity is not limited to a fiber taper, and other coupling devices such as a fiber, a waveguide and a prism with one end polished obliquely can be adopted.
3. The optical microcavity structure is not limited to a micro-ring structure, but may also be a microsphere, a micro-disk, a micro-column, a micro-core ring, a deformable cavity, or other structures.
In summary, the invention has the following advantages:
1. the optical microcavity device is adopted, so that the miniaturization, networking and chip formation of the laser self-mixing sensing technology are realized;
2. the micro-cavity laser is adopted, so that the defect that the traditional laser self-mixing system light source is difficult to combine with the chip technology is overcome;
3. the optical microcavity coupling is adopted, so that the coupling efficiency is high, and the difficulty that the traditional laser self-mixing system cannot couple laser into an optical fiber at high efficiency is solved;
4. the optical circulator is used for ensuring the injection direction of feedback signal light so as to meet the single operation of an optical path in the optical microcavity and eliminate the interference caused by fusion point scattering and the reverse injection of useless reflected light on the end face into the optical microcavity;
5. the optical coupling part of the sensing system is compressed to the maximum extent, and the coupling structure is more compact;
6. the whole system has compact structure, flexible and changeable light path, high measurement precision and high detection sensitivity;
7. the system structure is miniaturized, so that the system is more suitable for manufacturing and processing large-scale chips and more suitable for field measurement in narrow occasions and complex environments;
8. the optical fiber sensing and data processing system can be fully combined with a commercial system in the existing optical fiber communication, and sensing and data processing in remote and special application occasions can be realized with low cost and high efficiency.
It should be understood that the detailed description of the invention is merely illustrative of the invention and is not intended to limit the invention to the specific embodiments described. It will be appreciated by those skilled in the art that the present invention may be modified or substituted equally as well to achieve the same technical result; as long as the use requirements are met, the method is within the protection scope of the invention.
Claims (5)
1. The utility model provides an opposite side coupling formula microcavity chip type laser is from mixing vibration, displacement, speed sensing system which characterized in that: the device comprises a pumping light source (1), a first wavelength division multiplexer (2), 2 coupling devices (3), an optical microcavity (4), a second wavelength division multiplexer (5), an optical circulator (6) and a photoelectric detector (8);
the output end of the pump light source (1) and the input end of the first wavelength division multiplexer (2) are coupled with one side of the optical microcavity (4) through one of the coupling devices (3);
a first output end of the first wavelength division multiplexer (2) is connected with a first port of the optical circulator (6);
a second port of the optical circulator (6) emits signal light to a target to be detected and receives the signal light fed back by the target to be detected;
the third port of the optical circulator (6) and the input end of the second wavelength division multiplexer (5) are coupled with the other side of the optical microcavity (4) through another coupling device (3);
and a first output end of the second wavelength division multiplexer (5) is connected with an input end of the photoelectric detector (8).
2. The heterolateral coupling microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system of claim 1, wherein: the optical microcavity (4) is doped with an active gain material, and accordingly the pump light source (1) generates 980nm pump light or 1480nm pump light.
3. The heterolateral coupling microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system of claim 1, wherein: the optical microcavity (4) is a passive microcavity, and accordingly the optical power of the pump light generated by the pump light source (1) meets the requirement that the pump light can generate a Raman effect after being coupled into the optical microcavity.
4. The heterolateral coupling microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system of claim 1, wherein: the coupling device (3) is any one of an optical fiber cone, an optical fiber with one end being polished obliquely, a waveguide and a prism.
5. The heterolateral coupling microcavity chip-type laser self-mixing vibration, displacement, and speed sensing system of claim 1, wherein: the optical microcavity (4) has any one of a micro-ring, a microsphere, a micro-disc, a micro-column, a micro-core ring and a deformation cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910233041.8A CN109932050B (en) | 2016-04-20 | 2016-04-20 | Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610255764.4A CN105716704B (en) | 2016-04-20 | 2016-04-20 | The chip-shaped laser of microcavity is from mixing vibration, displacement, velocity pick-up method |
| CN201910233041.8A CN109932050B (en) | 2016-04-20 | 2016-04-20 | Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610255764.4A Division CN105716704B (en) | 2016-04-20 | 2016-04-20 | The chip-shaped laser of microcavity is from mixing vibration, displacement, velocity pick-up method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109932050A CN109932050A (en) | 2019-06-25 |
| CN109932050B true CN109932050B (en) | 2021-06-08 |
Family
ID=56161619
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910233041.8A Expired - Fee Related CN109932050B (en) | 2016-04-20 | 2016-04-20 | Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system |
| CN201910232513.8A Expired - Fee Related CN109932049B (en) | 2016-04-20 | 2016-04-20 | Homonymy coupling type microcavity chip-type laser self-mixing sensing system |
| CN201610255764.4A Active CN105716704B (en) | 2016-04-20 | 2016-04-20 | The chip-shaped laser of microcavity is from mixing vibration, displacement, velocity pick-up method |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910232513.8A Expired - Fee Related CN109932049B (en) | 2016-04-20 | 2016-04-20 | Homonymy coupling type microcavity chip-type laser self-mixing sensing system |
| CN201610255764.4A Active CN105716704B (en) | 2016-04-20 | 2016-04-20 | The chip-shaped laser of microcavity is from mixing vibration, displacement, velocity pick-up method |
Country Status (1)
| Country | Link |
|---|---|
| CN (3) | CN109932050B (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108426631B (en) * | 2018-02-09 | 2020-06-26 | 北京航空航天大学 | Vibration measurement method and system of optical echo wall type micro resonant cavity |
| CN110940941B (en) * | 2018-04-12 | 2022-03-25 | 安徽大学 | Magnetic field sensing measurement device and method based on multi-longitudinal-mode self-mixing effect |
| CN110456366B (en) * | 2019-07-19 | 2022-01-14 | 华为技术有限公司 | Position detection device and terminal |
| CN111398177B (en) * | 2020-04-01 | 2021-01-08 | 武汉理通微芬科技有限公司 | Photoacoustic spectrum detection chip sensor and manufacturing method thereof |
| CN113970370B (en) * | 2020-07-24 | 2024-02-02 | 泉芯集成电路制造(济南)有限公司 | Vibration monitoring system and vibration monitoring method of grinding platform |
| CN116878377B (en) * | 2023-08-02 | 2024-04-05 | 哈尔滨工业大学 | Assembly alignment method and device for multi-degree-of-freedom microprism type interference sensor head |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103337776A (en) * | 2013-06-09 | 2013-10-02 | 安徽大学 | All-optical fiber type self-mixing distance measuring system of laser |
| CN104634256A (en) * | 2015-03-09 | 2015-05-20 | 北京交通大学 | Fiber laser single-wave self-mixing interference displacement measuring system |
| CN105486224A (en) * | 2015-11-25 | 2016-04-13 | 上海珍岛信息技术有限公司 | Laser self-mixing interference measuring system |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6741628B2 (en) * | 2000-03-09 | 2004-05-25 | California Institute Of Technology | Micro-cavity laser |
| US6901101B2 (en) * | 2000-11-28 | 2005-05-31 | Rosemount Inc. | Optical sensor for measuring physical and material properties |
| US7283214B2 (en) * | 2005-10-14 | 2007-10-16 | Microsoft Corporation | Self-mixing laser range sensor |
| JP2007180152A (en) * | 2005-12-27 | 2007-07-12 | Canon Inc | Measuring method and apparatus, exposure apparatus, and method of manufacturing device |
| US8416424B2 (en) * | 2008-07-07 | 2013-04-09 | Koninklijke Philips Electronics N.V. | Laser self-mixing measuring device |
| CN101387496B (en) * | 2008-09-25 | 2010-06-16 | 中北大学 | Micro-displacement sensor based on ring micro-chamber and cantilever beam of integration plane |
| CN101975763A (en) * | 2010-08-24 | 2011-02-16 | 中北大学 | Integrated probe type microsphere cavity sensor |
| JP2012098169A (en) * | 2010-11-02 | 2012-05-24 | Tokai Univ | Laser doppler speed meter |
| CN102435348B (en) * | 2011-11-17 | 2014-01-08 | 中北大学 | High-Q optical microcavity-based temperature sensor and distributed type temperature sensing network |
| CN102519380B (en) * | 2011-12-19 | 2014-07-23 | 无锡成电光纤传感科技有限公司 | Micro-cavity Fabry-Perot sensor based on fibers, manufacturing method thereof, and detection apparatus |
| US8824519B1 (en) * | 2013-03-01 | 2014-09-02 | Princeton Optronics Inc. | VCSEL pumped fiber optic gain systems |
| CN104934850B (en) * | 2015-07-03 | 2018-09-11 | 安徽大学 | tunable optical micro-cavity Raman laser |
| CN105098575A (en) * | 2015-07-22 | 2015-11-25 | 南京邮电大学 | Narrow-band fiber laser for mixed medium microcavity full-optical tuning |
-
2016
- 2016-04-20 CN CN201910233041.8A patent/CN109932050B/en not_active Expired - Fee Related
- 2016-04-20 CN CN201910232513.8A patent/CN109932049B/en not_active Expired - Fee Related
- 2016-04-20 CN CN201610255764.4A patent/CN105716704B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103337776A (en) * | 2013-06-09 | 2013-10-02 | 安徽大学 | All-optical fiber type self-mixing distance measuring system of laser |
| CN104634256A (en) * | 2015-03-09 | 2015-05-20 | 北京交通大学 | Fiber laser single-wave self-mixing interference displacement measuring system |
| CN105486224A (en) * | 2015-11-25 | 2016-04-13 | 上海珍岛信息技术有限公司 | Laser self-mixing interference measuring system |
Non-Patent Citations (1)
| Title |
|---|
| 单模VCSEL自混合测速、测距及三维图像技术的研究;徐军;《中国优秀博硕士学位论文全文数据库（博士） 信息科技辑》;20070415(第04期);第2,31-33页 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105716704B (en) | 2019-05-28 |
| CN105716704A (en) | 2016-06-29 |
| CN109932050A (en) | 2019-06-25 |
| CN109932049B (en) | 2021-06-08 |
| CN109932049A (en) | 2019-06-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109932050B (en) | Different-side coupling type microcavity chip type laser self-mixing vibration, displacement and speed sensing system | |
| CN109782298B (en) | Different-side coupling type microcavity chip type laser self-mixing distance sensing system | |
| US7283216B1 (en) | Distributed fiber sensor based on spontaneous brilluoin scattering | |
| CN113252572B (en) | Optical fiber tip type photoacoustic gas sensing system and method | |
| CN103439268B (en) | Based on the high sensitivity diaphragm type optoacoustic spectroscopy sensor certainly mixing | |
| CN108572047B (en) | Optical fiber air pressure sensing device based on multiple Fabry-Perot microcavities | |
| CN109883458B (en) | Brillouin sensing system adopting optical microwave frequency discriminator and polarization scrambler | |
| US20150103350A1 (en) | Gas detection system using fiber laser with active feedback compensation by reference cavity | |
| CN102809430B (en) | Device for Brillouin optical time domain reflectometer based on optical phase-locked ring | |
| CN203310428U (en) | Distributed Brillouin optical fiber sensing system based on coherent detection | |
| CN103323041A (en) | Distributed Brillouin optical fiber sensing system based on coherent detection | |
| CN109950791A (en) | Negative-feedback narrow linewidth semiconductor laser based on micro-ring resonant cavity | |
| CN111413317B (en) | Stimulated Raman gas sensing system based on annular optical fiber resonant cavity | |
| CN104390723A (en) | Multi-wavelength Brillouin fiber laser based optical fiber temperature sensor | |
| CN103337776B (en) | All-optical fiber type self-mixing distance measuring system of laser | |
| CN105356210B (en) | A kind of frequency stabilization random fiber laser and narrow linewidth measurement method | |
| CN100570280C (en) | Four-frequency differential Brillouin optical fiber gyroscope | |
| CN204115925U (en) | Multaxial stress photonic crystal fiber proving installation | |
| CN1264000C (en) | Self-injection locking fibre-optical laser circulator | |
| CN1995973B (en) | Gas measuring method based on semiconductor laser moding characteristics and sensor therefor | |
| CN214702149U (en) | Optical fiber sensor capable of simultaneously monitoring temperature and strain | |
| CN109687272A (en) | Er-doped microsphere laser device based on Microsphere Cavities feedback | |
| CN113029957A (en) | Gas sensor based on evanescent wave | |
| CN105203225A (en) | Optical fiber grating temperature detecting method and device | |
| CN209642043U (en) | Negative-feedback narrow linewidth semiconductor laser based on micro-ring resonant cavity |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210608 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |