CN109930172A - Copper electrodeposition equipment - Google Patents

Copper electrodeposition equipment Download PDF

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Publication number
CN109930172A
CN109930172A CN201910284535.9A CN201910284535A CN109930172A CN 109930172 A CN109930172 A CN 109930172A CN 201910284535 A CN201910284535 A CN 201910284535A CN 109930172 A CN109930172 A CN 109930172A
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CN
China
Prior art keywords
plate
frame
cathode
anode
girders
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Pending
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CN201910284535.9A
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Chinese (zh)
Inventor
王晓丹
李冲
徐小锋
邬传谷
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China ENFI Engineering Corp
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China ENFI Engineering Corp
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Publication date
Application filed by China ENFI Engineering Corp filed Critical China ENFI Engineering Corp
Priority to CN201910284535.9A priority Critical patent/CN109930172A/en
Publication of CN109930172A publication Critical patent/CN109930172A/en
Priority to PCT/CN2020/084261 priority patent/WO2020207480A1/en
Priority to EA202192763A priority patent/EA202192763A1/en
Priority to CL2021002648A priority patent/CL2021002648A1/en
Pending legal-status Critical Current

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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/20Recycling

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  • Electrolytic Production Of Metals (AREA)
  • Electroplating Methods And Accessories (AREA)

Abstract

The invention discloses a kind of copper electrodeposition equipment, including two girders, two conductive plates, multiple anode plates, multiple cathode plates and multiple frames.Two girders extend along the longitudinal direction and between left and right every being oppositely arranged;Two conductive plates are separately positioned on two girders;Multiple anode plates and multiple cathode plates it is vertically arranged and along the longitudinal direction interleaved arrangement be mounted on two girders, the two sides of multiple anode plates and multiple cathode plates are contacted with the conductive plate on two girders respectively;Frame is equipped with multiple liquid inlet ports and multiple liquid outlets, and multiple frames are separately positioned between adjacent two-by-two anode plate and cathode plate;When anode plate, cathode plate and frame are compacted, frame is sealedly connected on the peripheral portion of adjacent cathode plate and the peripheral portion of anode plate respectively, so as to form confined space between adjacent cathode plate and anode plate;When cathode plate and frame are opened, to take out cathode plate.The copper electrodeposition equipment interpolar is away from the advantages that small, the depth of parallelism is high between anode plate and cathode plate.

Description

Copper electrodeposition equipment
Technical field
The present invention relates to the technical field of wet metallurgy of copper more particularly to a kind of copper electrodeposition equipment.
Background technique
Currently, the equipment that uses of traditional copper electrodeposition process mainly by electrolytic cell, cathode plate, anode plate, conductive plate and into Liquid pipe composition.Electrolytic cell is a kind of open-top receptacle of approximate cuboid.Electrolytic cell main function played in copper electrolytic deposition process It is to contain electrolyte and support cathode plate, anode plate, conductive plate and input duct.Cathode plate is cathode reaction in electrolytic deposition process The carrier of generation, the copper deposition in electrolyte is on cathode plate.Anode plate is the carrier that the reaction of electrolytic deposition process Anodic generates.It leads Battery plate plays the role of conducting electric current.Electrolyte is then passed through in electrolytic cell and is uniformly distributed electrolyte as far as possible by inlet tube.
Cathode plate and anode plate are staggered by certain pole span in electrolytic deposition process, and plate face is immersed in the electricity equipped with electrolyte It solves in slot.Conductive rod on cathode plate and anode plate is overlapped on the conductive plate of electrolysis trough rim.Inlet tube is then located at electrolytic cell Bottom or edge.
Electric current flows into the conductive rod of anode plate from the conductive plate on electrolytic cell one side in electrolytic deposition process, and electric current passes through conductive rod stream Cathode plate plate face is flowed to by electrolyte again after entering anode plate face, electric current flows to cathode plate conductive rod by cathode plate plate face, most Afterwards from the conductive plate that conductive rod flows out to electrolytic cell another side.Electrolyte flows into electrolytic cell by input duct, then passes through electricity Solve the overflow port outflow of slot.
Electrodeposition process is required in the case where being unlikely to cause short circuit, is reduced cathode at a distance from anode, can be dropped in this way The resistance of low electrolyte, to reduce the energy consumption of electrolytic deposition process.In addition cathode plate plate face and anode plate plate face will be kept as far as possible In parallel, be conducive to copper in this way in cathode plate uniform deposition.Economic current density is improved as far as possible, increases the production of unit occupied area Energy.Reduce the uncontrollable discharge of acid mist in electrolytic deposition process to the greatest extent.The occupied electrolyte content of unit polar plate area is reduced, thus Total solution internal circulating load can be reduced, the ac consumption of electrolytic deposition process is reduced.Problem above when being produced using traditional copper electrodeposition equipment It cannot all be well solved, the reason is as follows that:
The first, the copper in the production of copper electrodeposition in electrolysis can be deposited on cathode surface, this just needs regular using special hanger Cathode is taken out from electrolytic cell, the suspension hook on suspender needs the gap across cathode and anode to extract cathode.This is just It is required that cathode must be maintained a certain distance with anode when taking out cathode.
The second, the feed liquor mode of traditional copper electrodeposition equipment electrolyte is a feed liquor house steward feed liquor, if cathode and anode The distance between it is too small electrolyte can be made to be unevenly distributed, aggravate electrodeposition reaction concentration polarization phenomenon;
It is overlapped on the conductive plate of electrolysis trough rim, is immersed in simply by conductive rod due to pole plate when third, actual production Plate face below electrolyte does not limit, and pole plate is in a kind of natural overhang, if conductive rod bottom flatness not enough or Conductive plate levelness is inadequate, can all make pad-face run-off the straight, to influence the depth of parallelism between pole plate, general pole plate bottom edge with The vertical error at top is ± 5mm.
4th, the current density for improving electrodeposition can also aggravate concentration polarization phenomenon simultaneously, if to weaken current density increasing Add and concentration polarization bring is negatively affected, must just improve endless form, be evenly distributed as much as possible electrolyte, and traditional electrodeposition The electrolytic cell of equipment is all unfavorable for weakening concentration polarization due to the arrangement of its own design feature and inlet tube.
5th, traditional electrolyte trough rim wall is needed away from pole plate side there are certain safety lifting distance, generally 50~80mm, Distance of the bottom of electrolytic tank away from pole plate bottom edge is then bigger, this allows for the electrolysis that traditional electrodeposition equipment unit polar plate area is occupied Liquid measure is big, and the amount of solution that Efficient Cycle is participated in electrolytic cell only accounts for the 15.41% of total solution amount.
6th, due to copper electrodeposition process own characteristic, acid mist can be generated in production process, and with the increase of current density And increase.And electrolytic cell is open-top receptacle, has to add activity on electrolytic cell to collect acid mist caused by production process Ventilator cowling traps acid mist by exhausting, but the effect is unsatisfactory.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art.For this purpose, one object of the present invention It is to propose a kind of copper electrodeposition equipment, interpolar when copper electrodeposition produces between anode plate and cathode plate is away from small, anode plate and cathode Parallel errors between plate are small, and cathode-current density is high, and the ac consumption that electrolyte circulation generates is low, and concentration polarization effect is weak.
Copper electrodeposition equipment according to an embodiment of the present invention, comprising:
Two girders, two girders extend along the longitudinal direction and between left and right every being oppositely arranged;
Two conductive plates, two conductive plates are separately positioned on two girders;
Anode plate, the anode plate have multiple, and multiple anode plates are vertically arranged and are alternatively arranged peace along the longitudinal direction On two girders;The two sides of multiple anode plates are contacted with the conductive plate on two girders respectively;
Cathode plate, the cathode plate have it is multiple, multiple cathode plates it is vertically arranged and with multiple anode plates before The arrangement of rear direction interleaved is mounted on two girders;The two sides of multiple cathode plates respectively with two girders On the conductive plate contact;
Frame, the frame are equipped with multiple liquid inlet ports and multiple liquid outlets, and the frame has multiple, multiple frames point It is not arranged between the adjacent two-by-two anode plate and the cathode plate;When the anode plate, the cathode plate and the side When frame is compacted, the frame is sealedly connected on the peripheral portion of the adjacent cathode plate and the periphery of the anode plate respectively Portion, so as to form confined space between the adjacent cathode plate and the anode plate;When the cathode plate and the frame quilt When pulling open, to take out the cathode plate.
Copper electrodeposition equipment according to an embodiment of the present invention, has the advantage that first, when copper electrodeposition produces anode plate with Away from 70~80% for traditional copper electrodeposition equipment, interpolar is greatly reduced away from having for interpolar between cathode plate.The second, electrolytic deposition process Cathode-current density up to 350~500A/m2, 30~40% can be higher by compared to traditional copper electrodeposition equipment, can greatly be mentioned High-copper yield.Reachable ± the 0.5mm of Parallel errors between third, anode plate and cathode plate, only the 10% of traditional equipment;The Four, the electrolyte content having shared by unit polar plate area is small, is only equivalent to the 20~30% of traditional equipment, can effectively reduce and produced The ac consumption of journey generated due to electrolyte circulation;5th, electrolyte endless form is optimized, the dense of electrodeposition reaction is weakened Poor polarity effect;6th, electrolyte is recycled in confined space, and the acid mist that electrolytic deposition process generates can in an organized way absorb;7th, Electrolyte heat insulation effect is good, does not need external heating substantially.
According to one embodiment of present invention, the frame is corrosion-resistant plastic frame.
It according to one embodiment of present invention, further include pressing device, the pressing device includes the thrust being vertically arranged Plate and pressure plate, the thrust plate are mounted on one end of two girders, and the pressure plate is mounted on two girders The other end, the anode plate, the cathode plate and the frame are between the thrust plate and the pressure plate;Work as copper electrode When product, the pressure plate and the thrust plate cooperate the anode plate, the cathode plate and the frame compression.
It according to one embodiment of present invention, further include two pulling plate vehicles, two pulling plate vehicles are separately mounted to two On the lateral surface of the girder, the cathode plate and the anode plate are pulled open.
Further embodiment according to the present invention is respectively equipped with guide rail on the lateral surface of two girders, described in two Pulling plate vehicle is equipped with pawl, and two pulling plate vehicles respectively can be along two guide rail walkings, and pass through two pulling plate vehicles The pawl push the cathode plate or the anode plate aside.
According to one embodiment of present invention, multiple liquid inlet ports are distributed in the bottom edge of the frame and the middle part of side With lower portion, multiple liquid outlets are distributed in the top margin of the frame.
Further embodiment according to the present invention further includes feed liquor branch pipe and time liquid branch pipe, the U-shaped frame of feed liquor branch pipe It is disposed around the lower outside of the frame, multiple liquid inlet ports are connected to the feed liquor branch pipe;Multiple liquid outlets and institute State back the connection of liquid branch pipe.
Further embodiment according to the present invention, described further includes feed liquor house steward, and there are two the feed liquor house stewards, described Feed liquor branch pipe includes bottom tube section and positioned at the vertical tube end at bottom tube section both ends, and the bottom tube section and two vertical segments form described U-shaped frame, two feed liquor house stewards are respectively communicated in the junction of two vertical segments and the bottom tube section.
According to one embodiment of present invention, the frame is fixed with the anode plate.
Further embodiment according to the present invention further includes the first seal washer and the second seal washer;Described first is close Seal washer is arranged between the frame and the anode plate, to be pressed when the anode plate, the cathode plate and the frame When tight, sealed between the frame and the anode plate;Second seal washer is arranged in the frame and the cathode plate Between, it is close between the frame and the cathode plate with when the anode plate, the cathode plate and the frame are compacted Envelope.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures Obviously and it is readily appreciated that, in which:
Fig. 1 is the front schematic view of the copper electrodeposition equipment of the embodiment of the present invention.
Fig. 2 is the schematic top plan view of the copper electrodeposition equipment of the embodiment of the present invention.
Fig. 3 is the enlarged diagram in Fig. 2 at A.
Fig. 4 is the side schematic view of the copper electrodeposition equipment of the embodiment of the present invention.
Copper electrodeposition equipment 100
1 guide rail 11 of girder
2 anode plate of conductive plate, 3 cathode plate 4
5 liquid inlet port of frame, 51 liquid mouth 52
61 pressure plate 62 of thrust plate
7 pawl 71 of pulling plate vehicle
81 feed liquor house steward 82 of feed liquor branch pipe returns liquid branch pipe 83
First seal washer, 91 second seal washer 92
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
Copper electrodeposition equipment 100 according to an embodiment of the present invention is described below with reference to Fig. 1 to Fig. 4.
As shown in Figs 1-4, copper electrodeposition equipment 100 according to an embodiment of the present invention, including two girders, 1, two conductive plate 2, anode plate 3, cathode plate 4 and frame 5.Wherein, two girders 1 extend along the longitudinal direction and between left and right every being oppositely arranged;Two Conductive plate 2 is separately positioned on two girders 1;Anode plate 3 have it is multiple, multiple anode plates 3 it is vertically arranged and along the longitudinal direction between It is mounted on two girders 1 every arrangement, the two sides of multiple anode plates 3 are contacted with the conductive plate 2 on two girders 1 respectively;Cathode Plate 4 have it is multiple, multiple cathode plates 4 it is vertically arranged and with multiple anode plates 3 along the longitudinal direction interleaved arrangement be mounted on two On girder 1;The two sides of multiple cathode plates 4 are contacted with the conductive plate 2 on two girders 1 respectively;Frame 5 is equipped with multiple liquid inlet ports 51 With multiple liquid outlets 52, frame 5 has multiple, and multiple frames 5 are separately positioned between adjacent two-by-two anode plate 3 and cathode plate 4; When anode plate 3, cathode plate 4 and frame 5 are compacted, frame 5 is sealedly connected on the peripheral portion and sun of adjacent cathode plate 4 respectively The peripheral portion of pole plate 3, so as to form confined space between adjacent cathode plate 4 and anode plate 3;When cathode plate 4 and frame 5 are drawn When opening, to take out cathode plate 4.
Specifically, two girders 1 extend along the longitudinal direction and between left and right every being oppositely arranged.By the way that girder 1 is arranged, mainly It plays a supportive role, such as is used to support the components such as anode plate 3, cathode plate 4 and conductive plate 2.
Two conductive plates 2 are separately positioned on two girders 1, that is, a conductive plate 2 is arranged on a girder, another A conductive plate is arranged on another girder.By the way that two conductive plates 2 are arranged, it can be used for leading for anode plate 3 and cathode plate 4 Electricity.Such as anode plate left side and left side girder on conductive plate it is conductive, then on the right side of anode plate and the girder on right side Conductive plate insulation;On the contrary, the conductive plate on the left side of cathode plate and the girder in left side insulate, then the right side and right side of cathode plate Girder on conductive plate it is conductive.
Anode plate 3 has multiple, and multiple anode plates 3 are vertically arranged and are alternatively arranged are mounted on two girders 1 along the longitudinal direction On, the two sides of multiple anode plates 3 are contacted with the conductive plate 2 on two girders 1 respectively.For example, the left side and left side of anode plate 3 Conductive plate 2 on girder 1 is conductive, then the conductive plate 2 on the girder 1 on the right side and right side of anode plate 3 insulate.
Cathode plate 4 have it is multiple, multiple cathode plates 4 it is vertically arranged and with multiple anode plates 3 along the longitudinal direction interleaved arrange Column are mounted on two girders 1;The two sides of multiple cathode plates 4 are contacted with conductive plate 2 respectively.For example, being led with above-mentioned anode plate 3 Electricity is on the contrary, the conductive plate 2 on the left side of cathode plate 4 and the girder 1 in left side insulate, then the master on the right side and right side of cathode plate 4 Conductive plate 2 on beam 1 is conductive.
Frame 5 is equipped with liquid inlet port 51 and liquid outlet 52, and frame 5 has multiple, and multiple frames 5 are separately positioned on adjacent two-by-two Between anode plate 3 and cathode plate 4;When anode plate 3, cathode plate 4 and frame 5 are compacted, frame 5 is sealedly connected on adjacent respectively Cathode plate 4 peripheral portion and anode plate 3 peripheral portion, so as to form confined air between adjacent cathode plate 4 and anode plate 3 Between;When cathode plate 4 and frame 5 are opened, cathode plate 4 can be taken out.As a result, when copper electrodeposition, anode plate 3,4 and of cathode plate Frame 5 is compacted, and confined space is formed between adjacent anode plate 3 and cathode plate 4, and electrolyte enters confined air from liquid inlet port 51 Between evenly distributedly carry out electrodeposition and from liquid outlet 52 flow out, recycle the electrolyte of confined space constantly, in the process of electrodeposition In, copper deposition is on cathode plate 4, and since circulating effect is preferable, the concentration polarization effect of electrodeposition reaction weakens, cathode-current density It can be improved to 350~500A/m2, electrolytic process generate acid mist can in an organized way absorb, electrolyte heat insulation effect is good, Substantially external heating is not needed.After copper electrodeposition, cathode plate 4 is pulled open, is made between adjacent cathode plate 4 and anode plate 3 Interpolar distance increases, and facilitates and takes out cathode plate 4, convenient in copper electrodeposition next time after the copper-stripping deposited on cathode plate 4 Cathode plate 4 is reinstalled.Since anode plate 3, cathode plate 4 and frame 5 are compacted, on the one hand, anode plate 3 and cathode can be made The interpolar of plate 4 away from for traditional copper electrodeposition equipment anode plate 3 and cathode plate 4 interpolar away from 70~80%, interpolar is away from greatly It reduces, so that the electrolyte content having shared by unit polar plate area is small, is only equivalent to traditional copper electrodeposition equipment unit polar plate area institute The 20~30% of the electrolyte content occupied reduce the ac consumption in electrolytic deposition process to reduce electrolyte global cycle amount;It is another Aspect, the reachable ± 0.5mm of Parallel errors between anode plate 3 and cathode plate 4, the only anode plate 3 of traditional copper electrodeposition equipment with 10% of Parallel errors between cathode plate 4 can be conducive to copper and exist since the depth of parallelism between anode plate 3 and cathode plate 4 is high Uniform deposition on cathode plate 4, meanwhile, facilitate test for short-circuit between anode plate 3 and cathode plate 4.
Copper electrodeposition equipment 100 according to an embodiment of the present invention has the advantage that first, anode when copper electrodeposition produces Away from 70~80% for traditional copper electrodeposition equipment, interpolar is greatly reduced away from having for interpolar between plate 3 and cathode plate 4.The second, electric The cathode-current density of product process is up to 350~500A/m2, 30~40%, Ke Yi great can be higher by compared to traditional copper electrodeposition equipment The earth improves copper yield.Reachable ± the 0.5mm of Parallel errors between third, anode plate 3 and cathode plate 4, only traditional equipment 10%;4th, the electrolyte content having shared by unit polar plate area is small, is only equivalent to the 20~30% of traditional equipment, can effectively drop The ac consumption of low production process generated due to electrolyte circulation;5th, electrolyte endless form is optimized, electrodeposition is weakened The concentration polarization effect of reaction;6th, electrolyte is recycled in confined space, and the acid mist that electrolytic deposition process generates can in an organized way be inhaled It receives;7th, electrolyte heat insulation effect is good, does not need external heating substantially.
According to one embodiment of present invention, frame 5 is corrosion-resistant plastic frame 5.Using corrosion-resistant plastic frame 5, one Aspect frame 5 has corrosion resistance to electrolyte, improves the service life of frame 5;On the other hand, frame 5 is plastic material, Easily molded manufacture, can be with save the cost.
It as shown in Figure 2 and Figure 4, according to one embodiment of present invention, further include pressing device, pressing device includes vertical The thrust plate 61 and pressure plate 62 of setting, thrust plate 61 are mounted on one end of two girders 1, such as thrust plate 61 is mounted on two The front end of girder 1, pressure plate 62 are mounted on the other end of two girders 1, for example, after pressure plate 62 is mounted on two girders 1 End, anode plate 3, cathode plate 4 and frame 5 are between thrust plate 61 and pressure plate 62;When copper electrode product when, pressure plate 62 with only The cooperation of push plate 61 compresses anode plate 3, cathode plate 4 and frame 5, so that being formed between adjacent anode plate 3 and cathode plate 4 closed Space can avoid enter into the electrolyte leakage of confined space.
It as shown in Figure 1 and Figure 4, according to one embodiment of present invention, further include two pulling plate vehicles, two pulling plate vehicles 7 divide It is not mounted on the lateral surface of two girders 1, specifically, a pulling plate vehicle 7 is mounted on the lateral surface of a girder 1 On, another pulling plate vehicle 7 is mounted on the lateral surface of another girder 1, the synchronous operation of two pulling plate vehicles can by cathode plate 3 with Anode plate 4 pulls open, and facilitates the taking-up of cathode plate 4, with the copper deposited on releasing cathode plates 4, meanwhile, also facilitate in the electricity of copper next time Cathode plate 4 reinstalls when product.
As shown in figure 4, further embodiment according to the present invention, it is respectively equipped with guide rail 11 on the lateral surface of two girders 1, Two pulling plate vehicles 7 are equipped with pawl 71, and two pulling plate vehicles 7 can walk respectively along two guide rails 11, specifically, a pulling plate vehicle 7 can walk along a guide rail row 11, another pulling plate vehicle 7 can walk along another guide rail 11, and pass through the pawl of two pulling plate vehicles 7 71 push cathode plate 4 or anode plate 3 aside, to increase the interpolar distance between cathode plate 4 and anode plate 3, facilitate and take out cathode plate 4, The copper deposited on releasing cathode plates 4, meanwhile, also facilitate the installation of the cathode plate 4 in copper electrodeposition next time.
As shown in Figure 1, according to one embodiment of present invention, multiple liquid inlet ports 51 are distributed in the bottom edge and side of frame 5 Middle part with lower portion, multiple liquid outlets 52 are distributed in the top margin of frame 5.As a result, by the bottom edge and side of frame 5 Multiple liquid inlet ports 51, which are arranged, with lower portion in portion can make electrolyte more for example, multiple liquid inlet ports 51 are arranged evenly and at intervals It is equably filled in confined space, and is flowed out from multiple liquid outlets 52 of 5 deckle of frame, further optimizes electrolyte close The endless form in space is closed, more efficiently reduces the concentration polarization effect of electrodeposition reaction, while generating in electrolytic deposition process Acid mist can in an organized way absorb, in addition, electrolyte heat insulation effect is good, do not need external heating substantially.
As shown in Figure 1, further embodiment according to the present invention, further includes feed liquor branch pipe 81 and return liquid branch pipe 83, feed liquor The U-shaped frame of branch pipe 81 is disposed around the lower outside of frame 5, and multiple liquid inlet ports 51 are connected to feed liquor branch pipe 81;Multiple liquid outlets 52 It is connected to liquid branch pipe 83 is returned.Be conducive to electrolyte as a result, to recycle with being evenly distributed in confined space, weaken the concentration difference of electrodeposition reaction Intensify phenomenon.In addition, being directed to for each frame 5, using a feed liquor branch pipe 81 and multiple nozzle matches, structure is simple, It is easy for installation;It returns liquid branch pipe 83 using one to match with multiple liquid outlets 52, structure is simple, easy for installation.
As shown in Figure 1, further embodiment according to the present invention, further includes feed liquor house steward 82, feed liquor house steward 82 has two A, feed liquor branch pipe 81 includes bottom tube section and forms U-shaped frame positioned at the vertical tube end at bottom tube section both ends, bottom tube section and two vertical segments, Two feed liquor house stewards 82 are respectively communicated in the junction of two vertical segments and bottom tube section.Be conducive to electrolyte as a result, in confined air Between recycle with being evenly distributed, the concentration difference for weakening electrodeposition reaction intensifies phenomenon, meanwhile, using feed liquor house steward 82 to feed liquor branch pipe 81 Mode of movement, so that input duct structure simplifies, it is easy for installation.
As shown in Figure 1, according to one embodiment of present invention, frame 5 and anode plate 3 are fixed.As a result, when 4 quilt of cathode plate When pulling open, cathode plate 4 and frame 5 become leave state from sealing state, and since frame 5 and anode plate 3 are fixed, frame 5 will not It falls.
As shown in figure 4, further embodiment according to the present invention, further includes the first seal washer 91 and the second seal washer 92;First seal washer 91 is arranged between frame 5 and anode plate 3, with when anode plate 3, cathode plate 4 and frame 5 are compacted, It is sealed between frame 5 and anode plate 3;Second seal washer 92 is arranged between frame 5 and cathode plate 4, when anode plate 3, yin When pole plate 4 and frame 5 are compacted, sealed between frame 5 and cathode plate 4.Pass through the first 91 packing sealed frames 5 of close circle and anode Gap between plate 3 passes through the gap between 92 sealed frame 5 of the second seal washer and cathode plate 4, sealed reliable.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ", The description of " example ", " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, knot Structure, material or feature are included at least one embodiment or example of the invention.In the present specification, to above-mentioned term Schematic representation may not refer to the same embodiment or example.Moreover, specific features, structure, material or the spy of description Point can be combined in any suitable manner in any one or more of the embodiments or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this The range of invention is defined by the claims and their equivalents.

Claims (10)

1. a kind of copper electrodeposition equipment characterized by comprising
Two girders, two girders extend along the longitudinal direction and between left and right every being oppositely arranged;
Two conductive plates, two conductive plates are separately positioned on two girders;
Anode plate, the anode plate have multiple, and multiple anode plates are vertically arranged and are alternatively arranged are mounted on along the longitudinal direction On two girders;The two sides of multiple anode plates are contacted with the conductive plate on two girders respectively;Cathode Plate, the cathode plate have multiple, and multiple cathode plates are vertically arranged and are spaced friendship along the longitudinal direction with multiple anode plates Mistake arrangement is mounted on two girders;The two sides of multiple cathode plates respectively with the conduction on two girders Plate contact;
Frame, the frame are equipped with multiple liquid inlet ports and multiple liquid outlets, and the frame has multiple, and multiple frames are set respectively It sets between the adjacent two-by-two anode plate and the cathode plate;When the anode plate, the cathode plate and the frame quilt When compression, the frame is sealedly connected on the peripheral portion of the adjacent cathode plate and the peripheral portion of the anode plate respectively, with Make to form confined space between the adjacent cathode plate and the anode plate;When the cathode plate and the frame are opened When, to take out the cathode plate.
2. copper electrodeposition equipment according to claim 1, which is characterized in that the frame is corrosion-resistant plastic frame.
3. copper electrodeposition equipment according to claim 1, which is characterized in that it further include pressing device, the pressing device packet The thrust plate and pressure plate being vertically arranged are included, the thrust plate is mounted on one end of two girders, the pressure plate installation In the other end of two girders, the anode plate, the cathode plate and the frame are located at the thrust plate and the pressure Between tight plate;When copper electrode product, the pressure plate and thrust plate cooperation are by the anode plate, the cathode plate and described Frame compresses.
4. copper electrodeposition equipment according to claim 1, which is characterized in that further include two pulling plate vehicles, two pulling plates Vehicle is separately mounted on the lateral surface of two girders, and the cathode plate and the anode plate are pulled open.
5. copper electrodeposition equipment according to claim 4, which is characterized in that be respectively equipped on the lateral surface of two girders Guide rail, two pulling plate vehicles are equipped with pawl, and two pulling plate vehicles respectively can be along two guide rail walkings, and pass through two The pawl of a pulling plate vehicle pushes the cathode plate or the anode plate aside.
6. copper electrodeposition equipment according to claim 1, which is characterized in that multiple liquid inlet ports are distributed in the frame The middle part of bottom edge and side is distributed in the top margin of the frame with lower portion, multiple liquid outlets.
7. copper electrodeposition equipment according to claim 6, which is characterized in that further include feed liquor branch pipe and return liquid branch pipe, it is described The U-shaped frame of feed liquor branch pipe is disposed around the lower outside of the frame, and multiple liquid inlet ports are connected to the feed liquor branch pipe;It is multiple The liquid outlet is connected to described time liquid branch pipe.
8. copper electrodeposition equipment according to claim 7, which is characterized in that described further includes feed liquor house steward, and the feed liquor is total There are two pipes, and the feed liquor branch pipe includes bottom tube section and positioned at the vertical tube end at bottom tube section both ends, described in the bottom tube section and two Vertical segment forms the U-shaped frame, and two feed liquor house stewards are respectively communicated with the company in two vertical segments and the bottom tube section Meet place.
9. copper electrodeposition equipment according to claim 1, which is characterized in that the frame is fixed with the anode plate.
10. copper electrode equipment according to claim 9, which is characterized in that further include the first seal washer and the second sealing Washer;First seal washer is arranged between the frame and the anode plate, to work as the anode plate, the cathode plate When being compacted with the frame, sealed between the frame and the anode plate;Second seal washer is arranged on the side Between frame and the cathode plate, with when the anode plate, the cathode plate and the frame are compacted, the frame with it is described It is sealed between cathode plate.
CN201910284535.9A 2019-04-10 2019-04-10 Copper electrodeposition equipment Pending CN109930172A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
CN201910284535.9A CN109930172A (en) 2019-04-10 2019-04-10 Copper electrodeposition equipment
PCT/CN2020/084261 WO2020207480A1 (en) 2019-04-10 2020-04-10 Copper electrodeposition device
EA202192763A EA202192763A1 (en) 2019-04-10 2020-04-10 COPPER ELECTRODEPOSITION DEVICE
CL2021002648A CL2021002648A1 (en) 2019-04-10 2021-10-08 Copper electrodeposition device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910284535.9A CN109930172A (en) 2019-04-10 2019-04-10 Copper electrodeposition equipment

Publications (1)

Publication Number Publication Date
CN109930172A true CN109930172A (en) 2019-06-25

Family

ID=66989604

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910284535.9A Pending CN109930172A (en) 2019-04-10 2019-04-10 Copper electrodeposition equipment

Country Status (2)

Country Link
CN (1) CN109930172A (en)
EA (1) EA202192763A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
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