CN109913838A - A kind of magnetic control sputtering device extending target service life - Google Patents
A kind of magnetic control sputtering device extending target service life Download PDFInfo
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- CN109913838A CN109913838A CN201910353332.0A CN201910353332A CN109913838A CN 109913838 A CN109913838 A CN 109913838A CN 201910353332 A CN201910353332 A CN 201910353332A CN 109913838 A CN109913838 A CN 109913838A
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Abstract
The invention discloses a kind of magnetic control sputtering devices for extending target service life, including cabinet, the side of the cabinet is equipped with gas inlet pipe, the other end of the cabinet is equipped with escape pipe, the side of the gas inlet pipe is located at the cabinet equipped with radio-frequency power supply input terminal, the cabinet is equipped with target, the target is connected with ground line, mounting seat is equipped with above the target, the both ends of the mounting seat are connected with the inner wall of the cabinet, the mounting seat is equipped with electromagnet, side of the electromagnet far from the target is N grades, the electromagnet is S grades close to the side of the target, column is fixed under the target, the one end of the column far from the target is connected by first bearing with the inner wall of the cabinet, the inner wall of the cabinet is fixed with motor.The utility model has the advantages that avoiding replacing the waste of target bring too early, that is, extending the service life of target so as to improve the uniformity bombarded target.
Description
Technical field
The present invention relates to magnetron sputtering fields, it particularly relates to a kind of magnetron sputtering dress for extending target service life
It sets.
Background technique
Magnetron sputtering is widely used in the fields such as integrated circuit, liquid crystal display and thin film solar.Lotus energy particle
(such as argon ion) accelerates bombardment target under the action of electric field, sputters a large amount of target atom, the target atom that is in neutrality (or
Molecule) it is deposited on substrate and forms a film；The electronics of generation is bound under the collective effect of electric field force and magnetic field force close to target surface
Heating region in, and do back and forth movement around target surface under the action of a magnetic force.Electronics is during the motion constantly
It collides with ar atmo, ionizes out a large amount of argon ion bombardment target, thus carry out sputtering can uniformly at high speed, so
Uniform magnetic field be target can uniform sputter, the key that service life improves.
Uniform magnetic field can be generated by the high speed reciprocating motion of magnet.When the marginal position of magnet movement to track,
It needs to return again to after stagnating.When magnet is stagnated, since central magnetic field is weak, edge magnetic field strength can be in the stagnation of target upper magnet
Position forms continuous " u "-shaped dent at corresponding position.With the consumption of target, target is easy the lowest part quilt in " u "-shaped dent
Breakdown, so that the end of entire target service life is caused, and in other positions, target is not fully utilized also, thus
The utilization rate for causing target is lower.
For the problems in the relevant technologies, currently no effective solution has been proposed.
Summary of the invention
The purpose of the present invention is to provide a kind of magnetic control sputtering devices for extending target service life, to solve above-mentioned background
The problem of being proposed in technology.
To achieve the above object, the invention provides the following technical scheme:
The side of a kind of magnetic control sputtering device extending target service life, including cabinet, the cabinet is equipped with gas inlet pipe,
The other end of the cabinet is equipped with escape pipe, and the side of the gas inlet pipe is located at the cabinet and inputs equipped with radio-frequency power supply
End, the cabinet are equipped with target, and the target is connected with ground line, and mounting seat is equipped with above the target, described
The both ends of mounting seat are connected with the inner wall of the cabinet, and the mounting seat is equipped with electromagnet, and the electromagnet is separate
The side of the target is N grades, and the electromagnet is S grades close to the side of the target, is fixed with column under the target,
The one end of the column far from the target is connected by first bearing with the inner wall of the cabinet, and the inner wall of the cabinet is solid
Surely it is equipped with motor, the output end of the motor is equipped with the first threaded rod, and the one end of first threaded rod far from the motor is solid
Surely it is equipped with the second threaded rod, the texture of second threaded rod and first threaded rod is on the contrary, second threaded rod is separate
One end of first threaded rod is connected by second bearing with the inner wall of the cabinet, first threaded rod and described
Equal thread bush is equipped with nut on two threaded rods, and the side of the nut is fixed with movable plate, and the side of the movable plate is equipped with
Position-limit mechanism, the movable plate are equipped with limit sensors, the limit sensors and the control far from one end of the nut
Module is connected, and the side of the cabinet is equipped with optical sensor, and the optical sensor is connected with the control module.
Further, the target is equipped with copper backboard, the copper backboard and the ground connection far from the side of the electromagnet
Line is connected.
Further, protective jacket is arranged on the electromagnet, the protective jacket is fixed in the mounting seat, described
Protective jacket is acrylic cabinet.
Further, the electromagnet includes silicon steel sheet inner core and the electrified wire that is wrapped on the silicon steel sheet inner core.
Further, several limit top pillars, the limit top pillar and the cabinet are fixed with around the target
Inner wall be in contact.
Further, the motor outer is equipped with acrylic protective shell.
Further, the position-limit mechanism includes the clamping plate that quantity is two, and the clamping plate is located at the upper of the movable plate
Lower two sides, the both ends of the clamping plate are fixed on the inner wall of the cabinet.
Further, it is fixed with L shape placement plate on the movable plate, is fixed in the L shape placement plate and slows down biography
Sensor, the sensor that slows down are connected with the control module.
Further, the control module includes PLC controller.
Further, the gas inlet pipe input is argon gas.
Compared with prior art, the invention has the following advantages:
(1), the abrasion condition that the both ends of target are sensed by optical sensor sends control mould to according to abrasion thickness signal
Block, control module judge that whether fast target is breakdown according to abrasion thickness signal, if fast breakdown, control module control electricity
Machine rotation enables limit sensors close to each other, which can be come true by the adjustment to limit sensors position
Determine the final position of magnet reciprocating motion, so as to improve the uniformity for bombarding target, avoids replacing target bring wave too early
Take, that is, extends the service life of target.
(2), by setting first bearing, so that target both ends can enable target by rotating angle by after argon ion bombardment
Other both ends then use, therefore, come continue extend target service life.
(3), by setting slow down sensor so that ion before bombardment can retarded speed, to mitigate bombardment
Dynamics, and then further increase the service life of target.
Detailed description of the invention
It in order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below will be to institute in embodiment
Attached drawing to be used is needed to be briefly described, it should be apparent that, the accompanying drawings in the following description is only some implementations of the invention
Example, for those of ordinary skill in the art, without creative efforts, can also obtain according to these attached drawings
Obtain other attached drawings.
Fig. 1 is a kind of structural representation of magnetic control sputtering device for extending target service life according to an embodiment of the present invention
Figure；
Fig. 2 is the enlarged drawing in Fig. 1 at A；
Fig. 3 is a kind of cross-sectional view of magnetic control sputtering device shell for extending target service life according to an embodiment of the present invention；
Fig. 4 be a kind of extension target service life of one of embodiment according to the present invention magnetic control sputtering device in slow down biography
The mounting structure schematic diagram of sensor.
Appended drawing reference:
1, cabinet；2, gas inlet pipe；3, escape pipe；4, radio-frequency power supply input terminal；5, target；6, it is grounded；7, mounting seat；
8, electromagnet；9, column；10, first bearing；11, motor；12, the first threaded rod；13, the second threaded rod；14, second bearing；
15, nut；16, movable plate；17, position-limit mechanism；18, limit sensors；19, control module；20, optical sensor；21, copper is carried on the back
Plate；22, protective jacket；23, top pillar is limited；24, clamping plate；25, L shape placement plate；26, slow down sensor.
Specific embodiment
In the following, making further description to invention in conjunction with attached drawing and specific embodiment:
Please refer to Fig. 1-4, a kind of magnetic control sputtering device extending target service life according to an embodiment of the present invention, including cabinet
1, the side of the cabinet 1 is equipped with gas inlet pipe 2, and the other end of the cabinet 1 is equipped with escape pipe 3, the gas inlet pipe 2
Side be located at the cabinet 1 equipped with radio-frequency power supply input terminal 4, the cabinet 1 is equipped with target 5, the target 5 with connect
Ground wire 6 is connected, and mounting seat 7, the inner wall phase at the both ends of the mounting seat 7 and the cabinet 1 are equipped with above the target 5
Connection, the mounting seat 7 are equipped with electromagnet 8, and side of the electromagnet 8 far from the target 5 is N grades, the electromagnetism
Iron 8 is S grades close to the side of the target 5, is fixed with column 9 under the target 5, the column 9 is far from the target 5
One end is connected by first bearing 10 with the inner wall of the cabinet 1, and the inner wall of the cabinet 1 is fixed with motor 11, described
The output end of motor 11 is equipped with the first threaded rod 12, and first threaded rod 12 is fixed with the far from one end of the motor 11
Two threaded rods 13, the texture of second threaded rod 13 and first threaded rod 12 is on the contrary, second threaded rod 13 is separate
One end of first threaded rod 12 is connected by second bearing 14 with the inner wall of the cabinet 1, first threaded rod 12
It is equipped with nut 15 with thread bush equal on second threaded rod 13, the side of the nut 15 is fixed with movable plate 16, described
The side of movable plate 16 is equipped with position-limit mechanism 17, and the movable plate 16 is equipped with limit sensors far from one end of the nut 15
18, the limit sensors 18 are connected with the control module 19, and the side of the cabinet 1 is equipped with optical sensor 20, described
Optical sensor 20 is connected with the control module 19.
Above scheme through the invention can sense the abrasion condition at the both ends of target 5, root by optical sensor 20
Control module 19 is sent to according to abrasion thickness signal, and whether fastly control module 19 judges according to abrasion thickness signal, the quilt of target 5
Breakdown, if fast breakdown, control module 19, which controls the rotation of motor 11, enables limit sensors 18 close to each other, the magnetic control sputtering device
It can be by the adjustment to 18 position of limit sensors, to determine the final position of magnet reciprocating motion, so as to improve to target
The uniformity of bombardment avoids replacing the waste of 5 bring of target too early, that is, extends the service life of target 5.Pass through setting first
Bearing 10, so that 5 both ends of target can enable the other both ends of target 5 then use by after argon ion bombardment by rotation angle,
Therefore, come continue extend target 5 service life.
In specific application, for target 5, the target 5 is equipped with copper backboard far from the side of the electromagnet 8
21, the copper backboard 21 is connected with the ground line 6.For electromagnet 8, protective jacket is arranged on the electromagnet 8
22, the protective jacket 22 is fixed in the mounting seat 7, and the protective jacket 22 is acrylic cabinet.For electromagnet 8
It says, the electromagnet 8 includes silicon steel sheet inner core and the electrified wire being wrapped on the silicon steel sheet inner core.For target 5,
Several limit top pillars 23 are fixed with around the target 5, the limit top pillar 23 connects with the inner wall of the cabinet 1
Touching.For motor 11, acrylic protective shell is arranged with outside the motor 11.For position-limit mechanism 17, the limit
Mechanism 17 includes the clamping plate 24 that quantity is two, and the clamping plate 24 is located at the two sides up and down of the movable plate 16, the clamping plate 24
Both ends be fixed on the inner wall of the cabinet 1.For movable plate 16, the placement of L shape is fixed on the movable plate 16
Plate 25 is fixed in the L shape placement plate 25 and slows down sensor 26, described to slow down sensor 26 and 19 phase of control module
Connection.For control module 19, the control module 19 includes PLC controller.It is described for gas inlet pipe 2
The input of gas inlet pipe 2 is argon gas.
Above scheme through the invention can slow down sensor 26 by setting, so that ion can be obtained before bombardment
To reducing speed, to mitigate the dynamics of bombardment, and then the service life of target 5 is further increased.
In conclusion sensing the both ends of target 5 by optical sensor 20 by means of above-mentioned technical proposal of the invention
Abrasion condition sends control module 19 to according to abrasion thickness signal, and control module 19 judges according to abrasion thickness signal, target
Whether material 5 is fast breakdown, if fast breakdown, control module 19, which controls the rotation of motor 11, enables limit sensors 18 close to each other, should
Magnetic control sputtering device can by the adjustment to 18 position of limit sensors, to determine final position that magnet moves back and forth, from
And improve the uniformity bombarded target, it avoids replacing the waste of 5 bring of target too early, that is, extends the service life of target 5.
By the way that first bearing 10 is arranged, so that 5 both ends of target can enable other the two of target 5 by rotating angle by after argon ion bombardment
Use is terminated, therefore, to continue to extend the service life of target 54.Sensor 26 can be slowed down by setting, so that ion
Before bombardment can retarded speed, to mitigate the dynamics of bombardment, and then further increase target 5 uses the longevity
Life.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of magnetic control sputtering device for extending target service life, which is characterized in that including cabinet (1), the cabinet (1)
Side is equipped with gas inlet pipe (2), and the other end of the cabinet (1) is equipped with escape pipe (3), and the one of the gas inlet pipe (2)
Side is located at the cabinet (1) equipped with radio-frequency power supply input terminal (4), and the cabinet (1) is equipped with target (5), the target
(5) it is connected with ground line (6), mounting seat (7), the both ends of the mounting seat (7) and institute is equipped with above the target (5)
The inner wall for stating cabinet (1) is connected, and the mounting seat (7) is equipped with electromagnet (8), and the electromagnet (8) is far from the target
The side of material (5) is N grades, and the electromagnet (8) is S grades close to the side of the target (5), and fixation is set under the target (5)
Have column (9), the column (9) passes through the inner wall of first bearing (10) and the cabinet (1) far from the one end of the target (5)
It is connected, the inner wall of the cabinet (1) is fixed with motor (11), and the output end of the motor (11) is equipped with the first threaded rod
(12), first threaded rod (12) is fixed with the second threaded rod (13) far from the one end of the motor (11), and described second
Threaded rod (13) and the texture of first threaded rod (12) are on the contrary, separate first threaded rod of second threaded rod (13)
(12) one end is connected by second bearing (14) with the inner wall of the cabinet (1), first threaded rod (12) and described
Equal thread bush is equipped with nut (15) on second threaded rod (13), and the side of the nut (15) is fixed with movable plate (16), institute
The side for stating movable plate (16) is equipped with position-limit mechanism (17), and the movable plate (16) is equipped with limit far from the one end of the nut (15)
Level sensor (18), the limit sensors (18) are connected with the control module (19), and the side of the cabinet (1) is equipped with
Optical sensor (20), the optical sensor (20) are connected with the control module (19).
2. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the target
Material (5) is equipped with copper backboard (21) far from the side of the electromagnet (8), and the copper backboard (21) is connected with the ground line (6)
It connects.
3. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the electricity
It is arranged on magnet (8) protective jacket (22), the protective jacket (22) is fixed on the mounting seat (7), the protective jacket
It (22) is acrylic cabinet.
4. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the electricity
Magnet (8) includes silicon steel sheet inner core and the electrified wire that is wrapped on the silicon steel sheet inner core.
5. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the target
Several limit top pillars (23) are fixed with around material (5), limit top pillar (23) connects with the inner wall of the cabinet (1)
Touching.
6. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the electricity
Acrylic protective shell is arranged with outside machine (11).
7. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the limit
Position mechanism (17) includes the clamping plate (24) that quantity is two, and the clamping plate (24) is located at the two sides up and down of the movable plate (16),
The both ends of the clamping plate (24) are fixed on the inner wall of the cabinet (1).
8. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that the work
It is fixed with L shape placement plate (25) on movable plate (16), is fixed on the L shape placement plate (25) and slows down sensor (26), institute
It states and slows down sensor (26) and be connected with the control module (19).
9. a kind of magnetic control sputtering device for extending target service life according to claim 8, which is characterized in that the control
Molding block (19) includes PLC controller.
10. a kind of magnetic control sputtering device for extending target service life according to claim 1, which is characterized in that described
Gas inlet pipe (2) input is argon gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910353332.0A CN109913838A (en) | 2019-04-29 | 2019-04-29 | A kind of magnetic control sputtering device extending target service life |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910353332.0A CN109913838A (en) | 2019-04-29 | 2019-04-29 | A kind of magnetic control sputtering device extending target service life |
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| Publication Number | Publication Date |
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| CN109913838A true CN109913838A (en) | 2019-06-21 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910353332.0A Pending CN109913838A (en) | 2019-04-29 | 2019-04-29 | A kind of magnetic control sputtering device extending target service life |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896725A (en) * | 2022-12-23 | 2023-04-04 | 南通成泰磁材科技有限公司 | Magnetron sputtering rotating target |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203846096U (en) * | 2014-05-08 | 2014-09-24 | 上海天马有机发光显示技术有限公司 | Sputtering equipment and target thickness measuring system |
| CN105803410A (en) * | 2016-04-29 | 2016-07-27 | 京东方科技集团股份有限公司 | Magnetron sputtering apparatus, magnetron sputtering device and magnetron sputtering method |
| CN106929813A (en) * | 2017-05-10 | 2017-07-07 | 京东方科技集团股份有限公司 | Magnetic control sputtering device, equipment and magnetically controlled sputter method |
-
2019
- 2019-04-29 CN CN201910353332.0A patent/CN109913838A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN203846096U (en) * | 2014-05-08 | 2014-09-24 | 上海天马有机发光显示技术有限公司 | Sputtering equipment and target thickness measuring system |
| CN105803410A (en) * | 2016-04-29 | 2016-07-27 | 京东方科技集团股份有限公司 | Magnetron sputtering apparatus, magnetron sputtering device and magnetron sputtering method |
| CN106929813A (en) * | 2017-05-10 | 2017-07-07 | 京东方科技集团股份有限公司 | Magnetic control sputtering device, equipment and magnetically controlled sputter method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115896725A (en) * | 2022-12-23 | 2023-04-04 | 南通成泰磁材科技有限公司 | Magnetron sputtering rotating target |
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Application publication date: 20190621 |