CN109913822A - A kind of column type cathode assembly that magnetic boots can elapse in real time - Google Patents
A kind of column type cathode assembly that magnetic boots can elapse in real time Download PDFInfo
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- CN109913822A CN109913822A CN201910133105.7A CN201910133105A CN109913822A CN 109913822 A CN109913822 A CN 109913822A CN 201910133105 A CN201910133105 A CN 201910133105A CN 109913822 A CN109913822 A CN 109913822A
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Abstract
A kind of column type cathode assembly that magnetic boots can elapse in real time comprising: gas-pushing magnetic boots, target tube assembly, target head component, inlet seal seat；The aqueous vapor core that can be passed through cooling water and compressed air is wherein provided in gas-pushing magnetic boots, and it is bonded with rubber ring, magnetic yoke, inlet chamber is provided between on the inside of aqueous vapor core and adhesive rubber, rubber outer side is bonded magnetic yoke, its principle is using the passage of magnetic yoke is realized in the passage of axis surface caused by air pressure change in inlet chamber between rubber and aqueous vapor core, to realize the movement of cylindrical cathode inner magnetic boots；Automatically moving in real time for magnetic boots is realized using the time according to target using control program simultaneously.The present invention not only can greatly improve the repeatability of technical process, but also target utilization has greatly improved, and is suitable for magnetron sputtering and arc ion plating cylindrical cathodes, can be applied to high-accuracy, noble metal film deposition process.
Description
Technical field
The invention belongs to magnetic-controlled sputtering coating equipment technical fields, are related to a kind of column type cathode that magnetic boots can elapse in real time dress
It sets.
Background technique
Arc ion plating and magnetron sputtering in physical gas phase deposition technology are widely used in vacuum coating industry.
Magnetron sputtering plating is made in the back side installation magnet of target on the surface of target edge and electricity in vacuum chamber
The vertical direction in field generates closed magnetic field, closed magnetic field and electric field reciprocation, makes electronics in the closed magnetic field of target material surface
It runs in the shape of a spiral.
The main operational principle of magnetron sputtering is that glow discharge occurs between electrode plate, and in discharge process, electronics is by magnetic field
It influences to generate screw, so that the collision of electronics Yu vacuum technology gas is increased, ionization after process gas collision, by electric field
Effect, direct bombarding cathode target material surface, to form sputtering.In practical application, in magnetic field the maximum place of horizontal component, electricity
Sub, plasma that similarly on corresponding target material surface this region be ionized the fiercest with the collision of process gas
Bombardment is also the most serious, to form channel on the target surface, continues in discharge process, channel can shape under the influence of magnetic field
At V-shaped, the utilization rate of target is seriously affected.
Although its inducement mechanism of the arc source of arc ion plating is different from magnetron sputtering, but electronics also can be by its discharge process
To the influence in magnetic field, screw occurs, influences the motion mode of arc spot on the target surface, V will also occurs on target material surface
Shape channel seriously affects the utilization rate of target.
In order to solve magnetic field to the etching channel of magnetic control sputtering cathode and arc source, on the one hand pass through mechanical (manual) push-and-pull
Magnet, change magnetic field levels component maximum value position, the generation of Lai Yanhuan channel, one is by change target shape,
Target rotation is got up.
Column-shape magnetron sputtering cathode and column multi-arc ion coating arc source compared to planar magnetic control sputtering cathode, plane multi sphere from
Son plating arc source can uniformly etch the target material surface entirely rotated, while rounded cross section area is greater than because target material surface rotates
Planar rectangular (square), increases the contact area of cooling water, increases cooling efficiency.
Although cylindricality magnetic control sputtering cathode and cylindricality multi-arc ion coating arc source solve asking for etching channel to a certain extent
Topic, but during magnetron sputtering and multi-arc ion coating, as target is etched thinned, the magnetic field of target material surface can occur
Variation, magnetic field strength enhancing, one side magnetic field becomes causes ion plasma to become with horizontal component and increase the electricity of target material surface by force
Current density, etching speed are accelerated, and will cause thick atom group's sputtering (bulky grain is burst out), on the other hand, for the deposition of high request
For coating, a series of variations caused by target material surface changes of magnetic field finally can all be had an impact the coating of deposition.To protect
The consistency of depositing coating is demonstrate,proved, thus the magnetic field in realization cylindricality magnetic control sputtering cathode and cylindricality multi-arc ion coating arc source is with etching target
The distance that material thickness change adjusts magnetic boots to target material surface is necessary.
At this stage, difficult to realize for the control of cylindricality magnetic control sputtering cathode and cylindricality arc ion plating magnetic boots.Therefore, such as
What solves the above problems, be original field technical staff the content of important research.
Summary of the invention
To overcome the deficiencies in the prior art described above, it is an object of that present invention to provide a kind of column types that magnetic boots can elapse in real time
Cathode assembly.
In order to achieve the above objects and other related objects, the present invention provides a kind of column type cathode that magnetic boots can elapse in real time dress
It sets, including gas-pushing magnetic boots, target tube assembly, target head component and inlet seal seat；Wherein:
The gas-pushing magnetic boots include aqueous vapor core, rubber ring, upper and lower thread bush, detent ring, upper lower cover and magnetic yoke；The rubber
Snare is located on the aqueous vapor core, and the upper and lower side of the rubber ring outer rim is Nian Jie with the thread bush up and down；The detent ring and
The magnetic yoke is symmetrically bonded on the rubber ring；The upper lower cover is assemblied on the thread bush up and down；
The target tube assembly includes shielding case, insulation sleeve, target pipe, target pipe upper connector and target pipe Anchor plate kit up and down, the target
Pipe upper connector and the target pipe are sequentially connected；The insulation sleeve is sleeved on the target pipe or more Anchor plate kit, the shielding
Current potential between cover and the target pipe insulate, and the target pipe upper connector and the target pipe are tightly connected by target pipe top board；
The target head component includes vacuum sealing seat, turning gear, water inlet and return water component, and the target head assembly set is mounted in described
In the target pipe upper connector of the target tube assembly, and vacuum sealing is formed by vacuum sealing seat and vacuum chamber；The return water
Component includes return water turning set, return water rotation upper shield, magnetic core turning set, magnetic core rotation upper shield, and wherein return water component is fixed on institute
It states outside vacuum chamber；The return water turning set inner sleeve is installed with snap ring, two J-type sealing rings, return water ring and rolling bearing；
The inlet seal seat is annular nested structure, and the inlet seal cover for seat is on the aqueous vapor core of the gas-pushing magnetic boots；
And it is compressed by aqueous vapor core screw thread.
In above scheme, related content is explained as follows:
1, in above scheme, the aqueous vapor core is the pipeline configuration of center through-hole, and the central through hole is water inlet flow channel；The water
It is evenly distributed on one end of gaseous core equipped with long hole；The long hole is the disengaging flow channel of compressed air；The aqueous vapor core is weldering
Connection member.The end of the aqueous vapor core is through over mechanical processing and welded cover plate, while there are the rings with inlet seal seat on cover board
The air inlet of shape air through hole is machined with into flow channel on aqueous vapor core, between disengaging flow channel and the bonding rubber ring
Telescopic cavity is formed, the size of telescopic cavity is adjusted in the air inflow of compressed air, realizes the flexible of magnetic yoke.
2, in above scheme, the detent ring is bonded with the abutting end of the upper lower cover；The magnetic yoke and it is described up and down
The abutting end of gland is apart equipped with the gap of 3-8mm
3, in above scheme, wherein vacuum sealing seat is the contact vacuum sealing components by formation such as sealing ring transverse bearings
(being not drawn into figure), rotating disc can realize the rotation of target pipe upper connector with external motor, and target pipe upper connector drives vacuum chamber
Interior target pipe rotation, while water outlet is provided in target pipe upper connector, and with returning on the return water turning set on return water component
The mouth of a river is concentric.
4, in above scheme, the inlet seal seat can be set with the sealing that two O-ring seals realize air inlet, annular air inlet
It is adapted to aqueous vapor core air inlet position, by changing shape air inlet and two sealing rings, realize inlet seal seat and aqueous vapor core into
Gas and leakproofness.
5, in above scheme, the return water component is fixed on outside vacuum chamber using external device, and not with the shifting of target pipe
It moves and moves.Lantern ring is additionally provided between the rolling bearing and the J-type sealing ring.
6, it in above scheme, while spiral shell magnetic core turning set in target pipe upper connector, and is loaded ring in magnetic core turning set inner sleeve,
Lantern ring between rolling bearing, J-type sealing ring and bearing and sealing ring, realize target pipe rotation when, aqueous vapor core holding do not turn with
And the sealing to aqueous vapor core.
7, in above scheme, wherein detent ring is bonded with upper lower cover, has certain interval between magnetic yoke and upper lower cover, is led to
It crosses air inlet and is passed through (releasing) compressed air, elapse magnetic yoke outward using rubber swelling (contraction), Lai Shixian magnetic boots are in target
Outer in pipe spreads to retrogressing.Its gap is 3-8mm.
It 8, is the flow channel of entering of compressed air in above scheme, on the aqueous vapor core, end is through over mechanical processing and welds
Connects cover plate, while there are the air inlet of the annular air through hole with inlet seal seat on cover board, disengaging gas is machined on aqueous vapor core
Slot forms telescopic cavity between bonding rubber ring.
Since above-mentioned technical proposal is used, compared with the prior art, the invention has the beneficial effects that:
The present invention is a kind of cylindrical cathodes that novel magnetic boots can elapse in real time, is suitable for magnetron sputtering and arc ion plating cylindricality
Cathode comprising: gas-pushing magnetic boots, target tube assembly, target head component, inlet seal seat；Wherein being provided in gas-pushing magnetic boots can
It is passed through the aqueous vapor core of cooling water and compressed air, and is bonded with rubber, magnetic yoke, is provided between aqueous vapor core and adhesive rubber inside
Inlet chamber, rubber outer side are bonded magnetic yoke, and principle is using between rubber and aqueous vapor core in inlet chamber caused by air pressure change
Axis surface elapses to realize the passage of magnetic yoke, to realize the movement of cylindrical cathode inner magnetic boots；Simultaneously using control program according to
The automatic real-time movement that magnetic boots are realized using the time of target.The present invention not only can greatly improve the repetition of technical process
Property, reduce caused by the variation of target surface etch thicknesses surface variations magnetic field strength technique change in deposition process, and for
Target utilization has greatly improved, and can be applied to high-accuracy, noble metal film deposition process.
Detailed description of the invention
Fig. 1 is the working principle schematic block diagram during apparatus of the present invention arc ion plating；
Fig. 2 is the structural schematic diagram of apparatus of the present invention；
Fig. 3 is the structural solid figure of inlet seal seat in apparatus of the present invention；
Fig. 4 is the structural schematic diagram of target head component and target tube assembly in apparatus of the present invention；
Fig. 5 is the structural schematic diagram of return water component in apparatus of the present invention；
Fig. 6 is the structural schematic diagram one of gas-pushing magnetic boots in apparatus of the present invention；
Fig. 7 is the structural schematic diagram two of gas-pushing magnetic boots in apparatus of the present invention；
Fig. 8 is the structural schematic diagram three of gas-pushing magnetic boots in apparatus of the present invention；
Fig. 9 is the structural schematic diagram of target tube assembly in apparatus of the present invention；
Figure 10 is the working principle schematic block diagram in apparatus of the present invention magnetron sputtering process.
Specific embodiment
Below in conjunction with attached drawing, embodiments of the present invention, those skilled in the art are illustrated by particular specific embodiment
It can be understood other advantages and efficacy of the present invention easily by content disclosed by this specification.
Illustrate: the target tube assembly is existing magnetron sputtering, arc ion plating cylindrical cathodes body universal architecture, master
It to include shielding case, insulation sleeve, target pipe, target pipe upper connector, target pipe Anchor plate kit up and down, because paper of the present invention is it
Internal gas, which pushes away, realizes the interior arrangement that moves in real time of magnetic boots, the shielding case for being sleeved on target pipe or more Anchor plate kit component and
Insulation sleeve is not drawn into, but does not influence the description of this invention and understanding.
Embodiment one:
As seen in figs. 2-10, a kind of column type cathode assembly that magnetic boots can elapse in real time, including gas-pushing magnetic boots 11, target tube assembly
12, target head component 13 and inlet seal seat 14；Wherein:
The gas-pushing magnetic boots 11 include aqueous vapor core 110, rubber ring 111, upper and lower thread bush 115, detent ring 112, upper lower cover
114 and magnetic yoke 113；The rubber ring 111 is set on the aqueous vapor core 110, the upper and lower ends of 111 outer rim of rubber ring with
The thread bush 115 up and down is bonded；The detent ring 112 and the magnetic yoke 113 are symmetrically bonded on the rubber ring 111；Institute
Lower cover 114 is stated to be assemblied on the thread bush 115 up and down；
The target tube assembly 12 includes shielding case, insulation sleeve, target pipe 122, target pipe upper connector 120 and target pipe Anchor plate kit up and down
121, the target pipe upper connector and the target pipe are sequentially connected；The insulation sleeve is sleeved on target pipe Anchor plate kit up and down
On, the current potential insulation between the shielding case and the target pipe, the target pipe upper connector 120 passes through on target pipe with the target pipe
Pressing plate for sealing connection；
The target head component 13 includes vacuum sealing seat 131, turning gear 132, water inlet 130 and return water component 133, the target head
Component 13 is sleeved in the target pipe upper connector 120 of the target tube assembly 12, and passes through vacuum sealing seat 131 and vacuum chamber shape
At vacuum sealing；The return water component 133 include return water turning set 1331, return water rotation upper shield 1332, magnetic core turning set 1333,
Magnetic core rotates upper shield 1334, and wherein return water component 133 is fixed on outside the vacuum chamber；Suit in the return water turning set 1331
Equipped with 003, two J-type sealing ring 001 of snap ring, return water ring 004 and rolling bearing 002；
The inlet seal seat 14 is annular nested structure, and the inlet seal seat 14 is sleeved on the aqueous vapor of the gas-pushing magnetic boots 11
On core 110；And it is compressed by 110 screw thread of aqueous vapor core.
The aqueous vapor core 110 is the pipeline configuration of center through-hole, and the central through hole is water inlet flow channel 01；The aqueous vapor core
It is evenly distributed on 110 one end equipped with long hole；The long hole is the disengaging flow channel of compressed air；The aqueous vapor core 110 is
Welded unit.The end of the aqueous vapor core 110 through over mechanical processing and welded cover plate, while on cover board there are with inlet seal seat
140 through-hole of annular air inlet air inlet 04, be machined with into flow channel on aqueous vapor core 110, the disengaging flow channel with it is Nian Jie
Rubber ring 111 between form telescopic cavity 03, the size of telescopic cavity 03 is adjusted in the air inflow of compressed air, realizes magnetic yoke 113
It is flexible.
The detent ring 112 is bonded with the abutting end of the upper lower cover 114；The magnetic yoke 113 and the upper lower cover
114 abutting end is apart equipped with the gap of 3-8mm.It is passed through (releasing) compressed air by air inlet 04, using rubber ring 111
(contractions) is expanded by the passage outward of magnetic yoke 113, and outer in target pipe of Lai Shixian magnetic boots spreads to retrogressing.
Wherein vacuum sealing seat 131 be by the formation such as sealing ring transverse bearing contact vacuum sealing components (in figure not
Draw), rotating disc 132 can realize the rotation of target pipe upper connector 120 with external motor, and target pipe upper connector 120 drives vacuum
Indoor target pipe 12 rotates, while water outlet is provided in target pipe upper connector 120, and turns with the return water on return water component 133
Water return outlet 1300 on dynamic set 1331 is concentric.Vacuum sealing seat 131 is fixed on vacuum chamber, realize cathode sealing and
The rotation of target pipe 12 is realized by vacuum sealing components and rolling bearing 002, the external rotary electric machine of turning gear realizes power transmission,
Water inlet component, return water component 133 all include sealing ring, the rolling bearing that water-stop and rotation are carried out to gas-pushing magnetic boots component,
To realize the rotation of target pipe.
The inlet seal seat 14 can be set with the sealing that two O-ring seals realize air inlet, annular air inlet 140 itself and aqueous vapor
110 air inlet position of core adaptation realizes inlet seal seat 14 and aqueous vapor core 110 by annular air inlet 140 and two sealing rings
Air inlet and leakproofness.
Target pipe 122 is the consumable material of magnetron sputtering, arc ion plating, is needed to be replaced frequently；Anchor plate kit above and below target pipe
121 realize target pipe vacuum sealings, water-stop, and insulation sleeve is sleeved on target pipe up and down on Anchor plate kit, realize shielding case and target pipe it
Between current potential insulation, shielding case realizes that the arc extinguishing during cathodic discharge, target pipe upper connector 120 and target pipe 122 pass through target pipe
Top board 121 is tightly connected, and machine driving and return water export can be realized outside vacuum chamber.
The return water component 133 is fixed on outside vacuum chamber using external device, and is not moved with the movement of target pipe.Institute
It states and is additionally provided with lantern ring between rolling bearing 002 and the J-type sealing ring 001.
Spiral shell magnetic core turning set in target pipe upper connector simultaneously, and be loaded ring 003 in magnetic core turning set inner sleeve, rolling bearing
002, the lantern ring between J-type sealing ring 001 and bearing and sealing ring, realize target pipe rotation when, aqueous vapor core holding do not turn and
Sealing to aqueous vapor core
Wherein, detent ring 112 is bonded with upper lower cover 114, is had certain interval between magnetic yoke 113 and upper lower cover 114, is passed through air inlet
Hole is passed through (releasing) compressed air, expands (contraction) using rubber ring 111 and elapses magnetic yoke 113 outward, Lai Shixian magnetic boots exist
Outer in target pipe spreads to retrogressing.Its gap is 3-8mm.
It is the flow channel of entering of compressed air on the aqueous vapor core 110, end is through over mechanical processing and welded cover plate, simultaneously
There are the air inlet of the annular air through hole with inlet seal seat 14 on cover board, it is machined with disengaging air drain on aqueous vapor core 110, with
Telescopic cavity 03 is formed between the rubber ring 111 of bonding.
In the gas-pushing column rotary magnetron sputtering cathode course of work, when initial state, air pressure is maximum in telescopic cavity 03,
Magnetic yoke 113 is bonded upper lower cover 114 by gas pressure then in actual use can be according to target type (thickness), target
Power calculation obtains the etching speed and etching depth of target, and the deflation time and rate of flow vent valve is arranged, thus real
The position real-time change of magnetic control sputtering cathode inner magnetic boots in the discharge process of present magnetic control spattering target.
Embodiment two:
External one arc initiation device (the general knot for having rotary cylinder is needed when the main distinction of embodiment two and embodiment one
Structure is not drawn into), other parts structure is identical, is not repeating.
In the gas-pushing column rotating the arc ion plating course of work, when initial state, air pressure is maximum in telescopic cavity 03, magnetic
Yoke 113 is bonded upper lower cover 114 by gas pressure, then in actual use, can be according to target type (thickness), arc electricity
Stream calculation obtains the etching speed and etching depth of target, and the deflation time and rate of flow vent valve is arranged, to realize
The position real-time change of cathode inner magnetic boots in the discharge process of arc ion plating target.
The present invention is a kind of cylindrical cathodes that novel magnetic boots can elapse in real time, is suitable for magnetron sputtering and arc ion plating
Cylindrical cathodes comprising: gas-pushing magnetic boots, target tube assembly, target head component, inlet seal seat；Wherein setting in gas-pushing magnetic boots
There is the aqueous vapor core that can be passed through cooling water and compressed air, and be bonded with rubber, magnetic yoke, is set between aqueous vapor core and adhesive rubber inside
It is equipped with inlet chamber, rubber outer side is bonded magnetic yoke, and principle is using air pressure change is made in inlet chamber between rubber and aqueous vapor core
At axis surface passage come magnetic yoke passage, to realize the movement of cylindrical cathode inner magnetic boots；It is realized simultaneously using control program
The real-time movement of magnetic boots.The present invention not only can greatly improve the repeatability of technical process, reduces target surface etch thicknesses and changes table
Technique change in deposition process caused by the variation of face magnetic field strength, and have greatly improved for target utilization, it can
Applied to high-accuracy, noble metal film deposition process.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should be covered by the claims of the present invention.
Claims (7)
1. a kind of column type cathode assembly that magnetic boots can elapse in real time, it is characterised in that: including gas-pushing magnetic boots, target tube assembly, target
Head assembly and inlet seal seat；Wherein:
The gas-pushing magnetic boots include aqueous vapor core, rubber ring, upper and lower thread bush, detent ring, upper lower cover and magnetic yoke；The rubber
Snare is located on the aqueous vapor core, and the upper and lower side of the rubber ring outer rim is Nian Jie with the thread bush up and down；The detent ring and
The magnetic yoke is symmetrically bonded on the rubber ring；The upper lower cover is assemblied on the thread bush up and down；
The target tube assembly includes shielding case, insulation sleeve, target pipe, target pipe upper connector and target pipe Anchor plate kit up and down, the target
Pipe upper connector and the target pipe are sequentially connected；The insulation sleeve is sleeved on the target pipe or more Anchor plate kit, the shielding
Current potential between cover and the target pipe insulate, and the target pipe upper connector and the target pipe are tightly connected by target pipe top board；
The target head component includes vacuum sealing seat, turning gear, water inlet and return water component, and the target head assembly set is mounted in described
In the target pipe upper connector of target tube assembly, and vacuum sealing is formed by vacuum sealing seat and vacuum chamber；The return water component
Upper shield is rotated including return water turning set, return water rotation upper shield, magnetic core turning set, magnetic core, wherein return water component is fixed on described true
Outside plenum chamber；The return water turning set inner sleeve is installed with snap ring, two J-type sealing rings, return water ring and rolling bearing；
The inlet seal seat is annular nested structure, and the inlet seal cover for seat is on the aqueous vapor core of the gas-pushing magnetic boots；
And it is compressed by aqueous vapor core screw thread.
2. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the aqueous vapor core is
The pipeline configuration of central through hole, the central through hole are water inlet flow channel；It is evenly distributed on one end of the aqueous vapor core and is equipped with length
Hole；The long hole is the disengaging flow channel of compressed air；The aqueous vapor core is welded unit.
3. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the detent ring with
The abutting end of the upper lower cover is bonded；The abutting end of the magnetic yoke and the upper lower cover is apart equipped with the gap of 3-8mm.
4. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the target Guan Shanglian
Adapter tube be equipped with water outlet, and with the concentric setting of water return outlet on the return water turning set on the return water component.
5. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the vacuum sealing
Seat is the contact vacuum sealing components formed by sealing ring transverse bearing.
6. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the rolling bearing
Lantern ring is additionally provided between the J-type sealing ring.
7. the column type cathode assembly that magnetic boots according to claim 1 can elapse in real time, it is characterised in that: the target Guan Shanglian
Spiral shell is in magnetic core turning set in taking over.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910133105.7A CN109913822B (en) | 2019-02-22 | 2019-02-22 | Cylindrical cathode device with magnetic shoes capable of being pushed in real time |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910133105.7A CN109913822B (en) | 2019-02-22 | 2019-02-22 | Cylindrical cathode device with magnetic shoes capable of being pushed in real time |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109913822A true CN109913822A (en) | 2019-06-21 |
| CN109913822B CN109913822B (en) | 2021-03-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910133105.7A Active CN109913822B (en) | 2019-02-22 | 2019-02-22 | Cylindrical cathode device with magnetic shoes capable of being pushed in real time |
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| Country | Link |
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| CN (1) | CN109913822B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102352486A (en) * | 2011-11-16 | 2012-02-15 | 东莞市润华光电有限公司 | Magnetron sputtering target with adjustable magnetic shoe |
| CN103114272A (en) * | 2011-11-17 | 2013-05-22 | 鸿富锦精密工业（深圳）有限公司 | Cylindrical magnetron sputtering cathode |
| CN204644453U (en) * | 2015-04-22 | 2015-09-16 | 成都金倍科技有限公司 | A kind of magnetic field rotating magnetic control post arc target |
| CN109338292A (en) * | 2018-11-15 | 2019-02-15 | 温州职业技术学院 | A kind of pipe fitting inner wall vacuum coater and production technology |
-
2019
- 2019-02-22 CN CN201910133105.7A patent/CN109913822B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102352486A (en) * | 2011-11-16 | 2012-02-15 | 东莞市润华光电有限公司 | Magnetron sputtering target with adjustable magnetic shoe |
| CN103114272A (en) * | 2011-11-17 | 2013-05-22 | 鸿富锦精密工业（深圳）有限公司 | Cylindrical magnetron sputtering cathode |
| CN204644453U (en) * | 2015-04-22 | 2015-09-16 | 成都金倍科技有限公司 | A kind of magnetic field rotating magnetic control post arc target |
| CN109338292A (en) * | 2018-11-15 | 2019-02-15 | 温州职业技术学院 | A kind of pipe fitting inner wall vacuum coater and production technology |
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| Publication number | Publication date |
|---|---|
| CN109913822B (en) | 2021-03-16 |
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