CN109909366A - Optical path auxiliary microscopic visual inspection system and method towards ultrasonic impact processing - Google Patents

Optical path auxiliary microscopic visual inspection system and method towards ultrasonic impact processing Download PDF

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Publication number
CN109909366A
CN109909366A CN201910258728.7A CN201910258728A CN109909366A CN 109909366 A CN109909366 A CN 109909366A CN 201910258728 A CN201910258728 A CN 201910258728A CN 109909366 A CN109909366 A CN 109909366A
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mirror surface
micro
ultrasonic impact
deflection mirror
processing
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CN201910258728.7A
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CN109909366B (en
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张俊杰
胡王杰
张建国
赵东旭
许剑锋
闫永达
孙涛
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Harbin Institute of Technology
Huazhong University of Science and Technology
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Harbin Institute of Technology
Huazhong University of Science and Technology
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Abstract

The invention discloses a kind of optical path auxiliary microscopic visual inspection systems and method towards ultrasonic impact processing, the system comprises micro-vision camera, industrial personal computer, No.1 deflection mirror surface device, No. two deflection mirror surface devices, ultrasonic impact cutter, processing platforms, workpieces processing, LED light source, in which: the industrial personal computer respectively with micro-vision camera, No.1 deflection mirror surface device, No. two deflection mirror surface devices, LED light source connection;The light that the LED light source issues is radiated in workpieces processing, acquires ultrasonic impact cutter pattern and workpieces processing surface micro-structure dimension information image in place by micro-vision camera after the mirror-reflection of the mirror surface of No.1 deflection mirror surface device and No. two deflection mirror surface devices.The present invention timely can be controlled and be managed to process by detection in place, and can reduce the precision machined production cost of ultrasonic impact and rejection rate after error occurs with time update.

Description

Optical path auxiliary microscopic visual inspection system and method towards ultrasonic impact processing
Technical field
The invention belongs to technical field of vision detection, are related to a kind of optical path auxiliary micro-vision towards ultrasonic impact processing Detection system and method.
Background technique
Function surface micro-structure refers to the tiny area topology with specific function, such as groove, microlens array. Function surface micro-structure has the functional characteristics such as super-hydrophobic, sunken light, drag reduction antifriction, noise reduction, has important practical application value. For example, having obtained domestic and international by preparing function surface micro-structure to improve the research work of the friction and wear behavior of stainless steel The extensive concern of person and industry.
The micro- texture technology of preparing of stainless steel surface based on ultrasonic impact is with ten thousand hertz of magnitude frequencies and micron dimension amplitude Stainless steel work-piece surface is impacted to obtain the preparation of the micro- texture of stainless steel surface.Push impact head with every using powerful energy Frequency that number of seconds is ten thousand times impacts stainless steel surface, high frequency, efficiently and focus lower big energy effect make the generation of stainless steel surface layer compared with Big compressive plastic deformation.Meanwhile ultrasonic impact changes the original stress field in surface layer, can produce on surface processed beneficial Compression.In addition, stainless steel surface temperature is very fast under high energy impact events increases again cooling rapidly, make active region coating metal Tissue changes, and impact site is enable to strengthen.It on this basis, can be processed by increasing the amplitude of impact head Material surface generates permanent plastic deformation to generate dotted texture.Further, in conjunction with precise motion device and interpolation algorithm Accurately to control the motion profile of impact head, the complicated shapes texture such as straight line or curved grooves can be generated in metal surface, from And realize the processing preparation of high-precision function surface micro-structure.
This ultraprecise ultrasonic impact processing process time it is often longer and impact it is larger, have constant surface matter The technology stability that amount ensures is influenced by hard stainless steel ultrasonic impact tool wear, and this abrasion can be to stainless steel surface The machining accuracy of micro- texture has an impact.In addition, the morphology and size of the micro- texture of function surface is generally in micron dimension, processing The error of precision will also tend to influence the realization of its specific function.Currently, only after a complete Precision Machining process The cutter and workpiece of abrasion can just be detected, this results in generating huge rejection rate.How in real time detection in place is super Acoustic shock tool surface pattern and workpieces processing microstructure size just become a urgent need.It can be to adding by detecting in place Work process is timely controlled and is managed, and can be modified in time after error occurs.
Summary of the invention
For overcome the deficiencies in the prior art, the present invention provides a kind of optical path auxiliary towards ultrasonic impact processing is micro- Vision detection system and method.The present invention is that the manufacture of ultrasonic impact Precision Machining proposes applicable fabrication evaluation in place and automatic Change scheme, this scheme may be implemented detection in place to ultrasonic impact cutter pattern and workpieces processing surface micro-structure size and The automation of processing technology.In this way it can be ensured that still reach in ultrasonic impact Precision Machining very high technology stability and The surface quality of weighing apparatus.
The purpose of the present invention is what is be achieved through the following technical solutions:
A kind of optical path auxiliary microscopic visual inspection system towards ultrasonic impact processing, including micro-vision camera, industrial personal computer, one Number deflection mirror surface device, No. two deflection mirror surface devices, ultrasonic impact cutter, processing platform, workpieces processing, LED light source, in which:
The industrial personal computer respectively with micro-vision camera, No.1 deflection mirror surface device, No. two deflection mirror surface devices, LED light source line Road connection;
The No.1 deflection mirror surface device and No. two deflection mirror surface apparatus structures are identical, including high-precision steering engine, ring flange, spiral shell Nail, u-bracket, mirror surface, ring flange are fixed by screw and high-precision steering engine, u-bracket by screw and ring flange into Row is fixed, and mirror surface is bonded in u-bracket;
The mirror surface of the No.1 deflection mirror surface device is deflected under the drive of high-precision steering engine along anterior-posterior horizontal axis;
The mirror surface of No. two deflection mirror surface devices is deflected under the drive of high-precision steering engine along left and right horizontal axis;
Ultrasonic impact cutter is installed on the processing platform;
Workpieces processing is provided with below the ultrasonic impact cutter;
The light that the LED light source issues is radiated in workpieces processing, mirror surface and No. two mirror surfaces through No.1 deflection mirror surface device The micro- knot of ultrasonic impact cutter pattern and workpieces processing surface is acquired by micro-vision camera in place after the mirror-reflection of arrangement for deflecting Structure dimension information image.
A method of optical path auxiliary micro-vision is carried out using above system and is detected, and is included the following steps:
Step 1: adjusting the brightness of LED light source using industrial personal computer, the sensitivity in the visual field is improved;
Step 2: making imaging clearly using aperture, focusing and the varying times parameter of industrial personal computer adjustment micro-vision camera zoom It can be seen that;
Step 3: controlling the linkage of two high-precision steering engines using industrial personal computer, two mirror surfaces of driving coordinate deflection and change input path, make to show Micro- vision camera acquires ultrasonic impact cutter pattern and workpieces processing surface micro-structure dimension information image in place;
Step 4: ultrasonic impact cutter pattern and workpieces processing surface micro-structure size that industrial personal computer obtains micro-vision camera Information image is handled, to realize the detection in place of the precision of ultrasonic impact processing.
Compared with the prior art, the present invention has the advantage that
1, optical path of the invention auxiliary microscopic visual inspection system is easy to operate, and high degree of automation can be quick by industrial personal computer LED light source brightness is set;Adjust aperture, focusing and the varying times parameter of micro-vision camera lens;Two deflection mirror surface of coordinated control, Change reflected light path, realizes the adjustment of monitoring area position.
2, micro-vision camera acquisition image is image to be obtained by two mirror-reflections, rather than shooting at close range obtains figure Picture, can to avoid short distance component movement interference and be difficult to adjust focusing problem, and prevent chips and greasy dirt to mirror The destruction of head and camera internal precision optical instrument part.
3, currently, only can just be detected to the cutter and workpiece of abrasion after a complete Precision Machining process, This results in generating huge rejection rate.The present invention timely can be controlled and be managed to process by detection in place Reason, and after error occurs the precision machined production cost of ultrasonic impact and rejection rate can be reduced with time update.
4, the present invention can be widely popularized in fields such as vision detection technologies.
Detailed description of the invention
The structural schematic diagram for the optical path auxiliary microscopic visual inspection system that Fig. 1 present invention is processed towards ultrasonic impact;
Fig. 2 is the structural schematic diagram of No.1 deflection mirror surface device and No. two deflection mirror surface devices;
In figure, 1: micro-vision camera, 2: industrial personal computer, 3: No.1 deflection mirror surface device, 4: No. two deflection mirror surface devices, 5: ultrasound Impact tool, 6: workpieces processing, 7: processing platform, 8:LED light source, 9: rack, 10: accurate steering engine, 11: ring flange, 12: spiral shell Nail, 13:U type bracket, 14: mirror surface.
Specific embodiment
Further description of the technical solution of the present invention with reference to the accompanying drawing, and however, it is not limited to this, all to this Inventive technique scheme is modified or replaced equivalently, and without departing from the spirit and scope of the technical solution of the present invention, should all be covered Within the protection scope of the present invention.
As shown in Figure 1, the optical path auxiliary microscopic visual inspection system provided by the invention towards ultrasonic impact processing includes Micro-vision camera 1, industrial personal computer 2,3, No. two deflection mirror surface devices 4 of No.1 deflection mirror surface device, ultrasonic impact cutter 5, processing Platform 6, workpieces processing 7, LED light source 8, in which:
The industrial personal computer 2 respectively with micro-vision camera 1, No.1 deflection mirror surface device 3, No. two deflection mirror surface devices 4, LED light 8 connection of source.Image processing system is installed in industrial personal computer 2, is obtained for the Data Acquisition Card to micro-vision camera 1 Image be analyzed and processed, obtain the appearance and size of the micro- texture of function surface of ultrasonic impact cutter 5 and workpieces processing 7 Image information.Industrial personal computer 2 can control the zoom lens of micro-vision camera 1, adjust aperture, focusing and the zoom ginseng of zoom lens Number, keeps imaging clearly visible.In addition, industrial personal computer 2 can improve the sensitivity in the visual field by the brightness of adjusting LED light source 8.Work Kinetic control system is installed in control machine 2, can be according to the images acquisition locations coordinate information of acquisition, the region monitored as needed Position, controls No.1 deflection mirror surface device 3 and No. two deflection mirror surface devices 4 rotate respective angles, realizes the deflection of reflected light path.
The No.1 deflection mirror surface device 3 is identical with No. two 4 structures of deflection mirror surface device, as shown in Fig. 2, including high-precision Steering engine 10, ring flange 11, screw 12, u-bracket 13, mirror surface 14, in which: ring flange 11 passes through screw 12 and high-precision steering engine 10 It is fixed, u-bracket 13 is fixed by screw 12 with ring flange 11, and mirror surface 14 passes through photosensitive glue and u-bracket 13 It is bonded.No.1 deflection mirror surface device 3 and No. two deflection mirror surface device 4 installation sites are different, No.1 deflection mirror surface device 3 with The upper horizontal plane of rack 9 is fixed, and No. two deflection mirror surface devices 4 and the lower horizontal plane of rack 9 are fixed.No.1 deflection mirror surface device 3 Mirror surface 14 can be deflected under the drive of high-precision steering engine 10 along anterior-posterior horizontal axis.The mirror surface of No. two deflection mirror surface devices 4 14 can be deflected under the drive of high-precision steering engine 10 along left and right horizontal axis.Industrial personal computer 2 controls the linkage of two high-precision steering engines 10, So that two mirror surfaces 14 is coordinated deflection regulating optical path, realizes the adjustment of monitoring area position.
Ultrasonic impact cutter 5 is installed, the lower section of ultrasonic impact cutter 5 is provided with workpieces processing on the processing platform 7 6, the light that LED light source 8 issues is radiated in workpieces processing 6, and mirror surface 14 and No. two mirror surfaces through No.1 deflection mirror surface device 3 are inclined The mirror surface 14 of rotary device 4 acquires ultrasonic impact cutter pattern in place by micro-vision camera 1 after reflecting and workpieces processing surface is micro- Structure size information image.
It is a kind of to carry out the optical path processed towards ultrasonic impact auxiliary micro-vision detection method using above system, including such as Lower step:
Step 1: adjusting the brightness of LED light source 8 using 2 machine of industry control, the sensitivity in the visual field is improved;
Step 2: adjusting aperture, focusing and the varying times parameter of 1 zoom lens of micro-vision camera using industrial personal computer 2, keep imaging clear It is clear visible;
Step 3: controlling the linkage of two high-precision steering engines 10 using industrial personal computer 2, two mirror surfaces 14 of driving coordinate deflection and change incident light Road makes micro-vision camera 1 acquisition ultrasonic impact cutter pattern and workpieces processing surface micro-structure dimension information image in place;
Step 4: obtaining the pattern of ultrasonic impact cutter 5 and the surface of workpieces processing 7 in conjunction with 2 image processing system of industrial personal computer Microstructure size information, to realize the detection in place of the precision of ultrasonic impact processing.
Embodiment:
The single width of 1024 × 768 pixels (Pixel) can be obtained having a size of 4.65 by using a Sony CCD camera The photo of × 4.65 mm.On camera one can be being obtained when focusing distance is 48mm using the camera lens that can amplify 10 times The effective field of view of the mm of 0.49 mm × 0.37 can be to ultrasonic impact cutter and workpieces processing under the action of light path system Appearance and size analyzed.Since camera lens amplifies in which can have no deviation, a single pixel just reflect 4.65mm × The size of 4.65mm, therefore reached the limit (5 μm) of the distinguishable degree of optics.This system can achieve 10 μm or higher repetition Precision, within time of measuring 20ms, single measurement 10 sizes, including geometric dimension, circularity, scratch etc..It is additional by installing Optical module, can completely automatically distinguish ultrasonic impact cutter and workpieces processing in the change in size situation of micron range, The cutter and modulation processing technology of abrasion can be replaced in the case of necessary.
In order to guarantee the high quality in terms of reaching surface accuracy and forming accuracy, ultrasonic impact is being taken turns to single micro- texture one After Precision Machining terminates, to suspend by predetermined time interval and process, not need to remove workpiece, use is high-resolution CCD camera detects ultrasonic impact cutter and workpieces processing pattern and size in place, while determining that ultrasonic impact cutter exists The relative position of absolute coordinate system on the basis of camera reduces because of the error that clamping generates.In predetermined abrasion On the basis of label and processing dimension allowed band, camera transmits image information to industrial personal computer, the image processing system of industrial personal computer It can decide whether to need replacing cutter, or determine whether cutter can also meet the quality requirement for continuing processing in next step.

Claims (4)

1. a kind of optical path towards ultrasonic impact processing assists microscopic visual inspection system, it is characterised in that the system comprises aobvious Micro- vision camera, No.1 deflection mirror surface device, No. two deflection mirror surface devices, ultrasonic impact cutter, processing platform, adds industrial personal computer Work workpiece, LED light source, in which:
The industrial personal computer respectively with micro-vision camera, No.1 deflection mirror surface device, No. two deflection mirror surface devices, LED light source line Road connection;
The No.1 deflection mirror surface device and No. two deflection mirror surface apparatus structures are identical, including high-precision steering engine, ring flange, spiral shell Nail, u-bracket, mirror surface, ring flange are fixed by screw and high-precision steering engine, u-bracket by screw and ring flange into Row is fixed, and mirror surface is bonded in u-bracket;
Ultrasonic impact cutter is installed on the processing platform;
Workpieces processing is provided with below the ultrasonic impact cutter;
The light that the LED light source issues is radiated in workpieces processing, mirror surface and No. two mirror surfaces through No.1 deflection mirror surface device The micro- knot of ultrasonic impact cutter pattern and workpieces processing surface is acquired by micro-vision camera in place after the mirror-reflection of arrangement for deflecting Structure dimension information image.
2. the optical path according to claim 1 towards ultrasonic impact processing assists microscopic visual inspection system, feature exists It is deflected under the drive of high-precision steering engine along anterior-posterior horizontal axis in the mirror surface of the No.1 deflection mirror surface device.
3. the optical path according to claim 1 towards ultrasonic impact processing assists microscopic visual inspection system, feature exists It is deflected under the drive of high-precision steering engine along left and right horizontal axis in the mirror surface of No. two deflection mirror surface devices.
4. a kind of carry out the optical path processed towards ultrasonic impact auxiliary using system described in claim 1-3 any claim Micro-vision detection method, it is characterised in that described method includes following steps:
Step 1: adjusting the brightness of LED light source using industrial personal computer, the sensitivity in the visual field is improved;
Step 2: making imaging clearly using aperture, focusing and the varying times parameter of industrial personal computer adjustment micro-vision camera zoom It can be seen that;
Step 3: controlling the linkage of two high-precision steering engines using industrial personal computer, two mirror surfaces of driving coordinate deflection and change input path, make to show Micro- vision camera acquires ultrasonic impact cutter pattern and workpieces processing surface micro-structure dimension information image in place;
Step 4: ultrasonic impact cutter pattern and workpieces processing surface micro-structure size that industrial personal computer obtains micro-vision camera Information image is handled, to realize the detection in place of the precision of ultrasonic impact processing.
CN201910258728.7A 2019-04-01 2019-04-01 Light path auxiliary microscopic vision detection system and method for ultrasonic impact machining Active CN109909366B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101197A (en) * 2006-12-31 2008-01-09 沈阳工业大学 On-line imaging detection device and method for cylindrical internal and external wall machining accuracy
CN102667400A (en) * 2009-10-19 2012-09-12 住友金属工业株式会社 Method of measuring flatness of plate and method of manufacturing steel plate using same
CN103203526A (en) * 2012-01-16 2013-07-17 成都熊谷加世电器有限公司 Laser visual tracking system
CN103586740A (en) * 2013-10-31 2014-02-19 东华大学 Minuteness and precision machining tool working shape online detection device and method
KR20140065225A (en) * 2012-11-21 2014-05-29 김덕섭 Workpiece display device and display method
CN104251866A (en) * 2013-06-27 2014-12-31 现代自动车株式会社 Inspection device for painted surface of vehicle
CN107843207A (en) * 2017-10-23 2018-03-27 北京京仪仪器仪表研究总院有限公司 The one camera real-time measurement system and method for a kind of groove type solar paraboloid surface shape

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101101197A (en) * 2006-12-31 2008-01-09 沈阳工业大学 On-line imaging detection device and method for cylindrical internal and external wall machining accuracy
CN102667400A (en) * 2009-10-19 2012-09-12 住友金属工业株式会社 Method of measuring flatness of plate and method of manufacturing steel plate using same
CN103203526A (en) * 2012-01-16 2013-07-17 成都熊谷加世电器有限公司 Laser visual tracking system
KR20140065225A (en) * 2012-11-21 2014-05-29 김덕섭 Workpiece display device and display method
CN104251866A (en) * 2013-06-27 2014-12-31 现代自动车株式会社 Inspection device for painted surface of vehicle
CN103586740A (en) * 2013-10-31 2014-02-19 东华大学 Minuteness and precision machining tool working shape online detection device and method
CN107843207A (en) * 2017-10-23 2018-03-27 北京京仪仪器仪表研究总院有限公司 The one camera real-time measurement system and method for a kind of groove type solar paraboloid surface shape

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