CN109894168B - Microfluidic substrate and micro total analysis system - Google Patents
Microfluidic substrate and micro total analysis system Download PDFInfo
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- CN109894168B CN109894168B CN201910229316.0A CN201910229316A CN109894168B CN 109894168 B CN109894168 B CN 109894168B CN 201910229316 A CN201910229316 A CN 201910229316A CN 109894168 B CN109894168 B CN 109894168B
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Abstract
The invention provides a micro-fluidic substrate and a micro total analysis system, and belongs to the technical field of biological detection. The microfluidic substrate of the present invention comprises: the backplate is located drive electrode on the backplate is located lyophobic layer on drive electrode place layer, the micro-fluidic substrate still includes: and the organic dielectric layer is positioned between the layer where the driving electrode is positioned and the lyophobic layer. The microfluidic substrate can be driven by low voltage, so that the power consumption is low.
Description
Technical Field
The invention belongs to the technical field of biological detection, and particularly relates to a micro-fluidic substrate and a micro total analysis system.
Background
A micro-Total Analysis System (micro-Total Analysis System) is intended to transfer the functions of an Analysis laboratory to a portable Analysis device to the maximum extent or even to a chip of a cubic size by miniaturization and integration of a chemical Analysis device. The final aim is to realize 'personalization' and 'housekeeping' of the analysis laboratory, so that the analysis science and the analysis instrument are liberated from the chemical laboratory and enter thousands of households.
In a micro total analysis system, the actions of controlling micro liquid drop movement, separation, polymerization, chemical reaction, biological detection and the like can be realized. The liquid drop is dropped on the lyophobic layer and moves to a designated position through the driving electrode, the light source separates vertical light with different wavelengths through the optical waveguide and emits the vertical light from the designated position, and the photosensitive sensor (namely, the photosensitive unit) judges the position, the components and the like of the liquid drop by detecting the light after passing through the liquid drop.
The inventor finds that at least the following problems exist in the prior art: in the existing micro total analysis system, because teflon is generally used as a material of the lyophobic layer, the dielectric constant of the material is small, the driving voltage of the driving electrode needs to be more than 40V to drive the movement of the liquid drop, and the power consumption of the micro total analysis system is large.
Disclosure of Invention
The present invention is directed to at least one of the problems of the prior art, and provides a microfluidic substrate and a micro total analysis system.
The technical scheme adopted for solving the technical problem of the invention is a microfluidic substrate, which comprises: the backplate is located drive electrode on the backplate is located lyophobic layer on drive electrode place layer, the micro-fluidic substrate still includes: and the organic dielectric layer is positioned between the layer where the driving electrode is positioned and the lyophobic layer.
Preferably, the back plate includes: the substrate is positioned on the substrate, and comprises a first control line, a driving voltage write line and a switch unit; a second control line, a signal reading line, and a detection unit; wherein the content of the first and second substances,
the switch unit is used for outputting the driving voltage written on the driving voltage writing line to the driving electrode under the control of the first control line;
and the detection unit is used for detecting the optical signal under the control of the second control line and outputting the optical signal through the reading line.
Preferably, the switching unit includes a first switching transistor; the detection unit comprises a second switching transistor and a photosensitive element; wherein the content of the first and second substances,
the first pole of the first switch transistor is connected with the drive voltage writing line, the second pole of the first switch transistor is connected with the drive electrode, and the control pole of the first switch transistor is connected with the first control line;
a first pole of the second switching transistor is connected with a reading line, a second pole of the second switching transistor is connected with a first pole of the photosensitive element, and a control pole of the second switching transistor is connected with a second control line; the second pole of the photosensitive element is connected with a fixed power supply voltage end;
the first switching transistor and/or the second switching transistor comprise low temperature polysilicon thin film transistors.
Preferably, the back plate further comprises a driving chip on the substrate; the driving chip is bound and connected with the first control line, the driving voltage writing line, the second control line and the signal reading line.
Preferably, the microfluidic substrate further comprises: and the isolation layer is positioned between the layer where the driving electrode is positioned and the organic dielectric layer.
Preferably, the material of the isolation layer comprises silicon nitride.
Preferably, the microfluidic substrate further comprises: an adhesive layer on the release layer; the bonding layer is provided with a hollow area at a position corresponding to the driving electrode; the organic dielectric layer fills the hollowed-out area.
Preferably, the microfluidic substrate further comprises: and the bonding layer is positioned between the layer where the driving electrode is positioned and the organic dielectric layer.
Preferably, the material of the organic dielectric layer includes: any one of polyethylene, polyvinylidene fluoride and vinylidene fluoride copolymer.
The technical scheme adopted for solving the technical problem of the invention is a micro total analysis system which comprises the microfluidic substrate and an optical unit.
Drawings
Fig. 1 is a schematic structural view of a microfluidic substrate according to example 1 of the present invention;
fig. 2 is a schematic structural view of a microfluidic substrate according to example 2 of the present invention;
fig. 3 is a schematic structural diagram of a microfluidic substrate according to example 3 of the present invention;
fig. 4 is a schematic structural view of another microfluidic substrate according to embodiment 3 of the present invention.
Wherein the reference numerals are: 1. a back plate; 2. a drive electrode; 3. draining the liquid layer; 4. an organic dielectric layer; 5. an isolation layer; 6. and (6) bonding layers.
Detailed Description
In order to make the technical solutions of the present invention better understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments.
First, the structure of a conventional micro total analysis system will be described.
A micro total analysis system typically comprises two major parts, namely a microfluidic substrate and an optical unit. Wherein, the micro-fluidic base plate includes: the back plate is sequentially provided with a driving electrode, a planarization layer and a hydrophobic layer; the back plate includes: the substrate is positioned on the substrate and comprises a first control line, a driving voltage write line and a switch unit; a second control line, a signal reading line, and a detection unit; the switching unit is used for outputting a driving voltage written on a driving voltage writing line to a driving electrode under the control of the first control line so as to drive the liquid drop to move; the detection unit is used for detecting the optical signal passing through the liquid drop under the control of the second control line and outputting the optical signal through the reading line so as to detect the state of the liquid drop. The optical unit comprises a light source, an optical waveguide layer, a common electrode and a lyophobic layer; specifically, the light source is arranged on the side of the optical waveguide layer and can output a plurality of paths of light with different wavelengths; a common electrode layer and a lyophobic layer are arranged on the common waveguide layer; the side of the optical waveguide layer having the common electrode layer is disposed opposite to the microfluidic substrate.
Wherein the droplet is located between the microfluidic substrate and the optical unit at the time of droplet driving and droplet detection. Specifically, the movement of the driving liquid drop is realized by controlling the magnitude of the voltage value applied to the driving electrode, when the liquid drop moves to a certain position, the liquid drop can block a part of light of an upper light source, so that the regional change of a signal received by the photosensitive unit is caused, and the size and the position information of the liquid drop can be detected. And different concentrations and different shielded light intensity information lead to different signal quantities of the regional photosensitive unit array, so that the real-time concentration information of the liquid drops can be read according to the signal size.
The inventor finds that, because polytetrafluoroethylene is generally used as the material of the lyophobic layer in contact with the liquid drop, the dielectric constant of the material is small, so that when the liquid drop is driven to move, the voltage applied to the driving electrode needs to be more than 50V, namely, a larger driving voltage is needed to drive the liquid drop to move, and therefore, the power consumption of the micro total analysis system is larger.
Several microfluidic substrates and micro total analysis systems are provided in the following embodiments to solve the above problems.
Example 1:
as shown in fig. 1, the present embodiment provides a microfluidic substrate, which includes a back plate 1, a plurality of driving electrodes 2 disposed at intervals on the back plate 1, an organic dielectric layer 4 on the layer where the driving electrodes 2 are disposed, and a lyophobic layer 3 on the organic dielectric layer 4.
Because the micro-fluidic substrate of the embodiment is provided with the electromechanical dielectric layer 4 between the layer where the driving electrode 2 is located and the lyophobic layer 3, the organic dielectric layer 4 has good flexibility, low dielectric loss and easy processing, and meanwhile, the capacitance of the dielectric layer can be improved, and the density of charges of the dielectric layer forming the double electric layers is increased by the organic dielectric layer 4 and the lyophobic layer 3, according to the mutual repulsion principle of charges with the same polarity, the charge density is increased, the repulsion force is increased, the wettability of electrolyte is increased, and the contact angle is reduced, so that the driving voltage of a device can be reduced, and at the moment, the driving voltage is less than 20V, and further, the power consumption of the micro-fluidic substrate is reduced.
Wherein, backplate 1 includes: the substrate is positioned on the substrate and comprises a first control line, a driving voltage write line and a switch unit; a second control line, a signal reading line, and a detection unit; the switching unit is used for outputting the driving voltage written on the driving voltage writing line to the driving electrode 2 under the control of the first control line; the detection unit is used for detecting the optical signal under the control of the second control line and outputting the optical signal through the reading line.
Specifically, the switching unit includes a first switching transistor; the detection unit comprises a second switching transistor and a photosensitive element; the first pole of the first switching transistor is connected with the driving voltage writing line, the second pole of the first switching transistor is connected with the driving electrode 2, and the control pole of the first switching transistor is connected with the first control line; a first pole of the second switching transistor is connected with the reading line, a second pole of the second switching transistor is connected with the first pole of the photosensitive element, and a control pole of the second switching transistor is connected with the second control line; the second pole of the photosensitive element is connected with the fixed power voltage end.
In this embodiment, the first switching transistor and/or the second switching transistor includes a low temperature polysilicon thin film transistor. In order to facilitate the fabrication of the backplane 1, in this embodiment, the first switch transistor and the second switch transistor are both low-temperature polycrystalline thin film transistors. Moreover, because the low-temperature polycrystalline thin film transistor can utilize a continuous deposition process without a buffer layer during preparation, the mobility of the back plate 1 can be greatly improved. The photosensitive element preferably adopts a PIN photodiode, and the PIN photodiode is embedded into the back plate 1 to form the photosensitive element, so that the sensitivity of the microfluidic substrate can be greatly improved.
The substrate of the backplate 1 of this embodiment is further provided with a driving chip, and the driving chip is bound and connected with the first control line, the driving voltage write line, the second control line and the signal read line. Therefore, system integration, circuit space saving and drive chip cost reduction can be achieved.
In this embodiment, the material of the organic dielectric layer 4 includes polyethylene, polyvinylidene fluoride, and vinylidene fluoride copolymer, which have good flexibility, low dielectric loss, and are easy to process, and at the same time, the dielectric constant of the dielectric layer can be increased, so that the number of stored charges of the capacitor formed on the microfluidic substrate is increased, that is, the charge density is increased. Of course, the organic dielectric layer 4 is not limited to the above materials, and may have a dielectric constant of about 9 to 11.
Hereinafter, the operation of the microfluidic substrate will be described by taking an example in which the first switching transistor and the second switching transistor are N-type thin film transistors.
A droplet driving stage:
for the driving of the liquid drop, the driving electrode 2 is controlled by the first switching transistor, different voltage values are applied to the driving electrode 2, and the voltage of the driving electrode causes the liquid drop above the driving electrode 2 to have different contact angles with the surface contacted by the liquid drop, so that the liquid drop can move.
Specifically, a high level signal is input to the first control line, that is, a high level signal is input to the control electrode of the first switching transistor, the first switching transistor is turned on, a first voltage is input to the driving voltage write line, and the first voltage is transmitted to the driving electrode 2 to drive the droplet to move.
A droplet detection stage:
the control electrode of the second switch transistor is input with a low level signal, the second switch transistor is turned off, the pressure difference between two ends of the PIN photodiode enables the PIN photodiode to start light sensing integration to convert the light signal into an electric signal when the PIN photodiode is set by illumination, after the integration is finished, the control electrode of the second switch transistor is input with a high level signal, the second switch transistor is turned on, and the PIN photodiode is read through a reading line connected with the first electrode of the second switch transistor to generate the electric signal so as to determine the state of the liquid drop.
In the step, for example, the PIN photodiodes are arranged in an array, when the liquid drop moves to a certain position, the liquid drop can block a part of light from the upper light source, so that the signal received by the PIN photodiodes is changed regionally, and the size and position information of the liquid drop can be detected. And different concentrations, the light intensity information of sheltering from is different, leads to regional PIN photodiode array's semaphore different, so can read out the real-time concentration information of liquid drop according to the size of signal.
Example 2:
as shown in fig. 2, the present embodiment provides a microfluidic substrate having substantially the same structure as that of embodiment 1, except that the microfluidic substrate of the present embodiment includes an isolation layer 5 between the layer where the driving electrode 2 is located and the organic dielectric layer 4, and the isolation layer 5 can isolate water and oxygen to prevent the water and oxygen from corroding each functional element on the driving electrode 2 and the back plate 1.
For the remaining structure of the microfluidic substrate of this embodiment, the same structure as that in embodiment 1 can be employed, and therefore, the description will not be repeated here.
In this embodiment, the material of the isolation layer 5 may be silicon nitride (SiNx) or the like. Of course, the material of the isolation layer 5 is not limited to this, and different materials capable of isolating water and oxygen may be used according to the specific structure and the specific process.
Example 3:
this embodiment provides a microfluidic substrate, which may include the structures of the microfluidic substrate in embodiments 1 or 2, and particularly, the microfluidic substrate in this embodiment is provided with an adhesive layer 6 on the side of the driving electrode 2 away from the base, so as to prevent the organic dielectric layer 4 from falling off.
Specifically, as shown in fig. 3, when the microfluidic substrate in this embodiment includes the structures of the layers in embodiment 1, the adhesive layer 6 may be a planar structure and cover the driving electrode 2, and the organic dielectric layer 4 may cover the adhesive layer 6. The structure is simple in preparation process, and the organic dielectric layer 4 can be well prevented from falling off.
As shown in fig. 4, when the microfluidic substrate in this embodiment includes the structures in embodiment 2, the adhesive layer 6 is located on the isolation layer 5, the adhesive layer 6 may be a grid structure, wherein the hollow area of the grid structure corresponds to the driving electrode 2, the organic dielectric layer 4 is formed by a plurality of block structures, and each block structure fills one hollow area, that is, the organic dielectric layer 4 fills the hollow area to form a flat surface. The structure does not increase the thickness of the microfluidic substrate, so that the microfluidic substrate is light and thin.
Of course, even if the microfluidic substrate includes the respective layer structures in embodiment 2, the bonding layer 6 and the organic dielectric layer 4 may be in a planar structure to simplify the process steps.
Example 4:
this example provides a micro total analysis system comprising the microfluidic substrate of any of examples 1-3.
Since the micro total analysis system in this embodiment includes any one of the microfluidic substrates in embodiments 1 to 3, its power consumption is low.
Of course, the micro total analysis system of the present embodiment further includes: an optical unit; the optical unit comprises a light source, an optical waveguide layer, a common electrode and a lyophobic layer 3; specifically, the light source is arranged on the side of the optical waveguide layer and can output a plurality of paths of light with different wavelengths; a common electrode layer and a lyophobic layer 3 are arranged on the common waveguide layer; the side of the optical waveguide layer having the common electrode layer is disposed opposite to the microfluidic substrate.
Example 5:
this embodiment provides a method for manufacturing a microfluidic substrate, in which the microfluidic substrate may include a back plate 1, and a driving electrode 2, an isolation layer 5, an adhesive layer 6, an organic dielectric layer 4, and a hydrophobic layer sequentially disposed on the back plate 1 are taken as an example for description. The method specifically comprises the following steps:
step one, preparing a back plate 1 and packaging the back plate 1.
Specifically, the method comprises the steps of forming a first switching transistor, a second switching transistor, a PIN photodiode and other elements on a substrate in a continuous deposition mode; the first switch transistor and the second switch transistor may be low-temperature polysilicon thin film transistors, and then the backplane 1 is packaged by using silicon nitride.
And step two, forming a pattern comprising the driving electrode 2 through a composition process.
Specifically, a transparent conductive layer is deposited in this step, and then exposure, development, and etching are performed to form a pattern including the driving electrode 2. Wherein the transparent conductive layer is made of ITO, and has a thickness of
Left and right.
And step three, forming an isolation layer 5.
Specifically, the isolation layer 5 may be formed by coating in this step. Wherein, the material of the isolation layer 5 may include silicon nitride and the like.
And step four, forming a pattern comprising the bonding layer 6 through a patterning process.
Specifically, in this step, a spin coating method is used to coat the adhesive material layer, and then the material at the position corresponding to the drive electrode 2 to be formed later in the adhesive material layer is removed by exposure and development processes, and then the adhesive layer 6 is formed by curing. Wherein the rotating speed of the spin coating is about 450rpm/30 s; the thickness of the bonding layer 6 is about 5 mu m; the curing temperature is about 230 ℃; the curing time is about 60 min.
And step five, forming a pattern comprising the organic dielectric layer 4 through a patterning process.
Specifically, in the step, the organic dielectric layer 4 is formed by spin coating, the hollow area is filled with the organic dielectric layer 4 to form a flat surface, and then the flat surface is subjected to pre-baking, crystallization and polarization treatment. Wherein the rotating speed of the spin coating is about 500rpm/30 s; the thickness of the organic electroluminescent layer is about 5 mu m; the pre-baking temperature is about 135 ℃; the pre-baking time is about 15 min.
And step six, forming a lyophobic layer 3.
Specifically, in this step, the lyophobic layer 3 is formed by spin coating and then cured. Wherein the rotating speed of the spin coating is about 800rpm/10 s; the film thickness of the lyophobic layer 3 is about 0.5 μm; the curing temperature is about 165 ℃; the curing time is about 15 min.
In the preparation method of the microfluidic substrate of the embodiment, the organic dielectric layer 4 is formed between the layer where the driving electrode 2 is located and the lyophobic layer 3, the organic dielectric layer 4 is good in flexibility, low in dielectric loss and easy to process, meanwhile, the capacitance of the dielectric layer can be improved, the density of charges of the dielectric layer forming the electric double layer is increased by the organic dielectric layer 4 and the lyophobic layer 3, according to the principle that like charges repel each other, the density of the charges is increased, the repulsive force is increased, the wettability of the electrolyte is increased, and the contact angle is reduced, so that the driving voltage of a device can be reduced, and at the moment, the driving voltage is smaller than 20V, and further the power consumption of the microfluidic substrate is reduced.
Accordingly, this embodiment also provides a method for preparing a micro total analysis system, which includes the above method for preparing a microfluidic substrate, and further includes the steps of forming a common electrode and a lyophobic layer 3 on the optical waveguide layer, and forming a light source at a side of the optical waveguide layer.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (7)
1. A microfluidic substrate comprising: the backplate is located drive electrode on the backplate is located lyophobic layer on drive electrode place layer, its characterized in that, the microfluidic substrate still includes: the organic dielectric layer is positioned between the layer where the driving electrode is positioned and the lyophobic layer;
the microfluidic substrate further comprises: the isolation layer is positioned between the layer where the driving electrode is positioned and the organic dielectric layer;
the microfluidic substrate further comprises: an adhesive layer on the release layer; the bonding layer is provided with a hollow area at a position corresponding to the driving electrode; the organic dielectric layer fills the hollowed-out area.
2. The microfluidic substrate according to claim 1, wherein the back plate comprises: the substrate is positioned on the substrate, and comprises a first control line, a driving voltage write line and a switch unit; a second control line, a signal reading line, and a detection unit; wherein the content of the first and second substances,
the switch unit is used for outputting the driving voltage written on the driving voltage writing line to the driving electrode under the control of the first control line;
and the detection unit is used for detecting the optical signal under the control of the second control line and outputting the optical signal through the reading line.
3. The microfluidic substrate according to claim 2, wherein the switching unit comprises a first switching transistor; the detection unit comprises a second switching transistor and a photosensitive element; wherein the content of the first and second substances,
the first pole of the first switch transistor is connected with the drive voltage writing line, the second pole of the first switch transistor is connected with the drive electrode, and the control pole of the first switch transistor is connected with the first control line;
a first pole of the second switching transistor is connected with a reading line, a second pole of the second switching transistor is connected with a first pole of the photosensitive element, and a control pole of the second switching transistor is connected with a second control line; the second pole of the photosensitive element is connected with a fixed power supply voltage end;
the first switching transistor and/or the second switching transistor comprise low temperature polysilicon thin film transistors.
4. The microfluidic substrate according to claim 2, wherein the back plate further comprises a driving chip on the substrate; the driving chip is bound and connected with the first control line, the driving voltage writing line, the second control line and the signal reading line.
5. The microfluidic substrate according to claim 1, wherein the material of the isolation layer comprises silicon nitride.
6. The microfluidic substrate according to claim 1, wherein the material of the organic dielectric layer comprises: any one of polyethylene, polyvinylidene fluoride and vinylidene fluoride copolymer.
7. A micro total analysis system comprising the microfluidic substrate of any one of claims 1 to 6 and an optical unit.
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