CN109889084A - The ultraprecise feeding posture adjusting device and its motivational techniques of Piezoelectric Driving - Google Patents
The ultraprecise feeding posture adjusting device and its motivational techniques of Piezoelectric Driving Download PDFInfo
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Abstract
The present invention is ultraprecise five degree of freedom piezoelectric movement platform and its motivational techniques.The present invention solves the technical problem that existing most ultraprecise pose_adjusters are difficult to realize feed motion and structure is cumbersome, load capacity is poor.It is main driving element that feeding posture adjusting device of the invention, which forms wherein driving unit (2) by mover (1), driving unit (2), nut (3), lead screw (4) and pedestal (5), to generate bending deformation and torsional deflection and drive the three freedom rotary sport of mover and single-degree-of-freedom to move along a straight line by driving foot or feed screw nut.Based on the motivational techniques in the present invention, the ultraprecise movement of large scale is may be implemented in the feeding posture adjusting device.Feeding posture adjusting device in the present invention is compact-sized, load capacity is strong, and motivational techniques are simple and reliable, is suitably applied the technical field for needing that accurate posture adjustment and feeding are carried out to operation object.
Description
Technical field
It is that a kind of ultraprecise of Piezoelectric Driving feeds posture adjusting device and its excitation the present invention relates to piezoelectric driving technology field
Method.
Background technique
Piezoelectric driving technology is caused as a kind of more novel technological means that ultraprecise driving and positioning may be implemented
Motivation reason mainly realizes conversion of the inputing power to output mechanical energy using the inverse piezoelectric effect of piezoelectric material.Due to its structure
Flexible design multiplicity, resolving power height, fast response time, in recent years by very extensive concern, and in precision instrument, biology
The fields such as medical treatment, aerospace are successfully applied.
As a kind of piezoelectric element with larger mechanical fan-out capability, piezoelectric stack include can with linear movement output,
Bending motion and the multiple types of rotary motion realize that the Piexoelectric actuator of precision actuation has also been subjected to using piezoelectric stack
Extensive concern and significant progress are arrived.But make a general survey of the accurate piezoelectric actuator of numerous types, the fortune that they may be implemented
Dynamic number of degrees of freedom, is still difficult to meet application demand, invent it is a kind of it is simple and compact for structure, motivational techniques are reliably easy, and have compared with
The accurate piezoelectric actuator of heavy load ability is the correlative technology fields such as Ultra-precision Turning, nanometer science and technology, cell science
The problem of further development must face.
Summary of the invention
The present invention be solves the problems, such as it is existing, provide a kind of Piezoelectric Driving ultraprecise feed posture adjusting device and its
Motivational techniques, the present invention provides following technical schemes:
A kind of ultraprecise of Piezoelectric Driving feeds posture adjusting device, the feeding posture adjusting device include mover 1, driving unit 2,
Nut 3, lead screw 4 and pedestal 5；
The driving unit 2 include driving foot 2-1, two-way stacked flexure type piezoelectric actuator 2-2, collets 2-3, on
The stacked twist mode piezoelectric actuator 2-4 in side, middle splint 2-5 and the stacked twist mode piezoelectric actuator 2-6 in downside；
The pedestal 5 is kept fixed, and the mover 1 exports the movement of four-degree-of-freedom ultraprecise；
The driving foot 2-1, two-way stacked flexure type piezoelectric actuator 2-2, collets 2-3, the stacked torsion in upside
The axis of type piezoelectric actuator 2-4, middle splint 2-5 and the stacked twist mode piezoelectric actuator 2-6 in downside along driving unit 2
Directional spreding and it is kept fixed connection, the axis direction of lead screw 4 is overlapped and between pedestal 5 with the axis direction of driving unit 2
It is kept fixed connection；
The mover 1 is pressed on the upper surface of driving foot 2-1, the stacked twist mode piezoelectric actuator 2-6 pressure in downside
Tightly in the upper surface of nut 3.
Preferably, the two-way stacked flexure type piezoelectric actuator 2-2 is by multi-disc piezoelectric ceramics along the axis of driving unit 2
Line direction is formed by fixedly connecting, and every piezoelectric ceramics includes four polarization subregions, the two-way stacked flexure type Piezoelectric Driving
The bending deformation for deviateing the axis direction of driving unit 2 occurs under the action of driving voltage signal for device 2-2, and then drives driving
Pendulum motion of the sufficient 2-1 along two orthogonal direction vertical with the axis direction of driving unit 2；The stacked twist mode in upside
The piezoelectric actuator 2-4 and stacked twist mode piezoelectric actuator 2-6 in downside is by multi-disc piezoelectric ceramics around the axis of driving unit 2
Direction is formed by fixedly connecting, and every piezoelectric ceramics includes a polarization subregion, the stacked twist mode piezoelectric actuator in upside
Axis around driving unit 2 occurs under the action of driving voltage signal for the 2-4 and stacked twist mode piezoelectric actuator 2-6 in downside
The torsional deflection in line direction, the stacked twist mode piezoelectricity of the stacked twist mode piezoelectric actuator 2-4 in the upside and downside drive
Dynamic two surfaces device 2-6 or more produce relative rotation movement, and then drive drive foot 2-1 and nut 3 around driving unit 2 respectively
Axis direction rotational motion.
Preferably, the driving foot upper surface 2-1 is provided with location hole, and the mover 1 is pressed on driving by location hole
To realize self-centering and driving foot 2-1 is followed to do ultraprecise movement on sufficient 2-1；
It is kept in contact under the action of pressing device between the mover 1 and driving foot 2-1, the pressing device includes ball
Bearing compresses, electromagnetic force compresses, hydrodynamic pressure compresses, hydrostatic pressure compresses.
Preferably, the lead screw 4 cooperates with the nut 3, and the lead screw 4 is kept fixed, and the nut 3 is around driving unit
2 axis direction rotation, and then generate the linear motion of the axis direction along driving unit 2；
The middle splint 2-5 is provided with the linear guide of the axis direction along driving unit 2, the linear guide guidance
Driving unit 2 along own axes direction linear motion, and limit except along 2 own axes direction of driving unit it is for linear motion in addition to
Straight line or rotary motion on all directions.
A kind of motivational techniques of the ultraprecise feeding posture adjusting device of Piezoelectric Driving, realize mover 1 by following motivational techniques
Large scale four-degree-of-freedom ultraprecise movement, include the following steps:
Step 1: mover 1 does two-way linear along the axis direction of driving unit 2 and moves；
Step 2: mover 1 does shake double-direction turning movement around the axis direction of driving unit 2；
Step 3: mover 1 does shake double-direction turning movement around the horizontal direction orthogonal with the axis direction of driving unit 2；
Step 4: mover 1 does shake double-direction turning movement around the longitudinal direction orthogonal with the axis direction of driving unit 2；
The sequence of above four steps voluntarily adjusts as needed.
Preferably, the step 1 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal that amplitude slowly rises,
Its top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator 2-6 and nut 3 in downside
Between under the action of stiction, nut 3 generates positive direction swing offset around the axis direction of driving unit 2, since lead screw 4 is protected
Fixation is held, nut 3 generates positive direction straight-line displacement along the axis direction of driving unit 2, and then pushes driving unit 2 and mover
1 straight-line displacement along this direction exports；
Step 3: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal of amplitude rapid decrease,
Its top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut 3, nut 3 and downside stacking
Occur to remain stationary with respect to sliding between formula twist mode piezoelectric actuator 2-6, and then driving unit 2 and mover 1 are also kept
It is static；
Step 4: repeating second step to third step, realize mover 1 along the continuous positive direction of axis direction of driving unit 2
Linear motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal that amplitude slowly declines,
Its top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator 2-6 and nut 3 in downside
Between under the action of stiction, nut 3 generates opposite direction swing offset around the axis direction of driving unit 2, since lead screw 4 is protected
Fixation is held, nut 3 generates opposite direction straight-line displacement along the axis direction of driving unit 2, and then pushes driving unit 2 and mover
1 straight-line displacement along this direction exports；
Step 7: twist mode piezoelectric actuator 2-6 stacked to downside applies the zooming driving voltage signal of amplitude,
Its top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut 3, nut 3 and downside stacking
Occur to remain stationary with respect to sliding between formula twist mode piezoelectric actuator 2-6, and then driving unit 2 and mover 1 are also kept
It is static；
Step 8: repeating the 6th step to the 7th step, realize mover 1 along the continuous opposite direction of axis direction of driving unit 2
Linear motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal.
Preferably, the step 2 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal that amplitude slowly rises,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 slowly to turn to extreme position, quiet between driving foot 2-1 and mover 1
Under the action of frictional force, mover 1 generates the output of positive direction swing offset around the axis direction of driving unit 2；
Step 3: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal of amplitude rapid decrease,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 quick rotation to move under the action of the inertia of mover 1 to initial position
Occur to remain stationary with respect to sliding between son 1 and driving foot 2-1；
Step 4: repeating second step to third step, realize mover 1 around the continuous positive direction of axis direction of driving unit 2
Rotary motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal that amplitude slowly declines,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 slowly to turn to extreme position, quiet between driving foot 2-1 and mover 1
Under the action of frictional force, mover 1 generates the output of opposite direction swing offset around the axis direction of driving unit 2；
Step 7: twist mode piezoelectric actuator 2-4 stacked to upside applies the zooming driving voltage signal of amplitude,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 quick rotation to move under the action of the inertia of mover 1 to initial position
Occur to remain stationary with respect to sliding between son 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realize mover 1 around the continuous opposite direction of axis direction of driving unit 2
Rotary motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal.
Preferably, the step 3 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two.
Step 2: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal risen, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along depth positive direction,
Under the action of driving the stiction between foot 2-1 and mover 1, mover 1 generates the output of positive direction swing offset around horizontal direction；
Step 3: it is fast to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of speed decline, bending deformation drive driving foot 2-1 to be quickly rocked to initial position along depth opposite direction,
Under the action of the inertia of mover 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 4: repeating second step to third step, realize that mover 1 around the continuous positive direction rotary motion of horizontal direction, leads to
The amplitude for changing driving voltage signal and time are spent, realizes Ultra-precision positioning in this direction；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two.
Step 6: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal declined, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along depth opposite direction,
Under the action of driving the stiction between foot 2-1 and mover 1, mover 1 generates the output of opposite direction swing offset around horizontal direction；
Step 7: it is fast to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal that speed rises, bending deformation drive driving foot 2-1 to be quickly rocked to initial position along depth positive direction,
Under the action of the inertia of mover 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realize that mover 1 around the continuous opposite direction rotary motion of horizontal direction, leads to
The amplitude for changing driving voltage signal and time are spent, realizes Ultra-precision positioning in this direction.
Preferably, the step 4 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal risen, bending deformation drive driving foot 2-1 along horizontal square to being slowly rocked to extreme position,
Under the action of driving the stiction between foot 2-1 and mover 1, mover 1 generates the output of positive direction swing offset around longitudinal direction；
Step 3: it is fast to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of speed decline, bending deformation drive driving foot 2-1 to be quickly rocked to initial position along horizontal opposite direction,
Under the action of the inertia of mover 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 4: repeating second step to third step, realize that mover 1 around the continuous positive direction rotary motion of longitudinal direction, leads to
The amplitude for changing driving voltage signal and time are spent, realizes Ultra-precision positioning in this direction；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
Slowly the driving voltage signal declined, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along horizontal opposite direction,
Under the action of driving the stiction between foot 2-1 and mover 1, mover 1 generates the output of opposite direction swing offset around longitudinal direction；
Step 7: it is fast to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal that speed rises, bending deformation drive driving foot 2-1 along horizontal square to being quickly rocked to initial position,
Under the action of the inertia of mover 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realize that mover 1 around the continuous opposite direction rotary motion of longitudinal direction, leads to
The amplitude for changing driving voltage signal and time are spent, realizes Ultra-precision positioning in this direction.
The invention has the following advantages:
The present invention using a variety of stacked piezoelectric actuators realize three rotary freedoms posture adjustment campaign and one it is straight
The feed motion of line freedom degree proposes a kind of ultraprecise feeding posture adjusting device of Piezoelectric Driving.Feeding posture adjustment dress of the invention
It is simple to set structure, flexible design；Motivational techniques are reliably easy, and movement point may be implemented by adjusting the amplitude of driving voltage signal
Distinguish the accurate adjustment of power；Feeding posture adjusting device of the invention can be realized simultaneously greatly using the step-by-step movement working principle of Piezoelectric Driving
Movement travel and nanoscale resolving power have in correlative technology fields such as Ultra-precision Turning, nanometer science and technology, cell sciences
Wide application prospect, for promoting the development of piezoelectric driving technology itself also to have important role.
Detailed description of the invention
Fig. 1 is that the ultraprecise of Piezoelectric Driving feeds the three dimensional structure diagram of posture adjusting device；
Fig. 2 is that ultraprecise feeds two-way stacked flexure type piezoelectric actuator curved change along the x axis in posture adjusting device
Shape schematic diagram；
Fig. 3 is that ultraprecise feeds two-way stacked flexure type piezoelectric actuator curved change along the y axis in posture adjusting device
Shape schematic diagram；
Fig. 4 is that ultraprecise feeds the stacked twist mode piezoelectric actuator in the upside change that direction is reversed about the z axis in posture adjusting device
Shape schematic diagram；
Fig. 5 is that ultraprecise feeds the stacked twist mode piezoelectric actuator in the downside change that direction is reversed about the z axis in posture adjusting device
Shape schematic diagram
Required application swashs when Fig. 6 is ultraprecise feeding posture adjusting device realization ultraprecise positive direction straight line or rotary motion
Encourage voltage signal schematic diagram；
Required application swashs when Fig. 7 is ultraprecise feeding posture adjusting device realization ultraprecise opposite direction straight line or rotary motion
Encourage voltage signal schematic diagram；
Fig. 8 is the end matter that ultraprecise feeds driving foot when posture adjusting device realizes the forward and reverse straight line of ultraprecise or rotary motion
The bottom surface particle of plane and the stacked twist mode piezoelectric actuator in downside is unfolded relative to nut top surface relative to mover in point
Movement locus schematic diagram.
In figure, 1- mover, 2- driving unit, 3- nut, 4- lead screw, 5- pedestal, 2-1- driving is sufficient, and 2-2- is two-way stacked
Flexure type piezoelectric actuator, 2-3- collets, the stacked twist mode piezoelectric actuator in the upside 2-4-, 2-5- middle splint, 2-6-
The stacked twist mode piezoelectric actuator in downside.
Specific embodiment
Below in conjunction with specific embodiment, describe the invention in detail.
Specific embodiment one:
With reference to the accompanying drawings of the specification 1, Fig. 2, Fig. 3, Fig. 4, Fig. 5 are described in further details the present embodiment.This implementation
Example provides a kind of ultraprecise feeding posture adjusting device of Piezoelectric Driving as shown in Figure 1.The feeding posture adjusting device includes mover
1, driving unit 2, nut 3, lead screw 4 and pedestal 5；The driving unit 2 includes driving foot 2-1, two-way stacked flexure type
Piezoelectric actuator 2-2, collets 2-3, the stacked twist mode piezoelectric actuator 2-4 in upside, middle splint 2-5 and downside stacking
Formula twist mode piezoelectric actuator 2-6；The pedestal 5 is kept fixed.According to Fig. 1, the axis direction of driving unit 2 is Z
Axis direction, the horizontal direction orthogonal with the axis direction of driving unit 2 are Y direction, just with the axis direction of driving unit 2
The longitudinal direction of friendship is X-direction；The mover 1 is exported for connecting end effector mechanism around X-axis, Y-axis or Z axis side
To rotary motion and along the linear motion of Z-direction；The driving foot 2-1, two-way stacked flexure type piezoelectric actuator 2-
2, collets 2-3, the stacked twist mode piezoelectric actuator 2-4 in upside, the stacked twist mode piezoelectricity of middle splint 2-5 and downside
Driver 2-6 is sequentially distributed along the axis direction of driving unit 2 and is kept fixed connection, and the axis direction of lead screw 4 and driving are single
The axis direction of member 2 is overlapped and is kept fixed between pedestal 5 and connect；The driving unit 2 can do straight line fortune along Z-direction
Dynamic, nut 3 can make rotating motion and move in a straight line along Z-direction in direction about the z axis, effect of the mover 1 in driving foot 2-1
Under three axis rotary motions can be done around its center；The driving foot 2-1 is in contact compression with mover 1, and passes through frictional force drives
Three axis rotary motions of mover 1, the stacked twist mode piezoelectric actuator 2-6 in downside are in contact compression with nut 3, and pass through friction
Direction makes rotating motion power drive nut 3 about the z axis, and then nut 3, driving unit 2 and mover 1 is driven to do straight line along Z-direction
Movement.
In the present embodiment, the driving unit 2 is used as energy conversion component, and it is mechanical to output that inputing power may be implemented
The conversion of energy；The two-way stacked flexure type piezoelectric actuator 2-2 is formed by fixedly connecting by multi-disc piezoelectric ceramics, every piezoelectricity
Ceramics include four polarization subregions, after applying driving voltage signal to it, the piezoelectric ceramics region difference in opposite side subregion
Elongation and shortening, so that two-way stacked flexure type piezoelectric actuator 2-2 is made to generate the bending deformation for deviateing own axes direction,
And then driving driving foot 2-1 along the pendulum motion of X-axis or Y direction, deformation is as shown in Figures 2 and 3 respectively；The upper layer
The stacked twist mode piezoelectric actuator 2-4 and stacked twist mode piezoelectric actuator 2-6 in downside is connected by multi-disc piezoelectric ceramics is fixed
It connects, after applying driving voltage signal to it, shear-deformable, the stacked twist mode piezoelectricity in upside occurs for every piezoelectric ceramics
The driver 2-4 and stacked twist mode piezoelectric actuator 2-6 in downside twists deformation, and upper and lower two surfaces generate opposite
Rotational motion, and then drive the rotational motion of driving foot 2-1 and the direction about the z axis of nut 3 respectively, deformation respectively as Fig. 4 with
Shown in Fig. 5.
In the present embodiment, the driving foot upper surface 2-1 is provided with location hole, and the mover 1 passes through the location hole
Self-centering is realized on driving foot 2-1, therefore does not need additional support device, and mover 1 can not only be done around center
Three freedom rotary sport can also follow nut 3 to move in a straight line along Z-direction；Between the mover 1 and driving foot 2-1
Compression is kept in contact under the action of pressing device, and pressing force between the two can be adjusted, the pressing device packet
It includes but is not limited to ball bearing compresses, electromagnetic force compresses, hydrodynamic pressure compresses, hydrostatic pressure compresses etc..
In the present embodiment, the lead screw 4 cooperates with the nut 3, and the lead screw 4 is kept fixed and the top surface of nut 3
It is pressed on the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside, the axis along driving unit 2 is provided on driving unit 2
The linear guide in line direction, therefore can only move in a straight line and cannot be made rotating motion in direction about the z axis along Z-direction, in downside
Between stacked twist mode piezoelectric actuator 2-6 and nut 3 under the action of frictional force, nut 3 is while direction rotates about the z axis
The linear motion along Z-direction is generated, and then drives driving unit 2 and mover 1 along the linear motion of Z-direction.
In the present embodiment, the mover 1 is for fixing accurate operation object, to realize its three degree of freedom in space
Accurate posture adjustment campaign and precision feeding movement, or for connecting end accurate operation executing agency, to realize that its precision is adjusted
Appearance and feeding are to realize the fine operation of ultraprecise.
Specific embodiment two:
With reference to the accompanying drawings of the specification 1, Fig. 6, Fig. 7, Fig. 8 are described in further details the present embodiment.The present embodiment mentions
A kind of motivational techniques based on ultraprecise shown in FIG. 1 feeding posture adjusting device are supplied, which may be implemented the big of mover 1
The movement of scale four-degree-of-freedom ultraprecise, the straight line fortune including the rotary motion around X-axis, Y-axis or Z-direction and along Z-direction
It is dynamic, nanoscale resolving power can be achieved by adjusting the amplitude of driving voltage signal and time.
Realize mover 1 along Z-direction do motivational techniques that two-way linear moves the following steps are included:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal that amplitude slowly rises,
Its top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator 2-6 and nut 3 in downside
Between under the action of stiction, direction generates positive direction swing offset, since lead screw 4 is kept fixed, nut 3 to nut 3 about the z axis
Positive direction straight-line displacement is generated along Z-direction, and then the straight-line displacement of driving unit 2 and mover 1 along this direction is pushed to export；
Step 3: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal of amplitude rapid decrease,
Its top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut 3, nut 3 and downside stacking
Occur to remain stationary with respect to sliding between formula twist mode piezoelectric actuator 2-6, and then driving unit 2 and mover 1 are also kept
It is static；
Step 4: repeating second step to third step, realize that mover 1 along the continuous positive direction linear motion of Z-direction, passes through
Amplitude and the time for changing driving voltage signal realize ultraprecise movement in this direction, to the stacked twist mode piezoelectricity in downside
The driving voltage signal that driver 2-6 applies is as shown in U in Fig. 6；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: twist mode piezoelectric actuator 2-6 stacked to downside applies the driving voltage signal that amplitude slowly declines,
Its top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator 2-6 and nut 3 in downside
Between under the action of stiction, direction generates opposite direction swing offset, since lead screw 4 is kept fixed, nut 3 to nut 3 about the z axis
Opposite direction straight-line displacement is generated along Z-direction, and then the straight-line displacement of driving unit 2 and mover 1 along this direction is pushed to export；
Step 7: twist mode piezoelectric actuator 2-6 stacked to downside applies the zooming driving voltage signal of amplitude,
Its top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut 3, nut 3 and downside stacking
Occur to remain stationary with respect to sliding between formula twist mode piezoelectric actuator 2-6, and then driving unit 2 and mover 1 are also kept
It is static；
Step 8: repeating the 6th step to the 7th step, realize that mover 1 along the continuous opposite direction linear motion of Z-direction, passes through
Amplitude and the time for changing driving voltage signal realize ultraprecise movement in this direction, to the stacked twist mode piezoelectricity in downside
The driving voltage signal that driver 2-6 applies is as shown in U in Fig. 7.
Realize mover 1 about the z axis direction do shake double-direction turning movement motivational techniques the following steps are included:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal that amplitude slowly rises,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 slowly to turn to extreme position, quiet between driving foot 2-1 and mover 1
Under the action of frictional force, direction generates the output of positive direction swing offset to mover 1 about the z axis；
Step 3: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal of amplitude rapid decrease,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 quick rotation to move under the action of the inertia of mover 1 to initial position
Occur to remain stationary with respect to sliding between son 1 and driving foot 2-1；
Step 4: repeating second step to third step, realizes the continuous positive direction rotary motion in direction about the z axis of mover 1, pass through
Amplitude and the time for changing driving voltage signal realize ultraprecise movement in this direction, to the stacked twist mode piezoelectricity in upside
The driving voltage signal that driver 2-4 applies is as shown in U in Fig. 6；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: twist mode piezoelectric actuator 2-4 stacked to upside applies the driving voltage signal that amplitude slowly declines,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 slowly to turn to extreme position, quiet between driving foot 2-1 and mover 1
Under the action of frictional force, direction generates the output of opposite direction swing offset to mover 1 about the z axis；
Step 7: twist mode piezoelectric actuator 2-4 stacked to upside applies the zooming driving voltage signal of amplitude,
Its bottom surface is kept fixed and top surface drives driving foot 2-1 quick rotation to move under the action of the inertia of mover 1 to initial position
Occur to remain stationary with respect to sliding between son 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realizes the continuous opposite direction rotary motion in direction about the z axis of mover 1, pass through
Amplitude and the time for changing driving voltage signal realize ultraprecise movement in this direction, to the stacked twist mode piezoelectricity in upside
The driving voltage signal that driver 2-4 applies is as shown in U in Fig. 7.
Realize mover 1 around X-direction do shake double-direction turning movement motivational techniques the following steps are included:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two.
Step 2: it is slow to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along Y-axis positive direction, are driving
Under the action of stiction between action spot 2-1 and mover 1, mover 1 generates the output of positive direction swing offset around X-direction；
Step 3: it is quick to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, bending deformation drives driving foot 2-1 to be quickly rocked to initial position along Y-axis opposite direction, dynamic
Under the action of the inertia of son 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 4: repeating second step to third step, realize that mover 1 around the continuous positive direction rotary motion of X-direction, passes through
Amplitude and the time for changing driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type piezoelectricity
The driving voltage signal that Y direction bending subregion in driver 2-2 applies is as shown in U in Fig. 6；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two.
Step 6: it is slow to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along Y-axis opposite direction, are driving
Under the action of stiction between action spot 2-1 and mover 1, mover 1 generates the output of opposite direction swing offset around X-direction；
Step 7: it is quick to apply amplitude to the Y direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, bending deformation drives driving foot 2-1 to be quickly rocked to initial position along Y-axis positive direction, dynamic
Under the action of the inertia of son 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realize that mover 1 around the continuous opposite direction rotary motion of X-direction, passes through
Amplitude and the time for changing driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type piezoelectricity
The driving voltage signal that Y direction bending subregion in driver 2-2 applies is as shown in U in Fig. 7.
Realize mover 1 around Y direction do shake double-direction turning movement motivational techniques the following steps are included:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 2: it is slow to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along X-axis positive direction, are driving
Under the action of stiction between action spot 2-1 and mover 1, mover 1 generates the output of positive direction swing offset around Y direction；
Step 3: it is quick to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, bending deformation drives driving foot 2-1 to be quickly rocked to initial position along X-axis opposite direction, dynamic
Under the action of the inertia of son 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 4: repeating second step to third step, realize that mover 1 around the continuous positive direction rotary motion of Y direction, passes through
Amplitude and the time for changing driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type piezoelectricity
The driving voltage signal that X-direction bending subregion in driver 2-2 applies is as shown in U in Fig. 6；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator 2-6 in downside is pressed on the top surface of nut 3, and adjust
Mover 1 is pressed on driving foot 2-1, and adjusts precompression between the two by whole precompression between the two；
Step 6: it is slow to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of decline, bending deformation drive driving foot 2-1 to be slowly rocked to extreme position along X-axis opposite direction, are driving
Under the action of stiction between action spot 2-1 and mover 1, mover 1 generates the output of opposite direction swing offset around Y direction；
Step 7: it is quick to apply amplitude to the X-direction bending subregion in two-way stacked flexure type piezoelectric actuator 2-2
The driving voltage signal of rising, bending deformation drives driving foot 2-1 to be quickly rocked to initial position along X-axis positive direction, dynamic
Under the action of the inertia of son 1, occur to remain stationary with respect to sliding between mover 1 and driving foot 2-1；
Step 8: repeating the 6th step to the 7th step, realize that mover 1 around the continuous opposite direction rotary motion of Y direction, passes through
Amplitude and the time for changing driving voltage signal, Ultra-precision positioning in this direction is realized, to two-way stacked flexure type piezoelectricity
The driving voltage signal that X-direction bending subregion in driver 2-2 applies is as shown in U in Fig. 7.
In the present embodiment, the end particle of driving foot 2-1 is opposite when the feeding posture adjusting device realizes ultraprecise movement
In top surface of the bottom surface particle of the expansion plane of mover 1 and the stacked twist mode piezoelectric actuator 2-6 in downside relative to nut 3
Motion profile as shown in figure 8, and forward and reverse straight using the different ultraprecise four-degree-of-freedoms for realizing movers 1 of both direction speed
Line or rotary motion.
The above is only the ultraprecise feeding posture adjusting device of Piezoelectric Driving and its preferred embodiment of motivational techniques, pressure
Electrically driven (operated) ultraprecise feeding posture adjusting device and its protection scope of motivational techniques are not limited merely to above-described embodiment, all to belong to
Technical solution under the thinking all belongs to the scope of protection of the present invention.It should be pointed out that coming for those skilled in the art
It says, several improvements and changes without departing from the principles of the present invention, such modifications and variations also should be regarded as guarantor of the invention
Protect range.
Claims (9)
1. the ultraprecise of Piezoelectric Driving a kind of feeds posture adjusting device, it is characterized in that: the feeding posture adjusting device include mover (1),
Driving unit (2), nut (3), lead screw (4) and pedestal (5)；
The driving unit (2) includes driving foot (2-1), two-way stacked flexure type piezoelectric actuator (2-2), collets (2-
3), the stacked twist mode piezoelectric actuator (2-4) in upside, the stacked twist mode Piezoelectric Driving of middle splint (2-5) and downside
Device (2-6)；
The pedestal (5) is kept fixed, mover (1) the output four-degree-of-freedom ultraprecise movement；
Driving foot (2-1), two-way stacked flexure type piezoelectric actuator (2-2), collets (2-3), the stacked torsion in upside
It makes the transition piezoelectric actuator (2-4), the stacked twist mode piezoelectric actuator (2-6) of middle splint (2-5) and downside is along driving list
The axis direction of first (2) is distributed and is kept fixed connection, the axis direction of lead screw (4) and the axis direction weight of driving unit (2)
It closes and is kept fixed between pedestal (5) and is connect；
The mover (1) is pressed on the upper surface for driving foot (2-1), the stacked twist mode piezoelectric actuator (2-6) in downside
It is pressed on the upper surface of nut (3).
2. a kind of ultraprecise of Piezoelectric Driving according to claim 1 feeds posture adjusting device, it is characterized in that: the bidirectional layer
Axis direction of the stacked flexure type piezoelectric actuator (2-2) by multi-disc piezoelectric ceramics along driving unit (2) is formed by fixedly connecting, often
Piece piezoelectric ceramics includes four polarization subregions, and the two-way stacked flexure type piezoelectric actuator (2-2) is in driving voltage signal
Under the action of the bending deformation for deviateing the axis direction of driving unit (2) occurs, and then drive drive foot (2-1) along and driving it is single
The pendulum motion of two vertical orthogonal directions of the axis direction of first (2)；
The stacked twist mode piezoelectric actuator (2-4) in the upside and the stacked twist mode piezoelectric actuator (2-6) in downside by
Axis direction of the multi-disc piezoelectric ceramics around driving unit (2) is formed by fixedly connecting, and every piezoelectric ceramics includes a polarization subregion,
The stacked twist mode piezoelectric actuator (2-4) in the upside and the stacked twist mode piezoelectric actuator (2-6) in downside are being motivated
The torsional deflection of the axis direction around driving unit (2), the stacked twist mode pressure in upside occur under the action of voltage signal
Two surfaces produce relative rotation movement the stacked twist mode piezoelectric actuator (2-6) of electric drive (2-4) and downside up and down,
And then the rotational motion for driving foot (2-1) and nut (3) around the axis direction of driving unit (2) is driven respectively.
3. a kind of ultraprecise of Piezoelectric Driving according to claim 1 feeds posture adjusting device, it is characterized in that: driving foot
The upper surface (2-1) is provided with location hole, and the mover (1) is pressed on driving foot (2-1) automatic fixed to realize by location hole
The heart simultaneously follows driving foot (2-1) to do ultraprecise movement；
It is kept in contact under the action of pressing device between the mover (1) and driving foot (2-1), the pressing device includes ball
Bearing compresses, electromagnetic force compresses, hydrodynamic pressure compresses, hydrostatic pressure compresses.
4. a kind of ultraprecise of Piezoelectric Driving according to claim 1 feeds posture adjusting device, it is characterized in that: the lead screw
(4) cooperate with the nut (3), the lead screw (4) is kept fixed, and the nut (3) turns around the axis direction of driving unit (2)
It is dynamic, and then generate the linear motion of the axis direction along driving unit (2)；
The middle splint (2-5) is provided with the linear guide of the axis direction along driving unit (2), the linear guide guidance
Driving unit (2) and is limited except along driving unit (2) own axes direction doing straight line fortune along the linear motion in own axes direction
Straight line or rotary motion on dynamic outer all directions.
5. the motivational techniques of the ultraprecise feeding posture adjusting device of a kind of Piezoelectric Driving as described in claim 1, it is characterized in that: logical
The large scale four-degree-of-freedom ultraprecise movement that following motivational techniques realize mover (1) is crossed, is included the following steps:
Step 1: mover (1) does two-way linear movement along the axis direction of driving unit (2)；
Step 2: mover (1) does shake double-direction turning movement around the axis direction of driving unit (2)；
Step 3: mover (1) does shake double-direction turning movement around the horizontal direction orthogonal with the axis direction of driving unit (2)；
Step 4: mover (1) does shake double-direction turning movement around the longitudinal direction orthogonal with the axis direction of driving unit (2).
6. a kind of motivational techniques of the ultraprecise feeding posture adjusting device of Piezoelectric Driving according to claim 5, it is characterized in that:
The step 1 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 2: the driving voltage signal that amplitude slowly rises is applied to the stacked twist mode piezoelectric actuator in downside (2-6),
Top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator (2-6) and nut in downside
(3) between under the action of stiction, nut (3) generates positive direction swing offset around the axis direction of driving unit (2), due to
Lead screw (4) is kept fixed, and nut (3) generates positive direction straight-line displacement along the axis direction of driving unit (2), and then pushes driving
The straight-line displacement of unit (2) and mover (1) along this direction exports；
Step 3: apply the driving voltage signal of amplitude rapid decrease to the stacked twist mode piezoelectric actuator in downside (2-6),
Top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut (3), nut (3) and downside layer
Occur to remain stationary with respect to sliding between stacked twist mode piezoelectric actuator (2-6), and then driving unit (2) and mover
(1) it also remain stationary；
Step 4: repeating second step to third step, realize mover (1) along the continuous positive direction of axis direction of driving unit (2)
Linear motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 6: the driving voltage signal that amplitude slowly declines is applied to the stacked twist mode piezoelectric actuator in downside (2-6),
Top surface is kept fixed and bottom surface slowly turns to extreme position, stacked twist mode piezoelectric actuator (2-6) and nut in downside
(3) between under the action of stiction, nut (3) generates opposite direction swing offset around the axis direction of driving unit (2), due to
Lead screw (4) is kept fixed, and nut (3) generates opposite direction straight-line displacement along the axis direction of driving unit (2), and then pushes driving
The straight-line displacement of unit (2) and mover (1) along this direction exports；
Step 7: the zooming driving voltage signal of amplitude is applied to the stacked twist mode piezoelectric actuator in downside (2-6),
Top surface be kept fixed and bottom surface quick rotation to initial position, under the action of the inertia of nut (3), nut (3) and downside layer
Occur to remain stationary with respect to sliding between stacked twist mode piezoelectric actuator (2-6), and then driving unit (2) and mover
(1) it also remain stationary；
Step 8: repeating the 6th step to the 7th step, realize mover (1) along the continuous opposite direction of axis direction of driving unit (2)
Linear motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal.
7. a kind of motivational techniques of the ultraprecise feeding posture adjusting device of Piezoelectric Driving according to claim 5, it is characterized in that:
The step 2 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 2: the driving voltage signal that amplitude slowly rises is applied to the stacked twist mode piezoelectric actuator in upside (2-4),
Bottom surface be kept fixed and top surface drive drive foot (2-1) slowly turn to extreme position, drive foot (2-1) and mover (1) it
Between under the action of stiction, mover (1) generates the output of positive direction swing offset around the axis direction of driving unit (2)；
Step 3: apply the driving voltage signal of amplitude rapid decrease to the stacked twist mode piezoelectric actuator in upside (2-4),
Bottom surface is kept fixed and top surface drives and drives foot (2-1) quick rotation to initial position, under the action of the inertia of mover (1),
Occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 4: repeating second step to third step, realize mover (1) around the continuous positive direction of axis direction of driving unit (2)
Rotary motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 6: the driving voltage signal that amplitude slowly declines is applied to the stacked twist mode piezoelectric actuator in upside (2-4),
Bottom surface be kept fixed and top surface drive drive foot (2-1) slowly turn to extreme position, drive foot (2-1) and mover (1) it
Between under the action of stiction, mover (1) generates the output of opposite direction swing offset around the axis direction of driving unit (2)；
Step 7: the zooming driving voltage signal of amplitude is applied to the stacked twist mode piezoelectric actuator in upside (2-4),
Bottom surface is kept fixed and top surface drives and drives foot (2-1) quick rotation to initial position, under the action of the inertia of mover (1),
Occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 8: repeating the 6th step to the 7th step, realize mover (1) around the continuous opposite direction of axis direction of driving unit (2)
Rotary motion realizes ultraprecise movement in this direction by changing amplitude and the time of driving voltage signal.
8. a kind of motivational techniques of the ultraprecise feeding posture adjusting device of Piezoelectric Driving according to claim 5, it is characterized in that:
The step 3 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two.
Step 2: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, bending deformation, which drives, drives foot (2-1) to be slowly rocked to extreme position along depth positive direction,
Under the action of driving the stiction between foot (2-1) and mover (1), mover (1) generates positive direction around horizontal direction and rotates position
Move output；
Step 3: it is quick to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, bending deformation, which drives, drives foot (2-1) to be quickly rocked to initial position along depth opposite direction,
Under the action of the inertia of mover (1), occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 4: repeating second step to third step, realize that mover (1) around the continuous positive direction rotary motion of horizontal direction, passes through
Amplitude and the time for changing driving voltage signal, realize Ultra-precision positioning in this direction；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two.
Step 6: it is slow to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, bending deformation, which drives, drives foot (2-1) to be slowly rocked to extreme position along depth opposite direction,
Under the action of driving the stiction between foot (2-1) and mover (1), mover (1) generates opposite direction around horizontal direction and rotates position
Move output；
Step 7: it is quick to apply amplitude to the longitudinal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, bending deformation, which drives, drives foot (2-1) to be quickly rocked to initial position along depth positive direction,
Under the action of the inertia of mover (1), occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 8: repeating the 6th step to the 7th step, realize that mover (1) around the continuous opposite direction rotary motion of horizontal direction, passes through
Amplitude and the time for changing driving voltage signal, realize Ultra-precision positioning in this direction.
9. a kind of motivational techniques of the ultraprecise feeding posture adjusting device of Piezoelectric Driving according to claim 5, it is characterized in that:
The step 4 specifically:
Step 1: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 2: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, bending deformation, which drives, drives foot (2-1) along horizontal square to being slowly rocked to extreme position,
Under the action of driving the stiction between foot (2-1) and mover (1), mover (1) generates positive direction around longitudinal direction and rotates position
Move output；
Step 3: it is quick to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, bending deformation, which drives, drives foot (2-1) to be quickly rocked to initial position along horizontal opposite direction,
Under the action of the inertia of mover (1), occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 4: repeating second step to third step, realize that mover (1) around the continuous positive direction rotary motion of longitudinal direction, passes through
Amplitude and the time for changing driving voltage signal, realize Ultra-precision positioning in this direction；
Step 5: the bottom surface of the stacked twist mode piezoelectric actuator (2-6) in downside is pressed on the top surface of nut (3), and adjust
Mover (1) is pressed on driving foot (2-1), and adjusts precompression between the two by whole precompression between the two；
Step 6: it is slow to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of decline, bending deformation, which drives, drives foot (2-1) to be slowly rocked to extreme position along horizontal opposite direction,
Under the action of driving the stiction between foot (2-1) and mover (1), mover (1) generates opposite direction around longitudinal direction and rotates position
Move output；
Step 7: it is quick to apply amplitude to the horizontal direction bending subregion in two-way stacked flexure type piezoelectric actuator (2-2)
The driving voltage signal of rising, bending deformation, which drives, drives foot (2-1) along horizontal square to being quickly rocked to initial position,
Under the action of the inertia of mover (1), occur to remain stationary with respect to sliding between mover (1) and driving foot (2-1)；
Step 8: repeating the 6th step to the 7th step, realize that mover (1) around the continuous opposite direction rotary motion of longitudinal direction, passes through
Amplitude and the time for changing driving voltage signal, realize Ultra-precision positioning in this direction.
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| CN204271946U (en) * | 2014-12-09 | 2015-04-15 | 苏州科技学院 | A kind of single-electrical signal drives rotary ultrasonic motor |
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| CN206370785U (en) * | 2016-12-21 | 2017-08-01 | 深圳大学 | A kind of supersonic motor of the axial lamination of multiple stators |
| KR20180048497A (en) * | 2018-04-26 | 2018-05-10 | 배영석 | Hybrid booster pump |
| US20180323729A1 (en) * | 2017-05-08 | 2018-11-08 | Seiko Epson Corporation | Piezoelectric Driving Device, Electronic Component Conveyance Apparatus, Robot, Projector, And Printer |
| CN109245610A (en) * | 2018-09-04 | 2019-01-18 | 长江大学 | Twin crystal torsional oscillation beam element piezoelectric generator |
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2019
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN204271946U (en) * | 2014-12-09 | 2015-04-15 | 苏州科技学院 | A kind of single-electrical signal drives rotary ultrasonic motor |
| CN105281597A (en) * | 2015-01-06 | 2016-01-27 | 长春工业大学 | Powerful output sandwich type mode conversion ultrasonic motor, drive platform and drive method thereof |
| CN206370785U (en) * | 2016-12-21 | 2017-08-01 | 深圳大学 | A kind of supersonic motor of the axial lamination of multiple stators |
| US20180323729A1 (en) * | 2017-05-08 | 2018-11-08 | Seiko Epson Corporation | Piezoelectric Driving Device, Electronic Component Conveyance Apparatus, Robot, Projector, And Printer |
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