CN109883983A - A kind of nanometer acoustic effect analysis method based on macrosonics theory - Google Patents
A kind of nanometer acoustic effect analysis method based on macrosonics theory Download PDFInfo
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Abstract
The invention discloses a kind of nanometer acoustic effect analysis methods based on macrosonics theory, comprising the following steps: one, the acquisition of different scale delay line type SAW device；Two, the parameter testing of different scale delay line type SAW device；Three, the acquisition of different scale delay line type SAW device macrosonics calculated value and parameter error obtain；Four, the judgement of macrosonics theory breaks and failure threshold determine.Step of the present invention is simple, design is rationally and realization is convenient, it is analyzed by the macrosonics calculated value of the parameter of measured value of parameters and different scale delay line type SAW device to different scale delay line type SAW device, delay line type SAW device corresponding failure wavelength threshold when obtaining macrosonics theory breaks, can effectively push the research of acoustical device nanometer acoustic effect.
Description
Technical field
The invention belongs to nanometer acoustic effect analysis technical fields, more particularly, to a kind of receiving based on macrosonics theory
Rice acoustic effect analysis method.
Background technique
With the raising of SAW device high frequency, integration degree, the wavelength dimension of SAW device is narrowed down to
Nanometer scale, macrosonics is theoretical and the theoretical modeling method as derived from macrosonics theory has failure effect, macroscopic view
The Duffing equation of acoustic theory analysis will be no longer applicable in, and such as elastic mechanics equation, macrosonics theory can not be accurately to receiving at this time
The design of rice magnitude SAW device carries out theoretical direction, and it is therefore necessary to find a kind of nanometer based on macrosonics theory
Acoustic effect analysis method analyzes influence of the variation of device wavelength to nanometer acoustic effect, provides failure Rule of judgment and looks for
Failure threshold out can effectively push the research of acoustical device nanometer acoustic effect.
Summary of the invention
In view of the above-mentioned deficiencies in the prior art, the technical problem to be solved by the present invention is that providing a kind of based on macroscopic view
The nanometer acoustic effect analysis method of acoustic theory, method and step is simple, and design is rationally and realization is convenient, prolongs to different scale
The parameter of slow line style SAW device is tested, and the parameter measurement of different scale delay line type SAW device is obtained
Value, and by the parameter calculated value of macrosonics theoretical calculation acquisition different scale delay line type SAW device, by right
The measured value of parameters of different scale delay line type SAW device and the parameter of different scale delay line type SAW device
The analysis of macrosonics calculated value, provide failure and Rule of judgment and find out failure threshold, effectively acoustical device can be pushed to receive
The research of rice acoustic effect.
In order to solve the above technical problems, the technical solution adopted by the present invention is that: a kind of nanometer based on macrosonics theory
Acoustic effect analysis method, which comprises the following steps:
Step 1: the acquisition of different scale delay line type SAW device: obtaining different scale delay line type sound surface
Wave device arranges each delay line type SAW device according to the sequence of corresponding surface acoustic wave wavelength from big to small
Sequence；Wherein, surface acoustic wave wavelength corresponding to r-th of delay line type SAW device is λr, r is positive integer, and 1≤r≤
Ns, r-th of delay line type SAW device tool is respectively input pin, the first grounding pin, output there are four pin
Pin and the second grounding pin, NsIndicate the sum of delay line type SAW device；
Step 2: the parameter testing of different scale delay line type SAW device: to multiple delay line type surface acoustic waves
The method that device parameters are tested is all the same, wherein the parameter of r-th of delay line type SAW device tested,
Detailed process is as follows:
Step 201, according to formula Fg,r=λr×Vy,r, obtain the centre frequency of r-th of delay line type SAW device
Discreet value Fg,r；According to formulaObtain the bandwidth discreet value K of r-th of delay line type SAW deviceg,r；Its
In, Vy,rIndicate the phase velocity discreet value of delay line type SAW device, Vy,rValue range be 1000m/s~10000m/s,
NcIndicate the logarithm of interdigital electrode in r-th of delay line type SAW device；
Step 202, the centre frequency discreet value F for judging r-th of delay line type SAW deviceg,rWhether≤200GHz
It sets up, works as Fg,rWhen≤200GHz, step 203 is executed；Work as Fg,rWhen > 200GHz, step 204 is executed；
Step 203 is tested using parameter of the vector network analyzer to r-th of delay line type SAW device,
Obtain the centre frequency measured value F of r-th of delay line type SAW devicer, r-th delay line type SAW device insert
Enter loss measurement value SrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 204 is carried out using parameter of the terahertz time-domain spectroscopy analyzer to r-th of delay line type SAW device
Test obtains the centre frequency measured value F of r-th of delay line type SAW devicer, r-th of delay line type surface acoustic wave device
The insert loss value S of partrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 3: acquisition and the parameter error of different scale delay line type SAW device macrosonics calculated value
It obtains:
Step 301, boundary condition is that stress connects at interdigital electrode and piezoelectric dielectric in delay line type SAW device
Continuous and potential is continuous, and interdigital electrode and piezoelectric dielectric place are electric in the normal direction of plane in delay line type SAW device
It is displaced under discontinuity condition, using the finite element method-boundary element method of the coupled wave equation based on piezoelectric dielectric, obtains r-th and prolong
The COM parameter of slow line style SAW device；Computer transfers COM model, and inputs r-th of delay line type SAW device
COM parameter, r-th of delay line type when obtaining the output terminal shortcircuit of r-th of delay line type SAW device according to COM model
The input admittance Y of SAW device11, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type
The output admittance Y of SAW device22, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type
The output end of SAW device to r-th of delay line type SAW device input terminal transfer admittance Y12；
Step 302, according to formulaObtain r-th of delay line type sound surface
The positive transmission coefficient S of wave device21；Wherein, Z1Indicate the sending-end impedance matching of r-th of delay line type SAW device,
Z2Indicate the output end impedance matching of r-th of delay line type SAW device, and Z1=Z2=50 ohm, R1It indicates to prolong for r-th
The sending-end impedance real part of slow line style SAW device, R2Indicate the output end resistance of r-th of delay line type SAW device
Anti- real part, and R1=R2=50 ohm；
Step 303, according to formulaObtain the insertion loss of r-th of delay line type SAW device
Macroscopical calculated value
Step 304, the input pin using computer to r-th of delay line type SAW device apply frequency conversion sine wave
Pumping signal, the frequency range of frequency conversion sine wave exciting signal are 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal is from frequently
Rate is 0.7Fg,rWith stepping fbjTo 1.3Fg,rFrequency sweep, and step 301 is repeated several times to step 303, obtain different frequency sine wave
The insertion loss macroscopic view calculated value of r-th of delay line type SAW device under pumping signalWherein, frequency conversion sine wave
The amplitude range of pumping signal is 1 volt~5 volts, stepping fbjValue be 100kHz；
Step 305, using computer by r-th of delay line type surface acoustic wave device under different frequency sine wave exciting signal
The insertion loss macroscopic view calculated value of partIt is fitted, obtains using frequency as abscissa, using insertion loss as the r of ordinate
The frequency loss calculated curve of a delay line type SAW device；
Step 306, using computer will in the frequency loss calculated curve of r-th of delay line type SAW device it is maximum
The corresponding frequency of peak value as r-th of delay line type SAW device centre frequency calculated value and be denoted asProlong for r-th
The corresponding insertion loss of peak-peak is r-th of delay line type sound in the frequency loss calculated curve of slow line style SAW device
The insertion loss calculated value of surface wave deviceThe insertion loss calculated value of r-th of delay line type SAW deviceThe absolute value of the difference of two corresponding frequencies is the bandwidth calculation value of r-th of delay line type SAW device
Step 307, according to formulaObtain the center frequency of the acoustical device of r-th of interdigital electrode excitation
Rate relative error Δ Fr, according to formulaObtain the bandwidth phase of the acoustical device of r-th of interdigital electrode excitation
To error delta Kr, according to formulaObtain the insertion loss phase of the acoustical device of r-th of interdigital electrode excitation
To error delta Cr；
Step 4: the judgement of macrosonics theory breaks and failure threshold determine:
Use computer by surface acoustic wave wavelength corresponding to delay line type SAW device for abscissa, with center frequency
Rate absolute relative error is ordinate, obtains surface acoustic wave wavelength and frequency error curve figure；Worked as using computer judgement | Δ
Fr| < | Δ Fr+1| < | Δ Fr+2| < | Δ Fr+3| < | Δ Fr+4|, and 3%≤| Δ Fr| < | Δ Fr+1| < | Δ Fr+2| < | Δ
Fr+3| < | Δ Fr+4| when establishment, then centre frequency absolute relative error | Δ Fr| corresponding surface acoustic wave wavelength is macroscopic view
Delay line type SAW device corresponding failure wavelength threshold when acoustic theory fails；Wherein, | Δ Fr+1| indicate r+1
The centre frequency absolute relative error of delay line type SAW device, | Δ Fr+2| indicate the r+2 delay line type sound surface
The centre frequency absolute relative error of wave device, | Δ Fr+3| indicate the center frequency of the r+3 delay line type SAW device
Rate absolute relative error, | Δ Fr+4| indicate that the centre frequency relative error of the r+4 delay line type SAW device is absolute
Value, r+1, r+2, r+3 and r+4 are positive integer, and the value of r+1, r+2, r+3 and r+4 are in 1~NsIn range；
Or using computer using surface acoustic wave wavelength corresponding to delay line type SAW device as abscissa, with
Bandwidth absolute relative error is ordinate, obtains surface acoustic wave wavelength and bandwidth error curve graph；Worked as using computer judgement |
ΔKr| < | Δ Kr+1| < | Δ Kr+2| < | Δ Kr+3| < | Δ Kr+4|, and 3% < | Δ Kr| < | Δ Kr+1| < | Δ Kr+2| < | Δ
Kr+3| < | Δ Kr+4| when establishment, then bandwidth absolute relative error | Δ Kr| corresponding surface acoustic wave wavelength is macrosonics
Delay line type SAW device corresponding failure wavelength threshold when theory breaks；Wherein, | Δ Kr+1| indicate the r+1 delay
The bandwidth absolute relative error of line style SAW device, | Δ Kr+2| indicate the r+2 delay line type SAW device
Bandwidth absolute relative error, | Δ Kr+3| indicate that the bandwidth relative error of the r+3 delay line type SAW device is absolute
Value, | Δ Kr+4| indicate the bandwidth absolute relative error of the r+4 delay line type SAW device；
Or using computer using surface acoustic wave wavelength corresponding to delay line type SAW device as abscissa, with
Insertion loss absolute relative error is ordinate, obtains surface acoustic wave wavelength and insertion loss absolute relative error curve
Figure；Worked as using computer judgement | Δ Cr| < | Δ Cr+1| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4|, and 3% < | Δ Cr| < |
ΔCr+1| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4| when establishment, then insertion loss absolute relative error | Δ Cr| it is corresponding
Surface acoustic wave wavelength be macrosonics theory breaks when the corresponding failure wavelength threshold of delay line type SAW device；Its
In, | Δ Cr+1| indicate the insertion loss absolute relative error of the r+1 delay line type SAW device, | Δ Cr+2| it indicates
The insertion loss absolute relative error of the r+2 delay line type SAW device, | Δ Cr+3| indicate the r+3 delay line
The insertion loss absolute relative error of type SAW device, | Δ Cr+4| indicate the r+4 delay line type SAW device
Insertion loss absolute relative error.
Above-mentioned a kind of nanometer acoustic effect analysis method based on macrosonics theory, it is characterised in that: in step 203
It is tested using parameter of the vector network analyzer to r-th of delay line type SAW device, detailed process is as follows:
The output test port of the vector network analyzer is passed through output lead and r-th of delay line by step 2031
The input pin of type SAW device connects, and the input test port of vector network analyzer is passed through input lead and r
The output pin of a delay line type SAW device connects, the first grounding pin of r-th of delay line type SAW device
It is connect with the grounding ports of the vector network analyzer with the second grounding pin；
Step 2032, the operation vector network analyzer, make the output test port pair of the vector network analyzer
The input pin of r-th of delay line type SAW device applies frequency conversion sine wave exciting signal, frequency conversion sine wave exciting signal
Frequency range be 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal from frequency be 0.7Fg,rWith stepping fbjTo 1.3Fg,rIt sweeps
Frequently, when while applying frequency conversion sine wave exciting signal during the input test port of vector network analyzer acquisition frequency sweep
The response signal of the output pin of r-th of delay line type SAW device；
Step 2033, according to formulaR-th obtained under different frequency sine wave exciting signal prolongs
The insertion loss C of slow line style SAW devicef,r, VsIndicate the amplitude of frequency conversion sine wave exciting signal, VfIndicate r-th of delay
The amplitude of response signal of the output pin of line style SAW device under different frequency sine wave exciting signal；
Step 2034, by the insertion of r-th of delay line type SAW device under different frequency sine wave exciting signal
C is lostf,rComputer is inputted, and uses computer by r-th of delay line type sound surface under different frequency sine wave exciting signal
The insertion loss C of wave devicef,rIt is fitted, obtains using frequency as abscissa, using insertion loss as r-th of delay of ordinate
The frequency loss test curve of line style SAW device；
Step 2035, using computer by the frequency loss test curve of r-th of delay line type SAW device most
Centre frequency measured value F of the big corresponding frequency of peak value as r-th of delay line type SAW devicer, r-th of delay line type
The corresponding insertion loss of peak-peak is r-th of delay line type surface acoustic wave in the frequency loss test curve of SAW device
The insert loss value C of devicer, the insert loss value C of r-th of delay line type SAW devicerCorresponding to -3db
The absolute value of the difference of two frequencies is the bandwidth measurement K of r-th of delay line type SAW devicer。
Above-mentioned a kind of nanometer acoustic effect analysis method based on macrosonics theory, it is characterised in that: in step 204
It is tested using parameter of the terahertz time-domain spectroscopy analyzer to r-th of delay line type SAW device, detailed process is such as
Under:
Step 2041, using terahertz time-domain spectroscopy analyzer Vertical Launch terahertz pulse to r-th of delay line type sound
Surface wave device surface obtains the time domain waveform for the terahertz electromagnetic wave that r-th of delay line type SAW device is radiated,
And it is sent to computer；Later, r-th of delay line type SAW device is dismantled, is hung down using terahertz time-domain spectroscopy analyzer
Straight hair penetrates terahertz pulse, the original time domain waveform of terahertz electromagnetic wave when not loaded delay line type SAW device
Figure, and it is sent to computer；Wherein, the central wavelength of femto-second laser pulse is in the terahertz time-domain spectroscopy analyzer
800nm, the repetition rate of femto-second laser pulse is 80MHz, the terahertz time-domain in the terahertz time-domain spectroscopy analyzer
The pulsewidth of femto-second laser pulse is 100fs in spectroanalysis instrument；
Step 2042 transfers fourier transformation module using computer, respectively to r-th of delay line type SAW device
The time domain waveform of the terahertz electromagnetic wave radiated and terahertz electromagnetic wave when not loading delay line type SAW device
Original time domain waveform diagram carries out Fourier transformation, obtains the Terahertz electromagnetism that r-th of delay line type SAW device is radiated
The original spectrum of the spectrogram of wave and terahertz electromagnetic wave when not loading delay line type SAW device；Wherein, r-th
The spectrogram for the terahertz electromagnetic wave that delay line type SAW device is radiated and delay line type SAW device is not loaded
When the abscissa of original spectrum of terahertz electromagnetic wave be terahertz electromagnetic wave frequency, r-th of delay line type sound surface
The spectrogram for the terahertz electromagnetic wave that wave device is radiated and Terahertz electromagnetism when not loading delay line type SAW device
The ordinate of the original spectrum of wave is the electric field amplitude of terahertz electromagnetic wave；
Step 2043, according to formulaR-th of delay line type SAW device is obtained in terahertz
Insertion loss C ' when hereby wave frequency is df,r,d；Wherein Vy,dIndicate what r-th of delay line type SAW device was radiated
The electric field of the terahertz electromagnetic wave corresponding when abscissa terahertz electromagnetic wave frequency is d in the spectrogram of terahertz electromagnetic wave
Amplitude, Vw,dIt indicates in the original spectrum of terahertz electromagnetic wave when not loading delay line type SAW device in abscissa
The electric field amplitude of terahertz electromagnetic wave frequency terahertz electromagnetic wave corresponding when being d；The value model of terahertz electromagnetic wave frequency d
It encloses for 200GHz~4THz；
Step 2044 and using computer by r-th of delay line type SAW device in different Terahertz frequencies
Insertion loss is fitted, and is obtained using frequency as abscissa, using insertion loss as r-th of delay line type surface acoustic wave of ordinate
The frequency loss test curve of device, and according to the method described in step 306, obtain r-th of delay line type SAW device
Centre frequency measured value Fr, r-th delay line type SAW device insert loss value CrWith r-th of delay line type
The bandwidth measurement K of SAW devicer。
Above-mentioned a kind of nanometer acoustic effect analysis method based on macrosonics theory, it is characterised in that: in step 1
The acquisition of different scale delay line type SAW device, detailed process is as follows:
Step 101 sets the value range of surface acoustic wave wavelength as 4nm~4000nm, and by surface acoustic wave wavelength division
For 4nm≤λa≤ 40nm, 40nm < λb≤ 400nm and 400nm < λcTri- surface acoustic wave range of wavelengths of≤4000nm；Wherein, λa
Indicate surface acoustic wave wavelength any surface acoustic wave wavelength, λ in [4nm~40nm] rangebIndicate surface acoustic wave wavelength in (40nm
~400nm] any surface acoustic wave wavelength in range, λcIndicate surface acoustic wave wavelength (400nm~4000nm] in range it is any
Surface acoustic wave wavelength；
Step 102, as 400nm < λcWhen≤4000nm, according toObtain i-th of delay line type sound
Surface wave device and (i-1)-th delay line type SAW device；Wherein, interdigital in i-th of delay line type SAW device
Electrode with a thickness ofThe width of interdigital electrode is in i-th of delay line type SAW device(i-1)-th is prolonged
In slow line style SAW device interdigital electrode with a thickness ofIt is interdigital in (i-1)-th delay line type SAW device
The width of electrode isWherein, i and i-1 is positive integer, and the value of i and i-1 is in the range of 1~18；
Step 103, as 40nm < λbWhen≤400nm, according toObtain j-th of delay line type sound surface
- 1 delay line type SAW device of wave device and jth；Wherein, interdigital electrode in j-th of delay line type SAW device
With a thickness ofThe width of interdigital electrode is in j-th of delay line type SAW deviceJth -1 delay
In line style SAW device interdigital electrode with a thickness ofInterdigital electricity in -1 delay line type SAW device of jth
The width of pole isWherein, j and j-1 is positive integer, and the value of j and j-1 is in the range of 19~36；
Step 104, as 4nm≤λaWhen≤40nm, according toObtain e-th of delay line type surface acoustic wave
Device and the e-1 delay line type SAW device；Wherein, interdigital electrode in e-th of delay line type SAW device
With a thickness ofThe width of interdigital electrode is in e-th of delay line type SAW deviceThe e-1 delay line type
In SAW device interdigital electrode with a thickness ofInterdigital electrode in the e-1 delay line type SAW device
Width isWherein, e and e-1 is positive integer, and the value of e and e-1 is in the range of 37~46, and Ns=
46。
Compared with the prior art, the present invention has the following advantages:
1, the used nanometer acoustic effect analysis method step based on macrosonics theory is simple, realizes convenient and grasps
Make easy, delay line type SAW device corresponding failure wavelength threshold when obtaining macrosonics theory breaks, it is ensured that delay
The parameter of line style SAW device obtains accurate.
2, during the parameter measurement of used delay line type SAW device, when delay line type SAW device
Centre frequency discreet value be not more than 200GHz when, using vector network analyzer to the parameter of delay line type SAW device
It is tested, when the centre frequency discreet value of delay line type SAW device is greater than 200GHz, using terahertz time-domain light
Spectrum analysis instrument tests the parameter of delay line type SAW device, comprehensively considers the delay line type surface acoustic wave of preparation
Device is nanoscale, and the frequency range of delay line type SAW device will reach Terahertz magnitude, so the present invention point
Not Cai Yong vector network analyzer and terahertz time-domain spectroscopy analyzer to the performance parameter of device: centre frequency, insertion loss
It is tested with bandwidth.When the centre frequency of delay line type SAW device is 200GHz or less, using Network Analyzer
It can be carried out the test of delay line type SAW device performance parameters, but when the centre frequency of delay line type SAW device is
When 200GHz or more, the frequency range of vector network analyzer will be limited, and the performance parameter for being unable to satisfy hyperfrequency device is surveyed
Examination.Vector network analyzer is reachable to the frequency maximum of device detection when not adding frequency expansion module at present
300GHz, but in order to which there are certain reserved ranges for the accuracy of testing result, so the frequency range when device is more than
200GHz carries out the performance test of device, the frequency of terahertz time-domain spectroscopy analyzer using terahertz time-domain spectroscopy analyzer
The test upper limit can reach 4THz, and the performance parameters that can satisfy SAW device under the different nanoscales that the present invention designs are surveyed
Examination, improves the performance parameters test accuracy of SAW device, further increases the standard of macrosonics theory breaks judgement
True property.
3, the present invention is theoretical using macrosonics, obtains the parameter macrosonics theory meter of delay line type SAW device
Calculation value, and the macrosonics calculated value of the parameter of different scale delay line type SAW device and different scale are postponed
The measured value of the parameter of line style SAW device carries out error calculation, obtains different scale delay line type SAW device institute
Corresponding centre frequency error, bandwidth error and insertion loss error, corresponding failure when convenient for analyzing the failure of any parameter
Wavelength threshold.
In conclusion the method for the present invention step is simple, design is rationally and realization is convenient, to different scale delay line type sound table
The parameter of surface wave device is tested, and obtains the measured value of parameters of different scale delay line type SAW device, and by macro
It sees acoustic theory and calculates the parameter calculated value for obtaining different scale delay line type SAW device, by postponing to different scale
The macrosonics of the parameter of the measured value of parameters and different scale delay line type SAW device of line style SAW device is managed
It is analyzed by calculated value, provide failure Rule of judgment and finds out failure threshold, can effectively push acoustical device nanometer acoustic effect
Research.
Below by drawings and examples, technical scheme of the present invention will be described in further detail.
Detailed description of the invention
Fig. 1 is method flow block diagram of the invention.
Specific embodiment
A kind of nanometer acoustic effect analysis method based on macrosonics theory as shown in Figure 1, comprising the following steps:
Step 1: the acquisition of different scale delay line type SAW device: obtaining different scale delay line type sound surface
Wave device arranges each delay line type SAW device according to the sequence of corresponding surface acoustic wave wavelength from big to small
Sequence；Wherein, surface acoustic wave wavelength corresponding to r-th of delay line type SAW device is λr, r is positive integer, and 1≤r≤
Ns, r-th of delay line type SAW device tool is respectively input pin, the first grounding pin, output there are four pin
Pin and the second grounding pin, NsIndicate the sum of delay line type SAW device；
Step 2: the parameter testing of different scale delay line type SAW device: to multiple delay line type surface acoustic waves
The method that device parameters are tested is all the same, wherein the parameter of r-th of delay line type SAW device tested,
Detailed process is as follows:
Step 201, according to formula Fg,r=λr×Vy,r, obtain the centre frequency of r-th of delay line type SAW device
Discreet value Fg,r；According to formulaObtain the bandwidth discreet value K of r-th of delay line type SAW deviceg,r；Its
In, Vy,rIndicate the phase velocity discreet value of delay line type SAW device, Vy,rValue range be 1000m/s~10000m/s,
NcIndicate the logarithm of interdigital electrode in r-th of delay line type SAW device；
Step 202, the centre frequency discreet value F for judging r-th of delay line type SAW deviceg,rWhether≤200GHz
It sets up, works as Fg,rWhen≤200GHz, step 203 is executed；Work as Fg,rWhen > 200GHz, step 204 is executed；
Step 203 is tested using parameter of the vector network analyzer to r-th of delay line type SAW device,
Obtain the centre frequency measured value F of r-th of delay line type SAW devicer, r-th delay line type SAW device insert
Enter loss measurement value SrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 204 is carried out using parameter of the terahertz time-domain spectroscopy analyzer to r-th of delay line type SAW device
Test obtains the centre frequency measured value F of r-th of delay line type SAW devicer, r-th of delay line type surface acoustic wave device
The insert loss value S of partrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 3: acquisition and the parameter error of different scale delay line type SAW device macrosonics calculated value
It obtains:
Step 301, boundary condition is that stress connects at interdigital electrode and piezoelectric dielectric in delay line type SAW device
Continuous and potential is continuous, and interdigital electrode and piezoelectric dielectric place are electric in the normal direction of plane in delay line type SAW device
It is displaced under discontinuity condition, using the finite element method-boundary element method of the coupled wave equation based on piezoelectric dielectric, obtains r-th and prolong
The COM parameter of slow line style SAW device；Computer transfers COM model, and inputs r-th of delay line type SAW device
COM parameter, r-th of delay line type when obtaining the output terminal shortcircuit of r-th of delay line type SAW device according to COM model
The input admittance Y of SAW device11, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type
The output admittance Y of SAW device22, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type
The output end of SAW device to r-th of delay line type SAW device input terminal transfer admittance Y12；
Step 302, according to formulaObtain r-th of delay line type sound surface
The positive transmission coefficient S of wave device21；Wherein, Z1Indicate the sending-end impedance matching of r-th of delay line type SAW device,
Z2Indicate the output end impedance matching of r-th of delay line type SAW device, and Z1=Z2=50 ohm, R1It indicates to prolong for r-th
The sending-end impedance real part of slow line style SAW device, R2Indicate the output end resistance of r-th of delay line type SAW device
Anti- real part, and R1=R2=50 ohm；
Step 303, according to formulaObtain the insertion loss of r-th of delay line type SAW device
Macroscopical calculated value
Step 304, the input pin using computer to r-th of delay line type SAW device apply frequency conversion sine wave
Pumping signal, the frequency range of frequency conversion sine wave exciting signal are 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal is from frequently
Rate is 0.7Fg,rWith stepping fbjTo 1.3Fg,rFrequency sweep, and step 301 is repeated several times to step 303, obtain different frequency sine wave
The insertion loss macroscopic view calculated value of r-th of delay line type SAW device under pumping signalWherein, frequency conversion sine wave
The amplitude range of pumping signal is 1 volt~5 volts, stepping fbjValue be 100kHz；
Step 305, using computer by r-th of delay line type surface acoustic wave device under different frequency sine wave exciting signal
The insertion loss macroscopic view calculated value of partIt is fitted, obtains using frequency as abscissa, using insertion loss as the r of ordinate
The frequency loss calculated curve of a delay line type SAW device；
Step 306, using computer will in the frequency loss calculated curve of r-th of delay line type SAW device it is maximum
The corresponding frequency of peak value as r-th of delay line type SAW device centre frequency calculated value and be denoted asProlong for r-th
The corresponding insertion loss of peak-peak is r-th of delay line type sound in the frequency loss calculated curve of slow line style SAW device
The insertion loss calculated value of surface wave deviceThe insertion loss calculated value of r-th of delay line type SAW deviceThe absolute value of the difference of two corresponding frequencies is the bandwidth calculation value of r-th of delay line type SAW device
Step 307, according to formulaObtain the center frequency of the acoustical device of r-th of interdigital electrode excitation
Rate relative error Δ Fr, according to formulaObtain the bandwidth phase of the acoustical device of r-th of interdigital electrode excitation
To error delta Kr, according to formulaObtain the insertion loss phase of the acoustical device of r-th of interdigital electrode excitation
To error delta Cr；
Step 4: the judgement of macrosonics theory breaks and failure threshold determine:
Use computer by surface acoustic wave wavelength corresponding to delay line type SAW device for abscissa, with center frequency
Rate absolute relative error is ordinate, obtains surface acoustic wave wavelength and frequency error curve figure；Worked as using computer judgement | Δ
Fr| < | Δ Fr+1| < | Δ Fr+2| < | Δ Fr+3| < | Δ Fr+4|, and 3%≤| Δ Fr| < | Δ Fr+1| < | Δ Fr+2| < | Δ
Fr+3| < | Δ Fr+4| when establishment, then centre frequency absolute relative error | Δ Fr| corresponding surface acoustic wave wavelength is macroscopic view
Delay line type SAW device corresponding failure wavelength threshold when acoustic theory fails；Wherein, | Δ Fr+1| indicate r+1
The centre frequency absolute relative error of delay line type SAW device, | Δ Fr+2| indicate the r+2 delay line type sound surface
The centre frequency absolute relative error of wave device, | Δ Fr+3| indicate the center frequency of the r+3 delay line type SAW device
Rate absolute relative error, | Δ Fr+4| indicate that the centre frequency relative error of the r+4 delay line type SAW device is absolute
Value, r+1, r+2, r+3 and r+4 are positive integer, and the value of r+1, r+2, r+3 and r+4 are in 1~NsIn range；
Or using computer using surface acoustic wave wavelength corresponding to delay line type SAW device as abscissa, with
Bandwidth absolute relative error is ordinate, obtains surface acoustic wave wavelength and bandwidth error curve graph；Worked as using computer judgement |
ΔKr| < | Δ Kr+1| < | Δ Kr+2| < | Δ Kr+3| < | Δ Kr+4|, and 3% < | Δ Kr| < | Δ Kr+1| < | Δ Kr+2| < | Δ
Kr+3| < | Δ Kr+4| when establishment, then bandwidth absolute relative error | Δ Kr| corresponding surface acoustic wave wavelength is macrosonics
Delay line type SAW device corresponding failure wavelength threshold when theory breaks；Wherein, | Δ Kr+1| indicate the r+1 delay
The bandwidth absolute relative error of line style SAW device, | Δ Kr+2| indicate the r+2 delay line type SAW device
Bandwidth absolute relative error, | Δ Kr+3| indicate that the bandwidth relative error of the r+3 delay line type SAW device is absolute
Value, | Δ Kr+4| indicate the bandwidth absolute relative error of the r+4 delay line type SAW device；
Or using computer using surface acoustic wave wavelength corresponding to delay line type SAW device as abscissa, with
Insertion loss absolute relative error is ordinate, obtains surface acoustic wave wavelength and insertion loss absolute relative error curve
Figure；Worked as using computer judgement | Δ Cr| < | Δ Cr+1| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4|, and 3% < | Δ Cr| < |
ΔCr+1| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4| when establishment, then insertion loss absolute relative error | Δ Cr| it is corresponding
Surface acoustic wave wavelength be macrosonics theory breaks when the corresponding failure wavelength threshold of delay line type SAW device；Its
In, | Δ Cr+1| indicate the insertion loss absolute relative error of the r+1 delay line type SAW device, | Δ Cr+2| it indicates
The insertion loss absolute relative error of the r+2 delay line type SAW device, | Δ Cr+3| indicate the r+3 delay line
The insertion loss absolute relative error of type SAW device, | Δ Cr+4| indicate the r+4 delay line type SAW device
Insertion loss absolute relative error.
In the present embodiment, using vector network analyzer to the ginseng of r-th of delay line type SAW device in step 203
Number is tested, and detailed process is as follows:
The output test port of the vector network analyzer is passed through output lead and r-th of delay line by step 2031
The input pin of type SAW device connects, and the input test port of vector network analyzer is passed through input lead and r
The output pin of a delay line type SAW device connects, the first grounding pin of r-th of delay line type SAW device
It is connect with the grounding ports of the vector network analyzer with the second grounding pin；
Step 2032, the operation vector network analyzer, make the output test port pair of the vector network analyzer
The input pin of r-th of delay line type SAW device applies frequency conversion sine wave exciting signal, frequency conversion sine wave exciting signal
Frequency range be 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal from frequency be 0.7Fg,rWith stepping fbjTo 1.3Fg,rIt sweeps
Frequently, when while applying frequency conversion sine wave exciting signal during the input test port of vector network analyzer acquisition frequency sweep
The response signal of the output pin of r-th of delay line type SAW device；
Step 2033, according to formulaObtain r-th under different frequency sine wave exciting signal
The insertion loss C of delay line type SAW devicef,r, VsIndicate the amplitude of frequency conversion sine wave exciting signal, VfIt indicates to prolong for r-th
The amplitude of response signal of the output pin of slow line style SAW device under different frequency sine wave exciting signal；
Step 2034, by the insertion of r-th of delay line type SAW device under different frequency sine wave exciting signal
C is lostf,rComputer is inputted, and uses computer by r-th of delay line type sound surface under different frequency sine wave exciting signal
The insertion loss C of wave devicef,rIt is fitted, obtains using frequency as abscissa, using insertion loss as r-th of delay of ordinate
The frequency loss test curve of line style SAW device；
Step 2035, using computer by the frequency loss test curve of r-th of delay line type SAW device most
Centre frequency measured value F of the big corresponding frequency of peak value as r-th of delay line type SAW devicer, r-th of delay line type
The corresponding insertion loss of peak-peak is r-th of delay line type surface acoustic wave in the frequency loss test curve of SAW device
The insert loss value C of devicer, the insert loss value C of r-th of delay line type SAW devicerCorresponding to -3dB
The absolute value of the difference of two frequencies is the bandwidth measurement K of r-th of delay line type SAW devicer。
In the present embodiment, using terahertz time-domain spectroscopy analyzer to r-th of delay line type surface acoustic wave device in step 204
The parameter of part is tested, and detailed process is as follows:
Step 2041, using terahertz time-domain spectroscopy analyzer Vertical Launch terahertz pulse to r-th of delay line type sound
Surface wave device surface obtains the time domain waveform for the terahertz electromagnetic wave that r-th of delay line type SAW device is radiated,
And it is sent to computer；Later, r-th of delay line type SAW device is dismantled, is hung down using terahertz time-domain spectroscopy analyzer
Straight hair penetrates terahertz pulse, the original time domain waveform of terahertz electromagnetic wave when not loaded delay line type SAW device
Figure, and it is sent to computer；Wherein, the central wavelength of femto-second laser pulse is in the terahertz time-domain spectroscopy analyzer
800nm, the repetition rate of femto-second laser pulse is 80MHz, the terahertz time-domain in the terahertz time-domain spectroscopy analyzer
The pulsewidth of femto-second laser pulse is 100fs in spectroanalysis instrument；
Step 2042 transfers fourier transformation module using computer, respectively to r-th of delay line type SAW device
The time domain waveform of the terahertz electromagnetic wave radiated and terahertz electromagnetic wave when not loading delay line type SAW device
Original time domain waveform diagram carries out Fourier transformation, obtains the Terahertz electromagnetism that r-th of delay line type SAW device is radiated
The original spectrum of the spectrogram of wave and terahertz electromagnetic wave when not loading delay line type SAW device；Wherein, r-th
The spectrogram for the terahertz electromagnetic wave that delay line type SAW device is radiated and delay line type SAW device is not loaded
When the abscissa of original spectrum of terahertz electromagnetic wave be terahertz electromagnetic wave frequency, r-th of delay line type sound surface
The spectrogram for the terahertz electromagnetic wave that wave device is radiated and Terahertz electromagnetism when not loading delay line type SAW device
The ordinate of the original spectrum of wave is the electric field amplitude of terahertz electromagnetic wave；
Step 2043, according to formulaR-th of delay line type SAW device is obtained too
Insertion loss C ' when hertz wave frequency is df,r,d；Wherein Vy,dIndicate that r-th of delay line type SAW device is radiated
Terahertz electromagnetic wave spectrogram in when abscissa terahertz electromagnetic wave frequency is d corresponding terahertz electromagnetic wave electricity
Field amplitude, Vw,dIt indicates in the original spectrum of terahertz electromagnetic wave when not loading delay line type SAW device in horizontal seat
Mark the electric field amplitude of terahertz electromagnetic wave corresponding when terahertz electromagnetic wave frequency is d；The value of terahertz electromagnetic wave frequency d
Range is 200GHz~4THz；
Step 2044 and using computer by r-th of delay line type SAW device in different Terahertz frequencies
Insertion loss is fitted, and is obtained using frequency as abscissa, using insertion loss as r-th of delay line type surface acoustic wave of ordinate
The frequency loss test curve of device, and according to the method described in step 306, obtain r-th of delay line type SAW device
Centre frequency measured value Fr, r-th delay line type SAW device insert loss value CrWith r-th of delay line type
The bandwidth measurement K of SAW devicer。
In the present embodiment, the acquisition of different scale delay line type SAW device in step 1, detailed process is as follows:
Step 101 sets the value range of surface acoustic wave wavelength as 4nm~4000nm, and by surface acoustic wave wavelength division
For 4nm≤λa≤ 40nm, 40nm < λb≤ 400nm and 400nm < λcTri- surface acoustic wave range of wavelengths of≤4000nm；Wherein, λa
Indicate surface acoustic wave wavelength any surface acoustic wave wavelength, λ in [4nm~40nm] rangebIndicate surface acoustic wave wavelength in (40nm
~400nm] any surface acoustic wave wavelength in range, λcIndicate surface acoustic wave wavelength (400nm~4000nm] in range it is any
Surface acoustic wave wavelength；
Step 102, as 400nm < λcWhen≤4000nm, according toObtain i-th of delay line type sound
Surface wave device and (i-1)-th delay line type SAW device；Wherein, interdigital in i-th of delay line type SAW device
Electrode with a thickness ofThe width of interdigital electrode is in i-th of delay line type SAW device(i-1)-th
In delay line type SAW device interdigital electrode with a thickness ofIt is pitched in (i-1)-th delay line type SAW device
Refer to electrode width beWherein, i and i-1 is positive integer, and the value of i and i-1 is in the range of 1~18；
Step 103, as 40nm < λbWhen≤400nm, according toObtain j-th of delay line type sound surface
- 1 delay line type SAW device of wave device and jth；Wherein, interdigital electrode in j-th of delay line type SAW device
With a thickness ofThe width of interdigital electrode is in j-th of delay line type SAW deviceJth -1 delay
In line style SAW device interdigital electrode with a thickness ofInterdigital electricity in -1 delay line type SAW device of jth
The width of pole isWherein, j and j-1 is positive integer, and the value of j and j-1 is in the range of 19~36；
Step 104, as 4nm≤λaWhen≤40nm, according toObtain e-th of delay line type surface acoustic wave
Device and the e-1 delay line type SAW device；Wherein, interdigital electrode in e-th of delay line type SAW device
With a thickness ofThe width of interdigital electrode is in e-th of delay line type SAW deviceThe e-1 delay line
In type SAW device interdigital electrode with a thickness ofInterdigital electrode in the e-1 delay line type SAW device
Width beWherein, e and e-1 is positive integer, and the value of e and e-1 is in the range of 37~46, and Ns=
46。
In the present embodiment, different scale prolongs in the used nanometer acoustic effect analysis method based on macrosonics theory
The value range of surface acoustic wave wavelength corresponding to slow line style SAW device is 4nm~4000nm, and by surface acoustic wave wave
Length is divided into 4nm≤λa≤ 40nm, 40nm < λb≤ 400nm and 400nm < λcTri- surface acoustic wave range of wavelengths of≤4000nm,
It is because the centre frequency of delay line type SAW device is with surface acoustic wave wavelength at anti-under conditions of phase velocity is certain
Than high frequency, the micromation of delay line type SAW device being realized by reducing surface acoustic wave wavelength, when delay line type sound table
When surface wave device phase velocity is 4000m/s, surface acoustic wave wavelength is 4nm, the centre frequency of delay line type SAW device can
Up to 1000GHz, 1nm, i.e. sound table can only be differentiated according to the inter-digital electrode width limit of current delay line type SAW device
Surface wave wavelength is 4nm；It can be obtained from macroscopical acoustic wave theory and the dynamic (dynamical) sunykatuib analysis of micro molecule, failure wavelength threshold size is about
For tens nanometers, therefore be that 4nm reduces surface acoustic wave wavelength with step-length in the section 4nm~40nm, in 40nm~400nm with
20nm is step-length, and when wavelength is 400nm or more, macrosonics theory stands good, setting surface acoustic wave wavelength 400nm~
4000nm is the precision for confirmatory experiment, and the thickness of interdigital electrode also reduces with wavelength ratio, when surface acoustic wave wavelength is
When 4nm, the thickness of interdigital electrode is only 1nm in delay line type SAW device, considers that interdigital electrode is subjected to certain electricity
Pressure set electrode minimum thickness as 1nm to prevent electrode breakdown, when surface acoustic wave wavelength is 4000nm, interdigital electrode
Thickness has reached 1000nm, device will be made to generate ripple in biggish band so that sound wave generates biggish reflection between interdigital electrode,
Device performance is seriously affected, therefore wavelength is chosen at 4nm~4000nm, and as three sections reduce, each section
Step-length also accurately obtains failure wavelength threshold with this in reduction, studies convenient for nanometer acoustic effect.
In the present embodiment, when the centre frequency discreet value of delay line type SAW device is not more than 200GHz, use
Vector network analyzer tests the parameter of delay line type SAW device, when in delay line type SAW device
When frequency of heart discreet value is greater than 200GHz, using terahertz time-domain spectroscopy analyzer to the parameter of delay line type SAW device
It is tested, the delay line type SAW device for comprehensively considering preparation is nanoscale, delay line type SAW device
Frequency range will reach Terahertz magnitude, so vector network analyzer and terahertz time-domain spectroscopy is respectively adopted in the present invention
Performance parameter of the analyzer to device: centre frequency, insertion loss and bandwidth are tested.In delay line type SAW device
Device frequency be 200GHz or less when, using Network Analyzer can be carried out delay line type SAW device performance parameters survey
Examination, but when delay line type SAW device frequency is 200GHz or more, the frequency range of vector network analyzer will
It is limited, it is unable to satisfy the performance parameter test of hyperfrequency device.Vector network analyzer is not adding frequency expansion module at present
When, to the frequency maximum of device detection up to 300GHz, but in order to which there are certain reserved for the accuracy of testing result
Range is surveyed so the frequency range when device is more than 200GHz using the performance that terahertz time-domain spectroscopy analyzer carries out device
Examination, the frequency test upper limit of the system can reach 4THZ, can satisfy sound surface device under the different nanoscales that the present invention designs
The performance parameters of part are tested, and the performance parameters test for improving sound surface device is accurate, further increase the failure of sound surface device
What is judged is accurate.
The above is only presently preferred embodiments of the present invention, is not intended to limit the invention in any way, it is all according to the present invention
Technical spirit any simple modification to the above embodiments, change and equivalent structural changes, still fall within skill of the present invention
In the protection scope of art scheme.
Claims (4)
1. a kind of nanometer acoustic effect analysis method based on macrosonics theory, which comprises the following steps:
Step 1: the acquisition of different scale delay line type SAW device: obtaining different scale delay line type surface acoustic wave device
Each delay line type SAW device is ranked up by part according to the sequence of corresponding surface acoustic wave wavelength from big to small；
Wherein, surface acoustic wave wavelength corresponding to r-th of delay line type SAW device is λr, r is positive integer, and 1≤r≤Ns, institute
State r-th delay line type SAW device tool there are four pin be respectively input pin, the first grounding pin, output pin and
Second grounding pin, NsIndicate the sum of delay line type SAW device；
Step 2: the parameter testing of different scale delay line type SAW device: to multiple delay line type SAW devices
The method that parameter is tested is all the same, wherein tests the parameter of r-th of delay line type SAW device, specifically
Process is as follows:
Step 201, according to formula Fg,r=λr×Vy,r, obtain the centre frequency discreet value of r-th of delay line type SAW device
Fg,r；According to formulaObtain the bandwidth discreet value K of r-th of delay line type SAW deviceg,r；Wherein, Vy,rTable
Show delay line type SAW device phase velocity discreet value, Vy,rValue range be 1000m/s~10000m/s, NcIndicate r
The logarithm of interdigital electrode in a delay line type SAW device；
Step 202, the centre frequency discreet value F for judging r-th of delay line type SAW deviceg,rWhether≤200GHz is true,
Work as Fg,rWhen≤200GHz, step 203 is executed；Work as Fg,rWhen > 200GHz, step 204 is executed；
Step 203 is tested using parameter of the vector network analyzer to r-th of delay line type SAW device, is obtained
The centre frequency measured value F of r-th of delay line type SAW devicer, r-th delay line type SAW device insertion damage
Consume measured value SrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 204 is surveyed using parameter of the terahertz time-domain spectroscopy analyzer to r-th of delay line type SAW device
Examination obtains the centre frequency measured value F of r-th of delay line type SAW devicer, r-th of delay line type SAW device
Insert loss value SrWith the bandwidth measurement K of r-th of delay line type SAW devicer；
Step 3: the acquisition of different scale delay line type SAW device macrosonics calculated value and parameter error obtain
It takes:
Step 301, in delay line type SAW device at interdigital electrode and piezoelectric dielectric boundary condition be stress it is continuous and
Potential is continuous, and the normal direction dielectric displacement of interdigital electrode and piezoelectric dielectric place in plane in delay line type SAW device
Under discontinuity condition, using the finite element method-boundary element method of the coupled wave equation based on piezoelectric dielectric, r-th of delay line is obtained
The COM parameter of type SAW device；Computer transfers COM model, and inputs r-th of delay line type SAW device
COM parameter, r-th of delay line type sound when obtaining the output terminal shortcircuit of r-th of delay line type SAW device according to COM model
The input admittance Y of surface wave device11, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type sound
The output admittance Y of surface wave device22, r-th delay line type SAW device input terminal shortcircuit when r-th of delay line type sound
The output end of surface wave device to r-th of delay line type SAW device input terminal transfer admittance Y12；
Step 302, according to formulaObtain r-th of delay line type surface acoustic wave device
The positive transmission coefficient S of part21；Wherein, Z1Indicate the sending-end impedance matching of r-th of delay line type SAW device, Z2Table
Show the output end impedance matching of r-th of delay line type SAW device, and Z1=Z2=50, R1Indicate r-th of delay line type sound
The sending-end impedance real part of surface wave device, R2Indicate the output end impedance real part of r-th of delay line type SAW device, and
R1=R2=50；
Step 303, according to formulaObtain the insertion loss macroscopic view of r-th of delay line type SAW device
Calculated value
Step 304, the input pin using computer to r-th of delay line type SAW device apply frequency conversion sine-wave excitation
Signal, the frequency range of frequency conversion sine wave exciting signal are 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal is from frequency
0.7Fg,rWith stepping fbjTo 1.3Fg,rFrequency sweep, and step 301 is repeated several times to step 303, obtain different frequency sine-wave excitation
The insertion loss macroscopic view calculated value of r-th of delay line type SAW device under signalWherein, frequency conversion sine-wave excitation
The amplitude range of signal is 1 volt~5 volts, stepping fbjValue be 100kHz；
Step 305, using computer by r-th of delay line type SAW device under different frequency sine wave exciting signal
Insertion loss macroscopic view calculated valueIt is fitted, obtains r-th using frequency as abscissa, using insertion loss as ordinate and prolong
The frequency loss calculated curve of slow line style SAW device；
Step 306, using computer by peak-peak in the frequency loss calculated curve of r-th of delay line type SAW device
Corresponding frequency as r-th of delay line type SAW device centre frequency calculated value and be denoted asR-th of delay line
The corresponding insertion loss of peak-peak is r-th of delay line type sound surface in the frequency loss calculated curve of type SAW device
The insertion loss calculated value of wave deviceThe insertion loss calculated value of r-th of delay line type SAW device
The absolute value of the difference of two corresponding frequencies is the bandwidth calculation value of r-th of delay line type SAW device
Step 307, according to formulaObtain the centre frequency phase of the acoustical device of r-th of interdigital electrode excitation
To error delta Fr, according to formulaThe bandwidth for obtaining the acoustical device of r-th of interdigital electrode excitation is opposite accidentally
Poor Δ Kr, according to formulaThe insertion loss for obtaining the acoustical device of r-th of interdigital electrode excitation is opposite accidentally
Poor Δ Cr；
Step 4: the judgement of macrosonics theory breaks and failure threshold determine:
Use computer by surface acoustic wave wavelength corresponding to delay line type SAW device for abscissa, with centre frequency phase
It is ordinate to Error Absolute Value, obtains surface acoustic wave wavelength and frequency error curve figure；Worked as using computer judgement | Δ Fr|
< | Δ Fr+1| < | Δ Fr+2| < | Δ Fr+3| < | Δ Fr+4|, and 3% < | Δ Fr| < | Δ Fr+1| < | Δ Fr+2| < | Δ Fr+3|
< | Δ Fr+4| when establishment, then centre frequency absolute relative error | Δ Fr| corresponding surface acoustic wave wavelength is macrosonics
Delay line type SAW device corresponding failure wavelength threshold when theory breaks；Wherein, | Δ Fr+1| indicate the r+1 delay
The centre frequency absolute relative error of line style SAW device, | Δ Fr+2| indicate the r+2 delay line type surface acoustic wave device
The centre frequency absolute relative error of part, | Δ Fr+3| indicate the centre frequency phase of the r+3 delay line type SAW device
To Error Absolute Value, | Δ Fr+4| indicate the centre frequency absolute relative error of the r+4 delay line type SAW device, r
+ 1, r+2, r+3 and r+4 are positive integer, and the value of r+1, r+2, r+3 and r+4 are in 1~NsIn range；
Or using corresponding to delay line type SAW device, surface acoustic wave wavelength is as abscissa using computer, with bandwidth
Absolute relative error is ordinate, obtains surface acoustic wave wavelength and bandwidth error curve graph；Worked as using computer judgement | Δ Kr
| < | Δ Kr+1| < | Δ Kr+2| < | Δ Kr+3| < | Δ Kr+4|, and 3% < | Δ Kr| < | Δ Kr+1| < | Δ Kr+2| < | Δ Kr+3
| < | Δ Kr+4| when establishment, then bandwidth absolute relative error | Δ Kr| corresponding surface acoustic wave wavelength is that macrosonics is theoretical
Delay line type SAW device corresponding failure wavelength threshold when failure；Wherein, | Δ Kr+1| indicate the r+1 delay line type
The bandwidth absolute relative error of SAW device, | Δ Kr+2| indicate the bandwidth of the r+2 delay line type SAW device
Absolute relative error, | Δ Kr+3| indicate the bandwidth absolute relative error of the r+3 delay line type SAW device, | Δ
Kr+4| indicate the bandwidth absolute relative error of the r+4 delay line type SAW device；
Or using computer using surface acoustic wave wavelength corresponding to delay line type SAW device as abscissa, with insertion
Loss absolute relative error is ordinate, obtains surface acoustic wave wavelength and insertion loss absolute relative error curve graph；It adopts
Judge to work as with computer | Δ Cr| < | Δ Cr+1| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4|, and 3% < | Δ Cr| < | Δ Cr+1
| < | Δ Cr+2| < | Δ Cr+3| < | Δ Cr+4| when establishment, then insertion loss absolute relative error | Δ Cr| corresponding sound table
Delay line type SAW device corresponding failure wavelength threshold when surface wave wavelength is macrosonics theory breaks；Wherein, | Δ
Cr+1| indicate the insertion loss absolute relative error of the r+1 delay line type SAW device, | Δ Cr+2| indicate r+2
The insertion loss absolute relative error of a delay line type SAW device, | Δ Cr+3| indicate the r+3 delay line type sound table
The insertion loss absolute relative error of surface wave device, | Δ Cr+4| indicate the insertion of the r+4 delay line type SAW device
Absolute relative error is lost.
2. a kind of nanometer acoustic effect analysis method based on macrosonics theory described in accordance with the claim 1, feature exist
In: the parameter of r-th of delay line type SAW device is tested using vector network analyzer in step 203, specifically
Process is as follows:
The output test port of the vector network analyzer is passed through output lead and r-th of delay line type sound by step 2031
The input pin of surface wave device connects, and the input test port of vector network analyzer is prolonged by input lead with r-th
The output pin connection of slow line style SAW device, the first grounding pin of r-th delay line type SAW device and the
Two grounding pins are connect with the grounding ports of the vector network analyzer；
Step 2032, the operation vector network analyzer, make the output test port of the vector network analyzer to r-th
The input pin of delay line type SAW device applies frequency conversion sine wave exciting signal, the frequency of frequency conversion sine wave exciting signal
Range is 0.7Fg,r~1.3Fg,r, frequency conversion sine wave exciting signal from frequency be 0.7Fg,rWith stepping fbjTo 1.3Fg,rFrequency sweep, together
The input test port of Shi Suoshu vector network analyzer obtains when frequency sweep applies frequency conversion sine wave exciting signal in the process r-th
The response signal of the output pin of delay line type SAW device；
Step 2033, according to formulaObtain r-th of delay line under different frequency sine wave exciting signal
The insertion loss C of type SAW devicef,r, VsIndicate the amplitude of frequency conversion sine wave exciting signal, VfIndicate r-th of delay line type
The amplitude of response signal of the output pin of SAW device under different frequency sine wave exciting signal；
Step 2034, by the insertion loss of r-th of delay line type SAW device under different frequency sine wave exciting signal
Cf,rComputer is inputted, and uses computer by r-th of delay line type surface acoustic wave device under different frequency sine wave exciting signal
The insertion loss C of partf,rIt is fitted, obtains using frequency as abscissa, using insertion loss as r-th of delay line type of ordinate
The frequency loss test curve of SAW device；
Step 2035, using computer by maximum peak in the frequency loss test curve of r-th of delay line type SAW device
It is worth centre frequency measured value F of the corresponding frequency as r-th of delay line type SAW devicer, r-th of delay line type sound table
The corresponding insertion loss of peak-peak is r-th of delay line type SAW device in the frequency loss test curve of surface wave device
Insert loss value Cr, the insert loss value C of r-th of delay line type SAW devicerTwo corresponding to -3dB
The absolute value of the difference of frequency is the bandwidth measurement K of r-th of delay line type SAW devicer。
3. a kind of nanometer acoustic effect analysis method based on macrosonics theory described in accordance with the claim 1, feature exist
In: the parameter of r-th of delay line type SAW device is surveyed using terahertz time-domain spectroscopy analyzer in step 204
Examination, detailed process is as follows:
Step 2041, using terahertz time-domain spectroscopy analyzer Vertical Launch terahertz pulse to r-th of delay line type sound surface
Wave device surface obtains the time domain waveform for the terahertz electromagnetic wave that r-th of delay line type SAW device is radiated, concurrently
It send to computer；Later, r-th of delay line type SAW device is dismantled, is vertically sent out using terahertz time-domain spectroscopy analyzer
Terahertz pulse is penetrated, the original time domain waveform diagram of terahertz electromagnetic wave when not loaded delay line type SAW device, and
It is sent to computer；Wherein, the central wavelength of femto-second laser pulse is 800nm, institute in the terahertz time-domain spectroscopy analyzer
The repetition rate for stating femto-second laser pulse in terahertz time-domain spectroscopy analyzer is 80MHz, the terahertz time-domain spectroscopy analysis
The pulsewidth of femto-second laser pulse is 100fs in instrument；
Step 2042 transfers fourier transformation module using computer, respectively to r-th of delay line type SAW device institute spoke
The time domain waveform for the terahertz electromagnetic wave penetrated and when not loading delay line type SAW device terahertz electromagnetic wave it is original
Time domain waveform carries out Fourier transformation, obtains the terahertz electromagnetic wave that r-th of delay line type SAW device is radiated
The original spectrum of spectrogram and terahertz electromagnetic wave when not loading delay line type SAW device；Wherein, r-th of delay
The spectrogram for the terahertz electromagnetic wave that line style SAW device is radiated and when not loading delay line type SAW device
The abscissa of the original spectrum of terahertz electromagnetic wave is terahertz electromagnetic wave frequency, r-th of delay line type surface acoustic wave device
The spectrogram for the terahertz electromagnetic wave that part is radiated and terahertz electromagnetic wave when not loading delay line type SAW device
The ordinate of original spectrum is the electric field amplitude of terahertz electromagnetic wave；
Step 2043, according to formulaR-th of delay line type SAW device is obtained in Terahertz electricity
Insertion loss C ' when magnetic wave frequency is df,r,d；Wherein Vy,dIndicate the terahertz that r-th of delay line type SAW device is radiated
The hereby electric field vibration of terahertz electromagnetic wave corresponding when abscissa terahertz electromagnetic wave frequency is d in the spectrogram of electromagnetic wave
Width, Vw,dIndicate in the original spectrum of terahertz electromagnetic wave when not loading delay line type SAW device abscissa too
The electric field amplitude of hertz wave frequency terahertz electromagnetic wave corresponding when being d；The value range of terahertz electromagnetic wave frequency d
For 200GHz~4THz；
Step 2044 simultaneously uses insertion of the computer by r-th of delay line type SAW device in different Terahertz frequencies
Loss is fitted, and is obtained using frequency as abscissa, using insertion loss as r-th of delay line type SAW device of ordinate
Frequency loss test curve obtain in r-th of delay line type SAW device and according to the method described in step 306
Frequency of heart measured value Fr, r-th delay line type SAW device insert loss value CrWith r-th of delay line type sound table
The bandwidth measurement K of surface wave devicer。
4. a kind of nanometer acoustic effect analysis method based on macrosonics theory described in accordance with the claim 1, feature exist
In: the acquisition of different scale delay line type SAW device in step 1, detailed process is as follows:
Step 101 sets the value range of surface acoustic wave wavelength as 4nm~4000nm, and is 4nm by surface acoustic wave wavelength division
≤λa≤ 40nm, 40nm < λb≤ 400nm and 400nm < λcTri- surface acoustic wave range of wavelengths of≤4000nm；Wherein, λaIt indicates
Surface acoustic wave wavelength any surface acoustic wave wavelength, λ in [4nm~40nm] rangebIndicate surface acoustic wave wavelength (40nm~
400nm] any surface acoustic wave wavelength in range, λcIndicate surface acoustic wave wavelength (400nm~4000nm] any sound in range
Surface wave wavelength；
Step 102, as 400nm < λcWhen≤4000nm, according toObtain i-th of delay line type sound surface
Wave device and (i-1)-th delay line type SAW device；Wherein, interdigital electrode in i-th of delay line type SAW device
With a thickness ofThe width of interdigital electrode is in i-th of delay line type SAW device(i-1)-th delay line
In type SAW device interdigital electrode with a thickness ofInterdigital electrode in (i-1)-th delay line type SAW device
Width beWherein, i and i-1 is positive integer, and the value of i and i-1 is in the range of 1~18；
Step 103, as 40nm < λbWhen≤400nm, according toObtain j-th of delay line type surface acoustic wave device
- 1 delay line type SAW device of part and jth；Wherein, in j-th of delay line type SAW device interdigital electrode thickness
Degree isThe width of interdigital electrode is in j-th of delay line type SAW device- 1 delay line type of jth
In SAW device interdigital electrode with a thickness ofInterdigital electrode in -1 delay line type SAW device of jth
Width isWherein, j and j-1 is positive integer, and the value of j and j-1 is in the range of 19~36；
Step 104, as 4nm≤λaWhen≤40nm, according toObtain e-th of delay line type SAW device
With the e-1 delay line type SAW device；Wherein, in e-th of delay line type SAW device interdigital electrode thickness
ForThe width of interdigital electrode is in e-th of delay line type SAW deviceThe e-1 delay line type sound
In surface wave device interdigital electrode with a thickness ofThe width of interdigital electrode in the e-1 delay line type SAW device
Degree isWherein, e and e-1 is positive integer, and the value of e and e-1 is in the range of 37~46, and Ns=46.
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